CN101814857A - Piezoelectric ceramic driver control device and method - Google Patents
Piezoelectric ceramic driver control device and method Download PDFInfo
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- CN101814857A CN101814857A CN 201010154083 CN201010154083A CN101814857A CN 101814857 A CN101814857 A CN 101814857A CN 201010154083 CN201010154083 CN 201010154083 CN 201010154083 A CN201010154083 A CN 201010154083A CN 101814857 A CN101814857 A CN 101814857A
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Abstract
The invention discloses a piezoelectric ceramic driver control device, which comprises a controller, a stabilized voltage supply, a piezoelectric ceramic driver group and control circuits, wherein the controller is connected with the piezoelectric ceramic driver group through the control circuits; the piezoelectric ceramic driver group consists of a plurality of piezoelectric ceramic drivers which are connected with one another in series; the control circuit of each piezoelectric ceramic driver is provided with a control switch; the controller sends out a control signal according to displacements required to be output to load the voltage of the stabilized voltage supply to corresponding piezoelectric ceramic drivers, connected with one another in series, of the piezoelectric ceramic driver group to make the piezoelectric ceramic drivers output the displacements; and the control circuits control the on or off of the control switch of each piezoelectric ceramic driver. The piezoelectric ceramic driver control device has the advantage that the displacement output accuracy of the piezoelectric ceramic driver is greatly improved, and a control system has a simple structure and a low cost and is convenient to be integrated into MEMS which cannot use feedback control.
Description
Technical field
The present invention relates to a kind of piezoelectric ceramic driver control device and method.
Background technology
Nanoscale microposition system is meant that the moving displacement of system arrives in the scope of hundreds of micron at several microns, its resolution, positioning accuracy and repetitive positioning accuracy are in nano level scope, and characteristics are: compact conformation, volume be little, do not have machinery friction, gapless transmission guiding mechanism.In the nanoscale navigation system, micro-displacement driver is very important parts, commonly used has: the electrothermal micro-displacement driver, magnetostriction microdisplacement driver, solenoid actuated micro-displacement driver and piezoelectric micro-displacement actuator etc., wherein, piezoelectric ceramic actuator has the incomparable advantage of other driver in ultraprecise location and micrometric displacement control, as volume little (several cubic millimeters～tens cubic millimeters), the displacement resolution height, response speed fast (tens microseconds), power output big (3500N), conversion efficiency height (50%), do not generate heat, adopting relatively simple electric field controls mode etc., is more satisfactory driving element in the present micrometric displacement technology.
Piezoelectric micro-displacement actuator has obtained to use widely in various fields, as: processing, encapsulation and the assembly manipulation of MEMS (micro electro mechanical system) (MEMS) all need micro-displacement driver.The little processing of electrochemistry is the new technique that is used for three-dimensional ultra micro graph copying processing that occurred in recent years, the mini positioning platform of requirement support electrolysis tank has the degree of freedom of five directions, and the output displacement of each all has nano-precision, is used for adjusting the pose of electrolytic cell.Along with bionic development, single free cell can be arbitrarily caught and be discharged in requirement, or in cell, inject and pick up a certain composition, simultaneously can also measure and write down the cell biological electrical quantity, free cell is caught instrument, and concerning having only several microns cell, key operations is the fine adjustment during near cell, require resolution to reach tens nanometers, therefore need high-precision micro-displacement driver.Develop at present the micro-manipulating robot that can sew up human vein blood vessel and the obstruction of mediation eyeball retinal vein in the world, needed micro-displacement driver equally.In large scale integrated circuit is made, wiring density on the printed circuit board (PCB) is more and more higher, and the assessment, many operations such as detection of material property of reparation, circuit quality of connection and the surface quality of circuit all needs high-precision micro-displacement driver on the printed circuit board (PCB).Utilize the feature of nano level linear Three Degree Of Freedom (XYZ) workbench and scanning probe microscopy (SPM) molecular detection and atom, and be one of importance of current nanosecond science and technology in the world to the nanofabrication technique that atom on the surface of solids is operated and transplanted, be unable to do without the micro-displacement driver of nano-precision equally.In addition, the close adjustment platform (precision reaches 0.1 μ m) that is used for the fiber alignment calibration can make and reach the Best Coupling power location between optical fiber and the device, and compensates any error in the docking operation automatically, also be unable to do without micro-displacement driver.
Though piezoelectric ceramic actuator has obtained to use widely in various fields, but piezoelectric ceramic actuator is at up voltage and fall in the voltage course its output displacement and exist tangible non-linear and sluggish with voltage curve, non-linear and the sluggish displacement output accuracy that reduces open loop control piezoelectric ceramic actuator, therefore in high-precision displacement output, require to adopt closed-loop control, yet closed-loop control has not only increased the complexity and the cost of system, and taken bigger space, therefore should not be integrated with MEMS.
Summary of the invention
At the complex structure and the big defective that takes up room in non-linear and sluggish defective that exists in the piezoelectric ceramic actuator open loop control and the closed-loop control, the present invention proposes and a kind ofly in open loop control, realize nano level micrometric displacement output accuracy, simplified system configuration, reduced the piezoelectric ceramic driver control device and the method for cost.
Technical scheme of the present invention:
Piezoelectric ceramic driver control device, it is characterized in that: comprise controller, stabilized voltage power supply, piezoelectric ceramic actuator group and control circuit, described controller is connected by control circuit with the piezoelectric ceramic actuator group, described piezoelectric ceramic actuator group is in series mutually by a plurality of piezoelectric ceramic actuators, and the control loop of each piezoelectric ceramic actuator is provided with control switch; Described controller sends control signal according to the displacement of required output and the voltage of stabilized voltage power supply is loaded on the piezoelectric ceramic actuator corresponding in the piezoelectric ceramic actuator group of mutual series connection, allows piezoelectric ceramic actuator export required displacement; Described control circuit control each piezoelectric ceramic actuator control switch unlatching or close.
Further, described stabilized voltage power supply output burning voltage is 300V.
Further, described piezoelectric ceramic actuator comprises piezoceramic material, and the both sides of described piezoceramic material are provided with battery lead plate, insulating barrier successively.
Further, be in series with adjustable resistor in the independent controling circuit of described battery lead plate.
Further, the described insulating barrier on the displacement outbound course adopts insulating ceramic materials, is adopting electro-insulating rubber perpendicular to the described insulating barrier on the displacement outbound course.
The piezoelectric ceramic actuator control method is as follows:
1, the output displacement of each piezoelectric ceramic actuator can superpose, and according to required displacement, calculates the displacement that needs which piezoelectric ceramic actuator of output;
2, to send control signal be "open" state by the required piezoelectric ceramic actuator of control circuit control to controller, other be "off" state, stabilized voltage power supply is loaded to required piezoelectric ceramic actuator, regulate by adjustable resistance and adjust the required voltage value of the corresponding displacement of output.
The output displacement calibrating rule of each piezoelectric ceramic actuator is as follows:
When the control mode of a piezoelectric ceramic actuator is " opening ", this piezoelectric ceramic actuator two ends pole plate has the voltage effect, it will extend under electric field action, adopt laser interferometer to demarcate each piezoelectric ceramic actuator output displacement and institute's making alive size, when the output displacement of the 0th piezoelectric ceramic actuator was 1nm, writing down its required voltage was U
0, when the output displacement of the 1st piezoelectric ceramic actuator was 2nm, writing down its required voltage was U
1, when the 2nd piezoelectric ceramic actuator output displacement was 4nm, writing down its required voltage was U
2, when the 3rd piezoelectric ceramic actuator output displacement was 8nm, writing down its required voltage was U
3, and the like, when n piezoelectric ceramic actuator output displacement is 2
nDuring nm, writing down its required voltage is U
n
When the control mode of a piezoelectric ceramic actuator was " pass ", this piezoelectric ceramic actuator two ends pole plate did not have the voltage effect, and corresponding driving device output displacement is 0.
For example: when needing the displacement of piezoelectric ceramic actuator group output 20nm, only needing the control mode of the 2nd and the 4th piezoelectric ceramic actuator is " opening ", and the control mode of other piezoelectric ceramic actuator is that " pass " gets final product; When needing the displacement of driver bank output 151nm, only needing the control mode of the 0th, the 1st, the 2nd, the 4th and the 7th piezoelectric ceramic actuator is " opening ", and the control mode of other piezoelectric ceramic actuator is that " pass " gets final product.
When each piezoelectric ceramic actuator in the driver bank combine mutually and control mode when " opening ", just can obtain much repeatably to export displacement, the quantity (N=n+1) of resulting carry-out bit shift amount and driver is proportional, is 2
N
For example: can export 1024 discrete displacement by the driver bank that 10 (N=10) piezoelectric ceramic actuators are formed, when N=12, can export 4096 discrete displacement by the driver bank that 12 piezoelectric ceramic actuator series connection constitute, these output displacements are evenly distributed in the displacement range an of micron (or several micron), just need not FEEDBACK CONTROL and just can obtain nano level displacement output accuracy and repetitive positioning accuracy by simple " opening ", " pass " control piezoelectric ceramic actuator.
The invention has the advantages that the "on" and "off" that only needs each piezoelectric ceramic actuator control loop of control, do not relate to the process control of boosting with step-down, so avoided traditional piezoelectric ceramic actuator to boost effectively and the step-down control procedure in non-linear and sluggish defective between its output displacement and the voltage curve, improved the displacement output accuracy of piezoelectric ceramic actuator greatly.In addition, this control mode is open loop control, thereby control system is simple in structure, and cost is low, is convenient to be integrated among the MEMS that can't use FEEDBACK CONTROL.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is an open loop control block diagram of the present invention.
Fig. 3 is the single piezoelectric ceramic actuator structural representation of the present invention.
Embodiment
Piezoelectric ceramic driver control device, comprise controller 1, stabilized voltage power supply 4, piezoelectric ceramic actuator group and control circuit 2, described controller 1 is connected by control circuit 2 with the piezoelectric ceramic actuator group, described piezoelectric ceramic actuator group is in series mutually by a plurality of piezoelectric ceramic actuators 3, and the control loop of each piezoelectric ceramic actuator 3 is provided with control switch 5; Described controller 1 sends control signal according to the displacement of required output and the voltage of stabilized voltage power supply 4 is loaded on the piezoelectric ceramic actuator 3 corresponding in the piezoelectric ceramic actuator group of mutual series connection, allows the required displacement of piezoelectric ceramic actuator 3 outputs; The unlatching of the control switch 5 of described control circuit 2 each piezoelectric ceramic actuator 3 of control or close.
Described stabilized voltage power supply 2 output burning voltages are 300V.
Described piezoelectric ceramic actuator 3 comprises piezoceramic material 31, and the both sides of described piezoceramic material 31 are provided with battery lead plate 32, insulating barrier 33 successively.Described piezoceramic material 31 adopts compression molding, and planform manufactures and designs according to actual needs; Described battery lead plate 32 adopts the gold of electroplating one deck 50um thickness at the two ends of piezoceramic material 31 to constitute, and is in series with adjustable resistor R in the independent controling circuit of described battery lead plate 32; Described insulating barrier 33 on the displacement outbound course adopts insulating ceramic materials, is adopting electro-insulating rubber perpendicular to the described insulating barrier on the displacement outbound course 33.
The piezoelectric ceramic actuator control method is as follows:
1, the output displacement of each piezoelectric ceramic actuator can superpose, and according to required displacement, calculates the displacement that needs which piezoelectric ceramic actuator of output;
2, to send control signal be "open" state by the required piezoelectric ceramic actuator of control circuit control to controller, other be "off" state, stabilized voltage power supply is loaded to required piezoelectric ceramic actuator, regulate by adjustable resistance and adjust the required voltage value of the corresponding displacement of output.
The output displacement calibrating rule of each piezoelectric ceramic actuator 3 is as follows:
When the control mode of a piezoelectric ceramic actuator 3 is " opening ", this piezoelectric ceramic actuator two ends pole plate has the voltage effect, it will extend under electric field action, adopt laser interferometer to demarcate each piezoelectric ceramic actuator output displacement and institute's making alive size, when the output displacement of the 0th piezoelectric ceramic actuator was 1nm, writing down its required voltage was U
0, when the output displacement of the 1st piezoelectric ceramic actuator was 2nm, writing down its required voltage was U
1, when the 2nd piezoelectric ceramic actuator output displacement was 4nm, writing down its required voltage was U
2, when the 3rd piezoelectric ceramic actuator output displacement was 8nm, writing down its required voltage was U
3, and the like, when n piezoelectric ceramic actuator output displacement is 2
nDuring nm, writing down its required voltage is U
n
When the control mode of a piezoelectric ceramic actuator was " pass ", this piezoelectric ceramic actuator two ends pole plate did not have the voltage effect, and corresponding driving device output displacement is 0.
For example: when needing the displacement of piezoelectric ceramic actuator group output 20nm, only needing the control mode of the 2nd and the 4th piezoelectric ceramic actuator is " opening ", and the control mode of other piezoelectric ceramic actuator is that " pass " gets final product; When needing the displacement of driver bank output 151nm, only needing the control mode of the 0th, the 1st, the 2nd, the 4th and the 7th piezoelectric ceramic actuator is " opening ", and the control mode of other piezoelectric ceramic actuator is that " pass " gets final product.
When each piezoelectric ceramic actuator in the driver bank combine mutually and control mode when " opening ", just can obtain much repeatably to export displacement, the quantity (N=n+1) of resulting carry-out bit shift amount and driver is proportional, is 2
N
For example: can export 1024 discrete displacement by the driver bank that 10 (N=10) piezoelectric ceramic actuators are formed, when N=12, can export 4096 discrete displacement by the driver bank that 12 piezoelectric ceramic actuator series connection constitute, these output displacements are evenly distributed in the displacement range an of micron (or several micron), just need not FEEDBACK CONTROL and just can obtain nano level displacement output accuracy and repetitive positioning accuracy by simple " opening ", " pass " control piezoelectric ceramic actuator.
The described content of this specification embodiment only is enumerating the way of realization of inventive concept; protection scope of the present invention should not be regarded as only limiting to the concrete form that embodiment states, protection scope of the present invention also reach in those skilled in the art conceive according to the present invention the equivalent technologies means that can expect.
Claims (8)
1. piezoelectric ceramic driver control device, it is characterized in that: comprise controller, stabilized voltage power supply, piezoelectric ceramic actuator group and control circuit, described controller is connected by control circuit with the piezoelectric ceramic actuator group, described piezoelectric ceramic actuator group is in series mutually by a plurality of piezoelectric ceramic actuators, and the control loop of each piezoelectric ceramic actuator is provided with control switch; Described controller sends control signal according to the displacement of required output and the voltage of stabilized voltage power supply is loaded on the piezoelectric ceramic actuator corresponding in the piezoelectric ceramic actuator group of mutual series connection, allows piezoelectric ceramic actuator export required displacement; Described control circuit control each piezoelectric ceramic actuator control switch unlatching or close.
2. piezoelectric ceramic driver control device according to claim 1 is characterized in that: described stabilized voltage power supply output burning voltage is 300V.
3. piezoelectric ceramic driver control device according to claim 1 and 2 is characterized in that: described piezoelectric ceramic actuator comprises piezoceramic material, and the both sides of described piezoceramic material are provided with battery lead plate, insulating barrier successively.
4. piezoelectric ceramic driver control device according to claim 3 is characterized in that: be in series with adjustable resistor in the independent controling circuit of described battery lead plate.
5. piezoelectric ceramic driver control device according to claim 4 is characterized in that: the described insulating barrier on the displacement outbound course adopts insulating ceramic materials, is adopting electro-insulating rubber perpendicular to the described insulating barrier on the displacement outbound course.
6. the control method of piezoelectric ceramic driver control device according to claim 1, its step is as follows:
(1), the output displacement of each piezoelectric ceramic actuator can superpose, and according to required displacement, calculates the displacement that needs which piezoelectric ceramic actuator of output;
(2), to send control signal be "open" state by the required piezoelectric ceramic actuator of control circuit control to controller, other be "off" state, stabilized voltage power supply is loaded to required piezoelectric ceramic actuator, regulate by adjustable resistance and adjust the required voltage value of the corresponding displacement of output.
7. piezoelectric ceramic actuator control method according to claim 6 is characterized in that: the output displacement calibrating rule of each piezoelectric ceramic actuator is as follows:
When the control mode of a piezoelectric ceramic actuator is " opening ", this piezoelectric ceramic actuator two ends pole plate has the voltage effect, it will extend under electric field action, adopt laser interferometer to demarcate each piezoelectric ceramic actuator output displacement and institute's making alive size, when the output displacement of the 0th piezoelectric ceramic actuator was 1nm, writing down its required voltage was U
0, when the output displacement of the 1st piezoelectric ceramic actuator was 2nm, writing down its required voltage was U
1, when the 2nd piezoelectric ceramic actuator output displacement was 4nm, writing down its required voltage was U
2, when the 3rd piezoelectric ceramic actuator output displacement was 8nm, writing down its required voltage was U
3, and the like, when n piezoelectric ceramic actuator output displacement is 2
nDuring nm, writing down its required voltage is U
n
When the control mode of a piezoelectric ceramic actuator was " pass ", this piezoelectric ceramic actuator two ends pole plate did not have the voltage effect, and corresponding driving device output displacement is 0.
8. piezoelectric ceramic actuator control method according to claim 7, it is characterized in that: when each piezoelectric ceramic actuator in the driver bank combine mutually and control mode when " opening ", the quantity N of resulting carry-out bit shift amount and driver is proportional, is 2
N, N=n+1 wherein.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN105423885A (en) * | 2015-11-10 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic |
| CN108896307A (en) * | 2018-05-15 | 2018-11-27 | 东华大学 | A kind of large eccentricity quality rotor-bearing system with self-regulating function |
| CN108981577A (en) * | 2018-06-25 | 2018-12-11 | 苏州健雄职业技术学院 | A kind of piezoelectric ceramics piezoelectric micromotor displacement measurement method |
| CN112180584A (en) * | 2019-07-01 | 2021-01-05 | 三美电机株式会社 | Optical scanning device and control method thereof |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
| CN103697819B (en) * | 2013-12-12 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor |
| CN103986365A (en) * | 2014-05-16 | 2014-08-13 | 中国科学技术大学 | Multi-region drive inertia piezoelectric motor device, scanning probe microscope and control method |
| CN103986365B (en) * | 2014-05-16 | 2016-06-29 | 中国科学技术大学 | Inertia piezoelectric motor device that multi-region drives and scanning probe microscopy and control methods |
| CN105423885A (en) * | 2015-11-10 | 2016-03-23 | 中国科学院长春光学精密机械与物理研究所 | Displacement detection device and detection method of built-in strain gauge piezoelectric ceramic |
| CN105423885B (en) * | 2015-11-10 | 2018-01-05 | 中国科学院长春光学精密机械与物理研究所 | The displacement detector and detection method of built-in strain sheet type piezoelectric ceramic |
| CN108896307A (en) * | 2018-05-15 | 2018-11-27 | 东华大学 | A kind of large eccentricity quality rotor-bearing system with self-regulating function |
| CN108896307B (en) * | 2018-05-15 | 2020-11-06 | 东华大学 | Large-eccentric-mass rotor-bearing system with self-adjusting function |
| CN108981577A (en) * | 2018-06-25 | 2018-12-11 | 苏州健雄职业技术学院 | A kind of piezoelectric ceramics piezoelectric micromotor displacement measurement method |
| CN112180584A (en) * | 2019-07-01 | 2021-01-05 | 三美电机株式会社 | Optical scanning device and control method thereof |
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Open date: 20100825 |