CN103630099B - Linear displacement transducer auto-calibration device - Google Patents

Linear displacement transducer auto-calibration device Download PDF

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Publication number
CN103630099B
CN103630099B CN201310631438.5A CN201310631438A CN103630099B CN 103630099 B CN103630099 B CN 103630099B CN 201310631438 A CN201310631438 A CN 201310631438A CN 103630099 B CN103630099 B CN 103630099B
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slidingtype
bracing frame
fixed
calibration
laser
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CN103630099A (en
Inventor
曹洁
杨新建
张祥庚
周骏
戚丽红
佟晨光
佘娜萍
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Changzhou Institute Of Measurement & Testing Technology
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Changzhou Institute Of Measurement & Testing Technology
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Abstract

Line of the present invention discloses a kind of linear displacement transducer auto-calibration device, and mainly comprise a pedestal, bilinear guide rail, grating scale, servomotor, vertical lift device are fixed on pedestal; Roller bearing screw mandrel is connected with servomotor by shaft coupling; Leveling device, universal fixturing, set nut are snapped into one another and be connected with vertical lift device; Slidingtype laser mirror bracing frame, slidingtype laser interference mirror bracing frame, slidingtype two-frequency laser interferometer bracing frame are fixed on line slideway, wherein steady brace, laser mirror, grating rule read sensor are fixed on slidingtype reflector support, laser interference mirror is fixed on slidingtype interference mirror bracing frame, and two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer bracing frame.The present invention, by the setting of laser calibration mechanism, can ensure calibration accuracy, has greatly saved artificial and time cost, has improved calibration operation efficiency.

Description

Linear displacement transducer auto-calibration device
Technical field
The invention belongs to measurement verification and calibration field, relate more specifically to automatic calibration and the calibration of the polytype such as rod-pulling type, dragline type linear displacement transducer.
Background technology
Linear displacement transducer is a kind of fine measuring instrument that the displacement of straight line machinery can be converted to electric signal, the field such as be widely used in industrial automation or build a bridge.Mainly there is traditional manual measurement in a calibration process at present wastes time and energy time-consuming, due to the various measuring error that the reason such as measuring method, human users is introduced.
Patent CN202501835U discloses a kind of vertical straight line displacement transducer demarcation/calibrating installation.Demarcation/calibrating installation comprises main support (8), sensor installing platform (1), base (10), precise guide rail (5), linear electric motors bar (6), linear electric motors (7), grating scale (2), grating reading head (3), transfer table (4), guide rail (11) and balancing weight (12), being calibrated displacement transducer is arranged on sensor installing platform (1), main support (8) is i-beam structure, the bottom of main support (8) is fixed on base (10), the top of main support (8) is connected with sensor installing platform (1), precise guide rail (5), linear electric motors bar (6), grating scale (2) three is parallel to each other and is arranged on the front of main support (8), linear electric motors (7) are fixed in precise guide rail (5) through linear electric motors bar (6), grating reading head (3) and transfer table (4) are fixed together, transfer table (4) is connected directly between on linear electric motors (7), the back side mounting guide rail (11) of main support (8), balancing weight (12) is arranged on guide rail (11), balancing weight (12) is connected with linear electric motors (7) by steel wire, main support (8) installs cover plate around.Although this patent is simple, convenient when displacement transducer is calibrated, calibration speed fast, measuring accuracy is not high, and application condition is large.
Summary of the invention
1, goal of the invention.
The present invention in order to the not high problem of the precision that solves Measurement and calibration in prior art, and provides a kind of easy to operate, time saving and energy saving, the calibrating installation that measuring accuracy is high.
2, the technical scheme adopted is invented.
Linear displacement transducer auto-calibration device of the present invention, comprise pedestal, bilinear guide rail, grating scale, ball-screw, shaft coupling, servomotor, vertical lift device, leveling device, universal fixturing, set nut, automatic console, control panel, electronic hand wheel, laser calibration mechanism; Laser calibration mechanism comprises slidingtype laser mirror bracing frame, slidingtype laser interference mirror bracing frame, slidingtype two-frequency laser interferometer bracing frame, steady brace, laser mirror, laser interference mirror, two-frequency laser interferometer, grating rule read sensor; Described bilinear guide rail, grating scale are fixed on pedestal; Described servomotor is fixed on one end of pedestal, and ball-screw is connected with servomotor by shaft coupling; Described vertical lift device is fixed on the other end of pedestal, and leveling device, universal fixturing, set nut are snapped into one another and be connected with vertical lift device; Described slidingtype laser mirror bracing frame, slidingtype laser interference mirror bracing frame, slidingtype two-frequency laser interferometer bracing frame are fixed on bilinear guide rail, wherein steady brace, laser mirror, grating rule read sensor are fixed on slidingtype reflector support, laser interference mirror is fixed on slidingtype laser interference mirror bracing frame, and two-frequency laser interferometer is fixed on slidingtype two-frequency laser interferometer bracing frame; Described control panel, electronic hand wheel to be installed on automatic console and to control servomotor (6) by data line, and show the data that grating rule read sensor (19) is transferred to control panel.
3, the beneficial effect produced is invented.
(1), vibrational power flow of the present invention is simple to operate;
(2), by the setting of auto-calibration platform, the working strength of calibration personnel is effectively reduced;
(3), the present invention by the setting of laser calibration mechanism, avoid the various measuring error introduced due to the reason such as measuring method, human users, can calibration accuracy be ensured.
Accompanying drawing explanation
Fig. 1 is linear movement pick-up auto-calibration device front view of the present invention.
Fig. 2 is the structural representation of linear movement pick-up auto-calibration device of the present invention.
Fig. 3 is the left view of linear movement pick-up auto-calibration device of the present invention.
Fig. 4 is the vertical view of linear movement pick-up auto-calibration device of the present invention.
Embodiment
For above-mentioned feature and advantage of the present invention can be become apparent, special embodiment below, and be described in detail below by reference to the accompanying drawings.
Embodiment 1
See Fig. 1, Fig. 3 and Fig. 4, linear displacement transducer auto-calibration device of the present invention, be mainly used in the auto-calibration of the polytype such as rod-pulling type, dragline type linear displacement transducer, its one-piece construction is similar to general numerical control machine for processing,
Linear displacement transducer auto-calibration device of the present invention, comprise pedestal (1), bilinear guide rail (2), grating scale (3), ball-screw (4), shaft coupling (5), servomotor (6), vertical lift device (7), leveling device (8), universal fixturing (9), set nut (10), automatic console (14), control panel (20), electronic hand wheel (21), laser calibration mechanism; Laser calibration mechanism comprises slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13), steady brace (15), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18), grating rule read sensor (19); Described bilinear guide rail (2), grating scale (3) are fixed on pedestal (1); Described servomotor (6) is fixed on one end of pedestal, and ball-screw (4) is connected with servomotor (6) by shaft coupling (5); Described vertical lift device (7) is fixed on the other end of pedestal (1), leveling device (8), universal fixturing (9), set nut (10) are snapped into one another and be connected with vertical lift device (7), universal fixturing (9) is bolted on and regulates on platform (26), and can change according to the different model being calibrated linear movement pick-up; Described slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13) are fixed on bilinear guide rail (2), wherein steady brace (15), laser mirror (16), grating rule read sensor (19) are fixed on slidingtype reflector support (11), a threaded hole is offered in steady brace (15) center, by sensor stay cord by load screws on steady brace (15).Laser interference mirror (17) is fixed on slidingtype laser interference mirror bracing frame (12), and two-frequency laser interferometer (18) is fixed on slidingtype two-frequency laser interferometer bracing frame (13); Described control panel (20) is installed in automatic console (14) and goes up and control servomotor (6) by data line, and shows the data that grating rule read sensor (19) is transferred to control panel.
Embodiment 2
On the basis of embodiment 1, linear displacement transducer auto-calibration device also comprises an adjusting bolt (22), a setting nut (25), described adjusting bolt (22) is fixed on the adjustment for laser interference mirror (17) on described slidingtype interference mirror bracing frame (12), by being fixed on lock nut (23) locking on described slidingtype interference mirror bracing frame (12) after adjustment; Described setting nut (25) is fixed on described slidingtype two-frequency laser interferometer bracing frame (13), described setting nut (25) is fixed on the adjustment for two-frequency laser interferometer (18) on described slidingtype two-frequency laser interferometer bracing frame (13), by being fixed on lock nut (24) locking on described slidingtype two-frequency laser interferometer bracing frame (13) after adjustment; Described set nut (10) is four, and circle distribution is arranged on universal fixturing (9).Described electronic hand wheel (21) sets up three gears separately, sets up X1 shelves separately, X10 shelves, X100 shelves, often revolves lattice in X1 shelves, often revolve lattice in displacement feeding 0.001mm, X10 shelves, often revolve lattice, displacement feeding 0.1mm in displacement feeding 0.01mm, X100 shelves.
The course of work of the present invention: for the stay-supported linear movement pick-up of 1000mm specification.First this device is placed in the laboratory meeting the environmental baseline required in JJF1305-2011 " linear movement pick-up calibrating standard ", to be calibrated sensor when calibrating is arranged on universal fixturing (9), by adjusting vertical lifting device (7), leveling device (8), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18) makes to be calibrated on the ray displacement straight line that sensor and two-frequency laser interferometer (18) send, and lock each parts, check and whether meet abbe ' s principle one time, if do not meet abbe ' s principle, need to readjust, if met, can calibrate.
Arrange correlation parameter by control panel (20), 10 somes stay-supported linear movement pick-up of 1m being arranged to interval 100mm are measured, and are respectively 100mm, 200mm, 300mm----1000mm.The instruction that automatic console (14) reception control panel (20) sends sends operational order by data line to servomotor (6), servomotor (6) drives roller screw (4) to realize displacement 100mm by shaft coupling (5), now tested sensor secondary instrument display numerical value may be 99.982mm, at this moment regulating servomotor (6) running to make tested sensor secondary instrument show numerical value by electronic hand wheel (21) is 100mm, now data shown by two-frequency laser interferometer, as being 100.011, then error is 0.011mm.Measure 200mm successively, 300mm,----1000mm error, is one measures circulation with positive and negative, measure three circulations altogether, thus calculate fundamental error, linearity error, reproducibility error, hysterisis error, Full-span output and sensitivity.

Claims (7)

1. a linear displacement transducer auto-calibration device, comprise pedestal (1), bilinear guide rail (2), grating scale (3), ball-screw (4), shaft coupling (5), servomotor (6), vertical lift device (7), leveling device (8), universal fixturing (9), set nut (10), automatic console (14), control panel (20), electronic hand wheel (21), it is characterized in that: also comprise laser calibration mechanism, laser calibration mechanism comprises slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13), steady brace (15), laser mirror (16), laser interference mirror (17), two-frequency laser interferometer (18), grating rule read sensor (19), described bilinear guide rail (2), grating scale (3) are fixed on pedestal (1), described servomotor (6) is fixed on one end of pedestal, and ball-screw (4) is connected with servomotor (6) by shaft coupling (5), described vertical lift device (7) is fixed on the other end of pedestal (1), and leveling device (8), universal fixturing (9), set nut (10) are snapped into one another and be connected with vertical lift device (7), described slidingtype laser mirror bracing frame (11), slidingtype laser interference mirror bracing frame (12), slidingtype two-frequency laser interferometer bracing frame (13) are fixed on bilinear guide rail (2), wherein steady brace (15), laser mirror (16), grating rule read sensor (19) are fixed on slidingtype reflector support (11), laser interference mirror (17) is fixed on slidingtype laser interference mirror bracing frame (12), and two-frequency laser interferometer (18) is fixed on slidingtype two-frequency laser interferometer bracing frame (13), described control panel (20) is installed in automatic console (14) and goes up and control servomotor (6) by data line, and shows the data that grating rule read sensor (19) is transferred to control panel.
2. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: a threaded hole is offered in steady brace (15) center, by the stay cord of grating rule read sensor (19) by load screws on steady brace (15).
3. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: universal fixturing (9) is bolted on and regulates on platform (26).
4. linear displacement transducer auto-calibration device according to claim 1 and 2, it is characterized in that: also comprise an adjusting bolt (22), described adjusting bolt (22) is fixed on described slidingtype interference mirror bracing frame (12) by being fixed on lock nut (23) locking on described slidingtype interference mirror bracing frame (12).
5. linear displacement transducer auto-calibration device according to claim 4, it is characterized in that: also comprise a setting nut (25), described setting nut (25) is fixed on described slidingtype two-frequency laser interferometer bracing frame (13), by being fixed on lock nut (24) locking on described slidingtype two-frequency laser interferometer bracing frame (13).
6. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: described set nut (10) number is 4, and circle distribution is arranged on universal fixturing (9).
7. linear displacement transducer auto-calibration device according to claim 1, is characterized in that: described electronic hand wheel (21) sets up three gears separately, sets up X separately 1shelves, X 10shelves, X 100shelves, X 1lattice are often revolved, displacement feeding 0.001mm, X in shelves 10lattice are often revolved, displacement feeding 0.01mm, X in shelves 100lattice are often revolved, displacement feeding 0.1mm in shelves.
CN201310631438.5A 2013-12-02 2013-12-02 Linear displacement transducer auto-calibration device Active CN103630099B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308913B3 (en) * 1975-04-23 1978-11-10 Sncf
US5978743A (en) * 1997-05-30 1999-11-02 Mitutoyo Corporation Self-calibration method for a sensor
CN201364144Y (en) * 2009-03-05 2009-12-16 吉林大学 Portable calibrating apparatus for displacement sensor
CN102661707A (en) * 2012-04-10 2012-09-12 中国人民解放军海军航空工程学院 Universal calibrating device for linear displacement
CN202501835U (en) * 2012-03-16 2012-10-24 成都飞机设计研究所 Vertical type linear displacement sensor scaling/calibrating device
CN203908525U (en) * 2013-12-02 2014-10-29 常州市计量测试技术研究所 Automated calibration device for linear displacement transducer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308913B3 (en) * 1975-04-23 1978-11-10 Sncf
US5978743A (en) * 1997-05-30 1999-11-02 Mitutoyo Corporation Self-calibration method for a sensor
CN201364144Y (en) * 2009-03-05 2009-12-16 吉林大学 Portable calibrating apparatus for displacement sensor
CN202501835U (en) * 2012-03-16 2012-10-24 成都飞机设计研究所 Vertical type linear displacement sensor scaling/calibrating device
CN102661707A (en) * 2012-04-10 2012-09-12 中国人民解放军海军航空工程学院 Universal calibrating device for linear displacement
CN203908525U (en) * 2013-12-02 2014-10-29 常州市计量测试技术研究所 Automated calibration device for linear displacement transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
激光干涉仪在位移传感器自动检定中的应用;朱目成等;《激光杂志》;20041231;第25卷(第5期);全文 *

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