CN109357612A - One kind being used for static liquid level capacitance displacement sensor on-line calibration method - Google Patents
One kind being used for static liquid level capacitance displacement sensor on-line calibration method Download PDFInfo
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- CN109357612A CN109357612A CN201811387311.2A CN201811387311A CN109357612A CN 109357612 A CN109357612 A CN 109357612A CN 201811387311 A CN201811387311 A CN 201811387311A CN 109357612 A CN109357612 A CN 109357612A
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- liquid level
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- inclination angle
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The present invention relates to be used for static liquid level capacitance displacement sensor on-line calibration method, comprising: pitching angle theta and roll angle φ of the plane relative to detection liquid level where obtaining the circular electrode plates of capacitive displacement measurement module；Inclination angle phi of the plane relative to detection liquid level where obtaining above-mentioned circular electrode plates；Determine relationship of the distance between the capacitor C, circular electrode plates central point and detection liquid level of capacitive displacement measurement module between d and inclination angle phi three；Posture online compensation is completed, during calculating distance d by the capacitor C of capacitive displacement measurement module, considers the influence of inclination angle phi, eliminates distortion of the inclination angle phi to capacitance displacement sensor probe output distance.The present invention realizes posture online compensation of the capacitance displacement sensor for static liquid level during resolving circular electrode plates using capacitor and detecting distance between liquid level, provides a kind of simple, easy means and method to improve capacitive static level system detection precision and reliability.
Description
Technical field
The present invention relates to capacitance displacement sensor collimation technique fields, especially a kind of to be used for static liquid level capacitor position
Displacement sensor on-line calibration method.
Background technique
Capacitance displacement sensor have dynamic characteristic is good, resolving power is high, advantages of simple structure and simple, be very suitable to high-precision,
Non-contact dynamic measurement, is widely used in the variation of monitoring position of fluid level in static liquid level.In condenser type static(al) water
In Barebone, capacitance displacement sensor probe is single electrode plate structure, and another pole plate is detection liquid level.
Capacitance displacement sensor probe can reduce Electric field edge effect using the electrode plate with degree Kelvin protection ring structure
It answers, improves the uniformity of field distribution.However, causing condenser type quiet due to there is the error introduced during production, installation etc.
It is not parallel between electrode plate and another pole plate i.e. detection liquid level in power level system in capacitance displacement sensor probe, between pole plate
Spacing is not a constant, but with spatial variations, cause capacitive static level system signal to distort.
Under conditions of only considering plate non-paralleled degree error, improve capacitance displacement sensor in displacement measurement precision aspect
There are mainly two types of methods: the first is the depth of parallelism improved between pole plate, tilt angle between pole plate is minimized, to ignore non-
Parallelism error, it is this for controlling the hot stepping mechanism of metallic finger of capacitance displacement sensor polar plate position and posture, structure
It is more complex, cause sensors stabilizability poor, reliability is low；Second method is exactly the electricity in capacitance displacement sensor
Pole plate, which uses, has 3 circular electrodes of the same area separated by degree Kelvin protection ring, calculates capacitance displacement sensor
Tilt angle between middle two-plate, this method need the resolving that iterates, until the pole plate spacing and preceding primary solution of resolving
The pole plate spacing difference of calculation is less than the measurement accuracy drafted.Since capacitance displacement sensor pole plate needs multiple equal electrodes to constitute
Multiple subsystems, and extract corresponding ultra-weak electronic signal, increase the complexity of signal processing；In addition, in tilt angle φ
In the process, it is related to the solution process that iterates, it is computationally intensive, it is time-consuming.
Summary of the invention
It realizes the purpose of the present invention is to provide a kind of to capacitive displacement distortion signal real-time online compensation, improves displacement solution
Calculation precision, imparting capacitive static level system reliability and adaptivity are used for static liquid level capacitance displacement sensor
On-line calibration method.
To achieve the above object, the invention adopts the following technical scheme: one kind being used for static liquid level capacitive displacement
Sensor on-line calibration method, this method include the steps that following order:
(1) plane where obtaining the circular electrode plates of the capacitive displacement measurement module in capacitance displacement sensor probe is opposite
In the pitching angle theta and roll angle of detection liquid level
(2) inclination angle phi of the plane relative to detection liquid level where obtaining above-mentioned circular electrode plates；
(3) the distance between the capacitor C, circular electrode plates central point and detection liquid level of capacitive displacement measurement module d is determined,
And the relationship between inclination angle phi three；
(4) posture online compensation is completed to examine during calculating distance d by the capacitor C of capacitive displacement measurement module
Consider the influence of inclination angle phi, eliminates distortion of the inclination angle phi to capacitance displacement sensor probe output distance d.
The step (1) specifically refers to: the capacitive displacement measurement module and inclination angle measurement module collectively constitute capacitor position
Displacement sensor probe, the position between capacitive displacement measurement module and inclination angle measurement module are relatively fixed；The capacitive displacement is surveyed
Both direction orthogonal in plane is denoted as X-axis and Y-axis by the circular electrode plates of amount module, perpendicular to circular electrode plates plane
Direction be denoted as Z axis, and X-axis, Y-axis and Z-direction follow right hand rule；The inclination angle measurement module obtains circular electrode plates phase
Pitch angle for detecting liquid level is denoted as θ, and the roll angle for obtaining circular electrode plates relative to detection liquid level is denoted asPitching angle theta is
The angle rotated around Y-axis, roll angleFor the angle rotated around X-axis.
The calculation formula of inclination angle phi is as follows in the step (2):
Relational expression in the step (3) between capacitor C, distance d and inclination angle phi three is as follows:
In formula, r is the effective radius of circular electrode plates, and A is the effective area of circular electrode plates, ε0It is normal for vacuum dielectric
Number, εrThe relative dielectric constant of medium between circular electrode plates and detection liquid level.
As shown from the above technical solution, the invention has the benefit that the present invention is using capacitive displacement measurement module and inclines
Angular measurement module integrates a kind of capacitance displacement sensor probe for static liquid level, and inclination angle measurement module real-time detection is quiet
Tilt angle of the circular electrode plates that capacitance displacement sensor is popped one's head in power level system relative to detection liquid level, is realized for quiet
The capacitance displacement sensor of power level system is during resolving distance between circular electrode plates and detection liquid level using capacitor
Posture online compensation, thus for improve capacitive static level system detection precision and reliability provide it is a kind of simple, easy
Means and method.
Detailed description of the invention
Fig. 1 is flow chart of the method for the present invention；
Fig. 2 is the structural block diagram of capacitance displacement sensor probe；
Fig. 3 is pitching angle theta and roll angleSchematic diagram；
Fig. 4 is the schematic diagram of inclination angle phi.
Specific embodiment
As shown in Figure 1, a kind of be used for static liquid level capacitance displacement sensor on-line calibration method, under this method includes
The step of column sequence:
(1) the 101 place plane of circular electrode plates of the capacitive displacement measurement module 1 in capacitance displacement sensor probe is obtained
Pitching angle theta and roll angle relative to detection liquid level 3
(2) inclination angle phi of the above-mentioned 101 place plane of circular electrode plates relative to detection liquid level 3 is obtained；
(3) it determines between the capacitor C, 101 central point of circular electrode plates and detection liquid level 3 of capacitive displacement measurement module 1
Relationship between distance d and inclination angle phi three；Capacitor C is capacitance displacement sensor characterisitic parameter；
(4) complete posture online compensation, i.e., during calculating distance d by the capacitor C of capacitive displacement measurement module 1,
Consider the influence of inclination angle phi, eliminate distortion of the inclination angle phi to capacitance displacement sensor probe output distance, capacitive displacement passes
Sensor probe output distance is d.
The step (1) specifically refers to: the capacitive displacement measurement module 1 and inclination angle measurement module 2 collectively constitute capacitor
Displacement sensor probe, the position between capacitive displacement measurement module 1 and inclination angle measurement module 2 are relatively fixed；The capacitor position
Both direction orthogonal in plane is denoted as X-axis and Y-axis by the circular electrode plates 101 of shift measurement module 1, perpendicular to circular electric
The direction of 101 plane of pole plate is denoted as Z axis, and X-axis, Y-axis and Z-direction follow right hand rule；The inclination angle measurement module 2 obtains
Circular electrode plates 101 are denoted as θ relative to the pitch angle of detection liquid level, obtain the turning over relative to detection liquid level of circular electrode plates 101
Roll angle is denoted asPitching angle theta is the angle rotated around Y-axis, roll angleFor the angle rotated around X-axis.
The calculation formula of inclination angle phi is as follows in the step (2):
Relational expression in the step (3) between capacitor C, distance d and inclination angle phi three is as follows:
In formula, r is the effective radius of circular electrode plates 101, and A is the effective area of circular electrode plates 101, ε0For vacuum Jie
Electric constant, εrThe relative dielectric constant of medium between circular electrode plates 101 and detection liquid level 3.
This method realization device include one be integrated with capacitive displacement measurement module 1 and inclination angle measurement module 2 for quiet
The capacitance displacement sensor of power level system is popped one's head in.In capacitive static level system, capacitive displacement measurement module 1 is single electricity
Electrode plate structure, that is, circular electrode plates 101, another electrode plate are the detection liquid level 3 in static liquid level, and detection liquid level 3 is in water
Level state；Inclination angle measurement module 2 for on-line checking capacitive displacement measurement module 1 electrode plate and horizontal plane between angle be
Inclination angle phi, to obtain the angle between the circular electrode plates 101 of capacitive displacement measurement module 1 and detection 3 electrode of liquid level.It is logical
The angle between the circular electrode plates 101 of capacitive displacement measurement module 1 and detection liquid level 3 is crossed, it can online effective compensation static(al) water
Non-parallel degree error in Barebone between the electrode plate of capacitive displacement measurement module 1 and detection liquid level 3, so that it is guaranteed that static(al) water
The measurement accuracy and reliability of the capacitance displacement sensor of Barebone.
The inclination angle measurement module 2 be 2 single shafts incline sensor, 1 two axial rake sensor, 3 single-axis accelerometers,
One of 1 twin-axis accelerometer and 1 single-axis accelerometer, 1 three axis accelerometer.
Plane locating for the circular electrode plates 101 of the capacitive displacement measurement module 1 is relative to detection 3 place plane of liquid level
Included angle be considered as detection liquid level 3 in one perpendicular to plane locating for round single electrode plate 101 and detection liquid level 3 between intersection
The vector a of vector n, using vector n as rotary shaft, as the arrow perpendicular to intersection n when rotating to plane locating for round single electrode plate
Measure a ', the angle φ for needing to rotate.Therefore, Eulerian angles, that is, pitch angle, roll angle and the course angle ψ rotated about the z axis, and with q1、
q2、q3And q4Transfer algorithm, that is, formula (4) between the quaternary number Q of expression is as follows:
Wherein, n=q1xw+q2yw+q3zw, q3=0；φ=2arccosq4, since ψ size does not influence φ, ψ here
Take zero.
According to formula (4), from pitching angle theta and roll angle, can be online locating for real-time directly calculation circular electrode plates 101
Plane relative to the included angle to electrode detection liquid level 3,It encapsulates and pacifies
The parallelism error introduced during dress.
Due in capacitive displacement measurement module 1 electrode plate be circular configuration, ψ size for capacitor C size also without shadow
It rings.Under the conditions of uniform for field distribution myopia between circular electrode plates 101 and detection 3 electrode of liquid level, the circular electrode
It is as follows that the distance between 101 central point of plate and detection liquid level 3 are denoted as the relationship that d and capacitor are denoted as between C:
In formula, r is 101 effective radius of circular electrode plates；A is 101 effective area of circular electrode plates；ε 0 is that vacuum dielectric is normal
Number；The relative dielectric constant of medium between ε r micro-circle electrode plate 101 and liquid level.It is real to be resolved now with capacitor C according to formula
Appearance during distance d between electrode plate and detection liquid level 3 in capacitance displacement sensor probe in capacitive static level system
State online compensation eliminates the influence of inclination angle phi.
In conclusion the present invention is integrated a kind of for static level using capacitive displacement measurement module and inclination angle measurement module
The capacitance displacement sensor of system is popped one's head in, capacitance displacement sensor probe in the measurement module real-time detection static liquid level of inclination angle
Circular electrode plates relative to detection liquid level tilt angle, realize for static liquid level capacitance displacement sensor in benefit
Circular electrode plates are resolved with capacitor and detect the posture online compensation between liquid level during distance, thus to improve condenser type
Static liquid level detection accuracy and reliability provide a kind of simple, easy means and method.
Claims (4)
1. one kind is used for static liquid level capacitance displacement sensor on-line calibration method, this method includes the step of following order
It is rapid:
(1) plane is relative to inspection where obtaining the circular electrode plates of the capacitive displacement measurement module in capacitance displacement sensor probe
Survey the pitching angle theta and roll angle of liquid level
(2) inclination angle phi of the plane relative to detection liquid level where obtaining above-mentioned circular electrode plates；
(3) the distance between the capacitor C, circular electrode plates central point and detection liquid level of capacitive displacement measurement module d is determined, and
Relationship between inclination angle phi three；
(4) posture online compensation is completed to consider to incline during calculating distance d by the capacitor C of capacitive displacement measurement module
Distortion of the inclination angle phi to capacitance displacement sensor probe output distance is eliminated in the influence of oblique angle φ.
2. according to claim 1 be used for static liquid level capacitance displacement sensor on-line calibration method, feature exists
In: the step (1) specifically refers to: the capacitive displacement measurement module and inclination angle measurement module collectively constitute capacitive displacement sensing
Device probe, the position between capacitive displacement measurement module and inclination angle measurement module are relatively fixed；The capacitive displacement measurement module
Circular electrode plates both direction orthogonal in plane is denoted as X-axis and Y-axis, perpendicular to the direction of circular electrode plates plane
It is denoted as Z axis, and X-axis, Y-axis and Z-direction follow right hand rule；The inclination angle measurement module obtains circular electrode plates relative to inspection
The pitch angle for surveying liquid level is denoted as θ, and the roll angle for obtaining circular electrode plates relative to detection liquid level is denoted asPitching angle theta is around Y-axis
The angle of rotation, roll angleFor the angle rotated around X-axis.
3. according to claim 1 be used for static liquid level capacitance displacement sensor on-line calibration method, feature exists
In: the calculation formula of inclination angle phi is as follows in the step (2):
4. according to claim 1 be used for static liquid level capacitance displacement sensor on-line calibration method, feature exists
In: the relational expression in the step (3) between capacitor C, distance d and inclination angle phi three is as follows:
In formula, r is the effective radius of circular electrode plates, and A is the effective area of circular electrode plates, ε0For permittivity of vacuum, εrFor
The relative dielectric constant of medium between circular electrode plates and detection liquid level.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813206A (en) * | 2019-03-04 | 2019-05-28 | 中国科学技术大学 | A kind of capacitance displacement sensor probe based on conductive film |
| CN110186366A (en) * | 2019-06-11 | 2019-08-30 | 中国科学技术大学 | A kind of conductive film and preparation method thereof |
| CN111693022A (en) * | 2020-06-23 | 2020-09-22 | 中煤科工集团重庆研究院有限公司 | Settlement monitoring system error compensation method based on differential pressure type settlement meter |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949725A (en) * | 2010-10-09 | 2011-01-19 | 德州赛佳新能源科技有限公司 | New liquid angular position sensor and water level measuring method |
| CN102221323A (en) * | 2011-06-03 | 2011-10-19 | 浙江大学 | Six-DOF(degree of freedom) displacement measuring method based on planar capacitor |
| JP5563169B1 (en) * | 2013-01-25 | 2014-07-30 | 中国電力株式会社 | Distance measuring system and distance measuring method |
| CN107167069A (en) * | 2017-07-07 | 2017-09-15 | 魔玛智能科技（上海）有限公司 | Condenser type intelligence support surface height detecting device |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN108680303A (en) * | 2018-07-06 | 2018-10-19 | 中国人民解放军战略支援部队航天工程大学 | For rocking the system response error computational methods of dynamometry, rocking dynamometric system |
-
2018
- 2018-11-21 CN CN201811387311.2A patent/CN109357612B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949725A (en) * | 2010-10-09 | 2011-01-19 | 德州赛佳新能源科技有限公司 | New liquid angular position sensor and water level measuring method |
| CN102221323A (en) * | 2011-06-03 | 2011-10-19 | 浙江大学 | Six-DOF(degree of freedom) displacement measuring method based on planar capacitor |
| JP5563169B1 (en) * | 2013-01-25 | 2014-07-30 | 中国電力株式会社 | Distance measuring system and distance measuring method |
| CN107367218A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of declination error compensation |
| CN107367223A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of capacitance sensor bit shift compensation |
| CN107167069A (en) * | 2017-07-07 | 2017-09-15 | 魔玛智能科技（上海）有限公司 | Condenser type intelligence support surface height detecting device |
| CN108680303A (en) * | 2018-07-06 | 2018-10-19 | 中国人民解放军战略支援部队航天工程大学 | For rocking the system response error computational methods of dynamometry, rocking dynamometric system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813206A (en) * | 2019-03-04 | 2019-05-28 | 中国科学技术大学 | A kind of capacitance displacement sensor probe based on conductive film |
| CN109813206B (en) * | 2019-03-04 | 2024-04-16 | 中国科学技术大学 | Capacitive displacement sensor probe based on conductive film |
| CN110186366A (en) * | 2019-06-11 | 2019-08-30 | 中国科学技术大学 | A kind of conductive film and preparation method thereof |
| CN111693022A (en) * | 2020-06-23 | 2020-09-22 | 中煤科工集团重庆研究院有限公司 | Settlement monitoring system error compensation method based on differential pressure type settlement meter |
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