CN102353539A - Photoelectric measuring machine for precision transmission chain - Google Patents

Photoelectric measuring machine for precision transmission chain Download PDF

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Publication number
CN102353539A
CN102353539A CN2011103071734A CN201110307173A CN102353539A CN 102353539 A CN102353539 A CN 102353539A CN 2011103071734 A CN2011103071734 A CN 2011103071734A CN 201110307173 A CN201110307173 A CN 201110307173A CN 102353539 A CN102353539 A CN 102353539A
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China
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line slideway
measuring
packed
angular displacement
screw
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CN2011103071734A
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Chinese (zh)
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CN102353539B (en
Inventor
许兴智
李国洪
高峰
王晓
张一钢
史淑华
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廊坊开发区莱格光电仪器有限公司
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Publication of CN102353539A publication Critical patent/CN102353539A/en
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Abstract

The invention discloses a photoelectric measuring machine for a precision transmission chain. The photoelectric measuring machine comprises a measuring worktable, an angular displacement input-output grating measuring system, an angular displacement input-linear displacement output grating measuring system, a linear micro-displacement input-output grating measuring system, an installation error detection system and a measurement drive control system, wherein, the base surface of the measuring worktable is provided with three groups of parallel precision linear guide rail mechanisms; the angular displacement input-linear displacement output grating measuring system is arranged on the first linear guide rail mechanism; the angular displacement input-output grating measuring system is arranged on the second linear guide rail mechanism; the linear micro-displacement input-output grating measuring system and the installation error detection system are arranged on the third linear guide rail mechanism; and the measurement drive control system is electrically connected with the angular displacement input-linear displacement output grating measuring system and the angular displacement input-output grating measuring system respectively. The photoelectric measuring machine for the precision transmission chain has the advantages of wide use and high measurement accuracy.

Description

Precision drive chain photoelectric measurement machine

Technical field

The present invention relates to the photoelectric measurement field, particularly, relate to a kind of precision drive chain photoelectric measurement machine.

Background technology

Precision drive chain photoelectric measurement machine (hereinafter to be referred as " measuring machine ") is a kind of large-scale measurement equipment of being made up of light, mechanical, electrical integrated form, is used for accurately measuring, analyzing of precision drive chain transmission error.Be particularly useful for high-grade, digitally controlled machine tools and make equipment with the basis; Automobile, high ferro train; Space flight, aviation, navigation exact instrument; Automatic control system, device; Metrology and measurement instrument, equipment; Joint of robot, radar, optical tracking instrument, equipment, the dynamic driving error of multiple crucial transmission agency parts, system, device is measured and is analyzed in the equipment such as semiconductor, microelectronics manufacturing measurement.Make complete machine, system, parts realize transmission optimized design, and quality evaluation, process modification are had vital role, thereby make transmission agency, power transmission, the dynamic response of precision drive chain have high precision and high-effect.

At present; Driving-chain measuring machine both domestic and external (appearance); Be measurement target all with the angular displacement driving error; Soft, hardware handles measurement data uses a computer; Thereby realization is to Gear Processing and revolving meber machining tool complete machine or single angular displacement is imported, the transmission chain error of output is measured, but there is following shortcoming in they:

1, purposes is single, and use face is narrow, does not satisfy numerous users' demand and instrument and equipment utilization factor and can not give full play to, and they almost are instrumentation, equipment, and versatility is poor, and the application market scope is little;

2, the alignment error detection system of be not specifically designed on instrument, the equipment that measured object is installed, location, adjustment being used is prone to produce the alignment error of measured object and reduces measuring accuracy, and during the measured object mounting cost, effort, work efficiency is lower.

Summary of the invention

The objective of the invention is to,, propose a kind of precision drive chain photoelectric measurement machine, to realize highly versatile, the advantage that measuring accuracy is high to the problems referred to above.

For realizing above-mentioned purpose, the technical scheme that the present invention adopts is:

A kind of precision drive chain photoelectric measurement machine; Comprise the surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system; The input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system;

Three groups of precision line slideway mechanisms that are parallel to each other are housed on above-mentioned surveying work stylobate platform table top, and said angular displacement input, displacement of the lines output optical grating measuring system are installed in the first line slideway mechanism; Said angular displacement input, output optical grating measuring system are installed in the second line slideway mechanism; Said straight line micrometric displacement input, output optical grating measuring system and alignment error detection system are installed in the 3rd line slideway mechanism; Said measurement driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.

According to a preferred embodiment of the invention, also include Measurement and Data Processing and management system: accept the measurement data of above-mentioned precision drive chain photoelectric measurement machine, and this measurement data is gathered, handles, shows, analyzed and stores.

According to a preferred embodiment of the invention; Said surveying work platform comprises base station, four lifting jack, the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanisms; Above-mentioned four lifting jack are installed in respectively on the groove everywhere of base station bottom, and what the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanism were parallel to each other is installed on the base station.

According to a preferred embodiment of the invention, said angular displacement input, output optical grating measuring system comprise second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; First fixed mount is installed on first slide block plane in the second line slideway mechanism by rigidity, and said servomotor seat is packed on first fixed mount, and said rare-earth electric motor is packed on the servomotor seat; Second fixed mount and the 3rd fixed mount are packed in respectively in the second line slideway mechanism, and said speed reduction unit seat then is fastened on second fixed mount by rigidity, and said harmonic speed reducer is packed on the speed reduction unit seat; Said second optical electric axial angle encoder is packed on the 3rd fixed mount through ring flange; It is equal that said rare-earth electric motor has the two ends axle journal, and wherein an end is connected through elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end links to each other with the input end of harmonic speed reducer through elastic coupling; The projecting shaft of said second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer through elastic coupling.

According to a preferred embodiment of the invention, said angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, first optical electric axial angle encoder, servomotor, grating chi, ball cover, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of said ball-screw are contained in respectively in two bearing seats, and said two bearing seats install respectively on resonable Shitai County face, and reason Shitai County is placed on the base station face, and two backing plates of the level of adjustment reason Shitai County and base station are installed between reason Shitai County and the base station; Said servomotor is packed on the motor cabinet, and motor cabinet installs in resonable Shitai County, and the projecting shaft of servomotor links to each other with an end of ball-screw through shaft coupling; The other end of said ball-screw is connected with the projecting shaft of first optical electric axial angle encoder through shaft coupling, and said first optical electric axial angle encoder is packed on the coupling band, and coupling band is packed on the bearing seat; Said three lifting pieces install on resonable Shitai County face, and the grating chi is installed in the position that parallels with ball-screw through the lifting piece by rigidity; Be equipped with on the slippery fellow in the said first line slideway mechanism by the silk connecting plate with read the coupling assembling that connecting plate is formed, said ball cover and this coupling assembling are rigidly connected, the other end and the grating ruler reading head of this coupling assembling are rigidly connected.

According to a preferred embodiment of the invention, said alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Said slide block is installed in the 3rd line slideway mechanism; Said base is packed on the slide block; Said column is rotated in the screw of base, and support frame as described above is fastened on the column through check lock lever, and said super large range photoelectricity length gauge is installed on the bracing frame through check lock lever.

According to a preferred embodiment of the invention, said straight line micrometric displacement input, output optical grating measuring system comprise subtask platform, photoelectricity length gauge, clamping seats and linear stepping motor; Said subtask platform is installed on the slide unit in the 3rd line slideway mechanism; Said clamping seats is packed on the subtask platform; Said photoelectricity length gauge is installed on the subtask platform through the clamping seats level; Said linear stepping motor is packed on the subtask platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.

Technical scheme of the present invention has increased the versatility of measuring machine through various measuring systems are used in combination, and makes this measuring machine purposes more extensive.And worktable is set, thus avoided the alignment error of measurement object to place measured object, thus measuring accuracy improved.The present invention simultaneously adopts optical electric axial angle encoder to be used for the measured angular displacement, has further improved measuring accuracy.

Other features and advantages of the present invention will be set forth in instructions subsequently, and, partly from instructions, become apparent, perhaps understand through embodiment of the present invention.The object of the invention can be realized through the structure that in the instructions of being write, claims and accompanying drawing, is particularly pointed out and obtained with other advantages.

Through accompanying drawing and embodiment, technical scheme of the present invention is done further detailed description below.

Description of drawings

Accompanying drawing is used to provide further understanding of the present invention, and constitutes the part of instructions, is used to explain the present invention with embodiments of the invention, is not construed as limiting the invention.In the accompanying drawings:

Fig. 1 is the structural representation of the described precision drive chain of embodiment of the invention photoelectric measurement machine;

Fig. 2 is the front elevation of precision drive chain photoelectric measurement machine shown in Figure 1;

Fig. 3 is the fundamental diagram of the described precision drive chain of embodiment of the invention photoelectric measurement machine;

Fig. 4 is the software configuration of described Measurement and Data Processing of the embodiment of the invention and management system.

In conjunction with accompanying drawing, Reference numeral is following in the embodiment of the invention:

The 1-first photo electric axis displacement coder; The 2-coupling band; The 4-first line slideway mechanism; The 5-ball-screw; 6-second fixed mount; 7-the 3rd fixed mount; The 8-second line slideway mechanism; The 10-second photo electric axis displacement coder; 11-scrambler seat; The 13-shaft coupling; 14-the 3rd line slideway mechanism; 17-subtask platform; 18-photoelectricity length gauge; The 19-clamping seats; The 21-linear stepping motor; 23-speed reduction unit seat; The 24-ring flange; The 25-harmonic speed reducer; 26-electric cabinet A; The 27-rare-earth electric motor; 28-first fixed mount; The 29-motor cabinet; 30-electric cabinet B; 31-the 3rd photo electric axis displacement coder; The 32-bearing seat; The 33-motor cabinet; 35-connects bent plate; The 36-servomotor; 37-grating chi; 39-ball cover; 40-silk connecting plate; 41-reads connecting plate; 42-lifts piece; The 47-lifting jack; The 48-base station; The 49-backing plate; 50-manages Shitai County; 51-lifts plate; The 52-slide block; The 53-base; The 54-locking nail; 55-super large range length gauge; The 56-bracing frame; The 57-column; The 58-check lock lever; 59-digital display meter assembly; The 61-dial framework; The 63-computing machine; The 64-printer.

Embodiment

Below in conjunction with accompanying drawing the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein only is used for explanation and explains the present invention, and be not used in qualification the present invention.

As shown in Figure 1, precision drive chain photoelectric measurement machine comprises the surveying work platform; Angular displacement input, output optical grating measuring system; Angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system; Three groups of precision line slideway mechanisms that are parallel to each other are housed on surveying work stylobate platform table top, and angular displacement input, displacement of the lines output optical grating measuring system are installed in the first line slideway mechanism; Angular displacement input, output optical grating measuring system are installed in the second line slideway mechanism; The input of straight line micrometric displacement, output optical grating measuring system and alignment error detection system are installed in the 3rd line slideway mechanism; Measuring driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.

Comprising Measurement and Data Processing and management system are arranged: accept the measurement data of above-mentioned precision drive chain photoelectric measurement machine, and this measurement data is gathered, handles, shows, analyzed and stores.

Wherein the surveying work platform comprises base station, four lifting jack, the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanisms; Above-mentioned four lifting jack are installed in respectively on the groove everywhere of base station bottom, and what the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanism were parallel to each other is installed on the base station.

Wherein angular displacement input, output optical grating measuring system comprise second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; First fixed mount is installed on first slide block plane in the second line slideway mechanism through 4 trip bolts, and the servomotor seat is packed on first fixed mount, and rare-earth electric motor is packed on the servomotor seat; Second fixed mount and the 3rd fixed mount are packed in respectively in the second line slideway mechanism, and the speed reduction unit seat then is fastened on second fixed mount by rigidity, and harmonic speed reducer is packed on the speed reduction unit seat; Second optical electric axial angle encoder is packed on the 3rd fixed mount through ring flange; It is equal that rare-earth electric motor has the two ends axle journal, and wherein an end is connected through elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end links to each other with the input end of harmonic speed reducer through elastic coupling; The projecting shaft of second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer through elastic coupling.

Wherein angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, first optical electric axial angle encoder, servomotor, grating chi, ball cover, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of ball-screw are contained in respectively in two bearing seats, and two bearing seats install respectively on resonable Shitai County face, and reason Shitai County is placed on the base station face, and two backing plates of the level of adjustment reason Shitai County and base station are installed between reason Shitai County and the base station; Servomotor is packed on the motor cabinet, and motor cabinet installs in resonable Shitai County, and the projecting shaft of servomotor links to each other with an end of ball-screw through shaft coupling; The other end of ball-screw is connected with the projecting shaft of first optical electric axial angle encoder through shaft coupling, and first optical electric axial angle encoder is packed on the coupling band, and coupling band is packed on the bearing seat; Three the lifting pieces install on resonable Shitai County face, the grating chi through the lifting piece by through 4 trip bolts in the position that parallels with ball-screw; Be equipped with on the slippery fellow in the first line slideway mechanism by the silk connecting plate with read the coupling assembling that connecting plate is formed, ball cover and this coupling assembling are rigidly connected, the other end and the grating ruler reading head of this coupling assembling are rigidly connected.

Wherein the alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Slide block is installed in the 3rd line slideway mechanism, and base is packed on the slide block, and column is rotated in the screw of base, and bracing frame is fastened on the column through check lock lever, and super large range photoelectricity length gauge is installed on the bracing frame through check lock lever.

The input of straight line micrometric displacement, output optical grating measuring system comprise subtask platform, photoelectricity length gauge, clamping seats and linear stepping motor; The subtask platform is installed on the slide unit in the 3rd line slideway mechanism; Clamping seats is packed on the subtask platform; The photoelectricity length gauge is installed on the subtask platform through the clamping seats level, and linear stepping motor is packed on the subtask platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.

Shown in Figure 1; Precision drive chain photoelectric measurement machine; Comprise main surveying work platform; Angular displacement input, output optical grating measuring system; Angular displacement input, displacement of the lines output optical grating measuring system, the input of straight line micrometric displacement, output optical grating measuring system are measured driving control system; Measurement and Data Processing and management system, alignment error detection system seven parts are formed.

Main surveying work platform comprises base station 48, four lifting jack 47, the first line slideway mechanism 4, the second line slideway mechanism 8, the 3rd line slideway mechanism 14.Above-mentioned four lifting jack are installed in respectively on the groove everywhere of base station bottom, and three groups of line slideway auxiliaries are installed on the base station with the position that is parallel to each other.

Angular displacement input, output optical grating measuring system comprise scrambler seat 11, second optical electric axial angle encoder 10, shaft coupling 13, speed reduction unit seat 23, speed reduction unit (measured object) 25, ring flange 24 >, rare-earth electric motor 27, fixed mount 28, servomotor seat 29, the 3rd optical electric axial angle encoder 31.Totally 3 of fixed mounts; First fixed mount 28 is passed through 4 trip bolts on first slide block plane of the second line slideway mechanism 8; All there are 2 long through grooves the fixed mount two sides; Its effect is the needs that move according to the fixed mount desired location, can fixed mount be fastened on the base station basal plane by the embedded with metal screw that screw and base station 48 basal planes are reserved.Rare-earth electric motor 27 is fastened on the servomotor seat 29; Motor cabinet is fastened on the fixed mount; Harmonic speed reducer (measured object) 25 is fastened on the speed reduction unit seat 23 through screw, and the speed reduction unit seat then is fastened on second fixed mount 6 by rigidity, also is fastened on the base station basal plane by screw as stated.Rare-earth electric motor two ends axle journal all is the version of stretching out; Wherein an end links to each other with the projecting shaft of second optical electric axial angle encoder through elastic coupling 13, and the other end links to each other with the input end of harmonic speed reducer (measured object) through elastic coupling same as described above.Second optical electric axial angle encoder 10 is angular displacement output measuring basis devices, and it is fastened on the 3rd fixed mount 7 through ring flange 24.This fixed mount is fastened on the base station basal plane by screw, and second optical electric axial angle encoder and fixed mount can come and go in the second line slideway mechanism 8 and move or be fastened on the position of a certain needs.The projecting shaft of second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer through elastic coupling.Advantage like above-mentioned structural design and installation method has: one of which, each ingredient all can move on same line slideway or be fixed, and can improve their rectilinearity installation accuracy; Its two, be convenient to quick location, loading and unloading and the adjustment of measured object and each associated part, increase work efficiency; Its three, the alignment error detection system in easy to use measuring machine improves the concentricity of each associated part, thereby reduces alignment error effectively.Second optical electric axial angle encoder and the 3rd optical electric axial angle encoder all are high precision, high performance sensor, and they can be buied in Germany, also all are new high-tech products that this Langfang Lay lattice photoelectric instrument company produces.Two scrambler important technological parameters of above-mentioned selection are identical, the original groove number of the key light grid of its scrambler: 14400 pairs of line/week~21600 pair line/weeks; Output signal: sine and cosine, accuracy of measurement: ± 3 "~± 1 "; Measurement Resolution obtains through grating collection segmentation card segmentation back, is generally 1 "~0.2 ".The angular displacement of the input and output grating measuring system works as follows, harmonic reducer (DUT) from the earth motor drive, the motor and reducer, respectively, of the two shaft encoder connected to the angular harmonic reducer displacement input θ1 is measured by the third photoelectric rotary encoder and raster acquisition card for subdivision, that? ? , wherein W1 is the encoder pitch angle of the main grating, N1 rotates the encoder the number of pulses.The reducer output and second optical shaft encoder connected to the angular displacement of empathy reducer output θ2 is , wherein W1 is the pitch angle, i is the gear transmission ratio, N2 rotating the encoder when the number of pulses.And then from the computer to do treatment can be derived harmonic reducer transmission error.When the said mechanism continuous motion, just can obtain the dynamic error and the performance of measured object transmission by computer software and hardware processing, calculating with after analyzing.

Angular displacement input, displacement of the lines output optical grating measuring system comprises first optical electric axial angle encoder 1, connecting shaft cover 3, ball-screw (measured object) 5, motor cabinet 33, shaft coupling 13, servomotor 36, connects bent plate 35, grating chi 37, ball cover 39, silk connecting plate 40, reads connecting plate 41, lifting piece 43, shaft coupling 13, reason Shitai County 50, backing plate 49, lifting plate 51.The two ends of ball-screw 5 are contained in respectively in two bearing seats 32, and these two bearing seats are respectively through in 50 of fastened resonable Shitai County of screw, and reason Shitai County then is placed on the base station face.The benefit of layout is to be convenient to the measured object of longer size is measured like this, and need not increase the physical dimension and the complete machine weight of base station.Between reason Shitai County and the base station two backing plates 49 are installed, its effect is the level of adjustment reason Shitai County and base station.Servomotor is installed on the motor cabinet 33 through screw, and then through in the fastened resonable Shitai County of screw, the motor projecting shaft links to each other with an end of ball wire through shaft coupling 13 motor cabinet.First optical electric axial angle encoder is installed on the coupling band 3 through screw a, and coupling band is fastened on the bearing seat 32, and the projecting shaft of first optical electric axial angle encoder is connected with the other end of ball-screw through shaft coupling.With on the position that ball-screw parallels the first line slideway mechanism 4 is housed, line slideway is installed on resonable Shitai County face through screw p.Three lifting pieces 43 are through on the fastened resonable Shitai County of screw face, grating chi 37 through the lifting piece by through 4 trip bolts in the position that parallels with ball-screw.Be equipped with on the slippery fellow of line slideway by silk connecting plate 40 with read the coupling assembling that connecting plate 41 is formed, an end of this coupling assembling and ball-screw ball overlap 39 and are rigidly connected, the other end and grating ruler reading head are rigidly connected.The said structure design has the following advantages: one of which, the Abbe error that reduces to be produced by installation; Its two, when the driving error of optical grating ruler measurement ball screw assembly,, be not subjected to the influence of ball screw assembly, idle running error, motion heating and distortion inaccuracy; Its three, through the alignment error detection system on this measuring machine being displaced in the installation that realizes in the first line slideway mechanism that ball-screw, the first line slideway mechanism, grating chi three are parallel to each other.First optical electric axial angle encoder and grating chi that this measuring system is used all are high precision, high performance sensor, and they can be buied in Germany, also all are new high-tech products that this Langfang Lay lattice photoelectric instrument company produces.Wherein the important technological parameters of grating chi is: 100 couples of line/mm of raster density and 50 couples of line/mm; Output signal: sine and cosine; Measurement range: 0~1000mm commonly used; Maximum range 3010mm; Accuracy: ± 3 μ m/m; High measurement resolution realizes minimum Measurement Resolution 0.1 μ m through grating collection segmentation card.The effect of grating chi is the driving error that detects ball-screw secondary (measured object).Above-mentioned grating collection segmentation is stuck in Germany and can buys, and it also is a kind of new high-tech product that this Langfang Lay lattice photoelectric instrument company produces.It is consistent with the grating chi that first optical electric axial angle encoder is selected the foundation of important technological parameters for use.The angular displacement of the input and output grating linear displacement measuring system works as follows, rolling screw (DUT) driven by a servo motor, screw rotation makes the screw on the linear displacement of the slider produces, and the other end connected to the screw photoelectric rotary encoder will convert the angle of rotation of the screw into the pulse number p output, screw pitch h, raster acquisition subdivision subdivision card number is n, the line displacement output shows that the minimum resolution, if rotary encoders to measure the number of weeks screw N, then is a line screw slider displacement.The grating readhead connected rigidly with the screw slider by grating, a system composed of segments card can more accurately measure the linear displacement screw vice amount , this where W is the grating pitch, H is the head moving grating after reading the output pulse number, and then from the computer to do data processing, you can come rolling ball screw transmission error.Just can obtain the dynamic error and the performance of measured object transmission after when the said mechanism continuous motion, handling, calculate, analyze by computer software and hardware.

The input of straight line micrometric displacement, output optical grating measuring system comprise subtask platform 17, photoelectricity length gauge 18, clamping seats 19, linear stepping motor (measured object) 21.Subtask platform 17 is installed on the slide unit of the 3rd line slideway mechanism 14; The photoelectricity length gauge is installed through clamping seats 19 levels that are fastened on the subtask platform; Linear stepping motor 21 is fastened on the subtask platform through oneself screw and screw on one's body; Linear stepping motor withstands on the measuring staff head of photoelectricity length gauge its output terminal when installing, and this measuring staff head can stretch.Above-mentioned photoelectricity length gauge can be bought in Germany, and it also is a kind of new high-tech product that this Langfang Lay lattice photoelectric instrument company produces.The important technological parameters of photoelectricity length gauge: range 0~50mm; Accuracy ± 1 μ m~± 0.1 μ m; Systemic resolution 0.1 μ m~0.01 μ m.The principle of work of the input of straight line micrometric displacement, output optical grating measuring system is following; Linear stepping motor (measured object) self has driver; When computing machine and plug-in type motion control card linear stepping motor generation straight line micrometric displacement when driver sends step instruction, promptly send input signal.If the above step instructions issued by the number of Ni, linear stepper motor axis pitch is Hi, the linear stepper motor micro-input linear displacement of , while fixed to the motor shaft will produce optical length of the meter output, if the total length of the main optical grating pitch of Wi, optical length of the meter moves when the number of pulses generated Na, then the output of the linear stepper motor linear micro-displacement has , and then from the computer to do data processing, to arrive at analyte linear stepper motor drive error.Just can obtain the dynamic error and the performance of measured object transmission after when the said mechanism continuous motion, handling, calculate, analyze by computer software and hardware.In addition; Can not produce the measured object of input measurement signal for self, like cam slide bar gear train, it need adopt two photoelectricity length gauges when measuring; Wherein on the track plane that withstands on cam edge, produce the input signal of measured object with non-linear orbiting motion.Another photoelectricity length gauge withstands on the top end of sliding rod face, produces the output signal of measured object.The transmission measurement pattern of above-mentioned cam slide bar gear train remains driving-chain measurement pattern and the principle with the input of displacement of the lines amount, output.

Measure electric cabinet A26 that driving control system comprises servomotor 36, rare-earth electric motor 27 electric cabinet B30, be loaded on the motion control card in the computing machine 63, they are the conventional products that can buy on the market.The control procedure of native system as shown in Figure 3; Rare-earth electric motor and electric cabinet thereof are used to measure the power drive and the motion control of harmonic speed reducer (measured object); Servomotor and electric cabinet thereof are used to measure the power drive and the motion control of ball-screw (measured object), and computing machine and motion control card are used for sending quantitative movement instruction to linear stepping motor (measured object).

The effect of Measurement and Data Processing and management system is collection, processing, demonstration, analysis and the storage that realizes measurement data through computer software and hardware and peripherals printer 64.The software configuration of this system is made up of main control module, data acquisition module, data memory module, data read module, data analysis processing module, data disaply moudle as shown in Figure 3.Grating collection segmentation card and motion control card are the hardware support of this system.

The alignment error detection system comprises slide block 52, base 53, locking nail 54, super large range photoelectricity length gauge 55, bracing frame 56, column 57, check lock lever 58.The slide block 52 that is installed on the guide rail is annexes of the 3rd line slideway 14; Base 53 is fastened on the slide block through screw; Column 57 is fastened in the screw of base through the screw thread of self; Bracing frame 56 is fastened on the column through check lock lever 58, and super large range photoelectricity length gauge is installed on the bracing frame through check lock lever 58.The principle of work of this installation error detecting system: super large range photoelectricity length gauge and digital display meter assembly 59, the dial framework 61 common grating digital readout measuring units of forming; As shown in Figure 3; The principle of work of this unit is identical with the measuring principle of above-mentioned grating chi, and the effect of this installation error detecting system is as as described in the content in the above-mentioned measuring machine characteristic." the digital display meter assembly " that use in this system is easy to buy in the market at home, and " super large range photoelectricity length gauge " can be bought in Germany.This measuring machine is as a kind of multiduty large-scale measuring equipment; It is necessary and important having important accessory at random; One of its main accessories is the high precision photoelectric length gauge of four kinds of ranges; Wherein 1 of range 200mm; 1 of range 60mm; 1 of range 10mm, 1 of range 5mm, they also are the new high-tech products that this Laige Optoelectronic Instrument Co., Ltd., Langfang Development Zone produces.

Wherein can wait other replacements that is rigidly connected with welding through 4 trip bolts.

The present invention has following advantage:

1, of many uses, practical, know-why is advanced.Measuring machine can be measured with angular displacement input, output, imports, exports with the displacement of the lines amount with angular displacement, with the input of displacement of the lines amount, output, exports the dynamic driving error and the performance of precision drive chain with the input of nonlinear motion track, with the displacement of the lines amount.

2, measure accurately and reliably, because the measuring basis device that measuring machine adopts is technology maturation advanced person, high-precision grating sensor.The insider all knows: optical electric axial angle encoder is used for the measured angular displacement, is the angular measurement sensor that the whole world is most advanced, precision is the highest at present; Raster pattern linear encoder (being grating chi and photoelectricity length gauge) is used for linear movement measuring; Present accuracy of measurement is only second to laser interferometer, ranked second the position in the whole world, and optical maser wavelength when being affected by the external environment undulatory property bigger; Application conditions is complicated, is not suitable for this measuring machine.

3, measured object loads and unloads, adjusts fast, and high efficiency is because measuring machine has adopted combinations thereof line slideway mechanism and alignment error detection system.

4, intelligent degree is high, and measurement function is powerful, because measuring machine has adopted Measurement and Data Processing and the management system of being made up of plug-in type grating collection segmentation card, computer software and hardware and printer.

What should illustrate at last is: the above only is the preferred embodiments of the present invention; Be not limited to the present invention; Although the present invention has been carried out detailed explanation with reference to previous embodiment; For a person skilled in the art; It still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (7)

1. precision drive chain photoelectric measurement machine; Comprise the surveying work platform, angular displacement input, output optical grating measuring system, angular displacement input, displacement of the lines output optical grating measuring system; The input of straight line micrometric displacement, output optical grating measuring system, alignment error detection system and measurement driving control system;
It is characterized in that three groups of precision line slideway mechanisms that are parallel to each other are housed, and said angular displacement input, displacement of the lines output optical grating measuring system are installed in the first line slideway mechanism on above-mentioned surveying work stylobate platform table top; Said angular displacement input, output optical grating measuring system are installed in the second line slideway mechanism; Said straight line micrometric displacement input, output optical grating measuring system and alignment error detection system are installed in the 3rd line slideway mechanism; Said measurement driving control system is electrically connected with angular displacement input, displacement of the lines output optical grating measuring system and angular displacement input, output optical grating measuring system respectively.
2. precision drive chain photoelectric measurement machine according to claim 1; It is characterized in that; Also include Measurement and Data Processing and management system: accept the measurement data of above-mentioned precision drive chain photoelectric measurement machine, and this measurement data is gathered, handles, shows, analyzed and stores.
3. precision drive chain photoelectric measurement machine according to claim 1 and 2; It is characterized in that; Said surveying work platform comprises base station, four lifting jack, the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanisms; Above-mentioned four lifting jack are installed in respectively on the groove everywhere of base station bottom, and what the first line slideway mechanism, the second line slideway mechanism and the 3rd line slideway mechanism were parallel to each other is installed on the base station.
4. precision drive chain photoelectric measurement machine according to claim 1 and 2; It is characterized in that said angular displacement input, output optical grating measuring system comprise second optical electric axial angle encoder, speed reduction unit, rare-earth electric motor, 3 fixed mounts and the 3rd optical electric axial angle encoder; First fixed mount is installed on first slide block plane in the second line slideway mechanism by rigidity, and said servomotor seat is packed on first fixed mount, and said rare-earth electric motor is packed on the servomotor seat; Second fixed mount and the 3rd fixed mount are packed in respectively in the second line slideway mechanism, and said speed reduction unit seat then is fastened on second fixed mount by rigidity, and said harmonic speed reducer is packed on the speed reduction unit seat; Said second optical electric axial angle encoder is packed on the 3rd fixed mount through ring flange; It is equal that said rare-earth electric motor has the two ends axle journal, and wherein an end is connected through elastic coupling on the projecting shaft of the 3rd optical electric axial angle encoder, and the other end links to each other with the input end of harmonic speed reducer through elastic coupling; The projecting shaft of said second optical electric axial angle encoder is connected with the output terminal of harmonic speed reducer through elastic coupling.
5. precision drive chain photoelectric measurement machine according to claim 1 and 2; It is characterized in that said angular displacement input, displacement of the lines output optical grating measuring system comprise ball-screw, first optical electric axial angle encoder, servomotor, grating chi, ball cover, silk connecting plate, read connecting plate, three lifting pieces, reason Shitai County and backing plates; The two ends of said ball-screw are contained in respectively in two bearing seats, and said two bearing seats install respectively on resonable Shitai County face, and reason Shitai County is placed on the base station face, and two backing plates of the level of adjustment reason Shitai County and base station are installed between reason Shitai County and the base station; Said servomotor is packed on the motor cabinet, and motor cabinet installs in resonable Shitai County, and the projecting shaft of servomotor links to each other with an end of ball-screw through shaft coupling; The other end of said ball-screw is connected with the projecting shaft of first optical electric axial angle encoder through shaft coupling, and said first optical electric axial angle encoder is packed on the coupling band, and coupling band is packed on the bearing seat; Said three lifting pieces install on resonable Shitai County face, and the grating chi is installed in the position that parallels with ball-screw through the lifting piece by rigidity; Be equipped with on the slippery fellow in the said first line slideway mechanism by the silk connecting plate with read the coupling assembling that connecting plate is formed, said ball cover and this coupling assembling are rigidly connected, the other end and the grating ruler reading head of this coupling assembling are rigidly connected.
6. precision drive chain photoelectric measurement machine according to claim 1 and 2 is characterized in that, said alignment error detection system comprises slide block, super large range photoelectricity length gauge, digital display meter assembly, dial framework, bracing frame, column and check lock lever; Said slide block is installed in the 3rd line slideway mechanism; Said base is packed on the slide block; Said column is rotated in the screw of base, and support frame as described above is fastened on the column through check lock lever, and said super large range photoelectricity length gauge is installed on the bracing frame through check lock lever.
7. precision drive chain photoelectric measurement machine according to claim 1 and 2 is characterized in that, said straight line micrometric displacement input, output optical grating measuring system comprise subtask platform, photoelectricity length gauge, clamping seats and linear stepping motor; Said subtask platform is installed on the slide unit in the 3rd line slideway mechanism; Said clamping seats is packed on the subtask platform; Said photoelectricity length gauge is installed on the subtask platform through the clamping seats level; Said linear stepping motor is packed on the subtask platform, and its output terminal withstands on the measuring staff head of photoelectricity length gauge.
CN 201110307173 2011-10-11 2011-10-11 Photoelectric measuring machine for precision transmission chain CN102353539B (en)

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CN107991901A (en) * 2017-12-04 2018-05-04 中国科学院国家天文台南京天文光学技术研究所 Voice coil motor displacement actuator emulation platform and its method of work
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CN103699052A (en) * 2012-09-28 2014-04-02 北京航天计量测试技术研究所 Precision positioning device for eliminating back lash error through error correction closed loop
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