CN107367218A - The inductance sensor calibration method and device of declination error compensation - Google Patents
The inductance sensor calibration method and device of declination error compensation Download PDFInfo
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- CN107367218A CN107367218A CN201610311955.8A CN201610311955A CN107367218A CN 107367218 A CN107367218 A CN 107367218A CN 201610311955 A CN201610311955 A CN 201610311955A CN 107367218 A CN107367218 A CN 107367218A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The inductance sensor calibration method of declination error compensation belongs to Technology of Precision Measurement field with device.For its calibration method with device using two-frequency laser interferometer as motion benchmark, supersonic motor carries out big stroke, fine positioning as director element, linear grating chi as driving element, spherical guide as feedback element.Pitching and the yaw error of displacement transmission mechanism motion are compensated using four current vortex sensors；The present invention can effectively solve the contradiction between calibrating device for displacement sensor stroke and precision, realize the dynamic static calibration of big stroke, high-precision inductance displacement sensor.
Description
Technical field
The invention belongs to Technology of Precision Measurement field, relates generally to a kind of inductance sensor of declination error compensation
Calibration method and device.
Background technology
At present, Chinese large-sized revolution at a high speed equipment does not have ultra precise measurement means, and assembly precision can not ensure,
Efficiency of assembling is low, engine luggine noise etc., and these are all to restrict China's war industry and national economy hair
The great difficult problem of exhibition.Large high-speed revolution equipment refers mainly to all kinds of large-scale high-end gas-turbine units, mainly
Including aero-engine, warship marine gas turbine and high-performance power station combustion engine.At present, Aeroengine Industries
War industry and the mainstay of the national economy industry of World Airways power are turned into.Aero-engine is pursuing height
On the premise of performance, the high quality, high reliability and long service live of product are also pursued, will both ten
Divide difficult and conflicting target to take into account, and be improved simultaneously, be very difficult；In addition
Aero-engine works in extreme environment, and key components and parts are worked under high temperature, high pressure, great loading capacity,
Therefore the difficulty of design and the manufacture of aero-engine further increases.
Engine luggine is a key factor for influenceing aircraft safety, and reacts a weight of engine performance
Want index.Engine turbine component speed is high, quality is big, is a main vibration source of engine.In order to drop
This low influence, except being eliminated during engine dynamic balancing measurement, it is necessary to strictly control its assembling
Process, because engine assembly is dynamically balanced previous step, cause to shake by assembly Form and position error precision is low
Can be amplified when running at high speed by moving by 100 to 1000 times, and beat caused by eliminating concentricity/axiality during assembling can
Largely to reduce dynamically balanced pressure.So the key technology as lifting aero-engine performance,
The accurate measurement of concentricity/axiality or even cylindricity is increasingly taken seriously in aero-engine assembling process.
Sensor is in concentricity/axiality as the extraction element of the sub- surface profile information of aero-engine sound
Accurate measurement to cylindricity is just particularly important, mechanical system and circuit system the institute band of displacement transducer
An important factor for error come is limiting sensor precision, in order to suppress or compensate these errors, it is necessary to align
Displacement sensor carries out calibration process, can be traceable on the benchmark of higher precision.Realize to high accuracy
The calibration of displacement transducer is, it is necessary to design a displacement transducer calibration system with higher precision.Respectively
Stroke between kind displacement transducer also has larger difference, and some displacement transducer strokes can reach tens millis
Even several meters of rice, some then can only achieve several microns of stroke.Therefore, need to make calibration system have big stroke,
High-precision feature could meet the calibration requirements of nano-sensor.But stroke and precision inherently contradiction
, this also increases the design difficulty of calibration system, and there is an urgent need to big stroke, high precision displacement biography at present
The reason for sensor calibration system.
Changchun Institute of Optics, Fine Mechanics and Physics, CAS proposes that a kind of demarcation capacity plate antenna displacement passes
Device (the capacity plate antenna calibration device for displacement sensor of sensor.Publication number：CN104048588A).The dress
Put and be arranged on guiding mechanism front end as displacement datum, sensor tested surface using one-axis laser interferometer, lead
The symmetrical parallel quadrangular mechanism of Planar Mechanisms is used to mechanism, capacity plate antenna displacement transducer is arranged on sensor
Among support base, support base is arranged on micro-displacement adjustment mechanism both sides, and driving is provided with the left end of driver
Device push rod, the guiding mechanism of the driver push rod pushing tow micro-displacement adjustment mechanism do single-degree-of-freedom linear motion,
And then realize the demarcation to capacity plate antenna displacement transducer.The device has problems in that：It is only limited to flat
Plate capacitance displacement sensor is demarcated, and it is smaller to demarcate stroke.
It is (straight that Changzhou Institute of Measurement ＆ Testing Technology proposes a kind of device for linear displacement transducer calibration
Linear movement pick-up auto-calibration device.Publication number：CN103630099A).The device mainly includes one
Pedestal, bilinear guide rail, grating scale, servomotor, vertical lift device are fixed on pedestal；Roller bearing silk
Bar is connected by shaft coupling with servomotor；Leveling device, universal fixturing, locking nut are snapped into one another
And it is connected with vertical lift device；Slidingtype laser mirror support frame, slidingtype laser interference mirror support frame,
Slidingtype two-frequency laser interferometer support frame is fixed on line slideway, wherein steady brace, laser mirror,
Grating rule read sensor is fixed on slidingtype reflector support, and laser interference mirror is fixed on slidingtype and done
Mirror support frame is related to, two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer support frame, Ke Yishi
The now automatic calibration to the polytype linear displacement transducer such as rod-pulling type, dragline type and calibration.The device
Have problems in that：Stroke and precision index are not taken into account, precision is relatively low, can not realize high precision displacement
Pick up calibration.
German federal physical technique institute (PTB) and Physik-Instrumente companies cooperate, and develop a kind of use
In the novel sports device of contact type probe displacement transducer dynamic property calibration, the probe displacement transducer can
To use in topography measurement, surface profile measurement and measurement of coordinates.The device has that size is small, and integrated level is high
The characteristics of, system produces motion using piezoelectric ceramic tube, and is measured in real time by a mini optical fibre interferometer,
Measurement feedback to DSP Processor is realized into closed-loop control, therefore, the calibration platform can be traceable to state
Family length standard (Rong Liang, Otto Jusko, Frank Ludicke, Michael Neugebauer.A novel
piezo vibration platform for probe dynamic performance calibration[J].Measurement
Science And Technology,Meas.Sci.Technol.12(2001)1509–1514).The device calibration row
Journey is small, can not realize and big stroke, high-precision displacement transducer are calibrated.
The content of the invention
For above-mentioned the shortcomings of the prior art, a kind of inductance sensor calibration side of declination error compensation is proposed
Method and device, to solve the contradiction between existing calibrating device for displacement sensor stroke and precision, realize big row
The dynamic static calibration of journey, high-precision inductance displacement sensor.
The object of the present invention is achieved like this：
A kind of the inductance sensor calibration method and device of declination error compensation, this method can calibrate electricity with device
Feel the linearity of displacement transducer；Its feature mainly include be calibrated displacement transducer, displacement transmission mechanism and
Displacement datum instrument three parts, the displacement transducer that is calibrated is inductance displacement sensor, and inductance displacement passes
Sensor is gripped using sensor holders arm, adjusts the position of inductance displacement sensor, ensures inductance
The chaining pin axis of movement of displacement transducer is conllinear with optical axis where the measuring beam of two-frequency laser interferometer, sensing
Device bearing is arranged on base station, and sensor holders arm is fixed on the side of sensor support base；The displacement transmission
Mechanism is using supersonic motor direct drive spherical guide mode, and displacement transmission mechanism is by spherical guide, ultrasound
Ripple motor, linear grating chi, linear grating ruler reading head and calibration platform composition, the rolling of the spherical guide
Pearl guiderail base is arranged on base station, ensures the measurement of the axis of movement and two-frequency laser interferometer of spherical guide
Light beam is parallel, and the supersonic motor mover of the supersonic motor is close to the spherical guide sliding block of spherical guide,
When ensureing on the frictional force effect spherical guide of supersonic motor, spherical guide can move along axis of movement, surpass
Sound wave motor support base is arranged on base station, and the supersonic motor stator of supersonic motor is arranged on supersonic motor
On bearing, the linear grating chi is attached to the spherical guide sliding block lateral surface of spherical guide, ensures linear grating
Chi is parallel with the axis of movement of spherical guide, and grating scale supporting plate is arranged on base station, linear grating chi reading
Head is arranged in grating scale supporting plate, and the outside of the spherical guide sliding block positioned at spherical guide, ensures straight line
Grating ruler reading head is contour and parallel with linear grating chi, and the calibration platform is by pinboard, pick up calibration
Plate and measurement speculum group are into pinboard is connected with spherical guide, and measurement speculum is located at double-frequency laser interference
On the optical path of instrument, and on pinboard, pick up calibration plate is arranged on the other end on pinboard,
On the optical axis where measuring beam of the alignment groove in two-frequency laser interferometer on guarantee pick up calibration plate；
Command displacement transmission mechanism carries out back to zero motion, is returned to the initial zero of calibrating installation；Command displacement passes
Pass mechanism and carry out pressure table motion, cause it to move to inductance displacement sensor calibration starting point；The displacement datum
Instrument uses two-frequency laser interferometer, and the measuring beam of two-frequency laser interferometer can provide the position of whole device
Benchmark is moved, interferometer bearing is packed on base station, and two-frequency laser interferometer is packed on interferometer bearing；Electricity
Eddy current sensor is used for measuring caused deflection angle and the angle of pitch in displacement transmission mechanism motion process, described
Current vortex sensor is distributed the spherical guide sliding block both sides for being arranged in spherical guide two-by-two, and wherein current vortex senses
Device one is arranged on base station with current vortex sensor two, ensures that the probe of two current vortex sensors is contour, and with
The spherical guide sliding block side of spherical guide is parallel, and current vortex sensor three is fixed on current vortex sensor four
On the spherical guide sliding block another side of spherical guide, ensure two current vortex sensors probe it is contour, and with quilt
Survey metallic plate is parallel, and the tested metallic plate is fixed on base station；Command displacement transmission mechanism carries out calibration fortune
It is dynamic, in inductance displacement sensor calibration stroke, 10 points are chosen at equal intervals, when displacement transmission mechanism moves
During to selection measurement point, synchronous acquisition two-frequency laser interferometer displacement measurement s1', current vortex sensor one surveys
Obtain shift value s2', current vortex sensor two measure shift value s3', current vortex sensor three measure shift value s4'、
Current vortex sensor four measures shift value s5' and inductance displacement sensor shift value s；Utilize current vortex sensor one
Measure shift value s2', current vortex sensor two measure shift value s3', current vortex sensor three measure shift value s4'、
Current vortex sensor four measures shift value s5' to two-frequency laser interferometer displacement measurement s1' compensate, obtain
Displacement measurement s' after two-frequency laser interferometer compensation；The data collected progress linear fit is obtained into function
yi=k × si+ b, wherein, i=1,2 ..., 10, yiFor inductance displacement sensor displacement measurement, k after fitting
For fitting coefficient, b is to be fitted intercept, siFor inductance displacement sensor displacement measurement before fitting, then calibration row
Maximum nonlinearity erron max in journey | yi-si' | the ratio with gamut is the linearity, wherein, i=1,2 ...,
10, si' to calibrate, stroke is interior to choose displacement measurement after measurement point two-frequency laser interferometer compensates.
Compared with prior art, it is characteristic of the invention that：
The present invention directly drives the structure of spherical guide using supersonic motor, and is carried with two-frequency laser interferometer
For displacement datum, while calibrating installation calibration stroke is improved, moreover it is possible to it is higher to ensure that calibrating installation has
Precision.It is real using deflection of the electric vortex sensor measuring displacement transmission mechanism in motion process and the angle of pitch
When monitor posture of the calibrating installation in motion process, line position of going forward side by side moves compensation deals, so as to eliminate calibration
The error that device is deflected in motion process and pitching is brought, ensure that calibrating installation calibration accuracy.
Brief description of the drawings：
Fig. 1 is inductance displacement sensor calibrating installation structural representation
Fig. 2 is inductance displacement sensor structural representation
Fig. 3 is pick up calibration plate structure schematic diagram
Fig. 4 is two-frequency laser interferometer structural representation
Fig. 5 is the arrangement of current vortex sensor position and motion platform schematic diagram
Fig. 6 is eddy current sensor displacement compensation principle schematic diagram
Piece number in figure：1-sensor support base, 2-sensor holders arm, 3-inductance displacement sensor, 3a-
Chaining pin, 4-supersonic motor, 4a-supersonic motor mover, 4b-supersonic motor stator, 4c-ultrasound
Ripple motor support base, 5-pick up calibration plate, 5a-alignment groove, 6-pinboard, 7-measurement speculum,
8-two-frequency laser interferometer, 8a-measuring beam, 9-interferometer bearing, 10-base station, 11-grating scale branch
Fagging, 12-linear grating ruler reading head, 13-linear grating chi, 14-current vortex sensor, 14a-electricity
Eddy current sensor one, 14b-current vortex sensor two, 14c-current vortex sensor three, 14d-current vortex pass
Sensor four, 14e-tested metallic plate, 15-spherical guide, 15a-spherical guide base, 15b-ball are led
Rail sliding block.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
The inductance sensor calibration method and device, methods described of a kind of declination error compensation be with device：Entirely
Device, which is broadly divided into, is calibrated displacement transducer, displacement transmission mechanism and displacement datum instrument three parts.Entirely
Device is placed on vibration-isolating platform, is placed under isoperibol.The displacement transducer that is calibrated uses inductance
Displacement transducer 3, inductance displacement sensor 3 are gripped using sensor holders arm 2, adjust inductance
The position of displacement transducer 3, ensure that the chaining pin 3a axis of movements of inductance displacement sensor 3 are done with double-frequency laser
Optical axis where the measuring beam 8a of interferometer 8 is conllinear, and sensor support base 1 is arranged on base station 10, sensor
Clamping limb 2 is fixed on the side of sensor support base 1.The displacement transmission mechanism is straight using supersonic motor 4
The driving mode of spherical guide 15 is connect, displacement transmission mechanism is by spherical guide 15, supersonic motor 4, line light
Grid chi 13, linear grating ruler reading head 12 and calibration platform composition.The spherical guide of the spherical guide 15
Base 15a is arranged on base station 10, ensures the measuring beam 8a of its axis of movement and two-frequency laser interferometer 8
Parallel, the supersonic motor mover 4a of the supersonic motor 4 is close to the spherical guide cunning of spherical guide 15
Block 15b, when ensureing on the frictional force effect spherical guide 15 of supersonic motor 4, spherical guide 15 can be along fortune
Shaft line is moved, and the supersonic motor stator 4b of supersonic motor 4 is arranged on supersonic motor bearing 4c,
Supersonic motor bearing 4c is arranged on base station 10, and the linear grating chi 13 is attached to spherical guide 15
Spherical guide sliding block 15b lateral surfaces, ensure that linear grating chi 13 is parallel with the axis of movement of spherical guide 15,
Grating scale supporting plate 11 is arranged on base station 10, and linear grating ruler reading head 12 is arranged on grating scale supporting plate
On 11, and the outside of the spherical guide sliding block 15b positioned at spherical guide 15, ensure linear grating ruler reading head
12 is contour and parallel with linear grating chi 13.The calibration platform is by pinboard 6, the and of pick up calibration plate 5
Measurement speculum 7 forms, and pinboard 6 is connected with spherical guide 15, and measurement speculum 7 is located at double-frequency laser
On the optical path of interferometer 8, and on pinboard 6, pick up calibration plate 5 is arranged on pinboard 6
On the other end, ensure measurements of the alignment groove 5a on pick up calibration plate 5 in two-frequency laser interferometer 8
On optical axis where light beam 8a.Command displacement transmission mechanism carries out back to zero motion, and displacement transmission mechanism finds rolling
The zero-bit of pearl guide rail 15, as initial zero.Command displacement transmission mechanism carries out pressure table motion, spherical guide
15 from initial zero, high speed and uniform motion before table is pressed, after telogenesis work(is pressed, spherical guide 15
Low speed uniform motion, move to inductance displacement sensor 3 and calibrate stroke starting point.The displacement datum instrument
Using two-frequency laser interferometer 8, the measuring beam 8a of two-frequency laser interferometer 8 can provide whole device
Displacement datum, interferometer bearing 9 are packed on base station 10, and two-frequency laser interferometer 8 is packed in interferometer branch
On seat 9, ensure that the measuring beam 8a of two-frequency laser interferometer 8 is parallel with displacement transmission mechanism axis of movement.
Current vortex sensor 14 is used for measuring caused deflection angle and the angle of pitch in displacement transmission mechanism motion process,
The current vortex sensor 14 is arranged in the spherical guide sliding block 15b both sides of spherical guide 15 two-by-two,
The wherein 14a of the current vortex sensor one and 14b of current vortex sensor two is arranged on base station 10, ensures two electric whirlpools
The probe of flow sensor is contour, and parallel with the spherical guide sliding block 15b sides of spherical guide 15, current vortex
The spherical guide sliding block 15b that the 14c of the sensor three and 14d of current vortex sensor four is fixed on spherical guide 15 is another
On one side, ensure contour and parallel with tested metallic plate 14e, the quilt of two current vortex sensors probe
Metallic plate 14e is surveyed to be fixed on base station 10.Command displacement transmission mechanism carries out calibration campaign, in inductance displacement
Sensor 3 is calibrated in stroke, ten points is chosen at equal intervals, when displacement transmission mechanism moves to selection measurement point
When, the displacement measurement s of synchronous acquisition two-frequency laser interferometer 81', the 14a of current vortex sensor one displacement
Measured value s2', the 14b of current vortex sensor two displacement measurement s3', the 14c of current vortex sensor three displacement
Measured value s4', the 14d of current vortex sensor four displacement measurement s5' with the shift value of inductance displacement sensor 3
s.According to measuring beam 8a measured displacements s1', the 14a of current vortex sensor one displacement measurement s2' and electric whirlpool
The 14b of flow sensor two displacement measurement s3' understand, if displacement transmission mechanism in motion process around central point
O deflects, by the distance between the known 14a of current vortex sensor one and the 14b of current vortex sensor two D,
We can calculate its deflection angleAnd then the caused measuring beam 8a of deflection can be calculated
On offset deviation e, compensate to obtain s'.The data collected progress linear fit is obtained into function yi=k
×si+ b, wherein, i=1,2 ..., 10, yiFor the displacement measurement of inductance displacement sensor after fitting 3, k is
Fitting coefficient, b are to be fitted intercept, siFor the displacement measurement of inductance displacement sensor before fitting 3, then calibration row
Maximum nonlinearity erron max in journey | yi-si' | the ratio with gamut is the linearity, wherein, i=1,2 ...,
10, si' to calibrate, stroke is interior to choose displacement measurement after measurement point two-frequency laser interferometer 8 compensates.
Claims (1)
1. a kind of the inductance sensor calibration method and device of declination error compensation, it is characterised in that：The calibration cartridge
Put main including being calibrated displacement transducer, displacement transmission mechanism and displacement datum instrument three parts, the quilt
Calibration displacement transducer is inductance displacement sensor (3), and inductance displacement sensor (3) uses sensor holders
Arm (2) is gripped, the position of adjustment inductance displacement sensor (3), ensures inductance displacement sensing
Chaining pin (3a) axis of movement of device (3) and light where the measuring beam (8a) of two-frequency laser interferometer (8)
Axle is conllinear, and sensor support base (1) is arranged on base station (10), and sensor holders arm (2) is fixed on biography
The side of sensor bearing (1)；The displacement transmission mechanism is using supersonic motor (4) direct drive ball
Guide rail (15) mode, displacement transmission mechanism is by spherical guide (15), supersonic motor (4), linear grating
Chi (13), linear grating ruler reading head (12) and calibration platform composition, the rolling of the spherical guide (15)
Pearl guiderail base (15a) is arranged on base station (10), ensure the direction of motion of spherical guide (15) with it is double
The measuring beam (8a) of frequency laser interferometer (8) is parallel, the ultrasonic wave electricity of the supersonic motor (4)
Motor-driven son (4a) is close to the spherical guide sliding block (15b) of spherical guide (15), ensures supersonic motor (4)
Frictional force effect spherical guide (15) on when, spherical guide (15) can move along axis of movement, ultrasound
Ripple motor support base (4c) is arranged on base station (10), the supersonic motor stator (4b) of supersonic motor (4)
On supersonic motor bearing (4c), the linear grating chi (13) is attached to spherical guide (15)
Spherical guide sliding block (15b) lateral surface, ensure linear grating chi (13) and the fortune of spherical guide (15)
Dynamic direction is parallel, and grating scale supporting plate (11) is arranged on base station (10), linear grating ruler reading head (12)
In grating scale supporting plate (11), and positioned at the spherical guide sliding block (15b) of spherical guide (15)
Outside, ensure linear grating ruler reading head (12) and linear grating chi (13) it is contour and parallel, it is described
Calibration platform is made up of pinboard (6), pick up calibration plate (5) and measurement speculum (7), pinboard
(6) it is connected with spherical guide (15), measurement speculum (7) is located at the survey of two-frequency laser interferometer (8)
Measure in light path, and on pinboard (6), pick up calibration plate (5) is arranged on pinboard (6)
The other end, ensure the alignment groove (5a) on pick up calibration plate (5) in two-frequency laser interferometer (8)
Measuring beam (8a) where optical axis on；Command displacement transmission mechanism carries out back to zero motion, is returned to
The initial zero of calibrating installation；Command displacement transmission mechanism carries out pressure table motion, causes it to move to inductance displacement
Sensor (3) calibrates starting point；The displacement datum instrument uses two-frequency laser interferometer (8), and double frequency swashs
The measuring beam (8a) of optical interferometer (8) can provide the displacement datum of whole device, interferometer bearing (9)
It is packed on base station (10), two-frequency laser interferometer (8) is packed on interferometer bearing (9)；Electric whirlpool
Flow sensor (14) is used for measuring caused deflection angle and the angle of pitch in displacement transmission mechanism motion process,
The current vortex sensor (14) is arranged in the spherical guide sliding block (15b) of spherical guide (15) two-by-two
Both sides, wherein current vortex sensor one (14a) are arranged on base station (10) with current vortex sensor two (14b)
On, ensure two current vortex sensors probe it is contour, and with the spherical guide sliding block (15b) of spherical guide (15)
Side is parallel, and current vortex sensor three (14c) is fixed on spherical guide with current vortex sensor four (14d)
(15) on spherical guide sliding block (15b) another side, ensure that two current vortex sensors probe is contour, and
Parallel with tested metallic plate (14e), the tested metallic plate (14e) is fixed on base station (10)；Control
Displacement transmission mechanism carries out calibration campaign, in inductance displacement sensor (3) calibration stroke, chooses at equal intervals
10 points, when displacement transmission mechanism, which moves to, chooses measurement point, synchronous acquisition two-frequency laser interferometer (8)
Displacement measurement s1', current vortex sensor one (14a) measure shift value s2', current vortex sensor two (14b)
Measure shift value s3', current vortex sensor three (14c) measure shift value s4', current vortex sensor four (14d)
Measure shift value s5' and inductance displacement sensor (3) shift value s；Surveyed using current vortex sensor one (14a)
Obtain shift value s2', current vortex sensor two (14b) measure shift value s3', current vortex sensor three (14c)
Measure shift value s4', current vortex sensor four (14d) measure shift value s5' to two-frequency laser interferometer (8)
Displacement measurement s1' compensate, obtain displacement measurement s' after two-frequency laser interferometer (8) compensation；It will adopt
The data collected carry out linear fit and obtain function yi=k × si+ b, wherein, i=1,2 ..., 10, yiTo intend
Inductance displacement sensor (3) displacement measurement after conjunction, k are fitting coefficient, and b is to be fitted intercept, siFor fitting
Preceding inductance displacement sensor (3) displacement measurement, then calibrate maximum nonlinearity erron max in stroke | yi-si'|
Ratio with gamut is the linearity, wherein, i=1,2 ..., 10, si' to calibrate, stroke is interior to choose measurement point
Locate displacement measurement after two-frequency laser interferometer (8) compensates.
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| CN109357612A (en) * | 2018-11-21 | 2019-02-19 | 中国科学院合肥物质科学研究院 | One kind being used for static liquid level capacitance displacement sensor on-line calibration method |
| CN112097801A (en) * | 2020-09-17 | 2020-12-18 | 浙江大学 | Electromagnetic self-damping three-degree-of-freedom capacitance displacement sensing device and method |
| CN112880895A (en) * | 2019-11-29 | 2021-06-01 | 哈尔滨工业大学 | Nonlinear ultrasonic wave-based large-scale high-speed rotation equipment blade residual stress measurement method |
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| CN112880895A (en) * | 2019-11-29 | 2021-06-01 | 哈尔滨工业大学 | Nonlinear ultrasonic wave-based large-scale high-speed rotation equipment blade residual stress measurement method |
| CN112880895B (en) * | 2019-11-29 | 2022-09-20 | 哈尔滨工业大学 | Nonlinear ultrasonic wave-based large-scale high-speed rotation equipment blade residual stress measurement method |
| CN112097801A (en) * | 2020-09-17 | 2020-12-18 | 浙江大学 | Electromagnetic self-damping three-degree-of-freedom capacitance displacement sensing device and method |
| CN112097801B (en) * | 2020-09-17 | 2021-10-29 | 浙江大学 | Electromagnetic self-damping three-degree-of-freedom capacitance displacement sensing device and method |
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