CN101655356B - Graduation device for detecting surface shape of aspheric optical element - Google Patents

Graduation device for detecting surface shape of aspheric optical element Download PDF

Info

Publication number
CN101655356B
CN101655356B CN2009101125056A CN200910112505A CN101655356B CN 101655356 B CN101655356 B CN 101655356B CN 2009101125056 A CN2009101125056 A CN 2009101125056A CN 200910112505 A CN200910112505 A CN 200910112505A CN 101655356 B CN101655356 B CN 101655356B
Authority
CN
China
Prior art keywords
main shaft
angular encoder
optical element
surface shape
dividing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009101125056A
Other languages
Chinese (zh)
Other versions
CN101655356A (en
Inventor
郭隐彪
朱永炉
陈露霜
柯晓龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen University
Original Assignee
Xiamen University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen University filed Critical Xiamen University
Priority to CN2009101125056A priority Critical patent/CN101655356B/en
Publication of CN101655356A publication Critical patent/CN101655356A/en
Application granted granted Critical
Publication of CN101655356B publication Critical patent/CN101655356B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Transform (AREA)

Abstract

The invention relates to a graduation device for detecting the surface shape of an aspheric optical element, in particular to a graduation device for accurately controlling the displacement of a rotation angle. The invention provides a graduation device for accurately controlling the displacement of a rotation angle, which can feed back and compensate movement quantity and accurately control angular displacement in real time. The graduation device comprises a control system and a graduation device, wherein the control system is provided with an industrial personnel computer, an interface circuit board, a servo amplifier, a servo motor, an angular coder and a numeral display meter of the coder; and the graduation device is provided with a base, an upper bearing base, a main shaft, a motor base, a deep groove ball bearing, a main shaft synchronous pulley, a motor synchronous pulley, a synchronous belt, a rotary disk and a clamp.

Description

Be used for the dividing apparatus that aspheric optical element surface shape detects
Technical field
The present invention relates to the dividing apparatus of a kind of accurate control rotation angle displacement, especially relate to a kind of dividing apparatus that aspheric optical element surface shape detects that is used for.
Background technology
The development accurate and ultraprecise is processed has directly influenced the development of sophisticated technology and national defense industry.A large amount of man power and materials have been dropped in countries in the world, to accurate and nanotechnolgy develop research (referring to document: Yuan Guo person of outstanding talent. domestic and international precision processing technology latest developments; Tool technique, 2008,42 (10): 5-13).In recent years, develop machine tools such as a lot of precisions and ultra-precise cutting, grinding, polishing both at home and abroad, developed new precision processing technology and Technology of Precision Measurement.Multivariant Precision Machining of multiaxis and checkout equipment also arise at the historic moment, and in accurate and ultraprecise processing and checkout equipment, the precision of revolving shaft is also along with the requirement of manufacturing accuracy is constantly improving.Traditional numerical control rotary mechanism generally adopts the cambered surface cam mechanism of worm-and-wheel gear or line engagement as drive unit, lacks feedback compensation, and bearing accuracy more and more can not satisfy requirement accurate and ultraprecise processing.
Along with development accurate and ultraprecise processing and detection technique, the grating chi has obtained in fields such as exact instrument, measurement of coordinates, precision positioning and high precision Precision Machining using widely as a kind of instrument of precision measurement.The grating chi is meant the grating sensor of light source, two blocks of gratings (indication grating and scale grating) and photoelectricity testing part etc. being combined formation.The grating chi can be divided into direct light grid and circle grating.The grating chi has high sensitivity, high resolving power, anticorrosive, anti-electromagnetic interference (EMI), good stability and reliability advantages of higher, and its widespread use has improved control, bearing accuracy greatly.
Shaanxi Tech Univ provides a kind of horizontal thin type numeral control panoramic table for point gearing cambered surface cam mechanism in the application for a patent for invention of publication number for CN 1907645A, the transposition axle that comprises base and have bearing, the transposition axle is arranged on the base by bearing, on base, also be provided with the index plate that is connected with the transposition axle, the arranged outside of index plate has ball awl roller, and this ball awl roller globoid cam interior with being arranged on base is meshed.Controllable spot engagement contact is adopted in this invention, and the wide face of ball awl roller and globoid cam exterior feature face can improve the adaptive faculty of mechanism to position sum of errors shape error when no sideshake transmission.Point toothing ball awl roller cambered surface cam mechanism is realized at a high speed and high-precision requirement easily, long service life, bearing accuracy height, manufacturing process is simple, and require relatively low to processing and assembly precision, transposition accurately, is not subjected to the restriction of roller quantity, but pretension is eliminated the gap conveniently, the load-bearing capacity height, temperature rise is low.
Summary of the invention
The objective of the invention is at existing numerical control turntable control accuracy, bearing accuracy not high, lack information feedback, problems such as error free compensation, provide a kind of and can feed back in real time, the compensating motion amount, realize the dividing apparatus that aspheric optical element surface shape detects that is used for of accurate pilot angle displacement.
Technical scheme of the present invention is servomotor and angular encoder to be united apply to dividing apparatus, by the driven by servomotor angular encoder, by angular encoder gather in real time, feedback, offset angle displacement.
The present invention includes control system and dividing apparatus two parts.
Control system is provided with industrial computer, interface card, servoamplifier, servomotor, angular encoder and scrambler digital display meter, the motion controller of industrial computer is installed in the PCI slot of IPC and through interface card and links to each other with the input end of servoamplifier, the output servo motor termination of servoamplifier, the angular encoder that is used to produce the angular misalignment signal by driven by servomotor, the data output end of angular encoder links to each other with scrambler digital display meter input end, scrambler digital display meter output terminal inserts the RS-232-C interface of industrial computer, and The whole control system has formed a closed loop feedback system.
Dividing apparatus is provided with base, top chock, main shaft, motor cabinet, deep groove ball bearing, main shaft synchronous pulley, motor synchronous belt wheel, synchronous band, rotating disc and anchor clamps, the angular encoder of control system is contained on the base, after main shaft was fixed on the tubular shaft of angular encoder, main shaft inserted the deep groove ball bearing endoporus; Deep groove ball bearing connects at top chock, again top chock and base are dressed up one, servomotor is contained on the motor cabinet, the motor synchronous belt wheel is contained in the rotating shaft of servomotor, the motor synchronous belt wheel passes through to be with synchronously the main shaft synchronous pulley with on the main shaft to link to each other, and the drive motion of main shaft, the circle grating relatively rotates in the realization angular encoder.Rotating disc is installed on the main shaft, by the main shaft driven rotary, the anchor clamps of the workpiece that is used for fixing to be processed and detection is housed on the rotating disc.
The measuring basis of described angular encoder is a circle grating chi, adopts the optoelectronic scanning principle.Optoelectronic scanning to the grating chi is noncontact, does not have friction.The angle output area of set angle scrambler is 0 °~360 °, and bearing accuracy can reach a second arc level.Angular encoder has built-in bearing, and the precision of system is ± 1 ".During measurement, main shaft can directly link to each other with the axle of angular encoder.The direct input coding device of value of angular displacement digital display meter directly shows on the scrambler digital display meter, and the input industrial computer.The resolution of scrambler digital display meter can reach 0.0001 °.
Described main shaft is fixed on the tubular shaft of angular encoder, preferably main shaft by screw retention on the tubular shaft of angular encoder.
During control, the user imports information such as controlled variable and target location by the interface to industrial computer, write instruction repertorie, send gating pulse to servomotor and drive the servomotor motion, the tubular shaft that drives main shaft and angular encoder moves together, and angular encoder produces angular displacement signal, outputs to the scrambler digital display meter, angular displacement signal is fed to industrial computer when the scrambler digital display meter shows.Actual displacement angle and target angle displacement are carried out constantly comparing and compensation, up to reaching setting accuracy.
The type of drive of angular encoder is a driven by servomotor belt wheel frame mode, and belt wheel is the synchronous pulley structure.
Rotating disc adopts the granite material, has that distortion is little, a good stability, big, the hardness advantages of higher of intensity, can keep high precision under heavy load and general temperature.
Described anchor clamps are established two, are used for fixing workpiece to be processed and that detect, and the retained part of monolithic anchor clamps has 120 ° of angles, and the spacing of two anchor clamps is adjustable.Anchor clamps can the clamping different shape, workpieces with different sizes.
The present invention carries out the measurement of angular displacement by the circle grating, the precision height, and structure is less, is applicable to the processing and the detection of miniature workpiece; Total and control system are simple and convenient, and be relatively independent, can use with other coordinative composition of equipments, is widely used, and has very high feasibility.
Description of drawings
Fig. 1 is the structure composition frame chart of the control system of the embodiment of the invention.
Fig. 2 is that the structure of the dividing apparatus of the embodiment of the invention is formed synoptic diagram.
Fig. 3 is the structure vertical view of the embodiment of the invention.
Embodiment
The invention will be further described by the following examples and in conjunction with the accompanying drawings.
Embodiments of the invention comprise control system and dividing apparatus two parts substantially.
Referring to Fig. 1, control system is provided with industrial computer A 1, interface card A2, servoamplifier A3, servomotor A4, angular encoder A5 and scrambler digital display meter A6.The motion controller of industrial computer A 1 is installed in the PCI slot of IPC, link to each other with the input end of servoamplifier A3 through interface card A2, the output servo motor termination A4 of servoamplifier A3, drive angular encoder A5 by servomotor A4, the data output end of angular encoder A5 links to each other with scrambler digital display meter A6 input end, and scrambler digital display meter A6 output terminal inserts the RS-232-C interface of industrial computer A 1.The whole control system has formed a closed loop feedback system.
Referring to Fig. 2 and 3, dividing apparatus is provided with base 1, top chock 2, main shaft 3, deep groove ball bearing 4, main shaft synchronous pulley 5, motor cabinet 6, motor synchronous belt wheel 7, is with 8 synchronously, rotating disc 9 and anchor clamps 10.Angular encoder A5 is contained on the base 1; main shaft 3 by screw retention after on the tubular shaft of angular encoder A5; main shaft inserts the endoporus of deep groove ball bearing 4; in addition; deep groove ball bearing 4 is engaged in top chock 2; again top chock 2 and base 1 are dressed up one, angular encoder A5 is contained within the inner protection that forms, in order to avoid it is damaged.The drive connection of servomotor A4 and main shaft 3 is as follows: servomotor A4 is contained on the motor cabinet 6, motor synchronous belt wheel 7 is housed in the rotating shaft of servomotor A4, motor synchronous belt wheel 7 is by linking to each other with main shaft synchronous pulley 5 on the main shaft 3 with 8 synchronously, and driving main shaft 3 motions, the circle grating relatively rotates among the realization angular encoder A5.Rotating disc 9 is installed on the main shaft 3, by main shaft 3 driven rotary, two anchor clamps 0 is housed on the rotating disc 9 is used for fixing workpiece.
During control, the user imports information such as controlled variable and target angle displacement by the interface to industrial computer A 1, write instruction repertorie, send gating pulse to servomotor A4 and drive servomotor A4 motion, the tubular shaft that drives main shaft 3 and angular encoder A5 moves together, and angular encoder A5 produces angular displacement signal, outputs to scrambler digital display meter A6, angular displacement is fed to industrial computer A 1 when scrambler digital display meter A6 shows.Actual displacement angle and target angle displacement are constantly compared, up to reaching setting accuracy.
In the present embodiment, adopt circle grating chi in the angular encoder, the groove number is 36000, and the precision of system is ± 1 ".Angular encoder has built-in bearing, built-in stator shaft coupling and tubular shaft.The angle output area of set angle scrambler is 0 °~360 °, and bearing accuracy can reach a second arc level.During measurement, main shaft can directly link to each other with the axle of angular encoder.The direct input coding device of value of angular displacement digital display meter directly shows on the scrambler digital display meter, and the input industrial computer.The resolution of scrambler digital display meter can reach 0.0001 °.Angular encoder can adopt the Heidenhain scrambler.
The type of drive of angular encoder is a driven by servomotor belt wheel frame mode, and belt wheel is a T type tooth synchronous pulley structure.
In the embodiment of the invention, the servomotor that servomotor adopts FUJI ELECTRIC company limited to produce.

Claims (5)

1. be used for the dividing apparatus that aspheric optical element surface shape detects, it is characterized in that comprising control system and dividing apparatus two parts;
Control system is provided with industrial computer, interface card, servoamplifier, servomotor, angular encoder and scrambler digital display meter, the motion controller of industrial computer is installed in the PCI slot of IPC and through interface card and links to each other with the input end of servoamplifier, the output servo motor termination of servoamplifier, the angular encoder that is used to produce the angular misalignment signal by driven by servomotor, the data output end of angular encoder links to each other with scrambler digital display meter input end, and scrambler digital display meter output terminal inserts the RS-232-C interface of industrial computer;
Dividing apparatus is provided with base, top chock, main shaft, motor cabinet, deep groove ball bearing, main shaft synchronous pulley, motor synchronous belt wheel, synchronous band, rotating disc and two anchor clamps, the angular encoder of control system is contained on the base, after main shaft was fixed on the tubular shaft of angular encoder, main shaft inserted the deep groove ball bearing endoporus; Deep groove ball bearing connects at top chock, again top chock and base are dressed up one, servomotor is contained on the motor cabinet, the motor synchronous belt wheel is contained in the rotating shaft of servomotor, the motor synchronous belt wheel passes through to be with synchronously the main shaft synchronous pulley with on the main shaft to link to each other, and drives motion of main shaft, and rotating disc is installed on the main shaft, by the main shaft driven rotary, two anchor clamps are contained on the rotating disc;
Described angular encoder is circle grating chi angular encoder.
2. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1, the angle output area that it is characterized in that described angular encoder is 0 °~360 °.
3. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1 or 2 is characterized in that described angular encoder has built-in bearing.
4. as claimed in claim 1ly be used for the dividing apparatus that aspheric optical element surface shape detects, it is characterized in that described main shaft by screw retention on the tubular shaft of angular encoder.
5. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1 is characterized in that the retained part of the monolithic anchor clamps in described two anchor clamps has 120 ° of angles.
CN2009101125056A 2009-09-08 2009-09-08 Graduation device for detecting surface shape of aspheric optical element Expired - Fee Related CN101655356B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009101125056A CN101655356B (en) 2009-09-08 2009-09-08 Graduation device for detecting surface shape of aspheric optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009101125056A CN101655356B (en) 2009-09-08 2009-09-08 Graduation device for detecting surface shape of aspheric optical element

Publications (2)

Publication Number Publication Date
CN101655356A CN101655356A (en) 2010-02-24
CN101655356B true CN101655356B (en) 2010-12-01

Family

ID=41709738

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101125056A Expired - Fee Related CN101655356B (en) 2009-09-08 2009-09-08 Graduation device for detecting surface shape of aspheric optical element

Country Status (1)

Country Link
CN (1) CN101655356B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103940342B (en) * 2014-03-28 2017-02-22 北京工业大学 Double-rolling type arc-surface cam machining precision detecting device
CN107883912B (en) * 2017-11-13 2019-09-10 西安工业大学 A kind of heavy caliber axisymmetric aspheric surface test method and device
CN108303281A (en) * 2018-04-16 2018-07-20 吉林大学 Attaching/detaching apparatus applied to three combined test chambers
CN111536899B (en) * 2020-04-30 2021-06-18 南京理工大学 Device and method for detecting spatial composite convex profile precision of automatic tool changer
CN112171607A (en) * 2020-09-29 2021-01-05 无锡华光环保能源集团股份有限公司 Rotation control method for large-sized barrel part
CN117798815B (en) * 2024-03-01 2024-05-14 江苏京创先进电子科技有限公司 Indexing table rotation control method, indexing table rotation control system and thinning machine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1974132A (en) * 2006-12-11 2007-06-06 厦门大学 Multifunctional numerically controlled grinding wheel trimmer
CN101074868A (en) * 2007-06-18 2007-11-21 厦门大学 Method and apparatus for inspection automatically focusing non-spherical surface
CN101236070A (en) * 2008-03-04 2008-08-06 中原工学院 Cylinder diameter and form and position error integrated measuring apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1974132A (en) * 2006-12-11 2007-06-06 厦门大学 Multifunctional numerically controlled grinding wheel trimmer
CN101074868A (en) * 2007-06-18 2007-11-21 厦门大学 Method and apparatus for inspection automatically focusing non-spherical surface
CN101236070A (en) * 2008-03-04 2008-08-06 中原工学院 Cylinder diameter and form and position error integrated measuring apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
郭隐彪等.光学非球面检测平台伺服控制系统研究.《中国机械工程》.2007,第18卷(第14期),1639-1643. *

Also Published As

Publication number Publication date
CN101655356A (en) 2010-02-24

Similar Documents

Publication Publication Date Title
CN101655356B (en) Graduation device for detecting surface shape of aspheric optical element
US9488476B2 (en) Apparatus and method to compensate bearing runout in an articulated arm coordinate measurement machine
US10563969B2 (en) Apparatus and method to compensate bearing runout in an articulated arm coordinate measurement machine
CN106352813A (en) Sensing-technology-based shaft workpiece measurement device and measurement method thereof
CN202240703U (en) Automatic rapid tool-setting gauge for machining centers
CN105387817A (en) Device for rapidly detecting size parameters of cylinder type excircle shape
CN201434668Y (en) Raster ball screw stroke dynamic detector
CN103822605B (en) Splicing measuring device of optical elements of large caliber profile
CN104776798A (en) Measurement device and measurement method of boundary dimension and geometric tolerance of cylindrical workpiece
CN106736849B (en) Micro-diameter milling tool active probe formula high-precision tool setting device and method
CN205192431U (en) Case valve barrel parameter automatic checkout device
CN106352842A (en) Device for measuring flatness and parallelism of disc parts
CN103940342A (en) Double-rolling type arc-surface cam machining precision detecting device
CN107150261B (en) Axial workpiece profile measurer and its application
CN103175568A (en) Testing device for high-speed encoder
CN104964626A (en) CCD vision-based grating type three-class metal linear scale standard measuring device
CN102353539B (en) Photoelectric measuring machine for precision transmission chain
CN107526372B (en) Five controlling means and curved surface or cambered surface glass panels's check out test set
CN103389049A (en) Method for adjusting and detecting machine tool cradle-type composite rotary table axis space vertical intersection
CN203076717U (en) Large gear machining machinery
CN109724636A (en) One-dimensional turntable
CN103115588A (en) Precision detection test bench for arc-face cam indexing mechanism capable of changing center distance
CN207423137U (en) A kind of cam measuring device
CN109540009A (en) A kind of external diameter measuring device and outside diameter measuring method
CN214843077U (en) Line gear machining precision detection table

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101201

Termination date: 20130908