CN1776359A - Micro displament dynamic deformation detection calibrating device and its method - Google Patents
Micro displament dynamic deformation detection calibrating device and its method Download PDFInfo
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Abstract
The calibrating device includes unit for detecting micro displacement and computer data processing unit. The unit for detecting micro displacement includes variable transmission mechanism on base, bracket of output shaft of the variable transmission mechanism, and guide rail. Standard laser sensor for micro displacement is setup at the bracket. Static slider and movable slider linked to the variable transmission mechanism are setup on the guide rail. The laser sensor to be measured is setup above the static slider and movable slider. Sensing part and signal detection unit are setup inside the laser sensor to be measured. Ranging plate is on the movable slider. The signal detection unit is composed of signal amplification circuit, signal process circuit, mixer circuit, modulation circuit, oscillating circuit and signal output circuit. Through RS232, the standard laser sensor is linked to computer data process unit. The invention also discloses calibrating method.
Description
Technical field
The present invention relates to the devices and methods therefor of a kind of micro-movement and deformation detection and data transmission, relate in particular to a kind of detection caliberating device and method thereof that detects and demarcate the every technical performance index of resonance type micro-displacement sensor for test.
Background technology
At present, demarcating for the detection of micro-displacement sensor is to utilize grating measuring principle and laser measurement principle mostly, adopt the caliberating device of grating measuring principle, primary structure is for having a laser ruler, stated accuracy depend on the precision of grating chi and be subjected to the interference of external light source and the rigidity and the influence of temperature change of caliberating device itself bigger.Adopt the detection caliberating device of the micro-displacement sensor of laser measurement principle, though its measuring accuracy influence of temperature change is less, price comparison height for laser instrument itself.Though two kinds are detected caliberating device and all are widely used, its weak point is: it is bigger that the former is influenced by extraneous factor, and precision is lower.General detection is demarcated and is only reached in 0.5-1 level scope, and the straight-line sensor that can not reach far away demarcating the trace variation carries out the effect of precision calibration.Though latter's accuracy of detection has improved, the problem of expensive problem, daily maintenance has highlighted again.In order to improve the precision that detects micro-displacement sensor, make it not only in the requirement that guarantees on the precision to detect and demarcate but also developed in promotion and application, therefore, be badly in need of the detection caliberating device and the method thereof of the high precision micro-displacement sensor of a kind of millimicro meter level of development research.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, providing a kind of accurately measures and measurement result is sent to detection caliberating device and the method thereof that host computer carries out the micro displament dynamic deformation of data processing physics straight line trace movement, this device is by the high magnification ratio speed reducer the mechanical amount of movement of the wide displacement of big radian to be imported processing, thereby reaches the micrometric displacement output of millimicron magnitude straight line machinery and to its effect of demarcating.
In order to solve the problems of the technologies described above, the caliberating device that micro displament dynamic deformation of the present invention detects comprises that micrometric displacement detects unit and computer data processing unit; Described micrometric displacement detects the unit and comprises variable transmission mechanism, variable transmission mechanism output shaft support, the guide rail that is successively set on the base; Described support is provided with standard micrometric displacement laser sensor, the movable slider that described guide rail is provided with quiet slide block and connects with described variable transmission mechanism, described quiet slide block and movable slider top is provided with the measured laser sensor, is provided with sensing element in the described measured laser sensor and signal detects the unit; On described movable slider, also be provided with locater plate; Described signal detects the unit and is made up of signal amplification circuit, signal processing circuit, signal mixer circuit, signal modulation circuit, oscillating circuit at the corresponding levels and signal output apparatus; Described signal amplification circuit is made up of triode BG1, resistance R 1, R2, R3, R4 and adjustable resistance R5, capacitor C 1 and C2, adopts the transistor amplifier structure, and signal is imported by C1, and the signal after the amplification is exported by C2; Described signal processing circuit is formed by amplifying arithmetical unit U1C, resistance R 15 and R16, capacitor C 8 and C9 and D2, after employing 1/4LM324 operational amplifier amplifies signal, send the V/U table to show by C8; Described mixting circuit is formed by amplifying arithmetical unit U1A and U1B, resistance R 6, R7, R13 and adjustable resistance R11, R14, capacitor C 6 and C7, be after oscillatory circuit at the corresponding levels and signal amplification circuit two paths of signals are superposeed through the U1B amplifier, to deliver to signal modulation circuit; Described signal modulation circuit is made up of diode D1 and inductance L 1, capacitor C 10, C11, C12 and C16 and resistance R 17 and R18, and the signal that this circuit is sent U1B the 7th pin here is modulated, and delivers to the input end of BG2 in the signal output apparatus then through C12; Described oscillatory circuit at the corresponding levels adopts the typical structure of LC concussion, the concussion frequency is delivered to the 2nd pin of U1A in the signal mixer circuit by R10; Described standard micrometric displacement laser sensor connects with described computer data processing unit by the RS232 communication interface.
The caliberating device that micro displament dynamic deformation of the present invention detects, wherein, described computer data processing unit comprises power supply stabilization circuit, signal digital amplifier, high-precision micro displacement sensor circuit module and MSC1210 single-chip microcomputer; Described computer data processing unit is finished multichannel switching, signal damping, PGA programming, 24 ∑ Δ A/D of amplification conversion, digital filtering, data processing signal calibration and the UART communication function of feeble signal.It is Switzerland's product of LTC-120 that described normalized optical micro-displacement sensor adopts model, and its frequency of operation is F=1000/s, high static resolution 0.01%.Described variable transmission mechanism adopts high magnification ratio speed reduction unit, and its speed change ratio is in 1: 40 scope.The Measurement Resolution of described optical detection unit is less than or equal to 1 μ m.Described tested sensor adopts mechanically joined structure.
The caliberating device that micro displament dynamic deformation of the present invention detects, wherein, the maximum amount of movement of described movable slider Relative Zero potential reference point is 0～± 1000 μ m, the scale unit of scale sign is less than or equal to Δ L,
Δ L=3/180*40 millimeter=0.000417mm=0.417um (I)
In the formula (I), 180 implication is: per 2 ° is to be 180 lattice in one week of lattice in 360 °; 40 is 1: 40 scale-up factor of speed reduction unit; 3 expression leading screw pitch are 3mm.
The scaling method that micro displament dynamic deformation of the present invention detects may further comprise the steps:
(1) preheating laser sensor and data handling system;
(2) the turn handwheel is adjusted said apparatus, and locks it on the position of mechanical zero reference point;
(3) be fixed on tested sensor on the sliding stand of forming by described holder iron and mobile sliding iron according to its accuracy requirement;
(4) rotate the input that described wheel disc is stipulated big radian displacement in advance, control importing mechanical amount of movement, reach this displacement of locking after the requirement by high magnification ratio speed reduction unit; The displacement of this locking is passed to the standard laser micro-displacement sensor, and as the input quantity of the mechanical micrometric displacement of this sensor;
(5) detect output frequency with frequency meter;
(6) described micrometric displacement optical detection unit is measured the micrometric displacement input quantity;
Wherein, supposing that light propagates in air with speed C, is T in A, used time of B point-to-point transmission round trip, and then 2 distance D of A, B can be used formula (II) expression:
D＝CT/2 (II)
In the formula (II), D represents the distance of laser emission point and testee; C represents the speed that light is propagated in atmosphere; T represents that light comes and goes A, used required time of B point-to-point transmission;
If the light modulated angular frequency is ω, the phase delay that round trip produces on distance D to be measured is φ, and then corresponding time T can be expressed as T=φ/ω; At this moment, D represents with formula (III):
D＝1/2CT＝1/2C·φ/ω＝C/4f(N+ΔN) (III)
In the formula (III), φ represents total phase delay that the signal round trip produces; ω represents the angular frequency of modulation signal, ω=2 π f; N represents to comprise between A, B the number of modulating half-wave; Δ N represents to comprise between A, B the fraction part of the not enough half-wavelength of modulating wave;
(7) detect the unit by signal and export above-mentioned measured value, promptly obtain the calibrating parameters of tested sensor;
(8) detect output frequency with frequency meter.
Compared with prior art, caliberating device that micro displament dynamic deformation of the present invention detects and the beneficial effect that is had thereof are: the present invention adopts the mobile detection technique of straight line trace, data transmission technology and drive technology, be the mechanical amount of movement of the wide displacement of big radian to be imported processing, thereby reach the micrometric displacement output of millimicron magnitude straight line machinery and its effect of demarcating by the high magnification ratio speed reducer.
Description of drawings
Fig. 1 is the front view of the caliberating device of micro displament dynamic deformation detection of the present invention;
Fig. 2 is the left view of caliberating device shown in Figure 1;
Fig. 3 is the theory diagram of micrometric displacement laser sensor among the present invention;
Fig. 4 is the theory diagram that measured signal detects unit 16 among the present invention;
Fig. 5 is the circuit diagram that measured signal detects unit 16 among the present invention;
Fig. 6 is the process flow diagram that the caliberating device that utilizes micro displament dynamic deformation of the present invention to detect is demarcated.
Fig. 7 is the structural representation of institute's accepted standard micrometric displacement laser sensor 6 among the present invention.
Be the explanation of main Reference numeral in the Figure of description of the present invention below:
1---variable transmission mechanism 3---handwheel
4---base 5---leg
6---standard micrometric displacement laser sensor 7---connector
8---leading screw 9---standard micrometric displacement laser sensor support
10---variable transmission mechanism output shaft support 11---guide rail
12---tested micrometric displacement laser sensor 13---movable slider
14---quiet slide block 15---locater plate
16---computer data processing unit 18---index dial
101---signal amplification circuit 102---signal processing circuit
103---mixting circuit 104---signal modulation circuit
105---oscillating circuit 106 at the corresponding levels---signal output apparatus
Embodiment
Below in conjunction with accompanying drawing caliberating device of the present invention is done and to be described in further detail.
As depicted in figs. 1 and 2, the caliberating device that this micro displament dynamic deformation of the present invention detects comprises that micrometric displacement detects unit and computer data processing unit; Described micrometric displacement detects the unit and comprises variable transmission mechanism 1, the output shaft support 10 of variable transmission mechanism 1, the guide rail 11 that is successively set on the base 4; Described variable transmission mechanism adopts high magnification ratio speed reduction unit, and its speed change ratio is in 1: 40 scope.Described support 10 is provided with the standard micrometric displacement laser sensor of fixing with standard micrometric displacement laser sensor support 96, it is Switzerland's product of LTC-120 that described normalized optical micro-displacement sensor adopts model, its frequency of operation is F=1000/s, high static resolution 0.01%.The movable slider 13 that described guide rail 11 is provided with quiet slide block 14 and connects with described variable transmission mechanism 1, the top of described quiet slide block 14 and movable slider 13 is provided with measured laser sensor 12, be provided with sensing element in the described measured laser sensor 12 and signal detects the unit, described tested sensor adopts the connector 7 of mechanically joined structure.On described movable slider 13, also be provided with locater plate 15 as target.Whole device is fixed on ground with leg 5.
As shown in Figure 3, the course of work of described measured laser sensor 12 is that signal is sent through modulators modulate by laser instrument (light source) receive, pass through the signal demodulation behind target reflection, final output also shows, thereby finished a work period, that is, as the signal that marks among Fig. 3 transmission course by A → B → C.
Described signal detects the unit and is made up of signal amplification circuit 101, signal processing circuit 102, signal mixer circuit 103, signal modulation circuit 104, oscillating circuit at the corresponding levels 105 and signal output apparatus 106; Described signal amplification circuit 101 is made up of triode BG1, resistance R 1, R2, R3, R4 and adjustable resistance R5, capacitor C 1 and C2, adopts the transistor amplifier structure, and signal is imported by C1, and the signal after the amplification is exported by C2; Described signal processing circuit 102 is formed by amplifying arithmetical unit U1C, resistance R 15 and R16, capacitor C 8 and C9 and D2, after employing 1/4LM324 operational amplifier amplifies signal, send the V/U table to show by C8; Described mixting circuit 103 is formed by amplifying arithmetical unit U1A and U1B, resistance R 6, R7, R13 and adjustable resistance R11, R14, capacitor C 6 and C7, be after oscillatory circuit 105 at the corresponding levels and signal amplification circuit 101 two paths of signals are superposeed through the U1B amplifier, to deliver to signal modulation circuit 104; Described signal modulation circuit 104 is made up of diode D1 and inductance L 1, capacitor C 10, C11, C12 and C16 and resistance R 17 and R18, and the signal that this circuit is sent U1B the 7th pin here is modulated, and delivers to the input end of BG2 in the signal output apparatus 106 then through C12; Described oscillatory circuit at the corresponding levels 105 adopts the typical structure of LC concussion, the concussion frequency is delivered to the 2nd pin of U1A in the signal mixer circuit 103 by R10; Described signal output apparatus 106 is made up of inductance RFC, capacitor C 13 and C14 and BG2, and the signal after the mixing that C12 is sent here is delivered to the drain electrode output of the grid of BG2 by BG2.
As shown in Figure 7, described standard micrometric displacement laser sensor 6 fits together laser instrument (light source), modulator, reflection (signal reception), demodulator of PM signal PM, data processing output unit, and signal is by the output of RS485/RS232 mouth.Because the output signal of described normalized optical micro-displacement sensor 6 has digital quantity and analog quantity interface, carry out data processing so by the RS232 communication interface data are sent into computing machine, promptly described standard micrometric displacement laser sensor 6 connects with described computer data processing unit 16 by the RS232 communication interface.Described computer data processing unit 16 comprises power supply stabilization circuit, signal digital amplifier, high-precision micro displacement sensor circuit module and MSC1210 single-chip microcomputer; The PCI-1713 data acquisition signal numeral that described signal digital amplifier and high-precision micro displacement sensor circuit module all adopt Beijing Ao Jielong Science and Technology Ltd. to produce is amplified and the high-precision micro displacement sensor circuit module, and its A/D converter sampling rate can reach 100KS/s; The CL-C-25-J type that described power supply stabilization circuit adopts city, Changzhou connection power supply Manufacturing Co., Ltd to produce.Described computer data processing unit is finished multichannel switching, signal damping, PGA programming, 24 ∑ Δ A/D of amplification conversion, digital filtering, data processing signal calibration and the UART communication function of feeble signal.The Measurement Resolution of described optical detection unit is less than or equal to 1 μ m.
The principle of work of the caliberating device that micro displament dynamic deformation of the present invention detects is to adopt standard metering instrument comparison method.That is: by adjustment, eliminate the gap between each link of mechanical hook-up, the absolute displacement amount of proofreading and correct tested micro-displacement sensor to the micrometric displacement amount of laser sensor.The calculating of its displacement is shown in formula (I):
Δ L=3/180*40 millimeter=0.000417mm=0.417um (I)
In the formula (I), 180 implication is: per 2 ° is to be 180 lattice in one week of lattice in 360 °; 40 is 1: 40 scale-up factor of speed reduction unit; The pitch of 3 expression leading screws 8 is 3mm; Therefore, (I) draws by formula: handwheel 3 revolutions move lattice, and then the rectilinear motion of movable slider 13 is approximately equal to 0.417um.Just, among the present invention, the maximum amount of movement of described movable slider Relative Zero potential reference point is 0～± 1000 μ m, and the scale unit of scale sign is less than or equal to 0.417um.
The scaling method that micro displament dynamic deformation of the present invention detects as shown in Figure 6, may further comprise the steps:
(1) preheating laser sensor and data handling system, step 601;
(2) the turn handwheel is adjusted said apparatus, and locks it on the position of mechanical zero reference point 602 steps;
(3) tested sensor is fixed on the sliding stand of being made up of described holder iron and mobile sliding iron step 603 according to its accuracy requirement;
(4) rotate the input that described wheel disc is stipulated big radian displacement in advance, control importing mechanical amount of movement, reach this displacement of locking after the requirement by high magnification ratio speed reduction unit; The displacement of this locking is passed to the standard laser micro-displacement sensor, and as the input quantity of the mechanical micrometric displacement of this sensor, step 604;
(5) detect output frequency, step 605 with frequency meter;
(6) described micrometric displacement optical detection unit is measured step 606 to the micrometric displacement input quantity;
Wherein, supposing that light propagates in air with speed C, is T in A, used time of B point-to-point transmission round trip, and then 2 distance D of A, B can be used formula (II) expression:
D＝CT/2 (II)
In the formula (II), D represents the distance between laser emission point and the locater plate 15; C represents the speed that light is propagated in atmosphere; T represents that light comes and goes A, used required time of B point-to-point transmission;
If the light modulated angular frequency is ω, the phase delay that round trip produces on distance D to be measured is φ, and then corresponding time T can be expressed as T=φ/ω; At this moment, D represents with formula (III):
D＝1/2CT＝1/2C·φ/ω＝C/4f(N+ΔN) (III)
In the formula (III), φ represents total phase delay that the signal round trip produces; ω represents the angular frequency of modulation signal, ω=2 π f; N represents to comprise between A, B the number of modulating half-wave; Δ N represents to comprise between A, B the fraction part of the not enough half-wavelength of modulating wave;
(7) detect the unit by signal and export above-mentioned measured value, promptly obtain the calibrating parameters of tested sensor, step 607;
(8) detect output frequency, step 608 with frequency meter.
So far, finished the testing process of micrometric displacement.
Although in conjunction with the accompanying drawings the preferred embodiments of the present invention are described above; but the present invention is not limited to above-mentioned embodiment; above-mentioned embodiment only is schematic; rather than it is restrictive; those of ordinary skill in the art is under the enlightenment of this reality invention; not breaking away under the scope situation that aim of the present invention and claim protect, can also make a lot of forms, these all belong within the protection of the present invention.
Claims (9)
1. the caliberating device that micro displament dynamic deformation detects is characterized in that, comprises that micrometric displacement detects unit and computer data processing unit;
Described micrometric displacement detects the unit and comprises variable transmission mechanism, variable transmission mechanism output shaft support, the guide rail that is successively set on the base; Described support is provided with standard micrometric displacement laser sensor, the movable slider that described guide rail is provided with quiet slide block and connects with described variable transmission mechanism, described quiet slide block and movable slider top is provided with the measured laser sensor, is provided with sensing element in the described measured laser sensor and signal detects the unit; On described movable slider, also be provided with locater plate;
Described signal detects the unit and is made up of signal amplification circuit, signal processing circuit, signal mixer circuit, signal modulation circuit, oscillating circuit at the corresponding levels and signal output apparatus;
Described signal amplification circuit is made up of triode BG1, resistance R 1, R2, R3, R4 and adjustable resistance R5, capacitor C 1 and C2, adopts the transistor amplifier structure, and signal is imported by C1, and the signal after the amplification is exported by C2;
Described signal processing circuit is formed by amplifying arithmetical unit U1C, resistance R 15 and R16, capacitor C 8 and C9 and D2, after employing 1/4LM324 operational amplifier amplifies signal, send the V/U table to show by C8;
Described mixting circuit is formed by amplifying arithmetical unit U1A and U1B, resistance R 6, R7, R13 and adjustable resistance R11, R14, capacitor C 6 and C7, be after oscillatory circuit at the corresponding levels and signal amplification circuit two paths of signals are superposeed through the U1B amplifier, to deliver to signal modulation circuit;
Described signal modulation circuit is made up of diode D1 and inductance L 1, capacitor C 10, C11, C12 and C16 and resistance R 17 and R18, and the signal that this circuit is sent U1B the 7th pin here is modulated, and delivers to the input end of BG2 in the signal output apparatus then through C12;
Described oscillatory circuit at the corresponding levels adopts the typical structure of LC concussion, the concussion frequency is delivered to the 2nd pin of U1A in the signal mixer circuit by R10;
Described standard micrometric displacement laser sensor connects with described computer data processing unit by the RS232 communication interface.
2. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, described computer data processing unit comprises power supply stabilization circuit, signal digital amplifier, high-precision micro displacement sensor circuit module and MSC1210 single-chip microcomputer; Described computer data processing unit is finished multichannel switching, signal damping, PGA programming, 24 ∑ Δ A/D of amplification conversion, digital filtering, data processing signal calibration and the UART communication function of feeble signal.
3. the caliberating device that micro displament dynamic deformation according to claim 2 detects, wherein, described signal digital amplifier and high-precision micro displacement sensor circuit module all adopt the product of BeiJing, China Ao Jielong Science and Technology Ltd., the model of described signal digital amplifier is PCI-1713, the sampling rate of its A/D converter is 100KS/s, the CL-C-25-J type that described power supply stabilization circuit adopts city, Chinese Changzhou connection power supply Manufacturing Co., Ltd to produce.
4. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, it is Switzerland's product of LTC-120 that described normalized optical micro-displacement sensor adopts model, its frequency of operation is F=1000/s, high static resolution 0.01%.
5. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, described variable transmission mechanism adopts high magnification ratio speed reduction unit, and its speed change ratio is in 1: 40 scope.
6. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, the Measurement Resolution of described optical detection unit is less than or equal to 1 μ m.
7. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, described tested sensor adopts mechanically joined structure.
8. the caliberating device that micro displament dynamic deformation according to claim 1 detects, wherein, the maximum amount of movement of described movable slider Relative Zero potential reference point is 0～± 1000 μ m, the scale unit of scale sign is less than or equal to Δ L,
Δ L=3/180*40 millimeter=0.000417mm=0.417um (I)
In the formula (I), 180 implication is: per 2 ° is to be 180 lattice in one week of lattice in 360 °; 40 is 1: 40 scale-up factor of speed reduction unit; 3 expression leading screw pitch are 3mm.
9. the method that the caliberating device that adopts micro displament dynamic deformation according to claim 1 to detect detects is characterized in that, may further comprise the steps:
(1) preheating laser sensor and data handling system;
(2) the turn handwheel is adjusted said apparatus, and locks it on the position of mechanical zero reference point;
(3) be fixed on tested sensor on the sliding stand of forming by described holder iron and mobile sliding iron according to its accuracy requirement;
(4) rotate the input that described wheel disc is stipulated big radian displacement in advance, control importing mechanical amount of movement, reach this displacement of locking after the requirement by high magnification ratio speed reduction unit; The displacement of this locking is passed to the standard laser micro-displacement sensor, and as the input quantity of the mechanical micrometric displacement of this sensor;
(5) detect output frequency with frequency meter;
(6) described micrometric displacement optical detection unit is measured the micrometric displacement input quantity;
Wherein, supposing that light propagates in air with speed C, is T in A, used time of B point-to-point transmission round trip, and then 2 distance D of A, B can be used formula (II) expression:
D＝CT/2 (II)
In the formula (II), D represents the distance of laser emission point and testee; C represents the speed that light is propagated in atmosphere; T represents that light comes and goes A, used required time of B point-to-point transmission;
If the light modulated angular frequency is ω, the phase delay that round trip produces on distance D to be measured is φ, and then corresponding time T can be expressed as T=φ/ω; At this moment, D represents with formula (III):
D＝1/2CT＝1/2C·φ/ω＝C/4f(N+ΔN) (III)
In the formula (III), φ represents total phase delay that the signal round trip produces; ω represents the angular frequency of modulation signal, ω=2 π f; N represents to comprise between A, B the number of modulating half-wave; Δ N represents to comprise between A, B the fraction part of the not enough half-wavelength of modulating wave;
(7) detect the unit by signal and export above-mentioned measured value, promptly obtain the calibrating parameters of tested sensor;
(8) detect output frequency with frequency meter.
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| CNB2005101221642A CN100359285C (en) | 2005-12-05 | 2005-12-05 | Micro displament dynamic deformation detection calibrating device and its method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
| CN107588729A (en) * | 2017-09-04 | 2018-01-16 | 上海理工大学 | A kind of microdisplacement device |
| CN107883910A (en) * | 2017-11-09 | 2018-04-06 | 中国航发湖南动力机械研究所 | Portable gap sensor checkout and diagnosis instrument |
| CN110849315A (en) * | 2018-12-26 | 2020-02-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Dynamic strain tracing calibration method |
| CN114252002A (en) * | 2022-02-25 | 2022-03-29 | 国科大杭州高等研究院 | Sub-nanometer-level high-precision micro-displacement device capable of being calibrated and application |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1018475B (en) * | 1988-03-22 | 1992-09-30 | 上海第二光学仪器厂 | Real time comprehensive correction method for accurate length measurement and control and its device |
| ATE299273T1 (en) * | 2002-01-23 | 2005-07-15 | Micro Optronic Messtechnik Gmb | METHOD AND DEVICE FOR OPTICAL DISTANCE MEASUREMENT |
-
2005
- 2005-12-05 CN CNB2005101221642A patent/CN100359285C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697819A (en) * | 2013-12-12 | 2014-04-02 | 中国科学院长春光学精密机械与物理研究所 | Calibration device of micro-displacement sensor |
| CN103697819B (en) * | 2013-12-12 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor |
| CN107588729A (en) * | 2017-09-04 | 2018-01-16 | 上海理工大学 | A kind of microdisplacement device |
| CN107883910A (en) * | 2017-11-09 | 2018-04-06 | 中国航发湖南动力机械研究所 | Portable gap sensor checkout and diagnosis instrument |
| CN110849315A (en) * | 2018-12-26 | 2020-02-28 | 中国航空工业集团公司北京长城计量测试技术研究所 | Dynamic strain tracing calibration method |
| CN114252002A (en) * | 2022-02-25 | 2022-03-29 | 国科大杭州高等研究院 | Sub-nanometer-level high-precision micro-displacement device capable of being calibrated and application |
| CN114252002B (en) * | 2022-02-25 | 2022-06-21 | 国科大杭州高等研究院 | Sub-nanometer level high-precision micro-displacement device capable of being calibrated |
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| CN100359285C (en) | 2008-01-02 |
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