CN103162616A - Instantaneous phase shifting interferometer for detecting microsphere surface morphology and measuring method of microsphere surface morphology using same - Google Patents
Instantaneous phase shifting interferometer for detecting microsphere surface morphology and measuring method of microsphere surface morphology using same Download PDFInfo
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- CN103162616A CN103162616A CN2013100711460A CN201310071146A CN103162616A CN 103162616 A CN103162616 A CN 103162616A CN 2013100711460 A CN2013100711460 A CN 2013100711460A CN 201310071146 A CN201310071146 A CN 201310071146A CN 103162616 A CN103162616 A CN 103162616A
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Abstract
Disclosed is an instantaneous phase shifting interferometer for detecting microsphere surface morphology and measuring method of microsphere surface morphology using same. The interferometer and measuring method relates to the field of optical detection space object three-dimensional morphology, and solve the problems of low detecting efficiency in current similar technologies, poor lateral resolution capability, isolated defect points easy to miss, difficulty in producing reference surface and low accuracy and the like. A reference light is transmitted to an optical collimator through a single mode fiber to form an incident reference beam after collimation. A measuring beam forms an incident measuring beam vertical to the incident reference beam after transmission, the incident reference beam and the incident measuring send to a third beam polarization splitting prism and then combine into one beam, and divide into four parallel beams through a fourth beam polarization splitting prism and a fifth beam polarization splitting prism in order. The four parallel beams forms four different faculas at an area array CCD after adding into different phase shifting quantities through a wave plate array. The measuring method obtains the microsphere surface morphology of measured microspheres by performing image processing on four faculas. The device and method is suitable for quick test of microsphere surface morphology.
Description
Technical field
The present invention relates to a kind of instantaneous phase-shifting interference measuring instrument for the detection of microsphere surface pattern and adopt this measuring instrument to realize the measuring method of microsphere surface pattern, belonging to the technical field of optical detection space object three-dimensional appearance.
Background technology
Tiny spherical surface is widely used in the numerous areas such as space flight, military affairs, industry, medical treatment as one of the most frequently used components and parts form, and the surperficial surface precision of tiny spherical surface has vital impact to its performance.The detection means of tradition to tiny spherical surface, although have very high vertical measuring accuracy as atomic force microscope, Laser Scanning Confocal Microscope etc., but it is very little to work as the single measurement scope, and when needing to coordinate high-accuracy mechanical scanning motion device to realize whole measuring three-dimensional morphology, be subjected to the mechanical motion error effect serious, owing to adopting the single-point type scanning survey, also there are the problems such as detection efficiency is low, horizontal resolution characteristic is poor, the easy omission of isolated defects point simultaneously.And for the relatively large interfere type measuring method of sensing range, need ideal spherical face as reference face, and can exist again the reference surface precision not high, make the problems such as difficulty.In addition, traditional phase-shifting interference measuring method is comparatively responsive to factors such as interference of stray light, ambient vibration, air turbulences, affects the measuring accuracy of interference system.
Summary of the invention
The present invention is in order to solve in the tiny spherical surface measuring surface form, the single measurement sensing range is too small, omit easily that isolated defects point, reference surface manufacturing difficulty and precision are not high, the interference field contrast is low and traditional time domain phase-shifting interference measuring instrument is subject to the serious problem of environmental factor (vibration, air turbulence) impact, and then a kind of instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern is provided and adopts this measuring instrument to realize the measuring method of microsphere surface pattern.
Instantaneous phase-shifting interference measuring instrument for the detection of microsphere surface pattern of the present invention, it comprises laser instrument, spatial filter, a λ/2 wave plates, the first polarization splitting prism, λ/4 wave plates, microcobjective, microballoon, the 2nd λ/2 wave plates, the second polarization splitting prism, fiber coupler, single-mode fiber, optical fiber collimator, the 3rd polarization splitting prism, plane mirror, the 4th polarization splitting prism, the 5th polarization splitting prism, wave plate array, polaroid, area array CCD optical sensor, computing machine;
described spatial filter, the one λ/2 wave plates, the first polarization spectroscope, λ/4 wave plates, microcobjective and microballoon are successively set on the optical axis of laser beam of laser instrument output, the laser beam of laser instrument output converts parallel beam to and is incident to a λ/2 wave plates after the spatial filter transmission, light beam through a described λ/2 wave plate transmissions is incident to the first polarization splitting prism, light beam after described the first polarization splitting prism transmission is incident to λ/4 wave plates, light beam after described λ/4 wave plate transmissions is incident to microcobjective, the surface of microballoon assembled the light beam of incident and be radiated at by described microcobjective, the centre of sphere of described microballoon is positioned at the focal position of microcobjective,
reflected light through the microsphere surface reflection returns along original optical path, convert directional light to and be incident to λ/4 wave plates after the microcobjective transmission, be incident to the light splitting surface of the first polarization splitting prism after described λ/4 wave plate transmissions, be incident to the 2nd λ/2 wave plates after this light splitting surface reflection, be incident to the light splitting surface of the second polarization splitting prism after described the 2nd λ/2 wave plate transmissions, light beam through this light splitting surface reflection is reference beam, this reference beam is incident to fiber coupler, be incident to single-mode fiber after this fiber coupler coupling, be incident to optical fiber collimator through the filtered reference beam of this single-mode fiber, obtain parallel reference beam and be incident to the 3rd polarization splitting prism as the first incident reference beam after this optical fiber collimator collimation,
Light beam through the light splitting surface transmission of the second polarization splitting prism is measuring beam, and this measuring beam is incident to the 3rd polarization splitting prism as the second incident measuring beam;
the optical axis of the optical axis of described the first incident reference beam and the second incident measuring beam is perpendicular, the 3rd polarization splitting prism forms a branch of light beam afterwards with the first incident reference beam and the merging of the second incident measuring beam of incident, this light beams is incident to the 3rd plane mirror, form the light beam parallel with the light splitting surface of the 4th polarization splitting prism after the 3rd plane mirror reflection, and being incident to described the 4th polarization splitting prism, described the 4th polarization splitting prism is divided into two identical bundle parallel light emergence to the five polarization splitting prisms of light intensity with the light beam of incident, described the 5th polarization splitting prism is with two bundle directional light light splitting respectively of incident, form the parallel beam that four bundle light intensity equate, the parallel beam that described four bundle light intensity equate is incident to the wave plate array simultaneously, described wave plate array adds respectively 0 to four light beams of incident, pi/2, π, the amount of phase shift of 3 pi/2s, four light beams through described wave plate array transmission are incident to polaroid simultaneously, produce coherent light after described polaroid analyzing, described coherent light is incident to the photosurface of area array CCD optical sensor, form simultaneously four width interference fringe patterns on the area array CCD optical sensor, the electric image signal output terminal of area array CCD optical sensor connects the picture signal collection terminal of computing machine.
Adopt instantaneous phase-shifting interference measuring instrument to realize that the measuring method of microsphere surface pattern is,
Step 1, laser instrument Emission Lasers bundle, this laser beam converts parallel beam to and is incident to a λ/2 wave plates after the spatial filter transmission, light beam through a described λ/2 wave plate transmissions is incident to the first polarization splitting prism, light beam after described the first polarization splitting prism transmission is incident to λ/4 wave plates, light beam after described λ/4 wave plate transmissions is incident to microcobjective, and the surface of microballoon assembled the light beam of incident and be radiated at by described microcobjective;
Step 2, area array CCD optical sensor will gather the four width interference fringe patterns that obtain and send to computing machine, described computing machine carries out image to this four width interference fringe pattern to be processed, obtain the positioning relation between this four width interference fringe pattern, thereby calculate measurement light corresponding to interior each pixel of interference field and the initial phase difference between reference light, and then solve optical path difference between the two, finally obtain microsphere surface by the pattern in laser beam irradiation zone.
The instantaneous phase-shifting interference measuring instrument that is used for microsphere surface pattern fast detecting in the present invention can also comprise the axial turntable of negative-pressure adsorption and two-dimensional quadrature turntable, the axial turntable of negative-pressure adsorption is used for adsorbing tested microballoon, the axial turntable of negative-pressure adsorption is fixed on the turntable of two-dimensional quadrature turntable, and the turntable control signal input end of the axial turntable of negative-pressure adsorption connects the absorption turntable control signal output terminal of computing machine; The control signal output terminal of two-dimensional quadrature turntable connects the horizontal turntable control signal output terminal of computing machine.
Adopt instantaneous phase-shifting interference measuring instrument to realize that the measuring method of microsphere surface pattern is,
Step 1, control two-dimensional quadrature turntable rotate, and make the rotating shaft of the axial turntable of negative-pressure adsorption vertical with the optical axis of measuring light;
Step 2, the microballoon of measuring is adsorbed on the suction nozzle of the axial turntable of negative-pressure adsorption, makes the centre of sphere of microballoon be positioned at the focal position of microcobjective;
Step 3, open laser instrument, measure microsphere surface by the single measurement pattern in laser beam irradiation zone;
Step 4, the axial turntable of computer control negative-pressure adsorption drive microballoon according to clockwise rotating angle a, and repeating step 3 obtains corresponding single measurement pattern; And then control the axial turntable drive of negative-pressure adsorption microballoon according to clockwise rotating angle a, repeating step 3 is until microballoon rotates a circle;
Step 5, computer control two-dimensional quadrature turntable drive the axial turntable of negative-pressure adsorption and move, and make microballoon along the rotating shaft displacement b of the axial turntable of negative-pressure adsorption, then repeating step 3 and 4; And then control the two-dimensional quadrature turntable and drive the axial turntable of negative-pressure adsorption and move, make microballoon along former direction displacement b, repeating step 3 and 4 is until microballoon shifts out the laser beam irradiation zone;
Step 6, with microballoon take perpendicular to the plane of the axial turntable rotating shaft of negative-pressure adsorption as minute surface, carry out mirror image switch, then return to step 2;
Step 7, all one-sided measurement patterns that will obtain merge processing, obtain the overall picture on the surface of whole microballoon.
The spherical tank of the present invention on the tested microballoon face increased the area coverage of single measurement as the single sensing range.The application adopts the long laser beam of coherent length as detecting light beam, does not therefore need delayer in optical path.Directly obtain before detecting light beam by single-mode fiber before reference beam, the instant fluctuation that is caused by vibration is present in reference beam and measuring beam simultaneously, thereby is eliminated in the interferometry process.Simultaneously, adopt two Amici prisms to realize instantaneous phase shift in conjunction with the wave plate array, obtain fast the multi-frame interferometry image, solved the reference surface precision not enough, the interference field contrast is low, is subjected to the factors such as air turbulence, ambient vibration to affect serious problem, has improved the antijamming capability of system, realize detecting without leak source of microballoon face, have advantages of detection efficiency high, without leak source, measuring accuracy is high, automaticity is high.Target spherical surface type accuracy of detection RMS value is better than 50nm.Single measurement can only be measured the spherical crown zone of the corresponding certain cone angle of spherome surface, coordinates two-dimensional rotary scanning, has surveyed once to turn an angle, and can to cover spheroid entirely surperficial for measured zone like this, then Image Mosaics in addition, reaches the purpose of Range Extension.
The present invention is applicable to the measurement of the little spherular pattern of pair radius between 400 microns to 5 millimeters.
Description of drawings
Fig. 1 is one-piece construction schematic diagram of the present invention, Fig. 2 is that the interior A of dotted line scope is to view, Fig. 3 is the structural representation of the described wave plate array of embodiment four, and Fig. 4 is the principle schematic that the described measuring method of embodiment nine is measured whole microsphere surface pattern.
Embodiment
embodiment one: present embodiment is described below in conjunction with Fig. 1, the described instantaneous phase-shifting interference measuring instrument for the detection of microsphere surface pattern of present embodiment, it comprises laser instrument 1, spatial filter 2, the one λ/2 wave plates 3, the first polarization splitting prism 4, λ/4 wave plates 5, microcobjective 6, microballoon 7, the 2nd λ/2 wave plates 10, the second polarization splitting prism 11, fiber coupler 12, single-mode fiber 13, optical fiber collimator 14, the 3rd polarization splitting prism 15, plane mirror 16, the first Amici prism 17, the second Amici prism 18, wave plate array 19, polaroid 20, area array CCD 21, computing machine 22,
spatial filter 2, the one λ/2 wave plates 3, the first polarization spectroscope 4, λ/4 wave plates 5, microcobjective 6 and microballoon 7 are successively set on the optical axis of laser beam of laser instrument 1 output, the laser beam of laser instrument 1 output converts parallel beam to and is incident to a λ/2 wave plates 3 after spatial filter 2 transmissions, light beam through a described λ/2 wave plate 3 transmissions is incident to the first polarization splitting prism 4, light beam after described the first polarization splitting prism 4 transmissions is incident to λ/4 wave plates 5, light beam after described λ/4 wave plate 5 transmissions is incident to microcobjective 6, the surface of microballoon 7 assembled the light beam of incident and be radiated at by described microcobjective 6, the centre of sphere of described microballoon 7 is positioned at the focal position of microcobjective 6,
reflected light through microballoon 7 surface reflections returns along original optical path, convert directional light to and be incident to λ/4 wave plates 5 after microcobjective 6 transmissions, be incident to the light splitting surface of the first polarization splitting prism 4 after described λ/4 wave plate 5 transmissions, be incident to the 2nd λ/2 wave plates 10 after this light splitting surface reflection, be incident to the light splitting surface of the second polarization splitting prism 11 after described the 2nd λ/2 wave plate 10 transmissions, light beam through this light splitting surface reflection is reference beam, this reference beam is incident to fiber coupler 12, be incident to single-mode fiber 13 after these fiber coupler 12 couplings, be incident to optical fiber collimator 14 through the filtered reference beam of this single-mode fiber 13, obtain parallel reference beam and be incident to the 3rd polarization splitting prism 15 as the first incident reference beam after these optical fiber collimator 14 collimations,
Light beam through the light splitting surface transmission of the second polarization splitting prism 11 is measuring beam, and this measuring beam is incident to the 3rd polarization splitting prism 15 as the second incident measuring beam;
the optical axis of the optical axis of described the first incident reference beam and the second incident measuring beam is perpendicular, the 3rd polarization splitting prism 15 forms a branch of light beam afterwards with the first incident reference beam and the merging of the second incident measuring beam of incident, this light beams is incident to the 3rd plane mirror 16, form the light beam parallel with the light splitting surface of the 4th polarization splitting prism 17 after the 3rd plane mirror 16 reflections, and be incident to described the 4th polarization splitting prism 17, described the 4th polarization splitting prism 17 is divided into two identical bundle parallel light emergence to the five polarization splitting prisms 18 of light intensity with the light beam of incident, described the 5th polarization splitting prism 18 is with two bundle directional light light splitting respectively of incident, form the parallel beam that four bundle light intensity equate, the parallel beam that described four bundle light intensity equate is incident to wave plate array 19 simultaneously, four light beams of 19 pairs of incidents of described wave plate array add respectively 0, pi/2, π, the amount of phase shift of 3 pi/2s, four light beams through described wave plate array 19 transmissions are incident to polaroid 20 simultaneously, produce coherent light after described polaroid 20 analyzings, described coherent light is incident to the photosurface of area array CCD optical sensor 21, form simultaneously four width interference fringe patterns on area array CCD optical sensor 21, the electric image signal output terminal of area array CCD optical sensor 21 connects the picture signal collection terminal of computing machine 22.
Embodiment two: the further restriction of present embodiment to the described instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern of embodiment one, in present embodiment, the wavelength of the laser beam of described laser instrument 1 emission is 523nm, coherent length is between 50m to 60m, output power is greater than 0 and less than 300mw, and is adjustable continuously.
Embodiment three: the further restriction of present embodiment to the described instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern of embodiment one or two, the described microcobjective 6 of present embodiment is 20 times of enlarging objectives, the numerical aperture 0.4 of these object lens.
Embodiment four: present embodiment is described in conjunction with Fig. 3, the further restriction of present embodiment to embodiment one, the two or three described instantaneous phase-shifting interference measuring instrument that detect for the microsphere surface pattern, the described wave plate array 19 of present embodiment is 2 * 2 wave plate array, by clockwise order be respectively 0, pi/2, π, the poor polarization wave plate of 3 pi/2 phases.
Embodiment five: present embodiment is described in conjunction with Fig. 1, the further restriction of present embodiment to embodiment one, two, the three or four described instantaneous phase-shifting interference measuring instrument that detect for the microsphere surface pattern, the described area array CCD optical sensor 21 of present embodiment is that resolution is 2048 * 2048, unit is 7 microns mutually.
For example: can select the model that German AVT company produces is the CCD optical sensor of F421B.
Embodiment six: the further restriction of present embodiment to the described instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern of embodiment one, also comprise the axial turntable 8 of negative-pressure adsorption and two-dimensional quadrature turntable 9 in present embodiment, the axial turntable 8 of negative-pressure adsorption is used for adsorbing tested microballoon 7, the axial turntable 8 of negative-pressure adsorption is fixed on the turntable of two-dimensional quadrature turntable 9, and the turntable control signal input end of the axial turntable 8 of negative-pressure adsorption connects the absorption turntable control signal output terminal of computing machine; The control signal output terminal of two-dimensional quadrature turntable 9 connects the horizontal turntable control signal output terminal of computing machine.
Embodiment seven: in conjunction with Fig. 1, present embodiment is described, present embodiment is to adopt embodiment one to the five instantaneous phase-shifting interference measuring instrument of the described employing of any one embodiment to realize the measuring method of microsphere surface pattern,
Step 1, laser instrument 1 Emission Lasers bundle, this laser beam converts parallel beam to and is incident to a λ/2 wave plates 3 after spatial filter 2 transmissions, light beam through a described λ/2 wave plate 3 transmissions is incident to the first polarization splitting prism 4, light beam after described the first polarization splitting prism 4 transmissions is incident to λ/4 wave plates 5, light beam after described λ/4 wave plate 5 transmissions is incident to microcobjective 6, and the surface of microballoon 7 assembled the light beam of incident and be radiated at by described microcobjective 6;
Step 2, area array CCD optical sensor 21 will gather the four width interference fringe patterns that obtain and send to computing machine 22,22 pairs of these four width interference fringe patterns of described computing machine carry out image to be processed, obtain the positioning relation between this four width interference fringe pattern, thereby calculate measurement light corresponding to interior each pixel of interference field and the initial phase difference between reference light, and then solve optical path difference between the two, finally obtain microballoon 7 surfaces by the pattern in laser beam irradiation zone.
Embodiment eight: present embodiment is that the instantaneous phase-shifting interference measuring instrument of the described employing of present embodiment is realized the measuring method of microsphere surface pattern to the further illustrating of embodiment seven, and the detailed process of step 2 is:
22 pairs of these four width interference fringe patterns of computing machine carry out image to be processed, and the process of obtaining the positioning relation between this four width interference fringe image is:
Steps A, for every width interference fringe pattern, at first interference region and background separation are opened, obtain four interference region images, then carry out image filtering, Denoising disposal, obtain the interference region image after four width are processed;
Step B, position fixing process, extract the centre of form coordinate of the interference region of the interference region image after every width is processed, what the pixel of described four centre of form coordinates was corresponding is same measurement point, the like determine the pixel of respective coordinates in the interference region image of each measurement point after four width are processed to obtain the positioning relation between four width interference fringe images;
Calculate measurement light that in interference field, each pixel is corresponding and the process of the initial phase difference between reference light is according to above-mentioned positioning relation:
Calculate measurement light that in interference region, each pixel is corresponding and the initial phase difference between reference light according to the positioning relation between four width interference fringe images, detailed process is: obtain respectively corresponding pixel in its interference region image after four width are processed for same measurement point, then the gray-scale value with described four pixels is brought in four step phase-shifting method computing formula
In formula, the coordinate of the pixel that the described measurement point of (x, y) expression is corresponding, I
1, I
2, I
3And I
4The gray-scale value that represents respectively four pixels;
Calculate and obtain initial phase difference corresponding to described measurement point;
All adopt said method to obtain the initial phase difference of corresponding correspondence for each measurement point;
According to the initial phase difference of above-mentioned acquisition, solving between the two, the process of optical path difference is:
The initial phase difference corresponding according to each measurement point obtains corresponding optical path difference:
In formula, λ represents the wavelength of penetrating laser beam of 1 of laser instrument;
Final microballoon 7 surfaces of obtaining by the process of the pattern in laser beam irradiation zone are:
Will be according to formula:
Obtain the distance that all measurement points depart from ideal spherical face, namely obtain the relative coordinate of each measurement point, draw according to the relative coordinate of all measurement points and obtain microballoon 7 surfaces by the pattern in laser beam irradiation zone, described ideal spherical face be the centre of sphere take microballoon 7 as the centre of sphere, the sphere take the radius of microballoon 7 as radius.
Embodiment nine: present embodiment is to adopt the instantaneous phase-shifting interference measuring instrument of the described employing of embodiment six to realize the measuring method of microsphere surface pattern,
Step 1, control two-dimensional quadrature turntable 9 rotate, and make the rotating shaft of the axial turntable 8 of negative-pressure adsorption vertical with the optical axis of measuring light;
Step 2, the microballoon 7 of measuring is adsorbed on the suction nozzle of the axial turntable 8 of negative-pressure adsorption, makes the centre of sphere of microballoon 7 be positioned at the focal position of microcobjective 6;
Step 3, open laser instrument 1, measure microballoon 7 surfaces by the single measurement pattern in laser beam irradiation zone;
Step 4, computing machine 22 are controlled the axial turntable 8 of negative-pressure adsorption and are driven microballoon according to clockwise rotating angle a, and repeating step 3 obtains corresponding single measurement pattern; And then control the axial turntable 8 drive microballoons of negative-pressure adsorption according to clockwise rotating angle a, repeating step 3 is until microballoon rotates a circle;
Step 5, computing machine 22 are controlled the two-dimensional quadrature turntable 9 axial turntables 8 of drive negative-pressure adsorption and are moved, and make microballoon 7 along the rotating shaft displacement b of the axial turntable 8 of negative-pressure adsorption, then repeating step 3 and 4; And then control two-dimensional quadrature turntable 9 and drive the axial turntables 8 of negative-pressure adsorption and move, make microballoon 7 along former direction displacement b, repeating step 3 and 4 is until microballoon 7 shifts out the laser beam irradiation zone;
Step 6, with microballoon take perpendicular to the plane of axial turntable 8 rotating shafts of negative-pressure adsorption as minute surface, carry out mirror image switch, then return to step 2;
Step 7, all one-sided measurement patterns that will obtain merge processing, obtain the overall picture on the surface of whole microballoon 7.
In present embodiment, the measuring method that step 3 adopts embodiment seven to put down in writing realizes one-sided measurement pattern.
Rotational angle a described in step 4 is decided by the size in laser beam irradiation zone according to microballoon 7 surfaces, make between 2 that the edges of regions of adjacent twice single measurement intersects air line distance d more than or equal to the microballoon radius both can, optimum distance is to equal the microballoon radius.
Displacement b described in step 5 is associated with rotational angle a, displacement b be less than or equal to air line distance d both can, optimum distance is to equal air line distance d.
The described measuring method of present embodiment is the measuring method that adopts the whole sphere pattern of the tiny spherical surface that instantaneous phase-shifting interference measuring instrument that embodiment six is put down in writing realizes.
Use the present invention to interfere the survey instrument to realize tiny spherical surface pattern high precision, high-level efficiency, detected without leak source.
Principle of work:
The linearly polarized laser bundle of laser instrument 1 outgoing forms the linear polarization directional light after spatial filter 2 filtering expand, transmission through polarization splitting prism 4, converges to tested microsphere surface through object lens 6 after λ/2 wave plates 3 are adjusted the polarization direction.The convergence center of light beam overlaps with the centre of sphere of microballoon, light beam is equivalent to vertical measured surface incident, therefore will return along original optical path, but due to twice process λ/4 wave plate 5, the polarization direction has rotated 90 °, reflection fully, incide polarization splitting prism 11 through λ/2 wave plates 10 on the light splitting surface of polarization splitting prism 4, is divided into two bundles on its light splitting surface, a branch of Amici prism 11 that directly transmits, as measuring light, a branch of Amici prism 11 that reflects is as reference light.Measure light and be directly incident on polarization spectroscope 15, transmission is through its light splitting surface.Reference light enters single-mode fiber 13 through fiber coupler 12 couplings.Because the fibre core of single-mode fiber is very thin, self just has good filter action, utilize simultaneously the bending loses characteristic of optical fiber, just eliminate the space wavefront distortion, be collimated into the parallel beam of approximate ideal through optical fiber collimator 14, in light splitting surface place's reflection of polarization splitting prism 15, with the measurement combiner, but the polarization direction of two-beam is perpendicular.
Close the light beam incident Amici prism 17 after plane mirror 16 reflections after bundle.Because the incident direction of light beam is parallel with the light splitting surface of Amici prism 17, light beam is divided into two identical bundle parallel light emergences of light intensity.The spacing of parallel beam is by the incidence point determining positions on Amici prism 17.in like manner, two bundle directional lights of outgoing are through Amici prism 18 light splitting, form the parallel beam that four bundle light intensity equate, add different amount of phase shift through 19 pairs four bundle light of wave plate array, again through polaroid 20 analyzings, produce coherent light, form simultaneously four width interference fringe patterns on area array CCD 21, obtained by the CCD21 single acquisition, and obtain positioning relation between four width interference fringe images by the method that image is processed, thereby calculate measurement light corresponding to interior each pixel of interference field and the initial phase difference between reference light, and then solve optical path difference between the two, realize that pattern detects.
Because reference wavefront directly obtains by detecting wavefront by single-mode fiber, the instant fluctuation that is caused by vibration is present in simultaneously reference wave and measures in ripple, thereby is eliminated in the interferometry process.Simultaneously, adopt two Amici prisms to realize instantaneous phase shift in conjunction with the wave plate array, obtain fast the multi-frame interferometry image, significantly reduce the Phase-shifting Errors that the factors such as air turbulence, vibration are introduced, improved the antijamming capability of measuring system.
Claims (9)
1. be used for the instantaneous phase-shifting interference measuring instrument that the microsphere surface pattern detects, it is characterized in that: it comprises laser instrument (1), spatial filter (2), the one λ/2 wave plates (3), the first polarization splitting prism (4), λ/4 wave plates (5), microcobjective (6), microballoon (7), the 2nd λ/2 wave plates (10), the second polarization splitting prism (11), fiber coupler (12), single-mode fiber (13), optical fiber collimator (14), the 3rd polarization splitting prism (15), plane mirror (16), the first Amici prism (17), the second Amici prism (18), wave plate array (19), polaroid (20), area array CCD (21), computing machine (22),
spatial filter (2), the one λ/2 wave plates (3), the first polarization spectroscope (4), λ/4 wave plates (5), microcobjective (6) and microballoon (7) are successively set on the optical axis of laser beam of laser instrument (1) output, the laser beam of laser instrument (1) output converts parallel beam to and is incident to a λ/2 wave plates (3) after spatial filter (2) transmission, light beam through a described λ/2 wave plates (3) transmission is incident to the first polarization splitting prism (4), light beam after described the first polarization splitting prism (4) transmission is incident to λ/4 wave plates (5), light beam after described λ/4 wave plates (5) transmission is incident to microcobjective (6), the surface of microballoon (7) assembled the light beam of incident and be radiated at by described microcobjective (6), the centre of sphere of described microballoon (7) is positioned at the focal position of microcobjective (6),
reflected light through microballoon (7) surface reflection returns along original optical path, convert directional light to and be incident to λ/4 wave plates (5) after microcobjective (6) transmission, be incident to the light splitting surface of the first polarization splitting prism (4) after described λ/4 wave plates (5) transmission, be incident to the 2nd λ/2 wave plates (10) after this light splitting surface reflection, be incident to the light splitting surface of the second polarization splitting prism (11) after described the 2nd λ/2 wave plates (10) transmission, light beam through this light splitting surface reflection is reference beam, this reference beam is incident to fiber coupler (12), be incident to single-mode fiber (13) after this fiber coupler (12) coupling, be incident to optical fiber collimator (14) through the filtered reference beam of this single-mode fiber (13), obtain parallel reference beam and be incident to the 3rd polarization splitting prism (15) as the first incident reference beam after this optical fiber collimator (14) collimation,
Light beam through the light splitting surface transmission of the second polarization splitting prism (11) is measuring beam, and this measuring beam is incident to the 3rd polarization splitting prism (15) as the second incident measuring beam;
the optical axis of the optical axis of described the first incident reference beam and the second incident measuring beam is perpendicular, the 3rd polarization splitting prism (15) forms a branch of light beam afterwards with the first incident reference beam and the merging of the second incident measuring beam of incident, this light beams is incident to the 3rd plane mirror (16), form the light beam parallel with the light splitting surface of the 4th polarization splitting prism (17) after the 3rd plane mirror (16) reflection, and be incident to described the 4th polarization splitting prism (17), described the 4th polarization splitting prism (17) is divided into two identical bundle parallel light emergence to the five polarization splitting prisms (18) of light intensity with the light beam of incident, described the 5th polarization splitting prism (18) is with two bundle directional light light splitting respectively of incident, form the parallel beam that four bundle light intensity equate, the parallel beam that described four bundle light intensity equate is incident to wave plate array (19) simultaneously, described wave plate array (19) adds respectively 0 to four light beams of incident, pi/2, π, the amount of phase shift of 3 pi/2s, four light beams through described wave plate array (19) transmission are incident to polaroid (20) simultaneously, produce coherent light after described polaroid (20) analyzing, described coherent light is incident to the photosurface of area array CCD optical sensor (21), form simultaneously four width interference fringe patterns on area array CCD optical sensor (21), the electric image signal output terminal of area array CCD optical sensor (21) connects the picture signal collection terminal of computing machine (22).
2. the instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern according to claim 1, it is characterized in that: laser instrument (1) shoot laser wavelength 523nm, coherent length is between 50m to 60m, and output power is greater than 0 and less than 300mw, and is adjustable continuously.
3. the instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern according to claim 1, it is characterized in that: microcobjective (6) is selected 20 times of enlarging objectives, the numerical aperture 0.4 of these object lens.
4. the instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern according to claim 1, it is characterized in that: described wave plate array (19) is 2 * 2 wave plate array, by clockwise order be respectively 0, pi/2, π, the poor polarization wave plate of 3 pi/2 phases.
5. the instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern according to claim 1, it is characterized in that: described area array CCD optical sensor (21) is that resolution is 2048 * 2048, unit is 7 microns mutually.
6. the described instantaneous phase-shifting interference measuring instrument that detects for the microsphere surface pattern of according to claim 1 to 5 any one claim, it is characterized in that: it also comprises the axial turntable of negative-pressure adsorption (8) and two-dimensional quadrature turntable (9), the axial turntable of negative-pressure adsorption (8) is used for adsorbing tested microballoon (7), the axial turntable of negative-pressure adsorption (8) is fixed on the turntable of two-dimensional quadrature turntable (9), and the turntable control signal input end of the axial turntable of negative-pressure adsorption (8) connects the absorption turntable control signal output terminal of computing machine; The control signal output terminal of two-dimensional quadrature turntable (9) connects the horizontal turntable control signal output terminal of computing machine.
7. adopt the instantaneous phase-shifting interference measuring instrument of the described employing of claim 1 to realize the measuring method of microsphere surface pattern, it is characterized in that: described measuring method comprises the steps:
Step 1, laser instrument (1) Emission Lasers bundle, this laser beam converts parallel beam to and is incident to a λ/2 wave plates (3) after spatial filter (2) transmission, light beam through a described λ/2 wave plates (3) transmission is incident to the first polarization splitting prism (4), light beam after described the first polarization splitting prism (4) transmission is incident to λ/4 wave plates (5), light beam after described λ/4 wave plates (5) transmission is incident to microcobjective (6), and the surface of microballoon (7) assembled the light beam of incident and be radiated at by described microcobjective (6);
Step 2, area array CCD optical sensor (21) will gather the four width interference fringe patterns that obtain and send to computing machine (22), described computing machine (22) carries out image to this four width interference fringe pattern to be processed, obtain the positioning relation between this four width interference fringe pattern, thereby calculate measurement light corresponding to interior each pixel of interference field and the initial phase difference between reference light, and then solve optical path difference between the two, finally obtain microballoon (7) surperficial by the pattern in laser beam irradiation zone.
8. adopt according to claim 7 instantaneous phase-shifting interference measuring instrument to realize the measuring method of microsphere surface pattern, it is characterized in that: the detailed process of step 2 is:
Computing machine (22) carries out image to this four width interference fringe pattern to be processed, and the process of obtaining the positioning relation between this four width interference fringe image is:
Steps A, for every width interference fringe pattern, at first interference region and background separation are opened, obtain four interference region images, then carry out image filtering, Denoising disposal, obtain the interference region image after four width are processed;
Step B, position fixing process, extract the centre of form coordinate of the interference region of the interference region image after every width is processed, what the pixel of described four centre of form coordinates was corresponding is same measurement point, the like determine the pixel of respective coordinates in the interference region image of each measurement point after four width are processed to obtain the positioning relation between four width interference fringe images;
Calculate measurement light that in interference field, each pixel is corresponding and the process of the initial phase difference between reference light is according to above-mentioned positioning relation:
Calculate measurement light that in interference region, each pixel is corresponding and the initial phase difference between reference light according to the positioning relation between four width interference fringe images, detailed process is: obtain respectively corresponding pixel in its interference region image after four width are processed for same measurement point, then the gray-scale value with described four pixels is brought in four step phase-shifting method computing formula
In formula, the coordinate of the pixel that the described measurement point of (x, y) expression is corresponding, I
1, I
2, I
3And I
4The gray-scale value that represents respectively four pixels;
Calculate and obtain initial phase difference corresponding to described measurement point;
All adopt said method to obtain the initial phase difference of corresponding correspondence for each measurement point;
According to the initial phase difference of above-mentioned acquisition, solving between the two, the process of optical path difference is:
The initial phase difference corresponding according to each measurement point obtains corresponding optical path difference:
In formula, λ represents the wavelength of penetrating laser beam that laser instrument (1) is sent out;
Final microballoon (7) surface of obtaining by the process of the pattern in laser beam irradiation zone is:
Will be according to formula:
Obtain the distance that all measurement points depart from ideal spherical face, namely obtain the relative coordinate of each measurement point, draw acquisition microballoon (7) according to the relative coordinate of all measurement points surperficial by the pattern in laser beam irradiation zone, described ideal spherical face be the centre of sphere take microballoon (7) as the centre of sphere, the sphere take the radius of microballoon (7) as radius.
9. adopt the instantaneous phase-shifting interference measuring instrument of the described employing of claim 6 to realize the measuring method of microsphere surface pattern, it is characterized in that: described measuring method is:
Step 1, control two-dimensional quadrature turntable (9) rotate, and make the rotating shaft of the axial turntable of negative-pressure adsorption (8) vertical with the optical axis of measuring light;
Step 2, the microballoon (7) of measuring is adsorbed on the suction nozzle of the axial turntable of negative-pressure adsorption (8), makes the centre of sphere of microballoon (7) be positioned at the focal position of microcobjective (6);
Step 3, open laser instrument (1), measure microballoon (7) surface by the single measurement pattern in laser beam irradiation zone;
Step 4, computing machine (22) are controlled the axial turntable of negative-pressure adsorption (8) and are driven microballoon according to clockwise rotating angle a, and repeating step 3 obtains corresponding single measurement pattern; And then control the axial turntable of negative-pressure adsorption (8) drive microballoon according to clockwise rotating angle a, repeating step 3 is until microballoon rotates a circle;
Step 5, computing machine (22) are controlled two-dimensional quadrature turntable (9) the drive axial turntable of negative-pressure adsorption (8) and are moved, and make microballoon (7) along the rotating shaft displacement b of the axial turntable of negative-pressure adsorption (8), then repeating step 3 and 4; And then controlling two-dimensional quadrature turntable (9), to drive the axial turntable of negative-pressure adsorption (8) mobile, makes microballoon (7) along former direction displacement b, and repeating step 3 and 4 is until microballoon (7) shifts out the laser beam irradiation zone;
Step 6, with microballoon take perpendicular to the plane of the axial turntable of negative-pressure adsorption (8) rotating shaft as minute surface, carry out mirror image switch, then return to step 2;
Step 7, all one-sided measurement patterns that will obtain merge processing, obtain the overall picture on the surface of whole microballoon (7).
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