CN103697819A - Calibration device of micro-displacement sensor - Google Patents
Calibration device of micro-displacement sensor Download PDFInfo
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- CN103697819A CN103697819A CN201310675883.1A CN201310675883A CN103697819A CN 103697819 A CN103697819 A CN 103697819A CN 201310675883 A CN201310675883 A CN 201310675883A CN 103697819 A CN103697819 A CN 103697819A
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Abstract
The invention discloses a calibration device of a micro-displacement sensor, belongs to the fields of precise fine adjustment and detection, and aims at solving the problems of poor repeated positioning accuracy and poor long-term stability of detection in the prior art. The calibration device comprises an adjusting rack, a piezoelectric driver and a calibration reference module, wherein the piezoelectric driver is fixed on the adjusting rack, the piezoelectric driver drives a movement rod of the adjusting rack to move, the calibration reference module is fixed on the adjusting rack, an output displacement of the movement rod is synchronously measured by the calibration reference module and a micro-displacement sensor to be calibrated. The invention provides a movement device capable of providing a micro-displacement and a sensor grating scale with higher precision, which is taken as a detection reference, the output displacement of the movement rod is synchronously measured by the grating scale and the micro-displacement sensor to be calibrated, so that the micro-displacement sensor to be calibrated is calibrated. The calibration device has the advantages of simple structure, no friction and hysteresis error in the movement process, high repeated positioning accuracy and high long-term stability.
Description
Technical field
The invention belongs to precise jiggle adjustment and detection field, be specifically related to a kind of micro-displacement sensor caliberating device.
Background technology
Micro-displacement sensor is as the pick-up unit of precise jiggle adjusting mechanism, and its performance index have directly determined the closed-loop control precision of adjusting mechanism, therefore need to demarcate it.
Publication number is that the Chinese patent of CN202501835U discloses the technical scheme that a key name is called vertical straight line displacement transducer demarcation/calibrating installation, this device adopts linear electric motors as driving, adopt precise guide rail seat as guiding, adopt grating scale as reference-calibrating, but owing to having adopted linear electric motors and guide rail, in motion process, exist the shortcomings such as friction, hysterisis error, repetitive positioning accuracy and long-time stability that impact is measured.Publication number is that the Chinese patent of CN102374846A discloses a technical scheme that denomination of invention is a kind of closed type displacement sensor calibrating device, tested sensor rotating ring is arranged on moving axis, moving axis adopts power motor as driving, adopt angular contact bearing as support, the standard transducer of opposite side leads by differential head, bearing is as guiding, but owing to having adopted power motor and bearing, the same shortcomings such as friction, hysterisis error that exist in motion process, and the difficulty that required parts are many, process, debug strengthens.
Summary of the invention
The object of the invention is to propose a kind of micro-displacement sensor caliberating device, solve the poor and poor problem of long-time stability of the repetitive positioning accuracy of the measurement that prior art exists.
For achieving the above object, a kind of micro-displacement sensor caliberating device of the present invention comprises adjustment rack, piezoelectric actuator and reference-calibrating assembly;
Described piezoelectric actuator is fixed on described adjustment rack, described piezoelectric actuator drives the moving lever of adjustment rack to realize motion, described reference-calibrating assembly is fixed on described adjustment rack, and described reference-calibrating assembly and micro-displacement sensor to be calibrated are measured the output shift quantity of described moving lever simultaneously.
Described adjustment rack comprises adjustment rack housing, outside connecting rod, inner side connecting rod, upper connecting rod, lower link and moving lever; Described adjustment rack housing is connected with lower link with upper connecting rod by two outside connecting rods respectively, described moving lever is connected with lower link with upper connecting rod by two inner side connecting rods respectively, described outside connecting rod is connected by flexible hinge with upper connecting rod, lower link and adjustment rack housing, and described inner side connecting rod is connected by flexible hinge with upper connecting rod, lower link and moving lever.
Described adjustment rack is integral type structure, whole symmetrical about moving lever major axis, and described adjustment rack is processed by be careful silk thread cutting or galvanic corrosion.
Piezoelectric actuator is fixed on adjustment rack housing, the motion of actuation movement bar, described reference-calibrating assembly is fixed on described adjustment rack housing, described reference-calibrating assembly and the output shift quantity that is arranged on micro-displacement sensor to be calibrated on described adjustment rack housing and measures simultaneously described moving lever.
Described reference-calibrating assembly comprises grating scale, grating ruler reading head and read head support, described grating scale is adhesively fixed on moving lever, described grating ruler reading head is fixed by a pin on read head support, described read head support is fixed by screws on adjustment rack housing, described read head is vertical with the direction of motion of described moving lever, and the data that described grating ruler reading head obtains by the motion of measurement grating scale are as the reference data of output shift quantity.
Beneficial effect of the present invention is: a kind of micro-displacement sensor caliberating device of the present invention is in micro-displacement sensor calibration process, a kind of telecontrol equipment and a kind of higher sensor grating of precision chi as detection reference that micrometric displacement can be provided is provided, by grating scale and micro-displacement sensor to be calibrated, measure the output displacement of moving lever simultaneously, realize the demarcation to micro-displacement sensor to be calibrated.The present invention is simple in structure, does not have the shortcoming of friction and hysterisis error in motion process, and repetitive positioning accuracy is high, long-time stability good.
Accompanying drawing explanation
Fig. 1 is a kind of micro-displacement sensor caliberating device one-piece construction front view of the present invention;
Fig. 2 is a kind of micro-displacement sensor caliberating device one-piece construction schematic diagram of the present invention;
Fig. 3 is the adjustment rack structural representation in a kind of micro-displacement sensor caliberating device of the present invention;
Wherein: 1, adjustment rack, 101, adjustment rack housing, 102, outside connecting rod, 103, inner side connecting rod, 104, upper connecting rod, 105, lower link, 106, moving lever, 107, flexible hinge, 2, piezoelectric actuator, 3, micro-displacement sensor to be calibrated, 4, reference-calibrating assembly, 401, grating scale, 402, grating ruler reading head, 403, read head support.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
Referring to accompanying drawing 1, accompanying drawing 2 and accompanying drawing 3, a kind of micro-displacement sensor caliberating device of the present invention comprises adjustment rack 1, piezoelectric actuator 2 and reference-calibrating assembly 4;
Described piezoelectric actuator 2 is fixed on described adjustment rack 1, and input displacement is acted on to the moving lever 106 of adjustment rack 1, drive moving lever 106 motions of adjustment rack 1, described micro-displacement sensor to be calibrated 3 is fixed on the opposite side of adjustment rack 1, for measuring the output shift quantity of moving lever 106, described reference-calibrating assembly 4 is fixed on described adjustment rack 1, described reference-calibrating assembly 4 is measured the output shift quantity of described moving lever 106 with micro-displacement sensor 3 to be calibrated simultaneously, and then realizes the demarcation to micro-displacement sensor 3 to be calibrated.
Described adjustment rack 1 comprises adjustment rack housing 101, outside connecting rod 102, inner side connecting rod 103, upper connecting rod 104, lower link 105 and moving lever 106, described adjustment rack housing 101 is connected with lower link 105 with upper connecting rod 104 by two outside connecting rods 102 respectively, described moving lever 106 is connected with lower link 105 with upper connecting rod 104 by two inner side connecting rods 103 respectively, described piezoelectric actuator 2 is fixed on adjustment rack housing 101, 106 motions of actuation movement bar, described outside connecting rod 102 and upper connecting rod 104, lower link 105 is connected by flexible hinge 107 with adjustment rack housing 101, described inner side connecting rod 103 and upper connecting rod 104, lower link 105 is connected by flexible hinge 107 with moving lever 106, described moving lever 106 should meet the following conditions with described micro-displacement sensor 3 measurement faces to be calibrated in the horizontal direction near the end of micro-displacement sensor 3 one sides to be calibrated: the movement travel of moving lever 106 is greater than the range of micro-displacement sensor 3 to be calibrated, and in moving lever 106 motion processes, can not touch the measurement face of micro-displacement sensor 3 to be calibrated.
Described adjustment rack 1 is to take the rotational symmetry integral structure that moving lever 106 is axis of symmetry, and described adjustment rack 1 is processed by be careful silk thread cutting or galvanic corrosion.
Described reference-calibrating assembly 4 comprises grating scale 401, grating ruler reading head 402 and read head support 403, described grating scale 401 is adhesively fixed on moving lever 106, described grating ruler reading head 402 is fixed by a pin on read head support 403, described read head support 403 is fixed by screws on adjustment rack housing 101, described grating ruler reading head 402 is vertical with the direction of motion of described moving lever 106, and the data that described grating ruler reading head 402 obtains by 401 motions of measurement grating scale are as the reference data of output shift quantity.
Between the moving lever 106 of adjustment rack 1 and adjustment rack housing 101, by a plurality of inner sides connecting rod 103, outside connecting rod 102, flexible hinge 107 and upper connecting rod 104, be connected with lower link 105, can utilize the elastic deformation transmission of flexible hinge 107 along the displacement of moving lever 106 directions.Therefore,, when the piezoelectric actuator 2 on being fixed on adjustment rack housing 101 moves, can promote moving lever 106 along its axially-movable.The micro-displacement sensor to be calibrated 3 that is now fixed on adjustment rack housing 101 opposite sides can detect the displacement data of moving lever 106.The grating ruler reading head 402 being simultaneously fixed on adjustment rack housing 101 by read head support 403 also can obtain by measuring the motion of grating scale 401 displacement data of moving lever 106.Due to the measuring accuracy of high precision grating scale 401 measuring accuracy higher than micro-displacement sensor 3 to be calibrated, therefore can to the data of micro-displacement sensor 3 to be calibrated, revise by the measurement data of grating scale 401, thereby complete the demarcation of micro-displacement sensor 3 to be calibrated.
Claims (5)
1. a micro-displacement sensor caliberating device, is characterized in that, comprises adjustment rack (1), piezoelectric actuator (2) and reference-calibrating assembly (4);
Described piezoelectric actuator (2) is fixed on described adjustment rack (1), described piezoelectric actuator (2) drives moving lever (106) motion of adjustment rack (1), it is upper that described reference-calibrating assembly (4) is fixed on described adjustment rack (1), and described reference-calibrating assembly (4) and micro-displacement sensor to be calibrated (3) are measured the output shift quantity of described moving lever (106) simultaneously.
2. a kind of micro-displacement sensor caliberating device according to claim 1, it is characterized in that, described adjustment rack (1) comprises adjustment rack housing (101), outside connecting rod (102), inner side connecting rod (103), upper connecting rod (104), lower link (105) and moving lever (106); Described adjustment rack housing (101) is connected with lower link (105) with upper connecting rod (104) by two outside connecting rods (102) respectively, described moving lever (106) is connected with lower link (105) with upper connecting rod (104) by two inner side connecting rods (103) respectively, described outside connecting rod (102) is connected by flexible hinge (107) with upper connecting rod (104), lower link (105) and adjustment rack housing (101), and described inner side connecting rod (103) is connected by flexible hinge (107) with upper connecting rod (104), lower link (105) and moving lever (106).
3. a kind of micro-displacement sensor caliberating device according to claim 1 and 2, it is characterized in that, described adjustment rack (1) is integral type structure, whole moving lever (106) major axis about adjustment rack (1) is symmetrical, and described adjustment rack (1) is processed by be careful silk thread cutting or galvanic corrosion.
4. a kind of micro-displacement sensor caliberating device according to claim 2, it is characterized in that, piezoelectric actuator (2) is fixed on adjustment rack housing (101), actuation movement bar (106) motion, it is upper that described reference-calibrating assembly (4) is fixed on described adjustment rack housing (101), described reference-calibrating assembly (4) and the output shift quantity that is arranged on micro-displacement sensor to be calibrated (3) on described adjustment rack housing (101) and measures simultaneously described moving lever (106).
5. a kind of micro-displacement sensor caliberating device according to claim 1, it is characterized in that, described reference-calibrating assembly (4) comprises grating scale (401), grating ruler reading head (402) and read head support (403), described grating scale (401) is adhesively fixed on moving lever (106), described grating ruler reading head (402) is fixed by a pin on read head support (403), described read head support (403) is fixed by screws on adjustment rack housing (101), described read head is vertical with the direction of motion of described moving lever (106), the data that described grating ruler reading head (402) obtains by measurement grating scale (401) motion are as the reference data of output shift quantity.
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| CN201310675883.1A CN103697819B (en) | 2013-12-12 | 2013-12-12 | A kind of calibration device of micro-displacement sensor |
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| CN201310675883.1A CN103697819B (en) | 2013-12-12 | 2013-12-12 | A kind of calibration device of micro-displacement sensor |
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| CN103697819A true CN103697819A (en) | 2014-04-02 |
| CN103697819B CN103697819B (en) | 2016-08-17 |
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Cited By (10)
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| CN104048588A (en) * | 2014-06-25 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Calibration device for plate condenser displacement sensor |
| CN104075652A (en) * | 2014-07-02 | 2014-10-01 | 中国科学院长春光学精密机械与物理研究所 | Calibration device for capacitance displacement sensor |
| CN105180872A (en) * | 2015-09-07 | 2015-12-23 | 中国科学院长春光学精密机械与物理研究所 | Measuring method and device for high-precision lens interval adjusting ring |
| CN105606052A (en) * | 2016-01-20 | 2016-05-25 | 天津大学 | Micro displacement sensor calibration apparatus based on high-precision rectilinear translation bench |
| CN105763097A (en) * | 2016-04-29 | 2016-07-13 | 西安交通大学 | Stepping piezoelectric actuator with magnetic railing ruler output displacement measurement function and method |
| CN106705877A (en) * | 2017-01-20 | 2017-05-24 | 武汉理工大学 | High-sensitivity fiber Bragg grating strain sensor based on flexible hinges |
| CN107883910A (en) * | 2017-11-09 | 2018-04-06 | 中国航发湖南动力机械研究所 | Portable gap sensor checkout and diagnosis instrument |
| CN107990859A (en) * | 2016-10-27 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor and its application |
| CN114111669A (en) * | 2021-12-08 | 2022-03-01 | 四川金通工程试验检测有限公司 | Calibration device and method for sensor |
| CN114485519A (en) * | 2022-01-10 | 2022-05-13 | 同济大学 | Calibration device and calibration method for flexible rod type bidirectional horizontal displacement sensor |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104048588A (en) * | 2014-06-25 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Calibration device for plate condenser displacement sensor |
| CN104075652A (en) * | 2014-07-02 | 2014-10-01 | 中国科学院长春光学精密机械与物理研究所 | Calibration device for capacitance displacement sensor |
| CN104075652B (en) * | 2014-07-02 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | Capacitance displacement sensor caliberating device |
| CN105180872A (en) * | 2015-09-07 | 2015-12-23 | 中国科学院长春光学精密机械与物理研究所 | Measuring method and device for high-precision lens interval adjusting ring |
| CN105606052A (en) * | 2016-01-20 | 2016-05-25 | 天津大学 | Micro displacement sensor calibration apparatus based on high-precision rectilinear translation bench |
| CN105763097A (en) * | 2016-04-29 | 2016-07-13 | 西安交通大学 | Stepping piezoelectric actuator with magnetic railing ruler output displacement measurement function and method |
| CN107990859A (en) * | 2016-10-27 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor and its application |
| CN107990859B (en) * | 2016-10-27 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Micro-displacement sensor calibration device and application thereof |
| CN106705877A (en) * | 2017-01-20 | 2017-05-24 | 武汉理工大学 | High-sensitivity fiber Bragg grating strain sensor based on flexible hinges |
| CN106705877B (en) * | 2017-01-20 | 2019-05-24 | 武汉理工大学 | A kind of highly sensitive fiber Bragg grating strain sensor based on flexible hinge |
| CN107883910A (en) * | 2017-11-09 | 2018-04-06 | 中国航发湖南动力机械研究所 | Portable gap sensor checkout and diagnosis instrument |
| CN114111669A (en) * | 2021-12-08 | 2022-03-01 | 四川金通工程试验检测有限公司 | Calibration device and method for sensor |
| CN114111669B (en) * | 2021-12-08 | 2024-01-30 | 四川金通工程试验检测有限公司 | Calibration device and method for sensor |
| CN114485519A (en) * | 2022-01-10 | 2022-05-13 | 同济大学 | Calibration device and calibration method for flexible rod type bidirectional horizontal displacement sensor |
| CN114485519B (en) * | 2022-01-10 | 2023-08-29 | 同济大学 | Calibration device and calibration method for flexible rod type bidirectional horizontal displacement sensor |
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| CN103697819B (en) | 2016-08-17 |
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