CN1439864A - Laser multiple degree-of-freedom measuring system and method - Google Patents
Laser multiple degree-of-freedom measuring system and method Download PDFInfo
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Abstract
A multi-freedom laser measuring system is composed of laser emitter, polarizing-splitting unit, 4-freedom error sensing unit, photoelectric receiver unit and signal processing unit. Said 4-freedom error sensing unit consists of quater-wavelength wave plate, optical splitter and optical reflector. The laser beam is splitted into the perpendicular mutually linear polarized light beams in two polarizing directions. The light beam received by said 4-freedom error sensing unit is splitted to two beans received by two photoelectric receiver. The linearity error of an object in two directions and the pitch angle error can be obtained after signal processing.
Description
(1) technical field
The present invention relates to a kind of accurate laser measurement System and method for, when being specially adapted to workpiece or object its multiple degrees of freedom error or athletic posture that moves is measured simultaneously along certain guide rail movement.
(2) background technology
The detection of numerically-controlled machine and machining center precision is machine tool industry and the requisite key link of mechanical processing industry, also is the important means that guarantees machine finish and product quality.Summary is got up, and machine tool accuracy detects and is mainly used in following occasion: 1) measure and draw the geometric precision of machine tool graph of errors in order to the geometric error of lathe is revised and compensated; 2) new machine of preparing to purchase is carried out decisive test to determine whether final purchase; 3) existing machine tool is carried out periodic test with the machining precision of guaranteeing lathe and the properties of product that obtain the best; 4) repair and solve the technical matters that occurs in the lathe utilization process; 5) demonstration of new machine performance.Meanwhile, the detection method of numerically-controlled machine and machining center and means equally also are applicable to the measurement of three coordinate measuring machine, other coordinate system and the measurement of other moving objects, thereby in industries such as machine-building, machining, aviation, measurements market are widely arranged.Because the parameter of evaluation numerically-controlled machine, machining center and three coordinate measuring machine precision is a lot, minimum is 21 parameters.Current measuring methods, instrument are owing to can only measure one of them parameter at every turn, each measurement need be readjusted surveying instrument, and measuring process need be used dissimilar measurement annexes, not only measuring period is very loaded down with trivial details and very long, waste when causing great amount of manpower and machine is (because when detecting, lathe can not processing parts), and the influence that measuring accuracy is changed by survey crew and measurement environment (particularly measuring temperature) is bigger.Thereby the method and the instrument and equipment of research fast detecting machine tool precision be domestic and international machine industry scientific and technical personnel questions of common interest, also be at present both at home and abroad machine industry fail one of technical matters of fine solution.For overcoming the above problems, oneself carries out laser multiparameter synchronized measurement system energetically both at home and abroad.
Laser six degree of freedom measuring system can be measured three displacement of the lines amounts (linearitys of displacement and two directions) of movable body and three amounts of spin (beat, wave and rolling pendulum) in real time, quiet, the dynamic accuracy that are mainly used in large-scale precision equipment (numerically-controlled machine, coordinate measuring machine etc.) are measured, as a kind of high-precision multidimensional sensor, be used for object or workpiece are installed.Therefore multidimensional while measuring method and Study on Technology are the technical barriers that people attempt to solve always.Since the sixties in 20th century, people attempt to solve this technical barrier always, a large amount of measuring methods and technology have occurred, summarize and get up can be divided into following several big class:
1. traditional method of geometrical optics: as (1) " optical devices of measurement and demonstration moving object angle orientation " [Opticalapparatus for indicating and measuring the roll angular orientation of a movable body, the patent No.: 3269254,1966], (2) " three optical alignment devices " [Three axis optical alignment device, the patent No.: 3375750,1968], (3) " three shaft angle degree sensors " [Three-axis angle sensor, the patent No.: 4560272,1985] be that research and the patent about this field the 60-80 age in 20th century appears in the U.S. etc., these patented technologies have all adopted traditional optical means, use ordinary light source as illumination, defectives such as have the optical system complexity, measuring accuracy is low, and measurement parameter is few.
2. utilize optical diffraction phenomenon: as (1) " the multiaxis optical alignment system that has spatial filter " [Multi-axis opticalalignment system including a spatial filter, the patent No.: 3701602,1972], (2) " three and five laser tracking systems " [Three and five axis laser tracing system, the patent No.: 4714339,1987], (3) " multiaxis alignment device " [Multi-axis alignment apparatus, the patent No.: 4804270,1989] etc. be to measure when utilizing optical diffraction phenomenon or utilizing holographic grating to realize to three-dimensional perspective, its shortcoming is that measuring accuracy is not high, measurement parameter is few, the optical system complexity, the while measuring head has follows cable, causes the in-site measurement inconvenience.
3. based on the method for laser tracking measurement: as (1) " object space position and attitude laser tracking measurement system and measuring method thereof " [Chinese patent application number 99109623.1] etc., it is big that this class measuring method has measurement range, the measuring speed height, but exist measuring accuracy low, the measuring system complexity, defectives such as measuring equipment costliness.
4. the combined method of laser interference and laser alignment: since laser comes out, after particularly laser interferometry becomes industry member measurement means commonly used, people attempt to utilize these characteristics of good rectilinearity of laser interference and laser to obtain multi-degree of freedom measurement always, as: (1) " optical devices of use interferometer measuration system " [Optical apparatus for use withinterferometric measuring device, U.S. Patent number: 5056921,1991], (2) " linear and angle reflection interference alignment targets " [Linear and angular retro-reflecting interferometric alignment target, U.S. Patent number: 6327038 B1,2001], (3) " laser five shaft position measuring systems " [Laser aligned five-axis positionmeasurement device, U.S. Patent number: 5798828,1998], (4) [the Rotation and translation measurement with phase sensitive detection that " has the corner of phase detection sensitivity and a displacement measurement ", U.S. Patent number: 6316779B1,2001], (5) " multiple degrees of freedom geometric error measuring system " [Multi-degree-of-freedomgeometric error measurement system, U.S. Patent number: 5418611,2001], (6) [the Laser measurement system for rapid calibration of machine tools that " proofreaies and correct the laser measurement system of machine tool fast ", U.S. Patent number: 5900938,1999], (7) " five-axis/six-axis laser measuring system " [Five-axis/six-axis lasermeasuring system, U.S. Patent number: 6049377,2000], (8). be used for [the A multi-degree-of-freedom measuring system for CMM geometric errors of multi-degree of freedom measurement system that the coordinate measuring machine geometric error is measured, ASME J.of Engineering for industry] etc. all be the typical case representative of this class measuring method, what representative was wherein arranged most is that people such as later stage twenties Ni of Michiganite U.S.A university and Huang invent a kind of laser five degree of freedom measuring system, energy is the measuring position simultaneously, the linearity of both direction and beat and rock angle error [above U.S. Patent number: 5900938], but this system adopts too much optical component, cause complex structure, and measuring head has cable, the in-site measurement inconvenience, U.S. API company releases laser five/sextuple measuring system, and [this patent is " five-axis/six-axis laser measuring system " at the patent name of China, application number is: 97191384.6], and form certain market, but the major defect of the product of API company is a sensing head must have cable, extremely inconvenience of on-the-spot use.
In a word, just begun multiple degrees of freedom parameter Measurement Study simultaneously from the seventies in 20th century, up to the present, although the simultaneously-measured method of many multiple degrees of freedoms, technology and device have occurred, there is such or such problem in these technology.In addition, nearly all these systems all need to connect the measuring head of motion and the remainder of surveying instrument with cable, and very difficult realization is measured fast, easily.So the invention optical texture is simple, volume is little, precision is high, high-speed, no cable connects is the development trend in this field.
(3) summary of the invention
The technical problem to be solved in the present invention is: a kind of simple laser four-degree-of-freedom or laser five degree of freedom measuring system are provided, realization is measured to the straightness error of both direction and the angle of pitch and deflection angle the time, measures when cooperating laser interferometer can realize length.The traverse measurement head of measuring system does not have cable and connects, and has that light path is simple, volume is little, in light weight, measuring accuracy advantages of higher.
Technical scheme of the present invention: laser multi-degree of freedom measurement system comprises: generating laser, polarisation spectrophotometric unit, four-degree-of-freedom error sensing unit, photoelectricity receiving element and signal processing unit.Its technical characterictic is:
Said four-degree-of-freedom error sensing unit comprises: λ/4 wave plates, optical splitter and light reflector.λ/4 wave plates, optical splitter and light reflector are arranged along the incident ray direction, and are fixed together by support or other means.λ/4 wave plates become circularly polarized light with linearly polarized light, or circularly polarized light are become linearly polarized light; Optical splitter is divided into two-beam at least with a branch of incident light, a branch of reflection, and another restraints transmission; Light reflector reflects back incident light, but does not overlap with former incident.
Said polarisation spectrophotometric unit comprises: polarisation optical splitter, polarisation optical splitter can be divided into a branch of light the orthogonal linearly polarized light in two bundle polarization directions.
Said photoelectricity receiving element comprises: two photelectric receivers, lens.A photelectric receiver directly receives the light of measuring straightness error information, and another photelectric receiver places on the focal plane of lens, receives the light of the errored message that takes measurement of an angle.
Function that described signal processing unit finishes that the multi-dimensional signal that detector is detected is gathered, handled and exports etc.
Measuring method of the present invention is: by the high stable laser beam of generating laser emission, behind the polarisation spectrophotometric unit, be decomposed into two orthogonal linearly polarized lights in polarization direction; The linearly polarized light that is received by the four-degree-of-freedom error sensing unit becomes circularly polarized light behind λ/4 wave plates, be divided into two parts light behind optical splitter; Wherein a part of light returns along former input path behind spectrophotometric reflection, pass through λ/4 wave plates again after, become linearly polarized light by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees; After another part light sees through optical splitter, after the light reflector reflection, by λ/4 wave plates, become linearly polarized light by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees too once more; After this two parts light passes through the polarisation spectrophotometric unit once more, by the polarisation spectrophotometric reflection.Wherein by the light of spectrophotometric reflection after polarisation spectrophotometric unit reflection, by lens, received by a photelectric receiver, by signal processing unit processes, obtain the beat and the angle of pitch change amount of the object that is fixed together with the four-degree-of-freedom sensing unit; The light that sees through optical splitter is directly received by another photelectric receiver after the reflection of polarisation spectrophotometric unit, by signal processing unit processes, obtains the straightness error of the both direction of the object that is fixed together with the four-degree-of-freedom sensing unit.
The present invention compares the characteristics beneficial effect that is had with background technology:
One, incident Ray Of Light behind polarisation spectrophotometric unit and four-dimensional information sensing unit, are divided into two-beam, respectively as the measuring basis of straightness error and angular error four-dimensional information, light path is extremely simple, and the optical device of use is few, and the light path adjustment is also very simple;
Two, Fan She two-beam separates in the space, through separating with incident light again behind the polarisation spectrophotometric unit, be easy to obtain the straightness error of two directions and pitching, deflection angle deviation, if adopt linearly polarized light as LASER Light Source, can under the power situation of not loss Laser emission, finish multiple degrees of freedom and measure simultaneously.
Three, owing to no cable on the four-degree-of-freedom error sensing unit connects, in-site measurement is very convenient.
Four, adopt prism of corner cube or opal, the sensitivity of measuring straightness error can be doubled, adopt the lens of different focal simultaneously, can change the sensitivity that takes measurement of an angle as light reflector.
Five, this measurement mechanism is simple in structure, volume is little, and installation, easy to adjust can obtain high measuring accuracy;
Measure when six, this device can also be finished five degree of freedom with laser interferometer.
This measurement mechanism is measured the sensitivity of straightness error less than 1 μ m, and the sensitivity that takes measurement of an angle is less than 1 second of arc, and measuring distance is greater than 20m, the static state of applicable multiple degrees of freedom error and kinetic measurement.
(4) description of drawings
The embodiment that Fig. 1 laser four-degree-of-freedom is measured
Second embodiment that Fig. 2 laser four-degree-of-freedom is measured
The 3rd embodiment that Fig. 3 laser four-degree-of-freedom is measured
The 4th embodiment that Fig. 4 laser four-degree-of-freedom is measured
The 5th embodiment that Fig. 5 laser four-degree-of-freedom is measured
Fig. 6 measures the principle schematic that pitching (beat) angle changes
Fig. 7 measures the principle schematic of a direction straightness error
The embodiment that the supporting realization five degree of freedom of Fig. 8 and laser interferometer is measured
Among the figure: 1 is generating laser, and 2 is the polarisation spectrophotometric unit, and 3 is the four-degree-of-freedom error sensing unit, 4 is the photoelectricity receiving element, 5 is signal processing unit, and 6 for measuring the length mobile unit, and 8 is the fixation measuring head of measurement mechanism, 9 is guide rail, 10 is movable measuring head, and 102 is laser interferometer, and 201 is the polarisation optical splitter, 202 is reverberator, 301 is λ/4 wave plates, and 302 is optical splitter, and 303 is light reflector, 304 is opal, 305 is spectro-film, and 401 is photelectric receiver, and 402 is photelectric receiver, 403 is lens, 601 for measuring the prism of corner cube of length, and 602 is optical splitter, and 701 for measuring the reference angle cone prism of length, 801 for picking up inclined to one side device, 101,3021,3031,6011,7011 is laser beam.
(5) embodiment
The contrast accompanying drawing, illustrate and realize optimal way of the present invention: laser multi-degree of freedom measurement system comprises: generating laser 1, polarisation spectrophotometric unit 2, four-degree-of-freedom error sensing unit 3, photoelectricity receiving element 4 and signal processing unit 5.
Embodiment one (Fig. 1):
Four-degree-of-freedom error sensing unit 3 in the system is made up of a λ/4 wave plate 301, an optical splitter 302 and a light reflector 303.λ/4 wave plates 301, optical splitter 302 and light reflector 303 are arranged along the incident ray direction, and are fixed together by support or other means; Said λ/4 wave plate 301 becomes circularly polarized light with linearly polarized light, or circularly polarized light become linearly polarized light, said optical splitter 302 is divided into two-beam at least with a branch of incident light, a branch of reflection, another restraints transmission, said light reflector 303 reflects back incident light, but does not overlap with former incident light.Optical splitter 302 is fixed on the input path of light reflector 303, and incident ray no longer passes through optical splitter 302 through light reflector 303 light reflected 3031, and light reflector 303 adopts prism of corner cube; Optical splitter 302 adopts semi-transparent semi-reflecting spectroscope, and optical splitter 302 also can be fixed on the reflected light path of light reflector (303).Polarisation spectrophotometric unit 2 is a polarisation optical splitter 201, and said polarisation optical splitter 201 can be divided into a branch of light the orthogonal linearly polarized light in two bundle polarization directions; Photoelectricity receiving element 4 comprises the photelectric receiver 401 that receives light 3031, lens 403 and photelectric receiver 402 these three devices that receive light 3021; Light 3031 has measured workpiece straightness error information, and light 3021 has measured workpiece pitching, deflection angle information, and said photelectric receiver 401,402 can adopt four-quadrant photelectric receiver, PSD position sensitive device or CCD photelectric receiver; Signal processing unit 5 is finished the multi-dimensional signal that photelectric receiver 401,402 is detected and is gathered, handles, exports and function such as power supply.
Embodiment two (Fig. 2):
Be with the difference of embodiment one: polarisation spectrophotometric unit 2, it is made up of polarisation optical splitter 201 and full-reflector 202.Its full-reflector 202 can separate with polarisation optical splitter 201 and be connected, and also can directly link together, and said full-reflector 202 can adopt right-angle reflecting prism simultaneously, also can adopt forms such as plane mirror; Said polarisation spectrophotometric unit 2 can link together with the fixation measuring head 8 of measuring system, also can separately connect.
Embodiment three (Fig. 3):
Be with the difference of embodiment one, embodiment two: in the four-degree-of-freedom error sensing unit 3, incident one side on light reflector 303 or one side of emergent ray, directly plate spectro-film 305, then removed optical splitter 302, polarisation spectrophotometric unit 2 and four-degree-of-freedom error sensing unit 3 directly link together simultaneously, constitute the movable measuring head 10 of measuring system.On the fixation measuring head 8 of measurement mechanism, generating laser 1, photoelectricity receiving element 4 and signal processing unit 5 only are installed.
Embodiment four (Fig. 4):
Be with the difference of embodiment one: the light reflector 303 in the degree of freedom error sensing unit 3 is substituted by an opal 304.
Embodiment five (Fig. 5):
Be with the difference of embodiment one: degree of freedom error sensing unit 3 is placed on the reflected light path of polarisation spectrophotometric unit 2, receive the light that reflects from polarisation spectrophotometric unit 2, rather than the light that transmits.
With Fig. 6, Fig. 7 is example, and principle and the measuring method of measuring variation of the guide rail angle of pitch and straightness error are described.
High stable laser beam 101 by generating laser 1 emission, incide polarisation spectrophotometric unit 2, after this incident ray 101 sees through through polarisation spectrophotometric unit 2, behind λ/4 wave plates 301 of linearly polarized light in four-degree-of-freedom error sensing unit 3 that form, become circularly polarized light, behind optical splitter 302, be divided into two parts light 3021 and 3031 again.Wherein a part of light is returned along original optical path by optical splitter 302 reflection backs, after passing through λ/4 wave plates 301 again, become linearly polarized light 3021 by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees, this light 3021 becomes the datum ray of measuring pitching, deflection angle; Another part light incides light reflector 303 after seeing through optical splitter 302, after light reflector 303 reflections with the position outgoing of incident ray symmetry, the light that promptly incides on the light reflector 303 is parallel with its reflection ray.Because 302 of optical splitters in the four-degree-of-freedom error sensing unit 3 are fixed on the input path, this reflection ray no longer is directly incident on λ/4 wave plates 301 through optical splitter 302, through behind λ/4 wave plates 301, become linearly polarized light 3031 by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees too, and this light 3031 becomes the datum ray of measuring the both direction straightness error.
Incide the single beam of four-degree-of-freedom error sensing unit 3 like this, be divided into two parts light 3021 and 3031, the linear polarization of this two parts light is identical, the direction of propagation is parallel, but all equidirectional 90 degree that rotated in its polarization direction, and this two parts light 3021 and 3031 spatially is what to separate, becomes the datum ray that takes measurement of an angle with straightness error respectively.
After this two parts reflected light 3021,3031 passes through polarisation spectrophotometric unit 2 once more along the direction opposite with incident ray 101, because its polarization direction has all changed 90 degree, originally the light of transmission can not see through polarisation optical splitter 201, and can only all reflect by polarisation optical splitter 201, two-way reflected light 3021,3031 has just spatially separated with incident light 101 like this.
, after 2 reflections of polarisation spectrophotometric unit, by lens 403, these reflected light 3021 hot spots are compiled a bit again as the datum ray 3021 of measuring pitching, deflection angle, and receive by photelectric receiver 402.When four-degree-of-freedom error sensing unit 3 when guide rail 9 moves, [only drawn among Fig. 6 and had the situation of luffing angle deviation if guide rail 9 exists pitching and deflection angle to change, the situation that exists deflection angle to change is similar], its optical splitter 302 is also followed and is done corresponding pitching and deflection angle variation together, the angle of optical splitter 302 changes to cause and incides this optical splitter 302 and change through the angle of the light 3021 of these optical splitter 302 reflections, the variation of this light angle causes the variation of this light 3021 light spot position on photelectric receiver 402 through behind the lens 403.In fact, by reflection law as can be known: if guide rail 9 causes optical splitter 302 deflection angles of four-degree-of-freedom error sensing unit 3 and the angle of pitch to change α, β variation respectively, the variation of 2 α, 2 β takes place respectively by the angle of the light 3021 of optical splitter 302 reflection, through behind the lens 403, cause the variable quantity of this light 3021 light spot position on photelectric receiver 402 to be respectively:
ΔX＝f×tan(2α)≈2f×α (1)
ΔY＝f×tan(2β)≈2f×β (2)
In the formula: Δ X, Δ Y are respectively by beat and luffing angle and change the change amount of luminous point position on photelectric receiver 402 that causes, and α, β guide rail 9 respectively cause the variable quantity of beat and luffing angle, and f is the focal length of lens 403.
Therefore by detecting the change of light 3021 light spot position on photelectric receiver 402, can obtain its angle by signal processing unit and change.
, after 2 reflections of polarisation spectrophotometric unit, be directly incident on the photelectric receiver 401 as the datum ray 3031 of measuring the both direction straightness error, and photelectric receiver 401 receives thus.When four-degree-of-freedom error sensing unit 3 when guide rail 9 moves, if there is straightness error in guide rail 9 at both direction, must cause light reflector 303 in the four-degree-of-freedom error sensing unit 3 in the displacement of both direction.Because incident ray 101 is motionless, light reflector 303 must cause the change of its reflection ray 3031 position on corresponding both direction in the displacement of both direction, the change amount of these light 3031 positions is directly detected by photelectric receiver 401, and obtains straightness error through signal processing unit.In fact, if guide rail 9 causes the position of optical splitter 302 on the both direction vertical with incident ray of four-degree-of-freedom error sensing unit 3 to change Δ X respectively
1, Δ Y
1Change [only drawn among Fig. 7 and existed the situation of a direction straightness error, another direction to exist the situation of straightness error similar], by the reflection characteristic of the reflection characteristic of light reflector 303 as can be known: 2 Δ X take place respectively in the position of its reflection ray 3031
1, 2 Δ Y
1Variation, cause the variable quantity of this light 3031 light spot position on photelectric receiver 401 to be respectively:
Δ
1＝2ΔX
1 (1)
Δ
2＝2ΔY
1 (2)
In the formula: Δ
1, Δ
2Be respectively the change amount that causes luminous point position on photelectric receiver 401 by the both direction straightness error, Δ X
1, Δ Y
1The difference straightness error.
Fig. 8 is embodiment and the measuring principle of utilizing laser interferometer and the present invention to make up to realize the five degree of freedom error measure.
The light 101 that is sent by laser interferometer 102 is divided into two parts light behind polarisation optical splitter 201, a part through polarisation optical splitter 201 reflection backs upwards through becoming the reference ray 7011 of measuring length behind the prism of corner cube 701; After another part light sees through polarisation optical splitter 201, be divided into two parts by the optical splitter 602 in the mobile unit 6 of measuring length, a part sees through optical splitter 602, enter four-degree-of-freedom error sensing unit 3, obtain the four-degree-of-freedom error signal, it elaborates more than measuring principle, no longer repeat, another part light enters prism of corner cube 601 after 602 reflections, polarization direction through the light 6011 after 601 is identical with the direction of incident ray, overlap with light 7011 through polarizer 201 backs, produce through analyzer 801 backs and interfere, measure the displacement of movable measuring head 10, so just can realize the measurement of other five degree of freedom errors except that roll angle, wherein laser interference 102, measure the prism of corner cube 601 of length, measure the reference angle cone prism 701 of length and form laser interferometry length system commonly used.
Generating laser among the present invention can adopt the laser instrument of He-Ne laser, semiconductor laser or other types, can also directly utilize the laser instrument in the laser interferometer.Adopt the benefit of semiconductor laser single-mode fiber assembly to be: the light that sends in this laser instrument has high stability; Polarisation optical splitter 201 can adopt the polarisation optical splitter of Glan-Taylor prism or Glan-Foucault prism or other types; Photelectric receiver 401,402 can adopt four-quadrant photo detector, PSD position sensitive device or CCD photelectric receiver; Light reflector 303 preferably adopts prism of corner cube, also can adopt opal 304 or other similar light reflector; Lens 403 can adopt single group lens, also can adopt the multiple lens combination; Reverberator 202 can adopt prism reflector or plane mirror; Optical splitter 302 can adopt semi-transparent semi-reflecting lens or directly plate semi-transparent semi-reflecting film 305 on prism of corner cube incident surface on one side; Same optical splitter 302 is fixedly on the reflected light path of light reflector 303, can obtain similar result, but can cause the loss of part laser energy, if optical splitter 302 is fixed on the whole incident emitting light path, also can realize how freely measuring theoretically, but can cause a large amount of unnecessary energy losses and unnecessary light beam, measurement is impacted.
Claims (10)
1. laser multi-degree of freedom measurement system, comprise: generating laser (1), polarisation spectrophotometric unit (2), four-degree-of-freedom error sensing unit (3), photoelectricity receiving element (4) and signal processing unit (5) is characterized in that: said four-degree-of-freedom error sensing unit (3) comprising: λ/4 wave plates (301), optical splitter (302) and light reflector (303); λ/4 wave plates (301), optical splitter (302) and light reflector (303) are arranged along the incident ray direction, be fixed together by support or other means, said λ/4 wave plates (301) become circularly polarized light with linearly polarized light, or circularly polarized light become linearly polarized light, said optical splitter (302) is divided into two-beam at least with a branch of incident light, a branch of reflection, and another restraints transmission, said light reflector (303) reflects back incident light, but does not overlap with former incident; Said polarisation spectrophotometric unit (2) comprising: polarisation optical splitter (201), said polarisation optical splitter (201) can be divided into a branch of light the orthogonal linearly polarized light in two bundle polarization directions; Said photoelectricity receiving element (4) comprises two photelectric receivers (401,402), lens (403), photelectric receiver (401) directly receives the light of measuring linearity information, photelectric receiver (402) places on the focal plane of lens (403), receives the light of the errored message that takes measurement of an angle.
2. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said optical splitter (302) can be fixed on the input path of light reflector (303), or is fixed on the reflected light path of light reflector (303).
3. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said optical splitter (302) comprises semi-transparent semi-reflecting lens.
4. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said optical splitter (302) comprises directly on the plane of incidence of prism of corner cube (303) or exit facet plates semi-transparent semi-reflecting film (305).
5. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said light reflector (303) comprises prism of corner cube or opal (304).
6. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said two photelectric receivers (401,402) can adopt four-quadrant photelectric receiver or PSD position sensitive device or CCD photelectric receiver.
7. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said polarisation spectrophotometric unit (2) can also comprise full-reflector (202), and said full-reflector (202) comprises reflecting prism or plane mirror.
8. a kind of laser multi-degree of freedom measurement according to claim 1 system is characterized in that said polarisation spectrophotometric unit (201) comprises Glan-Taylor prism or Glan-Foucault prism.
9. a laser multi-degree of freedom measurement method is characterized in that: by the high stable laser beam (101) of generating laser (1) emission, through being decomposed into two orthogonal linearly polarized lights in polarization direction behind the polarisation spectrophotometric unit (2); Behind λ/4 wave plates (301), become circularly polarized light by the linearly polarized light of four-degree-of-freedom error sensing unit (3) reception, behind optical splitter (302), be divided into two parts light (3021) and (3031); Wherein a part of light returns along original optical path after optical splitter (302) reflection, pass through λ/4 wave plates (301) again after, become linearly polarized light (3021) by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees; After another part light sees through optical splitter (302), after light reflector (303) reflection, by λ/4 wave plates (301), become linearly polarized light (3031) by circularly polarized light again, but its polarization direction has rotated an angle of 90 degrees too once more; After light (3021,3031) passes through polarisation spectrophotometric unit (2) once more, reflect by polarisation optical splitter (201), light (3021) is after polarisation spectrophotometric unit (2) reflection, again by lens (403), received by photelectric receiver (402), handle by signal processing unit (5), obtain the beat and the angle of pitch change amount of the object that is fixed together with four-degree-of-freedom sensing unit (3); Light (3031) is directly received by photelectric receiver (401) after polarisation spectrophotometric unit (2) reflection, handles by signal processing unit (5), obtains the straightness error of the both direction of the object that is fixed together with four-degree-of-freedom sensing unit (3).
10. according to the described laser multi-degree of freedom measurement of claim 9 method, it is characterized in that: the light (101) that is sent by laser interferometer (102) is divided into two parts light behind polarisation optical splitter (201); After a part reflects through polarisation optical splitter (201), through becoming the reference ray (7011) of measuring length behind the prism of corner cube (701); After another part light sees through polarisation optical splitter (201), be divided into two parts by the optical splitter (602) in the mobile unit (6) of measuring length; A part sees through optical splitter (602), enters four-degree-of-freedom error sensing unit (3), obtains the four-degree-of-freedom error signal; Another part light enters prism of corner cube (601) after (602) reflection, polarization direction through the light (6011) after (601) is identical with the direction of incident ray, overlap with light (7011) through polarisation optical splitter (201) back, interfere through producing behind the analyzer, measure the displacement of movable measuring head (10), realize the measurement of other five degree of freedom errors except that roll angle.
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| CN100447694C (en) * | 2004-12-31 | 2008-12-31 | 中山大学 | Control system of large stroke nanometer precision location |
| CN102581703A (en) * | 2011-01-05 | 2012-07-18 | 财团法人精密机械研究发展中心 | Measuring device for double coaxial feed shafts |
| CN102589448A (en) * | 2012-03-13 | 2012-07-18 | 北京信息科技大学 | High-precision six-freedom degree pose monitoring device |
| CN102818541A (en) * | 2012-08-13 | 2012-12-12 | 西安交通大学 | High-resolution rolling-angle measuring device and measuring method |
| CN103791858A (en) * | 2014-01-26 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Common light path laser interference device for small-angle measurement and measuring method |
| CN104142123A (en) * | 2013-05-08 | 2014-11-12 | 上海微电子装备有限公司 | Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement |
| WO2016033766A1 (en) * | 2014-09-03 | 2016-03-10 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom errors in way that double-frequency lasers are coupled by single optical fiber |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| CN106885535A (en) * | 2017-02-10 | 2017-06-23 | 浙江理工大学 | Single-frequency interferes the device and method of straightness error and its position measurement and compensation |
| CN107121073A (en) * | 2017-06-09 | 2017-09-01 | 中国科学院光电技术研究所 | High-precision three-degree-of-freedom real-time measurement method and device based on laser interferometer |
| WO2017193681A1 (en) * | 2016-05-13 | 2017-11-16 | 深圳市中图仪器股份有限公司 | Optical system for use in laser interferometer for measuring large distance |
| CN107702644A (en) * | 2017-09-25 | 2018-02-16 | 中国科学院光电研究院 | A kind of multi-degree of freedom measurement device based on double PSD |
| CN108037575A (en) * | 2017-12-29 | 2018-05-15 | 武汉光谷航天三江激光产业技术研究院有限公司 | A kind of light beam is directed toward stability contorting simulator and method |
| CN108153234A (en) * | 2018-01-30 | 2018-06-12 | 中国工程物理研究院机械制造工艺研究所 | The full degree of freedom accuracy detecting device of lathe linear motion run mode |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN108489424A (en) * | 2018-04-13 | 2018-09-04 | 上海理工大学 | Laser interference system for roll angle and straight line degree measurement |
| CN109341600A (en) * | 2018-09-18 | 2019-02-15 | 重庆邮电大学 | A kind of three axis photoelectric auto-collimators |
| CN109373906A (en) * | 2018-09-05 | 2019-02-22 | 三英精控（天津）仪器设备有限公司 | Method that is a kind of while measuring distance, flexion-extension and beat |
| CN109579776A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | Anti-interference big working distance autocollimation and method in high precision |
| CN109579777A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | The anti-interference big working distance autocollimation of double light sources high-precision and method |
| CN109579744A (en) * | 2018-12-05 | 2019-04-05 | 哈尔滨工业大学 | Trailing type three-dimensional photoelectric auto-collimation method and apparatus based on grating |
| CN110375708A (en) * | 2019-08-15 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
| CN110641513A (en) * | 2019-09-25 | 2020-01-03 | 北京交通大学 | Detection system and method for wheel-rail acting force and tread fault |
| CN114046732A (en) * | 2021-11-12 | 2022-02-15 | 北京交通大学 | Method and system for simultaneously measuring multi-degree-of-freedom geometric errors by using laser |
| CN114234854A (en) * | 2021-11-22 | 2022-03-25 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
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| TWI414747B (en) * | 2011-05-10 | 2013-11-11 | Univ Nat Formosa | A five - degree - of - freedom optical system |
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2003
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100447694C (en) * | 2004-12-31 | 2008-12-31 | 中山大学 | Control system of large stroke nanometer precision location |
| CN102581703A (en) * | 2011-01-05 | 2012-07-18 | 财团法人精密机械研究发展中心 | Measuring device for double coaxial feed shafts |
| CN102589448A (en) * | 2012-03-13 | 2012-07-18 | 北京信息科技大学 | High-precision six-freedom degree pose monitoring device |
| CN102818541A (en) * | 2012-08-13 | 2012-12-12 | 西安交通大学 | High-resolution rolling-angle measuring device and measuring method |
| CN104142123B (en) * | 2013-05-08 | 2017-04-05 | 上海微电子装备有限公司 | It is applied to the Three Degree Of Freedom laser measurement system of plant equipment geometric error measurement |
| CN104142123A (en) * | 2013-05-08 | 2014-11-12 | 上海微电子装备有限公司 | Three-degree of freedom laser measuring system applied to mechanical equipment geometric error measurement |
| CN103791858B (en) * | 2014-01-26 | 2016-06-29 | 中国人民解放军国防科学技术大学 | Common light path laser interference device and measuring method for small angle measurement |
| CN103791858A (en) * | 2014-01-26 | 2014-05-14 | 中国人民解放军国防科学技术大学 | Common light path laser interference device for small-angle measurement and measuring method |
| WO2016033766A1 (en) * | 2014-09-03 | 2016-03-10 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom errors in way that double-frequency lasers are coupled by single optical fiber |
| CN106461372A (en) * | 2014-09-03 | 2017-02-22 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom errors in way that double-frequency lasers are coupled by single optical fiber |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
| WO2017193681A1 (en) * | 2016-05-13 | 2017-11-16 | 深圳市中图仪器股份有限公司 | Optical system for use in laser interferometer for measuring large distance |
| CN106885535A (en) * | 2017-02-10 | 2017-06-23 | 浙江理工大学 | Single-frequency interferes the device and method of straightness error and its position measurement and compensation |
| CN106885535B (en) * | 2017-02-10 | 2019-02-01 | 浙江理工大学 | Single-frequency interferes the device and method of straightness error and its position measurement and compensation |
| CN107121073A (en) * | 2017-06-09 | 2017-09-01 | 中国科学院光电技术研究所 | High-precision three-degree-of-freedom real-time measurement method and device based on laser interferometer |
| CN107702644A (en) * | 2017-09-25 | 2018-02-16 | 中国科学院光电研究院 | A kind of multi-degree of freedom measurement device based on double PSD |
| CN108037575A (en) * | 2017-12-29 | 2018-05-15 | 武汉光谷航天三江激光产业技术研究院有限公司 | A kind of light beam is directed toward stability contorting simulator and method |
| CN108153234A (en) * | 2018-01-30 | 2018-06-12 | 中国工程物理研究院机械制造工艺研究所 | The full degree of freedom accuracy detecting device of lathe linear motion run mode |
| CN108153234B (en) * | 2018-01-30 | 2023-08-04 | 中国工程物理研究院机械制造工艺研究所 | Full-freedom degree precision detection device for linear motion running state of machine tool |
| CN108398104A (en) * | 2018-02-01 | 2018-08-14 | 中国科学院国家天文台南京天文光学技术研究所 | The photoelectricity dynamic angle measuring devices and its method of random error can be reduced |
| CN108489424A (en) * | 2018-04-13 | 2018-09-04 | 上海理工大学 | Laser interference system for roll angle and straight line degree measurement |
| CN109373906A (en) * | 2018-09-05 | 2019-02-22 | 三英精控（天津）仪器设备有限公司 | Method that is a kind of while measuring distance, flexion-extension and beat |
| CN109373906B (en) * | 2018-09-05 | 2020-07-28 | 三英精控（天津）仪器设备有限公司 | Method for simultaneously measuring distance, pitch and yaw |
| CN109341600A (en) * | 2018-09-18 | 2019-02-15 | 重庆邮电大学 | A kind of three axis photoelectric auto-collimators |
| CN109579744A (en) * | 2018-12-05 | 2019-04-05 | 哈尔滨工业大学 | Trailing type three-dimensional photoelectric auto-collimation method and apparatus based on grating |
| CN109579744B (en) * | 2018-12-05 | 2021-01-12 | 哈尔滨工业大学 | Following type three-dimensional photoelectric auto-collimation method and device based on grating |
| CN109579776B (en) * | 2019-01-11 | 2021-05-11 | 哈尔滨工业大学 | High-precision anti-interference large-working-distance auto-collimation device and method |
| CN109579776A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | Anti-interference big working distance autocollimation and method in high precision |
| CN109579777A (en) * | 2019-01-11 | 2019-04-05 | 哈尔滨工业大学 | The anti-interference big working distance autocollimation of double light sources high-precision and method |
| CN109579777B (en) * | 2019-01-11 | 2021-05-11 | 哈尔滨工业大学 | Double-light-source high-precision anti-interference large-working-distance auto-collimation device and method |
| CN110375708A (en) * | 2019-08-15 | 2019-10-25 | 中国科学院长春光学精密机械与物理研究所 | A kind of three-dimensional perspective measuring system |
| CN110375708B (en) * | 2019-08-15 | 2020-10-13 | 中国科学院长春光学精密机械与物理研究所 | Three-dimensional angle measurement system |
| CN110641513B (en) * | 2019-09-25 | 2021-07-30 | 北京交通大学 | Detection system and method for wheel-rail acting force and tread fault |
| CN110641513A (en) * | 2019-09-25 | 2020-01-03 | 北京交通大学 | Detection system and method for wheel-rail acting force and tread fault |
| CN114046732A (en) * | 2021-11-12 | 2022-02-15 | 北京交通大学 | Method and system for simultaneously measuring multi-degree-of-freedom geometric errors by using laser |
| CN114046732B (en) * | 2021-11-12 | 2024-01-26 | 北京交通大学 | Method and system for simultaneously measuring geometric errors of multiple degrees of freedom by utilizing laser |
| CN114234854A (en) * | 2021-11-22 | 2022-03-25 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
| CN114234854B (en) * | 2021-11-22 | 2023-10-20 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
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