CN114234854B - Method and device for simultaneously measuring three-degree-of-freedom angles - Google Patents
Method and device for simultaneously measuring three-degree-of-freedom angles Download PDFInfo
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- CN114234854B CN114234854B CN202111389314.1A CN202111389314A CN114234854B CN 114234854 B CN114234854 B CN 114234854B CN 202111389314 A CN202111389314 A CN 202111389314A CN 114234854 B CN114234854 B CN 114234854B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention relates to a method and a device for simultaneously measuring three-degree-of-freedom angles, wherein the method comprises the following steps: a measuring target mirror for emitting light is fixedly arranged on a measured target, and the measuring target mirror is distributed on two mutually perpendicular planes; simultaneously, two mutually perpendicular laser beams are emitted to the measuring target mirrors in the two mutually perpendicular planes, and the measuring target mirrors reflect the laser beams; simultaneously, processing the two beams of reflected light according to a laser heterodyne interferometry principle or a laser collimation measurement principle to obtain two beams of interference light signals; simultaneously, two paths of interference optical signals are collected and subjected to photoelectric conversion to obtain two paths of electric signals; the pitch, yaw and roll angle values of the measured target are obtained after the obtained two paths of electric signals are understood and calculated through the data; and calculating the environmental parameters measured in real time to obtain a gas refractive index value, and compensating and correcting the obtained pitch angle, yaw angle and roll angle values in real time by using the gas refractive index value.
Description
Technical Field
The invention relates to the field of laser interferometry, in particular to a method and a device for simultaneously measuring three-degree-of-freedom angles.
Background
Currently, high-precision measurement of three-degree-of-freedom angle gestures of a target including pitch angle, yaw angle and roll angle is required in many cases. However, the limitation of the measurement method and the characteristics of the measured object is limited, the existing measurement means can only realize simultaneous measurement of a single angle or two angles, and the requirement of simultaneous high-precision measurement of three-degree-of-freedom angles cannot be met. Therefore, in terms of angle measurement, it is necessary to study a method of measuring three free angles with high accuracy at the same time. Among the measurement methods, the laser heterodyne interferometry method is widely applied to the field of precise measurement by virtue of the advantages of high measurement precision, long measurement distance, strong environment interference resistance and the like. The measuring method based on laser heterodyne interferometry realizes high-precision measurement of three free angles, improves the precision of the measured angles by several orders of magnitude, and greatly improves the angle measuring capability and the measuring efficiency.
Disclosure of Invention
The invention solves the technical problems that: aiming at the problems of the existing three-degree-of-freedom angle simultaneous measurement method, the three-degree-of-freedom angle simultaneous measurement method and the device are provided.
The solution of the invention is as follows: a method for simultaneously measuring three-degree-of-freedom angles comprises the following steps:
a measuring target mirror for emitting light is fixedly arranged on a measured target, and the measuring target mirror is distributed on two mutually perpendicular planes;
simultaneously, two mutually perpendicular laser beams are emitted to the measuring target mirrors in the two mutually perpendicular planes, and the measuring target mirrors reflect the laser beams; one laser consists of three lasers with the same wavelength and is used for measuring the pitching angle and the deflection angle; the other laser consists of two lasers with the same wavelength and is used for measuring the roll angle;
simultaneously, processing the two beams of reflected light according to a laser heterodyne interferometry principle or a laser collimation measurement principle to obtain two beams of interference light signals;
simultaneously, two paths of interference optical signals are collected and subjected to photoelectric conversion to obtain two paths of electric signals; the pitch, yaw and roll angle values of the measured target are obtained after the obtained two paths of electric signals are understood and calculated through the data;
and calculating the environmental parameters measured in real time to obtain a gas refractive index value, and compensating and correcting the obtained pitch angle, yaw angle and roll angle values in real time by using the gas refractive index value.
Preferably, the measuring target lens is five pyramid prisms, wherein three pyramid prisms positioned in the same plane and marked as the front face participate in the reflection of the transmission light measured by the pitch angle and the yaw angle, and the position and the configuration are right triangle, isosceles triangle or equilateral triangle; the other two pyramid prisms positioned on the other plane and marked as side surfaces participate in the reflection of the transmitted light in the roll angle measurement; wherein, two pyramid prisms on the front face and one pyramid prism on the side face are positioned on a plane parallel to the large line, and the heights of the remaining two pyramid prisms are the same relative to the plane.
Preferably, the pyramid center distance between every two of the three pyramid prisms on the front surface and the measured pyramid center distances of the two pyramid prisms need to be precisely calibrated, and the calibration precision reaches the micrometer level.
A three degree of freedom angle simultaneous measurement device, comprising: the device comprises a pitch angle and deflection angle measuring unit, a roll angle measuring unit, a measuring target lens unit, an environment sensor, a data acquisition and processing unit and a display module;
the measuring target mirror unit is fixedly arranged on a measured target and used as a gesture change sensitive unit to realize the reflection of light transmitted by the pitch angle and yaw angle measuring unit and the roll angle measuring unit;
the pitch angle and deflection angle measuring unit and the roll angle measuring unit simultaneously emit laser to the measuring target lens unit, and the two laser beams are mutually perpendicular; both acquire interference light signals according to the reflected light and send the interference light signals to a data acquisition and processing unit;
the environment sensor obtains environment parameters through real-time measurement and then sends the environment parameters to the data acquisition and processing unit;
the data acquisition and processing unit is used for acquiring and photoelectrically converting the received two paths of interference optical signals in parallel to obtain two paths of electric signals; the electric signals are subjected to data understanding and calculation to obtain pitch angle, yaw angle and roll angle data; and the obtained angle measurement data are sent to a display module for display after the data are compensated and corrected according to the gas refractive index obtained by calculating the environmental parameters.
Preferably, the measuring target lens unit comprises five pyramid prisms in total, wherein the front surface comprises three pyramid prisms, the side surface comprises two pyramid prisms, and all the pyramid prisms are fixedly arranged on the metal base; the front surface is a reflecting surface which participates in transmitting light by the pitch angle and yaw angle measuring unit; the side surface is a reflecting surface which participates in the transmission of light by the roll angle measuring unit.
Preferably, the three pyramid prisms on the front face are in a right triangle or isosceles triangle or equilateral triangle, wherein two pyramid prisms on the front face and one pyramid prism on the side face are positioned on a plane parallel to the large line, and the heights of the remaining two pyramid prisms are the same relative to the plane.
Preferably, the pyramid center distance between every two of the three pyramid prisms on the front surface and the pyramid center distance between the two pyramid prisms on the side surface are required to be precisely calibrated, and the calibration precision reaches the micrometer level.
Preferably, the pitch angle and yaw angle measuring unit comprises a first helium-neon laser; a first half-wave plate; a first beam-splitting prism; a first polarizing plate; a first photodetector; a second light splitting prism; a first right angle mirror; a first polarization splitting prism; a second polarizing plate; a second photodetector; a quarter wave plate of a first pyramid prism; a first quarter wave plate; a third light-splitting prism; a second polarization splitting prism; a second quarter wave plate with a pyramid prism; a third polarizing plate; a third photodetector; a second quarter wave plate; a second right angle mirror; a third polarization splitting prism; a third quarter wave plate with a pyramid prism; a fourth polarizing plate; a fourth photodetector; a third quarter wave plate; the first pitch angle and yaw angle measuring module; the second pitch angle and yaw angle measuring module; the third pitch angle and yaw angle measuring module;
the output end of the first helium-neon laser is aligned with a first half wave plate, the first half wave plate is aligned with a first beam splitter prism, the first polaroid is positioned at one side of the first beam splitter prism, which is used for vertically polarizing reflected light, and the first polaroid is aligned with the first photoelectric detector; the first beam splitting prism is aligned with the second beam splitting prism, the reflected light of the second beam splitting prism is aligned with the first right-angle reflecting mirror, the first right-angle reflecting mirror is aligned with the first polarization beam splitting prism, one side of the first polarization beam splitting prism is aligned with the second polaroid, and the second polaroid is aligned with the second photoelectric detector; the quarter wave plate of the first pyramid prism is positioned at one side of the first polarization beam splitting prism for reflecting light; the first polarization splitting prism is aligned with the first quarter wave plate, and the first quarter wave plate is aligned with the first angular cone prism;
the transmission light of the second beam splitting prism is aligned with the third beam splitting prism, the transmission light of the third beam splitting prism is aligned with the second polarization beam splitting prism, one side of the second polarization beam splitting prism is aligned with the third polaroid, and the third polaroid is aligned with the third photoelectric detector; the quarter wave plate of the second pyramid prism is positioned at one side of the second polarization splitting prism for reflecting light; the second polarization beam splitting prism is aligned with the second quarter wave plate, and the second quarter wave plate is aligned with the second pyramid prism; the reflected light of the third light splitting prism is aligned with the second right-angle reflecting mirror, the reflected light of the second right-angle reflecting mirror is aligned with the third polarization splitting prism, one side of the third polarization splitting prism is aligned with the fourth polaroid, and the fourth polaroid is aligned with the fourth photoelectric detector; the quarter wave plate of the third pyramid prism is positioned at one side of the third polarization beam splitting prism for reflecting light; the third polarization splitting prism is aligned with a third quarter-wave plate, and the third quarter-wave plate is aligned with a third pyramid prism;
the fourth light splitting prism horizontally polarized transmitted light is aligned with the fourth light splitting prism, the fourth light splitting prism is aligned with the second polarized light splitting prism, a quarter wave plate of the second pyramid prism is positioned on one side of the second polarized light splitting prism, a third polaroid is positioned on the other side opposite to the second polarized light splitting prism, and the third polaroid is aligned with the third photodetector;
the second polarization beam splitting prism is aligned with the second quarter wave plate, and the second quarter wave plate is aligned with the second pyramid prism; one side of the fourth light splitting prism, which is used for vertically polarizing the reflected light, is aligned with the second right-angle reflecting mirror, and the second right-angle reflecting mirror is aligned with the third polarization light splitting prism; the fourth wave plate of the third pyramid prism is positioned at one side of the third polarization beam splitter prism, the fourth polaroid and the fourth photoelectric detector are positioned at the other opposite side of the third polarization beam splitter prism, and the third polarization beam splitter prism is aligned with the fourth photoelectric detector; the third polarization splitting prism is aligned with a third quarter-wave plate, and the third quarter-wave plate is aligned with a third pyramid prism.
Preferably, the splitting ratio of the first splitting prism is 2:8, the splitting ratio of the second splitting prism is 3:7, and the splitting ratio of the third splitting prism is 5:5.
Preferably, the roll angle measuring unit includes: a second helium-neon laser, a second half wave plate; a fourth light-splitting prism; a fifth polarizing plate; a fifth photodetector; a fifth light-splitting prism; a third right angle mirror; a fourth quarter wave plate with a pyramid prism; a fourth polarization beam splitter prism; a sixth polarizer; a sixth photodetector; a fourth quarter wave plate; a fifth quarter wave with pyramid prism; a fifth polarization splitting prism; a seventh polarizer; a seventh photodetector; a fifth quarter wave plate;
the output end of the second helium-neon laser is aligned with a second half-wave plate, the second half-wave plate is aligned with a fourth light splitting prism, the reflected light of the fourth light splitting prism is aligned with a fifth polaroid, and the fifth polaroid is aligned with a fifth photoelectric detector; the transmitted light of the fourth light splitting prism is aligned with the fifth light splitting prism, the reflected light of the fifth light splitting prism is aligned with the third right angle reflecting mirror, the emitted light of the third right angle reflecting mirror is aligned with the fourth polarization light splitting prism, one side of the fourth polarization light splitting prism is aligned with the sixth polaroid, and the sixth polaroid is aligned with the sixth photoelectric detector; the fourth quarter wave plate with the pyramid prism is positioned at one side of the fourth polarization beam splitting prism for reflecting light; the fourth polarization beam splitter prism is aligned with a fourth quarter-wave plate, and the fourth quarter-wave plate is aligned with the fourth pyramid prism;
the transmitted light of the fifth light splitting prism is aligned with the fifth polarization light splitting prism, one side of the fifth polarization light splitting prism is aligned with the seventh polaroid, and the seventh polaroid is aligned with the seventh photoelectric detector; the quarter wave of the fifth pyramid prism is positioned at one side of the fifth polarization beam splitting prism for reflecting light; the fifth polarization splitting prism is aligned with the fifth quarter wave plate, and the fifth quarter wave plate is aligned with the fifth pyramid prism.
Compared with the prior art, the invention has the beneficial effects that: the invention provides a method and a device for simultaneously measuring three-degree-of-freedom angles based on a laser heterodyne interferometry method, which have the advantages of compact structure, high measurement precision, long measurement distance and the like, and can be used for measuring the angle posture with high precision.
Firstly, the three-freedom-angle simultaneous measurement can be realized by using the integrated measurement target lens without changing the target lens.
Secondly, the roll angle is skillfully measured by utilizing the measurement principle that the pitch angle in one direction is the roll angle in the other direction, so that the defects of low measurement accuracy and the like of the traditional roll angle measuring instrument such as an electronic level meter and the like are avoided.
And thirdly, an integrated interferometry lens group is adopted to realize an interferometry light path, so that the miniaturization and integration of the whole measurement system are realized conveniently, the structure is compact, the volume is small, and the installation and adjustment are also convenient.
Fourth, the characteristic of strong environmental interference resistance of the laser heterodyne interferometry method is utilized, so that the measurement system is more suitable for being used in complex external environments, and has strong environmental applicability.
Drawings
FIG. 1 is a schematic block diagram of three degrees of freedom angle simultaneous measurement
FIG. 2 is a schematic diagram of a measurement target unit structure
Detailed Description
The invention is further illustrated below with reference to examples.
The invention discloses a method and a device for simultaneously measuring three degrees of freedom angles, wherein a system mainly comprises the following steps: the device comprises a pitch angle and yaw angle measuring unit 1, a roll angle measuring unit 2, a measuring target lens unit 3, an environment sensor 4, a data acquisition and processing unit 5 and a computer 6. The pitch angle and yaw angle measuring unit is used for measuring the pitch angle and the yaw angle through a laser heterodyne interferometry method; the roll angle measuring unit is arranged at the other side of the pitch angle and yaw angle measuring unit and is used for measuring the roll angle; the measuring target mirror unit is fixed on a target and used as a gesture change sensitive unit to realize the reflection of light transmitted by the pitch angle and yaw angle measuring unit and the roll angle measuring unit; the environment sensor is used for compensating and correcting the refractive index of the air in real time after measuring the environment parameters; the data acquisition and processing unit acquires the interference light signals, performs photoelectric conversion, performs calculation processing on the obtained electric signals, and displays and outputs pitch angle, yaw angle and roll angle values through a computer. The invention is mainly used for simultaneously measuring the pitch angle, the yaw angle and the roll angle of the measured object with high precision.
The pitch angle and deflection angle measuring unit emits three paths of laser beams with the same wavelength to the measuring target lens unit, and the measuring target lens unit reflects the received three paths of laser beams through the three pyramid prisms and returns the three paths of laser beams to the pitch angle and deflection angle measuring unit, and interference light is generated after beam combination. The reflected and transmitted laser light here constitutes three laser heterodyne interferometers by means of three corner cube prism or the like optics, respectively. The inclination angle of the pyramid prisms RR1 and RR2 along one direction is in direct proportion to the phase of the interference signal of the laser in the direction, so that the change of the included angle between the optical axis and the target mirror can be obtained by detecting the interference signal through the photoelectric detector, and the pitch angle value of the calibrating device is obtained. The azimuth angle in the direction perpendicular to the direction is measured by the corner cubes RR2 and RR3 by the same principle.
The measuring target mirror unit is used for reflecting the received two paths of laser beams through two pyramid prisms on the side surfaces of the measuring target mirror unit, and then the two paths of laser beams return to the rolling angle measuring unit and generate interference light after beam combination. The environment sensor is used for collecting temperature, humidity, atmospheric pressure and carbon dioxide concentration parameters in real time so as to compensate and correct errors caused by gas refractive index measurement values on angle measurement. The calculation formula of the small-angle rotation is as follows:
α＝arcsin(δ/L) (1)
wherein delta is the difference between the moving distances of the two pyramid prisms, and L is the center distance of the two target lenses.
The data acquisition and processing unit mainly comprises a data acquisition part and a data processing part, wherein the data acquisition part converts an acquired optical signal into an electric signal and performs direct current blocking processing; the data processing part carries out data resolving processing on the electric signals to obtain phase information of five paths of light beam interference light signals, converts the phase information into displacement, obtains angle measurement values by solving arcsine, and displays and outputs the angle measurement values through a computer.
The pitch angle and yaw angle measuring unit adopts a double-beam simultaneous length measuring method, and obtains simultaneous measurement of the pitch angle and the yaw angle through three paths of displacement values. Fig. 1 shows a preferred embodiment of the pitch and yaw angle measurement unit, but is not limited to this embodiment. As shown in fig. 1, a first helium-neon laser 101 is included; a first half wave plate 102; a first beam-splitting prism 103; a first polarizing plate 104; a first photodetector 105; a second beam splitting prism 106; a first right angle mirror 107; a first polarization splitting prism 108; a second polarizing plate 109; a second photodetector 110; a first quarter wave plate 111 with pyramid prism; a first quarter wave plate 112; a third light-splitting prism 113; a second polarization splitting prism 114; a second pyramid prism quarter wave plate 115; a third polarizing plate 116; a third photodetector 117; a second quarter wave plate 118; a second right angle mirror 119; a third polarization splitting prism 120; a third quarter wave plate 121 with pyramid prism; a fourth polarizing plate 122; a fourth photodetector 123; a third quarter wave plate 124; a first pitch angle and yaw angle measurement module 11; a second pitch angle and yaw angle measurement module 12; and a third pitch angle and yaw angle measurement module 13.
The output end of the first helium-neon laser 101 is aligned with the first half wave plate 102, the first half wave plate 102 is aligned with the first beam splitter prism 103, the first polarizer 104 is positioned at one side of the first beam splitter prism 103 where the reflected light is vertically polarized, and the first polarizer 104 is aligned with the first photodetector 105. The first dichroic prism 103 is aligned with the second dichroic prism 106, the reflected light of the second dichroic prism 106 is aligned with the first right angle mirror 107, the first right angle mirror 107 is aligned with the first polarization dichroic prism 108, one side of the first polarization dichroic prism 108 is aligned with the second polarizing plate 109, and the second polarizing plate 109 is aligned with the second photodetector 110. The quarter wave plate 111 of the first pyramid prism is located on the side of the first polarization splitting prism 108 that reflects light. The first polarization splitting prism 108 is aligned with the first quarter wave plate 112, and the first quarter wave plate 112 is aligned with the first angular cone prism 301.
The transmitted light of the second dichroic prism 106 is aligned with the third dichroic prism 113, the transmitted light of the third dichroic prism 113 is aligned with the second polarization dichroic prism 114, one side of the second polarization dichroic prism 114 is aligned with the third polarizing plate 116, and the third polarizing plate 116 is aligned with the third photodetector 117. The second pyramid prism quarter wave plate 115 is located on the side of the second polarization splitting prism 114 that reflects light. The second polarization splitting prism 114 is aligned with the second quarter wave plate 118 and the second quarter wave plate 118 is aligned with the second corner cube 302. The reflected light of the third dichroic prism 113 is aligned with the second right angle reflecting mirror 119, the reflected light of the second right angle reflecting mirror 119 is aligned with the third polarization dichroic prism 120, one side of the third polarization dichroic prism 120 is aligned with the fourth polarizing plate 122, and the fourth polarizing plate 122 is aligned with the fourth photodetector 123. The third quarter wave plate 121 of the third pyramid prism is positioned at one side of the third polarization splitting prism 120 that reflects light. The third polarization splitting prism 120 is aligned with the third quarter-wave plate 124, and the third quarter-wave plate 124 is aligned with the third corner cube 303.
The fourth dichroic prism 108 horizontally polarized transmitted light is aligned with the fourth dichroic prism 115, the fourth dichroic prism 115 is aligned with the second polarization dichroic prism 116, the second pyramid prism's quarter wave plate 117 is located on one side of the second polarization dichroic prism 116, the third polarizer 118 is located on the other side opposite to the third polarization dichroic prism 116, and the third polarizer 118 is aligned with the third photodetector 119.
The second polarization splitting prism 116 is aligned with the second quarter wave plate 120 and the second quarter wave plate 120 is aligned with the second corner cube 302. One side of the fourth dichroic prism 115 vertically polarizing the reflected light is aligned with the second right angle reflecting mirror 121, and the second right angle reflecting mirror 121 is aligned with the third polarization dichroic prism 122; the quarter wave plate 123 of the third pyramid prism is located on one side of the third polarization splitting prism 122, the fourth polarizer 124 and the fourth photodetector 125 are located on the other side opposite to the third polarization splitting prism 122, and the third polarization splitting prism 122 is aligned with the fourth photodetector 125. The third polarization splitting prism 122 is aligned with the third quarter-wave plate 126, and the third quarter-wave plate 126 is aligned with the third corner cube 303.
The roll angle measurement method is to measure the pitch angle in one direction in the direction of the roll angle in the other direction. Also, a preferred embodiment of the roll angle measurement unit is shown in fig. 1, but is not limited to this implementation. As shown in fig. 1, the roll angle measurement unit includes: a second helium-neon laser 201, a second half wave plate 202; a fourth prism 203; a fifth polarizing plate 204; a fifth photodetector 205; a fifth dichroic prism 206; a third right angle mirror 207; a fourth quarter wave plate 208 with corner cube prism; a fourth polarization splitting prism 209; a sixth polarizer 210; a sixth photodetector 211; a fourth quarter waveplate 212; a fifth quarter wave 213 of the pyramid prism; a fifth polarization splitting prism 214; a seventh polarizing plate 215; a seventh photodetector 216; a fifth quarter wave plate 217;
the output of the second helium-neon laser 201 is aligned with the second half wave plate 202, the second half wave plate 202 is aligned with the fourth dichroic prism 203, the reflected light of the fourth dichroic prism 203 is aligned with the fifth polarizer 204, and the fifth polarizer 204 is aligned with the fifth photodetector 205. The transmitted light of the fourth dichroic prism 203 is aligned with the fifth dichroic prism 206, the reflected light of the fifth dichroic prism 206 is aligned with the third right angle mirror 207, the emitted light of the third right angle mirror 207 is aligned with the fourth polarization dichroic prism 209, one side of the fourth polarization dichroic prism 209 is aligned with the sixth polarizer 210, and the sixth polarizer 210 is aligned with the sixth photodetector 211. The fourth quarter-wave plate 208 with pyramid prism is located at the side of the fourth polarization splitting prism 209 that reflects light. The fourth polarization splitting prism 209 is aligned with the fourth quarter wave plate 212, and the fourth quarter wave plate 212 is aligned with the fourth corner cube 304.
The transmitted light of the fifth dichroic prism 206 is aligned with the fifth polarization dichroic prism 214, one side of the fifth polarization dichroic prism 214 is aligned with the seventh polarizing plate 215, and the seventh polarizing plate 215 is aligned with the seventh photodetector 216. The quarter wave 213 of the fifth pyramid prism is located on the side of the fifth polarization splitting prism 214 that reflects light. The fifth polarization splitting prism 214 is aligned with the fifth quarter wave plate 217, and the fifth quarter wave plate 217 is aligned with the fifth axicon 305. The data acquisition and processing 5 and the environmental sensor 4 are connected with a computer 6 through a cable.
In a preferred embodiment of the present invention, the splitting ratio of the first splitting prism is 2:8, the splitting ratio of the second splitting prism is 3:7, and the splitting ratio of the third splitting prism is 5:5.
The integrated optical path is constructed in the space orientation by adopting the pitch angle and yaw angle measuring unit, all optical components are bonded together in a bonding mode on the premise of ensuring the measurement precision, and the bonded optical components are further bonded to the metal base, so that the structure of the interferometry lens set is compact and small due to the use of an adjustable optical lens frame is avoided. The pitch angle and yaw angle measuring unit and the roll angle measuring unit are mutually separated on the light path, so that the measurement of the roll angle is not interfered in the pitch angle and yaw angle measuring process; and meanwhile, the separation structure enables the adjustment of the measuring target lens unit to be more convenient.
The measuring target lens unit is provided with a required number of pyramid prisms on the front surface and the side surface at the same time, and three angle values are measured by using a single measuring target lens. As shown in fig. 2, the measurement target mirror unit 3 includes: a first axicon 301; a second corner cube 302; a third corner cube 303; a fourth corner cube 304; a fifth pyramid prism 305;
all pyramid prisms are fixedly arranged on the metal base; the three pyramid prisms 301, 302 and 303 on the front face are in right triangle shape; the corner cubes 301, 303, 305 lie in a plane parallel to the large scale, and the corner cubes 302, 304 are at the same height relative to the plane.
The pyramid center distance between every two of the three pyramid prisms on the front surface and the pyramid center distance between the two pyramid prisms on the side surface are required to be precisely calibrated, and the calibration precision reaches the micrometer level (generally below 10 micrometers).
Although the present invention has been described in terms of the preferred embodiments, it is not intended to be limited to the embodiments, and any person skilled in the art can make any possible variations and modifications to the technical solution of the present invention by using the methods and technical matters disclosed above without departing from the spirit and scope of the present invention, so any simple modifications, equivalent variations and modifications to the embodiments described above according to the technical matters of the present invention are within the scope of the technical matters of the present invention.
Claims (9)
1. The method for simultaneously measuring the three-degree-of-freedom angles is characterized by comprising the following steps of:
a measuring target mirror for emitting light is fixedly arranged on a measured target, and the measuring target mirror is distributed on two mutually perpendicular planes;
simultaneously, two mutually perpendicular laser beams are emitted to the measuring target mirrors in the two mutually perpendicular planes, and the measuring target mirrors reflect the laser beams; one laser consists of three lasers with the same wavelength and is used for measuring the pitching angle and the deflection angle; the other laser consists of two lasers with the same wavelength and is used for measuring the roll angle;
simultaneously, processing the two beams of reflected light according to a laser heterodyne interferometry principle or a laser collimation measurement principle to obtain two beams of interference light signals;
simultaneously, two paths of interference optical signals are collected and subjected to photoelectric conversion to obtain two paths of electric signals; the pitch, yaw and roll angle values of the measured target are obtained after the obtained two paths of electric signals are understood and calculated through the data;
and calculating the environmental parameters measured in real time to obtain a gas refractive index value, and compensating and correcting the obtained pitch angle, yaw angle and roll angle values in real time by using the gas refractive index value.
2. The method according to claim 1, characterized in that: the measuring target lens is five pyramid prisms, wherein three pyramid prisms positioned in the same plane and marked as the front face participate in the reflection of the transmission light measured by the pitch angle and the yaw angle, and the position configuration of the measuring target lens is a right triangle, an isosceles triangle or an equilateral triangle; the other two pyramid prisms positioned on the other plane and marked as side surfaces participate in the reflection of the transmitted light in the roll angle measurement; wherein, two pyramid prisms on the front face and one pyramid prism on the side face are positioned on a plane parallel to the large line, and the heights of the remaining two pyramid prisms are the same relative to the plane.
3. The method according to claim 2, characterized in that: the pyramid center distance between every two of the three pyramid prisms on the front surface and the pyramid center distance between the two pyramid prisms need to be precisely calibrated, and the calibration precision reaches the micrometer level.
4. The three-degree-of-freedom angle simultaneous measurement device is characterized by comprising: the device comprises a pitch angle and deflection angle measuring unit, a roll angle measuring unit, a measuring target lens unit, an environment sensor, a data acquisition and processing unit and a display module;
the measuring target mirror unit is fixedly arranged on a measured target and used as a gesture change sensitive unit to realize the reflection of light transmitted by the pitch angle and yaw angle measuring unit and the roll angle measuring unit;
the pitch angle and deflection angle measuring unit and the roll angle measuring unit simultaneously emit laser to the measuring target lens unit, and the two laser beams are mutually perpendicular; both acquire interference light signals according to the reflected light and send the interference light signals to a data acquisition and processing unit;
the environment sensor obtains environment parameters through real-time measurement and then sends the environment parameters to the data acquisition and processing unit;
the data acquisition and processing unit is used for acquiring and photoelectrically converting the received two paths of interference optical signals in parallel to obtain two paths of electric signals; the electric signals are subjected to data understanding and calculation to obtain pitch angle, yaw angle and roll angle data; the data are compensated and corrected according to the gas refractive index obtained by calculating the environmental parameters, and the obtained angle measurement data are sent to a display module for display;
the measuring target lens unit comprises five pyramid prisms in total, wherein the front surface comprises three pyramid prisms, the side surface comprises two pyramid prisms, and all the pyramid prisms are fixedly arranged on the metal base; the front surface is a reflecting surface which participates in transmitting light by the pitch angle and yaw angle measuring unit; the side surface is a reflecting surface which participates in the transmission of light by the roll angle measuring unit.
5. The apparatus according to claim 4, wherein: the three pyramid prisms on the front face are in a right triangle or isosceles triangle or equilateral triangle, wherein the two pyramid prisms on the front face and one pyramid prism on the side face are positioned on a plane parallel to the large line, and the heights of the remaining two pyramid prisms are the same relative to the plane.
6. The apparatus according to claim 5, wherein: the pyramid center distance between every two of the three pyramid prisms on the front surface and the pyramid center distance between the two pyramid prisms on the side surface are required to be precisely calibrated, and the calibration precision reaches the micrometer level.
7. The apparatus according to claim 4, wherein: the pitch angle and yaw angle measuring unit comprises a first helium-neon laser; a first half-wave plate; a first beam-splitting prism; a first polarizing plate; a first photodetector; a second light splitting prism; a first right angle mirror; a first polarization splitting prism; a second polarizing plate; a second photodetector; a quarter wave plate of a first pyramid prism; a first quarter wave plate; a third light-splitting prism; a second polarization splitting prism; a second quarter wave plate with a pyramid prism; a third polarizing plate; a third photodetector; a second quarter wave plate; a second right angle mirror; a third polarization splitting prism; a third quarter wave plate with a pyramid prism; a fourth polarizing plate; a fourth photodetector; a third quarter wave plate; the first pitch angle and yaw angle measuring module; the second pitch angle and yaw angle measuring module; the third pitch angle and yaw angle measuring module;
the output end of the first helium-neon laser is aligned with a first half wave plate, the first half wave plate is aligned with a first beam splitter prism, the first polaroid is positioned at one side of the first beam splitter prism, which is used for vertically polarizing reflected light, and the first polaroid is aligned with the first photoelectric detector; the first beam splitting prism is aligned with the second beam splitting prism, the reflected light of the second beam splitting prism is aligned with the first right-angle reflecting mirror, the first right-angle reflecting mirror is aligned with the first polarization beam splitting prism, one side of the first polarization beam splitting prism is aligned with the second polaroid, and the second polaroid is aligned with the second photoelectric detector; the quarter wave plate of the first pyramid prism is positioned at one side of the first polarization beam splitting prism for reflecting light; the first polarization splitting prism is aligned with the first quarter wave plate, and the first quarter wave plate is aligned with the first angular cone prism;
the transmission light of the second beam splitting prism is aligned with the third beam splitting prism, the transmission light of the third beam splitting prism is aligned with the second polarization beam splitting prism, one side of the second polarization beam splitting prism is aligned with the third polaroid, and the third polaroid is aligned with the third photoelectric detector; the quarter wave plate of the second pyramid prism is positioned at one side of the second polarization splitting prism for reflecting light; the second polarization beam splitting prism is aligned with the second quarter wave plate, and the second quarter wave plate is aligned with the second pyramid prism; the reflected light of the third light splitting prism is aligned with the second right-angle reflecting mirror, the reflected light of the second right-angle reflecting mirror is aligned with the third polarization splitting prism, one side of the third polarization splitting prism is aligned with the fourth polaroid, and the fourth polaroid is aligned with the fourth photoelectric detector; the quarter wave plate of the third pyramid prism is positioned at one side of the third polarization beam splitting prism for reflecting light; the third polarization splitting prism is aligned with a third quarter-wave plate, and the third quarter-wave plate is aligned with a third pyramid prism;
the fourth light splitting prism horizontally polarized transmitted light is aligned with the fourth light splitting prism, the fourth light splitting prism is aligned with the second polarized light splitting prism, a quarter wave plate of the second pyramid prism is positioned on one side of the second polarized light splitting prism, a third polaroid is positioned on the other side opposite to the second polarized light splitting prism, and the third polaroid is aligned with the third photodetector;
the second polarization beam splitting prism is aligned with the second quarter wave plate, and the second quarter wave plate is aligned with the second pyramid prism; one side of the fourth light splitting prism, which is used for vertically polarizing the reflected light, is aligned with the second right-angle reflecting mirror, and the second right-angle reflecting mirror is aligned with the third polarization light splitting prism; the fourth wave plate of the third pyramid prism is positioned at one side of the third polarization beam splitter prism, the fourth polaroid and the fourth photoelectric detector are positioned at the other opposite side of the third polarization beam splitter prism, and the third polarization beam splitter prism is aligned with the fourth photoelectric detector; the third polarization splitting prism is aligned with a third quarter-wave plate, and the third quarter-wave plate is aligned with a third pyramid prism.
8. The apparatus according to claim 7, wherein: the first beam splitting prism has a beam splitting ratio of 2:8, the second beam splitting prism has a beam splitting ratio of 3:7, and the third beam splitting prism has a beam splitting ratio of 5:5.
9. The apparatus according to claim 4, wherein: the roll angle measurement unit includes: a second helium-neon laser, a second half wave plate; a fourth light-splitting prism; a fifth polarizing plate; a fifth photodetector; a fifth light-splitting prism; a third right angle mirror; a fourth quarter wave plate with a pyramid prism; a fourth polarization beam splitter prism; a sixth polarizer; a sixth photodetector; a fourth quarter wave plate; a fifth quarter wave with pyramid prism; a fifth polarization splitting prism; a seventh polarizer; a seventh photodetector; a fifth quarter wave plate;
the output end of the second helium-neon laser is aligned with a second half-wave plate, the second half-wave plate is aligned with a fourth light splitting prism, the reflected light of the fourth light splitting prism is aligned with a fifth polaroid, and the fifth polaroid is aligned with a fifth photoelectric detector; the transmitted light of the fourth light splitting prism is aligned with the fifth light splitting prism, the reflected light of the fifth light splitting prism is aligned with the third right angle reflecting mirror, the emitted light of the third right angle reflecting mirror is aligned with the fourth polarization light splitting prism, one side of the fourth polarization light splitting prism is aligned with the sixth polaroid, and the sixth polaroid is aligned with the sixth photoelectric detector; the fourth quarter wave plate with the pyramid prism is positioned at one side of the fourth polarization beam splitting prism for reflecting light; the fourth polarization beam splitter prism is aligned with a fourth quarter-wave plate, and the fourth quarter-wave plate is aligned with the fourth pyramid prism;
the transmitted light of the fifth light splitting prism is aligned with the fifth polarization light splitting prism, one side of the fifth polarization light splitting prism is aligned with the seventh polaroid, and the seventh polaroid is aligned with the seventh photoelectric detector; the quarter wave of the fifth pyramid prism is positioned at one side of the fifth polarization beam splitting prism for reflecting light; the fifth polarization splitting prism is aligned with the fifth quarter wave plate, and the fifth quarter wave plate is aligned with the fifth pyramid prism.
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