CN102353539B - Photoelectric measuring machine for precision transmission chain - Google Patents
Photoelectric measuring machine for precision transmission chain Download PDFInfo
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- CN102353539B CN102353539B CN 201110307173 CN201110307173A CN102353539B CN 102353539 B CN102353539 B CN 102353539B CN 201110307173 CN201110307173 CN 201110307173 CN 201110307173 A CN201110307173 A CN 201110307173A CN 102353539 B CN102353539 B CN 102353539B
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Abstract
The invention discloses a photoelectric measuring machine for a precision transmission chain. The photoelectric measuring machine comprises a measuring worktable, an angular displacement input-output grating measuring system, an angular displacement input-linear displacement output grating measuring system, a linear micro-displacement input-output grating measuring system, an installation error detection system and a measurement drive control system, wherein, the base surface of the measuring worktable is provided with three groups of parallel precision linear guide rail mechanisms; the angular displacement input-linear displacement output grating measuring system is arranged on the first linear guide rail mechanism; the angular displacement input-output grating measuring system is arranged on the second linear guide rail mechanism; the linear micro-displacement input-output grating measuring system and the installation error detection system are arranged on the third linear guide rail mechanism; and the measurement drive control system is electrically connected with the angular displacement input-linear displacement output grating measuring system and the angular displacement input-output grating measuring system respectively. The photoelectric measuring machine for the precision transmission chain has the advantages of wide use and high measurement accuracy.
Description
Technical field
The present invention relates to the photoelectric measurement field, particularly, relate to a kind of photoelectric measuring machine for precision transmission chain.
Background technology
Photoelectric measuring machine for precision transmission chain (hereinafter to be referred as " measuring machine ") is a kind of large-scale measurement equipment that is comprised of light, mechanical, electrical integrated form, is used for accurately measuring, analyzing of Precise Transmission Chain driving error.Be particularly useful for high-grade, digitally controlled machine tools and basic manufacturing equipment, automobile, high ferro train, space flight, aviation, navigation exact instrument, automatic control system, device, metrology and measurement instrument, equipment, joint of robot, radar, optical tracking instrument, equipment, in the equipment such as semiconductor, microelectronics manufacturing measurement, the dynamic driving error of multiple crucial transmission agency parts, system, device is measured and is analyzed.Make complete machine, system, parts realize transmission optimized design, and quality evaluation, process modification are had vital role, thereby make transmission agency, power transmission, the dynamic response of Precise Transmission Chain have high precision and high-effect.
At present, driving-chain measuring machine both domestic and external (instrument), all take the angular displacement driving error as measurement target, use computing machine soft and hardware manipulate measurement data, thereby realization is to Gear Processing and revolving meber machining tool complete machine or single angular displacement is inputted, the transmission chain error of output is measured, but there is following shortcoming in they:
1, purposes is single, and use face is narrow, and the demand and the instrument and equipment utilization factor that can not meet numerous users can not be given full play to, and they are almost instrumentation, equipment, and versatility is poor, and the market range of application is little;
2, be not specifically designed on instrument, equipment that measured object is installed, the location, adjust the alignment error detection system of using, easily produce the alignment error of measured object and reduce measuring accuracy, and during the measured object mounting cost, effort, work efficiency is lower.
Summary of the invention
The object of the invention is to, for the problems referred to above, propose a kind of photoelectric measuring machine for precision transmission chain, to realize highly versatile, the advantage that measuring accuracy is high.
For achieving the above object, the technical solution used in the present invention is:
A kind of photoelectric measuring machine for precision transmission chain, comprise the surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system;
Three groups of precise linear guide mechanisms that are parallel to each other are housed on above-mentioned surveying work stylobate platform table top, and described angular displacement input, displacement of the lines output optical grating measuring system are arranged on the first guiding rail mechanism; Described angular displacement input, output optical grating measuring system are arranged on the second guiding rail mechanism; Described straight line micrometric displacement input, output optical grating measuring system and alignment error detection system are arranged on the 3rd guiding rail mechanism; Described measurement driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.
According to a preferred embodiment of the invention, also include Measurement and Data Processing and management system: accept the measurement data of above-mentioned photoelectric measuring machine for precision transmission chain, and this measurement data is gathered, processes, shows, analyzes and stores.
According to a preferred embodiment of the invention, described surveying work platform comprises base station, four lifting jack, the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanisms, above-mentioned four lifting jack are arranged on respectively on the groove everywhere of base station bottom, and what the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanism were parallel to each other is arranged on base station.
According to a preferred embodiment of the invention, described angular displacement input, output optical grating measuring system comprise the second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; The first fixed mount is arranged on first slide block plane on the second guiding rail mechanism by rigidity, and the servomotor seat is packed on the first fixed mount, and described rare-earth electric motor is packed on the servomotor seat; The second fixed mount and the 3rd fixed mount are packed in respectively on the second guiding rail mechanism, and speed reducer base is fastened on second fixed mount by rigidity, and harmonic speed reducer is packed on speed reducer base; Described the second optical electric axial angle encoder is packed on the 3rd fixed mount by ring flange; Described rare-earth electric motor two ends axle journal is all the version of stretching out,, wherein an end is connected to by elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end is connected with the input end of harmonic speed reducer by elastic coupling; The projecting shaft of described the second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer by elastic coupling.
According to a preferred embodiment of the invention, described angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, the first optical electric axial angle encoder, servomotor, grating scale, ball sleeve, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of described ball-screw are contained in respectively in two bearing seats, and described two bearing seats are fixedly mounted with respectively on resonable stone table board, manage Shitai County and are placed on the base station face, and two backing plates of the level of adjusting reason Shitai County and base station are installed between reason Shitai County and base station; Described servomotor is packed on motor cabinet, and motor cabinet is fixedly mounted with in resonable Shitai County, and the projecting shaft of servomotor is connected with an end of ball-screw by shaft coupling; The other end of described ball-screw is connected by the projecting shaft of shaft coupling with the first optical electric axial angle encoder, and described the first optical electric axial angle encoder is packed on coupling band, and coupling band is packed on bearing seat; Described three lifting pieces are fixedly mounted with on resonable stone table board, and grating scale is arranged on by the lifting piece position that parallels with ball-screw by rigidity; Be equipped with by the silk connecting plate on slippery fellow on described the first guiding rail mechanism and read the coupling assembling that connecting plate forms, described ball sleeve and this coupling assembling are rigidly connected, and the other end and the grating ruler reading head of this coupling assembling are rigidly connected.
According to a preferred embodiment of the invention, described alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Described slide block is arranged on the 3rd guiding rail mechanism, and base is packed on slide block, and described column is rotated in the screw of base, and support frame as described above is fastened on column by check lock lever, and described super large range photoelectricity length gauge is arranged on bracing frame by check lock lever.
According to a preferred embodiment of the invention, described straight line micrometric displacement input, output optical grating measuring system comprise auxiliary working platform, photoelectricity length gauge, clamping seats and linear stepping motor; Described auxiliary working platform is installed on slide unit on the 3rd guiding rail mechanism, described clamping seats is packed on auxiliary working platform, described photoelectricity length gauge is arranged on auxiliary working platform by the clamping seats level, described linear stepping motor is packed on auxiliary working platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.
Technical scheme of the present invention has increased the versatility of measuring machine by various measuring systems are used in combination, and makes this measuring machine purposes more extensive.And worktable is set, thus avoided measuring the alignment error of thing to place measured object, thus measuring accuracy improved.The present invention simultaneously adopts optical electric axial angle encoder to be used for the measured angular displacement, has further improved measuring accuracy.
Other features and advantages of the present invention will be set forth in the following description, and, partly become apparent from instructions, perhaps understand by implementing the present invention.Purpose of the present invention and other advantages can realize and obtain by specifically noted structure in the instructions of writing, claims and accompanying drawing.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Description of drawings
Accompanying drawing is used to provide a further understanding of the present invention, and consists of the part of instructions, is used for together with embodiments of the present invention explaining the present invention, is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is the structural representation of the described photoelectric measuring machine for precision transmission chain of the embodiment of the present invention;
Fig. 2 is the front elevation of photoelectric measuring machine for precision transmission chain shown in Figure 1;
Fig. 3 is the fundamental diagram of the described photoelectric measuring machine for precision transmission chain of the embodiment of the present invention;
Fig. 4 is the software configuration of the described Measurement and Data Processing of the embodiment of the present invention and management system.
By reference to the accompanying drawings, in the embodiment of the present invention, Reference numeral is as follows:
1-the first photo electric axis displacement coder; The 2-coupling band; 4-the first guiding rail mechanism; The 5-ball-screw; 6-the second fixed mount; 7-the 3rd fixed mount; 8-the second guiding rail mechanism; 10-the second photo electric axis displacement coder; 11-scrambler seat; The 13-shaft coupling; 14-the 3rd guiding rail mechanism; The 17-auxiliary working platform; 18-photoelectricity length gauge; The 19-clamping seats; The 21-linear stepping motor; The 23-speed reducer base; The 24-ring flange; The 25-harmonic speed reducer; 26-electric cabinet A; The 27-rare-earth electric motor; 28-the first fixed mount; The 29-motor cabinet; 30-electric cabinet B; 31-the 3rd photo electric axis displacement coder; The 32-bearing seat; The 33-motor cabinet; 35-connects bent plate; The 36-servomotor; The 37-grating scale; The 39-ball sleeve; 40-silk connecting plate; 41-reads connecting plate; 42-lifts piece; The 47-lifting jack; The 48-base station; The 49-backing plate; 50-manages Shitai County; 51-lifts plate; The 52-slide block; The 53-base; The 54-locking nail; 55-super large range length gauge; The 56-bracing frame; The 57-column; The 58-check lock lever; 59-digital display meter assembly; The 61-dial framework; The 63-computing machine; The 64-printer.
Embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein only is used for description and interpretation the present invention, is not intended to limit the present invention.
As shown in Figure 1, photoelectric measuring machine for precision transmission chain comprises the surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system; Three groups of precise linear guide mechanisms that are parallel to each other are housed on surveying work stylobate platform table top, and angular displacement input, displacement of the lines output optical grating measuring system are arranged on the first guiding rail mechanism; Angular displacement input, output optical grating measuring system are arranged on the second guiding rail mechanism; The input of straight line micrometric displacement, output optical grating measuring system and alignment error detection system are arranged on the 3rd guiding rail mechanism; Measuring driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.
Comprising Measurement and Data Processing and management system are arranged: accept the measurement data of above-mentioned photoelectric measuring machine for precision transmission chain, and this measurement data is gathered, processes, shows, analyzes and stores.
Wherein the surveying work platform comprises base station, four lifting jack, the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanisms, above-mentioned four lifting jack are arranged on respectively on the groove everywhere of base station bottom, and what the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanism were parallel to each other is arranged on base station.
Wherein angular displacement input, output optical grating measuring system comprise the second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; The first fixed mount is arranged on by 4 trip bolts on first slide block plane on the second guiding rail mechanism, and the servomotor seat is packed on the first fixed mount, and rare-earth electric motor is packed on the servomotor seat; The second fixed mount and the 3rd fixed mount are packed in respectively on the second guiding rail mechanism, and speed reducer base is fastened on second fixed mount by rigidity, and harmonic speed reducer is packed on speed reducer base; The second optical electric axial angle encoder is packed on the 3rd fixed mount by ring flange; Rare-earth electric motor two ends axle journal is all the version of stretching out,, wherein an end is connected to by elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end is connected with the input end of harmonic speed reducer by elastic coupling; The projecting shaft of the second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer by elastic coupling.
Wherein angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, the first optical electric axial angle encoder, servomotor, grating scale, ball sleeve, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of ball-screw are contained in respectively in two bearing seats, and two bearing seats are fixedly mounted with respectively on resonable stone table board, manage Shitai County and are placed on the base station face, and two backing plates of the level of adjusting reason Shitai County and base station are installed between reason Shitai County and base station; Servomotor is packed on motor cabinet, and motor cabinet is fixedly mounted with in resonable Shitai County, and the projecting shaft of servomotor is connected with an end of ball-screw by shaft coupling; The other end of ball-screw is connected by the projecting shaft of shaft coupling with the first optical electric axial angle encoder, and the first optical electric axial angle encoder is packed on coupling band, and coupling band is packed on bearing seat; Three the lifting pieces be fixedly mounted with on resonable stone table board, grating scale by the lifting piece by by 4 trip bolts in the position that parallels with ball-screw; Be equipped with by the silk connecting plate on slippery fellow on the first guiding rail mechanism and read the coupling assembling that connecting plate forms, ball sleeve and this coupling assembling are rigidly connected, and the other end and the grating ruler reading head of this coupling assembling are rigidly connected.
Wherein the alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Slide block is arranged on the 3rd guiding rail mechanism, and base is packed on slide block, and column is rotated in the screw of base, and bracing frame is fastened on column by check lock lever, and super large range photoelectricity length gauge is arranged on bracing frame by check lock lever.
The input of straight line micrometric displacement, output optical grating measuring system comprise auxiliary working platform, photoelectricity length gauge, clamping seats and linear stepping motor; Auxiliary working platform is installed on slide unit on the 3rd guiding rail mechanism, clamping seats is packed on auxiliary working platform, the photoelectricity length gauge is arranged on auxiliary working platform by the clamping seats level, and linear stepping motor is packed on auxiliary working platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.
Shown in Figure 1, photoelectric measuring machine for precision transmission chain, comprise main surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system are measured driving control system, Measurement and Data Processing and management system, alignment error detection system seven parts form.
Main surveying work platform comprises base station 48, four lifting jack 47, the first guiding rail mechanism 4, the second guiding rail mechanism 8, the 3rd guiding rail mechanism 14.Above-mentioned four lifting jack are arranged on respectively on the groove everywhere of base station bottom, and three groups of line slideway auxiliaries are arranged on base station with the position that is parallel to each other.
Angular displacement input, output optical grating measuring system comprise scrambler seat 11, the second optical electric axial angle encoder 10, shaft coupling 13, speed reducer base 23, speed reduction unit (measured object) 25, ring flange 24 〉, rare-earth electric motor 27, fixed mount 28, servomotor seat 29, the 3rd optical electric axial angle encoder 31.Totally 3 of fixed mounts, first fixed mount 28 by by 4 trip bolts on first slide block plane of the second guiding rail mechanism 8, all there are 2 long through grooves the fixed mount two sides, its effect is the needs that move according to the fixed mount desired location, can fixed mount be fastened on the base station basal plane by the embedded with metal screw that screw and base station 48 basal planes are reserved.Rare-earth electric motor 27 is fastened on servomotor seat 29, motor cabinet is fastened on fixed mount, harmonic speed reducer (measured object) 25 is fastened on speed reducer base 23 by screw, and speed reducer base is fastened on the second fixed mount 6 by rigidity, as mentioned above also by screw fastening on the base station basal plane.Rare-earth electric motor two ends axle journal is all the version of stretching out, wherein an end is connected with the projecting shaft of the second optical electric axial angle encoder by elastic coupling 13, and the other end is connected with the input end of harmonic speed reducer (measured object) by elastic coupling same as described above.The second optical electric axial angle encoder 10 is angular displacement output measuring basis devices, and it is fastened on the 3rd fixed mount 7 by ring flange 24.On the base station basal plane, the second optical electric axial angle encoder and fixed mount can come and go mobile on the second guiding rail mechanism 8 or be fastened on the position of a certain needs this fixed mount by screw fastening.The projecting shaft of the second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer by elastic coupling.Advantage as above-mentioned structural design and installation method has: one, each ingredient all can move on the same line slideway or be fixed, and can improve their rectilinearity installation accuracy; Its two, be convenient to quick location, loading and unloading and the adjustment of measured object and each associated part, increase work efficiency; Its three, the alignment error detection system in easy to use measuring machine improves the concentricity of each associated part, thereby effectively reduces alignment error.The second optical electric axial angle encoder and the 3rd optical electric axial angle encoder are all high precision, high performance sensor, and they can be buied in Germany, are all also new high-tech products that this Langfang Lay lattice photoelectric instrument company produces.Two scrambler important technological parameters of above-mentioned selection are identical, the original groove number of the key light grid of its scrambler: 14400 pairs of line/week～21600 pair line/weeks; Output signal: sine and cosine, accuracy of measurement: ± 3 "～± 1 "; Measurement Resolution is generally 1 "～0.2 " by rear acquisition of grating collection segmentation card segmentation.The principle of work of the input of this angular displacement, output optical grating measuring system is as follows, harmonic speed reducer (measured object) is driven by rare-earth electric motor, because the two axial ends of motor is connected with speed reduction unit, scrambler respectively, the measurement of the angular displacement input quantity θ 1 of harmonic speed reducer is by the 3rd optical electric axial angle encoder and the realization of grating collection segmentation card, namely
, in this formula, W1 is the angle pitch of the main grating of scrambler, the umber of pulse that N1 sends when being the scrambler rotation.The output terminal of above-mentioned speed reduction unit is connected with the second optical electric axial angle encoder, and in like manner the angular displacement output quantity θ 2 of speed reduction unit is
, in this formula, W1 is angle pitch, i is the ratio of gear of speed reduction unit, the umber of pulse that N2 sends when being the scrambler rotation.Done by computing machine again
Process, can draw the driving error value of harmonic speed reducer.When the said mechanism continuous motion, just can obtain dynamic error and the performance of measured object transmission after processing, calculate and analyze by computer software and hardware.
Angular displacement input, displacement of the lines are exported optical grating measuring system and are comprised the first optical electric axial angle encoder 1, connecting shaft cover 3, ball-screw (measured object) 5, motor cabinet 33, shaft coupling 13, servomotor 36, connect bent plate 35, grating scale 37, ball sleeve 39, silk connecting plate 40, read connecting plate 41, lifting piece 43, shaft coupling 13, manage Shitai County 50, backing plate 49, lifting plate 51.The two ends of ball-screw 5 are contained in respectively in two bearing seats 32, and these two bearing seats are respectively by in 50 of screw fastened resonable Shitai County, and reason Shitai County is placed on the base station face.The benefit of layout is to be convenient to the measured object of longer size is measured like this, and does not need to increase physical dimension and the complete machine weight of base station.Between reason Shitai County and base station, two backing plates 49 are installed, its effect is the level of adjusting reason Shitai County and base station.Servomotor is arranged on motor cabinet 33 by screw, and by in screw fastened resonable Shitai County, the motor projecting shaft is connected with an end of ball wire by shaft coupling 13 motor cabinet.The first optical electric axial angle encoder is arranged on coupling band 3 by screw a, and coupling band is fastened on bearing seat 32, and the projecting shaft of the first optical electric axial angle encoder is connected with the other end of ball-screw by shaft coupling.With on position that ball-screw parallels, the first guiding rail mechanism 4 is housed, line slideway is installed on resonable stone table board by screw p.Three lifting pieces 43 are by on the fastened resonable stone table board of screw, grating scale 37 by the lifting piece by by 4 trip bolts in the position that parallels with ball-screw.Be equipped with by silk connecting plate 40 on the slippery fellow of line slideway and read the coupling assembling that connecting plate 41 forms, an end and the ball-screw ball sleeve 39 of this coupling assembling are rigidly connected, and the other end and grating ruler reading head are rigidly connected.The said structure design has the following advantages: one, the Abbe error that reduces to be produced by installation; Its two, be not subjected to the impact of ball screw assembly, idle running error, motion heating and distortion inaccuracy when the driving error of optical grating ruler measurement ball screw assembly; Its three, by the alignment error detection system on this measuring machine being displaced in the installation that realizes on the first guiding rail mechanism that ball-screw, the first guiding rail mechanism, grating scale three are parallel to each other.The first optical electric axial angle encoder and grating scale that this measuring system is used are all high precision, high performance sensor, and they can be buied in Germany, are all also new high-tech products that this Langfang Lay lattice photoelectric instrument company produces.Wherein the important technological parameters of grating scale is: 100 couples of line/mm of raster density and 50 couples of line/mm; Output signal: sine and cosine; Measurement range: 0～1000mm commonly used; Maximum range 3010mm; Accuracy: ± 3 μ m/m; High measurement resolution realizes by grating collection segmentation card, minimum Measurement Resolution 0.1 μ m.The effect of grating scale is the driving error that detects ball-screw secondary (measured object).Above-mentioned grating collection segmentation is stuck in Germany and can buys, and it is also a kind of new high-tech product that this Langfang Lay lattice photoelectric instrument company produces.It is consistent with grating scale that the first optical electric axial angle encoder is selected the foundation of important technological parameters.The principle of work of this angular displacement input, displacement of the lines output optical grating measuring system is as follows, ball-screw (measured object) is by driven by servomotor, the leading screw rotation makes the slide block on leading screw produce displacement of the lines, the optical electric axial angle encoder that is connected with the leading screw other end converts the angular metric of leading screw rotation to umber of pulse p output, the pitch of leading screw is h, the segmentation number of grating collection segmentation card is n, by
The minimum resolution of displacement of the lines output as can be known is if the revolution that has scrambler to measure leading screw is counted N,
Displacement of the lines amount for screw slider.Read head and the screw slider of above-mentioned grating scale are rigidly connected, and the displacement of the lines amount that the system that is comprised of grating scale, segmentation card can measure lead screw pair more accurately is
, in this formula, W is the pitch of grating scale, H is the umber of pulse that grating ruler reading head moves rear output, then is done by computing machine
Data process, just can draw the driving error value of ball-screw pair.Just can obtain dynamic error and the performance of measured object transmission after processing, calculate, analyze by computer software and hardware when the said mechanism continuous motion.
The input of straight line micrometric displacement, output optical grating measuring system comprise auxiliary working platform 17, photoelectricity length gauge 18, clamping seats 19, linear stepping motor (measured object) 21.Auxiliary working platform 17 is installed on the slide unit of the 3rd guiding rail mechanism 14, the photoelectricity length gauge is installed by clamping seats 19 levels that are fastened on auxiliary working platform, linear stepping motor 21 is fastened on auxiliary working platform by oneself screw and screw with it, linear stepping motor withstands on the measuring staff head of photoelectricity length gauge its output terminal when installing, and this measuring staff head can stretch.Above-mentioned photoelectricity length gauge can be bought in Germany, and it is also a kind of new high-tech product that this Langfang Lay lattice photoelectric instrument company produces.The important technological parameters of photoelectricity length gauge: range 0～50mm; Accuracy ± 1 μ m～± 0.1 μ m; Systemic resolution 0.1 μ m～0.01 μ m.The principle of work of the input of straight line micrometric displacement, output optical grating measuring system is as follows, linear stepping motor (measured object) self is with driver, linear stepping motor produces the straight line micrometric displacement when computing machine and plug-in type motion control card send step instruction to driver, namely sends input signal.If the above-mentioned step instruction number of sending is Ni, the pitch of linear stepping motor axle is Hi, and the straight line micrometric displacement amount of linear stepping motor input is
Just the photoelectricity length gauge that meanwhile fixes on motor shaft can produce output, if in the photoelectricity length gauge, the pitch of key light grid is Wi, the umber of pulse Na that produces when the photoelectricity length gauge moves, the straight line micrometric displacement amount of linear stepping motor output has
, then done by computing machine
Data are processed, and just can draw the driving error value of measured object linear stepping motor.Just can obtain dynamic error and the performance of measured object transmission after processing, calculate, analyze by computer software and hardware when the said mechanism continuous motion.In addition, can not produce the measured object of input measurement signal for self, as cam slide bar gear train, it need to adopt two photoelectricity length gauges when measuring, on the track plane that wherein withstands on cam edge, produce measured object with the input signal of nonlinear loci motion.Another photoelectricity length gauge withstands on the top end of sliding rod face, produces the output signal of measured object.The transmission measurement pattern of above-mentioned cam slide bar gear train remains driving-chain measurement pattern and the principle with the input of displacement of the lines amount, output.
Measure electric cabinet A26 that driving control system comprises servomotor 36, rare-earth electric motor 27 electric cabinet B30, be loaded on the motion control card in computing machine 63, they are the conventional products that can buy on market.The control procedure of native system as shown in Figure 3, rare-earth electric motor and electric cabinet thereof are used for measuring power drive and the motion control of harmonic speed reducer (measured object), servomotor and electric cabinet thereof are used for measuring power drive and the motion control of ball-screw (measured object), and computing machine and motion control card are used for sending quantitative movement instruction to linear stepping motor (measured object).
The effect of Measurement and Data Processing and management system is collection, processing, demonstration, analysis and the storage that realizes measurement data by computer software and hardware and peripherals printer 64.The software configuration of this system is comprised of main control module, data acquisition module, data memory module, data read module, data analysis processing module, data disaply moudle as shown in Figure 3.Grating collection segmentation card and motion control card are the hardware support of this system.
The alignment error detection system comprises slide block 52, base 53, locking nail 54, super large range photoelectricity length gauge 55, bracing frame 56, column 57, check lock lever 58.The slide block 52 that is arranged on guide rail is annexes of the 3rd line slideway 14, base 53 by screw fastening on slide block, column 57 is fastened in the screw of base by the screw thread of self, bracing frame 56 is fastened on column by check lock lever 58, and super large range photoelectricity length gauge is arranged on bracing frame by check lock lever 58.The principle of work of this installation error detecting system: super large range photoelectricity length gauge and digital display meter assembly 59, the common grating digital readout measuring unit that forms of dial framework 61, as shown in Figure 3, the principle of work of this unit is identical with the measuring principle of above-mentioned grating scale, and the effect of this installation error detecting system is as described in the content in above-mentioned measuring machine feature." the digital display meter assembly " that use in this system is easy to buy in market at home, and " super large range photoelectricity length gauge " can be bought in Germany.This measuring machine is as a kind of multiduty large-scale measuring equipment, it is necessary and important having at random important accessory, one of its main accessories is the high precision photoelectric length gauge of four kinds of ranges, wherein 1 of range 200mm, 1 of range 60mm, 1 of range 10mm, 1 of range 5mm, they are also the new high-tech products that this Laige Optoelectronic Instrument Co., Ltd., Langfang Development Zone produces.
Wherein can be with other replacements that are rigidly connected such as welding by 4 trip bolts.
The present invention has following advantage:
1, of many uses, practical, know-why is advanced.Measuring machine can be measured with the angular displacement input, export, and inputs, exports with the displacement of the lines amount with angular displacement, with the input of displacement of the lines amount, output, inputs, exports with the displacement of the lines amount dynamic driving error and the performance of Precise Transmission Chain with the nonlinear motion track.
2, measure accurately and reliably, because the measuring basis device that measuring machine adopts is technology maturation advanced person, high-precision grating sensor.The insider all knows: optical electric axial angle encoder is used for the measured angular displacement, is the angular measurement sensor that the whole world is most advanced, precision is the highest at present; Raster pattern linear encoder (being grating scale and photoelectricity length gauge) is used for linear movement measuring, present accuracy of measurement is only second to laser interferometer, ranked second the position in the whole world, and optical maser wavelength when being affected by the external environment undulatory property larger, application conditions is complicated, is not suitable for this measuring machine.
3, measured object loads and unloads, adjusts fast, and high efficiency is because measuring machine has adopted combinations thereof guiding rail mechanism and alignment error detection system.
4, intelligent degree is high, and measurement function is powerful, because measuring machine has adopted Measurement and Data Processing and the management system that is comprised of plug-in type grating collection segmentation card, computer software and hardware and printer.
It should be noted that at last: the above only is the preferred embodiments of the present invention, be not limited to the present invention, although with reference to previous embodiment, the present invention is had been described in detail, for a person skilled in the art, it still can be modified to the technical scheme that aforementioned each embodiment puts down in writing, and perhaps part technical characterictic wherein is equal to replacement.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (7)
1. photoelectric measuring machine for precision transmission chain, comprise the surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system;
It is characterized in that, three groups of precise linear guide mechanisms that are parallel to each other are housed on above-mentioned surveying work stylobate platform table top, described angular displacement input, displacement of the lines output optical grating measuring system are arranged on the first guiding rail mechanism; Described angular displacement input, output optical grating measuring system are arranged on the second guiding rail mechanism; Described straight line micrometric displacement input, output optical grating measuring system and alignment error detection system are arranged on the 3rd guiding rail mechanism; Described measurement driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.
2. photoelectric measuring machine for precision transmission chain according to claim 1, it is characterized in that, also include Measurement and Data Processing and management system: accept the measurement data of above-mentioned photoelectric measuring machine for precision transmission chain, and this measurement data is gathered, processes, shows, analyzes and stores.
3. photoelectric measuring machine for precision transmission chain according to claim 1 and 2, it is characterized in that, described surveying work platform comprises base station, four lifting jack, the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanisms, above-mentioned four lifting jack are arranged on respectively on the groove everywhere of base station bottom, and what the first guiding rail mechanism, the second guiding rail mechanism and the 3rd guiding rail mechanism were parallel to each other is arranged on base station.
4. photoelectric measuring machine for precision transmission chain according to claim 1 and 2, it is characterized in that, described angular displacement input, output optical grating measuring system comprise the second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; The first fixed mount is arranged on first slide block plane on the second guiding rail mechanism by rigidity, is fixedly mounted with the servomotor seat on described the first fixed mount, and described rare-earth electric motor is packed on the servomotor seat; The second fixed mount and the 3rd fixed mount are packed in respectively on the second guiding rail mechanism, and on described second fixed mount, rigidity is fixedly mounted with speed reducer base, is fixedly mounted with harmonic speed reducer on described speed reducer base; Described the second optical electric axial angle encoder is packed on the 3rd fixed mount by ring flange; Described rare-earth electric motor two ends axle journal is all the version of stretching out, and wherein an end is connected to by elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end is connected with the input end of harmonic speed reducer by elastic coupling; The projecting shaft of described the second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer by elastic coupling.
5. photoelectric measuring machine for precision transmission chain according to claim 1 and 2, it is characterized in that, described angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, the first optical electric axial angle encoder, servomotor, grating scale, ball sleeve, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of described ball-screw are contained in respectively in two bearing seats, and described two bearing seats are fixedly mounted with respectively on resonable stone table board, manage Shitai County and are placed on the base station face, and two backing plates of the level of adjusting reason Shitai County and base station are installed between reason Shitai County and base station; Described servomotor is packed on motor cabinet, and motor cabinet is fixedly mounted with in resonable Shitai County, and the projecting shaft of servomotor is connected with an end of ball-screw by shaft coupling; The other end of described ball-screw is connected by the projecting shaft of shaft coupling with the first optical electric axial angle encoder, and described the first optical electric axial angle encoder is packed on coupling band, and coupling band is packed on bearing seat; Described three lifting pieces are fixedly mounted with on resonable stone table board, and grating scale is arranged on by the lifting piece position that parallels with ball-screw by rigidity; Be equipped with by the silk connecting plate on slippery fellow on described the first guiding rail mechanism and read the coupling assembling that connecting plate forms, described ball sleeve and this coupling assembling are rigidly connected, and the other end and the grating ruler reading head of this coupling assembling are rigidly connected.
6. photoelectric measuring machine for precision transmission chain according to claim 1 and 2, is characterized in that, described alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Described slide block is arranged on the 3rd guiding rail mechanism, be fixedly mounted with base on described slide block, described column is rotated in the screw of base, and support frame as described above is fastened on column by check lock lever, and described super large range photoelectricity length gauge is arranged on bracing frame by check lock lever.
7. photoelectric measuring machine for precision transmission chain according to claim 1 and 2, is characterized in that, described straight line micrometric displacement input, output optical grating measuring system comprise auxiliary working platform, photoelectricity length gauge, clamping seats and linear stepping motor; Described auxiliary working platform is installed on slide unit on the 3rd guiding rail mechanism, described clamping seats is packed on auxiliary working platform, described photoelectricity length gauge is arranged on auxiliary working platform by the clamping seats level, described linear stepping motor is packed on auxiliary working platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110307173 CN102353539B (en) | 2011-10-11 | 2011-10-11 | Photoelectric measuring machine for precision transmission chain |
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| CN 201110307173 CN102353539B (en) | 2011-10-11 | 2011-10-11 | Photoelectric measuring machine for precision transmission chain |
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| CN102353539A CN102353539A (en) | 2012-02-15 |
| CN102353539B true CN102353539B (en) | 2013-06-12 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103699052B (en) * | 2012-09-28 | 2016-08-03 | 北京航天计量测试技术研究所 | Error correction closed loop is utilized to eliminate the precision positioning device of gash spacing error |
| CN103175568A (en) * | 2013-03-19 | 2013-06-26 | 上海大学 | Testing device for high-speed encoder |
| CN104833505A (en) * | 2014-02-12 | 2015-08-12 | 天津职业技术师范大学 | High-precision transmission error detection system |
| CN105716553A (en) * | 2016-02-02 | 2016-06-29 | 三明市前创微控科技有限公司 | Variable length standard device |
| CN107991901B (en) * | 2017-12-04 | 2020-12-25 | 中国科学院国家天文台南京天文光学技术研究所 | Voice coil motor displacement actuator simulation platform |
| CN110398359B (en) * | 2019-08-14 | 2024-03-15 | 华南理工大学 | Dynamic detection method and device for comprehensive errors of mechanical transmission chain |
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| JP2007040788A (en) * | 2005-08-02 | 2007-02-15 | Toyota Motor Corp | Device and method for measuring engagement transmission error |
| CN101587015A (en) * | 2009-06-26 | 2009-11-25 | 西安交通大学 | Experiment table for detecting dynamic characteristics of harmonic reducers |
| CN101957190A (en) * | 2010-09-30 | 2011-01-26 | 卢艳 | Worm error detection device |
| CN102175450A (en) * | 2010-12-30 | 2011-09-07 | 大连高金数控集团有限公司 | Device for detecting comprehensive performance of high-speed precision ball screw pair |
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| JP2007040788A (en) * | 2005-08-02 | 2007-02-15 | Toyota Motor Corp | Device and method for measuring engagement transmission error |
| CN101587015A (en) * | 2009-06-26 | 2009-11-25 | 西安交通大学 | Experiment table for detecting dynamic characteristics of harmonic reducers |
| CN101957190A (en) * | 2010-09-30 | 2011-01-26 | 卢艳 | Worm error detection device |
| CN102175450A (en) * | 2010-12-30 | 2011-09-07 | 大连高金数控集团有限公司 | Device for detecting comprehensive performance of high-speed precision ball screw pair |
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