CN107655412B - A kind of ballbar length caliberating device and application method with self calibrating function - Google Patents

A kind of ballbar length caliberating device and application method with self calibrating function Download PDF

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Publication number
CN107655412B
CN107655412B CN201710763969.8A CN201710763969A CN107655412B CN 107655412 B CN107655412 B CN 107655412B CN 201710763969 A CN201710763969 A CN 201710763969A CN 107655412 B CN107655412 B CN 107655412B
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China
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ball
kinematic mount
club
sphere
air
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CN107655412A (en
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李维诗
赵帅
王文祥
于连栋
夏豪杰
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Hefei Polytechnic University
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Hefei Polytechnic University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means
    • G01B11/02Measuring arrangements characterised by the use of optical means for measuring length, width or thickness

Abstract

It is difficult to solve existing caliberating device equipment adjustment for the invention discloses a kind of ballbar length caliberating device and application method with self calibrating function, or the problem of can not demarcate long club.The present invention includes the mobile platform on air-float guide rail, fixed platform positioned at air-float guide rail one end, positioned at the laser interferometer of the other end, four part of fixed platform positioned at air-float guide rail side forms, fixed platform positioned at air-float guide rail side in measurement process is fixed, according to the length for being calibrated club, its position and fixation are adjusted before measuring, three ball kinematic mounts are separately installed in mobile platform and two fixed platforms, three ball kinematic mounts are used to support club to be calibrated, the three ball kinematic mounts in the fixed platform of air-float guide rail one end are with three ball kinematic mounts on mobile platform for realizing the self-calibration of device, three ball kinematic mounts in three ball kinematic mounts and mobile platform in the fixed platform of air-float guide rail side are for demarcating club.

Description

A kind of ballbar length caliberating device and application method with self calibrating function
Technical field
The present invention relates to dimensional measurement technical field, specifically a kind of ballbar length caliberating device with self calibrating function And application method.
Background technique
Club is made of the club of two balls of two high-precision spheres and connection, and the centre of sphere between two balls is away from (hereinafter referred to as Ballbar length) it is the gauged distance that it is provided, ballbar length precision can reach 0.1 micron at present.In industrial standard, ball Bar both ends end sphere diameter is usually 25.4 millimeters, and sphere diameter is that 38.1 millimeters and 50.8 millimeters of club also has application. The length range of common club also may customize the longer length of processing at 100 millimeters to 3000 millimeters.
Club is that one kind of calibration coordinate measuring machine length-measuring error commonly uses one-dimensional standard component, in calibration laser tracking Instrument, laser scanner and industrial photogrammetry instrument etc. also have application.Coordinate measuring machine length is being calibrated using club Before measurement error, it is necessary to high-precision calibrating is carried out to ballbar length, to guarantee the calibration accuracy of coordinate measuring machine.
Ballbar length calibration can use high precision coordinate measuring instrument or special calibrating device.The seat of full accuracy at present The measurement accuracy of co-ordinate measuring machine is (0.3+L/1000) micron, and its measurement range is smaller, is unable to satisfy the long club of high-precision Calibration request;In terms of special instrument development, in terms of the document published, mainly there is China National Measuring Science Research Inst. to develop Dedicated two coordinate measuring machine, National Institute of Standards and Technology respectively with University of Florida and Clemson University cooperation Two kinds of dedicated gauging machines of research.It is in place of the shortcomings of the prior art:
Dedicated two coordinate measuring machine that China National Measuring Science Research Inst. develops needs artificial aiming, and measurement accuracy is dependent on behaviour Make the technical ability of personnel;National Institute of Standards and Technology and the dedicated gauging machine of University of Florida's cooperation research and development can only be used In club of the calibrated length within 1 meter;National Institute of Standards and Technology with and Clemson University dedicated survey it is long Machine can be used for club of the calibrated length within 3 meters, but the mounting and adjusting of this instrument is extremely difficult, and there are Abbe Error has no that National Institute of Standards and Technology actually uses at present.
The summary of the invention ballbar length caliberating device that the object of the present invention is to provide a kind of with self calibrating function and use Method, to solve the problem of that prior art club caliberating device equipment adjustment is difficult or can not demarcate long club.
In order to achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: in left-right direction including long side Air-float guide rail, left position is fixed with laser interferometer adjustment holder on air-float guide rail, installs on laser interferometer adjustment holder There is laser interferometer, right end position is fixed with the first y-z two-freedom fine adjustment stage, the first y-z two-freedom on air-float guide rail One or three ball kinematic mount is installed in fine adjustment stage, holder position is adjusted close to laser interferometer on air-float guide rail and passes through microscope group Mounting rack is equipped with spectroscope and reflection microscope group, and microscope group mounting rack is located on air-float guide rail and the fine tuning of the first y-z two-freedom is flat Air bearing balladeur train is also slidably fitted between platform, right side is fixed with the 2nd y-z two-freedom fine adjustment stage on air bearing balladeur train, and air bearing is sliding Frame upper left side is fixed with the 3rd y-z two-freedom fine adjustment stage, wherein being equipped with reflection in the 3rd y-z two-freedom fine adjustment stage Mirror, and reflecting mirror towards the spectroscope on microscope group mounting rack and reflects microscope group, is equipped in the 2nd y-z two-freedom fine adjustment stage Two or three ball kinematic mount, the two or three ball kinematic mount are oppositely arranged with the one or three ball kinematic mount, are also set in front of air-float guide rail There is the support base in the same plane perpendicular to air-float guide rail, support base rear end extends to air-float guide rail, is fixed on support base Three or three ball kinematic mount, the first, second three ball kinematic mounts are in sustained height.
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: the support base is solid Fixed platform is equipped with adjustable three or the three ball kinematic mount in position in fixed platform;
Or support base is made of balladeur train and slide rail, wherein slide rail is arranged in front of air-float guide rail, and balladeur train is sliding Dynamic to be mounted on slide rail, the three or three ball kinematic mount is fixed on balladeur train by fixed platform;
It, can root by adjustable three or the three ball kinematic mount in position, or with the three or three ball kinematic mount of sledge movements The position that the three or three ball kinematic mount is adjusted according to ballbar length to be calibrated, to demarcate the length of existing various length clubs.
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: the air-float guide rail, branch Support seat is integrally mounted in different support by vibration isolation support respectively.
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: the one or three ball movement branch Seat is finely adjusted by the first y-z two-freedom fine adjustment stage along the direction y, z, and straight line is by being placed on first where guaranteeing laser beam The centre of sphere of club end to be measured sphere in three ball kinematic mounts;
Two or three ball kinematic mount is finely adjusted by the 2nd y-z two-freedom fine adjustment stage along the direction y, z by position, is guaranteed The centre of sphere that straight line where laser beam passes through the club end to be measured sphere being placed in the two or three ball kinematic mount.
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: the spectroscope and Interfere microscope group by the adjustment of microscope group mounting rack can position in the z-direction and the adjustable angle around the direction z, the 3rd y-z two-freedom is micro- Reflecting mirror on leveling platform can be finely adjusted along the position in the direction y, z, so that the laser beam that laser interferometer issues is through spectroscope Be divided and all the way laser after reflecting mirror reflects with another way laser interference.
A kind of ballbar length caliberating device with self calibrating function, it is characterised in that: Abbe error theoretical value It is zero.
A kind of application method of the ballbar length caliberating device with self calibrating function, it is characterised in that: including following step It is rapid:
(1), the club of two unknown lengths is selected to carry out self-calibration, by one end sphere of the club of first unknown lengths It is placed in the one or three ball kinematic mount, movable air-float balladeur train to suitable position and by the another of the club of first unknown lengths End sphere is placed in the two or three ball kinematic mount, by laser interferometer indicating value zero setting;
(2), the first ball bar is removed, and one end sphere of the club of second unknown lengths is placed on the one or three ball fortune On dynamic support, the other end sphere of the club of second unknown lengths is simultaneously placed on second by movable air-float balladeur train to suitable position In three ball kinematic mounts, laser interferometer indicating value is the difference l of the ballbar length of two unknown lengths;
(3), the three or three ball kinematic mount is adjusted to suitable position and fixation, again by the club of first unknown lengths One end sphere be placed in the three or three ball kinematic mount, movable air-float balladeur train to close to laser interferometer suitable position simultaneously will The other end sphere of the club of first unknown lengths is placed in the two or three ball kinematic mount, recording laser interferometer indicating value a;
The club for removing first unknown lengths is placed on one end in the two or three ball kinematic mount, and movable air-float balladeur train is extremely The other end sphere of first ball bar is simultaneously placed on the two or three ball kinematic mount by the suitable position far from laser interferometer, is recorded Laser interferometer indicating value d;
One end sphere of second ball bar is placed on the three or three ball kinematic mount by the club for removing first unknown lengths On, the other end sphere of the second ball bar to the suitable position close to laser interferometer and is placed on second by movable air-float balladeur train In three ball kinematic mounts, recording laser interferometer indicating value b;
Then one end that the second ball bar is placed in the two or three ball kinematic mount is removed, movable air-float balladeur train is to far from sharp The other end sphere of second ball bar is simultaneously placed on the two or three ball kinematic mount by the suitable position of optical interferometer, and recording laser is dry Interferometer indicating value c;
According to the difference l of the ballbar length of triangle relation, laser interferometer indicating value a, b, c, d and two unknown lengths, meter Calculate the laser beam institute that the centre of sphere to the laser interferometer for the free kick boom end sphere being placed in the three or three ball kinematic mount issues In linear distance y;
(4), one end sphere of club to be calibrated is placed in the three or three ball kinematic mount, movable air-float balladeur train is to close The other end sphere of club to be calibrated is simultaneously placed in the two or three ball kinematic mount by the suitable position of laser interferometer, and record swashs Then optical interferometer indicating value removes one end that club to be calibrated is placed in the two or three ball kinematic mount, movable air-float balladeur train is extremely The other end sphere of club to be calibrated is simultaneously placed on the two or three ball kinematic mount by the suitable position far from laser interferometer, is recorded Laser interferometer indicating value, the above process in no particular order, according to the linear distance y and triangle relation being calculated in step (3) Ballbar length to be calibrated is calculated, to reduce error, the step is repeated, takes ballbar length multiple measurement results average value to be calibrated As ballbar length nominal value to be calibrated.
The application method of the ballbar length caliberating device with self calibrating function, it is characterised in that: for marking certainly The club of two fixed unknown lengths, to guarantee stated accuracy, wherein a root long degree is greater than ballbar length to be calibrated, another root long Degree is less than or equal to ballbar length to be calibrated.
The application method of the ballbar length caliberating device with self calibrating function, it is characterised in that: in self-calibration In the process and during calibration club to be calibrated, the club end sphere that is placed in the first, second, third three ball kinematic mounts Same sphere or the identical sphere of nominal value should be used respectively.
Compared with prior art, the invention has the following advantages:
The present invention need to only be adjusted in the laser beam for issuing laser interferometer to parallel with air-float guide rail, and laser interference The laser beam mirror that is split directly reflects the laser beam that instrument issues all the way after spectroscope is divided, and another way laser beam transmission crosses light splitting Mirror is again after reflecting mirror reflects and on the basis of another way laser interference, by the two or the three ball kinematic mount and gas on air bearing balladeur train The position of the one or three fixed ball kinematic mount of floating one section of guide rail is finely adjusted, so that straight line is by being placed on two where laser beam The centre of sphere of club both ends sphere in a three balls kinematic mount, the three or three ball kinematic mount being placed in front of air-float guide rail Relative position can be obtained by self-calibration, position does not influence club stated accuracy.Apparatus of the present invention mounting and adjusting is simple, It is easy to accomplish, it is easy to use without Abbe error, and can theoretically demarcate the club of random length.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention;
Fig. 2 is another structural schematic diagram of the invention;
Fig. 3 is the schematic illustration of the length difference of the present invention two unknown lengths clubs of measurement;
Fig. 4 is the schematic illustration that the present invention realizes self-calibration using two ballbar length differences;
Fig. 5 is the schematic illustration of present invention calibration ballbar length.
Figure label: 1, laser interferometer, 2, laser interferometer adjustment holder, 3, spectroscope and interference microscope group, 4, microscope group Mounting rack, 5, air-float guide rail, 6, air bearing balladeur train, the 7, the 3rd y-z two-freedom fine adjustment stage, 8, reflecting mirror, the 9, the 2nd 3 ball fortune Dynamic support, the 10, the 2nd y-z two-freedom fine adjustment stage, the 11, the first y-z two-freedom fine adjustment stage, the movement of the 12, the 1st ball Support, the 13, the 3rd 3 ball kinematic mount, 14, fixed platform, 15, bracket, 16, balladeur train, 17, slide rail, 18, bracket.
Specific embodiment
Specific embodiment 1: Fig. 1 is schematic structural view of the invention, and only the invention is illustrated in a schematic way referring to attached drawing 1 Basic structure, therefore it only shows the composition relevant to the invention and design diagram.
A kind of ballbar length caliberating device with self calibrating function described in present embodiment include laser interferometer 1, Laser interferometer adjusts holder 2, spectroscope and interference microscope group 3, air-float guide rail 5, air bearing balladeur train 6, the fine tuning of the 3rd y-z two-freedom Platform 7, reflecting mirror 8, the two or three ball kinematic mount 9, the 2nd y-z two-freedom fine adjustment stage 10, the fine tuning of the first y-z two-freedom Platform 11, the one or three ball kinematic mount 12, the three or three ball kinematic mount 13, fixed platform 14, bracket 15, laser interferometer adjustment Holder 2 is fixed on air-float guide rail 5, and spectroscope and reflection microscope group 3 are mounted on air-float guide rail 5 by microscope group mounting rack 4, is reflected Mirror 8 is mounted on air bearing balladeur train 6 by the 3rd y-z two-freedom fine adjustment stage 7, and the two or three ball kinematic mount 9 passes through the 2nd y-z Two-freedom fine adjustment stage 10 is mounted on air bearing balladeur train 6, and the one or three ball kinematic mount 12 is finely tuned by the first y-z two-freedom Platform 11 is mounted on air-float guide rail 5, the threaded hole of regular distribution in fixed platform 14, and the three or three ball kinematic mount 13 utilizes Threaded hole is fixed in fixed platform 14, and fixed platform 14 is mounted on bracket 15 by vibration isolation support, air-float guide rail 5 by every Vibration support is mounted on bracket 15.
Present embodiment has the technical effect that according to ballbar length to be calibrated, adjustable three or three ball kinematic mount 13 Existing various length clubs are realized in the fixed thread hole site of fixed platform 14 so as to adjust the position of three ball kinematic mounts Calibration.
Specific embodiment 2: Fig. 2 is another structural schematic diagram of the invention referring to attached drawing 2, only say in a schematic way Bright basic structure of the invention, therefore it only shows the composition relevant to the invention and design diagram.
A kind of ballbar length caliberating device and application method with self calibrating function described in present embodiment includes swashing Optical interferometer 1, laser interferometer adjustment holder 2, spectroscope and interference microscope group 3, air-float guide rail 5, air bearing balladeur train 6, the 3rd y-z two Freedom degree fine adjustment stage 7, reflecting mirror 8, the two or three ball kinematic mount 9, the 2nd y-z two-freedom fine adjustment stage 10, the first y-z two Freedom degree fine adjustment stage 11, the one or three ball kinematic mount 12, the three or three ball kinematic mount 13, fixed platform 14, bracket 15, balladeur train 16, slide rail 17, bracket 18, laser interferometer adjustment holder 2 are fixed on air-float guide rail 5, and spectroscope and reflection microscope group 3 are logical It crosses microscope group mounting rack 4 to be mounted on air-float guide rail 5, reflecting mirror 8 is mounted on air bearing by the 3rd y-z two-freedom fine adjustment stage 7 On balladeur train 6, the two or three ball kinematic mount 9 is mounted on air bearing balladeur train 6 by the 2nd y-z two-freedom fine adjustment stage 10, and first Three ball kinematic mounts 12 are mounted on air-float guide rail 5 by the first y-z two-freedom fine adjustment stage 11, the three or three ball kinematic mount 13 are fixed in fixed platform 14, and fixed platform 14 is mounted on balladeur train 16 by vibration isolation support, and slide rail 17 is mounted on branch On frame 15, air-float guide rail 5 is installed on mount 18 by vibration isolation support.
Present embodiment has the technical effect that adjustable balladeur train 16 is in slide rail 17 according to ballbar length to be calibrated Position and be fixed, so as to adjust auxiliary platform and the position of three ball kinematic mounts mounted thereto, realize existing various The calibration of length club.
Working principle:
The present invention carries out ballbar length calibration, and specific step is as follows:
Step 1: Fig. 3 is the schematic illustration of the length difference of the present invention two unknown lengths clubs of measurement, root referring to attached drawing 3 According to club to be calibrated approximate length select two unknown lengths clubs, for guarantee stated accuracy, wherein a root long degree be greater than to Ballbar length is demarcated, another root long degree is less than or equal to ballbar length to be calibrated, by one end ball of first unknown lengths club Body is placed in the one or three ball kinematic mount 12, movable air-float balladeur train 6 to suitable position and by first unknown lengths club Other end sphere is placed in the two or three ball kinematic mount 9, by 1 indicating value zero setting of laser interferometer, then removes the first ball bar, And one end sphere of second root unknown lengths club is placed in the one or three ball kinematic mount 12, movable air-float balladeur train 6 to The other end sphere of second unknown lengths club is simultaneously placed in the two or three ball kinematic mount 9, laser interference by suitable position 1 indicating value of instrument is the difference l of two ball pole lengths;
Step 2: Fig. 4 is the schematic illustration that the present invention realizes self-calibration using two ballbar length differences referring to attached drawing 4.It will Three or three ball kinematic mount 13 is adjusted to suitable position and fixation, and one end sphere of the first ball bar in step 1 is placed on In three or three ball kinematic mount 13, movable air-float balladeur train 6 is to the suitable position close to laser interferometer 1 and by the first ball bar Other end sphere is placed in the two or three ball kinematic mount 9, then 1 indicating value a of recording laser interferometer removes the first ball bar and puts Set one end in the two or three ball kinematic mount 9, movable air-float balladeur train 6 to the suitable position far from laser interferometer 1 and by the The other end sphere of one ball bar is placed on the two or three ball kinematic mount 9, and 1 indicating value d of recording laser interferometer will be in step 1 One end sphere of second ball bar is placed in the three or three ball kinematic mount 13, and movable air-float balladeur train 6 is to close to laser interferometer 1 Suitable position and the other end sphere of the second club is placed in the two or three ball kinematic mount 9, recording laser interferometer 1 shows Value b, then the second ball bar is placed on one end in the two or three ball kinematic mount 9, and movable air-float balladeur train 6 is to far from laser interference The other end sphere of second ball bar is simultaneously placed on the two or three ball kinematic mount 9, recording laser interferometer by the suitable position of instrument 1 1 indicating value c, the above process in no particular order, according to triangle relation, the difference of laser interferometer 1 indicating value a, b, c, d and two ball pole lengths X, y value of the l calculating free kick boom end sphere centre of sphere;
Step 3: Fig. 5 is the schematic illustration of present invention calibration ballbar length referring to attached drawing 5.By the one of club to be calibrated End sphere is placed in the three or three ball kinematic mount 13, and movable air-float balladeur train 6 to the suitable position close to laser interferometer 1 simultaneously will The other end sphere of the club is placed in the two or three ball kinematic mount 9,1 indicating value of recording laser interferometerl 1 , then remove this Club is placed on one end in the two or three ball kinematic mount 9, movable air-float balladeur train 6 to the suitable position far from laser interferometer 1 And the other end sphere of the club is placed on the two or three ball kinematic mount 9,1 indicating value of recording laser interferometerl 2 , the above process In no particular order, ballbar length to be calibrated is calculated according to the y value and triangle relation being calculated in step 2, it, can to reduce error The step is repeated, takes ballbar length multiple measurement results average value to be calibrated as ballbar length nominal value to be calibrated.
The above embodiments are only used to illustrate the present invention, rather than limitation of the present invention, the common skill in relation to technical field Art personnel can also make a variety of changes and modification without departing from the spirit and scope of the present invention, therefore all etc. Same technical solution also belongs to protection category of the invention.

Claims (6)

1. a kind of application method of the ballbar length caliberating device with self calibrating function, it is characterised in that: described to have from mark The ballbar length caliberating device for determining function includes the air-float guide rail of long side in left-right direction, and left position is fixed on air-float guide rail Laser interferometer adjusts holder, is equipped with laser interferometer on laser interferometer adjustment holder, right end position is solid on air-float guide rail Surely there is the first y-z two-freedom fine adjustment stage, the one or three ball kinematic mount be installed in the first y-z two-freedom fine adjustment stage, Spectroscope and interference microscope group, air bearing are equipped with by microscope group mounting rack close to laser interferometer adjustment holder position on air-float guide rail Air bearing balladeur train is also slidably fitted on guide rail between microscope group mounting rack and the first y-z two-freedom fine adjustment stage, air bearing is sliding Right side is fixed with the 2nd y-z two-freedom fine adjustment stage on frame, and air bearing balladeur train upper left side is fixed with the fine tuning of the 3rd y-z two-freedom Platform, wherein be equipped with reflecting mirror in the 3rd y-z two-freedom fine adjustment stage, and reflecting mirror is towards the light splitting on microscope group mounting rack Mirror and interference microscope group, are equipped with the two or three ball kinematic mount, the two or three ball kinematic mount in the 2nd y-z two-freedom fine adjustment stage It is oppositely arranged with the one or three ball kinematic mount, is additionally provided with the support perpendicular to air-float guide rail in the same plane in front of air-float guide rail Seat, support base rear end extend to air-float guide rail, are fixed with the three or three ball kinematic mount on support base, the first, second three ball movements Support is in sustained height;
The application method of the ballbar length caliberating device with self calibrating function, comprising the following steps:
(1), it selects the club of two unknown lengths to carry out self-calibration, one end sphere of the club of first unknown lengths is placed In the one or three ball kinematic mount, movable air-float balladeur train to suitable position and the other end ball by the club of first unknown lengths Body is placed in the two or three ball kinematic mount, by laser interferometer indicating value zero setting;
(2), the first ball bar is removed, and one end sphere of the club of second unknown lengths is placed on the one or three ball movement branch On seat, the other end sphere of the club of second unknown lengths is simultaneously placed on the two or three ball by movable air-float balladeur train to suitable position In kinematic mount, laser interferometer indicating value is the difference l of the ballbar length of two unknown lengths;
(3), the three or three ball kinematic mount is adjusted to suitable position and fixation, again by the one of the club of first unknown lengths End sphere is placed in the three or three ball kinematic mount, and movable air-float balladeur train is to the suitable position close to laser interferometer and by first The other end sphere of the club of root unknown lengths is placed in the two or three ball kinematic mount, recording laser interferometer indicating value a;
The club for removing first unknown lengths is placed on one end in the two or three ball kinematic mount, and movable air-float balladeur train is to separate The other end sphere of first ball bar is simultaneously placed on the two or three ball kinematic mount, recording laser by the suitable position of laser interferometer Interferometer indicating value d;
One end sphere of second ball bar is placed in the three or three ball kinematic mount by the club for removing first unknown lengths, The other end sphere of second ball bar to the suitable position close to laser interferometer and is placed on the two or three by movable air-float balladeur train In ball kinematic mount, recording laser interferometer indicating value b;
Then one end that the second ball bar is placed in the two or three ball kinematic mount is removed, movable air-float balladeur train is done to far from laser The other end sphere of second ball bar is simultaneously placed on the two or three ball kinematic mount, recording laser interferometer by the suitable position of interferometer Indicating value c;
According to the difference l of the ballbar length of triangle relation, laser interferometer indicating value a, b, c, d and two unknown lengths, calculating is put It sets straight where the laser beam that the centre of sphere in the free kick boom end sphere in the three or three ball kinematic mount is issued to laser interferometer Linear distance y;
(4), one end sphere of club to be calibrated is placed in the three or three ball kinematic mount, movable air-float balladeur train is to close to laser The other end sphere of club to be calibrated is simultaneously placed in the two or three ball kinematic mount by the suitable position of interferometer, and recording laser is dry Interferometer indicating value, then removes one end that club to be calibrated is placed in the two or three ball kinematic mount, and movable air-float balladeur train is to separate The other end sphere of club to be calibrated is simultaneously placed on the two or three ball kinematic mount, recording laser by the suitable position of laser interferometer Interferometer indicating value, this step above process in no particular order, are closed according to the linear distance y and triangle being calculated in step (3) System calculates ballbar length to be calibrated, to reduce error, repeats this step, takes ballbar length multiple measurement results to be calibrated average Value is used as ballbar length nominal value to be calibrated;
The club of two unknown lengths for self-calibration, to guarantee stated accuracy, wherein a root long degree is greater than club to be calibrated Length, another root long degree are less than or equal to ballbar length to be calibrated;
It during self-calibration and demarcates during club to be calibrated, is placed in the first, second, third three ball kinematic mounts Club end sphere should use same sphere or the identical sphere of nominal value respectively.
2. a kind of application method of ballbar length caliberating device with self calibrating function according to claim 1, special Sign is: the support base is fixed platform, is equipped with adjustable three or the three ball kinematic mount in position in fixed platform;
Or support base is made of balladeur train and slide rail, wherein slide rail is arranged in front of air-float guide rail, balladeur train sliding peace On slide rail, the three or three ball kinematic mount is fixed on balladeur train by fixed platform;
By adjustable three or the three ball kinematic mount in position, or with the three or three ball kinematic mount of sledge movements, can according to The position that ballbar length adjusts the three or three ball kinematic mount is demarcated, to demarcate the length of existing various length clubs.
3. a kind of application method of ballbar length caliberating device with self calibrating function according to claim 1, special Sign is: the air-float guide rail, support base are integrally mounted in different support by vibration isolation support respectively.
4. a kind of application method of ballbar length caliberating device with self calibrating function according to claim 1, special Sign is: the one or three ball kinematic mount is finely adjusted by the first y-z two-freedom fine adjustment stage along the direction y, z, guarantees laser beam The centre of sphere that place straight line passes through the club end to be measured sphere being placed in the one or three ball kinematic mount;
Two or three ball kinematic mount is finely adjusted by the 2nd y-z two-freedom fine adjustment stage along the direction y, z by position, guarantees laser The centre of sphere that straight line where beam passes through the club end to be measured sphere being placed in the two or three ball kinematic mount.
5. a kind of application method of ballbar length caliberating device with self calibrating function according to claim 1, special Sign is: the spectroscope and interference microscope group by the adjustment of microscope group mounting rack can position in the z-direction and the angle around the direction z can It adjusts, the reflecting mirror in the 3rd y-z two-freedom fine adjustment stage can be finely adjusted along the position in the direction y, z, so that laser interferometer The laser beam of sending through spectroscope be divided and all the way laser after reflecting mirror reflects with another way laser interference.
6. a kind of application method of ballbar length caliberating device with self calibrating function according to claim 1, special Sign is: Abbe error theoretical value is zero.
CN201710763969.8A 2017-08-30 2017-08-30 A kind of ballbar length caliberating device and application method with self calibrating function Active CN107655412B (en)

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CN108871207B (en) * 2018-09-14 2020-05-19 佛山市天目工业测量科技有限公司 Photogrammetry reference ruler length calibration device and use method
CN111256597B (en) * 2020-02-28 2021-09-07 陕西科技大学 Mechanical laser tracking double-ball-bar instrument

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CN105066939A (en) * 2015-08-03 2015-11-18 上海市计量测试技术研究院 Bat ball center distance detection device and detection method thereof
CN106885511A (en) * 2015-12-01 2017-06-23 雷卫台 It is applied to the double ball-beam systems and its error compensating method for measuring
CN107014275A (en) * 2017-04-11 2017-08-04 合肥工业大学 A kind of centre of sphere distance meter of space two and its measuring method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105066939A (en) * 2015-08-03 2015-11-18 上海市计量测试技术研究院 Bat ball center distance detection device and detection method thereof
CN106885511A (en) * 2015-12-01 2017-06-23 雷卫台 It is applied to the double ball-beam systems and its error compensating method for measuring
CN107014275A (en) * 2017-04-11 2017-08-04 合肥工业大学 A kind of centre of sphere distance meter of space two and its measuring method

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