CN102289152A - optical system wave aberration detection device - Google Patents
optical system wave aberration detection device Download PDFInfo
- Publication number
- CN102289152A CN102289152A CN2011101278523A CN201110127852A CN102289152A CN 102289152 A CN102289152 A CN 102289152A CN 2011101278523 A CN2011101278523 A CN 2011101278523A CN 201110127852 A CN201110127852 A CN 201110127852A CN 102289152 A CN102289152 A CN 102289152A
- Authority
- CN
- China
- Prior art keywords
- prism
- optical system
- optical fiber
- polarization splitting
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention discloses an optical system wave aberration detection device, relates to the technical field of optical measurement and solves the problem that the existing optical system wave aberration detection device has deflection error and translation error in the phase shift process. Two beams of common-path orthogonal line polarized light emitted from a light splitting system are split by a second polarization splitting prism, a reference light and a testing light are coupled to a reference optical fiber and a testing optical fiber with a motor-driven polarization controller through a first coupling lens and a second coupling lens; a light emitted from the testing optical fiber is irradiated to a coated end face of the reference optical fiber by a detected optical system and is reflected, a first pyramid prism is adjusted so that a test spherical wave and a reference spherical wave generate interference, a second pyramid lens which is insensitive to the deflection error is moved by a piezoelectric ceramic so as to realize the phase shift process; a second plane mirror enables the wave aberration detection device to be insensitive to the translation error in the phase shift process; an interference image is acquired by using a photoelectric detector, and is input into the computer to be processed and analyzed by using a phase shift algorithm; therefore, the optical system wave aberration is obtained.
Description
Technical field
The present invention relates to field of optical measuring technologies, be specifically related to a kind of optical system wavefront aberration pick-up unit.
Background technology
The extreme ultraviolet lithography is the photoetching technique of future generation that is based upon on the conventional optical lithography basis, and it has inherited the development result of present optical lithography to greatest extent.The operation wavelength of extreme ultraviolet photolithographic is the extreme ultraviolet waveband of 13～14nm, all with traditional optical lithography great difference is arranged at aspects such as light source technology, optical system, extreme ultraviolet multilayer technique, reflective masks technology, superhigh precision control technology, resist technology, optical element processing/detection techniques.As the requirement of light projection photoetching objective lens in order to realize that photoetching resolution and critical dimension are controlled of one of litho machine core cell system, the RMS wave aberration of optical system should be less than λ/20.High-precision optical system like this just needs more high-precision test device, the advanced at present U.S. Zygo and the correlation interferometer product of Wyko company generally all adopt the standard spherical mirror head to produce the reference sphere ground roll, but because influences such as optics processing and assembling, the aberration that causes the reference sphere ground roll is all greater than λ/50, can't further reduce, this has just directly caused the accuracy of detection of current interferometer can only reach λ/20-λ/50 (λ=632.8nm), can not satisfy the detection requirement of extreme ultraviolet photolithographic projection objective system wave aberration far away.
Therefore, the reference sphere ground roll of searching superhigh precision just becomes the key issue place of improving the pick-up unit measuring accuracy.
Raymond N.Smart and J.Strong have invented point-diffraction interferometer in 1972, the spherical wave of the approximate ideal that it produces by the aperture diffraction has been eliminated the influence of conventional interferometer reference wave surface error as the reference ripple, has improved accuracy of detection greatly.Along with improving constantly that optical detection requires, point-diffraction interferometer shows its advantage just day by day, and is widely used in during high-precision optical detects, for the high Precision Detection of extreme ultraviolet photolithographic projection objective system wave aberration provides possibility.
Though point-diffraction interferometer has solved the problem of reference sphere ground roll, the nonlinearity erron of some error sources that exist in the point-diffraction interferometer such as the unstable error of light source, photodetector, the quantization error of photodetector, environmental error etc. are still limiting the accuracy of detection of interferometer.
People such as Bruning had proposed the movable phase interfere art in 1974, and he is incorporated into the locking phase Detection Techniques in the Communication Theory in the optical interferometry technology, is a great development in the area of computer aided interfere measurement technique.Its principle is to introduce orderly displacement between the phase differential of two coherent lights of interferometer, and corresponding mobile is also made in the position of interference fringe when reference light path (or phase place) changes.In this process, with photodetector interferogram is sampled, obtain the digital signal that computing machine can be handled through the image pick-up card digitizing, try to achieve PHASE DISTRIBUTION according to certain mathematical model according to intensity variations by computing machine at last.The advantage of movable phase interfere art is to calculate simply, speed is fast, precision is high, and gordian technique is to handle the data of measuring by Computer Analysis, thus the phase value that acquisition is surveyed.
In order to realize that optical detection develops to superhigh precision, the combination of point-diffraction interferometer and movable phase interfere art is an inexorable trend beyond doubt.
A kind of phase shift point-diffraction interferometer is by the object plane aperture plate, transmission grating, image planes aperture plate and photodetector are formed, produce desirable spherical wave after the measured optical unit or system's convergence by the aperture diffraction on the object plane aperture plate, through transmission grating generation diffraction, and on the image planes aperture plate, form some orders of diffraction, make+1 grade (or 0 grade) diffraction light produce the ideal ball ground roll as reference light by an aperture diffraction on the image planes aperture plate, 0 grade (or+1 grade) as test light, other orders of diffraction are inferior is blocked by the opaque section of image planes aperture plate diffraction light through window on the image planes aperture plate.Test light and reference light form interference fringe on photodetector, realized phase shift by horizontal mobile transmission grating, adopt the phase shift algorithm that striped is analyzed, and have improved measuring accuracy.
Another kind of phase shift point-diffraction interferometer places transmission grating before the object plane aperture plate, and the object plane aperture plate contains aperture and a bigger window, and 0 order diffraction light produces desirable spherical wave through small holes, and+1 order diffraction light directly passes through window.Two-beam is after tested optical element or system, be focused on the image planes aperture plate, here 0 order diffraction light process window is as test light, + 1 order diffraction light through the small holes diffraction as reference light, this phase shift point-diffraction interferometer two-beam is all only through an aperture filtering, a kind of point-diffraction interferometer has improved the light intensity of reference light relatively, has improved fringe contrast simultaneously.
Gary E.Sommargren was at patent US6909 in 2005,510B2 " Application of the phaseshifting diffraction interferometer for measuring convex mirrors and negative lenses " adopts the end face of two flexible fibre cores to replace aperture to constitute two optical fiber point-diffraction interferometers, the light of measuring fiber outgoing shines on the reference optical fiber end face by tested optical element, the diffracted wave of reflection back and reference optical fiber outgoing is interfered, on photodetector, form interference fringe through imaging len, pick-up unit has been introduced phase shift in optical system for testing, final two optical fiber phase shift point diffraction interferometers have been realized the high Precision Detection to convex lens and negative lens.
Yet above-mentioned existing wave aberration pick-up unit can't be eliminated Run-out error and traversing error in the phase shift process, and this just might cause the out of true of testing result, thereby has brought difficulty for the detection that realizes superhigh precision.
Summary of the invention
The present invention provides a kind of optical system wavefront aberration pick-up unit for solving existing optical system wavefront aberration pick-up unit exists Run-out error and traversing error in the phase shift process problem.
Optical system wavefront aberration pick-up unit, this device comprise beam splitting system, second polarization splitting prism, first coupled lens, second coupled lens, reference optical fiber, measuring fiber, the first electronic Polarization Controller, the second electronic Polarization Controller, tested optical system, photodetector, computing machine; Described beam splitting system comprises laser instrument, neutral density filter, 1/2nd wave plates, first polarization splitting prism, first quarter-wave plate, second quarter-wave plate, first prism of corner cube, second prism of corner cube, first plane mirror, second plane mirror; The light beam of described laser emitting is behind neutral density filter, 1/2nd wave plates and first polarization splitting prism, the linearly polarized light that is divided into two bundle quadratures, behind first quarter-wave plate and first prism of corner cube of the first bunch polarized light through the horizontal direction of first polarization splitting prism, reflex to first polarization splitting prism through first plane mirror; Behind second quarter-wave plate and second prism of corner cube of the second bunch polarized light through the first polarization splitting prism vertical direction, reflex to first polarization splitting prism through second plane mirror, the two-beam of the described first polarization splitting prism outgoing through second polarization splitting prism after beam split, reference beam is coupled in the reference optical fiber through first coupled lens, test beams is coupled in the measuring fiber through second coupled lens, the described first electronic Polarization Controller and the second electronic Polarization Controller are controlled the polarization state of reference beam and test beams respectively, the light beam of described measuring fiber outgoing focuses on the outgoing end face of reference optical fiber through tested optical system, the interferogram of the test beams of photodetector acceptance test optical fiber outgoing and the reference beam of reference optical fiber end face reflection, interferogram is sent to computing machine, obtains optical system wavefront aberration.
Principle of work of the present invention: two bundles of beam splitting system outgoing of the present invention are total to the orhtogonal linear polarizaiton light of light path jointly through the second polarization splitting prism beam split, reference light and test light are coupled in the reference optical fiber and measuring fiber that has electronic Polarization Controller through first coupled lens and second coupled lens respectively, the light of measuring fiber outgoing reflects to the plated film end face of reference optical fiber through tested irradiation optical system, thereby adjusting first prism of corner cube makes test ball ground roll and reference sphere ground roll light path coupling produce interference, utilize piezoelectric ceramics to move insensitive second prism of corner cube of Run-out error is realized the phase shift process, and adding second plane mirror makes insensitive to the traversing error in the phase shift process, utilize photodetector to gather interferogram, send into computing machine and utilize the phase shift algorithm to carry out data processing and analysis, promptly obtain tested optical system wavefront aberration.
Beneficial effect of the present invention: the present invention adopts two optical fiber, the standard ball ground roll that the measuring fiber diffraction comes out after tested optical system focuses on as test light, the standard ball ground roll that the direct diffraction of reference optical fiber goes out is as reference light, adopt piezoelectric ceramics that test waves is carried out phase shift, utilize the use-pattern of prism of corner cube and arrangement of mirrors to eliminate Run-out error and translation error in the phase shift process, finally can realize the superhigh precision of optical system wavefront aberration is detected.
Description of drawings
Fig. 1 is the synoptic diagram of optical system wavefront aberration pick-up unit of the present invention;
Among the figure: 1, laser instrument, 2, neutral density filter, 3, / 2nd wave plates, 4, first polarization splitting prism, 5, first quarter-wave plate, 6, second quarter-wave plate, 7, first prism of corner cube, 8, second prism of corner cube, 9, piezoelectric ceramics, 10, first plane mirror, 11, second plane mirror, 12, second polarization splitting prism, 13, first coupled lens, 14, second coupled lens, 15, reference optical fiber, 16, measuring fiber, 17, the first electronic Polarization Controller, 18, the second electronic Polarization Controller, 19, tested optical system, 20, photodetector, 21, computing machine.
Embodiment
Embodiment one, in conjunction with Fig. 1 present embodiment is described, this device comprises beam splitting system, second polarization splitting prism 12, first coupled lens 13, second coupled lens 14, reference optical fiber 15, measuring fiber 16, first electronic Polarization Controller 17, the second electronic Polarization Controller 18, tested optical system 19, photodetector 20, computing machine 21; Described beam splitting system comprises laser instrument 1, neutral density filter 2,1/2nd wave plates 3, first polarization splitting prism 4, first quarter-wave plate 5, second quarter-wave plate 6, first prism of corner cube 7, second prism of corner cube 8, first plane mirror 10, second plane mirror 11; The light beam of described laser instrument 1 outgoing is behind neutral density filter 2,1/2nd wave plates 3 and first polarization splitting prism 4, the linearly polarized light that is divided into two bundle quadratures, behind first quarter-wave plate 5 and first prism of corner cube 7 of the first bunch polarized light through the horizontal direction of first polarization splitting prism 4, reflex to first polarization splitting prism 4 through first plane mirror 10; Behind second quarter-wave plate 6 and second prism of corner cube 8 of the second bunch polarized light through first polarization splitting prism, 4 vertical direction, reflex to first polarization splitting prism 4 through second plane mirror 11, the two-beam of described first polarization splitting prism 4 outgoing is through the 12 back beam split of second polarization splitting prism, reference beam is coupled in the reference optical fiber 15 through first coupled lens 13, test beams is coupled in the measuring fiber 16 through second coupled lens 14, the described first electronic Polarization Controller 17 and the second electronic Polarization Controller 18 are controlled the polarization state of reference beam and test beams respectively, the light beam of described measuring fiber 16 outgoing focuses on the outgoing end face of reference optical fiber 15 through tested optical system 19, the interferogram of the test beams of photodetector 20 acceptance test optical fiber 16 outgoing and the reference beam of reference optical fiber 15 end face reflections, interferogram is sent to computing machine 21, obtains optical system wavefront aberration.
The outgoing end face of the described reference optical fiber 15 of present embodiment is positioned on the picture plane of tested optical system 19, and the outgoing end face of measuring fiber 16 is positioned on the object plane of tested optical system 19.
Behind first quarter-wave plate 5 and first prism of corner cube 7 of the described first bunch polarized light of present embodiment through the horizontal direction of first polarization splitting prism 4, change of polarized direction 90 degree of the first bunch polarized light.Behind second quarter-wave plate 6 and second prism of corner cube 8 of the second bunch polarized light through first polarization splitting prism, 4 vertical direction, change of polarized direction 90 degree of the second bunch polarized light.
The described beam splitting system of present embodiment also comprises piezoelectric ceramics 9, adopts piezoelectric ceramics 9 to move second prism of corner cube 8 and realizes that step-length is the phase shift of pi/2.
The linearly polarized light of laser instrument 1 outgoing of the present invention is through the energy of neutral density filter 2 attenuate light, light beam is adjusted the polarization direction by 1/2nd wave plates 3, the linearly polarized light that is divided into two bundle quadratures by first polarization splitting prism 4, a branch of reflection, a branch of transmission, two bunch polarized lights are respectively in the process of first plane mirror 10 and second plane mirror, 11 reflected backs, first polarization splitting prism 4, pass through first quarter-wave plate 5 twice respectively, second quarter-wave plate 6 and first prism of corner cube 7, second prism of corner cube 8, its polarization direction changes 90 degree separately, previous folded light beam transmission, previous transmitted light beam reflection, and realize that by piezoelectric ceramics 9 step-lengths are the phase shift of pi/2, from the two-beam of first polarization splitting prism, 4 outgoing through the 12 back beam split of second polarization splitting prism, reference light and test light are coupled in reference optical fiber 15 and the measuring fiber 16 through first coupled lens 13 and second coupled lens 14 respectively, two optical fiber are respectively by the first electronic Polarization Controller 17 and the second electronic Polarization Controller 18 control polarization states, the light of measuring fiber 16 outgoing focuses on the plated film end face of reference optical fiber 15 through tested optical system 19, adjusting first prism of corner cube 7 makes the test ball ground roll that reflects on reference optical fiber 15 end faces and the reference sphere ground roll of reference optical fiber 15 outgoing interfere, utilize photodetector 20 to gather interferogram, send into computing machine 21 and utilize the phase shift algorithm to carry out data processing and analysis, promptly obtain optical system wavefront aberration.
In said process, can be by rotation 1/2 wave plate 3, adjust the first electronic Polarization Controller 17 and the second electronic Polarization Controller 18 and adjust the relative intensity of two-beam, to reach best fringe contrast, introduced insensitive first prism of corner cube 7 of Run-out error and second prism of corner cube 8, adjust the optical path difference of test light and reference light by moving first prism of corner cube 7, move second prism of corner cube 8 by piezoelectric ceramics 9 and realize that step-length is the phase shift of pi/2, make measurement result to second prism of corner cube 8 traversing insensitive in the phase shift process by introducing second plane mirror 11, realize the common light path of two-beam by introducing first plane mirror 10, make the light beam split of light path altogether of two bundles by introducing second polarization splitting prism 12, by making reference optical fiber 15 end face coatings, improve the utilization factor of light intensity.
Claims (5)
1. optical system wavefront aberration pick-up unit, this device comprises beam splitting system, second polarization splitting prism (12), first coupled lens (13), second coupled lens (14), reference optical fiber (15), measuring fiber (16), the first electronic Polarization Controller (17), the second electronic Polarization Controller (18), tested optical system (19), photodetector (20), computing machine (21); It is characterized in that described beam splitting system comprises laser instrument (1), neutral density filter (2), 1/2nd wave plates (3), first polarization splitting prism (4), first quarter-wave plate (5), second quarter-wave plate (6), first prism of corner cube (7), second prism of corner cube (8), first plane mirror (10), second plane mirror (11); The light beam of described laser instrument (1) outgoing is behind neutral density filter (2), 1/2nd wave plates (3) and first polarization splitting prism (4), the linearly polarized light that is divided into two bundle quadratures, behind first quarter-wave plate (5) and first prism of corner cube (7) of the first bunch polarized light through the horizontal direction of first polarization splitting prism (4), reflex to first polarization splitting prism (4) through first plane mirror (10); Behind second quarter-wave plate (6) and second prism of corner cube (8) of the second bunch polarized light through first polarization splitting prism (4) vertical direction, reflex to first polarization splitting prism (4) through second plane mirror (11), the two-beam of described first polarization splitting prism (4) outgoing is through second polarization splitting prism (12) back beam split, reference beam is coupled in the reference optical fiber (15) through first coupled lens (13), test beams is coupled in the measuring fiber (16) through second coupled lens (14), the described first electronic Polarization Controller (17) and the second electronic Polarization Controller (18) are controlled the polarization state of reference beam and test beams respectively, the light beam of described measuring fiber (16) outgoing focuses on the outgoing end face of reference optical fiber (15) through tested optical system (19), the interferogram of the reference beam of the test beams of photodetector (20) acceptance test optical fiber (16) outgoing and reference optical fiber (15) end face reflection, interferogram is sent to computing machine (21), obtains optical system wavefront aberration.
2. optical system wavefront aberration pick-up unit according to claim 1, it is characterized in that, the outgoing end face of described reference optical fiber (15) is positioned on the picture plane of tested optical system (19), and the outgoing end face of measuring fiber (16) is positioned on the object plane of tested optical system (19).
3. optical system wavefront aberration pick-up unit according to claim 1, it is characterized in that, behind first quarter-wave plate (5) and first prism of corner cube (7) of the described first bunch polarized light through the horizontal direction of first polarization splitting prism (4), change of polarized direction 90 degree of the first bunch polarized light.
4. optical system wavefront aberration pick-up unit according to claim 1, it is characterized in that, behind second quarter-wave plate (6) and second prism of corner cube (8) of the second bunch polarized light through first polarization splitting prism (4) vertical direction, change of polarized direction 90 degree of the second bunch polarized light.
5. optical system wavefront aberration pick-up unit according to claim 1 is characterized in that, described beam splitting system also comprises piezoelectric ceramics (9), adopts piezoelectric ceramics (9) to move second prism of corner cube (8) and realizes that step-length is the phase shift of pi/2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101278523A CN102289152B (en) | 2011-05-18 | 2011-05-18 | Optical system wave aberration detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101278523A CN102289152B (en) | 2011-05-18 | 2011-05-18 | Optical system wave aberration detection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102289152A true CN102289152A (en) | 2011-12-21 |
| CN102289152B CN102289152B (en) | 2012-11-07 |
Family
ID=45335666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101278523A Expired - Fee Related CN102289152B (en) | 2011-05-18 | 2011-05-18 | Optical system wave aberration detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102289152B (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677599A (en) * | 2015-02-04 | 2015-06-03 | 中国科学院西安光学精密机械研究所 | Online Laser monitoring system |
| CN104748946A (en) * | 2015-03-31 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Measuring method for optical fiber diffraction reference wavefront deviations of optical fiber point diffraction interferometer |
| CN104792424A (en) * | 2015-03-31 | 2015-07-22 | 中国科学院长春光学精密机械与物理研究所 | Equal optical path position adjusting method of optical fiber point diffraction interferometer |
| CN104897274A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Anti-polarization aliasing double-path circular polarization interference and single-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104897271A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Polarization resistance single line polarization interference and single Woodward prism spectral homodyne laser vibrometer |
| CN105424325A (en) * | 2015-12-24 | 2016-03-23 | 中国科学院上海光学精密机械研究所 | Point diffraction interference wave aberration measurement instrument and optical system wave aberration detection method |
| CN106768886A (en) * | 2016-12-16 | 2017-05-31 | 中国科学院光电研究院 | A kind of deep ultraviolet optical system wave aberration detection means and method |
| CN106840366A (en) * | 2017-04-21 | 2017-06-13 | 吉林大学 | A kind of homodyne orthogonal fibre interferes vibration detecting device |
| CN108225744A (en) * | 2018-01-31 | 2018-06-29 | 中国科学院西安光学精密机械研究所 | The more field image quality detecting devices of optical lens and method based on prism of corner cube |
| CN108827595A (en) * | 2018-03-12 | 2018-11-16 | 西安应用光学研究所 | Detection device based on adaptation theory optical system mismachining tolerance |
| CN110849593A (en) * | 2019-11-22 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator |
| CN111076904A (en) * | 2019-12-27 | 2020-04-28 | 山东大学 | Dynamic wavefront aberration detection device and method for high-power thin-chip laser |
| CN114088017A (en) * | 2021-11-02 | 2022-02-25 | 武汉联胜光电技术有限公司 | Device and method for detecting angle and flatness of customized optical fiber end face |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5933236A (en) * | 1994-11-28 | 1999-08-03 | The Regents Of The University Of California | Phase shifting interferometer |
| US6704112B1 (en) * | 2000-10-17 | 2004-03-09 | The Regents Of The University Of California | Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses |
| US20040061866A1 (en) * | 2002-09-27 | 2004-04-01 | The Regents Of The University Of California | Absolute calibration of optical flats |
| CN101672632A (en) * | 2009-10-10 | 2010-03-17 | 北京理工大学 | Optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method |
-
2011
- 2011-05-18 CN CN2011101278523A patent/CN102289152B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5933236A (en) * | 1994-11-28 | 1999-08-03 | The Regents Of The University Of California | Phase shifting interferometer |
| US6704112B1 (en) * | 2000-10-17 | 2004-03-09 | The Regents Of The University Of California | Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses |
| US20040061866A1 (en) * | 2002-09-27 | 2004-04-01 | The Regents Of The University Of California | Absolute calibration of optical flats |
| CN101672632A (en) * | 2009-10-10 | 2010-03-17 | 北京理工大学 | Optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method |
Non-Patent Citations (1)
| Title |
|---|
| 吴朔等: "光纤点衍射干涉仪测量凹球面面形", 《中国仪器仪表学会第九届青年学术会议论文集》, 31 December 2007 (2007-12-31), pages 238 - 241 * |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677599A (en) * | 2015-02-04 | 2015-06-03 | 中国科学院西安光学精密机械研究所 | Online Laser monitoring system |
| CN104677599B (en) * | 2015-02-04 | 2017-04-19 | 中国科学院西安光学精密机械研究所 | Online Laser monitoring system |
| CN104792424B (en) * | 2015-03-31 | 2017-12-26 | 中国科学院长春光学精密机械与物理研究所 | Optical fiber point-diffraction interferometer aplanatism location regulation method |
| CN104748946A (en) * | 2015-03-31 | 2015-07-01 | 中国科学院长春光学精密机械与物理研究所 | Measuring method for optical fiber diffraction reference wavefront deviations of optical fiber point diffraction interferometer |
| CN104792424A (en) * | 2015-03-31 | 2015-07-22 | 中国科学院长春光学精密机械与物理研究所 | Equal optical path position adjusting method of optical fiber point diffraction interferometer |
| CN104748946B (en) * | 2015-03-31 | 2018-07-27 | 中国科学院长春光学精密机械与物理研究所 | Optical fiber point-diffraction interferometer optical fiber diffraction reference wavefront bias measurement method |
| CN104897274A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Anti-polarization aliasing double-path circular polarization interference and single-Wollaston prism light-splitting type homodyne laser vibration meter |
| CN104897271A (en) * | 2015-06-12 | 2015-09-09 | 哈尔滨工业大学 | Polarization resistance single line polarization interference and single Woodward prism spectral homodyne laser vibrometer |
| CN104897274B (en) * | 2015-06-12 | 2016-06-08 | 哈尔滨工业大学 | Two-way circular polarization is interfered and single Wo Lasite prismatic decomposition formula homodyne laser vibration measurer |
| CN105424325A (en) * | 2015-12-24 | 2016-03-23 | 中国科学院上海光学精密机械研究所 | Point diffraction interference wave aberration measurement instrument and optical system wave aberration detection method |
| CN105424325B (en) * | 2015-12-24 | 2018-03-20 | 中国科学院上海光学精密机械研究所 | The detection method of point-diffraction interference wave aberration measuring instrument and optical system wavefront aberration |
| CN106768886A (en) * | 2016-12-16 | 2017-05-31 | 中国科学院光电研究院 | A kind of deep ultraviolet optical system wave aberration detection means and method |
| CN106768886B (en) * | 2016-12-16 | 2019-03-08 | 中国科学院光电研究院 | A kind of deep ultraviolet optical system wave aberration detection device and method |
| CN106840366A (en) * | 2017-04-21 | 2017-06-13 | 吉林大学 | A kind of homodyne orthogonal fibre interferes vibration detecting device |
| CN108225744A (en) * | 2018-01-31 | 2018-06-29 | 中国科学院西安光学精密机械研究所 | The more field image quality detecting devices of optical lens and method based on prism of corner cube |
| CN108225744B (en) * | 2018-01-31 | 2023-09-01 | 中国科学院西安光学精密机械研究所 | Optical lens multi-view-field image quality detection device and method based on pyramid prism |
| CN108827595A (en) * | 2018-03-12 | 2018-11-16 | 西安应用光学研究所 | Detection device based on adaptation theory optical system mismachining tolerance |
| CN110849593A (en) * | 2019-11-22 | 2020-02-28 | 中国科学院长春光学精密机械与物理研究所 | Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator |
| CN110849593B (en) * | 2019-11-22 | 2021-06-01 | 中国科学院长春光学精密机械与物理研究所 | Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator |
| CN111076904A (en) * | 2019-12-27 | 2020-04-28 | 山东大学 | Dynamic wavefront aberration detection device and method for high-power thin-chip laser |
| CN114088017A (en) * | 2021-11-02 | 2022-02-25 | 武汉联胜光电技术有限公司 | Device and method for detecting angle and flatness of customized optical fiber end face |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102289152B (en) | 2012-11-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102289152B (en) | Optical system wave aberration detection device | |
| CN102261985B (en) | Optical system wave aberration calibration apparatus and calibration method of using apparatus to test error | |
| JP3926264B2 (en) | Apparatus and method for measuring aspheric surface with concave surface and hologram | |
| CN105823422A (en) | Two-degree-of-freedom heterodyne grating interferometer displacement measurement system and method | |
| CN101672632B (en) | Optical spherical surface shaped fiber point-diffraction phase-shifting interference measuring method | |
| CN102865811B (en) | Orthogonal double grating based synchronous phase shifting common-path interference microscopy detection device and detection method | |
| KR20100134609A (en) | Apparatus and method for measuring surface topography of an object | |
| CN101324421A (en) | Synchronous phase-shift fiso interferometer | |
| CN103267629B (en) | Point-diffraction interference wave aberration measuring instrument and measuring method thereof | |
| CN104034279A (en) | Detection device and method for splicing measurement of surface shape using pinhole diffraction wave front | |
| CN103398655B (en) | A kind of wavelength tuning phase shift point diffraction interference measuring method | |
| CN102620842B (en) | Device for detecting optical surface shapes of hole diffraction spherical waves | |
| CN110837214A (en) | Scanning interference photoetching system | |
| CN104330039A (en) | High-numerical-aperture optical fiber point diffraction interference device used for three-coordinate measurement and method thereof | |
| CN104215176A (en) | High accuracy optical interval measurement device and method | |
| CN111947592B (en) | Dynamic dual-wavelength phase-shifting interference measuring device and measuring method | |
| CN102401630B (en) | Spatial phase shift Fizeau spherical interferometer | |
| CN203687880U (en) | Optical displacement measuring system | |
| CN102445280A (en) | Detection device and method for small hole calibration | |
| CN103344198A (en) | Octave type phase-shifting diffraction interferometer and measurement method used for detecting micro spherical surface profile | |
| WO2016183874A1 (en) | Digital phase shift point diffraction interferometer and optical system wave aberration measuring method | |
| CN103791844A (en) | Optical displacement measuring system | |
| US6704112B1 (en) | Application of the phase shifting diffraction interferometer for measuring convex mirrors and negative lenses | |
| CN104142123A (en) | Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement | |
| CN102914259A (en) | Interference detection device based on light-splitting synchronous phase shifting and detection method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121107 Termination date: 20140518 |