CN103630099A - Automated linear displacement sensor calibration device - Google Patents
Automated linear displacement sensor calibration device Download PDFInfo
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- CN103630099A CN103630099A CN201310631438.5A CN201310631438A CN103630099A CN 103630099 A CN103630099 A CN 103630099A CN 201310631438 A CN201310631438 A CN 201310631438A CN 103630099 A CN103630099 A CN 103630099A
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Abstract
The invention discloses an automated linear displacement sensor calibration device which mainly comprises a substrate, and dual linear guide rails, a grating ruler, a servo motor and a vertical lifting device which are fixed on the substrate; a roller screw rod is connected with the servo motor by a coupler; a horizontal regulation device, a universal clamp and a locking nut are clamped with one another and are connected with the vertical lifting device; a sliding laser reflection mirror support frame, a sliding laser interferoscope support frame and a sliding dual-frequency laser interferometer support frame are fixed on the linear guide rails; a fixed pull rod, a laser reflection mirror and a grating ruler reading sensor are fixed on the sliding reflection mirror support frame; a laser interferoscope is fixed on the sliding interferoscope support frame; a dual-frequency laser interferometer is fixed on the dual-frequency laser interferometer support frame. The calibration precision can be ensured by the arrangement of the laser calibration mechanism, manpower and time cost are greatly reduced, and the calibration work efficiency is enhanced.
Description
Technical field
The invention belongs to measurement verification and calibration field, relate more specifically to automatic calibration and the calibration of the polytype linear displacement transducers such as rod-pulling type, dragline type.
Background technology
Linear displacement transducer is a kind ofly the displacement of straight line machinery can be converted to the fine measuring instrument of electric signal, the field such as be widely used in industrial automation or build a bridge.At present in calibration process, mainly exist traditional manual measurement to waste time and energy time-consuming, due to the various measuring error of the reason introducings such as measuring method, personnel's operation.
Patent CN 202501835 U disclose a kind of vertical straight line displacement transducer demarcation/calibrating installation.Demarcation/calibrating installation comprises main support (8), sensor installing platform (1), base (10), precise guide rail (5), linear electric motors bar (6), linear electric motors (7), grating scale (2), grating reading head (3), transfer table (4), guide rail (11) and balancing weight (12), being calibrated displacement transducer is arranged on sensor installing platform (1), main support (8) is i-beam structure, it is upper that the bottom of main support (8) is fixed on base (10), and the top of main support (8) is connected with sensor installing platform (1); Precise guide rail (5), linear electric motors bar (6), grating scale (2) three are parallel to each other and are arranged on the front of main support (8), linear electric motors (7) are fixed in precise guide rail (5) through linear electric motors bar (6), grating reading head (3) is fixed together with transfer table (4), transfer table (4) is directly connected on linear electric motors (7), the back side mounting guide rail (11) of main support (8), balancing weight (12) is arranged on guide rail (11), balancing weight (12) is connected with linear electric motors (7) by steel wire, and main support (8) is installed cover plate around.Although this patent is simple, convenient when displacement transducer is calibrated, calibration speed is fast, measuring accuracy is not high, and error ratio is larger.
Summary of the invention
1, goal of the invention.
The present invention is in order to solve the not high problem of precision of Measurement and calibration in prior art, and provides a kind of easy to operate, time saving and energy saving, the calibrating installation that measuring accuracy is high.
2, the technical scheme that invention adopts.
Linear displacement transducer auto-calibration device of the present invention, comprise pedestal, bilinear guide rail, grating scale, ball-screw, shaft coupling, servomotor, vertical lift device, leveling device, universal fixturing, set nut, automatic console, control panel, electronic hand wheel, laser calibration mechanism; Laser calibration mechanism comprises slidingtype laser mirror bracing frame, slidingtype laser interference mirror bracing frame, slidingtype two-frequency laser interferometer bracing frame, steady brace, laser mirror, laser interference mirror, two-frequency laser interferometer, grating rule read sensor; Described bilinear guide rail, grating scale are fixed on pedestal; Described servomotor is fixed on one end of pedestal, and ball-screw is connected with servomotor by shaft coupling; Described vertical lift device is fixed on the other end of pedestal, and leveling device, universal fixturing, set nut be buckle being connected with vertical lift device each other; Described slidingtype laser mirror bracing frame, slidingtype laser interference mirror bracing frame, slidingtype two-frequency laser interferometer bracing frame are fixed on bilinear guide rail, wherein steady brace, laser mirror, grating rule read sensor are fixed on slidingtype reflector support, laser interference mirror is fixed on slidingtype laser interference mirror bracing frame, and two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer bracing frame; Described control panel, electronic hand wheel are installed on automatic console and by data line and control servomotor (6), and show that grating rule read sensor (19) is transferred to the data of control panel.
3, the beneficial effect that invention produces.
(1), structure setting operation of the present invention is simple;
(2), by the setting of auto-calibration platform, effectively reduce the working strength of calibration personnel;
(3), the present invention is by the setting of laser calibration mechanism, avoided the various measuring error due to reason introducings such as measuring method, personnel's operations, can guarantee calibration accuracy.
Accompanying drawing explanation
Fig. 1 is linear movement pick-up auto-calibration device front view of the present invention.
Fig. 2 is the structural representation of linear movement pick-up auto-calibration device of the present invention.
Fig. 3 is the left view of linear movement pick-up auto-calibration device of the present invention.
Fig. 4 is the vertical view of linear movement pick-up auto-calibration device of the present invention.
Embodiment
For above-mentioned feature and advantage of the present invention can be become apparent, special embodiment below, and be described in detail below by reference to the accompanying drawings.
Referring to Fig. 1, Fig. 3 and Fig. 4, linear displacement transducer auto-calibration device of the present invention, is mainly used in the auto-calibration of the polytype linear displacement transducers such as rod-pulling type, dragline type, and its one-piece construction is similar to general numerical control machine for processing,
Linear displacement transducer auto-calibration device of the present invention, comprise pedestal (1), bilinear guide rail (2), grating scale (3), ball-screw (4), shaft coupling (5), servomotor (6), vertical lift device (7), leveling device (8), universal fixturing (9), set nut (10), automatic console (14), control panel (20), electronic hand wheel (21), laser calibration mechanism; Laser calibration mechanism comprises slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13), steady brace (15), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18), grating rule read sensor (19); Described bilinear guide rail (2), grating scale (3) are fixed on pedestal (1); Described servomotor (6) is fixed on one end of pedestal, and ball-screw (4) is connected with servomotor (6) by shaft coupling (5); Described vertical lift device (7) is fixed on the other end of pedestal (1), leveling device (8), universal fixturing (9), set nut (10) be buckle being connected with vertical lift device (7) each other, universal fixturing (9) is bolted on and regulates platform (26) upper, and can change according to the different model that is calibrated linear movement pick-up; Described slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13) are fixed on bilinear guide rail (2), wherein steady brace (15), laser mirror (16), grating rule read sensor (19) are fixed on slidingtype reflector support (11), a threaded hole is offered in steady brace (15) center, and sensor stay cord is loaded on steady brace (15) by screw.Laser interference mirror (17) is fixed on slidingtype laser interference mirror bracing frame (12), and two-frequency laser interferometer (18) is fixed on slidingtype two-frequency laser interferometer bracing frame (13); Described control panel (20) is installed in automatic console (14) above and controls servomotor (6) by data line, and shows that grating rule read sensor (19) is transferred to the data of control panel.
On the basis of embodiment 1, linear displacement transducer auto-calibration device also comprises an adjusting bolt (22), a setting nut (25), described adjusting bolt (22) is fixed on the upper adjusting for laser interference mirror (17) of described slidingtype interference mirror bracing frame (12), after adjusting, by the lock nut (23) being fixed on described slidingtype interference mirror bracing frame (12), locks; Described setting nut (25) is fixed on described slidingtype two-frequency laser interferometer bracing frame (13), described setting nut (25) is fixed on the upper adjusting for two-frequency laser interferometer (18) of described slidingtype two-frequency laser interferometer bracing frame (13), after adjusting, by the lock nut (24) being fixed on described slidingtype two-frequency laser interferometer bracing frame (13), locks; Described set nut (10) is four, and circle distribution is arranged on universal fixturing (9).Described electronic hand wheel (21) sets up three gears separately, sets up X1 shelves separately, X10 shelves, and X100 shelves, often revolve lattice in X1 shelves, and displacement feeding 0.001mm often revolves lattice in X10 shelves, and displacement feeding 0.01mm often revolves lattice, displacement feeding 0.1mm in X100 shelves.
The course of work of the present invention: the stay-supported linear movement pick-up of 1000mm specification of take is example.First this device is placed in the laboratory that meets the environmental baseline requiring in JJF 1305-2011 < < linear movement pick-up calibrating standard > >, while calibrating, will be calibrated installation of sensors on universal fixturing (9), by adjusting vertical lifting device (7), leveling device (8), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18) makes to be calibrated on the ray displacement straight line that sensor and two-frequency laser interferometer (18) send, and lock each parts, check and whether meet an abbe ' s principle, if do not meet abbe ' s principle, need to readjust, if meet, can calibrate.
By control panel (20), correlation parameter is set, the stay-supported linear movement pick-up of 1m is arranged to 10 point measurements of interval 100mm, be respectively 100mm, 200mm, 300mm----1000mm.The instruction that automatic console (14) reception control panel (20) sends is sent operational order by data line to servomotor (6), servomotor (6) drives roller screw (4) to realize displacement 100mm by shaft coupling (5), now tested sensor secondary instrument shows that numerical value may be 99.982mm, at this moment by electronic hand wheel (21), regulate servomotor (6) running to make tested sensor secondary instrument show that numerical value is 100mm, shown data of two-frequency laser interferometer now, as be 100.011, error is 0.011mm.Measure successively 200mm, 300mm,----1000mm error, take and positive and negatively measure circulation as one, measure altogether three circulations, thereby calculate fundamental error, linearity error, reproducibility error, hysterisis error, Full-span output and sensitivity.
Claims (7)
1. a linear displacement transducer auto-calibration device, comprise pedestal (1), bilinear guide rail (2), grating scale (3), ball-screw (4), shaft coupling (5), servomotor (6), vertical lift device (7), leveling device (8), universal fixturing (9), set nut (10), automatic console (14), control panel (20), electronic hand wheel (21), it is characterized in that: also comprise laser calibration mechanism, laser calibration mechanism comprises slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13), steady brace (15), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18), grating rule read sensor (19), described bilinear guide rail (2), grating scale (3) are fixed on pedestal (1), described servomotor (6) is fixed on one end of pedestal, and ball-screw (4) is connected with servomotor (6) by shaft coupling (5), described vertical lift device (7) is fixed on the other end of pedestal (1), and leveling device (8), universal fixturing (9), set nut (10) be buckle being connected with vertical lift device (7) each other, described slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13) are fixed on bilinear guide rail (2), wherein steady brace (15), laser mirror (16), grating rule read sensor (19) are fixed on slidingtype reflector support (11), laser interference mirror (17) is fixed on slidingtype laser interference mirror bracing frame (12), and two-frequency laser interferometer (18) is fixed on slidingtype two-frequency laser interferometer bracing frame (13), described control panel (20) is installed in automatic console (14) above and controls servomotor (6) by data line, and shows that grating rule read sensor (19) is transferred to the data of control panel.
2. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: a threaded hole is offered in steady brace (15) center, and sensor stay cord is loaded on steady brace (15) by screw.
3. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: universal fixturing (9) is bolted on and regulates on platform (26).
4. linear displacement transducer auto-calibration device according to claim 1 and 2, it is characterized in that: also comprise an adjusting bolt (22), it is upper by being fixed on lock nut (23) locking on described slidingtype interference mirror bracing frame (12) that described adjusting bolt (22) is fixed on described slidingtype interference mirror bracing frame (12).
5. linear displacement transducer auto-calibration device according to claim 4, it is characterized in that: also comprise a setting nut (25), it is upper that described setting nut (25) is fixed on described slidingtype two-frequency laser interferometer bracing frame (13), by being fixed on lock nut (24) locking on described slidingtype two-frequency laser interferometer bracing frame (13).
6. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: described set nut (10) number is 4, and circle distribution is arranged on universal fixturing (9).
7. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: described electronic hand wheel (21) sets up three gears separately, sets up X separately
1shelves, X
10shelves, X
100shelves, X
1in shelves, often revolve lattice, displacement feeding 0.001mm, X
10in shelves, often revolve lattice, displacement feeding 0.01mm, X
100in shelves, often revolve lattice, displacement feeding 0.1mm.
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| CN104457495A (en) * | 2014-12-08 | 2015-03-25 | 太原科技大学 | Displacement sensor detecting device |
| CN104898413A (en) * | 2015-03-27 | 2015-09-09 | 上海大学 | Large-stroke high-resolution driver system |
| CN105387804A (en) * | 2015-11-17 | 2016-03-09 | 顺德职业技术学院 | Linear measurement method for linear motion mechanism |
| CN105547344A (en) * | 2015-12-08 | 2016-05-04 | 武昌船舶重工集团有限公司 | Test equipment calibration device and calibration method thereof |
| CN105547219A (en) * | 2016-01-14 | 2016-05-04 | 广东工业大学 | Linear and angular displacement sensor measurement system and method |
| CN105606052A (en) * | 2016-01-20 | 2016-05-25 | 天津大学 | Micro displacement sensor calibration apparatus based on high-precision rectilinear translation bench |
| CN105785694A (en) * | 2016-05-19 | 2016-07-20 | 母曼曼 | Camera base |
| CN105806281A (en) * | 2016-04-07 | 2016-07-27 | 中国重汽集团济南动力有限公司 | Temperature excursion measuring device of position sensor |
| CN106403867A (en) * | 2015-07-31 | 2017-02-15 | 北京航天计量测试技术研究所 | Linear displacement sensor test device applicable to high and low temperature environment |
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| CN107367250A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance displacement sensor calibration method and device of grand micro- combination |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
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| CN107367220A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
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