CN103063154A - Detection device and method of cone mirror - Google Patents

Detection device and method of cone mirror Download PDF

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Publication number
CN103063154A
CN103063154A CN2012104415654A CN201210441565A CN103063154A CN 103063154 A CN103063154 A CN 103063154A CN 2012104415654 A CN2012104415654 A CN 2012104415654A CN 201210441565 A CN201210441565 A CN 201210441565A CN 103063154 A CN103063154 A CN 103063154A
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CN
China
Prior art keywords
axicon lens
grating
fizeau interferometer
glass
substrate
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CN2012104415654A
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Chinese (zh)
Inventor
程珂
叶青
魏向荣
施丽敏
李旭峰
査雨
顾亚平
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上海现代先进超精密制造中心有限公司
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Priority to CN2012104415654A priority Critical patent/CN103063154A/en
Publication of CN103063154A publication Critical patent/CN103063154A/en

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Abstract

A detection device of a cone mirror is composed of a Fizeau interferomenter and a glass base provided with circular grating. The A face of the glass base is used as a reference surface, the B surface is manufactured into the circular grating as a grating surface in photolithography, the grating surface B of the glass base is perpendicular to monochromatic parallel light outputted by the Fizeau interferomenter, and the detection method of the cone mirror is also disclosed. The detection device and the method of the cone mirror achieves detection of various kinds of cone mirrors and makes up blanks in the prior art.

Description

A kind of axicon lens pick-up unit and detection method thereof

Technical field

The present invention relates to optical detection, particularly a kind of device that detects axicon lens based on fizeau interferometer.And detection method.

Background technology

The traditional detection method of optical element and technology have been continued to use many decades.Optical detection relates to detected element material, bore, kind and measuring technology, instrument and equipment etc.Detected element of a great variety includes parallel flat, sphere, aspheric surface, free form surface, diffraction grating, axicon lens, cylindrical lens etc.Key instrument commonly used in the optical detection can be divided into interferometer class, surface profiler class, MTF tester class, precision spherometer class, center deviation tester class and other instruments etc.

Both at home and abroad all at development and development advanced instrument separately.Domestic interferometer manufacturing firm take Institutes Of Technology Of Nanjing and Chengdu Tai Ke company as representative, the product bore of all kinds of Digital interferometers has Φ 25mm ~ Φ 600mm; All kinds of interferometers from bore 4 " ~ 32 " of import take U.S. Zygo company as representative; The contactless surface profiler that Zygo company develops take the 3D interference microscope as ultimate principle is from early stage Maxim 3D 5700 to modern New View 5000 3D etc.; Britain Tayloy-Hobson contact pin type contourgraph; The three-coordinates measuring machine of practical requirement, 4D interferometer etc.

Yet, at optical detecting instrument and technical, still have a lot of problem and shortage.At present, the method or the device that not yet detect relevant for axicon lens.Existing detecting instrument such as Zygo interferometer, newton's interferometer, 4D interferometer, Tayloy-Hobson etc. all can't detect the axicon lens surface.

Summary of the invention

The objective of the invention is to overcome at present the difficult problem that can't detect axicon lens, a kind of axicon lens pick-up unit and detection method thereof are provided.

Technical solution of the present invention is as follows:

A kind of axicon lens pick-up unit, its characteristics are to be comprised of fizeau interferometer, substrate of glass with circular grating, the A face of described substrate of glass is as the reference plane, the B face makes circular grating with the photoetching legal system, as the grating face, the grating face B of described substrate of glass is vertical with the monochromatic collimated beam of described fizeau interferometer output.

A kind of method of utilizing described axicon lens pick-up unit to detect axicon lens, its characteristics are that the method comprises the following steps:

1. the monochromatic collimated beam in described fizeau interferometer output sets gradually described substrate of glass and axicon lens to be measured, and the monochromatic collimated beam of the conical surface of this axicon lens to be measured and the output of described fizeau interferometer in opposite directions;

2. start described fizeau interferometer, adjust described substrate of glass, make the reference planes A of described substrate of glass vertical with the monochromatic collimated beam of described fizeau interferometer output, outside the monochromatic collimated beam direction of described fizeau interferometer output and the grating face B in described substrate of glass axicon lens to be measured is set, the axis that makes described axicon lens is parallel with the monochromatic collimated beam that described fizeau interferometer is exported;

3. utilize fizeau interferometer that described axicon lens is measured, fizeau interferometer is exported the result of axicon lens to be measured.

Described axicon lens to be measured is convex surface axicon lens or concave surface axicon lens.

Substrate of glass:

Device of the present invention has very high requirement to the reference planes A of substrate of glass, and its surface precision should be not more than λ/20.The grating face B of substrate of glass makes circular grating with the photoetching legal system.

The laid down by of circular grating:

Grating is a kind of very important optical device that is made of intensive, equidistant parallel groove.As its name suggests, circular grating then is made of a series of intensive, equally spaced annulus, as shown in Figure 5.It utilizes many seam diffraction and interference effect based on many seams Fraunhofer diffraction effect, and the light beam that is mapped on the grating is carried out dispersion by the difference of wavelength, focuses on and formation spectrum through imaging lens again.

Grating equation satisfies:

D·sinθ=?N·λ

Wherein: D is the spacing between two slits, is called grating constant, and θ is angle of diffraction, and N is grating progression, and λ is wavelength.

For each the N value that satisfies grating equation, corresponding level spectrum is arranged, the luminous energy of each wavelength is dispersed in all spectral order.When wavelength is the plane wave of λ when being normally incident in grating, the point on every slit has all been played the part of the role of secondary light source; Propagate (being spherical wave) from the light that these secondary light sources send along all directions.Because slit is endless, can only consider the situation on the plane vertical with slit, namely slit is reduced to the row's point of one on this plane.Then the light field along a certain specific direction is to be formed by the light coherence stack from every slit outgoing on this plane.When interfering, since all different in the phase place of interference point from the light of every slit outgoing, can partly or entirely offset between them.Yet when the optical path difference that arrives interference point from the light of adjacent two slit outgoing was the integral multiple of light wavelength, the two-beam phase of line was identical, will interfere the reinforcement phenomenon.

More than describe available following formula and represent, work as diffraction angle NSatisfy relation:

Dsin θ N/ λ=| during N|, interfere the reinforcement phenomenon.

D is slit separation, i.e. grating constant, and N is an integer, value is 0, ± 1, ± 2 ...This interference hard point is called diffraction maximum.Therefore, diffraction light will be θ in angle of diffraction NIn time, obtained greatly.

When plane wave with incidence angle θ iDuring incident, grating equation is written as

  D·(sinθ N+sinθ i)=N·λ????????????N=0,±1,±2,……

Select suitable incidence angle θ i﹐ can make the luminous energy of the overwhelming majority (reaching 70%) of required wavelength and contiguous wave band thereof focus in the predetermined spectral order.

Grating intensity distributes as shown in Figure 7.The principal maximum light distribution of grating is at the N=0 place, and the secondary maximum light distribution is at N=± 1 place.

Among the present invention, consider that refracted ray should be vertical with the conical surface, and through repeatedly reflect and reflect after the weakening of light intensity, the convex surface axicon lens is chosen the inferior principal maximum light intensity place of N=1, the concave surface axicon lens is chosen the inferior principal maximum light intensity place at N=-1 place.

Compared with prior art, the invention has the beneficial effects as follows: existing detection method and interference instrument are multiplex in the measurement of plane and spherical optics part, for the detection of axicon lens, better detection method are not arranged at present.The invention solves the problem that existing detection method, instrument etc. are difficult to detect axicon lens.

Description of drawings

Fig. 1 is the synoptic diagram that fizeau interferometer of the present invention detects convex surface cone mirror type.

Fig. 2 is the synoptic diagram that fizeau interferometer of the present invention detects concave surface cone mirror type.

Fig. 3 is the index path of apparatus of the present invention.

Fig. 4 is the schematic side view with substrate of glass of circular grating.

Fig. 5 is substrate of glass grating face B circular grating synoptic diagram.

Fig. 6 fizeau interferometer structure principle chart.

Fig. 7 is the circular grating light intensity distributions.

Among the figure: 1-fizeau interferometer, 2-fizeau interferometer camera lens, 3--substrate of glass, 4-convex surface axicon lens to be measured, 5-concave surface axicon lens to be measured, 6-collimated monochromatic ligth, 7-reference planes A reflection ray, 8-grating face B transmitted ray, 9-axicon lens reflection ray, 10-reference planes A transmitted ray, A-reference planes, B-grating face

Embodiment

The invention will be further described below in conjunction with drawings and Examples, but should not limit protection scope of the present invention with this.

Fig. 1 is the synoptic diagram that fizeau interferometer of the present invention detects convex surface cone mirror type, and it mainly is comprised of 2 parts:

1, fizeau interferometer.The structural principle of fizeau interferometer as shown in Figure 6.Fizeau interferometer collimates the light that sends from pin hole with the object lens of a fine correction of process.Between collimator objective and pin hole (spatial filter), place a spectroscope, in order to observe from the side interference fringe.The light that fizeau interferometer sends is collimated monochromatic ligth.

2, the substrate of glass that has circular grating.

The A face of substrate of glass is as the reference plane, and the B face makes circular grating with the photoetching legal system, as the grating face.Circular grating is chosen N=± 1 grade spectrum.N=0 level spectrum place, the direction of refracted ray can not be vertical with the conical surface to be measured.N=± 1 grade spectrum is light intensity secondary maximum place, can guarantee that the light of last outgoing can be observed.Grating constant D chooses, and determines that according to grating equation Dsin θ=N λ wherein diffraction angle is drawn by given axicon lens angle.Satisfy θ=90 between the cone angle of diffraction angle and axicon lens to be measured o-cone angle /2.N=±1,λ=0.6328μm。Grating constant D determines so that the light that incides on the conical surface is all vertical with the conical surface.

Fig. 2 is the synoptic diagram that fizeau interferometer of the present invention detects concave surface cone mirror type.The A face of substrate of glass requires its surface precision should be not more than λ/20 as the reference plane, and the B face makes circular grating with the photoetching legal system, as the grating face.Apparatus of the present invention index path as shown in Figure 3.After the collimated monochromatic ligth 6 that fizeau interferometer sends incides substrate of glass, the referenced plane A reflection of a part of light, reflection ray 7 carries standard flat ripple information.Another part light incides grating face B after reference planes A transmission.Because the effect of the circular grating of grating face B has changed from the direction of light of grating face B transmission, make from the light of grating face B transmission all surperficial perpendicular to axicon lens.The light of grating face B transmission is defined as light 8.After light 8 incides the axicon lens surface, because direction of light so that return and incide according to original route on the grating face B at the light 9 of axicon lens surface reflection, finally by reference planes A transmission, is defined as transmitted ray 10 all perpendicular to the axicon lens surface.Light 7 and light 10 satisfy that frequency is identical, direction of vibration consistent, three conditions of constant phase difference, thereby the phenomenon of interfering produces interference fringe.Observe interference fringe and thereby interference fringe analysis is drawn the face type measurement result on axicon lens surface by fizeau interferometer.

Fizeau interferometer is a kind of equal thickness interferometer relatively more commonly used, is mainly used in checking plane or spherical surface type.The structural principle of fizeau interferometer as shown in Figure 6.The light that monochromatic source is sent is focused on the circular hole diaphragm by lens, and diaphragm is positioned on the focal plane of collimator objective.From the parallel beam of collimator objective outgoing, returning with the lower plane of the reference planes of wedge degree and the upper plane reflection on tested plane, form again two pictures of the aperture of circular hole diaphragm in the focal plane of eyepiece by collimator objective and object lens.Adjust the worktable at tested part place, two pictures are overlapped.If replace eyepiece with telescopic magnifier, just can see equal thick interference fringe on tested plane.Utilize the principle of work of above-mentioned fizeau interferometer, in apparatus of the present invention, coherence stack occurs with light 10 in light 7, produces interference fringe, and observe interference fringe in fizeau interferometer, analyzes to get the type measurement result of appearing by fizeau interferometer.

Claims (3)

1. axicon lens pick-up unit, it is characterized in that being formed by fizeau interferometer, substrate of glass with circular grating, the A face of described substrate of glass is as the reference plane, the B face makes circular grating with the photoetching legal system, as the grating face, the grating face B of described substrate of glass is vertical with the monochromatic collimated beam of described fizeau interferometer output.
2. a method of utilizing axicon lens pick-up unit claimed in claim 1 to detect axicon lens is characterized in that the method comprises the following steps:
1. the monochromatic collimated beam in described fizeau interferometer output sets gradually described substrate of glass and axicon lens to be measured, and the monochromatic collimated beam of the conical surface of this axicon lens and the output of described fizeau interferometer in opposite directions;
2. start described fizeau interferometer, adjust described substrate of glass, make the reference planes A of described substrate of glass vertical with the monochromatic collimated beam of described fizeau interferometer output, outside the monochromatic collimated beam direction of described fizeau interferometer output and the grating face B in described substrate of glass, axicon lens to be measured is set, adjust axicon lens to be measured, make the axis of described axicon lens to be measured parallel with the monochromatic collimated beam of described fizeau interferometer output, and in the eyepiece of described fizeau interferometer, observe clearly interference fringe;
3. utilize fizeau interferometer that described axicon lens to be measured is measured, fizeau interferometer is exported the result of axicon lens to be measured.
3. the method for detection axicon lens according to claim 2 is characterized in that, described axicon lens to be measured is convex surface axicon lens or concave surface axicon lens.
CN2012104415654A 2012-11-08 2012-11-08 Detection device and method of cone mirror CN103063154A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105033751A (en) * 2015-06-24 2015-11-11 中国科学院光电技术研究所 Online detecting and processing device and method of convex cone mirror
CN108507488A (en) * 2018-03-05 2018-09-07 中国科学院上海光学精密机械研究所 Axicon lens surface testing system based on axial scan and detection method
CN108507489A (en) * 2018-03-07 2018-09-07 中国科学院上海光学精密机械研究所 Heavy caliber axicon lens surface testing system and detection method

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JPH09159420A (en) * 1995-12-04 1997-06-20 Olympus Optical Co Ltd Interferometer for measuring aspherical shape
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CN202869452U (en) * 2012-11-08 2013-04-10 上海现代先进超精密制造中心有限公司 Axicon detecting device

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JPH09159420A (en) * 1995-12-04 1997-06-20 Olympus Optical Co Ltd Interferometer for measuring aspherical shape
JP2008292218A (en) * 2007-05-23 2008-12-04 Nikon Corp Surface shape measuring device, surface shape measuring method, and microscopic objective optical system
CN102506750A (en) * 2011-10-28 2012-06-20 中国科学院长春光学精密机械与物理研究所 Partial-compensation aspherical reflector surface shape detection method
CN202869452U (en) * 2012-11-08 2013-04-10 上海现代先进超精密制造中心有限公司 Axicon detecting device

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105033751A (en) * 2015-06-24 2015-11-11 中国科学院光电技术研究所 Online detecting and processing device and method of convex cone mirror
CN105033751B (en) * 2015-06-24 2017-07-11 中国科学院光电技术研究所 The on-line checking processing unit (plant) and method of a kind of convex cone mirror
CN108507488A (en) * 2018-03-05 2018-09-07 中国科学院上海光学精密机械研究所 Axicon lens surface testing system based on axial scan and detection method
CN108507488B (en) * 2018-03-05 2019-12-20 中国科学院上海光学精密机械研究所 System and method for detecting surface shape of conical mirror based on axial scanning
CN108507489A (en) * 2018-03-07 2018-09-07 中国科学院上海光学精密机械研究所 Heavy caliber axicon lens surface testing system and detection method
CN108507489B (en) * 2018-03-07 2020-02-21 中国科学院上海光学精密机械研究所 Large-caliber cone mirror surface shape detection system and detection method

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Application publication date: 20130424