CN104075652A - Calibration device for capacitance displacement sensor - Google Patents
Calibration device for capacitance displacement sensor Download PDFInfo
- Publication number
- CN104075652A CN104075652A CN201410314100.1A CN201410314100A CN104075652A CN 104075652 A CN104075652 A CN 104075652A CN 201410314100 A CN201410314100 A CN 201410314100A CN 104075652 A CN104075652 A CN 104075652A
- Authority
- CN
- China
- Prior art keywords
- sensor
- fixed
- calibrating table
- interferometer
- capacitive transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention discloses a calibration device of a capacitance displacement sensor, and belongs to the technical field of sensor calibration. The technical problem that a calibration device for a capacitance displacement sensor in the prior art is low in calibration precision is solved. The calibration device comprises a capacitance displacement mechanism and an interferometer mechanism. The capacitance displacement mechanism comprises a calibration table base, a calibration table supporting frame, a sensor supporting frame, a driver, a calibration table static platform, a hinge, a calibration table dynamic platform, a measurement angle reflecting mirror, a light guide element supporting frame, a light guide element fixing base, a reference angle reflecting mirror, a beam splitter mirror, a sensor fixing base, a capacitance sensor, a measured panel and a driver push rod. The interferometer mechanism comprises a single-axis laser interferometer, an interferometer adjusting base, an interferometer supporting frame and an interferometer base. According to the device, the parallelism depth precision of a sensing face and a measured face of the existing calibration device for the capacitance displacement sensor is improved when the sensor is mounted, measurement errors caused by adjustment are reduced, and the calibration precision of the sensor is improved.
Description
Technical field
The present invention relates to a kind of capacitance displacement sensor caliberating device, belong to capacitance displacement sensor calibration technique field.
Background technology
Photoetching projection objective lens is the key equipment in super large/great scale integrated circuit manufacturing process, and along with integrated circuit live width constantly reduces, the resolution of photoetching projection objective lens improves gradually in recent years.But, assemble when integrated and have error due to Optical element manufacturing, detection and system in object lens, need to adjust by regulating structure for micro displacement the position of optical element, the projection objective system wave aberration after assembling is compensated.Capacitive displacement transducer is micrometric displacement conventional a kind of accurate displacement checkout equipment while regulating, has without friction, the advantage such as highly sensitive and easy to operate.In micrometric displacement testing process, along with detecting increasing of number of times, capacitive transducer can cause loss of significance, detects error and increases gradually, affects the compensation effect of projection objective.For the sensor newly dispatching from the factory, through long-distance transport, environment for use and transportation environment are inconsistent in addition, before requirement packs projection objective into, must again demarcate capacitance displacement sensor.But the caliberating device of existing capacitance displacement sensor can not ensure the depth of parallelism between sensitive face and the tested surface of sensor when installing, stated accuracy does not reach in 10nm conventionally, cannot be used for projection objective Capacitive Displacement Sensor With High Accuracy and demarcate.
Summary of the invention
The object of the invention is the low technical matters of stated accuracy in order to solve capacitance displacement sensor caliberating device in prior art, a kind of capacitance displacement sensor caliberating device is provided.
In order to achieve the above object, the present invention adopts technical scheme below to realize:
Capacitance displacement sensor caliberating device of the present invention, comprises capacitive displacement mechanism and interferometer mechanism;
Described capacitive displacement mechanism comprises calibrating table pedestal, calibrating table bracing frame, sensor support frame, driver, calibrating table silent flatform, hinge, calibrating table moving platform, measuring unit, sensor holder, capacitive transducer, tested panel and driver push rod;
Described calibrating table bracing frame is at least three, and the bottom of all calibrating table bracing frames is all fixed on calibrating table pedestal;
The bottom of described sensor support frame is fixed on calibrating table pedestal;
Described sensor holder is fixed on sensor support frame;
Described capacitive transducer is fixed on sensor holder, and capacitive transducer is measured the displacement variable between capacitive transducer and tested panel;
Described calibrating table silent flatform is fixed on the top of all calibrating table bracing frames and is sleeved on outside sensor support frame by sensor support frame pilot hole;
Described hinge is at least three, and the bottom of all hinges is all fixed on the end face of calibrating table silent flatform, and the top of all hinges is all fixed on the bottom surface of calibrating table moving platform;
Described calibrating table moving platform is sleeved on outside capacitive transducer by sensor pilot hole;
Described driver, driver push rod and hinge three are corresponding one by one, the top of driver is all fixed on the bottom surface of calibrating table silent flatform, driver push rod is fixed on the top of driver, and pass calibrating table silent flatform by driver push rod pilot hole, driver promotes hinge by driver push rod and moves, and hinge drives calibrating table moving platform to move;
Described tested panel is fixed on the end face of calibrating table moving platform, and is positioned at the top of capacitive transducer, and tested panel place plane is parallel with the sensitive face of capacitive transducer;
Described measuring unit is at least three, each measuring unit comprises measured angular catoptron, light-guide device bracing frame, light-guide device holder, reference angle catoptron and spectroscope, described measured angular catoptron is fixed on the end face of calibrating table moving platform, the bottom of described light-guide device bracing frame is fixed on the end face of calibrating table silent flatform, one end of described light-guide device holder is fixed on light-guide device bracing frame, described reference angle catoptron and spectroscope are fixed on the other end of light-guide device holder successively, and spectroscope is positioned at the top of measured angular catoptron, spectroscope and the same optical axis of measured angular catoptron, and this optical axis direction is perpendicular to the sensitive face of capacitive transducer,
Described interferometer mechanism comprises interferometer base and interferometer unit;
Described interferometer unit is at least three and corresponding one by one with measuring unit, and each interferometer unit comprises single shaft laser interferometer, interferometer adjusting base and interferometer bracing frame;
The bottom of described interferometer bracing frame is fixed on interferometer base;
Described interferometer adjusting base is fixed on the top of interferometer bracing frame;
Described single shaft laser interferometer is fixed on interferometer adjusting base, single shaft laser interferometer, spectroscope and the same optical axis of reference angle catoptron, the laser that single shaft laser interferometer is sent is divided into orthogonal reference light and measures light through spectroscope, reference light is reflected back spectroscope through reference angle catoptron, and through spectroscope transmission receipt axle laser interferometer, measure light and be reflected back spectroscope through measured angular catoptron, and be reflected back single shaft laser interferometer through spectroscope.
Further, described capacitive transducer is column capacitive transducer or flat capacitance sensor.
Further, described sensor support frame is L-type structure, described sensor holder is boss structure, the short end of sensor support frame is fixed on calibrating table pedestal, the base of sensor holder is fixed on sensor support frame long end, the boss of sensor holder is provided with sensor clamping hole and sensor locking hole, and capacitive transducer is sleeved in sensor clamping hole, and is locked by sensor locking hole.
Further, described sensor support frame and sensor holder are multidiameter structure, the chassis of sensor support frame is fixed on calibrating table pedestal, and the chassis of sensor holder is fixed on the top of sensor support frame, and capacitive transducer is fixed on the top of sensor holder.
Further, described hinge is symmetrical parallel quadrilateral structure, comprise three holders and four guiding shell fragments, between two adjacent holders, fix two guiding shell fragments, the bottom of the holder at two ends is all fixed on the end face of calibrating table fixed platform, and the top of middle holder is fixed on the bottom surface of calibrating table moving platform.
Further, described guiding shell fragment is round leaf spring or circular arc flexible hinge.
Further, described calibrating table moving platform end face is provided with trough.
Further, described calibrating table moving platform is disc structure, the symcenter axle of calibrating table moving platform and the sensing shaft conllinear of capacitive transducer.
Further, described measuring unit is pressed circumference uniform distribution centered by capacitive transducer.
Further, described all hinges is pressed circumference uniform distribution on calibrating table moving platform.
Compared with prior art, the invention has the beneficial effects as follows:
(1) capacitive transducer displacement calibrating device of the present invention is not only easy and simple to handle, and debug that precision is high, Abbe error and cosine error little, make calibration result precision high, in 10nm;
(2) capacitive transducer displacement calibrating device of the present invention has TIP-TILT-PISTON regulatory function, can carry out Z-direction translation regulates, regulates around the rotation of X-axis and Y-axis, and adjustment stroke can reach 1mm, ensure that the depth of parallelism between the sensitive face of sensor and the tested surface of tested panel is debug precision;
(3) capacitive transducer displacement calibrating device of the present invention, can be to dissimilar capacitance sensor calibration by changing sensor support frame and the sensor holder of different structure, and versatility and interchangeability are strong.
Brief description of the drawings
Fig. 1 is the cut-open view of capacitance displacement sensor caliberating device of the present invention;
Fig. 2 is the vertical view of capacitance displacement sensor caliberating device of the present invention;
Fig. 3 is the structural representation of the calibrating table pedestal of capacitance displacement sensor caliberating device of the present invention;
Fig. 4 is the structural representation of the sensor support frame of capacitance displacement sensor caliberating device of the present invention;
Fig. 5 is the structural representation of the sensor holder of capacitance displacement sensor caliberating device of the present invention;
Fig. 6 is the structural representation of the sensor support frame of capacitance displacement sensor caliberating device of the present invention;
Fig. 7 is the structural representation of the sensor holder of capacitance displacement sensor caliberating device of the present invention;
Fig. 8 is the structural representation of the calibrating table silent flatform of capacitance displacement sensor caliberating device of the present invention;
Fig. 9 is the structural representation of the hinge of capacitance displacement sensor caliberating device of the present invention, wherein, (a) is upward view, is (b) front view, is (c) vertical view;
Figure 10 is the structural representation of the calibrating table moving platform of capacitance displacement sensor caliberating device of the present invention;
Figure 11 is the structural representation of the tested panel of capacitance displacement sensor caliberating device of the present invention;
Figure 12 is the structural representation of the light-guide device holder of capacitance displacement sensor caliberating device of the present invention;
Figure 13 is the schematic diagram of the optical interference circuit of capacitance displacement sensor caliberating device of the present invention;
In figure: 1, calibrating table pedestal, 1-1, cable hole, 1-2, calibrating table bracing frame connecting hole, 1-3, sensor support frame connecting hole, 2, calibrating table bracing frame, 3, sensor support frame, 3-1, sensor holder connecting hole, 4, driver, 5, calibrating table silent flatform, 5-1, calibrating table bracing frame connecting hole, 5-2, sensor support frame pilot hole, 5-3 driver connecting hole, 5-4, driver push rod pilot hole, 5-5, light-guide device bracing frame connecting hole, 5-6, chain connection hole, 6, hinge, 6-1, holder, 6-2, guiding shell fragment, 7, calibrating table moving platform, 7-1, sensor pilot hole, 7-2, trough, 8, measured angular catoptron, 9, light-guide device bracing frame, 10, light-guide device holder, 10-1, light-guide device bracing frame clamping hole, 10-2, light-guide device bracing frame locking hole, 11, reference angle catoptron, 12, spectroscope, 13, sensor holder, 13-1, base, 13-2, boss, 13-2-1, sensor clamping hole, 13-2-2, sensor locking hole, 13-3, sensor connecting hole, 14, capacitive transducer, 15, tested panel, 16, driver push rod, 17, single shaft laser interferometer, 18, interferometer adjusting base, 19, interferometer bracing frame, 20, interferometer base.
Embodiment
In order further to understand the present invention, be described below in conjunction with Fig. 1-13 pair the preferred embodiments of the invention, but should be appreciated that these are described is for further illustrating the features and advantages of the present invention instead of limiting to the claimed invention.
As shown in Fig. 1-12, capacitance displacement sensor caliberating device, comprises capacitive displacement mechanism and interferometer mechanism; Wherein, capacitive displacement mechanism comprises calibrating table pedestal 1, calibrating table bracing frame 2, sensor support frame 3, driver 4, calibrating table silent flatform 5, hinge 6, calibrating table moving platform 7, measuring unit, sensor holder 13, capacitive transducer 14, tested panel 15 and driver push rod 16; Interferometer mechanism comprises interferometer unit and interferometer base 20.
In present embodiment, calibrating table pedestal 1 is disc structure, calibrating table pedestal 1 is provided with calibrating table bracing frame connecting hole 1-2 and sensor support frame connecting hole 1-3, and for ease of the sensor support frame 3 of different structure is installed, sensor support frame connecting hole 1-3 can be arranged to many groups; On calibrating table pedestal 1, can also be provided with cable hole 1-1, connect control box for the cable of capacitive transducer 14.
In present embodiment, calibrating table bracing frame 2 is column structure, preferred heights is identical, calibrating table bracing frame 2 is more than three, be preferably three, the bottom of all calibrating table bracing frames 2 is all fixed on calibrating table pedestal 1 by calibrating table bracing frame connecting hole 1-2, and presses circumference uniform distribution on calibrating table pedestal 1.
In present embodiment, the bottom of sensor support frame 3 is fixed on calibrating table pedestal 1, sensor holder 13 is fixed on sensor support frame 3, capacitive transducer 14 is fixed on sensor holder 13, capacitive transducer 14 is for measuring the displacement variable between capacitive transducer 14 and tested panel 15, according to the difference of capacitive transducer 14 types, select sensor support frame 3 and the sensor holder 13 of coupling.
As demarcate column capacitance displacement sensor, sensor support frame 3 is L-type structure, sensor holder 13 is boss structure, the short end of sensor support frame 3 is fixed on calibrating table pedestal 1 by sensor support frame connecting hole 1-3, the base 13-1 of sensor holder 13 is fixed in the long end of sensor support frame 3 by sensor holder connecting hole 3-1, the column capacitive transducer of multiple different model is installed for convenience, sensor holder connecting hole 3-1 can be provided with many groups, the boss 13-2 of sensor holder 13 is provided with sensor clamping hole 13-2-1 and sensor locking hole 13-2-2, capacitive transducer 14 is positioned in sensor clamping hole 13-2-1, and be locked by sensor locking hole 13-2-2,
As demarcate capacity plate antenna displacement transducer, sensor support frame 3 and sensor holder 13 are multidiameter structure, the chassis of sensor support frame 3 is fixed on calibrating table pedestal 1 by sensor support frame connecting hole 1-3, the chassis of sensor holder 13 is fixed on the top of sensor support frame 3, capacitive transducer 14 is fixed on the top of sensor holder 13 by capacitive transducer connecting hole 13-3, the flat capacitance sensor of multiple different model is installed for convenience, and capacitive transducer connecting hole 13-3 can be provided with many groups.
In present embodiment, calibrating table silent flatform 5 is disc structure, calibrating table silent flatform 5 is provided with multiple calibrating table bracing frame connecting hole 5-1, a sensor support frame pilot hole 5-2, multiple driver connecting hole 5-3, multiple driver push rod pilot hole 5-4, multiple light-guide device bracing frame connecting hole 5-5 and multiple chain connections hole 5-6, calibrating table silent flatform 5 is fixed on the top of all calibrating table bracing frames 2 by calibrating table bracing frame connecting hole 5-1, and is sleeved on outside sensor support frame 3 by sensor support frame pilot hole 5-2.The preferably symcenter axle of calibrating table silent flatform 5 and the sensing shaft conllinear of capacitive transducer 14.
In present embodiment, hinge 6 is more than three, and all identical, be preferably three, and press circumference uniform distribution on calibrating table silent flatform 5 and calibrating table moving platform 7, all hinges 6 all adopted the symmetrical parallel quadrilateral structure of constraint, each hinge 6 comprises three holder 6-1 and four guiding shell fragment 6-2, three holder 6-1 distribute in the same direction successively, every two adjacent holder 6-1 are fixedly connected with by two parallel guiding shell fragment 6-2, the bottom of the holder 6-1 at the two ends hole 5-6 that is connected through the hinge is fixed on the end face of calibrating table silent flatform 5, the top of middle holder 6-1 is fixed on the bottom surface of calibrating table moving platform 7, guiding shell fragment 6-2 can be round leaf spring or circular arc flexible hinge, the hunt effect error of other directions of introducing while adopting symmetrical parallel quadrilateral guide frame greatly to reduce to regulate, guiding steadily.The dimensional parameters of hinge 6 can be: width 1.1mm, and length 70mm, thickness 10mm, radius of corner 0.1mm, material is invar.
In present embodiment, driver 4 is more than three, is preferably three, and the top of All Drives 4 is all fixed on the bottom surface of calibrating table silent flatform 5 by driver connecting hole 5-3, preferably presses circumference uniform distribution.
In present embodiment, driver push rod 16 is more than three, be preferably three, driver 4, driver push rod 16 and hinge 6 threes are corresponding one by one, driver push rod 16 is fixed on the top of driver 4, and passes the below of calibrating table silent flatform 5 to hinge 6 middle holder 6-1 by driver push rod pilot hole 5-4; Driver 4 promotes hinge 6 by driver push rod 16 and moves, hinge 6 drive calibrating table moving platform 7 and on tested panel 15 and measured angular catoptron 8 move.
In present embodiment, calibrating table moving platform 7 is disc structure, its diameter is less than calibrating table silent flatform 5, and calibrating table moving platform 7 is sleeved on outside capacitive transducer 14 by the capacitive transducer pilot hole 7-1 establishing thereon, and the non-through capacitive transducer pilot hole of capacitive transducer 14 7-1; The radial direction of calibrating table moving platform 7 end faces can be provided with trough 7-2, and trough 7-2 connects control box for the cable of capacitive transducer 14.The preferably symcenter axle of calibrating table moving platform 7 and the sensing shaft conllinear of capacitive transducer 14.
In present embodiment, tested panel 15 is circular configuration, tested panel 15 is fixed on the end face of calibrating table moving platform 7, cover capacitive transducer pilot hole 7-1, and be arranged at the top of capacitive transducer 14, tested panel 15 place planes are parallel with the sensitive face of capacitive transducer 14, the symcenter axle of preferred tested panel 15 and the sensing shaft conllinear of capacitive transducer 14.
Measuring unit is more than three, preferably centered by capacitive transducer 14, press circumference uniform distribution, be generally three, each measuring unit includes measured angular catoptron 8, light-guide device bracing frame 9, light-guide device holder 10, reference angle catoptron 11 and spectroscope 12, measured angular catoptron 8 and reference angle catoptron 11 are corner reflector, and spectroscope 12 is 50% spectroscope.Measured angular catoptron 8 is fixed on the end face of calibrating table moving platform 7, light-guide device bracing frame 9 is column structure, and bottom is fixed in the top edge of calibrating table silent flatform 5 by light-guide device bracing frame connecting hole 5-5, light-guide device holder 10 is L-type structure, short end is provided with light-guide device bracing frame clamping hole 10-1 and light-guide device bracing frame locking hole 10-2, the top of light-guide device bracing frame 9 is sleeved in corresponding light-guide device bracing frame clamping hole 10-1, and be locked by light-guide device bracing frame locking hole 10-2, reference angle catoptron 11 and spectroscope 12 are fixed on the long end of light-guide device holder 10 successively, spectroscope 12 is positioned at the top of measured angular catoptron 8, spectroscope 12 orthogonal both direction respectively with measured angular catoptron 8, the same optical axis of reference angle catoptron 11, and with the optical axis of measured angular catoptron 8 sensitive face perpendicular to capacitive transducer 14.
Interferometer unit is more than three, and corresponding one by one with measuring unit, and each interferometer unit includes single shaft laser interferometer 17, interferometer adjusting base 18 and interferometer bracing frame 19.The bottom of interferometer bracing frame 19 is fixed on interferometer base 20, interferometer adjusting base 18 is fixed on the top of interferometer bracing frame 19, single shaft laser interferometer 17 is fixed on interferometer adjusting base 18, the spectroscope 12 that single shaft laser interferometer 17 is corresponding with it and the same optical axis of reference angle catoptron 11.Interferometer adjusting base 18 can regulate five degree of freedom except Z-direction height, that is: X to translation, Y-direction translation, around X Y the rotation of Z, and then regulate the angle of corresponding single shaft laser interferometer 17, guarantee that the light beam reflecting through measured angular catoptron 8 and reference angle catoptron 11 can be accepted smoothly after spectroscope 12.
In present embodiment, for convenience of detecting, can adopt calibrating table pedestal 1 horizontal positioned, calibrating table moving platform 5, calibrating table silent flatform 6, capacitive transducer 14 and tested panel 15 are all horizontally disposed with, spectroscope 12, reference angle catoptron 11 and single shaft laser interferometer 17 same optical axis in the horizontal direction, spectroscope 12 and measured angular catoptron 8 are at the same optical axis of vertical direction.
As shown in figure 13, the laser that single shaft laser interferometer 17 is sent is divided into orthogonal measurement light and reference light through spectroscope 12, measuring light turns back and is reflected back spectroscope 12 through measured angular catoptron 8 twice 90 degree, be reflected back single shaft laser interferometer 17 through spectroscope 12 again, form optical path, reference light is turned back and is reflected back spectroscope 12 through reference angle catoptron 11 twice 90 degree, through spectroscope 12 transmission receipt axle laser interferometer 17, forms reference path.
Before demarcation, the first depth of parallelism between the sensitive face of Detection capacitance sensor 14 and three-dimensional coordinates measurement machine platform on three coordinate measuring machine, this form and position tolerance ensures by trimming sensor holder 10.When tested panel 15 is installed, detect the depth of parallelism between tested panel 15 upper surfaces and three-dimensional coordinates measurement machine platform, this form and position tolerance ensures by adjusting driver 4.Like this, ensure that by indirect measurement the depth of parallelism between sensor senses face and tested surface is to allowable value.Timing signal, leading zero's taking initial position as demarcating, by capacitance displacement sensor 14 power supply openings, wait for a period of time, show after numerical stability until capacitance displacement sensor 14, start to record sensor reading, then, All Drives 4 increases with the increment of 1 μ m, driver 4 promotes hinge 6 by driver push rod 16 and moves, hinge 6 drive calibrating table moving platform 7 and on tested panel 15, measured angular catoptron 8 move, realize Z-direction fine adjustment, on the one hand, capacitive transducer 14 is measured the displacement variable between capacitive transducer 14 and tested panel 15; On the other hand, form interferometry light path by single shaft laser interferometer 17, measured angular catoptron 8, spectroscope 12, reference angle catoptron 11.The incident light that single shaft laser interferometer 17 is sent, the laser that single shaft laser interferometer 17 is sent is divided into orthogonal measurement light and reference light through spectroscope 12, measure light and be reflected back spectroscope 12 through measured angular catoptron 8, be reflected back single shaft laser interferometer 17 through spectroscope 12 again, reference light is through reference angle catoptron 11 reflection beam splitting mirrors 12, through spectroscope 12 transmission receipt axle laser interferometer 17, can demarcate capacitor by analyzing the reading of capacitive transducer 14 and the reading of single shaft laser interferometer 17.Several groups of data that continuous several times is recorded are averaging rear as final calibration result.
Obviously, the explanation of above embodiment is just for helping to understand method of the present invention and core concept thereof.It should be pointed out that the those of ordinary skill for described technical field, under the premise without departing from the principles of the invention, can also carry out some improvement and modification to the present invention, these improvement and modification also fall in the protection domain of the claims in the present invention.
Claims (10)
1. capacitance displacement sensor caliberating device, is characterized in that, comprises capacitive displacement mechanism and interferometer mechanism;
Described capacitive displacement mechanism comprises calibrating table pedestal (1), calibrating table bracing frame (2), sensor support frame (3), driver (4), calibrating table silent flatform (5), hinge (6), calibrating table moving platform (7), measuring unit, sensor holder (13), capacitive transducer (14), tested panel (15) and driver push rod (16);
Described calibrating table bracing frame (2) is at least three, and the bottom of all calibrating table bracing frames (2) is all fixed on calibrating table pedestal (1);
The bottom of described sensor support frame (3) is fixed on calibrating table pedestal (1);
Described sensor holder (13) is fixed on sensor support frame (3);
It is upper that described capacitive transducer (14) is fixed on sensor holder (13), and capacitive transducer (14) is measured the displacement variable between capacitive transducer (14) and tested panel (15);
Described calibrating table silent flatform (5) is fixed on the top of all calibrating table bracing frames (2) and is sleeved on outside sensor support frame (3) by sensor support frame pilot hole (5-2);
Described hinge (6) is at least three, the bottom of all hinges (6) is all fixed on the end face of calibrating table silent flatform (5), and the top of all hinges (6) is all fixed on the bottom surface of calibrating table moving platform (7);
Described calibrating table moving platform (7) is sleeved on outside capacitive transducer (14) by sensor pilot hole (7-1);
Described driver (4), driver push rod (16) and hinge (6) three are corresponding one by one, the top of driver (4) is all fixed on the bottom surface of calibrating table silent flatform (5), driver push rod (16) is fixed on the top of driver (4), and pass calibrating table silent flatform (5) by driver push rod pilot hole (5-4), it is mobile that driver (4) promotes hinge (6) by driver push rod (16), and hinge (6) drives calibrating table moving platform (7) mobile;
Described tested panel (15) is fixed on the end face of calibrating table moving platform (7), and be positioned at the top of capacitive transducer (14), tested panel (15) place plane is parallel with the sensitive face of capacitive transducer (14);
Described measuring unit is at least three, each measuring unit comprises measured angular catoptron (8), light-guide device bracing frame (9), light-guide device holder (10), reference angle catoptron (11) and spectroscope (12), described measured angular catoptron (8) is fixed on the end face of calibrating table moving platform (7), the bottom of described light-guide device bracing frame (9) is fixed on the end face of calibrating table silent flatform (5), one end of described light-guide device holder (10) is fixed on light-guide device bracing frame (9), described reference angle catoptron (11) and spectroscope (12) are fixed on the other end of light-guide device holder (10) successively, and spectroscope (12) is positioned at the top of measured angular catoptron (8), spectroscope (12) and the same optical axis of measured angular catoptron (8), and this optical axis direction is perpendicular to the sensitive face of capacitive transducer (14),
Described interferometer mechanism comprises interferometer base (20) and interferometer unit;
Described interferometer unit is at least three and corresponding one by one with measuring unit, and each interferometer unit comprises single shaft laser interferometer (17), interferometer adjusting base (18) and interferometer bracing frame (19);
The bottom of described interferometer bracing frame (19) is fixed on interferometer base (20);
Described interferometer adjusting base (18) is fixed on the top of interferometer bracing frame (19);
Described single shaft laser interferometer (17) is fixed on interferometer adjusting base (18), single shaft laser interferometer (17), spectroscope (12) and the same optical axis of reference angle catoptron (11), and this optical axis direction is parallel to the sensitive face of capacitive transducer (14), the laser that single shaft laser interferometer (17) is sent is divided into orthogonal reference light and measures light through spectroscope (12), reference light is reflected back spectroscope (12) through reference angle catoptron (11), and through spectroscope (12) transmission receipt axle laser interferometer (17), measure light and be reflected back spectroscope (12) through measured angular catoptron (8), and be reflected back single shaft laser interferometer (17) through spectroscope (12).
2. capacitance displacement sensor caliberating device according to claim 1, is characterized in that, described capacitive transducer (14) is column capacitive transducer or flat capacitance sensor.
3. capacitance displacement sensor caliberating device according to claim 1, it is characterized in that, described sensor support frame (3) is L-type structure, described sensor holder (13) is boss structure, the short end of sensor support frame (3) is fixed on calibrating table pedestal (1), the base (13-1) of sensor holder (13) is fixed in sensor support frame (3) long end, the boss (13-2) of sensor holder (13) is provided with sensor clamping hole (13-2-1) and sensor locking hole (13-2-2), capacitive transducer (14) is sleeved in sensor clamping hole (13-2-1), and be locked by sensor locking hole (13-2-2).
4. capacitance displacement sensor caliberating device according to claim 1, it is characterized in that, described sensor support frame (3) and sensor holder (13) are multidiameter structure, the chassis of sensor support frame (3) is fixed on calibrating table pedestal (1), the chassis of sensor holder (13) is fixed on the top of sensor support frame (3), and capacitive transducer (14) is fixed on the top of sensor holder (13).
5. capacitance displacement sensor caliberating device according to claim 1, it is characterized in that, described hinge (6) is symmetrical parallel quadrilateral structure, comprise three holders (6-1) and four guiding shell fragments (6-2), between adjacent two holders (6-1), fix two guiding shell fragments (6-2), the bottom of the holder (6-1) at two ends is all fixed on the end face of calibrating table fixed platform (5), and the top of middle holder (6-1) is fixed on the bottom surface of calibrating table moving platform (7).
6. capacitance displacement sensor caliberating device according to claim 5, is characterized in that, described guiding shell fragment (6-2) is round leaf spring or circular arc flexible hinge.
7. capacitance displacement sensor caliberating device according to claim 1, is characterized in that, described calibrating table moving platform (7) end face is provided with trough (7-2).
8. capacitance displacement sensor caliberating device according to claim 1, it is characterized in that, described calibrating table moving platform (7) is disc structure, the sensing shaft conllinear of the symcenter axle of calibrating table moving platform (7) and capacitive transducer (14).
9. capacitance displacement sensor caliberating device according to claim 1, is characterized in that, described measuring unit is pressed circumference uniform distribution centered by capacitive transducer (14).
10. capacitance displacement sensor caliberating device according to claim 1, is characterized in that, described all hinges (6) is at the upper circumference uniform distribution of pressing of calibrating table moving platform (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410314100.1A CN104075652B (en) | 2014-07-02 | 2014-07-02 | Capacitance displacement sensor caliberating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410314100.1A CN104075652B (en) | 2014-07-02 | 2014-07-02 | Capacitance displacement sensor caliberating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104075652A true CN104075652A (en) | 2014-10-01 |
| CN104075652B CN104075652B (en) | 2017-01-04 |
Family
ID=51597091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410314100.1A Active CN104075652B (en) | 2014-07-02 | 2014-07-02 | Capacitance displacement sensor caliberating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104075652B (en) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
| CN107367220A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367250A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance displacement sensor calibration method and device of grand micro- combination |
| CN107367221A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Supersonic motor drives host-guest architecture inductance sensor calibration method and device |
| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN107367219A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibration method and device |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN107367222A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
| CN109059745A (en) * | 2018-09-04 | 2018-12-21 | 天津大学 | Capacitance sensor calibration method and apparatus for oil film thickness measurement |
| CN109307471A (en) * | 2018-11-13 | 2019-02-05 | 福建福清核电有限公司 | A kind of nuclear power station main feed pump axial displacement sensor zero point scaling method |
| CN109470558A (en) * | 2018-12-19 | 2019-03-15 | 中国科学院地球化学研究所 | A kind of calibration device for displacement sensor under high temperature and pressure |
| CN109855520A (en) * | 2019-01-02 | 2019-06-07 | 广州大学 | A kind of micro-nano precision measure displacement sensor, system and preparation method |
| CN110207598A (en) * | 2019-07-05 | 2019-09-06 | 复旦大学 | Piezoelectric ceramics d15 parameter measuring apparatus and method |
| CN110806222A (en) * | 2019-11-12 | 2020-02-18 | 山东大学 | Fine-adjustment mounting equipment for bipolar plate capacitive sensor |
| CN115206414A (en) * | 2022-07-29 | 2022-10-18 | 无锡地心科技有限公司 | Multi-degree-of-freedom alignment platform guided by flexible reed |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10227603A (en) * | 1997-02-13 | 1998-08-25 | Toshiba Corp | Method for adjusting eddy current type distance measuring device and eddy current type distance measuring device |
| KR20090052075A (en) * | 2007-11-20 | 2009-05-25 | 한국항공우주연구원 | Calibration apparatus for displacement sensor and system thereof |
| CN202255263U (en) * | 2011-07-28 | 2012-05-30 | 南昌航空大学 | Visual calibration device for displacement sensor |
| CN102538652A (en) * | 2012-01-13 | 2012-07-04 | 西安交通大学 | Calibrating device for eddy sensor |
| CN103630076A (en) * | 2012-08-30 | 2014-03-12 | 长春理工大学 | Method and device for calibrating laser displacement sensor |
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
-
2014
- 2014-07-02 CN CN201410314100.1A patent/CN104075652B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10227603A (en) * | 1997-02-13 | 1998-08-25 | Toshiba Corp | Method for adjusting eddy current type distance measuring device and eddy current type distance measuring device |
| KR20090052075A (en) * | 2007-11-20 | 2009-05-25 | 한국항공우주연구원 | Calibration apparatus for displacement sensor and system thereof |
| CN202255263U (en) * | 2011-07-28 | 2012-05-30 | 南昌航空大学 | Visual calibration device for displacement sensor |
| CN102538652A (en) * | 2012-01-13 | 2012-07-04 | 西安交通大学 | Calibrating device for eddy sensor |
| CN103630076A (en) * | 2012-08-30 | 2014-03-12 | 长春理工大学 | Method and device for calibrating laser displacement sensor |
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
Non-Patent Citations (2)
| Title |
|---|
| AGUSTÍN BRAU AVILA等: "Design and Mechanical Evaluation of a Capacitive Sensor-Based Indexed Platform for Verification of Portable Coordinate Measuring Instruments", 《SENSORS》 * |
| 段小艳: "激光干涉法微位移测量技术综述", 《计测技术》 * |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104654997B (en) * | 2015-02-14 | 2018-03-13 | 中国科学院测量与地球物理研究所 | A kind of multiple degrees of freedom differential capacitance calibration device for displacement sensor |
| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
| CN107367250A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance displacement sensor calibration method and device of grand micro- combination |
| CN107367221B (en) * | 2016-05-12 | 2019-07-16 | 哈尔滨工业大学 | Supersonic motor drives host-guest architecture inductance sensor calibrating installation |
| CN107367221A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Supersonic motor drives host-guest architecture inductance sensor calibration method and device |
| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN107367219A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibration method and device |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN107367222A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of current vortex sensor linearity compensation |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367220A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
| CN107367224B (en) * | 2016-05-12 | 2019-01-11 | 哈尔滨工业大学 | The inductance sensor calibrating installation of three optical axis laser interferometer measurements |
| CN107367219B (en) * | 2016-05-12 | 2019-01-11 | 哈尔滨工业大学 | Lorentz force motor-direct-drive type inductance sensor calibrating installation |
| CN109059745A (en) * | 2018-09-04 | 2018-12-21 | 天津大学 | Capacitance sensor calibration method and apparatus for oil film thickness measurement |
| CN109307471A (en) * | 2018-11-13 | 2019-02-05 | 福建福清核电有限公司 | A kind of nuclear power station main feed pump axial displacement sensor zero point scaling method |
| CN109307471B (en) * | 2018-11-13 | 2020-08-21 | 福建福清核电有限公司 | Zero calibration method for displacement sensor of main water supply pump shaft of nuclear power station |
| CN109470558A (en) * | 2018-12-19 | 2019-03-15 | 中国科学院地球化学研究所 | A kind of calibration device for displacement sensor under high temperature and pressure |
| CN109470558B (en) * | 2018-12-19 | 2020-04-03 | 中国科学院地球化学研究所 | Displacement sensor calibration device used under high temperature and high pressure |
| CN109855520A (en) * | 2019-01-02 | 2019-06-07 | 广州大学 | A kind of micro-nano precision measure displacement sensor, system and preparation method |
| CN109855520B (en) * | 2019-01-02 | 2020-09-11 | 广州大学 | Micro-nano precision measurement displacement sensor, system and preparation method |
| CN110207598A (en) * | 2019-07-05 | 2019-09-06 | 复旦大学 | Piezoelectric ceramics d15 parameter measuring apparatus and method |
| CN110806222A (en) * | 2019-11-12 | 2020-02-18 | 山东大学 | Fine-adjustment mounting equipment for bipolar plate capacitive sensor |
| CN115206414A (en) * | 2022-07-29 | 2022-10-18 | 无锡地心科技有限公司 | Multi-degree-of-freedom alignment platform guided by flexible reed |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104075652B (en) | 2017-01-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104075652A (en) | Calibration device for capacitance displacement sensor | |
| CN101101248B (en) | Adjustable clamping device of minisize torsional rod rigidity test | |
| CN102472615B (en) | Coordinate measuring machine (CMM) and method of compensating errors in a CMM | |
| EP0386115B1 (en) | Calibration system for coordinate measuring machine | |
| US8635783B2 (en) | Surface measurement instrument and method | |
| CN110230999B (en) | Five-degree-of-freedom error synchronous measurement device and method for linear motion system | |
| CN101377410A (en) | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning | |
| CN100460811C (en) | Method and device for improving straight line degree measurement sensitivity | |
| CN103278109A (en) | Angle measurement precision detecting device of aspect angle monitor for satellite | |
| CN102384730B (en) | Device for measuring lasers with small angle and rotating shaft system | |
| CN104019762A (en) | High-precision long-range surface shape detector for optical surface | |
| CN102620690A (en) | Multi-probe flatness detector and flatness detection method | |
| CN101915562A (en) | Calibrating device for tilt angle sensor | |
| CN208847452U (en) | The spacing bias and wave front aberration integrated measurer of optical lens | |
| GB2306654A (en) | Surface measuring apparatus | |
| CN206113868U (en) | Nanometer displacement table 6 -degree of freedom calibrating device | |
| CN102878933A (en) | Comparator based on white light interference positioning principle and detection method thereof | |
| JP7458666B2 (en) | Vertical laser pointing correction device and method using wavefront homodyne interference | |
| CN1038781C (en) | High-precision large aperture phase-shifting digital planar interferometer | |
| CN109029935A (en) | The spacing bias and wave front aberration integrated measurer of optical lens | |
| CN105758333A (en) | Long-trace optical surface profile detector | |
| CN216283314U (en) | Two-dimensional guide rail straightness and verticality testing device | |
| CN202757593U (en) | Double tube angle measuring apparatus | |
| CN113532334B (en) | Device and method for measuring toe-in angle and camber angle of vehicle | |
| US5689337A (en) | Coaxial disc-mount for measuring flatness of computer-drive discs by interferometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190910 Address after: Room 601-10, 6th floor, 52 Block 2, Jingyuan North Street, Beijing Economic and Technological Development Zone, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 130033 southeast Lake Road, Jilin, Changchun, No. 3888 Patentee before: Changchun Inst. of Optics and Fine Mechanics and Physics, Chinese Academy of Sci |