CN105823422A - Two-degree-of-freedom heterodyne grating interferometer displacement measurement system and method - Google Patents
Two-degree-of-freedom heterodyne grating interferometer displacement measurement system and method Download PDFInfo
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Abstract
The invention provides a two-degree-of-freedom heterodyne grating interferometer displacement measurement system and method. The system comprises a double-frequency laser device, a grating interferometer, a measuring grating, a receiver and a signal processing unit. The grating interferometer comprises a lateral displacement light splitting prism, a polarization light splitting prism, a 1/4 wave plate, a reflecting mirror and an optical fiber coupler. The method realizes displacement measurement based on grating diffraction, the optical Doppler effect and the optical-beat frequency principle. Laser of the double-frequency laser device is incident to the interferometer and the measuring grating and then optical signals are outputted to the signal processing unit. When the interferometer and the measuring grating perform two-degree-of-freedom linear relative movement, the system can output two linear displacements; the measurement system adopts Littrow incident conditions, a measurement target has large passive movement tolerance and two linear displacements can be measured simultaneously so that precision can reach the nanoscale and higher scale; and the measurement system has advantages of short light path, small size, compact structure, low weight and low requirement for the measuring grating and is suitable for two-degree-of-freedom high-precision long-stroke displacement measurement.
Description
Technical field
The present invention relates to a kind of two degrees of freedom heterodyne grating interferometer and measure system and method, particularly to ultra-precision table system displacement measurement, belong to displacement measuring technology field.
Background technology
Optical grating measuring system is widely used in numerous electromechanical equipment as the typical displacement transducer of one.The measuring principle of optical grating measuring system is based primarily upon Moire fringe principle and diffraction interference principle.Optical grating measuring system based on Moire fringe principle as a kind of full-fledged displacement transducer with its range finding length, low cost, the many merits such as be prone to debug and become the first-selection of numerous electromechanical equipment displacement measurement, but precision is generally in micron dimension, it is common in general industry application.
Ultraprecise displacement measuring technology has important application in the such as industry measurement equipment such as three coordinate measuring machine, ultra-precision table system, meter level grating manufacturing apparatus.It is one of displacement measuring technology the most accurate in industry measurement that displacement interferometer based on optical maser wavelength measures technology (DisplacementMeasuringInterferometry, DMI).Ultra-precision table system becomes the most representational class system in ultraprecise displacement measuring technology with its movement characteristic such as high speed, high acceleration, big stroke, ultraprecise, multiple degrees of freedom.For realizing above-mentioned motion, ultra-precision table system generally uses two-frequency laser interferometer to measure systematic survey ultra-precision table system multiple degrees of freedom displacement.However as certainty of measurement, measuring improving constantly of the motion index such as distance, measuring speed, two-frequency laser interferometer is difficult to improve with environmental sensitivity, measuring speed, takes up room, expensive, measurement target workpiece platform is difficult to manufacture and design the series of problems such as control and is difficult to meet measurement demand.
For the problems referred to above, each major company and the research institution in ultra precise measurement field expands a series of research in the world, and research focuses primarily upon optical grating measuring system based on diffraction interference principle, and achievement in research all has exposure in many patent papers.ASML company of Holland United States Patent (USP) US7, 102, 729B2 (publication date on August 4th, 2005), US7, 483, 120B2 (publication date on November 15th, 2007), US7, , 940, 392B2 (publication date 2009 on December 24), publication number US2010/0321665A1 (publication date 2010 on December 23) discloses a kind of plane grating being applied to Ultra-precision Stages of Lithography and measures system and arrangement, this measurement system mainly utilizes one-dimensional or two-dimentional plane grating to coordinate read head to measure the big travel displacement of work stage level, short transverse displacement measurement uses the height sensor such as current vortex or interferometer, but the application of multiple sensors limits work stage certainty of measurement.ZYGO company of U.S. U.S. Patent Publication No. US2011/0255096A1 (publication date on October 20th, 2011) discloses a kind of optical grating measuring system being applied to Ultra-precision Stages of Lithography, this measurement system also uses two-dimensional grating to coordinate specific read head to realize displacement measurement, level can be carried out measure to vertical deviation simultaneously, but structure is complicated, and two-dimensional grating cost is extremely expensive；CANON company U.S. Patent Publication No. US2011/0096334A1 of Japan (publication date on April 28th, 2011) discloses a kind of heterodyne ineterferometer, and in this interferometer, employing grating is as target mirror, but this interferometer is only capable of realizing one-dimensional measurement.Japanese scholars GAOWEI proposes a kind of single-frequency two-dimensional grating utilizing diffraction interference principle in research paper " Designandconstructionofatwo-degree-of-freedomlinearencod erfornanometricmeasurementofstagepositionandstraightness .PrecisionEngineering34 (2010) 145-155 " and measures system, this optical grating measuring system can realize simultaneously horizontal and vertical to displacement measurement, but owing to using single-frequency laser, measuring signal to be easily disturbed, precision is difficult to ensure that.Additionally, Chinese patent literature publication number CN103759657A (publication date on 04 30th, 2014) and CN103759656A (publication date on 04 30th, 2014) individually discloses a kind of heterodyne grating interferometer and measures system, read head structure in two kinds of interferometer measuring systems make it the least to stroke during vertical measuring again, catenary motion can not carry out the measurement of larger row journey, and range of application is restricted.
Summary of the invention
Limitation in view of technique scheme, it is an object of the invention to provide a kind of two degrees of freedom heterodyne grating interferometer displacement measurement system and method, grating Littrow principle can be utilized, realize optics four sub-structure in the horizontal direction, it is achieved sub-nanometer even more high-resolution and the measurement of precision；Optics two sub-structure is realized, it is achieved nanometer even more high-resolution and the measurement of precision in vertical direction；Simultaneously this grating interferometer measure system also to have simple for structure, volume is little, light weight, be easily installed, facilitate the advantages such as application.Use this measurement system as ultra-precision table system displacement measuring device, it is possible to effectively reduce laser interferometer measurement system deficiency in ultra-precision table system is applied, make Ultra-precision Stages of Lithography performance boost.This two degrees of freedom heterodyne grating interferometer displacement measurement system applies also for the accurate measurement of the work stage multiple degrees of freedom displacement of precision machine tool, three coordinate measuring machine, semiconductor detection etc., and make it have simple for structure, volume is little, light weight, be easily installed, facilitate the advantages such as application.
Technical scheme is as follows:
A kind of two degrees of freedom heterodyne grating interferometer displacement measurement system includes two-frequency laser, grating interferometer, measurement grating, receptor, signal processing unit；It is characterized in that: grating interferometer includes with installing the base of groove, lateral displacement Amici prism, the first polarization splitting prism, the second polarization splitting prism, reference grating, the first quarter wave plate, the second quarter wave plate, the 3rd quarter wave plate, the 4th quarter wave plate, the first reflecting mirror, the second reflecting mirror, the 3rd reflecting mirror, first fiber coupler the second fiber coupler；
Two-frequency laser 1 outgoing double-frequency laser, to after lateral displacement Amici prism 6, forms the first transmission light and the first reflection light, and wherein the first transmission light enters the first polarization splitting prism 7, and the first reflection light enters the second polarization splitting prism 8；First transmission light is producing the second transmission light and the second reflection light after the first polarization splitting prism 7；After wherein the second transmission light sequentially passes through first quarter wave plate the 10, first reflecting mirror 14, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the negative one order diffraction light formed is along backtracking, again pass by the first reflecting mirror 14 and the first quarter wave plate 10 is incident to the first polarization splitting prism 7 and reflects, form the first measurement light；After second reflection light sequentially passes through second quarter wave plate the 11, second reflecting mirror 15, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the positive first-order diffraction light formed is along backtracking, again pass by the second reflecting mirror 15 and the second quarter wave plate 1) it is incident to the first polarization splitting prism 7 and transmission occurs, form the second measurement light；First reflection light is producing the 3rd transmission light and the 3rd reflection light after the second polarization splitting prism 8；After wherein the 3rd transmission light sequentially passes through the 4th quarter wave plate the 13, the 3rd reflecting mirror 16, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the positive first-order diffraction light formed is along backtracking, again pass by the 3rd reflecting mirror 16 and the 4th quarter wave plate 13 is incident to the second polarization splitting prism 8 and reflects, form the 3rd measurement light；After 3rd reflection light sequentially passes through the 3rd quarter wave plate 12, it is that angle of incidence is beaten concurrently to gain interest on reference to grating 9 and penetrated with the corresponding Littrow angle with reference to grating 9, the positive first-order diffraction light formed is along backtracking, again pass by the 3rd quarter wave plate 12 be incident to the second polarization splitting prism 8 and transmission occurs, form the first bundle reference light；First measurement light and the second measurement light are incident to the fiber coupler 17 of built-in lens and deflection film and obtain the first conjunction optical signal after realizing closing light at the first polarization splitting prism 7, then through intelligent acess receptor 4；3rd measurement light and the first bundle reference light are incident to the fiber coupler 17 of built-in lens and deflection film and obtain the second conjunction optical signal after finally realizing closing light at the second polarization splitting prism 8, again through intelligent acess receptor 4, two bundles close optical signals and transfer the signal of telecommunication in receptor 4 to, then input to signal processing unit 5 and process；When being fixed on when measuring the linear movement that grating 3 does two degree of freedom relative to grating interferometer 2 of sports platform, signal processing unit 5 will output two degrees of freedom linear displacement.In technique scheme, described measurement grating uses one-dimensional reflection-type grating.Lateral displacement spectroscope, polarization spectroscope, reflecting mirror, reference grating are all to be fixed on base by the groove of relevant position in mounting seat, and 1/4 slide is by being adhesively fixed on polarization illuminator.
A kind of big stroke two degrees of freedom heterodyne grating interferometer displacement measurement method using above-mentioned measurement system comprises the steps:
1) horizontal direction displacement measurement:
First measures light and second measures the first conjunction optical signal light intensity I that light is formed1-2For:
Wherein E1Represent the first measurement light light vector, E2Represent the second measurement light light vector, ΦmRepresent the phase place change of the first conjunction optical signal, ImRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f1Represent that the first measurement light and second measures the difference of light frequency.
The first phase place change Φ closing optical signalmFor:
Φm=(Φ2+Δφ2)-(Φ1+Δφ1)
Wherein Φ1And Φ2Represent that the first measurement light and second measures the phase place change that light produces, Δ φ owing to measuring grating 3 horizontal motion respectively1With Δ φ2Represent that the first measurement light and second measures the phase place change that light produces owing to measuring grating 3 movement in vertical direction respectively, and:
Δφ1=Δ φ2
In formula, N is the electronic fine-grained multiple of signal processing unit 5, kmFor signal processing unit 5 to the first counting closing the change of optical signal phase place, Δ x represents measurement grating 3 displacement in the horizontal direction；
Measuring grating 3 displacement x in the horizontal direction is:
Wherein xresRepresent the horizontal survey distance corresponding to unit of phase counting of signal processing unit 5；
2) vertical direction displacement measurement:
The second conjunction optical signal light intensity I that a, the 3rd measurement light and the first reference light are formed3-4Qiang Wei:
Wherein E3Represent the 3rd measurement light light vector, E4Represent the first reference light light vector, ΦnRepresent the second conjunction optical signal phase place change, InRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f2Represent that the first measurement light and second measures the difference of light frequency.
Second closes optical signal phase place change ΦnFor:
Φn=Φ3+Δφ3
Wherein Φ3Represent the phase place change that the 3rd measurement light produces, Δ φ owing to measuring grating 3 horizontal motion3Represent the phase place change that the 3rd measurement light produces owing to measuring grating 3 movement in vertical direction, and: Φ3=Φ2；
3rd measures light phase changes delta φ3It is expressed as:
Wherein ΦrRepresent and measure the inswept one section of grid line of hot spot that grating catenary motion component makes to measure on grating 3 and the phase place change of the second conjunction optical signal caused due to Grating Doppler Effect, ΦlRepresent measure grating 3 catenary motion component make point diffraction along during incident direction generation relative motion owing to laser doppler causes the phase place of the second conjunction optical signal to change；
The displacement X that b, measurement grating 3 vertical motion component cause hot spot inswept on grid line is:
X=x0×Φr
Measuring grating 3 vertical motion component causes the optical grating diffraction point along the displacement L of incident direction to be:
L=l0×Φl
And:
Wherein, θ represents the angle of displacement X and displacement Y, and θ represents the Littrow angle corresponding with measuring grating 3, x0Representation unit phase count correspondence pattern displacement, l0The incident direction displacement that representation unit phase count is corresponding, p represents the grating constant measuring grating, and N represents the electronic fine-grained multiple of signal processing unit, and λ is two-frequency laser shoot laser wavelength, and N is the electronic fine-grained multiple of signal processing unit 5；
c、ΦlWith ΦrRelational representation be:
Thus:
By the Φ obtainedlCan release vertical deviation Δ y:
Wherein N is the electronic fine-grained multiple of signal processing unit, km、knIt is respectively signal processing unit and closes optical signal and the phase count of the second conjunction optical signal, y to firstresRepresent the movement in vertical direction distance corresponding to unit-distance code result of two conjunction optical signal phase count.
A kind of two degrees of freedom heterodyne grating interferometer displacement measurement system provided by the present invention and method has the following advantages and salience effect:
This measurement system utilizes grating Littrow principle, realizes optics four sub-structure in the horizontal direction, it is achieved sub-nanometer even more high-resolution and the measurement of precision；Optics two sub-structure is realized, it is achieved nanometer even more high-resolution and the measurement of precision in vertical direction；This measurement system is measured while being capable of two big travel displacement of linear DOF；This system can be measured while only realizing two linear DOF displacements by one-dimensional linear grating, greatly reduces cost of manufacture；Simultaneously this grating interferometer measure system also have simple for structure, volume is little, light weight, be easily installed, facilitate the advantages such as application.It is applied to the displacement measurement of Ultra-precision Stages of Lithography, contrasts laser interferometer measurement system, on the basis of meeting measurement demand, work stage volume, quality can be effectively reduced, be greatly improved the dynamic property of work stage, make work stage overall performance comprehensively improve.In the accurate measurement of the work stage multiple degrees of freedom displacement that this two degrees of freedom heterodyne grating interferometer displacement measurement system applies also for precision machine tool, three coordinate measuring machine, semiconductor detection etc..
Accompanying drawing explanation
Fig. 1 is heterodyne grating interferometer displacement measurement system schematic diagram of the present invention.
Fig. 2 is the internal structure schematic diagram of grating interferometer embodiment of the present invention.
Fig. 3 is the inventive method measuring principle schematic diagram.
In figure, 1 two-frequency laser, 2 grating interferometers, 3 measure grating, 4 receptors, 5 signal processing units；6 lateral displacement Amici prisms, 7 first polarization splitting prisms, 8 second polarization splitting prisms, 9 with reference to grating, 10 first quarter wave plates, 11 second quarter wave plates, 12 the 3rd quarter wave plates, 13 the 4th quarter wave plates, 14 first reflecting optics, 15 second reflecting mirrors, 16 the 3rd reflecting mirrors, 17 first fiber couplers, 18 second fiber couplers, 19 carry reeded mounting seat, 20 second lateral displacement spectroscopes, 21 the 3rd polarization spectroscopes, 22 the 5th 1/4 slides, 23 the 6th 1/4 slides, 24 the 4th reflecting mirrors, 25 the 5th reflecting mirrors, 26 the 6th reflecting mirrors.
Detailed description of the invention
Below in conjunction with the accompanying drawings structure, principle and the detailed description of the invention of the present invention is described in further detail.
Seeing Fig. 1 and Fig. 2, the two degrees of freedom heterodyne grating interferometer displacement measurement system that the present invention provides includes two-frequency laser 1, grating interferometer 2, measures grating 3, receptor 4 and signal processing unit 5；Described grating interferometer includes with installing the base of groove, lateral displacement Amici prism the 6, first polarization splitting prism the 7, second polarization splitting prism 8, reference grating the 9, first quarter wave plate the 10, second quarter wave plate the 11, the 3rd quarter wave plate the 12, the 4th quarter wave plate the 13, first reflecting mirror the 14, second reflecting mirror the 15, the 3rd reflecting mirror the 16, first fiber coupler 17 and the second fiber coupler 18.
Two-frequency laser 1 outgoing double-frequency laser is to after lateral displacement Amici prism 6, and transmission light enters the first polarization splitting prism 7, and reflection light enters the second polarization splitting prism 8；The light being incident to the first polarization splitting prism 7 is producing transmission light and reflection light after the first polarization splitting prism 7；After wherein transmission light sequentially passes through first quarter wave plate the 10, first reflecting mirror 14, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the negative one order diffraction light formed is along backtracking, again pass by the first reflecting mirror 14 and the first quarter wave plate 10 is incident to the first polarization splitting prism 7 and reflects, form the first measurement light；After reflection light sequentially passes through the 4th quarter wave plate the 13, second reflecting mirror 15, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the positive first-order diffraction light formed is along backtracking, again pass by the second reflecting mirror (15) and the 4th quarter wave plate 13 is incident to the first polarization splitting prism 7 and transmission occurs, form the second measurement light；The light being incident to the second polarization splitting prism 8 is producing transmission light and reflection light after the second polarization splitting prism 8；After wherein transmission light sequentially passes through the 3rd quarter wave plate the 12, the 3rd reflecting mirror 16, measuring the Littrow angle of grating 3 with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating 3, the positive first-order diffraction light formed is along backtracking, again pass by the 3rd reflecting mirror 16 and the 3rd quarter wave plate 12 is incident to the second polarization splitting prism 8 and reflects, form the 3rd measurement light；After reflection light sequentially passes through the second quarter wave plate 11, it is that angle of incidence is beaten concurrently to gain interest on reference to grating 9 and penetrated with the corresponding Littrow angle with reference to grating 9, the positive first-order diffraction light formed is along backtracking, again pass by the 1st/4th wave plate 12 be incident to the second polarization splitting prism 8 and transmission occurs, form the first bundle reference light；First measurement light and the second measurement light are incident to the fiber coupler 17 of built-in lens and deflection film and obtain the first conjunction optical signal after realizing closing light at the first polarization splitting prism 7, then through intelligent acess receptor 4；3rd measurement light and the first bundle reference light are incident to the fiber coupler 17 of built-in lens and deflection film and obtain the second conjunction optical signal after finally realizing closing light at the second polarization splitting prism 8, again through intelligent acess receptor 4, two bundles close optical signals and transfer the signal of telecommunication in receptor 4 to, then input to signal processing unit 5 and process；When being fixed on when measuring the linear movement that grating 3 does two degree of freedom relative to grating interferometer 2 of sports platform, signal processing unit 5 will output two degrees of freedom linear displacement.
Concrete measuring method
1) horizontal direction displacement measurement:
(frequency is f to the double frequency cross-polarization laser of two-frequency laser outgoing1P-polarization light, frequency is f2S polarized light), in lateral displacement Amici prism 6 is incident to the first polarization splitting prism 7, double frequency cross-polarization laser after the first polarization spectroscope 7, frequency f1P-polarization light transmission, frequency f2S polarized light reflection；Frequency f1P-polarization light transmission after through fast axle be 45 ° arrange quarter wave plates after become left-hand polarization light, left-hand polarization light is incident to measure grating 3 with Littrow condition after being reflected mirror and concurrently gains interest and penetrate,-1 order diffraction light returns along original optical path, become s polarized light after again passing by quarter wave plate, reflect to PBS；Frequency f2S polarized light reflection after through fast axle be 45 ° arrange quarter wave plates after become left-hand polarization light, left-hand polarization light is incident to measure grating 3 with Littrow condition after being reflected mirror and concurrently gains interest and penetrate, + 1 order diffraction light returns along original optical path, become p-polarization light after again passing by quarter wave plate, transmission occurs to PBS；Two-way is measured light coincidence and is incident to fiber coupler (built-in lens and polaroid) formation optical beat signal and through fiber-optic transfer to electronic phase angle meter, and two-frequency laser exports reference signal to electronic phase angle meter simultaneously；Electronic phase angle meter utilizes reference signal and measures grating moving displacement information in signal reading measurement signal.
According to Grating Doppler Effect, when measurement grating moves Δ x along grating vector direction, ± 1 grade of phase place measuring light is changed to:
In formula, p represents measurement grating 3 grating constant, Φ+1Represent+1 order diffraction light phase change, Φ-1Represent-1 order diffraction light phase change.
The light vector of the double-frequency laser of laser emitting is:
E0For the electric field intensity amplitude of double-frequency laser, bias for start-phase.f1It is the frequency of wherein light beam, f2It it is the frequency of other light beam.
First light path measuring light is: BS (T) → PBS1 (T) → QW1 (45) → M1 (R) → G3 (D) → M1 (R) → QW1 (45) → PBS1 (R) → L → P (45), then the light vector of the negative one level measurement light after optical fiber couples is:
E1=JPJPBRJQW(45)JMJGJMJQW(45)JPBTJBS(T)E0(3)
Wherein BS (T) represents that light is through lateral displacement Amici prism transmission, PBS1 (T) represents that light is through the first polarization splitting prism transmission, PBS1 (R) represents that light reflects through the first polarization splitting prism, QW1 (45) represents that light becomes 45 degree of the one 1/4 slides arranged by fast axle, reflect on M1 (R) expression light the first reflecting mirror, G3 (D) represents that light is measuring generation diffraction on grating, L represents the lens being built in fiber coupler, P (45) represents that being built in optical fiber is coupled into 45 degree of analyzers arranged.
Second light path measuring light is: BS (T) → PBS1 (R) → QW2 (45) → M2 (R) → G3 (D) → M2 (R) → QW2 (45) → PBS1 (T) → L → P (45), then the light vector of the negative one level measurement light after optical fiber couples is:
E2=JPJPBTJQW(45)JMJGJMJQW(45)JPBRJBS(T)E0(4)
Wherein PBS1 (R) represent light reflect through the first polarization splitting prism, QW2 (45) represent light become 45 degree to arrange by fast axle the 2nd 1/4 slide, M2 (R) expression light the first reflecting mirror on reflect.
Therefore first light and the second measurement actinic light light intensity I are measured1-2For:
Wherein E1Represent the first measurement light light vector, E2Represent the second measurement light light vector, ΦmRepresent the phase place change of the first conjunction optical signal, ImRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f1Represent that the first measurement light and second measures the difference of light frequency.
The first phase place change Φ closing optical signalmFor:
Φm=(Φ2+Δφ2)-(Φ1+Δφ1)(6)
Wherein Δ φ1With Δ φ2Represent that the first measurement light and second measures the phase place change that light produces, Φ owing to measuring grating 3 movement in vertical direction respectively1And Φ2Representing that the first measurement light and second measures the phase place change that light produces owing to measuring grating 3 horizontal motion respectively, N is the electronic fine-grained multiple of signal processing unit 5, kmFor signal processing unit 5 to the first phase count closing optical signal, and first via measurement just-1 order diffraction light, the second drive test amount just+1 order diffraction light, therefore:
Φ2+Δφ2=Φ+1, Φ1+Δφ1=Φ-1。(7)
Owing to first measures the angle of light and the second side amount light about measuring the vertical line symmetry in grating face and using-1 grade and+1 order diffraction light respectively, therefore:
Δφ1=Δ φ2(8)
Then the first phase place closing optical signal changes ΦmFor:
Φ is changed again due to phase placemIt is represented by:
Therefore (9) and (10) must be measured the horizontal direction displacement of grating 3 and are again:
Wherein xresHorizontal survey distance corresponding to representation unit signal processing unit counting, kmFor signal processing unit 5 to the first counting closing the change of optical signal phase place, Δ x represents measurement grating 3 displacement in the horizontal direction.
2) vertical direction displacement measurement:
(frequency is f to the double frequency cross-polarization laser of two-frequency laser outgoing1P-polarization light, frequency is f2S polarized light), through lateral displacement Amici prism 6 reflect after be incident in the second polarization splitting prism 8, double frequency cross-polarization laser after the first polarization spectroscope 8, frequency f1P-polarization light transmission, frequency f2S polarized light reflection；Frequency f1P-polarization light transmission after through fast axle be 45 ° arrange quarter wave plates after become left-hand polarization light, left-hand polarization light is incident to measure grating (3) with Littrow condition after being reflected mirror and concurrently gains interest and penetrate, + 1 order diffraction light returns along original optical path, become s polarized light after again passing by quarter wave plate, reflect to PBS；Frequency f2S polarized light reflection after through fast axle be 45 ° arrange quarter wave plates after become left-hand polarization light, and be incident to concurrently gain interest with reference to grating penetrate with Littrow condition, + 1 order diffraction light returns along original optical path, becomes p-polarization light after again passing by quarter wave plate, and transmission occurs to PBS；Two-way is measured light coincidence and is incident to fiber coupler (built-in lens and polaroid) formation optical beat signal and through fiber-optic transfer to electronic phase angle meter, and two-frequency laser exports reference signal to electronic phase angle meter simultaneously.Electronic phase angle meter utilizes reference signal and measures grating moving displacement information in signal reading measurement signal.
3rd light path measuring light is: BS (R) → PBS2 (T) → QW4 (45) → M3 (R) → G3 (D) → M3 (R) → QW4 (45) → PBS2 (R) → L → P (45), then the light vector of the negative one level measurement light after optical fiber couples is:
E3=JPJPBRJQW(45)JMJGJMJQW(45)JPBTJBSRE0(12)
Wherein BS (R) represent light through lateral displacement Amici prism reflection, PBS2 (T) represent light through the second polarization splitting prism transmission, PBS2 (R) represent light reflect through the second polarization splitting prism, QW4 (45) represent light become 45 degree to arrange by fast axle the 4th 1/4 slide, M3 (R) expression light the 3rd reflecting mirror on reflect.
The light path of the first reference light is: BS (R) → PBS2 (R) → QW3 (45) → G9 (D) → QW3 (45) → PBS2 (T) → L → P (45), then the light vector of the negative one level measurement light after optical fiber couples is:
E4=JPJPBTJQW(45)JGJQW(45)JPBRJBSRE0(13)
Wherein QW3 (45) represents that light becomes 45 degree of the 3rd 1/4 slides arranged, G9 (D) to represent light light generation diffraction on reference to grating by fast axle.
Therefore the 3rd measurement light and first with reference to actinic light light intensity is:
Wherein E3Represent the first measurement light light vector, E4Represent the second measurement light light vector, ΦnRepresent the phase place change of the second conjunction optical signal, ImRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f1Represent that the first measurement light and second measures the difference of light frequency.
Second closes optical signal phase place is changed to:
Φn=Φ3+Δφ3(15)
Wherein Φ3Represent the phase place change that the 3rd measurement light produces, Δ φ owing to measuring grating 3 horizontal motion3Represent the phase place change that the 3rd measurement light produces owing to measuring grating 3 movement in vertical direction, and owing to the second measurement light, the 3rd measurement light are all+1 order diffraction light measured on grating and are parallel to each other, therefore measurement grating 3 horizontal motion components causes due to Grating Doppler Effect the second measurement light, the 3rd measurement light phase change are identical, i.e.
Φ2=Φ3(16)
There are (6), (8) formula Δ φ again3It is represented by:
Wherein ΦrRepresent that measuring grating catenary motion component makes to measure the inswept one section of grid line of hot spot on grating 3 and the phase place change of the second conjunction optical signal caused due to Grating Doppler Effect, ΦlRepresent measure grating 3 catenary motion component make point diffraction along during incident direction generation relative motion owing to laser doppler causes the phase place of the second conjunction optical signal to change.
If vertical motion component causes light to be L along incident direction displacement, hot spot inswept displacement on grid line is X, and as shown in Figure 3, the optical maser wavelength of laser instrument 1 outgoing is λ, and the grating constant measuring grating 3 is p, and the electronic fine-grained multiple of signal processing unit 5 is N.
Then:
X=x0×Φr(18)
L=l0×Φl(19)
Wherein x0The pattern displacement that representation unit phase count is corresponding, l0The incident direction displacement that representation unit phase count is corresponding, and:
Because laser is to be incident to grating with Littrow condition, so the Littrow angle α that displacement L is corresponding equal to measuring grating with the angle theta of displacement X.
So:
Can be obtained by above formula (18), (19), (20), (21), (22):
Again by formula (16):
Again because of vertical deviation Δ y=Lcos θ
Obtained by formula (19), (24):
In formula, N is the electronic fine-grained multiple of electronic phase angle meter, km、knIt is respectively electronic phase angle meter and closes optical signal and the phase count of the second conjunction optical signal, y to firstresRepresent the movement in vertical direction distance corresponding to unit-distance code result of two conjunction optical signal phase count.
Claims (5)
1. a big stroke two degrees of freedom heterodyne grating interferometer displacement measurement system, this system includes two-frequency laser (1), grating interferometer (2), measures grating (3), receptor (4) and signal processing unit (5)；It is characterized in that: grating interferometer (2) includes with the base (19) installing groove, lateral displacement Amici prism (6), first polarization splitting prism (7), second polarization splitting prism (8), with reference to grating (9), first quarter wave plate (10), second quarter wave plate (11), 3rd quarter wave plate (12), 4th quarter wave plate (13), first reflecting mirror (14), second reflecting mirror (15), 3rd reflecting mirror (16), first fiber coupler (17) and the second fiber coupler (18)；Two-frequency laser (1) outgoing double-frequency laser is to after lateral displacement Amici prism (6), form the first transmission light and the first reflection light, wherein the first transmission light enters the first polarization splitting prism (7), and the first reflection light enters the second polarization splitting prism (8)；First transmission light is producing the second transmission light and the second reflection light after the first polarization splitting prism (7)；After wherein the second transmission light sequentially passes through the first quarter wave plate (10), the first reflecting mirror (14), measuring the Littrow angle of grating (3) with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating (3), the negative one order diffraction light formed is along backtracking, again pass by the first reflecting mirror (14) and the first quarter wave plate (10) is incident to the first polarization splitting prism (7) and reflects, form the first measurement light；After second reflection light sequentially passes through the second quarter wave plate (11), the second reflecting mirror (15), measuring the Littrow angle of grating (3) with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating (3), the positive first-order diffraction light formed is along backtracking, again pass by the second reflecting mirror (15) and the second quarter wave plate (11) is incident to the first polarization splitting prism (7) and transmission occurs, form the second measurement light；First reflection light is producing the 3rd transmission light and the 3rd reflection light after the second polarization splitting prism (8)；After wherein the 3rd transmission light sequentially passes through the 4th quarter wave plate (13), the 3rd reflecting mirror (16), measuring the Littrow angle of grating (3) with correspondence is that angle of incidence is beaten and penetrated measuring concurrently to gain interest on grating (3), the positive first-order diffraction light formed is along backtracking, again pass by the 3rd reflecting mirror (16) and the 4th quarter wave plate (13) is incident to the second polarization splitting prism (8) and reflects, form the 3rd measurement light；After 3rd reflection light sequentially passes through the 3rd quarter wave plate (12), it is that angle of incidence is beaten concurrently to gain interest on reference to grating (9) and penetrated with the corresponding Littrow angle with reference to grating (9), the positive first-order diffraction light formed is along backtracking, again pass by the 3rd quarter wave plate (12) be incident to the second polarization splitting prism (8) and transmission occurs, form the first bundle reference light；First measurement light and the second measurement light are incident to the fiber coupler (17) of built-in lens and deflection film after the first polarization splitting prism (7) place realizes closing light and obtain the first conjunction optical signal, then through intelligent acess receptor (4)；3rd measurement light and the first bundle reference light are finally incident to the fiber coupler (17) of built-in lens and deflection film after the second polarization splitting prism (8) place realizes closing light and obtain the second conjunction optical signal, again through intelligent acess receptor (4), two bundles close optical signals and transfer the signal of telecommunication in receptor (4) to, then input to signal processing unit (5) and process；When being fixed on the linear movement that the measurement grating (3) of sports platform does two degree of freedom relative to grating interferometer (2), signal processing unit (5) will output two degrees of freedom linear displacement.
One the most according to claim 1 big stroke two degrees of freedom heterodyne grating interferometer displacement measurement system, it is characterised in that: measuring grating is one-dimensional linear grating.
One the most according to claim 1 big stroke two degrees of freedom heterodyne grating interferometer displacement measurement system, it is characterised in that: the 1/4 fast axle of slide becomes 45 degree of layouts with polarization of light direction.
One the most according to claim 1 big stroke two degrees of freedom heterodyne grating interferometer displacement measurement system, it is characterised in that: lateral displacement Amici prism (6), the first polarization splitting prism (7), the second polarization splitting prism (8), reference grating (9), the first reflecting mirror (14) and the second reflecting mirror (15) they are all to be fixed on by the way of bonding in groove in mounting seat (19).
5. use a kind of big stroke two degrees of freedom heterodyne grating interferometer displacement measurement method of system as claimed in claim 1, it is characterised in that the method comprises the steps:
1) horizontal direction displacement measurement:
First measures light and second measures the first conjunction optical signal light intensity I that light is formed1-2For:
Wherein E1Represent the first measurement light light vector, E2Represent the second measurement light light vector, ΦmRepresent the phase place change of the first conjunction optical signal, ImRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f1Represent that the first measurement light and second measures the difference of light frequency；
The first phase place change Φ closing optical signalmFor:
Φm=(Φ2+Δφ2)-(Φ1+Δφ1)
Wherein Φ1And Φ2Represent that the first measurement light and second measures the phase place change that light produces, Δ φ owing to measuring grating (3) horizontal motion respectively1With Δ φ2Represent that the first measurement light and second measures the phase place change that light produces owing to measuring grating (3) movement in vertical direction respectively, and:
Δφ1=Δ φ2
In formula, N is the electronic fine-grained multiple of signal processing unit (5), kmFor signal processing unit (5), the first counting closing the change of optical signal phase place, Δ x are represented the displacement measuring grating (3) in the horizontal direction；
Measuring grating (3) displacement x in the horizontal direction is:
Wherein xresRepresent the horizontal survey distance corresponding to unit of phase counting of signal processing unit (5)；
2) vertical direction displacement measurement:
The second conjunction optical signal light intensity I that a, the 3rd measurement light and the first reference light are formed3-4Qiang Wei:
Wherein E3Represent the 3rd measurement light light vector, E4Represent the first reference light light vector, ΦnRepresent the second conjunction optical signal phase place change, InRepresent the DC component of the first conjunction optical signal light intensity signal light intensity, Δ f2Represent that the first measurement light and second measures the difference of light frequency；
Second closes optical signal phase place change ΦnFor:
Φn=Φ3+Δφ3
Wherein Φ3Represent the phase place change that the 3rd measurement light produces, Δ φ owing to measuring grating (3) horizontal motion3Represent the phase place change that the 3rd measurement light produces owing to measuring grating (3) movement in vertical direction, and: Φ3=Φ2；
3rd measures light phase changes delta φ3It is expressed as:
Wherein ΦrRepresent and measure the inswept one section of grid line of hot spot that grating catenary motion component makes to measure (3) on grating and the phase place change of the second conjunction optical signal caused due to Grating Doppler Effect, ΦlRepresent measure grating (3) catenary motion component make point diffraction along during incident direction generation relative motion owing to laser doppler causes the phase place of the second conjunction optical signal to change；
The displacement X that b, measurement grating (3) vertical motion component cause hot spot inswept on grid line is:
X=x0×Φr
Measuring grating (3) vertical motion component causes the optical grating diffraction point along the displacement L of incident direction to be:
L=l0×Φl
And:
Wherein, θ represents the angle of displacement X and displacement Y, and θ represents the Littrow angle corresponding with measuring grating (3), x0Representation unit phase count correspondence pattern displacement, l0The incident direction displacement that representation unit phase count is corresponding, p represents the grating constant measuring grating, and N represents the electronic fine-grained multiple of signal processing unit, and λ is two-frequency laser shoot laser wavelength, and N is the electronic fine-grained multiple of signal processing unit (5)；
c、ΦlWith ΦrRelational representation be:
Thus:
Pass through ΦlVertical deviation Δ y:
Wherein km、knIt is respectively signal processing unit and closes optical signal and the phase count of the second conjunction optical signal, y to firstresRepresent the movement in vertical direction distance corresponding to unit-distance code result of two conjunction optical signal phase count.
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