CN104142123A - Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement - Google Patents
Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement Download PDFInfo
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- CN104142123A CN104142123A CN201310168047.4A CN201310168047A CN104142123A CN 104142123 A CN104142123 A CN 104142123A CN 201310168047 A CN201310168047 A CN 201310168047A CN 104142123 A CN104142123 A CN 104142123A
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Abstract
The invention belongs to the technology of laser precision measurement, and particularly relates to a three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement. The three-degree of freedom laser measuring system comprises a beam splitter set, a polarizing beam splitter set, a movable reflector set and a fixed reflector set. By means of the technical scheme based on double-frequency laser interference, three physical items including one displacement item and two rotating items can be measured at the same time, the detecting time can be greatly shortened, the detecting efficiency can be improved, traceability is high, a sensing head is a passive device, heat interference cannot be introduced, a cable is not needed to output signals, and then an error caused by heat interference is eliminated. The three-degree of freedom laser measuring system is produced for special requirements, and is moderate in cost, high in precision, very high in applicability and market value and suitable for being applied to various complex mechanical devices such as an engine, an excavator, a generator, a locomotive, a numerical control machine tool and the like.
Description
Technical field
The invention belongs to accurate laser measurement technology, be specifically related to a kind of Three Degree Of Freedom laser measurement system that plant equipment geometric error is measured that is applied to.
Background technology
Along with the development of modern processing and high-end equipment sophisticated manufacturing, more and more higher to the requirement on machining accuracy of numerically-controlled machine.To assemble out in order producing the high precision precision machine tool that meets Production requirement, and to make lathe keep high-accuracy state.The detection of lathe geometric error amount will be become to the problem that cannot avoid.Only detect the geometric error of lathe, could confirm whether the lathe of producing meets the demands, and further improve the machining precision of lathe, or the systematic error of existing lathe is compensated.
In general, the process need of debuging lathe detects every geometric error, for debuging design accuracy.Lathe dispatches from the factory and need to detect lathe global error, to confirm overall performance.In the use procedure of lathe, need regularly detect the geometric error of lathe, to guarantee that machine finish do not drift about.According to existing precision machine tool geometric error detection means, once can only detect a margin of error, and for high-precision numerical control lathe, its margin of error at least will detect 21, therefore, each margin of error of the complete complete lathe of detection, the needed time is very tediously long, causes very considerable invisible cost.
People attempt to address this problem always, and have developed many measuring methods and technology.Sum up and comprise: traditional optical means, based on the method for diffraction of light, the method that the method for following the trail of based on laser and laser interference combine with laser alignment.Wherein, be the state-of-the-art method of applying at present based on laser interference and laser alignment.
But existing detection system bulky complex, laser interferometer cannot detect displacement and amount of spin simultaneously, if amount of spin detects by sensor PSD, can not accomplish to trace to the source, precision authority is low, and sensing head needs active device to carry out signal transmission, its warming-up effect measuring accuracy.
Summary of the invention
Technical matters to be solved by this invention is system complex, measurement data can not be traced to the source, active device heating impacts measurement result, in order to overcome above deficiency, provides a kind of Three Degree Of Freedom laser measurement system that plant equipment geometric error is measured that is applied to.
In order to solve the problems of the technologies described above, technical scheme of the present invention is: described in be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system comprise spectroscope group, polarization spectroscope group, motion reflective mirror group and fixed counter-mirror group, incident light is equally divided into the first parallel with incident light but not coplanar beamlet by described spectroscope group, the second beamlet and the 3rd beamlet, described polarization spectroscope group is positioned in the light path of 3 beamlets, each beamlet is reference light and measures light through polarization spectroscope component, motion reflective mirror group is arranged in the light path of measuring light and is reflected back polarization spectroscope group, fixed counter-mirror group is arranged in the light path of reference light and is reflected back polarization spectroscope group, the reference light being reflected back and measurement light converge rear formation and interfere, interference signal is used for calculating described Three Degree Of Freedom.
Further, before and after comprising, described spectroscope group arranges and orthogonal front parallelogram prism and rear parallelogram prism, four sides of each parallelogram prism are followed successively by the plane of incidence vertical with incident light, with the plane of incidence angle light splitting surface that is acute angle, the reflecting surface relative with light splitting surface and the exit facet relative with the plane of incidence, the plane of incidence of rear parallelogram prism is relative with the light splitting surface of front parallelogram prism, the front triangle prism and the Vee formation prism that before and after described spectroscope group also comprises, arrange, triangular prism hypotenuse place face is transmission plane, vertical with incident light is beamlet face, the light splitting surface of the transmission plane of described front triangle prism and front parallelogram prism fits, the beamlet face of described front triangle prism and the plane of incidence of rear parallelogram prism fit, the light splitting surface of the transmission plane of Vee formation prism and rear parallelogram prism fits.
Further, the beamlet face of the exit facet of described rear parallelogram prism and the described Vee formation prism adjacent with this exit facet, all with the plane of incidence laminating of described polarization spectroscope group.
Further, the principal section of described parallelogram prism is the parallelogram of 45 ° of pair of horns, and the principal section of triangular prism is isosceles right triangle.
Further, the light splitting surface of each described parallelogram prism is provided with depolarization spectro-film, and described reflecting surface is provided with high-reflecting film, and other sides are provided with anti-reflective film.
Further, the splitting ratio of the depolarization spectro-film of described front parallelogram prism is 2:1, and the splitting ratio of the depolarization spectro-film of rear parallelogram prism is 1:1.
Further, the light splitting surface plating High Extinction Ratio polarization beam splitter of described polarization spectroscope group, all the other workplace coating anti reflection films.
Further, described motion reflective mirror group comprises 3 reverberators, 3 reverberators lay respectively in the light path of measurement light of 3 beamlets and are reflected back polarization spectroscope group, described fixed counter-mirror group structure is identical with motion reflective mirror group, lays respectively in the light path of reference light of 3 beamlets and is reflected back polarization spectroscope group.
Further, the plane of incidence coating anti reflection film of each described reverberator, reflecting surface plating depolarization reflectance coating.
Further, described reverberator is prism of corner cube reverberator.
Technical scheme provided by the invention is based on double-frequency laser interference, can measure 3 physical quantitys simultaneously, wherein 1 displacement, 2 rotation amounts, can shorten detection time greatly, improve detection efficiency, and its tractability is strong, sensing head is passive device, can not introduce heat and disturb, do not need cable output signal, and then eliminate heat and disturb the error causing.Meanwhile, it is for specific demand, and cost is moderate, and precision is high, possesses very strong application and marketable value, goes for the plant equipment of various complexity, such as engine, and excavator, generator, locomotive and numerically-controlled machine etc.
Brief description of the drawings
Fig. 1 is the structural representation of measuring system of the present invention;
Fig. 2 is the isolating construction figure of spectroscope group of the present invention;
Fig. 3 is the structural representation of motion reflective mirror group of the present invention;
Fig. 4 is light path process in measuring system test of the present invention;
Fig. 5 is the measuring method of system Three Degree Of Freedom of the present invention.
Shown in figure:
1-spectroscope group, parallelogram prism before 11-, 111,111 '-plane of incidence, 112,112 '-light splitting surface, 113-reflecting surface, 114,114 '-exit facet, parallelogram prism after 12-, 13-front triangle prism, 131,131 '-transmission plane, 132,132 '-beamlet face, 14-Vee formation prism;
2-polarization spectroscope group;
3-motion reflective mirror group, 31-the first reverberator, 32-the second reverberator, 33-the 3rd reverberator;
4-fixed counter-mirror group;
5-laser instrument, 51-incident light, 52-beamlet, 521-primary optic axis, 522-the second optical axis, 523-the 3rd optical axis, 53-reference light, 54-measures light;
6-coupling mechanism, 7-photoelectric accounter, 8-data processing and display device.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail:
As shown in Figure 1, the Three Degree Of Freedom laser measurement system that is applied to the measurement of plant equipment geometric error of the present invention comprises spectroscope group 1, polarization spectroscope group 2, motion reflective mirror group 3 and fixed counter-mirror group 4.
The optical path direction of incident light be X to, X upwards sets gradually spectroscope group, polarization spectroscope group and motion reflective mirror group, described fixed counter-mirror group is arranged in the Y-direction of polarization spectroscope group.
As shown in Figure 2, described in spectroscope group 1, spectroscope group comprises front parallelogram prism 11, rear parallelogram prism 12, front triangle prism 13 and Vee formation prism 14.
Front parallelogram prism 11 is identical with the structure of rear parallelogram prism 12, and former parallelogram prism 11 is example.The principal section of described front parallelogram prism 11 is the parallelogram of 45 ° of pair of horns, its four sides be followed successively by with X to the vertical plane of incidence 111, with the less light splitting surface 112 of the plane of incidence 111 angles, the reflecting surface 113 relative with light splitting surface 112 and the exit facet 114 relative with the plane of incidence 111.
Front triangle prism 13 is identical with the structure of Vee formation prism 14, and former triangular prism 13 is example.The principal section of described front triangle prism 13 is isosceles right triangle, hypotenuse place face is transmission plane 131, with X to vertical be beamlet face 132, the transmission plane 131 of described front triangle prism 13 fits with the light splitting surface 112 of front parallelogram prism 11, the beamlet face 132 of described front triangle prism 13 fits with the plane of incidence 111 ' of rear parallelogram prism 12, and the transmission plane 131 ' of described Vee formation prism 14 fits with the light splitting surface 112 ' of rear parallelogram prism 52.
Described front parallelogram prism 11 is mutually vertical with rear parallelogram prism 12, and the rear plane of incidence 111 ' of parallelogram prism is relative with the light splitting surface 112 of front parallelogram prism.
Described light splitting surface 112 and transmission plane 131 apply the depolarization spectro-film that splitting ratio is 2:1, wherein 2/3 light intensity transmission, 1/3 light intensity reflection, light splitting surface 112 ' and transmission plane 131 ' apply the depolarization spectro-film that splitting ratio is 1:1, half-transmitting and half-reflecting, described reflecting surface 113 applies HR high-reflecting film, and other sides of prism apply AR anti-reflective film.
As shown in Figure 1, the beamlet face 132 ' of the exit facet 114 ' relative with the plane of incidence 111 ' and the described Vee formation prism 14 adjacent with this face in described rear parallelogram prism 12, all fit with the plane of incidence of described polarization spectroscope group 2, described polarization spectroscope group 2 is PBS prism, formed by two triangular prisms, plating High Extinction Ratio polarization beam splitter in the middle of two triangular prisms, all the other workplace plating AR anti-reflective films.
The modular construction that described motion reflective mirror group 3 adopts with fixed counter-mirror group 4 is identical with number of components, taking motion reflective mirror group 3 as example, as shown in Figure 3, it comprise 3 right-angle prism reverberators be respectively the first reverberator 31, with the first reverberator 31 the second reverberator 32 arranged side by side with overlay the first reverberator 31 the 3rd reverberator 33 above, the plane of incidence plating AR anti-reflective film of each reverberator, reflecting surface plating depolarization reflectance coating.
Described fixed counter-mirror group 4 also comprises three reverberators, in like manner, and the plane of incidence plating AR anti-reflective film of each reverberator, reflecting surface plating depolarization reflectance coating.
As shown in Figure 4, in test, light path process is followed successively by: laser instrument 5 is launched X to cross polarization double-frequency laser Shu Zuowei incident light 51, incident light 51 is equally divided into three cross polarization double frequency beamlets 52 parallel with incident light 51 through spectroscope group 1, be specially premenstrual parallelogram prism 11 and front triangle prism 13, it is 2:1 two-beam that incident light 51 is divided into beam intensity ratio.The first son bundle light 521 of 1/3 light intensity enters polarization spectroscope group 2, the light beam of 2/3 light intensity enters rear parallelogram prism 12 and Vee formation prism 14, the light beam of 2/3 light intensity is further divided into two beamlets that beam intensity ratio is 1:1, i.e. the second beamlet 522 and the 3rd beamlet 523.Described each beamlet 52 is divided into reference light 53 and measures light 54 through polarization spectroscope group 2, fixed counter-mirror group 4 receives reference light 53 and is reflected back polarization spectroscope group 2, motion reflective mirror group 2 receives to be measured light 54 and is reflected back polarization spectroscope group 2, the reflected light of the reflected light of reference light 53 and measurement light 54 is incorporated to an optical interference circuit, form interference fringe through coupling mechanism 6, photoelectric accounter 7 is counted respectively the movement of three groups of interference fringes, then provides X to displacement, Ry amount of spin and Rz amount of spin through data processing and display device 8.
Concrete data processing method is as follows:
As shown in Figure 5, three equivalent measurement point a, b and the c of system of the present invention on testee, the X that the interference fringe that the first beamlet 521 forms and a are ordered is to displacement X
acorresponding, the X that the interference fringe that the second beamlet 522 forms and b are ordered is to displacement X
bcorresponding, the X that the interference fringe that the 3rd beamlet 523 forms and c are ordered is to displacement X
ccorresponding, the centre distance between the first beamlet 521 and the second beamlet 522 is Ly, and the centre distance between the first beamlet 521 and the 3rd beamlet 523 is Lz.In order better to eliminate the impact of environmental error and vibration, X is to displacement d, and Ry amount of spin α and Rz amount of spin β are respectively:
d＝(X
a+X
b+X
c)/3
α＝arcsin((X
b-X
a)/Ly)
β＝arcsin((X
c-X
a)/Lz)。
It is pointed out that and also can adopt X
a, X
band X
cin some values as X to displacement.
Claims (10)
1. one kind is applied to the Three Degree Of Freedom laser measurement system that plant equipment geometric error is measured, it is characterized in that, comprise spectroscope group, polarization spectroscope group, motion reflective mirror group and fixed counter-mirror group, incident light is equally divided into the first parallel with incident light but not coplanar beamlet by described spectroscope group, the second beamlet and the 3rd beamlet, described polarization spectroscope group is positioned in the light path of 3 beamlets, each beamlet is reference light and measures light through polarization spectroscope component, motion reflective mirror group is arranged in the light path of measuring light and is reflected back polarization spectroscope group, fixed counter-mirror group is arranged in the light path of reference light and is reflected back polarization spectroscope group, the reference light being reflected back and measurement light converge rear formation and interfere, interference signal is used for calculating described Three Degree Of Freedom.
According to claim 1 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, before and after comprising, described spectroscope group arranges and orthogonal front parallelogram prism and rear parallelogram prism, four sides of each parallelogram prism are followed successively by the plane of incidence vertical with incident light, with the plane of incidence angle light splitting surface that is acute angle, the reflecting surface relative with light splitting surface and the exit facet relative with the plane of incidence, the plane of incidence of rear parallelogram prism is relative with the light splitting surface of front parallelogram prism, the front triangle prism and the Vee formation prism that before and after described spectroscope group also comprises, arrange, triangular prism hypotenuse place face is transmission plane, vertical with incident light is beamlet face, the light splitting surface of the transmission plane of described front triangle prism and front parallelogram prism fits, the beamlet face of described front triangle prism and the plane of incidence of rear parallelogram prism fit, the light splitting surface of the transmission plane of Vee formation prism and rear parallelogram prism fits.
According to claim 2 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, the beamlet face of the exit facet of described rear parallelogram prism and the described Vee formation prism adjacent with this exit facet, all with the plane of incidence laminating of described polarization spectroscope group.
According to claim 2 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, the principal section of described parallelogram prism is the parallelogram of 45 ° of pair of horns, and the principal section of triangular prism is isosceles right triangle.
According to claim 2 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, the light splitting surface of each described parallelogram prism is provided with depolarization spectro-film, and described reflecting surface is provided with high-reflecting film, and other sides are provided with anti-reflective film.
According to claim 5 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, the splitting ratio of the depolarization spectro-film of described front parallelogram prism is 2:1, and the splitting ratio of the depolarization spectro-film of rear parallelogram prism is 1:1.
7. be a kind ofly according to claim 1 applied to the Three Degree Of Freedom laser measurement system that plant equipment geometric error is measured, it is characterized in that the light splitting surface of described polarization spectroscope group plating High Extinction Ratio polarization beam splitter, all the other workplace coating anti reflection films.
According to claim 1 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, described motion reflective mirror group comprises 3 reverberators, 3 reverberators lay respectively in the light path of measurement light of 3 beamlets and are reflected back polarization spectroscope group, described fixed counter-mirror group structure is identical with motion reflective mirror group, lays respectively in the light path of reference light of 3 beamlets and is reflected back polarization spectroscope group.
9. be a kind ofly according to claim 8 applied to the Three Degree Of Freedom laser measurement system that plant equipment geometric error is measured, it is characterized in that the plane of incidence coating anti reflection film of each described reverberator, reflecting surface plating depolarization reflectance coating.
According to claim 8 a kind of be applied to plant equipment geometric error measure Three Degree Of Freedom laser measurement system, it is characterized in that, described reverberator is prism of corner cube reverberator.
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Cited By (6)
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| CN106979750A (en) * | 2017-04-11 | 2017-07-25 | 西南交通大学 | A kind of method for fast measuring and its device of lathe translation shaft geometric error |
| CN107121073A (en) * | 2017-06-09 | 2017-09-01 | 中国科学院光电技术研究所 | A kind of high-precision Three Degree Of Freedom method for real-time measurement and device based on laser interferometer |
| CN108180844A (en) * | 2017-12-21 | 2018-06-19 | 复旦大学 | A kind of multiple degrees of freedom precise displacement monitoring system based on double-frequency laser interference principle |
| CN109373906A (en) * | 2018-09-05 | 2019-02-22 | 三英精控（天津）仪器设备有限公司 | Method that is a kind of while measuring distance, flexion-extension and beat |
| CN111189390A (en) * | 2020-01-09 | 2020-05-22 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN111551114A (en) * | 2020-05-22 | 2020-08-18 | 华中科技大学 | Linear guide rail six-degree-of-freedom geometric error measuring device and method |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106979750A (en) * | 2017-04-11 | 2017-07-25 | 西南交通大学 | A kind of method for fast measuring and its device of lathe translation shaft geometric error |
| CN107121073A (en) * | 2017-06-09 | 2017-09-01 | 中国科学院光电技术研究所 | A kind of high-precision Three Degree Of Freedom method for real-time measurement and device based on laser interferometer |
| CN108180844A (en) * | 2017-12-21 | 2018-06-19 | 复旦大学 | A kind of multiple degrees of freedom precise displacement monitoring system based on double-frequency laser interference principle |
| CN109373906A (en) * | 2018-09-05 | 2019-02-22 | 三英精控（天津）仪器设备有限公司 | Method that is a kind of while measuring distance, flexion-extension and beat |
| CN109373906B (en) * | 2018-09-05 | 2020-07-28 | 三英精控（天津）仪器设备有限公司 | Method for simultaneously measuring distance, pitch and yaw |
| CN111189390A (en) * | 2020-01-09 | 2020-05-22 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN111189390B (en) * | 2020-01-09 | 2021-08-10 | 陕西科技大学 | Machine tool geometric error measuring device based on laser interference principle |
| CN111551114A (en) * | 2020-05-22 | 2020-08-18 | 华中科技大学 | Linear guide rail six-degree-of-freedom geometric error measuring device and method |
| CN111551114B (en) * | 2020-05-22 | 2021-07-27 | 华中科技大学 | Linear guide rail six-degree-of-freedom geometric error measuring device and method |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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