TWI405057B - Dynamic path detection method and device for five - axis machine - Google Patents

Dynamic path detection method and device for five - axis machine Download PDF

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TWI405057B
TWI405057B TW98141146A TW98141146A TWI405057B TW I405057 B TWI405057 B TW I405057B TW 98141146 A TW98141146 A TW 98141146A TW 98141146 A TW98141146 A TW 98141146A TW I405057 B TWI405057 B TW I405057B
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axis
machine tool
laser beam
interferometer
micro
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TW201120596A (en
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Univ Nat Formosa
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Abstract

The present invention discloses a dynamic path detection method for five-axis machine tool and a device thereof. A five-axis machine tool under test is disposed with a detection device. The detection device is equipped with a detector and a cat-eye reflector. The detector is installed with a micro-interferometer, a beam splitter and a four-quadrant displacement sensor. While the detector emits a laser beam to focus on the cat-eye reflector, the detector calibrates the detection device to make the detection device and a machine tool without bias. After detection device is calibrated, the detection device detects a moving path through two linear axes with one of a rotation axis or a dual rotation axis, and sequentially samples a fixed position or continuous dynamic in order to detect the dynamic path of the machine tool, thereby providing a detection method and device convenient to assemble, low cost and capable of simultaneously carrying out multi-axis co-moving detection.

Description

五軸工具機動態路徑檢測方法及其裝置Five-axis machine tool dynamic path detecting method and device thereof

本發明係關於一種檢測方法及裝置,尤指一種用以檢測五軸工具機動態路徑之方法及裝置者。The invention relates to a detection method and device, in particular to a method and a device for detecting a dynamic path of a five-axis machine tool.

按,目前產業急需解決一重要課題,即是要提升工具機的技術等級與加工精密度,其中可從兩方面進行改善,一為改善工具機整體的結構精度,而此方法較為費時賣力花錢,無法快速地解決目前廠商迫切的需求,另一種方法則是利用檢測系統檢測出工具機的誤差,透過誤差補償的方式,來提升工具機的加工精度,此種方法不但較為快速且較為簡便,因此,目前業界大多朝向檢測工具機誤差的方式來提升工具機的技術等級與加工精密度;既有對於多軸工具機檢測誤差的方式,大致可分為有以下幾種方式:(一)、雙球桿循圓量測儀(Double Ball Bar):其係設有一用以量測桿長變化的線性可調差接變壓器(linear variable differential transformer;LVDT),於工具機上作一線性軸循圓量測,透過循圓半徑的變化量測出各軸的多項誤差,進而調整驅動軸的控制迴路參數;(二)、雷射干涉儀:利用光波干涉原理,可量得工具機單一軸的運動及定位誤差,進而對於工具機各軸進行檢測,藉以提升工具機的定位精度;(三)、格點編碼器(Grid Encoder):其係將工具機刀具的運動軌跡作一2D的精密描繪,進而同時量測2D的誤差值;以及(四)、雷射雙球桿量測儀(Laser Double Ball Bar;LDBB):使用一雷射干涉儀來取代線性可調差接變壓器(LVDT),使得量測範圍增大至公尺等級,不僅可透過循圓半徑進行量測外,更可精確量得三軸工具機刀具端點運動時在空間的體積誤差;上述幾種多軸工具機檢測方式,雖可對於工具機各軸進行檢測及校正,但檢測所需的設備相當多且複雜,因此在組裝及架設上相當繁複,不僅會相對提高檢測所需的成本與時間,且僅能對於工具機的旋轉軸(如A軸或C軸)進行單獨的量測,而無法同時與線性軸(X軸、Y軸或Z軸)搭配進行量測,誠有加以改進之處。According to the current industry, there is an urgent need to solve an important problem, that is, to upgrade the technical level and processing precision of the machine tool, which can be improved from two aspects, one is to improve the overall structural precision of the machine tool, and this method is more time-consuming and cost-effective. Another method is to quickly solve the urgent needs of the manufacturer. The other method is to use the detection system to detect the error of the machine tool, and to improve the machining accuracy of the machine tool through the error compensation method. This method is not only fast but relatively simple. Therefore, most of the current industry is to improve the technical level and processing precision of the machine tool by detecting the error of the machine tool; there are several ways to detect the error of the multi-axis machine tool, which can be roughly divided into the following ways: (1) Double Ball Bar: It is equipped with a linear variable differential transformer (LVDT) for measuring the change of the length of the rod. It is a linear axis on the machine tool. Circular measurement, through the change of the radius of the circle to measure a number of errors of each axis, and then adjust the control loop parameters of the drive shaft; (b), Laser interferometer: Using the principle of light wave interference, the motion and positioning error of a single axis of the machine tool can be measured, and then the axes of the machine tool can be detected to improve the positioning accuracy of the machine tool; (3) Grid encoder (Grid) Encoder): It makes a 2D precision depiction of the trajectory of the tool machine tool, and then measures the error value of 2D at the same time; and (4) Laser Double Ball Bar (LDBB): Using a laser interferometer instead of a linear adjustable differential transformer (LVDT), the measurement range is increased to the metric level, not only by measuring the radius of the circle, but also accurately measuring the tool of the three-axis machine tool The volume error in the space when the end point moves; the above-mentioned several multi-axis machine tool detection methods can detect and correct the axes of the machine tool, but the equipment required for the detection is quite complicated and complicated, so it is quite assembled and erected. Intricate, not only will the relative cost and time required for detection be relatively increased, but only the rotation axis of the machine tool (such as the A-axis or the C-axis) can be measured separately, but not simultaneously with the linear axis (X-axis, Y-axis or Z axis) Test, there are improvements.

因此,本發明人有鑑於既有多軸工具機檢測的方法及裝置,組裝繁複、成本高及旋轉軸無法同時與線性軸搭配進行量測的不足與問題,特經過不斷的研究與試驗,終於發展出一種能改進既有缺失之本發明。Therefore, the present inventors have in view of the methods and devices for detecting multi-axis machine tools, the complicated assembly, high cost, and the inability to measure the rotating shaft with the linear axis at the same time, and after continuous research and experiment, finally A invention has been developed which improves the existing deficiency.

本發明之目的係在於提供一種五軸工具機動態路徑檢測方法及其裝置,其係透過光學元件相互配合的方式,對於該五軸工具機進行非接觸式的動態檢測,進而提供一方便組裝、成本低且可同時進行多軸同動檢測之目的者。The object of the present invention is to provide a five-axis machine tool dynamic path detecting method and a device thereof, which perform non-contact dynamic detection on the five-axis machine tool through mutual cooperation of optical elements, thereby providing a convenient assembly, Low cost and simultaneous multi-axis simultaneous motion detection.

為達到上述目的,本發明係提供一種雕刻刀具尺寸參數之檢測方法,其操作流程係包含有:儀器設置:於一待測五軸工具機(其設有一X軸、Y軸、Z軸、C軸及A軸)上設置一檢測裝置,該檢測裝置的座標系係與該五軸工具機直角座標系方向一致,該檢測裝置係包含有一設於該五軸工具機主軸上的檢測器及一設於該五軸工具機C軸轉盤上的貓眼反射鏡,該檢測器內係設有 一微型干涉儀、一分光鏡及一四象限位移感測器,該微型干涉儀係朝該貓眼反射鏡射出一雷射光束,使該雷射光束經由該貓眼反射鏡反射,而反射後的雷射光束經該分光鏡分成兩光束而分別朝該四象限位移感測器與該微型干涉儀射入;儀器校正:當該檢測器所發出的雷射光束對準該貓眼反射鏡後,將該五軸工具機的主軸旋轉360°後固定,旋轉的過程中檢測該雷射光束經該貓眼反射鏡反射至該檢測器的訊號,即可透過該微型干涉儀與該四象限位移感測器檢測出該檢測裝置與該五軸工具機主軸間的偏心量,進而對於該檢測裝置進行校正,使該檢測裝置與該五軸工具機間無偏心的情況;以及進行檢測:當該檢測裝置經過校正後,透過兩線性軸(X軸、Y軸或Z軸)配合其中一旋轉軸(C軸或A軸)的行進路線進行檢測,依序對於固定位置或連續動態進行取樣,即可對於該五軸工具機動態路徑進行檢測。In order to achieve the above object, the present invention provides a method for detecting the size parameter of an engraving tool, and the operation flow thereof comprises: an instrument setting: a five-axis machine tool to be tested (which is provided with an X-axis, a Y-axis, a Z-axis, and a C) A detecting device is disposed on the shaft and the A-axis. The coordinate system of the detecting device is in the same direction as the right-angle coordinate system of the five-axis machine tool. The detecting device comprises a detector disposed on the spindle of the five-axis machine tool and a detector. a cat's eye mirror disposed on the C-axis turntable of the five-axis machine tool, the detector is internally provided a micro-interferometer, a beam splitter and a four-quadrant displacement sensor, the micro-interferometer emits a laser beam toward the cat's eye mirror, so that the laser beam is reflected by the cat's eye mirror, and the reflected thunder The beam is split into two beams through the beam splitter and respectively injected into the four-quadrant displacement sensor and the micro-interferometer; the instrument corrects: when the laser beam emitted by the detector is aligned with the cat's eye mirror, The spindle of the five-axis machine tool is rotated 360° and fixed. During the rotation process, the signal reflected by the laser beam reflected by the cat's eye mirror is detected, and the micro-interferometer and the four-quadrant displacement sensor can be detected. Deviating the amount of eccentricity between the detecting device and the spindle of the five-axis machine tool, and further correcting the detecting device so that there is no eccentricity between the detecting device and the five-axis machine tool; and performing detection: when the detecting device is corrected After that, the two linear axes (X-axis, Y-axis or Z-axis) are matched with the travel path of one of the rotating axes (C-axis or A-axis), and the fixed position or continuous dynamic sampling is sequentially performed. The five-axis machine tool for detecting dynamic path.

較佳地,於進行檢測的流程中係包含有兩種雙線性軸配合一旋轉軸及一種三線性配合雙軸行進路線進行檢測。Preferably, in the process of detecting, the two types of bilinear axes are combined with a rotating shaft and a trilinear matching two-axis traveling path is detected.

較佳地,於進行檢測的流程中,第一種雙線性軸(X軸與Y軸)配合一旋轉軸(C軸)的類型,其係將C軸對準Z軸進行旋轉,依循圓型路徑移動該五軸工具機的X軸與Y軸,使該雷射光束可保持垂直入射於該貓眼反射鏡的中心,依序對於固定位置或連續動態進行取樣。Preferably, in the process of detecting, the first bilinear axis (X axis and Y axis) cooperates with a type of rotating axis (C axis), which rotates the C axis to the Z axis, and follows the circle. The path moves the X-axis and the Y-axis of the five-axis machine tool such that the laser beam remains perpendicular to the center of the cat's eye mirror, sequentially sampling for a fixed position or continuous dynamics.

較佳地,於進行檢測的流程中,第二種雙線性軸(Y軸與Z軸)配合一旋轉軸(A軸)的類型,其係將A軸對準X軸 進行旋轉,依循圓型路徑移動工具機的Y軸與Z軸,使該雷射光束與該貓眼反射鏡保持固定半徑且對準於該貓眼反射鏡中心,依序對於固定位置或連續動態進行取樣。Preferably, in the process of detecting, the second bilinear axis (Y axis and Z axis) is matched with a type of rotating axis (A axis), which is to align the A axis with the X axis. Rotating, moving the Y-axis and the Z-axis of the machine tool according to the circular path, keeping the laser beam and the cat's eye mirror at a fixed radius and aligning with the center of the cat's eye mirror, sequentially sampling the fixed position or continuous dynamics .

較佳地,於進行檢測的流程中,該三線性軸配合雙軸旋轉的類型,其中該C軸係對準Z軸進行旋轉,而該A軸則對準X軸進行旋轉,其中X軸係配合C軸路徑依循圓型路徑進行移動,Z軸係配合A軸路徑依循圓型路徑進行移動,而Y軸則需配合A軸與C軸依雙循圓型路徑進行移動,進而使該雷射光束保持入射於該貓眼反射鏡的中心,並維持固定的距離半徑,依序對於固定位置或連續動態進行取樣。Preferably, in the process of detecting, the trilinear axis cooperates with a type of biaxial rotation, wherein the C axis is rotated in alignment with the Z axis, and the A axis is rotated in alignment with the X axis, wherein the X axis is rotated. The C-axis path is moved according to the circular path, the Z-axis is moved along with the circular path according to the A-axis path, and the Y-axis is moved along with the A-axis and the C-axis according to the double-circular path, thereby making the laser The beam remains incident at the center of the cat's eye mirror and maintains a fixed distance radius, sequentially sampling for a fixed position or continuous dynamics.

本發明另提供一種五軸工具機動態路徑檢測裝置,其係包含有一檢測器及一貓眼反射鏡,其中:該檢測器係設有一外殼體、一微型干涉儀、一分光鏡及一四象限位移感測器,該微型干涉儀係設於該外殼體內且朝外該殼體射出一雷射光束,該雷射光束朝該貓眼反射鏡射入後,其雷射光束反射回該外殼體內,使反射後的雷射光束會通過該分光鏡,該分光鏡係設於該外殼體內且將該反射後的雷射光束一分為二,其中一雷射光束係射入該外殼體內中的微型干涉儀,而該四象限位移感測器係設於該外殼體內且接收經該分光鏡分光後的另一雷射光束;以及該貓眼反射鏡係接收該檢測器的雷射光束,且將該雷射光束反射進入該外殼體內的分光鏡,使該微型干涉儀及該四象限位移感測器分別接收經該分光鏡分光後的雷射光 束而進行訊號的接收。The invention further provides a five-axis machine tool dynamic path detecting device, which comprises a detector and a cat's eye mirror, wherein: the detector is provided with an outer casing, a micro interferometer, a beam splitter and a four-quadrant displacement a sensor, the micro interferometer is disposed in the outer casing and emits a laser beam toward the outer casing, and after the laser beam is incident on the cat's eye mirror, the laser beam is reflected back into the outer casing, so that The reflected laser beam passes through the beam splitter, and the beam splitter is disposed in the outer casing and splits the reflected laser beam into two. One of the laser beams is incident on the outer casing. And the four-quadrant displacement sensor is disposed in the outer casing and receives another laser beam split by the spectroscope; and the cat's eye mirror receives the laser beam of the detector, and the thunder beam The beam is reflected by the beam splitter into the outer casing, so that the micro-interferometer and the four-quadrant displacement sensor respectively receive the laser light split by the beam splitter The signal is received by the bundle.

進一步,該外殼體係由一盒體及一蓋板所組成,該盒體於一側面係設有一與五軸工具機主軸相結合的桿體,該盒體另一側面係貫穿設有複數個穿孔,該蓋板係與該盒體相結合而形成一容設空間,該微型干涉儀係設於該外殼體的容設空間中,該分光鏡係設於該盒體內而介於該微型干涉儀及其中一穿孔間,其中該微型干涉儀的雷射光束係經另一穿孔而射出該外殼體。Further, the housing system is composed of a box body and a cover plate. The box body is provided with a rod body coupled with a five-axis machine tool main shaft on one side, and the other side of the box body is provided with a plurality of perforations. The cover plate is combined with the casing to form a receiving space, and the micro interferometer is disposed in the receiving space of the outer casing, and the beam splitter is disposed in the casing and interposed between the micro interferometer And a middle of the perforation, wherein the laser beam of the micro interferometer is ejected through the outer casing through another perforation.

再進一步,經該貓眼反射鏡反射的雷射光束係經該外殼體的其中一穿孔及該分光鏡,而反射進入該外殼體的微型干涉儀及四象限位移感測器中。Further, the laser beam reflected by the cat's eye mirror is reflected by one of the perforations of the outer casing and the beam splitter, and is reflected into the micro-interferometer and the four-quadrant displacement sensor of the outer casing.

藉由上述的技術手段,本發明的五軸工具機動態路徑檢測方法及其裝置,主要係利用該微型干涉儀配合該四象限位移感測器組成一三線性位移量測系統,於組裝時僅需將該檢測器架設於該五軸工具機主軸上,並將該貓眼反射鏡架設於C軸轉盤上,使該微型干涉儀的雷射光束射入該貓眼反射鏡中並維持固定距離,而該雷射光束透過該貓眼反射鏡反射後,透過該微型干涉儀即可量測到線性定位誤差,並且透過該四象限位移感測器量測到雙線性直度誤差,藉以產生共三線性位移的訊號,而後進行五軸加工模擬,可分為兩種雙線性軸配合一旋轉軸行進路線與一種三線性軸配合雙旋轉軸之行進路線,由三線性位移量測系統檢測工具機五軸位移時所產生的誤差,同時檢測該五軸工具機的三線性位移精度,適用於各種五軸工具機上做檢測,與既有干涉儀檢測技術不同,透過非接觸的方式、精簡的 結構配置與高解析度的特點,提供一方便組裝、成本低且可同時進行多軸同動檢測之檢測方法及裝置者。According to the above technical means, the five-axis machine tool dynamic path detecting method and device thereof are mainly composed of the micro-interferometer and the four-quadrant displacement sensor to form a three-linear displacement measuring system, which is only assembled during assembly. The detector is mounted on the spindle of the five-axis machine tool, and the cat's eye reflector is mounted on the C-axis turntable, so that the laser beam of the micro-interferometer is injected into the cat's eye mirror and maintains a fixed distance. After the laser beam is reflected by the cat's eye mirror, the linear interferometer can be measured through the micro interferometer, and the bilinear straightness error is measured through the four quadrant displacement sensor, thereby generating a common trilinearity. The displacement signal, and then the five-axis machining simulation, can be divided into two kinds of bilinear axes with a rotating axis travel route and a trilinear axis with a double rotary axis travel path, and the three linear displacement measurement system detects the machine tool five. The error caused by the axial displacement, and the trilinear displacement accuracy of the five-axis machine tool are simultaneously detected. It is suitable for testing on various five-axis machine tools, and the existing interferometer detection technology does not. Same, through non-contact, streamlined The structure configuration and high resolution feature provide a convenient detection, low cost and simultaneous detection method and device for multi-axis simultaneous motion detection.

為能詳細瞭解本發明的技術特徵及實用功效,並可依照說明書的內容來實施,玆進一步以圖式(如第一及二圖所示)所示的較佳實施例,詳細說明如后:本發明係透過光學數位影像處理與影像量測方式,而提供一五軸工具機動態路徑檢測方法及其裝置,其中該雕刻刀具尺寸參數之檢測方法,其操作流程係包含有:A、儀器設置:於一待測五軸工具機(40)(其設有一X軸、Y軸、Z軸、C軸及A軸)上設置一檢測裝置,該檢測裝置的座標系係與該五軸工具機直角座標系方向一致,其中該檢測裝置係如第三至五圖所示,包含有一設於該五軸工具機(40)主軸(41)上的檢測器(10)及一設於該五軸工具機(40)C軸轉盤(42)上的貓眼反射鏡(20),該檢測器(10)內係設有一微型干涉儀(12)、一分光鏡(13)及一四象限位移感測器(14),該微型干涉儀(12)係朝該貓眼反射鏡(20)射出一雷射光束(121),該雷射光束(121)係經該貓眼反射鏡(20)反射後,反射回該微型干涉儀(12)內,而在射入該微型干涉儀(12)前會先通過該分光鏡(13),該分光鏡(13)會將反射後之雷射光束(121)分成兩光束而分別朝該四象限位移感測器(14)與該微型干涉儀(12)射入;B、儀器校正:如第三圖所示當該檢測器所發出的雷射光束(121)對準該貓眼反射鏡(20)後,將該五軸工具機(40)的主軸(41)旋轉360°後固定,旋轉的過程中檢測該雷 射光束(121)經該貓眼反射鏡(20)反射至該檢測器(10)的訊號,即可透過該微型干涉儀(12)與該四象限位移感測器(14)檢測出該檢測裝置與該五軸工具機(40)主軸(41)間的偏心量(即相對X軸與Y軸的偏心),進而對於檢測裝置進行校正,使該檢測裝置與該五軸工具機(40)間無偏心的情況;其中於校正時係可分成兩種修正方式,其中一為移動X軸後取得三線性位移訊號:Xwr 、Ywr 、Zwr ,先針對X軸 進行補正,取得X軸的旋轉角θ後,由補正後數據可得知Y軸的旋轉角θ’,透過補正X軸與Y軸後的量測數據進行Y軸移動,可得知Z軸之旋轉角度θ”,透過方程式(1)所示之齊次座標系統矩陣補正後即可得補正後之線性位移訊號X、Y、Z:另一修正方式係為移動Y軸後取得三線性位移訊號:Xwr 、Ywr 、Zwr ,先針對Y軸進行補正,取得Y軸的旋轉角θ後,由補正後數據可得知Y軸的旋轉角θ’,透過補正X軸與Y軸後的量測數據進行軸移動,可得知Z軸之旋轉角度θ”,透過方程式(2)所示之齊次座標系統矩陣補正後即可得補正後之線性位移訊號X、Y、Z;以及 In order to understand the technical features and practical functions of the present invention in detail, and in accordance with the contents of the specification, the preferred embodiments shown in the drawings (as shown in the first and second figures) are described in detail as follows: The invention provides a five-axis machine tool dynamic path detecting method and a device thereof through optical digital image processing and image measuring method, wherein the method for detecting the size parameter of the engraving tool comprises: A, instrument setting : a detection device is arranged on a five-axis machine tool (40) to be tested (which is provided with an X-axis, a Y-axis, a Z-axis, a C-axis and an A-axis), the coordinate system of the detection device and the five-axis machine tool The right angle coordinate system has the same direction, wherein the detecting device is as shown in the third to fifth figures, and includes a detector (10) disposed on the main shaft (41) of the five-axis machine tool (40) and one of the five axes Tool machine (40) A cat's eye mirror (20) on a C-axis turntable (42). The detector (10) is provided with a micro interferometer (12), a beam splitter (13) and a four-quadrant displacement sensing. a micro-interferometer (12) that emits a laser beam (121) toward the cat's eye mirror (20), The beam (121) is reflected by the cat's eye mirror (20) and reflected back into the micro-interferometer (12), and passes through the beam splitter (13) before being injected into the micro-interferometer (12). The beam splitter (13) divides the reflected laser beam (121) into two beams and respectively injects into the four-quadrant displacement sensor (14) and the micro interferometer (12); B, instrument calibration: In the third figure, after the laser beam (121) emitted by the detector is aligned with the cat's eye mirror (20), the main shaft (41) of the five-axis machine tool (40) is rotated by 360°, and then fixed and rotated. During the process, the laser beam (121) is detected by the cat's eye mirror (20) and transmitted to the detector (10), and the micro-interferometer (12) and the four-quadrant displacement sensor (14) are transmitted through the micro-interferometer (12). Detecting an eccentricity between the detecting device and the spindle (41) of the five-axis machine tool (40) (ie, eccentricity with respect to the X-axis and the Y-axis), and further correcting the detecting device to make the detecting device and the five-axis There is no eccentricity between the machine tools (40); in the correction, it can be divided into two correction modes, one of which is to obtain the three linear displacement signals after moving the X axis: X wr , Y wr , Z wr , first For the X axis After the correction is made and the rotation angle θ of the X-axis is obtained, the rotation angle θ' of the Y-axis can be known from the corrected data, and the Y-axis movement can be performed by correcting the measurement data after the X-axis and the Y-axis, and the Z-axis can be known. The rotation angle θ" can be corrected by the matrix of the homogeneous coordinate system shown in equation (1) to obtain the corrected linear displacement signals X, Y, Z: another correction method is to obtain a trilinear displacement signal after moving the Y-axis. :X wr , Y wr , Z wr , first correct for the Y axis, and after obtaining the rotation angle θ of the Y axis, the rotation angle θ' of the Y axis can be known from the corrected data, after correcting the X axis and the Y axis The measured data is moved by the axis, and the rotation angle θ" of the Z-axis can be known, and the corrected linear displacement signals X, Y, Z can be obtained by correcting the matrix of the homogeneous coordinate system shown in the equation (2);

C、進行檢測:當檢測裝置經過校正後,透過兩種雙線性軸配合一旋轉軸及一種三線性配合雙軸行進路線進行檢測,其中如第六圖所示係為第一種雙線性軸(X軸與Y軸)配合一旋轉軸(C軸)的類型,其係將C軸對準Z軸進行旋轉,依循圓型路徑移動該五軸工具機(40)的X軸與Y軸,使該雷射光束(121)可保持垂直入射於該貓眼反射鏡(20)的中心,依序對於固定位置或連續動態進行取樣;請配合參看如第七圖所示,第二種雙線性軸(Y軸與Z軸)配合一旋轉軸(A軸)的類型,其係將A軸對準X軸進行旋轉,依循圓型路徑移動該五軸工具機(40)的Y軸與Z軸,使該主軸工具機(40)主軸(41)上的雷射光束(121)與該貓眼反射鏡(20)保持固定的刀具長度且對準於該貓眼反射鏡(20)的中心,依序對於固定位置或連續動態進行取樣;以及如第八圖所示該三線性軸配合雙軸旋轉的類型,其中該C軸係對準Z軸進行旋轉,而該A軸則對準X軸進行旋轉,其中X軸係配合C軸路徑依循圓型路徑進行移動,Z軸係配合A軸路徑依循圓型路徑進行移動,而Y軸則需配合A軸與C軸依雙循圓型路徑進行移動,進而使該雷射光束(121)保持入射於該貓眼反射鏡(20)的中心,並維持固定的距離半徑,依序對於固定位置或連續動態進行取樣,即可對於該五軸工具機動態路徑進行檢測,透過光學元件 相互配合的方式,對於該五軸工具機(40)進行非接觸式的動態檢測,進而提供一方便組裝、成本低且可同時進行多軸同動檢測之工具機檢測方法。C. Performing detection: When the detecting device is calibrated, it is detected by two kinds of bilinear shafts combined with a rotating shaft and a trilinear matching biaxial traveling route, wherein the first type is bilinear as shown in the sixth figure. The axis (X-axis and Y-axis) cooperates with a type of rotating shaft (C-axis), which rotates the C-axis with respect to the Z-axis, and moves the X-axis and the Y-axis of the five-axis machine tool (40) according to a circular path. The laser beam (121) can be kept perpendicularly incident on the center of the cat's eye mirror (20), and sequentially sample the fixed position or continuous dynamic; please refer to the second double line as shown in the seventh figure. The linear axis (Y-axis and Z-axis) cooperates with a type of rotating shaft (A-axis), which rotates the A-axis with respect to the X-axis, and moves the Y-axis and Z of the five-axis machine tool (40) according to the circular path. a shaft that maintains a fixed beam length of the laser beam (121) on the main shaft machine (40) main shaft (41) and the cat's eye mirror (20) and is aligned with the center of the cat's eye mirror (20), Sampling for a fixed position or continuous dynamics; and as shown in the eighth figure, the trilinear axis cooperates with a type of biaxial rotation, wherein the C axis is aligned with the Z axis The row rotates, and the A axis rotates in alignment with the X axis. The X axis is moved along with the circular path along with the C axis path, and the Z axis moves along the circular path with the A axis path, and the Y axis needs to cooperate. The A-axis and the C-axis move in a double-circular path, so that the laser beam (121) remains incident at the center of the cat's eye mirror (20) and maintains a fixed distance radius, sequentially for a fixed position or continuous Dynamic sampling, the dynamic path of the five-axis machine tool can be detected, through the optical components The non-contact dynamic detection is performed on the five-axis machine tool (40) in a mutual cooperation manner, thereby providing a machine tool detecting method which is convenient to assemble, low in cost, and capable of simultaneous multi-axis simultaneous motion detection.

請配合參看如第三至五圖所示,本發明五軸工具機動態路徑檢測裝置係設有一檢測器(10)及一貓眼反射鏡(20),其中:該檢測器(10)係設於一五軸工具機(40)的主軸(41)上且設有一外殼體(11)、一微型干涉儀(12)、一分光鏡(13)及一四象限位移感測器(14),其中該外殼體(11)係由一盒體(111)及一蓋板(112)所組成,該盒體(111)於一側面係設有一與工具機(40)主軸(41)相結合的桿體(113),於盒體(111)的另一側面係貫穿設有複數個穿孔(114),該蓋板(112)係與該盒體(111)相結合而形成一容設空間,該微型干涉儀(12)係設於該外殼體(11)的容設空間中且朝該外殼體(11)射出一雷射光束(121)並經其中一穿孔(114)而射出該外殼體(11),且射向該貓眼反射鏡(20),該貓眼反射鏡(20)在接收該檢測器(10)的雷射光束(121)後,會將該雷射光束(121)經該外殼體(11)的另一穿孔(114)反射進入該外殼體(11)的微型干涉儀(12)內,其中在射入該微型干涉儀(12)前會通過一分光鏡(13),該分光鏡(13)係設於該盒體(111)內而介於該微型干涉儀(12)及其中一穿孔(114)間,進而將入射於該微型干涉儀(12)的雷射光束(121)一分為二,其中一雷射光束(121)射入該微型干涉儀(12)中,而該四象限位移感測器(14)係設於該盒體(111)內且接收經該分光鏡(13)分光後的另一雷射光束(121);以及 該貓眼反射鏡(20)設於該五軸工具機(40)的C軸轉盤(42)上且接收該檢測器(10)的雷射光束(121),並將該雷射光束(121)經該外殼體(11)的其中一穿孔(114)反射進入該外殼體(11)的分光鏡(13),使該微型干涉儀(12)及該四象限位移感測器(14)分別接收經該分光的雷射光束(121)而進行訊號的接收。Please refer to the third to fifth figures. The five-axis machine tool dynamic path detecting device of the present invention is provided with a detector (10) and a cat's eye mirror (20), wherein: the detector (10) is The main shaft (41) of the five-axis machine tool (40) is provided with an outer casing (11), a micro interferometer (12), a beam splitter (13) and a four-quadrant displacement sensor (14), wherein The outer casing (11) is composed of a box body (111) and a cover plate (112). The box body (111) is provided on one side with a rod coupled with the main shaft (41) of the machine tool (40). a plurality of perforations (114) are formed in the other side of the casing (111), and the cover plate (112) is combined with the casing (111) to form a receiving space. The micro interferometer (12) is disposed in the receiving space of the outer casing (11) and emits a laser beam (121) toward the outer casing (11) and exits the outer casing through one of the perforations (114) ( 11) and directed to the cat's eye mirror (20), the cat's eye mirror (20), after receiving the laser beam (121) of the detector (10), passes the laser beam (121) through the outer casing Another perforation (114) of the body (11) reflects the micro-dry into the outer casing (11) In the instrument (12), before entering the micro-interferometer (12), a spectroscope (13) is disposed, and the beam splitter (13) is disposed in the box (111) and interposed between the micro-interferometer (12) and a middle of the perforation (114), which further divides the laser beam (121) incident on the micro interferometer (12) into two, and a laser beam (121) is incident on the micro interferometer ( 12), the four-quadrant displacement sensor (14) is disposed in the casing (111) and receives another laser beam (121) split by the beam splitter (13); The cat's eye mirror (20) is disposed on a C-axis turntable (42) of the five-axis machine tool (40) and receives a laser beam (121) of the detector (10), and the laser beam (121) A splitter (13) that is reflected into the outer casing (11) through one of the perforations (114) of the outer casing (11), so that the micro interferometer (12) and the four quadrant displacement sensor (14) receive respectively The signal is received via the split laser beam (121).

藉由上述的技術手段,本發明的五軸工具機動態路徑檢測方法及其裝置,主要係利用該微型干涉儀(12)配合該四象限位移感測器(14)組成一三線性位移量測系統,於組裝時僅需將該檢測器(10)架設於該五軸工具機(40)主軸(41)上,並將該貓眼反射鏡架(20)設於C軸轉盤(42)上,使該微型干涉儀(12)的雷射光束(121)射入該貓眼反射鏡(20)中並維持固定距離,而該雷射光束(121)透過該貓眼反射鏡(20)反射後,透過該微型干涉儀(12)即可量測到線性定位誤差,並且透過該四象限位移感測器(14)量測到雙線性直度誤差,藉以產生共三線性位移的訊號;於進行該五軸工具機(40)的五軸加工模擬時,則可分為兩種雙線性軸配合一旋轉軸行進路線與一種三線性軸配合雙旋轉軸之行進路線,由三線性位移量測系統檢測該五軸工具機(40)於五軸位移時所產生的誤差,同時檢測五軸工具機(40)的三線性位移精度,適用於各種五軸工具機(40)上做檢測,與既有干涉儀檢測技術不同,透過非接觸的方式、精簡的結構配置與高解析度的特點,提供一方便組裝、成本低且可同時進行多軸同動檢測之檢測方法及裝置者。According to the above technical means, the five-axis machine tool dynamic path detecting method and device thereof are mainly composed of the micro-interferometer (12) and the four-quadrant displacement sensor (14) to form a three-linear displacement measurement. The system only needs to mount the detector (10) on the spindle (41) of the five-axis machine tool (40) during assembly, and the cat-eye mirror frame (20) is disposed on the C-axis turntable (42). The laser beam (121) of the micro interferometer (12) is incident on the cat's eye mirror (20) and maintained at a fixed distance, and the laser beam (121) is reflected by the cat's eye mirror (20) and transmitted through The micro-interferometer (12) can measure the linear positioning error, and measure the bilinear straightness error through the four-quadrant displacement sensor (14), thereby generating a signal of the common trilinear displacement; The five-axis machining simulation of the five-axis machine tool (40) can be divided into two kinds of bilinear shafts with one rotating shaft travel route and one trilinear shaft with two rotating shafts. Detecting the error caused by the five-axis machine tool (40) during five-axis displacement, and detecting the five-axis machine tool (40) Trilinear displacement accuracy, suitable for testing on various five-axis machine tools (40), different from existing interferometer detection technology, providing a convenient assembly through non-contact method, streamlined structure configuration and high resolution. The detection method and device with low cost and simultaneous multi-axis simultaneous detection.

以上所述,僅是本發明的較佳實施例,並非對本發明作任何形式上的限制,任何所屬技術領域中具有通常知識者,若在不脫離本發明所提技術方案的範圍內,利用本發明所揭示技術內容所作出局部更動或修飾的等效實施例,並且未脫離本發明的技術方案內容,均仍屬於本發明技術方案的範圍內。The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the invention may be made without departing from the technical scope of the present invention.

(10)‧‧‧檢測器(10)‧‧‧Detector

(11)‧‧‧外殼體(11) ‧‧‧ outer casing

(111)‧‧‧盒體(111)‧‧‧Box

(112)‧‧‧蓋板(112)‧‧‧ Cover

(113)‧‧‧桿體(113)‧‧‧ rod body

(114)‧‧‧穿孔(114)‧‧‧Perforation

(12)‧‧‧微型干涉儀(12)‧‧‧Micro Interferometer

(121)‧‧‧雷射光束(121)‧‧‧Laser beam

(13)‧‧‧分光鏡(13) ‧‧‧beam splitter

(14)‧‧‧四象限位移感測器(14) ‧‧‧ four-quadrant displacement sensor

(20)‧‧‧貓眼反射鏡(20)‧‧‧cat eye mirror

(40)‧‧‧工具機(40)‧‧‧Tool Machine

(41)‧‧‧主軸(41)‧‧‧ Spindle

(42)‧‧‧轉盤(42)‧‧‧ Turntable

第一圖係本發明五軸工具機動態路徑檢測方法之操作方塊示意圖。The first figure is a block diagram showing the operation of the five-axis machine tool dynamic path detecting method of the present invention.

第二圖係本發明檢測裝置裝設於一五軸工具機之立體外觀示意圖。The second figure is a schematic view of the three-axis machine tool installed in the five-axis machine tool.

第三圖係本發明檢測裝置裝設於一五軸工具機之局部放大立體外觀示意圖。The third figure is a partial enlarged stereoscopic appearance diagram of the detecting device of the present invention installed on a five-axis machine tool.

第四圖係本發明檢測器之放大立體外觀示意圖。The fourth figure is a schematic enlarged view of the detector of the present invention.

第五圖係本發明檢測器之局部分解立體外觀示意圖。The fifth drawing is a partially exploded perspective view of the detector of the present invention.

第六圖係本發明第一種雙線性軸(X軸與Y軸)配合一旋轉軸(C軸)之操作流程示意圖。The sixth figure is a schematic diagram of the operation flow of the first bilinear shaft (X-axis and Y-axis) of the present invention in cooperation with a rotating shaft (C-axis).

第七圖係本發明第二種雙線性軸(Y軸與Z軸)配合一旋轉軸(A軸)之操作流程示意圖。The seventh figure is a schematic diagram of the operation flow of the second bilinear shaft (Y axis and Z axis) of the present invention with a rotating shaft (A axis).

第八圖係本發明三線性軸配合雙軸旋轉類型之操作流程示意圖。The eighth figure is a schematic diagram of the operation flow of the trilinear shaft and the two-axis rotation type of the present invention.

Claims (8)

一種五軸工具機動態路徑檢測方法,其操作流程係包含有:儀器設置:於一待測五軸工具機(其設有一X軸、Y軸、Z軸、C軸及A軸)上設置一檢測裝置,該檢測裝置的座標系係與該五軸工具機直角座標系方向一致,該檢測裝置係包含有一設於該五軸工具機主軸上的檢測器及一設於工具機C軸轉盤上的貓眼反射鏡,該檢測器內係設有一微型干涉儀、一分光鏡及一四象限位移感測器,該微型干涉儀係朝該分鏡射出一雷射光束,該雷射光束經由該貓眼反射鏡反射後經該分光鏡分成兩光束而分別朝該四象限位移感測器與該微型干涉儀射入;儀器校正:當該檢測器所發出的雷射光束對準該貓眼反射鏡後,將該五軸工具機的主軸旋轉360°後固定,旋轉的過程中檢測雷射光束經該貓眼反射鏡反射至該檢測器的訊號,即可透過該微型干涉儀與該四象限位移感測器檢測出該檢測裝置與該五軸工具機主軸間的偏心量,進而對於該檢測裝置進行校正,使該檢測裝置與該五軸工具機間無偏心的情況;以及進行檢測:當該檢測裝置經過校正後,透過兩線性軸(X軸、Y軸或Z軸)配合其中一旋轉軸(C軸或A軸)的行進路線進行檢測,使雷射光束可保持垂直入射於貓眼反射鏡的中心,並維持固定的距離半徑,依序對於固定位置或連續動態進行取樣,即可對於該五軸工具機動態路徑進行檢測。 A five-axis machine tool dynamic path detecting method, the operating process includes: an instrument setting: setting a one on a five-axis machine tool to be tested (which is provided with an X-axis, a Y-axis, a Z-axis, a C-axis, and an A-axis) a detecting device, the coordinate system of the detecting device is in the same direction as the right-angle coordinate system of the five-axis machine tool, and the detecting device comprises a detector disposed on the spindle of the five-axis machine tool and a C-axis turntable disposed on the machine tool a cat's eye mirror, the detector is provided with a micro-interferometer, a beam splitter and a four-quadrant displacement sensor, and the micro-interferometer emits a laser beam toward the mirror, the laser beam passing through the cat's eye After being reflected by the mirror, the beam splits into two beams and is respectively injected into the four-quadrant displacement sensor and the micro-interferometer; the instrument corrects: when the laser beam emitted by the detector is aligned with the cat's eye mirror, The spindle of the five-axis machine tool is rotated 360° and fixed, and during the rotation process, the signal reflected by the laser beam reflected by the cat's eye mirror to the detector is detected, and the micro-interferometer and the four-quadrant displacement sensor can be transmitted through the micro-interferometer and the four-quadrant displacement sensor. Detected the test The amount of eccentricity between the measuring device and the spindle of the five-axis machine tool, thereby correcting the detecting device so that there is no eccentricity between the detecting device and the five-axis machine tool; and performing detection: when the detecting device is corrected, Detecting the travel path of one of the two axes (X-axis, Y-axis or Z-axis) with one of the rotating axes (C-axis or A-axis) so that the laser beam can remain perpendicular to the center of the cat's eye mirror and remain fixed. The distance radius, which is sequentially sampled for a fixed position or continuous dynamic, can be used to detect the dynamic path of the five-axis machine tool. 如申請專利範圍第1項所述之五軸工具機動態路徑檢測方法,其中於進行檢測的流程中係包含有兩種雙線性軸配合一旋轉軸及一種三線性配合雙軸行進路線進行檢測。 The five-axis machine tool dynamic path detecting method according to claim 1, wherein the detecting process comprises two kinds of bilinear axes combined with a rotating shaft and a trilinear matching two-axis traveling route for detecting. . 如申請專利範圍第2項所述之五軸工具機動態路徑檢測方法,其中於進行檢測的流程中,第一種雙線性軸(X軸與Y軸)配合一旋轉軸(C軸)的類型,其係將C軸對準Z軸進行旋轉,依循圓型路徑移動該五軸工具機的X軸與Y軸。 The five-axis machine tool dynamic path detecting method according to claim 2, wherein in the detecting process, the first bilinear axis (X-axis and Y-axis) cooperates with a rotating axis (C-axis) Type, which rotates the C axis with respect to the Z axis, and moves the X axis and the Y axis of the five-axis machine tool according to a circular path. 如申請專利範圍第3項所述之五軸工具機動態路徑檢測方法,其中於進行檢測的流程中,第二種雙線性軸(Y軸與Z軸)配合一旋轉軸(A軸)的類型,其係將A軸對準X軸進行旋轉,依循圓型路徑移動該五軸工具機的Y軸與Z軸。 The five-axis machine tool dynamic path detecting method according to claim 3, wherein in the process of detecting, the second bilinear axis (Y axis and Z axis) cooperates with a rotating axis (A axis) Type, which rotates the A axis to the X axis, and moves the Y axis and the Z axis of the five-axis machine tool according to the circular path. 如申請專利範圍第2項所述之五軸工具機動態路徑檢測方法,其中於進行檢測的流程中,該三線性軸配合雙軸旋轉的類型,其中該C軸係對準Z軸進行旋轉,而該A軸則對準X軸進行旋轉,其中X軸係配合C軸路徑依循圓型路徑進行移動,Z軸係配合A軸路徑依循圓型路徑進行移動,而Y軸則需配合A軸與C軸依雙循圓型路徑進行移動。 The five-axis machine tool dynamic path detecting method according to claim 2, wherein in the process of detecting, the trilinear axis cooperates with a type of biaxial rotation, wherein the C axis is rotated in alignment with the Z axis, The A-axis is rotated in alignment with the X-axis, wherein the X-axis is moved along with the C-axis path according to the circular path, the Z-axis is moved along with the A-axis path according to the circular path, and the Y-axis is coordinated with the A-axis and The C axis moves in a double circular path. 一種五軸工具機動態路徑檢測裝置,其係包含有一檢測器及一貓眼反射鏡,其中:該檢測器係設有一外殼體、一微型干涉儀、一分光鏡及一四象限位移感測器,該微型干涉儀係設於該外殼體內 且朝該外殼體射出一雷射光束,射入至該貓眼反射鏡後,其雷射光束反射回該外殼體內,該反射後的雷射光束會通過該分光鏡,該分光鏡係設於該外殼體內且將該微型干涉儀的雷射光束一分為二,其中一雷射光束係射入該外殼體內中的微型干涉儀,而該四象限位移感測器係設於該外殼體內且接收經該分光鏡分光後的另一雷射光束;以及該貓眼反射鏡係接收該檢測器的雷射光束,且將該雷射光束反射進入該外殼體內的分光鏡,使該微型干涉儀及該四象限位移感測器分別接收雷射光束而進行訊號的接收。 A five-axis machine tool dynamic path detecting device comprises a detector and a cat's eye mirror, wherein: the detector is provided with an outer casing, a micro-interferometer, a beam splitter and a four-quadrant displacement sensor. The micro interferometer is disposed in the outer casing And emitting a laser beam toward the outer casing, and after entering the cat's eye mirror, the laser beam is reflected back into the outer casing, and the reflected laser beam passes through the beam splitter, and the beam splitter is disposed on the beam Inside the housing and splitting the laser beam of the micro interferometer into two, one of the laser beams is incident on the micro interferometer in the outer casing, and the four quadrant displacement sensor is disposed in the outer casing and receives Another laser beam split by the beam splitter; and the cat's eye mirror receives the laser beam of the detector, and reflects the laser beam into a beam splitter in the outer casing, so that the micro interferometer and the The four-quadrant displacement sensor receives the laser beam and receives the signal. 如申請專利範圍第6項所述之五軸工具機動態路徑檢測裝置,其中該外殼體係由一盒體及一蓋板所組成,該盒體於一側面係設有一與該五軸工具機主軸相結合的桿體,該盒體另一側面係貫穿設有複數個穿孔,該蓋板係與該盒體相結合而形成一容設空間,該微型干涉儀係設於該外殼體的容設空間中,該分光鏡係設於該盒體內而介於該微型干涉儀及其中一穿孔間,該雷射光束係經其中一穿孔而射出該外殼體。並經由該貓眼反射鏡反射後經另一穿孔而射入該外殼體。 The five-axis machine tool dynamic path detecting device according to claim 6, wherein the outer casing system is composed of a box body and a cover plate, and the box body is provided with a five-axis machine tool spindle on one side The other side of the box body is provided with a plurality of perforations, and the cover plate is combined with the box body to form a receiving space, and the micro interferometer is disposed on the outer casing. In the space, the beam splitter is disposed in the box and interposed between the micro-interferometer and a perforation thereof, and the laser beam is perforated through one of the outer casings. And reflected by the cat's eye mirror and then injected into the outer casing through another perforation. 如申請專利範圍第6或7項所述之五軸工具機動態路徑檢測裝置,其中經貓眼反射鏡反射的雷射光束係經外殼體的穿孔及該分光鏡後,反射進入該外殼體的微型干涉儀及四象限位移感測器中。The five-axis machine tool dynamic path detecting device according to claim 6 or 7, wherein the laser beam reflected by the cat's eye mirror passes through the perforation of the outer casing and the beam splitter, and is reflected into the outer casing. Interferometer and four-quadrant displacement sensor.
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