CN101691998B - Two-dimensional laser autocollimator - Google Patents
Two-dimensional laser autocollimator Download PDFInfo
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- CN101691998B CN101691998B CN200910197306XA CN200910197306A CN101691998B CN 101691998 B CN101691998 B CN 101691998B CN 200910197306X A CN200910197306X A CN 200910197306XA CN 200910197306 A CN200910197306 A CN 200910197306A CN 101691998 B CN101691998 B CN 101691998B
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Abstract
The invention relates to a two-dimensional laser autocollimator. The autocollimator comprises a generation device of left-hand and right-hand circular polarized light with reticule information on a horizontal optical axis, as well as a first common beam splitter prism, a collimating object lens and a target reflector which are sequentially arranged in the horizontal optical axis direction and the advance direction of a 'cross' light beam, wherein the generation device generates the left-hand and right-hand circular polarized light with the reticule information to form centrosymmetric 'cross' light beam output; the beam-splitting plane of the first common beam splitter prism is in a 45-degree included angle with the horizontal optical axis; a first lambda/4 wave plate, a first polarization splitting prism and a horizontal linear array CCD are sequentially arranged on one side of the first common beam splitter prism; and a vertical linear array CCD is arranged in the reflected light direction of the first polarization splitting prism. The two-dimensional laser autocollimator has the characteristics of high measuring precision, large measuring range and capacity of static or dynamic measurement.
Description
Technical field
The present invention relates to the precision measurement gauging instrument, particularly a kind of two-dimensional laser autocollimator.In the detection of inertial navigation testing apparatuss such as the present invention can be applicable to that ray machine is debug, the roughness measurement of the flatness measurement of prism angle calibration, guide rail, table top, precise rotating platform and other metrology and measurement, the scientific research.
Background technology
Autocollimator is a kind of important optical precision angle measuring instrument, has in fields such as machine-building, shipbuilding, Aero-Space, metrology and measurement, scientific researches widely to use.(as CCD, PSD or QAPD etc.) are applied to the autocollimator system with the novel photoelectric-detection device, constitute photoelectric auto-collimator, have overcome the artificial reading of traditional autocollimator and have followed the tracks of the error of zero, have improved the measuring accuracy of system and the convenience of use greatly.The ultimate principle of photoelectric auto-collimator changes the line quantitative changeization that converts picture on the detector to the angle of catoptron (or reflecting prism) exactly, converses the angle variable quantity value by measuring outlet quantitative change value.At present, the scheme of 2 D photoelectric autocollimator relates to different graticules and image detector combination, and relative merits are respectively arranged.
Existing two-dimensional photoelectric auto-collimator scheme has following several:
One of prior art scheme is (referring to Zou Jiugui etc., " development of high-precision two-dimensional autocollimator ", instrumentation technology, Vol.26, p19,2006), be the 2 D photoelectric autocollimator that adopts cross slit graticule and area array CCD, similarly scheme adopts the circle hole shape graticule in addition.Because the packaging technology problem of area array CCD, the physical size of CCD can be very not big, so the visual field is limited, has limited the range of photoelectric auto-collimator.In addition, area array CCD because pixel is more, and picture signal is point by point scanning output, so frame frequency is restricted, and influences the measuring speed of photoelectric auto-collimator.
Two (referring to Zhang Jiyou etc., based on the dynamic photoelectric self-collimater of PSD: China, 200610011788.1[P] .2006-09-13) of prior art scheme are to utilize laser to do light source, utilize the 2 D photoelectric autocollimator of PSD as the hot spot detector.PSD has the fast characteristics of response speed, but the same detection viewing field of PSD is little, and response has non-linearly, for obtaining higher measuring accuracy, also needs PSD is done nonlinear compensation.In addition, though LASER Light Source has the brightness height, the propagation meeting in optical system of the characteristics that collimation is good, laser beam influences the measuring accuracy of system because of the faint reflection of optical element surface causes the formation of parasitic interference effect and ghost image.
Three (referring to Lin Yuchi etc., photoelectric auto-collimator: China, 99254139.5[P] .2000-09-27) of prior art scheme are the 2 D photoelectric autocollimators that adopts alpha type graticule (V, N, M etc.) and the realization of a slice line array CCD.The shortcoming of this scheme is that diaxon measurement range and precision are inconsistent, and the angle that diaxon is measured has certain relevance.
The prior art scheme four (referring to Liu Yong, twin-line array CCD photoelectric auto-collimation systematic research [D]. Xi'an University of Technology's Master of engineering academic dissertation, 2005), mention a kind of 2 D photoelectric autocollimator that adopts the line array CCD realization of cross slit graticule and two quadrature placements in the literary composition.When line array CCD is placed on the optical centre detection, the phenomenon of zero-bit blind area can occur measuring, as shown in Figure 1,1A is horizontal line array CCD; 2A is the picture of cross slit graticule; 3A is vertical linear array CCD; 4A is the picture of the cross slit graticule after moving.This moment, the directions X groove was positioned at zero-bit, and parallel with it line array CCD is fully illuminated, and the displacement x of Y direction groove this moment on this CCD detects not come out, and autocollimator can't operate as normal, shown in Fig. 1 (a).Equally, also there is the zero-bit blind area in directions X, shown in Fig. 1 (b).Mention a kind of solution of compromise in the paper, with the line array CCD layout at the Amici prism edge, the effect of this optics splicing.Be illustrated in fig. 2 shown below, 1B is the cross Fil-Lumiere; 2B, 5B are that X is to CCD; 3B, 4B are that Y is to CCD; , figure (a) is the situation that above-mentioned line array CCD is placed on the Amici prism center, this situation exists measures the zero-bit blind area.Figure (b) is placed on the effect at Amici prism edge for line array CCD.Because the picture of cross slit can be not oversize, the sensitization pixel of CCD can not all utilize, and in fact effective range is restricted.In addition, because the linearity of optical system axle far away light is inferior to paraxial light, so measuring accuracy and the linearity all descend.
The prior art scheme five (referring to Su Li, photoelectric auto-collimation small angle measurement system design [D]. Xi'an University of Technology's Master of engineering academic dissertation, 2007), be to adopt the cylindrical lens development method that round dot is looked like to convert to two mutually orthogonal wire pictures, survey respectively with two line array CCDs then, realize the 2 D photoelectric autocollimator.This scheme has effectively overcome the measurement blind area, but shortcoming is the imaging optical path complex structure, and measuring accuracy is influenced.
Six (referring to Xu Peng etc., twin shaft photoelectric auto-collimator: China, 200720096058.6[P] .2008-04-23) of prior art scheme are to adopt two semiconductor light sources and two 2 D photoelectric autocollimators that line array CCD is realized.This scheme is modulated light source, obtains picture signal through the line array CCD demodulation again.One side modulation-demodulation circuit complexity, measuring speed is restricted on the other hand.In addition, still there are scheme four described measurement blind zone problems in this scheme.
The development trend of 2 D photoelectric autocollimator is to satisfy the requirement of wide range and kinetic measurement simultaneously.With regard to present technical development, line array CCD has the visual field greater than area array CCD, thereby it is bigger to measure range, is wide range 2 D photoelectric autocollimator Scheme Selection.As all having adopted line array CCD in the existing such scheme three, four, five, six.But they can not meet the demands in measuring accuracy, measuring speed, diaxon measuring accuracy consistance with above measuring the overcoming of blind area comprehensively simultaneously.
Summary of the invention
The objective of the invention is to satisfy simultaneously that measurement range is big, measuring accuracy is high and the defective of the requirement of kinetic measurement at above-mentioned existing 2 D photoelectric autocollimator, propose a kind of two-dimensional laser autocollimator, this instrument can satisfy simultaneously that measurement range is big, measuring accuracy is higher and measuring speed requirement faster.
Technical solution of the present invention is as follows:
A kind of two-dimensional laser autocollimator, characteristics are that its formation is included in the generation device of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation are combined to form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective and target mirror, the beam-splitting surface of the described first common Amici prism and horizontal optical axis angle at 45, side at the described first common Amici prism, vertical with described horizontal optical axis and through light beam that target mirror returns through described collimator objective enter described common Amici prism (after the light beam working direction of reflection output set gradually a λ/4 wave plates, first polarization splitting prism, horizontal line array CCD is vertical linear array CCD in the reflected light direction of described first polarization splitting prism.
The formation of the generation device of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser, output beam direction along this first semiconductor laser is horizontal graticule, second polarization splitting prism and the 2nd λ/4 wave plates successively, the beam-splitting surface of described second polarization splitting prism becomes 135 ° with described horizontal optical axis, at a side of the described second polarization splitting prism vertical graticule and second semiconductor laser of being disposed with near and far.
The formation of the generation device of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser, output beam direction along this first semiconductor laser is the second common Amici prism successively, horizontal graticule, second polarization splitting prism and the 2nd λ/4 wave plates, the beam-splitting surface of the described second common Amici prism and described horizontal optical axis angle at 45, the beam-splitting surface of described second polarization splitting prism becomes 135 ° with described horizontal optical axis, set gradually vertical graticule in that a side of described second polarization splitting prism is near and far, λ/2 wave plates and the 3rd catoptron, at the described second common Amici prism reflected light outbound course second catoptron is set, makes by the described second common Amici prism reflection output light through described second catoptron, the 3rd catoptron, λ/2 wave plates enter described second polarization splitting prism with vertical graticule.
The formation of the generation device of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser, output beam direction along this first semiconductor laser is the 3rd λ/4 wave plates, horizontal graticule and the 3rd common Amici prism successively, the beam-splitting surface of described the 3rd common Amici prism becomes 135 ° with described horizontal optical axis, at a side of the 3rd common Amici prism vertical graticule, the 4th λ/4 wave plates and second semiconductor laser of setting gradually near and far.
The formation of the generation device of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser, output beam direction along this first semiconductor laser is the second common Amici prism successively, the 3rd λ/4 wave plates, horizontal graticule and the 3rd common Amici prism, the beam-splitting surface of the described second common Amici prism and described horizontal optical axis angle at 45, the beam-splitting surface of described the 3rd common Amici prism becomes 135 ° with described horizontal optical axis, set gradually vertical graticule in that a side of the 3rd common Amici prism is near and far, the 4th λ/4 wave plates, λ/2 wave plates and the 3rd catoptron, at the described second common Amici prism reflected light outbound course second catoptron is set, makes by the described second common Amici prism reflection output light through described second catoptron, the 3rd catoptron, λ/2 wave plates, the 4th λ/4 wave plates enter described second polarization splitting prism with vertical graticule.
Described line array CCD can adopt the double channel line array CCD, in order to improve measuring speed.
Described semiconductor laser can be realized the high speed kinetic measurement to its synchronous modulation.
The present invention makes full use of the polarization characteristic of laser, makes the bidimensional measuring beam work alone separately, does not disturb mutually.Its ultimate principle is to make the measuring beam of bidimensional illumination graticule become mutually orthogonal left and right rounding polarized light earlier, before target mirror reflected back detector, they are become mutually orthogonal linearly polarized light, again with it separately and image on each self-corresponding line array CCD with polarization splitting prism.Like this, both overcome the measurement blind area, guaranteed again that the diaxon measurement was unrelated, diaxon measuring accuracy unanimity.
Compare with existing 2 D photoelectric autocollimator scheme, two-dimensional laser autocollimator of the present invention has following advantage:
1. the present invention utilizes the polarization characteristic of laser, on the one hand linearly polarized light is become circularly polarized light, overcome laser beam and propagated self interfering of light path the inside, utilize the orthogonality relation of two bundle measuring beam polarization states on the other hand, nature it is separated, both overcome the measurement blind area, and made it not disturb mutually, work alone separately again, guaranteed the unanimity of measuring accuracy.Have simple for structurely than existing scheme, do not influence simultaneously the advantage of measuring speed again.
2. two line array CCDs of the present invention's utilization can be realized two-dimensional phase range and measuring accuracy together.Adopt certain image algorithm of subdivision, can obtain very high measuring accuracy.The semiconductor laser that adopts, the characteristics of have the brightness height, easily modulating can realize flexibly that under the complicated applications environment illumination of system is mated.
3. the present invention has simultaneously that range is big, precision is high and fireballing function, helps to improve existing photoelectric auto-collimator performance comprehensively.
Description of drawings
Fig. 1 is the zero measurement blind area synoptic diagram of existing cross slit graticule
Fig. 2 is the synoptic diagram that concerns of existing twin-line array CCD optics splicing and cross groove
Fig. 3 is the basic structure synoptic diagram of two-dimensional laser autocollimator of the present invention
Fig. 4 is one of the generation device structural representation that has the left-handed and right-circularly polarized light of graticule information among the present invention
Fig. 5 be have among the present invention graticule information left-handed and right-circularly polarized light the generation device structural representation two
Fig. 6 be have among the present invention graticule information left-handed and right-circularly polarized light the generation device structural representation three
Fig. 7 be have among the present invention graticule information left-handed and right-circularly polarized light the generation device structural representation four
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 3 earlier, Fig. 3 is the basic structure synoptic diagram of two-dimensional laser autocollimator of the present invention, as seen from the figure, two-dimensional laser autocollimator of the present invention, its formation is included in the generation device 1 of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism 2 along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective 7 and target mirror 8, the beam-splitting surface of the described first common Amici prism 2 and horizontal optical axis angle at 45, side at the described first common Amici prism 2, set gradually a λ/4 wave plates 3 in light beam working direction vertical with described horizontal optical axis and that export through the reflection of light beam after described collimator objective 7 enters described common Amici prism 2 that target mirror 8 returns, first polarization splitting prism 4, horizontal linear array CCD5 is vertical linear array CCD6 in the reflected light direction of described first polarization splitting prism 4.
Described generation device 1 with left-handed and right-circularly polarized light of graticule information comprises following four kinds of structures:
Described generation device 1 with left-handed and right-circularly polarized light of graticule information constitutes as shown in Figure 4: comprise the first semiconductor laser A1, output beam direction along this first semiconductor laser A1 is horizontal graticule A3, the second polarization splitting prism A5 and the 2nd λ/4 wave plate A6 successively, the beam-splitting surface of the described second polarization splitting prism A5 becomes 135 ° with described horizontal optical axis, at the side of the described second polarization splitting prism A5 vertical graticule A4 and second semiconductor laser (A2) of being disposed with near and far.
The formation of the generation device 1 of described left-handed and right-circularly polarized light with graticule information as shown in Figure 5, comprise the first semiconductor laser A1, output beam direction along this first semiconductor laser A1 is the second common Amici prism B1 successively, horizontal graticule A3, the second polarization splitting prism A5 and the 2nd λ/4 wave plate A6, the beam-splitting surface of the described second common Amici prism B1 and described horizontal optical axis angle at 45, the beam-splitting surface of the described second polarization splitting prism A5 becomes 135 ° with described horizontal optical axis, set gradually vertical graticule A4 in that the side of the described second polarization splitting prism A5 is near and far, λ/2 wave plate B4 and the 3rd catoptron B3, at the described second common Amici prism B1 reflected light outbound course the second catoptron B2 is set, makes by the described second common Amici prism B1 reflection output light through the described second catoptron B2, the 3rd catoptron B3, λ/2 wave plate B4 enter the described second polarization splitting prism A5 with vertical graticule A4.
The formation of the generation device 1 of described left-handed and right-circularly polarized light with graticule information as shown in Figure 6, comprise the first semiconductor laser A1, output beam direction along this first semiconductor laser A1 is the 3rd λ/4 wave plate C1, horizontal graticule A3 and the 3rd common Amici prism C3 successively, the beam-splitting surface of the described the 3rd common Amici prism C3 becomes 135 ° with described horizontal optical axis, at the side of the 3rd common Amici prism C3 vertical graticule A4, the 4th λ/4 wave plate C2 and the second semiconductor laser A2 of setting gradually near and far.
The formation of the generation device 1 of described left-handed and right-circularly polarized light with graticule information as shown in Figure 7, comprise the first semiconductor laser A1, output beam direction along this first semiconductor laser A1 is the second common Amici prism B1 successively, the 3rd λ/4 wave plate C1, horizontal graticule A3 and the 3rd common Amici prism C3, the beam-splitting surface of the described second common Amici prism B1 and described horizontal optical axis angle at 45, the beam-splitting surface of the described the 3rd common Amici prism C3 becomes 135 ° with described horizontal optical axis, set gradually vertical graticule A4 in that the side of the 3rd common Amici prism C3 is near and far, the 4th λ/4 wave plate C2, λ/2 wave plate B4 and the 3rd catoptron B3, at the described second common Amici prism B1 reflected light outbound course the second catoptron B2 is set, makes by the described second common Amici prism B1 reflection output light through the described second catoptron B2, the 3rd catoptron B3, λ/2 wave plate B4, the 4th λ/4 wave plate C2 enter the described second polarization splitting prism A5 with vertical graticule A4.
The horizontal graticule A3 of the illuminated with laser light that the first semiconductor laser A1 sends, after seeing through the second polarization splitting prism A5, after becoming a left side (or right) rounding polarized light through the 2nd λ/4 wave plate A6, by the described first common Amici prism 2, shine on the target mirror 8 through collimator objective 7, back light through these target mirror 8 reflections passes through described collimator objective 7, the first common Amici prism 2, a λ/4 wave plates 3 and first polarization splitting prism 4, imaging on described horizontal linear array CCD5 successively.The described second semiconductor laser A2 illuminates described vertical graticule A4, after second polarization splitting prism A5 reflection, become the right side (or left side) rounding polarized light through the 2nd λ/4 wave plate A6, by the described first common Amici prism 2, shine on the target mirror 8 through collimator objective 7, back light through these target mirror 8 reflections passes through described collimator objective 7, common Amici prism 2, a λ/4 wave plates 3 and first polarization splitting prism 4, imaging on described vertical linear array CCD6 successively.The angle of target mirror 8 changes, and causes that the displacement of picture on the line array CCD changes.Can calculate the deflection angle of target mirror 8 by following formula:
θ＝Δx/2f
Wherein: the deflection angle of θ-target mirror 8
The focal length of f-collimator objective 7
The displacement of Δ x-picture on line array CCD
Because the suitable coupling setting of a λ/4 wave plates 3 and first polarization splitting prism 4, the two-way measuring beam does not disturb in light path mutually, works alone separately, has overcome the measurement blind area, has guaranteed the precision consistance of two-dimensional measurement and the consistance of speed.Its angle measurement range depends on the length of the focal length and the line array CCD 5,6 of collimator objective 7, and measuring accuracy depends on optical system resolution and image algorithm of subdivision precision, and measuring speed depends on the frame frequency of line array CCD and the time of Flame Image Process.
The present invention have graticule information left-handed and right-circularly polarized light generation device 1 structure two as shown in Figure 5 with Fig. 4 texture ratio, this structure has been saved a semiconductor laser, and has guaranteed the polarization direction quadrature of two bundle measuring beams with a slice λ/2 wave plates.
The generation device structure of the left-handed and right-circularly polarized light with graticule information of the present invention four as shown in Figure 7.This structure is to develop on three basis of structure.Semiconductor laser B in the structure three is replaced with the part beam split of semiconductor laser A, and guarantee the quadrature of bidimensional measuring beam polarization state with λ/2 wave plates.
Claims (4)
1. two-dimensional laser autocollimator, be characterised in that its formation is included in the generation device (1) of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation are combined to form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism (2) along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective (7) and target mirror (8), the beam-splitting surface of the described first common Amici prism (2) and horizontal optical axis angle at 45, side at the described first common Amici prism (2), set gradually a λ/4 wave plates (3) in light beam working direction vertical with described horizontal optical axis and that export through the reflection of light beam after described collimator objective (7) enters described common Amici prism (2) that target mirror (8) returns, first polarization splitting prism (4), horizontal line array CCD (5), reflected light direction at described first polarization splitting prism (4) is vertical linear array CCD (6), the formation of the generation device (1) of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser (A1), output beam direction along this first semiconductor laser (A1) is horizontal graticule (A3) successively, second polarization splitting prism (A5) and the 2nd λ/4 wave plates (A6), the beam-splitting surface of described second polarization splitting prism (A5) becomes 135 ° with described horizontal optical axis, at a side of described second polarization splitting prism (A5) vertical graticule (A4) and second semiconductor laser (A2) of being disposed with near and far.
2. two-dimensional laser autocollimator, be characterised in that its formation is included in the generation device (1) of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation are combined to form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism (2) along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective (7) and target mirror (8), the beam-splitting surface of the described first common Amici prism (2) and horizontal optical axis angle at 45, side at the described first common Amici prism (2), set gradually a λ/4 wave plates (3) in light beam working direction vertical with described horizontal optical axis and that export through the reflection of light beam after described collimator objective (7) enters described common Amici prism (2) that target mirror (8) returns, first polarization splitting prism (4), horizontal line array CCD (5), reflected light direction at described first polarization splitting prism (4) is vertical linear array CCD (6), the formation of the generation device (1) of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser (A1), output beam direction along this first semiconductor laser (A1) is the second common Amici prism (B1) successively, horizontal graticule (A3), second polarization splitting prism (A5) and the 2nd λ/4 wave plates (A6), the beam-splitting surface of the described second common Amici prism (B1) and described horizontal optical axis angle at 45, the beam-splitting surface of described second polarization splitting prism (A5) becomes 135 ° with described horizontal optical axis, at a side of described second polarization splitting prism (A5) the vertical graticule (A4) that sets gradually near and far, λ/2 wave plates (B4) and the 3rd catoptron (B3), at described second common Amici prism (B1) the reflected light outbound course second catoptron (B2) is set, makes by the described second common Amici prism (B1) reflection output light through described second catoptron (B2), the 3rd catoptron (B3), λ/2 wave plates (B4) enter described second polarization splitting prism (A5) with vertical graticule (A4).
3. two-dimensional laser autocollimator, be characterised in that its formation is included in the generation device (1) of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation are combined to form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism (2) along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective (7) and target mirror (8), the beam-splitting surface of the described first common Amici prism (2) and horizontal optical axis angle at 45, side at the described first common Amici prism (2), set gradually a λ/4 wave plates (3) in light beam working direction vertical with described horizontal optical axis and that export through the reflection of light beam after described collimator objective (7) enters described common Amici prism (2) that target mirror (8) returns, first polarization splitting prism (4), horizontal line array CCD (5), reflected light direction at described first polarization splitting prism (4) is vertical linear array CCD (6), the formation of the generation device (1) of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser (A1), output beam direction along this first semiconductor laser (A1) is the 3rd λ/4 wave plates (C1) successively, horizontal graticule (A3) and the 3rd common Amici prism (C3), the beam-splitting surface of the described the 3rd common Amici prism (C3) becomes 135 ° with described horizontal optical axis, at a side of the 3rd common Amici prism (C3) the vertical graticule (A4) that sets gradually near and far, the 4th λ/4 wave plates (C2) and second semiconductor laser (A2).
4. two-dimensional laser autocollimator, be characterised in that its formation is included in the generation device (1) of the left-handed and right-circularly polarized light with graticule information on the horizontal optical axis, the left circularly polarized light and the right-circularly polarized light that have graticule information with generation are combined to form the output of centrosymmetric " cross " light beam, set gradually the first common Amici prism (2) along described horizon light direction of principal axis and described " cross " light beam working direction, collimator objective (7) and target mirror (8), the beam-splitting surface of the described first common Amici prism (2) and horizontal optical axis angle at 45, side at the described first common Amici prism (2), set gradually a λ/4 wave plates (3) in light beam working direction vertical with described horizontal optical axis and that export through the reflection of light beam after described collimator objective (7) enters described common Amici prism (2) that target mirror (8) returns, first polarization splitting prism (4), horizontal line array CCD (5), reflected light direction at described first polarization splitting prism (4) is vertical linear array CCD (6), the formation of the generation device (1) of described left-handed and right-circularly polarized light with graticule information comprises first semiconductor laser (A1), output beam direction along this first semiconductor laser (A1) is the second common Amici prism (B1) successively, the 3rd λ/4 wave plates (C1), horizontal graticule (A3) and the 3rd common Amici prism (C3), the beam-splitting surface of the described second common Amici prism (B1) and described horizontal optical axis angle at 45, the beam-splitting surface of the described the 3rd common Amici prism (C3) becomes 135 ° with described horizontal optical axis, at a side of the 3rd common Amici prism (C3) the vertical graticule (A4) that sets gradually near and far, the 4th λ/4 wave plates (C2), λ/2 wave plates (B4) and the 3rd catoptron (B3), at described second common Amici prism (B1) the reflected light outbound course second catoptron (B2) is set, makes by the described second common Amici prism (B1) reflection output light through described second catoptron (B2), the 3rd catoptron (B3), λ/2 wave plates (B4), the 4th λ/4 wave plates (C2) enter described second polarization splitting prism (A5) with vertical graticule (A4).
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