CN109883362A - A kind of straight line degree measurement system based on grating interference principle - Google Patents
A kind of straight line degree measurement system based on grating interference principle Download PDFInfo
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Abstract
A kind of straight line degree measurement system based on grating interference principle, including semiconductor laser, the first polarization splitting prism, laser-Doppler interference unit and laser Michelson interference unit；First polarization splitting prism is located at the transmitting terminal of semiconductor laser so that light beam is divided into S-polarization component and P-polarization component；The laser-Doppler interference unit receives P-polarization component, measures linear line degree error for acquiring the interference signal that four road phase differences are 90 °；The laser Michelson interference unit receives S-polarization component, is 90 ° of interference signal for measurement angle straightness error for acquire four road phase differences.Present system not only possesses higher precision, also simplifies system structure and detection process, is capable of providing complete straightness information.
Description
Technical field
The present invention relates to the precision measurement method fields based on optical technology, especially a kind of former based on grating interference
The straight line degree measurement system of reason.
Background technique
Straightness error is divided into linear line degree error and angle straightness error, is that linear moving platform must obtain essence
One of the basic geometric tolerances of close measurement and strict control, and characterize the important geometric parameter of its performance.It is led in Precision Machining
Domain, the stability of linear moving platform, dynamic and precision are most important, they are the bases for improving production rate and reliability
Plinth.Inevitably there is straightness error at work in displacement platform, and in order to reach ideal compensation effect it may first have to there is one kind
In high precision, the error detection method of high-resolution and high stability.Therefore, a kind of design of complete verticality measuring method has
Very actual meaning and extensive purposes.
It is investigated that readding pertinent literature, traditional displacement platform verticality measuring method substantially includes following a few classes: the first kind is
Level meter is placed on platform to be measured by level measurement method, when recording and analyzing displacement platform work, the shifting of level vial
Emotionally condition；Second class is autocollimator mensuration, using optical auto-collimation principle, by the deviation for recording reflection light focus
Center misalignment converses the angular deflection of displacement platform；Third class is laser interferometer measurement method, with above two straight line
Degree measurement method is compared, and most important advantage is exactly to measure that distance, speed are fast, precision is high, but its volume is often bigger,
And the requirement to working environment is extremely stringent, the variation meeting of external environment is so that measurement result is unstable.
For existing verticality measuring method, often slightly complicated, volume be too fat to move for their system structure, data acquisition
With processing difficulty is larger, resolution ratio is not high, it is difficult to realize high-acruracy survey.Moreover, there is also one for instrument on the market
A common disadvantage, that is, they can only often provide the angle straightness error information of linear moving platform, however national
It is linear line degree error as defined in standard.Therefore, the angle that traditional measurement instrument provides must also be missed after the completion of detection
Poor information is converted into linearity error information, this substantially increases extra workload.
Summary of the invention
It is a primary object of the present invention to overcome drawbacks described above in the prior art, propose a kind of in grating interference principle
Straight line degree measurement system not only possesses higher precision, also simplifies system structure and detection process, is capable of providing complete straight
Dimension information.
The present invention adopts the following technical scheme:
A kind of straight line degree measurement system based on grating interference principle, including semiconductor laser, further include the first polarization
Amici prism, laser-Doppler interference unit and laser Michelson interference unit；First polarization splitting prism, which is located at, partly leads
The transmitting terminal of body laser is to be divided into S-polarization component and P-polarization component for light beam；It is inclined that the laser-Doppler interference unit receives P
Shake component, measures linear line degree error for acquiring the interference signal that four road phase differences are 90 °；The laser Michelson
Interference unit receives S-polarization component, for acquiring the interference signal that four road phase differences are 90 ° for measurement angle straightness mistake
Difference.
The laser-Doppler interference unit include the first quarter-wave plate, light path regulator, diffraction grating, second partially
Shake Amici prism, third polarization splitting prism, half-wave plate, fourth plane reflecting mirror, the 4th polarization splitting prism, the two or four/
One wave plate and the first phase demodulation module；First quarter-wave plate is used to P-polarization component becoming circularly polarized light, the optical path adjusting
Device is used for circularly polarized light vertical incidence to diffraction grating；The diffraction grating and platform are relatively fixed, and by circularly polarized light diffraction
At+1 grade of diffraction light and -1 grade of diffraction light, -1 grade of diffraction light after the reflection of third plane mirror through third polarization splitting prism,
Half-wave plate enters the 4th polarization splitting prism, and+1 grade of diffraction light enters the through the second polarization splitting prism, fourth plane reflecting mirror
Four polarization splitting prisms are assembled through the 4th polarization splitting prism, then through the second quarter-wave plate to become two beams oppositely oriented
Circularly polarized light；The first phase demodulation module acquires the two beams circularly polarized light and obtains the interference signal.
The light path regulator includes the first plane mirror and the second flat reflecting surface mirror, first plane mirror and the
Two plane mirrors are parallel.
The first phase demodulation module includes the first depolarization Amici prism, the 5th polarization splitting prism, the 6th polarization spectro
Prism, the first photodetector, the second photodetector, third photodetector and the 4th photodetector.
The laser Michelson interference unit include right-angle prism, third quarter-wave plate, diffraction grating, first partially
Vibration Amici prism, the 4th quarter-wave plate and the second phase demodulation module；The right-angle prism will be inclined by S with third quarter-wave plate
Vibration component becomes circularly polarized light and vertical incidence to diffraction grating, and the diffraction grating and platform are relatively fixed, zero-order diffraction light
Become P-polarized light through third quarter-wave plate, reflexes to the first polarization splitting prism through right-angle prism；The laser-Doppler
In interference unit, the zero-order diffraction light of P-polarization component warp, which is passed through, becomes S polarized light by the first quarter-wave plate, the
It is converged in one polarization splitting prism with P-polarized light, generates left-handed rotation and right-handed rotation by the 4th a quarter；Second phase demodulation
Module acquires the left-handed rotation and right-handed rotation obtains the interference signal.
The second phase demodulation module includes the second depolarization Amici prism, the 7th polarization splitting prism, the 8th polarization spectro
Prism, the 5th photodetector, the 6th photodetector, the 7th photodetector and the 8th photodetector.
By the above-mentioned description of this invention it is found that compared with prior art, the invention has the following beneficial effects:
1) measurement method uses Grating Doppler Effect principle of interference and Michelson Interference Principle while the line of measuring table
Property straightness error and angle straightness error.System can generate two kinds of interference phenomenon simultaneously, and by way of parsing respectively
Obtain two kinds of straightness errors.
2) small-sized, modularized design.This system is made of two parts optical path, two parts volume and weight all very littles and
Weighing apparatus, therefore can be used as the mover with platform displacement, and be fixed on the stator of referential, can flexibly it match according to the specific application occasions
It sets.
3) in order to improve the stability of measurement accuracy and reading, the shift standards that this system uses are the pitch of grating, and
Non-laser wavelength.Also, since the spot diameter of laser is much larger than pitch, the influence of Divided errors has also been reduced to minimum.
Detailed description of the invention
Fig. 1 is present system figure；
Fig. 2 is laser-Doppler interference unit schematic diagram of the present invention；
Fig. 3 is laser Michelson interference unit schematic diagram.
1, semiconductor laser, the 2, first polarization splitting prism, the 3, first quarter-wave plate, 4, right-angle prism, 5,
One plane mirror, 6, second plane mirror, 7, diffraction grating, 8, third plane mirror, the 9, second polarization splitting prism,
10, third polarization splitting prism, 11, half-wave plate, 12, fourth plane reflecting mirror, the 13, the 4th polarization splitting prism, the 14, the 2nd 4
/ mono- wave plate, the 15, first depolarization Amici prism, the 16, the 5th polarization splitting prism, the 17, the 6th polarization splitting prism, 18,
First photodetector, the 19, second photodetector, 20, third photodetector, the 21, the 4th photodetector, 22, third
Quarter-wave plate, the 23, the 4th quarter-wave plate, the 24, second depolarization Amici prism, the 25, the 7th polarization splitting prism,
26, the 8th polarization splitting prism, the 27, the 5th photodetector, the 28, the 6th photodetector, the 29, the 7th photodetector, 30,
8th photodetector.
Specific embodiment
Below by way of specific embodiment, the invention will be further described.
Referring to figs. 1 to Fig. 3, a kind of straight line degree measurement system based on grating interference principle of the invention, based on how general
In conjunction with Michelson's interferometer on the basis of the grating interferometer of Le frequency displacement, the line of displacement platform movement just can be measured simultaneously
Property straightness error and angle straightness error.
Grating interferometer is a kind of traditional high accuracy displacement sensor for combining polarization optics and Principle of Grating Diffraction,
Its structure is relatively easy, by external environment influence caused by measurement error it is also smaller.Again by diffraction grating signatures
High-precision phase position subdivision, can greatly improve the resolution ratio of measuring system.Its fundamental measurement principle is Doppler frequency shift phenomenon, when
When light source and receiving end generate relative motion, due to the presence of optical path difference, the phase and frequency of receiving end light wave can all become
Change, there is certain one-to-one relationships for frequency shift amount and optical path difference.In turn, can also by the size of Doppler frequency shift,
The small displacement of precise measurement, i.e. the linear line degree error of linear moving platform；It is well known that two beam direction of vibration and frequency
Rate is all the same, and when coherent light of constant phase difference is spatially overlapped can generate interference phenomenon, and angle straightness error
Measurement is based on the principle of Michelson interference and designs.
In interference system, the corresponding coherence length of light sources with different wavelengths is different.Such as He-Ne laser, relevant length can be generated
Spend very long laser beam.Even if reaching several meters by the two beam coherent light optical path differences that He-Ne laser issues, can produce in the same old way aobvious
The interference phenomenon of work.And the coherence length of semiconductor laser is very short, several millimeters of two-beam optical path difference does not just have interference phenomenon
, and its advantages are that small in size, light-weight, price is low.
If coherent beam optical path difference is larger in interference system, need to select the longer light source of coherence length, but such laser
Device is at high cost, and sufficiently bulky.For the miniaturization and modularization for realizing measurement structure, this measurement method is designed using aplanatism,
Since light path is roughly equal, even if can also generate significant interference phenomenon using cheap small and exquisite semiconductor laser.Have in this way
Conducive to the miniaturization and modularization for realizing measurement structure.
Specifically, a kind of straight line degree measurement system based on grating interference principle of the invention, including semiconductor laser
1, the first polarization splitting prism 2, laser-Doppler interference unit and laser Michelson interference unit etc..System source selects wave
A length of 635nm, the semiconductor laser 1 of polarization light output.The main reason for selecting laser is its high directivity, Gao Danse
Property, high coherence and high brightness.
First polarization splitting prism 2 is located at the transmitting terminal of semiconductor laser 1, and light beam is divided into S-polarization component and P is inclined
Shake component, is the two beam directions of propagation and the mutually perpendicular linearly polarized light of direction of vibration.The characteristic of polarization splitting prism is energy
Enough completely through P-polarized light, and reflect all S polarized lights.
The laser-Doppler interference unit receive P-polarization component, for acquire four road phase differences for 90 ° interference signal with
For measuring linear line degree error.
Specifically, referring to fig. 2, laser-Doppler interference unit includes the first quarter-wave plate 3, light path regulator, spreads out
It is inclined to penetrate grating 7, the second polarization splitting prism 9, third polarization splitting prism 10, half-wave plate 11, fourth plane reflecting mirror the 12, the 4th
Vibration Amici prism 13, the second quarter-wave plate 14 and the first phase demodulation module.
First quarter-wave plate 3 enables light vector and wave plate optical axis angle at 45 °, then incident linearly polarized light, that is, P polarization
Component has reformed into circularly polarized light.The light path regulator includes the first plane mirror 5 and second plane mirror 6, this first
Plane mirror 5 is parallel with second plane mirror 6, is used for circularly polarized light vertical incidence to diffraction grating 7, the diffraction grating
7 be reflective diffraction gratings, 1200 lines/mm.
The combination of first quarter-wave plate 3 and the first polarization splitting prism 2 is also an advantage that, is exactly to work as P polarization
Light will become S polarized light after quarter wave plate twice, and S polarized light will become P-polarized light after quarter wave plate twice, in conjunction with
Polarization splitting prism transmits P light and reflects the characteristic of S light, can be effectively prevented and make since zero-order diffraction light is reflected to light source
At interference, avoid the occurrence of the unstable phenomenon of laser output power.
The diffraction grating 7 and platform are relatively fixed, and circularly polarized light is diffracted into+1 grade of diffraction light, -1 grade of diffraction light and zero
Grade diffraction light.When diffraction grating 7 with displacement platform occur lateral shift when, ± 1 grade of diffraction light due to Doppler frequency shift and
Generate difference on the frequency equal in magnitude, that symbol is opposite:
F in formula+1And f-1It is the frequency of+1 grade of diffraction light He -1 grade of diffraction light, f respectively0It is the frequency of semiconductor laser light source
Rate, v are movement speeds, and d is the pitch of grating.
+ 1 grade of diffraction light enters the 4th polarization splitting prism 13 through the second polarization splitting prism 9, fourth plane reflecting mirror 12.
Different with+1 grade of diffraction light, -1 grade of diffraction light is after the reflection of third plane mirror 8 through third polarization splitting prism
10, half-wave plate 11 enters the 4th polarization splitting prism 13, has rotated 90 ° by polarization direction after half-wave plate 11, P-polarized light becomes
For S polarized light.Diffracted wave is listed at the 4th polarization splitting prism 13 and reassembles, their polarization direction is mutually perpendicular to, and passes through
Second quarter-wave plate 14 becomes the oppositely oriented circularly polarized light of two beams.
First phase demodulation module includes the first depolarization Amici prism 15, the 5th polarization splitting prism 16, the 6th polarization spectro
Prism 17, the first photodetector 18, the second photodetector 19, third photodetector 20 and the 4th photodetector 21.
For the oppositely oriented circularly polarized light of two beams through the first depolarization Amici prism 15, the 5th polarization splitting prism 16 of a branch of entrance is another
Beam enters the 6th polarization splitting prism 17.First photodetector 18, the second photodetector 19 are for acquiring the 5th polarization
The two-way interference signal that Amici prism 16 projects, third photodetector 20 and the 4th photodetector 21 are for acquiring the 6th partially
The two-way interference signal that the Amici prism 17 that shakes projects.
Four road interference signals are in sinusoidal variations with the linear deflection of grating, and phase difference is 90 °, and has following frequencies:
By above formula as it can be seen that the frequency of interference signal is directly proportional to the lateral shift speed of linear moving platform.It is touched by zero passage
It sends out and can get the square-wave signal that four road phase differences are 90 °, further can obtain resolution ratio using four subdivision sensing countings is
The linear deflection amount in 1/4 original signal period, and know direction.
Referring to Fig. 3, which receives S-polarization component, is 90 ° for acquiring four road phase differences
Interference signal is for measurement angle straightness error.Laser Michelson interference unit includes right-angle prism 4, third a quarter
Wave plate 22, diffraction grating 7, the first polarization splitting prism 2, the 4th quarter-wave plate 23 and second phase demodulation module etc..The diffraction
Grating 7 is the reflective diffraction gratings in laser-Doppler interference unit.
The propagation optical path of S-polarization component has deflected 90 ° by right-angle prism 4, due to its light vector equally with wave plate optical axis at
45 °, therefore by after third quarter-wave plate 22, this Shu Guanghui becomes circularly polarized light by linearly polarized light, and vertically beats
Diffraction grating 7.The zero-order diffraction light of grating again passes by third quarter-wave plate 22 after reflecting, and being equivalent to have passed through
Quarter wave plate twice, S polarized light have reformed into P-polarized light.
P-polarization component is similar, i.e., in laser-Doppler interference unit, again by first after zero-order diffraction light reflection
Quarter-wave plate 3, P-polarized light becomes S polarized light.The two orthogonal reflected lights in beam polarization direction are in the first polarization spectro rib
Jing2Chu convergence generates left-handed right-handed rotation after the 4th quarter-wave plate 23 and enters the second phase demodulation module.
Second phase demodulation module includes the second depolarization Amici prism 24, the 7th polarization splitting prism 25, the 8th polarization spectro
Prism 26, the 5th photodetector 27, the 6th photodetector 28, the 7th photodetector 29 and the 8th photodetector 30.
For the oppositely oriented circularly polarized light of two beams through the second depolarization Amici prism 24, the 7th polarization splitting prism 25 of a branch of entrance is another
Beam enters the 8th polarization splitting prism 26.
5th photodetector 27, the 6th photodetector 28 are used to acquire the two of the 7th polarization splitting prism 25 injection
Road interference signal, the 7th photodetector 29 and the 8th photodetector 30 are used to acquire the injection of the 8th polarization splitting prism 26
Two-way interference signal.
This four roads interference signal is the interference signal that phase difference is 90 °.When diffraction grating 7 as angle occurs for displacement platform
When deflection, the variation of optical path difference can be caused, it may be assumed that
Δ L=l × tan θ
In formula, Δ L is the optical path difference variation that two beams measure light, and l is the water of the grating incidence point and grating deflection center of S light
Flat distance, θ are deflection angle.Similar with laser-Doppler interference unit, four road interference signals are in the angular deflection of grating
Sinusoidal variations.It is counted by zero cross fired and four subdivision sensing, can get size and the direction of optical path difference variation, and derived whereby
The angular deflection amount θ of displacement platform, it may be assumed that
The above is only a specific embodiment of the present invention, but the design concept of the present invention is not limited to this, all to utilize this
Design makes a non-material change to the present invention, and should all belong to behavior that violates the scope of protection of the present invention.
Claims (6)
1. a kind of straight line degree measurement system based on grating interference principle, including semiconductor laser, it is characterised in that: further include
First polarization splitting prism, laser-Doppler interference unit and laser Michelson interference unit；First polarization splitting prism
Transmitting terminal positioned at semiconductor laser is to be divided into S-polarization component and P-polarization component for light beam；The laser-Doppler interference unit
P-polarization component is received, measures linear line degree error for acquiring the interference signal that four road phase differences are 90 °；The laser
Michelson interference unit receives S-polarization component, is 90 ° of interference signal so that measurement angle is straight for acquire four road phase differences
Dimension error.
2. a kind of straight line degree measurement system based on grating interference principle as described in claim 1, it is characterised in that: described to swash
Light Doppler difference unit includes the first quarter-wave plate, light path regulator, diffraction grating, the second polarization splitting prism, the
Three polarization splitting prisms, half-wave plate, fourth plane reflecting mirror, the 4th polarization splitting prism, the second quarter-wave plate and first
Phase demodulation module；First quarter-wave plate is used to P-polarization component becoming circularly polarized light, and the light path regulator will be for that will justify partially
Light vertical incidence of shaking is to diffraction grating；The diffraction grating and platform are relatively fixed, and circularly polarized light is diffracted into+1 grade of diffraction light
With -1 grade of diffraction light, -1 grade of diffraction light enters the through third polarization splitting prism, half-wave plate after the reflection of third plane mirror
Four polarization splitting prisms ,+1 grade of diffraction light enter the 4th polarization spectro rib through the second polarization splitting prism, fourth plane reflecting mirror
Mirror is assembled, then become the oppositely oriented circularly polarized light of two beams through the second quarter-wave plate through the 4th polarization splitting prism；This
One phase demodulation module acquires the two beams circularly polarized light and obtains the interference signal.
3. a kind of straight line degree measurement system based on grating interference principle as described in claim 1, it is characterised in that: the light
Road adjuster includes the first plane mirror and the second flat reflecting surface mirror, and first plane mirror and second plane mirror are flat
Row.
4. a kind of straight line degree measurement system based on grating interference principle as claimed in claim 2, it is characterised in that: described the
One phase demodulation module includes the first depolarization Amici prism, the 5th polarization splitting prism, the 6th polarization splitting prism, the spy of the first photoelectricity
Survey device, the second photodetector, third photodetector and the 4th photodetector.
5. a kind of straight line degree measurement system based on grating interference principle as described in claim 1, it is characterised in that: described to swash
Light Michelson interference unit includes right-angle prism, third quarter-wave plate, diffraction grating, the first polarization splitting prism,
Four quarter-wave plates and the second phase demodulation module；S-polarization component will be become round with third quarter-wave plate by the right-angle prism
To diffraction grating, the diffraction grating and platform are relatively fixed for polarised light and vertical incidence, zero-order diffraction light through the three or four/
One wave plate becomes P-polarized light, reflexes to the first polarization splitting prism through right-angle prism；In the laser-Doppler interference unit,
The zero-order diffraction light of the P-polarization component warp, which is passed through, becomes S polarized light by the first quarter-wave plate, in the first polarization spectro rib
It is converged in mirror with P-polarized light, generates left-handed rotation and right-handed rotation by the 4th a quarter；The second phase demodulation module acquires the left side
Optically-active and right-handed rotation obtain the interference signal.
6. a kind of straight line degree measurement system based on grating interference principle as claimed in claim 5, it is characterised in that: described the
Two phase demodulation modules include the second depolarization Amici prism, the 7th polarization splitting prism, the 8th polarization splitting prism, the spy of the 5th photoelectricity
Survey device, the 6th photodetector, the 7th photodetector and the 8th photodetector.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111397542A (en) * | 2020-03-09 | 2020-07-10 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
| CN112097652A (en) * | 2020-09-11 | 2020-12-18 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device |
| CN112147629A (en) * | 2020-09-27 | 2020-12-29 | 中国工程物理研究院激光聚变研究中心 | Wide-speed-domain imaging Doppler velocimeter |
| CN112484646A (en) * | 2020-11-17 | 2021-03-12 | 中国科学院长春光学精密机械与物理研究所 | Homodyne one-dimensional grating displacement measuring device |
-
2019
- 2019-03-11 CN CN201910180509.1A patent/CN109883362A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111397542A (en) * | 2020-03-09 | 2020-07-10 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
| CN111397542B (en) * | 2020-03-09 | 2021-07-06 | 天地科技股份有限公司 | System and method for monitoring straightness of scraper conveyor based on weak reflection grating |
| CN112097652A (en) * | 2020-09-11 | 2020-12-18 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device |
| CN112097652B (en) * | 2020-09-11 | 2021-12-17 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device |
| CN112147629A (en) * | 2020-09-27 | 2020-12-29 | 中国工程物理研究院激光聚变研究中心 | Wide-speed-domain imaging Doppler velocimeter |
| CN112147629B (en) * | 2020-09-27 | 2022-03-01 | 中国工程物理研究院激光聚变研究中心 | Wide-speed-domain imaging Doppler velocimeter |
| CN112484646A (en) * | 2020-11-17 | 2021-03-12 | 中国科学院长春光学精密机械与物理研究所 | Homodyne one-dimensional grating displacement measuring device |
| CN112484646B (en) * | 2020-11-17 | 2021-12-17 | 中国科学院长春光学精密机械与物理研究所 | Homodyne one-dimensional grating displacement measuring device |
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