CN107367220A - The inductance sensor calibration method and device that double air-float guide rails are oriented to - Google Patents
The inductance sensor calibration method and device that double air-float guide rails are oriented to Download PDFInfo
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- CN107367220A CN107367220A CN201610311972.1A CN201610311972A CN107367220A CN 107367220 A CN107367220 A CN 107367220A CN 201610311972 A CN201610311972 A CN 201610311972A CN 107367220 A CN107367220 A CN 107367220A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The inductance sensor calibration method that double air-float guide rails are oriented to belongs to Technology of Precision Measurement field with device.For its calibration method with device using two-frequency laser interferometer as motion benchmark, linear voice coil motor carries out big stroke, fine positioning as director element, linear grating chi as driving element, air-float guide rail as feedback element.Pitching and the yaw error of displacement transmission mechanism motion are compensated using four capacitance displacement sensors；The present invention can effectively solve the contradiction between calibrating device for displacement sensor stroke and precision, realize the dynamic static calibration of big stroke, high-precision inductance displacement sensor.
Description
Technical field
The invention belongs to Technology of Precision Measurement field, relates generally to the inductance sensing that a kind of double air-float guide rails are oriented to
Device calibration method and device.
Background technology
At present, Chinese large-sized revolution at a high speed equipment does not have ultra precise measurement means, and assembly precision can not ensure,
Efficiency of assembling is low, engine luggine noise etc., and these are all to restrict China's war industry and national economy hair
The great difficult problem of exhibition.Large high-speed revolution equipment refers mainly to all kinds of large-scale high-end gas-turbine units, mainly
Including aero-engine, warship marine gas turbine and high-performance power station combustion engine.At present, Aeroengine Industries
War industry and the mainstay of the national economy industry of World Airways power are turned into.Aero-engine is pursuing height
On the premise of performance, the high quality, high reliability and long service live of product are also pursued, will both ten
Divide difficult and conflicting target to take into account, and be improved simultaneously, be very difficult；In addition
Aero-engine works in extreme environment, and key components and parts are worked under high temperature, high pressure, great loading capacity,
Therefore the difficulty of design and the manufacture of aero-engine further increases.
Engine luggine is a key factor for influenceing aircraft safety, and reacts a weight of engine performance
Want index.Engine turbine component speed is high, quality is big, is a main vibration source of engine.In order to drop
This low influence, except being eliminated during engine dynamic balancing measurement, it is necessary to strictly control its assembling
Process, because engine assembly is dynamically balanced previous step, cause to shake by assembly Form and position error precision is low
Can be amplified when running at high speed by moving by 100 to 1000 times, and beat caused by eliminating concentricity/axiality during assembling can
Largely to reduce dynamically balanced pressure.So the key technology as lifting aero-engine performance,
The accurate measurement of concentricity/axiality or even cylindricity is increasingly taken seriously in aero-engine assembling process.
Sensor is in concentricity/axiality as the extraction element of the sub- surface profile information of aero-engine sound
Accurate measurement to cylindricity is just particularly important, mechanical system and circuit system the institute band of displacement transducer
An important factor for error come is limiting sensor precision, in order to suppress or compensate these errors, it is necessary to align
Displacement sensor carries out calibration process, can be traceable on the benchmark of higher precision.Realize to high accuracy
The calibration of displacement transducer is, it is necessary to design a displacement transducer calibration system with higher precision.Respectively
Stroke between kind displacement transducer also has larger difference, and some displacement transducer strokes can reach tens millis
Even several meters of rice, some then can only achieve several microns of stroke.Therefore, need to make calibration system have big stroke,
High-precision feature could meet the calibration requirements of nano-sensor.But stroke and precision inherently contradiction
, this also increases the design difficulty of calibration system, and there is an urgent need to big stroke, high precision displacement biography at present
The reason for sensor calibration system.
Changchun Institute of Optics, Fine Mechanics and Physics, CAS proposes that a kind of demarcation capacity plate antenna displacement passes
Device (the capacity plate antenna calibration device for displacement sensor of sensor.Publication number：CN104048588A).The dress
Put and be arranged on guiding mechanism front end as displacement datum, sensor tested surface using one-axis laser interferometer, lead
The symmetrical parallel quadrangular mechanism of Planar Mechanisms is used to mechanism, capacity plate antenna displacement transducer is arranged on sensor
Among support base, support base is arranged on micro-displacement adjustment mechanism both sides, and driving is provided with the left end of driver
Device push rod, the guiding mechanism of the driver push rod pushing tow micro-displacement adjustment mechanism do single-degree-of-freedom linear motion,
And then realize the demarcation to capacity plate antenna displacement transducer.The device has problems in that：It is only limited to flat
Plate capacitance displacement sensor is demarcated, and it is smaller to demarcate stroke.
It is (straight that Changzhou Institute of Measurement ＆ Testing Technology proposes a kind of device for linear displacement transducer calibration
Linear movement pick-up auto-calibration device.Publication number：CN103630099A).The device mainly includes one
Pedestal, bilinear guide rail, grating scale, servomotor, vertical lift device are fixed on pedestal；Roller bearing silk
Bar is connected by shaft coupling with servomotor；Leveling device, universal fixturing, locking nut are snapped into one another
And it is connected with vertical lift device；Slidingtype laser mirror support frame, slidingtype laser interference mirror support frame,
Slidingtype two-frequency laser interferometer support frame is fixed on line slideway, wherein steady brace, laser mirror,
Grating rule read sensor is fixed on slidingtype reflector support, and laser interference mirror is fixed on slidingtype and done
Mirror support frame is related to, two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer support frame, Ke Yishi
The now automatic calibration to the polytype linear displacement transducer such as rod-pulling type, dragline type and calibration.The device
Have problems in that：Stroke and precision index are not taken into account, precision is relatively low, can not realize high precision displacement
Pick up calibration.
German federal physical technique institute (PTB) and Physik-Instrumente companies cooperate, and develop a kind of use
In the novel sports device of contact type probe displacement transducer dynamic property calibration, the probe displacement transducer can
To use in topography measurement, surface profile measurement and measurement of coordinates.The device has that size is small, and integrated level is high
The characteristics of, system produces motion using piezoelectric ceramic tube, and is measured in real time by a mini optical fibre interferometer,
Measurement feedback to DSP Processor is realized into closed-loop control, therefore, the calibration platform can be traceable to state
Family length standard (Rong Liang, Otto Jusko, Frank Ludicke, Michael Neugebauer.A novel
piezo vibration platform for probe dynamic performance calibration[J].Measurement
Science And Technology,Meas.Sci.Technol.12(2001)1509–1514).The device calibration row
Journey is small, can not realize and big stroke, high-precision displacement transducer are calibrated.
The content of the invention
For above-mentioned the shortcomings of the prior art, the inductance sensor calibration that a kind of double air-float guide rails are oriented to is proposed
Method and apparatus, to solve the contradiction between existing calibrating device for displacement sensor stroke and precision, realize big
The dynamic static calibration of stroke, high-precision inductance displacement sensor.
The object of the present invention is achieved like this：
The inductance sensor calibration method and device that a kind of double air-float guide rails are oriented to, this method can schools with device
The linearity of quasi- inductance displacement sensor；Its feature mainly includes being calibrated displacement transducer, displacement transmission machine
Structure and displacement datum instrument three parts, the displacement transducer that is calibrated is inductance displacement sensor, inductance position
Displacement sensor is gripped using sensor holders arm, adjusts the position of inductance displacement sensor, is ensured
The chaining pin axis of movement of inductance displacement sensor is conllinear with optical axis where the measuring beam of two-frequency laser interferometer,
Sensor support base is arranged on base station, and sensor holders arm is fixed on the side of sensor support base；The displacement
The structure that transmission mechanism is oriented to using double air-float guide rails, displacement transmission mechanism is by air-float guide rail, straight line voice coil loudspeaker voice coil electricity
Machine, linear grating chi, linear grating ruler reading head and calibration platform composition, the air-float guide rail is by air-bearing shafts
Bar is formed with air suspension shaft sleeve, and air suspension shaft sleeve one is sleeved on air supporting axostylus axostyle one with air suspension shaft sleeve three, air suspension shaft sleeve
Two are sleeved on air supporting axostylus axostyle two with air suspension shaft sleeve four, air supporting axostylus axostyle mounting seat one and air supporting axostylus axostyle mounting seat three
On bottom plate, the air supporting axostylus axostyle is held one by one to be fixed in air supporting axostylus axostyle mounting seat one, and the other end is fixed
In air supporting axostylus axostyle mounting seat three, air supporting axostylus axostyle mounting seat two is arranged on bottom plate with air supporting axostylus axostyle mounting seat four,
Described one end of air supporting axostylus axostyle two is fixed in air supporting axostylus axostyle mounting seat two, and the other end is fixed on the installation of air supporting axostylus axostyle
On seat four, linear voice coil motor is by voice coil motor mover, voice coil motor stator, voice coil motor mover installing plate
Formed with voice coil motor stator installing plate, voice coil motor stator installing plate is arranged on bottom plate, the voice coil loudspeaker voice coil electricity
Machine stator is arranged on voice coil motor stator installing plate, and voice coil motor mover installing plate is connected with pinboard, sound
Enclose electric mover to be arranged on voice coil motor mover installing plate, and be symmetrically installed along air-float guide rail axis of movement,
The linear grating chi is attached to pinboard bottom surface, ensures that linear grating chi is parallel with the axis of movement of air-float guide rail,
Reading head supporting plate is arranged on bottom plate, and linear grating ruler reading head is arranged in reading head supporting plate, and position
Below linear grating chi, ensure that linear grating ruler reading head is parallel with linear grating chi, the calibration platform
By pinboard, pick up calibration plate and measurement speculum group into pinboard is connected with air suspension shaft sleeve, and measurement is anti-
Mirror is penetrated to be located on the optical path of two-frequency laser interferometer, and on pinboard, pick up calibration plate peace
The other end on pinboard, ensure the alignment groove on pick up calibration plate in two-frequency laser interferometer
On optical axis where measuring beam；Command displacement transmission mechanism carries out back to zero motion, is returned to calibrating installation
Initial zero；Command displacement transmission mechanism carries out pressure table motion, causes it to move to inductance displacement sensor school
Quasi- starting point；The displacement datum instrument uses two-frequency laser interferometer, and two-frequency laser interferometer can provide
The displacement datum of whole device, interferometer bearing are packed on base station, and two-frequency laser interferometer is packed in interference
On instrument bearing, capacitance displacement sensor is used for measuring caused deflection angle in displacement transmission mechanism motion process
And the angle of pitch, the capacitance displacement sensor are distributed the right side and upside for being arranged in air-float guide rail, electric capacity two-by-two
Displacement transducer installing plate one is arranged on base station, and capacitance displacement sensor one is arranged on capacitance displacement sensor
On installing plate one, and sensed positioned at the right side of air-float guide rail, capacitance displacement sensor two installed in capacitive displacement
On device installing plate one, and it is located at the upside of air-float guide rail, ensures that two capacitance displacement sensors are parallel with tested surface,
Capacitance displacement sensor installing plate two is arranged on base station, and capacitance displacement sensor three passes installed in capacitive displacement
On sensor installing plate two, and capacitive displacement is arranged on positioned at the right side of air-float guide rail, capacitance displacement sensor four
On sensor installing plate two, and positioned at the upside of air-float guide rail, ensure two capacitance displacement sensors and tested surface
It is parallel, while ensure capacitance displacement sensor one and the Right Aligns of capacitance displacement sensor three, ensure capacitive displacement
Sensor two and capacitance displacement sensor four are contour；Command displacement transmission mechanism carries out calibration campaign, in inductance
In displacement transducer calibration stroke, 10 points are chosen at equal intervals, when displacement transmission mechanism moves to selection measurement
During point, synchronous acquisition two-frequency laser interferometer displacement measurement s1', capacitance displacement sensor one measure shift value
s2', capacitance displacement sensor two measure shift value s3', capacitance displacement sensor three measure shift value s4', electric capacity
Displacement transducer four measures shift value s5' and inductance displacement sensor shift value s；Utilize capacitance displacement sensor one
Measure shift value s2', capacitance displacement sensor two measure shift value s3', capacitance displacement sensor three measure displacement
Value s4', capacitance displacement sensor four measure shift value s5' to two-frequency laser interferometer displacement measurement s1' mended
Repay, obtain displacement measurement s' after two-frequency laser interferometer compensation；The data collected progress linear fit is obtained
To function yi=k × si+ b, wherein, i=1,2 ..., 10, yiSurveyed for inductance displacement sensor displacement after fitting
Value, k are fitting coefficient, and b is to be fitted intercept, siFor inductance displacement sensor displacement measurement before fitting,
Then calibrate maximum nonlinearity erron max in stroke | yi-si' | the ratio with gamut is the linearity, wherein, i=1,
2 ..., 10, si' to calibrate, stroke is interior to choose displacement measurement after measurement point two-frequency laser interferometer compensates.
Compared with prior art, it is characteristic of the invention that：
The structure that the present invention is oriented to using double air-float guide rails, and displacement datum is provided with two-frequency laser interferometer,
While calibrating installation calibration stroke is improved, moreover it is possible to ensure that calibrating installation has higher precision.Utilize electricity
Hold deflection and the angle of pitch of the displacement sensor displacement transmission mechanism in motion process, in real time monitoring calibration
Posture of the device in motion process, line position of going forward side by side are moved compensation deals, moved so as to eliminate calibrating installation
During deflection and the error brought of pitching, ensure that calibrating installation calibration accuracy.
Brief description of the drawings：
Fig. 1 is inductance displacement sensor calibrating installation structural representation
Fig. 2 is grating ruler reading head installation site structural representation
Fig. 3 is inductance displacement sensor structural representation
Fig. 4 is pick up calibration plate structure schematic diagram
Fig. 5 is two-frequency laser interferometer structural representation
Fig. 6 is capacitance displacement sensor bit shift compensation principle schematic
Fig. 7 is displacement transmission mechanism structural representation
Fig. 8 is capacitance displacement sensor schematic view of the mounting position
Piece number in figure：1-sensor support base, 2-air-float guide rail, 2a-air supporting axostylus axostyle mounting seat one, 2b-
Air supporting axostylus axostyle mounting seat two, 2c-air supporting axostylus axostyle mounting seat three, 2d-air supporting axostylus axostyle mounting seat four, 2e-air supporting
Axle sleeve one, 2f-air suspension shaft sleeve three, 2g-air suspension shaft sleeve two, 2h-air suspension shaft sleeve four, 2i-air supporting axostylus axostyle one,
2j-air supporting axostylus axostyle two, 3-linear voice coil motor, 3a-voice coil motor mover, 3b-voice coil motor stator,
3c-voice coil motor mover installing plate, 3d-voice coil motor stator installing plate, 4-pick up calibration plate, 4a-
It is directed at groove, 5-sensor holders arm, 6-inductance displacement sensor, 6a-chaining pin, 7-capacitive displacement biography
Sensor, 7a-capacitance displacement sensor one, 7b-capacitance displacement sensor two, 7c-capacitance displacement sensor peace
Loading board one, 7d-capacitance displacement sensor three, 7e-capacitance displacement sensor four, 7f-capacitance displacement sensor
Installing plate two, 8-measurement speculum, 9-interferometer bearing, 10-two-frequency laser interferometer, 10a-measurement
Light beam, 11-base station, 12-pinboard, 13-linear grating chi, 14-linear grating ruler reading head, 15
- reading head supporting plate, 16-bottom plate.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
The inductance sensor calibration method and device, methods described that a kind of double air-float guide rails are oriented to be with device：It is whole
Individual device, which is broadly divided into, is calibrated displacement transducer, displacement transmission mechanism and displacement datum instrument three parts.It is whole
Individual device is placed on vibration-isolating platform, is placed under isoperibol.The displacement transducer that is calibrated is using electricity
Feel displacement transducer 6, inductance displacement sensor 6 is gripped using sensor holders arm 5, adjustment electricity
Feel the position of displacement transducer 6, ensure the chaining pin 6a axis of movements and double-frequency laser of inductance displacement sensor 6
Optical axis where the measuring beam 10a of interferometer 10 is conllinear, and sensor support base 1 is arranged on base station 11, sensing
Device clamping limb 5 is fixed on the side of sensor support base 1.The displacement transmission mechanism uses linear voice coil motor 3
Directly drive the structure of air-float guide rail 2, displacement transmission mechanism is by air-float guide rail 2, linear voice coil motor 3, straight
Line grating chi 13, linear grating ruler reading head 11 and calibration platform composition.The air-float guide rail 2 is by air-bearing shafts
Bar is formed with air suspension shaft sleeve, and the 2e of the air suspension shaft sleeve one and 2f of air suspension shaft sleeve three is sleeved on the 2i of air supporting axostylus axostyle one,
The 2g of the air suspension shaft sleeve two and 2h of air suspension shaft sleeve four is sleeved on the 2j of air supporting axostylus axostyle two, the 2a of air supporting axostylus axostyle mounting seat one
It is arranged on the 2c of air supporting axostylus axostyle mounting seat three on bottom plate 16, described 2i one end of air supporting axostylus axostyle one is fixed on air supporting
On the 2a of axostylus axostyle mounting seat one, the other end is fixed on the 2c of air supporting axostylus axostyle mounting seat three, air supporting axostylus axostyle mounting seat two
The 2b and 2d of air supporting axostylus axostyle mounting seat four is arranged on bottom plate 16, and described 2j one end of air supporting axostylus axostyle two is fixed on gas
On the 2b of floating axle bar mounting seat two, the other end is fixed on the 2d of air supporting axostylus axostyle mounting seat four, linear voice coil motor 3
By voice coil motor mover 3a, voice coil motor stator 3b, voice coil motor mover installing plate 3c and voice coil motor stator
Installing plate 3d is formed, and voice coil motor stator installing plate 3d is arranged on bottom plate 16, the voice coil motor stator
3b is arranged on voice coil motor stator installing plate 3d, and voice coil motor mover installing plate 3c is connected with pinboard 12,
Voice coil motor mover 3a is arranged on voice coil motor mover installing plate 3c, and along the axis of movement of air-float guide rail 2
It is symmetrically installed, the linear grating chi 13 is attached to the bottom surface of pinboard 12, ensures linear grating chi 13 and air supporting
The axis of movement of guide rail 2 is parallel, and reading head supporting plate 15 is arranged on bottom plate 16, linear grating chi reading
First 14 are arranged in reading head supporting plate 15, and below linear grating chi 13, ensure linear grating chi
Reading head 14 is parallel with linear grating chi 13, and the calibration platform is by pinboard 12, pick up calibration plate 4
Formed with measurement speculum 8, pinboard 12 is connected with air suspension shaft sleeve, and measurement speculum 8 is located at double-frequency laser
On the optical path of interferometer 10, and on pinboard 12, pick up calibration plate 4 is arranged on switching
The other end on plate 12, ensure the alignment groove 4a on pick up calibration plate 4 in two-frequency laser interferometer 10
Measuring beam 10a where optical axis on.Command displacement transmission mechanism carries out back to zero motion, and machine is transmitted in displacement
Structure finds the zero-bit of air-float guide rail 2, as initial zero.Command displacement transmission mechanism carries out pressure table motion,
Air-float guide rail 2 is from initial zero, high speed and uniform motion before table is pressed, after telogenesis work(is pressed, gas
The floating low speed uniform motion of guide rail 2, move to inductance displacement sensor 6 and calibrate stroke starting point.The displacement
Reference instrument uses two-frequency laser interferometer 10, and two-frequency laser interferometer 10 can provide the displacement of whole device
Benchmark, interferometer bearing 9 are packed on base station 11, and two-frequency laser interferometer 10 is packed in interferometer bearing 9
On, ensure that the measuring beam 10a of two-frequency laser interferometer 10 is parallel with displacement transmission mechanism axis of movement.Electricity
Hold displacement transducer 7 to be used for measuring caused deflection angle and the angle of pitch in displacement transmission mechanism motion process,
The capacitance displacement sensor 7 is arranged in the right side and upside of air-float guide rail 2 two-by-two, and capacitive displacement passes
The 7c of sensor installing plate one is arranged on base station 11, and the 7a of capacitance displacement sensor one senses installed in capacitive displacement
On the 7c of device installing plate one, and electricity is arranged on positioned at the right side of air-float guide rail 2, the 7b of capacitance displacement sensor two
Hold on the 7c of displacement transducer installing plate one, and positioned at the upside of air-float guide rail 2, ensure two capacitive displacements sensing
Device is parallel with tested surface, and the 7f of capacitance displacement sensor installing plate two is arranged on base station 11, capacitive displacement sensing
The 7d of device three is arranged on the 7f of capacitance displacement sensor installing plate two, and positioned at the right side of air-float guide rail 2, electric capacity
The 7e of displacement transducer four is arranged on the 7f of capacitance displacement sensor installing plate two, and positioned at the upper of air-float guide rail 2
Side, ensure that two capacitance displacement sensors are parallel with tested surface, while ensure the 7a of capacitance displacement sensor one and electricity
It is contour to hold the 7d of displacement transducer three, ensures that the 7b of the capacitance displacement sensor two and 7e of capacitance displacement sensor four is right
Alignment.Command displacement transmission mechanism carries out calibration campaign, is calibrated in inductance displacement sensor 6 in stroke, etc.
Ten points are chosen at interval, and when displacement transmission mechanism, which moves to, chooses measurement point, synchronous acquisition double-frequency laser is done
The displacement measurement s of interferometer 101', the 7a of capacitance displacement sensor one displacement measurement s2', capacitive displacement pass
The 7b of sensor two displacement measurement s3', the 7d of capacitance displacement sensor three displacement measurement s4', capacitive displacement
The 7e of sensor four displacement measurement s5' with the shift value s of inductance displacement sensor 3.Passed according to capacitive displacement
The 7a measured displacements s of sensor one2' and the 7d measured displacements s of capacitance displacement sensor three4' understand, if machine is transmitted in displacement
Structure deflects in motion process around central point O, by the 7a of known capacitance displacement transducer one and capacitive displacement
The distance between the 7d of sensor three D, we can calculate its deflection angleAnd then can be with
The offset deviation e on the caused measuring beam 10a of deflection is calculated, compensates to obtain s'.By what is collected
Data carry out linear fit and obtain function yi=k × si+ b, wherein, i=1,2 ..., 10, yiFor electricity after fitting
Feel the displacement measurement of displacement transducer 6, k is fitting coefficient, and b is to be fitted intercept, siFor inductance position before fitting
The displacement measurement of displacement sensor 6, then calibrate maximum nonlinearity erron max in stroke | yi-si' | the ratio with gamut
It is worth for the linearity, wherein, i=1,2 ..., 10, si' done to choose measurement point double-frequency laser in calibration stroke
Displacement measurement after interferometer 10 compensates.
Claims (1)
1. inductance sensor calibration method and device that a kind of double air-float guide rails are oriented to, it is characterised in that：The calibration
Device mainly includes being calibrated displacement transducer, displacement transmission mechanism and displacement datum instrument three parts, described
It is inductance displacement sensor (6) to be calibrated displacement transducer, and inductance displacement sensor (6) is pressed from both sides using sensor
Gripping arm (5) is gripped, the position of adjustment inductance displacement sensor (6), ensures that inductance displacement passes
Chaining pin (6a) axis of movement of sensor (6) and measuring beam (10a) institute of two-frequency laser interferometer (10)
Conllinear in optical axis, sensor support base (1) is arranged on base station (11), and sensor holders arm (5) is fixed
In the side of sensor support base (1)；The displacement transmission mechanism is directly driven using linear voice coil motor (3)
The structure of dynamic air-float guide rail (2), displacement transmission mechanism by air-float guide rail (2), linear voice coil motor (3),
Linear grating chi (13), linear grating ruler reading head (11) and calibration platform composition, the air-float guide rail (2)
It is made up of air supporting axostylus axostyle with air suspension shaft sleeve, air suspension shaft sleeve one (2e) is sleeved on air supporting with air suspension shaft sleeve three (2f)
On axostylus axostyle one (2i), air suspension shaft sleeve two (2g) is sleeved on air supporting axostylus axostyle two (2j) with air suspension shaft sleeve four (2h)
On, air supporting axostylus axostyle mounting seat one (2a) is arranged on bottom plate (16) with air supporting axostylus axostyle mounting seat three (2c),
Described air supporting axostylus axostyle one (2i) one end is fixed in air supporting axostylus axostyle mounting seat one (2a), and the other end is fixed on gas
In floating axle bar mounting seat three (2c), air supporting axostylus axostyle mounting seat two (2b) and air supporting axostylus axostyle mounting seat four (2d)
On bottom plate (16), described air supporting axostylus axostyle two (2j) one end is fixed on air supporting axostylus axostyle mounting seat two (2b)
On, the other end is fixed in air supporting axostylus axostyle mounting seat four (2d), and linear voice coil motor (3) is by voice coil motor
Mover (3a), voice coil motor stator (3b), voice coil motor mover installing plate (3c) and voice coil motor stator peace
Loading board (3d) is formed, and voice coil motor stator installing plate (3d) is arranged on bottom plate (16), the voice coil loudspeaker voice coil
Motor stator (3b) is arranged on voice coil motor stator installing plate (3d), voice coil motor mover installing plate (3c)
It is connected with pinboard (12), voice coil motor mover (3a) is arranged on voice coil motor mover installing plate (3c),
And be symmetrically installed along air-float guide rail (2) axis of movement, the linear grating chi (13) is attached to pinboard (12)
Bottom surface, ensure that linear grating chi (13) is parallel with the direction of motion of air-float guide rail (2), reading head supporting plate
(15) it is arranged on bottom plate (16), linear grating ruler reading head (14) is arranged on reading head supporting plate (15)
On, and, ensure linear grating ruler reading head (14) and linear grating positioned at linear grating chi (13) below
Chi (13) is parallel, and the calibration platform is reflected by pinboard (12), pick up calibration plate (4) and measurement
Mirror (8) forms, and pinboard (12) is connected with air suspension shaft sleeve, and measurement speculum (8) is located at double-frequency laser
On the optical path of interferometer (10), and on pinboard (12), pick up calibration plate (4) peace
The other end on pinboard (12), ensure that the alignment groove (4a) on pick up calibration plate (4) exists
On optical axis where the measuring beam (10a) of two-frequency laser interferometer (10)；Command displacement transmission mechanism enters
Row back to zero is moved, and is returned to the initial zero of calibrating installation；Command displacement transmission mechanism carries out pressure table motion,
Cause it to move to inductance displacement sensor (6) calibration starting point；The displacement datum instrument uses double-frequency laser
Interferometer (10), two-frequency laser interferometer (10) can provide the displacement datum of whole device, interferometer branch
Seat (9) is packed on base station (11), and two-frequency laser interferometer (10) is packed in interferometer bearing (9)
On, capacitance displacement sensor (7) be used for measuring in displacement transmission mechanism motion process caused deflection angle and
The angle of pitch, the capacitance displacement sensor (7) are arranged in the right side of air-float guide rail (2) and upper two-by-two
Side, capacitance displacement sensor installing plate one (7c) are arranged on base station (11), capacitance displacement sensor one (7a)
On capacitance displacement sensor installing plate one (7c), and positioned at the right side of air-float guide rail (2), electric capacity
Displacement transducer two (7b) is arranged on capacitance displacement sensor installing plate one (7c), and is led positioned at air supporting
The upside of rail (2), ensure that two capacitance displacement sensors are parallel with tested surface, capacitance displacement sensor installing plate
Two (7f) are arranged on base station (11), and capacitance displacement sensor three (7d) is arranged on capacitance displacement sensor
On installing plate two (7f), and positioned at the right side of air-float guide rail (2), capacitance displacement sensor four (7e) peace
On capacitance displacement sensor installing plate two (7f), and positioned at the upside of air-float guide rail (2), ensure two
Capacitance displacement sensor is parallel with tested surface, while ensures capacitance displacement sensor one (7a) and capacitive displacement
Sensor three (7d) Right Aligns, ensure capacitance displacement sensor two (7b) and capacitance displacement sensor four (7e)
It is contour；Command displacement transmission mechanism carries out calibration campaign, in inductance displacement sensor (6) calibration stroke,
10 points are chosen at equal intervals, when displacement transmission mechanism, which moves to, chooses measurement point, synchronous acquisition double-frequency laser
Interferometer (10) displacement measurement s1', capacitance displacement sensor one (7a) measure shift value s2', electric capacity position
Displacement sensor two (7b) measures shift value s3', capacitance displacement sensor three (7d) measure shift value s4', electricity
Hold displacement transducer four (7e) and measure shift value s5' and inductance displacement sensor (6) shift value s；Utilize electricity
Hold displacement transducer one (7a) and measure shift value s2', capacitance displacement sensor two (7b) measure shift value s3'、
Capacitance displacement sensor three (7d) measures shift value s4', capacitance displacement sensor four (7e) measure shift value
s5' to two-frequency laser interferometer (10) displacement measurement s1' compensate, obtain two-frequency laser interferometer (10)
Displacement measurement s' after compensation；The data collected progress linear fit is obtained into function yi=k × si+ b, wherein,
I=1,2 ..., 10, yiFor inductance displacement sensor after fitting (6) displacement measurement, k is fitting coefficient,
B is to be fitted intercept, siFor inductance displacement sensor before fitting (6) displacement measurement, then calibrate in stroke most
Big nonlinearity erron max | yi-si' | the ratio with gamut is the linearity, wherein, i=1,2 ..., 10, si'
To choose displacement measurement after measurement point two-frequency laser interferometer (10) compensation in calibration stroke.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610311972.1A CN107367220A (en) | 2016-05-12 | 2016-05-12 | The inductance sensor calibration method and device that double air-float guide rails are oriented to |
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| CN111289030A (en) * | 2020-03-07 | 2020-06-16 | 中国计量科学研究院 | Capacitive sensor stability testing device |
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