CN101655356A - Graduation device for detecting surface shape of aspheric optical element - Google Patents

Graduation device for detecting surface shape of aspheric optical element Download PDF

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CN101655356A
CN101655356A CN200910112505A CN200910112505A CN101655356A CN 101655356 A CN101655356 A CN 101655356A CN 200910112505 A CN200910112505 A CN 200910112505A CN 200910112505 A CN200910112505 A CN 200910112505A CN 101655356 A CN101655356 A CN 101655356A
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main shaft
surface shape
optical element
encoder
aspheric optical
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CN101655356B (en
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郭隐彪
朱永炉
陈露霜
柯晓龙
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Xiamen University
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Abstract

用于非球面光学元件面形检测的分度装置,涉及一种精确控制旋转角位移的分度装置。提供一种可以实时反馈、补偿运动量,实现精确控制角位移的用于非球面光学元件面形检测的分度装置。包括控制系统和分度装置两部分,控制系统设有工控机、接口电路板、伺服放大器、伺服电机、角度编码器和编码器数显表。分度装置设有底座、上轴承座、主轴、电机座、深沟球轴承、主轴同步带轮、电机同步带轮、同步带、旋转盘和夹具。

An indexing device for detecting the surface shape of an aspheric optical element relates to an indexing device for precisely controlling the rotation angle displacement. An indexing device for detecting the surface shape of an aspheric optical element that can provide real-time feedback, compensate for the amount of movement, and realize precise control of angular displacement is provided. Including control system and indexing device, the control system is equipped with industrial computer, interface circuit board, servo amplifier, servo motor, angle encoder and encoder digital display table. The indexing device is provided with a base, an upper bearing seat, a main shaft, a motor seat, a deep groove ball bearing, a main shaft synchronous belt pulley, a motor synchronous belt pulley, a synchronous belt, a rotating disk and a fixture.

Description

用于非球面光学元件面形检测的分度装置 Indexing device for surface shape detection of aspheric optical elements

技术领域 technical field

本发明涉及一种精确控制旋转角位移的分度装置,尤其是涉及一种用于非球面光学元件面形检测的分度装置。The invention relates to an indexing device for precisely controlling the rotation angle displacement, in particular to an indexing device for detecting the surface shape of an aspheric optical element.

背景技术 Background technique

精密和超精密加工的发展,直接影响了尖端技术和国防工业的发展。世界各国投入了大量人力和物力,对精密和超精密技术进行开发研究(参见文献:袁国俊.国内外精密加工技术最新进展;工具技术,2008,42(10):5-13)。近几年中,国内外发展了很多精密和超精密车削、磨削、抛光等机床设备,发展了新的精密加工技术和精密测量技术。多轴多自由度的精密加工和检测设备也应运而生,而在精密和超精密加工与检测设备中,回转轴的精度也随着制造精度的要求在不断地提高。传统的数控回转机构一般采用蜗轮蜗杆机构或线啮合的弧面凸轮机构作为驱动装置,缺少反馈补偿,定位精度越来越不能满足精密和超精密加工的要求。The development of precision and ultra-precision machining has directly affected the development of cutting-edge technology and the defense industry. Countries around the world have invested a lot of manpower and material resources in the development and research of precision and ultra-precision technology (see literature: Yuan Guojun. The latest progress in precision machining technology at home and abroad; Tool Technology, 2008, 42(10): 5-13). In recent years, many precision and ultra-precision turning, grinding, polishing and other machine tool equipment have been developed at home and abroad, and new precision machining technology and precision measurement technology have been developed. Multi-axis and multi-degree-of-freedom precision machining and testing equipment have also emerged as the times require, and in precision and ultra-precision machining and testing equipment, the accuracy of the rotary axis is also continuously improving with the requirements of manufacturing accuracy. The traditional CNC rotary mechanism generally uses a worm gear mechanism or an arc-shaped cam mechanism with wire meshing as the driving device, lacking feedback compensation, and the positioning accuracy is increasingly unable to meet the requirements of precision and ultra-precision machining.

随着精密和超精密加工与检测技术的发展,光栅尺作为精密测量的一种工具,已在精密仪器、坐标测量、精密定位和高精度精密加工等领域得到了广泛的应用。光栅尺是指将光源、两块光栅(指示光栅和标尺光栅)和光电检测器件等组合在一起构成的光栅传感器。光栅尺可分为直光栅和圆光栅。光栅尺具有高灵敏度、高分辨率、抗腐蚀、抗电磁干扰、稳定性好和可靠性高等优点,它的广泛应用大大提高了控制、定位精度。With the development of precision and ultra-precision machining and testing technology, grating scales, as a tool for precision measurement, have been widely used in the fields of precision instruments, coordinate measurement, precision positioning and high-precision precision machining. The grating ruler refers to a grating sensor composed of a light source, two gratings (indicating grating and scale grating) and photoelectric detection devices. The grating ruler can be divided into straight grating and circular grating. The grating ruler has the advantages of high sensitivity, high resolution, corrosion resistance, anti-electromagnetic interference, good stability and high reliability. Its wide application greatly improves the control and positioning accuracy.

陕西科技大学在公开号为CN 1907645A的发明专利申请中提供了一种卧式薄型点啮合弧面凸轮机构数控回转台,包括底座以及带有轴承的转位轴,转位轴通过轴承设置在底座上,在底座上还设置有与转位轴相连接的转位盘,转位盘的外侧设置有球锥滚子,该球锥滚子与设置在底座内的弧面凸轮相啮合。该发明采用可控点啮合接触,球锥滚子廓面与弧面凸轮廓面在无侧隙传动时,可以提高机构对位置误差和形状误差的适应能力。点啮合球锥滚子弧面凸轮机构容易实现高速和高精度要求,使用寿命长、定位精度高,制造工艺简单,并且对加工和装配精度要求相对较低,转位精确、不受滚子数量的限制,可预紧,消除间隙方便,承载能力高,温升低。Shaanxi University of Science and Technology has provided a horizontal thin-type point-engagement cam mechanism CNC rotary table with the publication number CN 1907645A, including a base and an indexing shaft with bearings. The indexing shaft is set on the base through the bearings. On the base, an index plate connected to the index shaft is also provided, and a spherical tapered roller is arranged on the outside of the index plate, and the spherical tapered roller is engaged with the arc cam arranged in the base. The invention adopts controllable point meshing contact, and when the profile surface of the spherical cone roller and the cam profile surface of the arc surface are driven without backlash, the adaptability of the mechanism to position error and shape error can be improved. The point-meshing spherical tapered roller cam mechanism is easy to achieve high-speed and high-precision requirements, has a long service life, high positioning accuracy, simple manufacturing process, and relatively low requirements for processing and assembly accuracy, accurate indexing, and is not affected by the number of rollers. It can be pre-tightened, convenient to eliminate gaps, high load-bearing capacity, and low temperature rise.

发明内容Contents of the invention

本发明的目的在于针对现有的数控回转台控制精度、定位精度不高,缺少信息反馈,无误差补偿等问题,提供一种可以实时反馈、补偿运动量,实现精确控制角位移的用于非球面光学元件面形检测的分度装置。The purpose of the present invention is to provide an aspheric surface that can provide real-time feedback, compensation of motion, and precise control of angular displacement in view of the problems of the existing CNC rotary table, such as low control accuracy, low positioning accuracy, lack of information feedback, and no error compensation. Indexing device for surface shape detection of optical components.

本发明的技术方案是将伺服电机和角度编码器联合运用于分度装置,通过伺服电机驱动角度编码器,由角度编码器实时采集、反馈、补偿角位移。The technical solution of the present invention is to combine the servo motor and the angle encoder into the indexing device, drive the angle encoder through the servo motor, and collect, feed back and compensate the angular displacement in real time by the angle encoder.

本发明包括控制系统和分度装置两部分。The invention includes two parts, a control system and an indexing device.

控制系统设有工控机、接口电路板、伺服放大器、伺服电机、角度编码器和编码器数显表,工控机的运动控制器安装于IPC的PCI插槽中并经接口电路板与伺服放大器的输入端相连,伺服放大器的输出端接伺服电机,由伺服电机驱动用于产生角度移信号的角度编码器,角度编码器的数据输出端与编码器数显表输入端相连,编码器数显表输出端接入工控机的RS-232-C接口,整个控制系统形成了一个闭环反馈系统。The control system is equipped with industrial computer, interface circuit board, servo amplifier, servo motor, angle encoder and encoder digital display table. The motion controller of the industrial computer is installed in the PCI slot of the IPC and connected to the servo amplifier through the interface circuit board. The input end is connected, the output end of the servo amplifier is connected to the servo motor, and the angle encoder used to generate the angle shift signal is driven by the servo motor. The data output end of the angle encoder is connected to the input end of the encoder digital display meter, and the encoder digital display meter The output end is connected to the RS-232-C interface of the industrial computer, and the entire control system forms a closed-loop feedback system.

分度装置设有底座、上轴承座、主轴、电机座、深沟球轴承、主轴同步带轮、电机同步带轮、同步带、旋转盘和夹具,控制系统的角度编码器装在底座上,主轴固定在角度编码器的空心轴上后,主轴插入深沟球轴承内孔;深沟球轴承配接在上轴承座,再将上轴承座与底座装成一体,伺服电机装在电机座上,电机同步带轮装在伺服电机的转轴上,电机同步带轮通过同步带与主轴上的主轴同步带轮相连,并带动主轴运动,实现角度编码器中圆光栅的相对转动。旋转盘安装在主轴上,由主轴带动旋转,旋转盘上装有用于固定待加工和检测的工件的夹具。The indexing device is equipped with a base, an upper bearing seat, a main shaft, a motor base, a deep groove ball bearing, a main shaft synchronous pulley, a motor synchronous pulley, a synchronous belt, a rotating disc and a fixture, and the angle encoder of the control system is installed on the base. After the main shaft is fixed on the hollow shaft of the angle encoder, the main shaft is inserted into the inner hole of the deep groove ball bearing; the deep groove ball bearing is connected to the upper bearing seat, and then the upper bearing seat is integrated with the base, and the servo motor is installed on the motor seat , The motor synchronous pulley is installed on the shaft of the servo motor, the motor synchronous pulley is connected with the main shaft synchronous pulley on the main shaft through the synchronous belt, and drives the main shaft to move, so as to realize the relative rotation of the circular grating in the angle encoder. The rotating disk is installed on the main shaft and is driven to rotate by the main shaft. The rotating disk is equipped with a fixture for fixing the workpiece to be processed and tested.

所述角度编码器的测量基准是圆光栅尺,采用光电扫描原理。对光栅尺的光电扫描是非接触的,无摩擦。设定角度编码器的角度输出范围为0°~360°,定位精度可以达到秒弧级。角度编码器带有内置轴承,系统的精度为±1”。测量时,主轴可直接与角度编码器的轴相连。角位移值直接输入编码器数显表,在编码器数显表上直接显示,并输入工控机。编码器数显表的分辨率可以达到0.0001°。The measurement reference of the angle encoder is a circular grating ruler, which adopts the principle of photoelectric scanning. The photoelectric scanning of the grating scale is non-contact and frictionless. Set the angle output range of the angle encoder to 0°~360°, and the positioning accuracy can reach arc-second level. The angle encoder has built-in bearings, and the accuracy of the system is ±1". When measuring, the main shaft can be directly connected to the shaft of the angle encoder. The angular displacement value is directly input into the encoder digital display table, and directly displayed on the encoder digital display table , and input the industrial computer. The resolution of the encoder digital display can reach 0.0001°.

所述主轴固定在角度编码器的空心轴上,最好是主轴通过螺钉固定在角度编码器的空心轴上。The main shaft is fixed on the hollow shaft of the angle encoder, preferably the main shaft is fixed on the hollow shaft of the angle encoder by screws.

控制时,用户通过界面向工控机输入控制参数和目标位置等信息,编写指令程序,向伺服电机发出控制脉冲驱动伺服电机运动,带动主轴和角度编码器的空心轴一起运动,角度编码器产生角位移信号,输出到编码器数显表,角位移信号在编码器数显表显示的同时,被输送给工控机。实际角位移与目标角位移进行不断比较和补偿,直到达到设定精度。When controlling, the user inputs information such as control parameters and target positions to the industrial computer through the interface, writes the command program, sends control pulses to the servo motor to drive the servo motor to move, drives the main shaft and the hollow shaft of the angle encoder to move together, and the angle encoder generates an angle. The displacement signal is output to the digital display meter of the encoder, and the angular displacement signal is sent to the industrial computer while being displayed on the digital display meter of the encoder. The actual angular displacement is constantly compared and compensated with the target angular displacement until the set accuracy is reached.

角度编码器的驱动方式为伺服电机驱动带轮结构方式,带轮为同步带轮结构。The drive mode of the angle encoder is a servo motor driven pulley structure, and the pulley is a synchronous pulley structure.

旋转盘采用花岗石材料,具有变形小、稳定性好、强度大、硬度高等优点,能在重负荷及一般温度下保持高精度。The rotating disc is made of granite, which has the advantages of small deformation, good stability, high strength and high hardness, and can maintain high precision under heavy load and normal temperature.

所述夹具设两块,用于固定待加工和检测的工件,单块夹具的夹持部分具有120°夹角,两块夹具的间距可调。夹具能够夹持各种形状、大小不同的工件。There are two fixtures, which are used to fix the workpiece to be processed and tested. The clamping part of the single fixture has an included angle of 120°, and the distance between the two fixtures is adjustable. Fixtures can hold workpieces of various shapes and sizes.

本发明通过圆光栅进行角位移的测量,精度高,结构较小,适用于小型工件的加工与检测;整个结构和控制系统简单便捷,相对独立,可与其他的设备配套使用,应用广泛,具有很高的可行性。The invention measures the angular displacement through the circular grating, has high precision and small structure, and is suitable for the processing and detection of small workpieces; the whole structure and control system are simple, convenient, relatively independent, and can be used in conjunction with other equipment. It is widely used and has the advantages of High feasibility.

附图说明 Description of drawings

图1为本发明实施例的控制系统的结构组成框图。FIG. 1 is a block diagram of the structure and composition of the control system of the embodiment of the present invention.

图2为本发明实施例的分度装置的结构组成示意图。Fig. 2 is a schematic diagram of the structure and composition of the indexing device according to the embodiment of the present invention.

图3为本发明实施例的结构俯视图。Fig. 3 is a top view of the structure of the embodiment of the present invention.

具体实施方式 Detailed ways

以下通过实施例并结合附图对本发明作进一步说明。The present invention will be further described below by means of embodiments in conjunction with the accompanying drawings.

本发明的实施例基本包括控制系统和分度装置两部分。The embodiments of the present invention basically include two parts: a control system and an indexing device.

参见图1,控制系统设有工控机A1、接口电路板A2、伺服放大器A3、伺服电机A4、角度编码器A5和编码器数显表A6。工控机A1的运动控制器安装于IPC的PCI插槽中,经接口电路板A2与伺服放大器A3的输入端相连,伺服放大器A3的输出端接伺服电机A4,由伺服电机A4驱动角度编码器A5,角度编码器A5的数据输出端与编码器数显表A6输入端相连,编码器数显表A6输出端接入工控机A1的RS-232-C接口。整个控制系统形成了一个闭环反馈系统。Referring to Fig. 1, the control system is provided with an industrial computer A1, an interface circuit board A2, a servo amplifier A3, a servo motor A4, an angle encoder A5 and an encoder digital display meter A6. The motion controller of the industrial computer A1 is installed in the PCI slot of the IPC, connected to the input terminal of the servo amplifier A3 through the interface circuit board A2, the output terminal of the servo amplifier A3 is connected to the servo motor A4, and the angle encoder A5 is driven by the servo motor A4 , the data output end of the angle encoder A5 is connected to the input end of the encoder digital display meter A6, and the output end of the encoder digital display meter A6 is connected to the RS-232-C interface of the industrial computer A1. The whole control system forms a closed-loop feedback system.

参见图2和3,分度装置设有底座1、上轴承座2、主轴3、深沟球轴承4、主轴同步带轮5、电机座6、电机同步带轮7、同步带8、旋转盘9和夹具10。角度编码器A5装在底座1上,主轴3通过螺钉固定在角度编码器A5的空心轴上后,主轴插入深沟球轴承4的内孔,另外,深沟球轴承4配合在上轴承座2,再将上轴承座2与底座1装成一体,把角度编码器A5包容于内部形成保护,以免其受到破坏。伺服电机A4与主轴3的传动关系如下:伺服电机A4装在电机座6上,伺服电机A4的转轴上装有电机同步带轮7,电机同步带轮7通过同步带8与主轴3上的主轴同步带轮5相连,并带动主轴3运动,实现角度编码器A5中圆光栅的相对转动。旋转盘9安装在主轴3上,由主轴3带动旋转,旋转盘9上装有两块夹具0用于固定工件。Referring to Figures 2 and 3, the indexing device is provided with a base 1, an upper bearing seat 2, a main shaft 3, a deep groove ball bearing 4, a main shaft timing pulley 5, a motor base 6, a motor timing pulley 7, a timing belt 8, and a rotating disk 9 and clamp 10. The angle encoder A5 is mounted on the base 1, the main shaft 3 is fixed on the hollow shaft of the angle encoder A5 by screws, and then the main shaft is inserted into the inner hole of the deep groove ball bearing 4, and the deep groove ball bearing 4 is fitted on the upper bearing seat 2 , and then the upper bearing seat 2 is integrated with the base 1, and the angle encoder A5 is contained inside to form a protection to prevent it from being damaged. The transmission relationship between the servo motor A4 and the main shaft 3 is as follows: the servo motor A4 is installed on the motor base 6, the motor synchronous pulley 7 is installed on the rotating shaft of the servo motor A4, and the motor synchronous pulley 7 is synchronized with the main shaft on the main shaft 3 through the synchronous belt 8 The belt pulley 5 is connected and drives the main shaft 3 to move to realize the relative rotation of the circular grating in the angle encoder A5. The rotating disk 9 is installed on the main shaft 3 and is driven to rotate by the main shaft 3. Two clamps 0 are installed on the rotating disk 9 to fix the workpiece.

控制时,用户通过界面向工控机A1输入控制参数和目标角位移等信息,编写指令程序,向伺服电机A4发出控制脉冲驱动伺服电机A4运动,带动主轴3和角度编码器A5的空心轴一起运动,角度编码器A5产生角位移信号,输出到编码器数显表A6,角位移在编码器数显表A6显示的同时,被输送给工控机A1。实际角位移与目标角位移进行不断比较,直到达到设定精度。During control, the user inputs information such as control parameters and target angular displacement to the industrial computer A1 through the interface, writes an instruction program, sends control pulses to the servo motor A4 to drive the servo motor A4 to move, and drives the spindle 3 and the hollow shaft of the angle encoder A5 to move together , the angle encoder A5 generates an angular displacement signal, which is output to the encoder digital display meter A6, and the angular displacement is sent to the industrial computer A1 while being displayed on the encoder digital display meter A6. The actual angular displacement is continuously compared with the target angular displacement until the set accuracy is achieved.

在本实施例中,角度编码器中采用圆光栅尺,刻线数为36000,系统的精度为±1”。角度编码器带有内置轴承、内置定子联轴器和空心轴。设定角度编码器的角度输出范围为0°~360°,定位精度可以达到秒弧级。测量时,主轴可直接与角度编码器的轴相连。角位移值直接输入编码器数显表,在编码器数显表上直接显示,并输入工控机。编码器数显表的分辨率可以达到0.0001°。角度编码器可采用海德汉编码器。In this embodiment, a circular grating scale is used in the angle encoder, the number of engraved lines is 36000, and the accuracy of the system is ±1". The angle encoder has a built-in bearing, a built-in stator coupling and a hollow shaft. Set the angle code The angle output range of the encoder is 0°~360°, and the positioning accuracy can reach the second arc level. When measuring, the main shaft can be directly connected with the axis of the angle encoder. The angular displacement value is directly input into the encoder digital display table, and the encoder digital display It can be directly displayed on the meter and input into the industrial computer. The resolution of the encoder digital display meter can reach 0.0001°. The angle encoder can be a HEIDENHAIN encoder.

角度编码器的驱动方式为伺服电机驱动带轮结构方式,带轮为T型齿同步带轮结构。The drive mode of the angle encoder is a servo motor driven pulley structure, and the pulley is a T-shaped synchronous pulley structure.

本发明实施例中,伺服电机采用富士电机有限公司出产的伺服电机。In the embodiment of the present invention, the servo motor adopts the servo motor produced by Fuji Electric Co., Ltd.

Claims (5)

1. be used for the dividing apparatus that aspheric optical element surface shape detects, it is characterized in that comprising control system and dividing apparatus two parts;
Control system is provided with industrial computer, interface card, servoamplifier, servomotor, angular encoder and scrambler digital display meter, the motion controller of industrial computer is installed in the PCI slot of IPC and through interface card and links to each other with the input end of servoamplifier, the output servo motor termination of servoamplifier, the angular encoder that is used to produce the angular misalignment signal by driven by servomotor, the data output end of angular encoder links to each other with scrambler digital display meter input end, and scrambler digital display meter output terminal inserts the RS-232-C interface of industrial computer;
Dividing apparatus is provided with base, top chock, main shaft, motor cabinet, deep groove ball bearing, main shaft synchronous pulley, motor synchronous belt wheel, synchronous band, rotating disc and anchor clamps, the angular encoder of control system is contained on the base, after main shaft was fixed on the tubular shaft of angular encoder, main shaft inserted the deep groove ball bearing endoporus; Deep groove ball bearing connects at top chock, again top chock and base are dressed up one, servomotor is contained on the motor cabinet, the motor synchronous belt wheel is contained in the rotating shaft of servomotor, the motor synchronous belt wheel passes through to be with synchronously the main shaft synchronous pulley with on the main shaft to link to each other, and drives motion of main shaft, and rotating disc is installed on the main shaft, by the main shaft driven rotary, anchor clamps are contained on the rotating disc.
2. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1, the angle output area that it is characterized in that described angular encoder is 0 °~360 °.
3. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1 or 2 is characterized in that described angular encoder has built-in bearing.
4. as claimed in claim 1ly be used for the dividing apparatus that aspheric optical element surface shape detects, it is characterized in that described main shaft by screw retention on the tubular shaft of angular encoder.
5. the dividing apparatus that is used for the aspheric optical element surface shape detection as claimed in claim 1 is characterized in that the retained part of described anchor clamps has 120 ° of angles.
CN2009101125056A 2009-09-08 2009-09-08 Indexing device for surface shape detection of aspheric optical elements Expired - Fee Related CN101655356B (en)

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CN107883912A (en) * 2017-11-13 2018-04-06 西安工业大学 A kind of heavy caliber axisymmetric aspheric surface method of testing and device
CN107883912B (en) * 2017-11-13 2019-09-10 西安工业大学 A kind of heavy caliber axisymmetric aspheric surface test method and device
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