CN109357612B - On-line calibration method for capacitance displacement sensor of static leveling system - Google Patents
On-line calibration method for capacitance displacement sensor of static leveling system Download PDFInfo
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Abstract
The invention relates to an online calibration method for a capacitance displacement sensor of a hydrostatic level system, which comprises the following steps: acquiring a pitch angle theta and a roll angle phi of a plane where a circular electrode plate of the capacitance displacement measurement module is located relative to a detection liquid level; acquiring an inclination angle phi of a plane where the circular electrode plate is located relative to a detection liquid level; determining the relation among the capacitance C of the capacitance displacement measurement module, the distance d between the center point of the circular electrode plate and the detection liquid level and the inclination angle phi; and completing attitude online compensation, and in the process of calculating the distance d through the capacitance C of the capacitance displacement measurement module, considering the influence of the inclination angle phi and eliminating the distortion of the inclination angle phi on the output distance of the capacitance displacement sensor probe. The invention realizes the attitude online compensation of the capacitance displacement sensor for the static leveling system in the process of resolving the distance between the circular electrode plate and the detection liquid level by using capacitance, and provides a simple and feasible means and method for improving the detection precision and reliability of the capacitance static leveling system.
Description
Technical Field
The invention relates to the technical field of calibration of capacitive displacement sensors, in particular to an online calibration method for a capacitive displacement sensor of a static leveling system.
Background
The capacitance displacement sensor has the advantages of good dynamic characteristic, high resolution, simple structure and the like, is very suitable for high-precision non-contact dynamic measurement, and is widely used for monitoring the change of the liquid level position in a static leveling system. In the capacitance type static leveling system, a capacitance displacement sensor probe is in a single electrode plate structure, and the other electrode plate is used for detecting liquid level.
The capacitance displacement sensor probe adopts the electrode plate with a Kelvin guard ring structure, so that the edge effect of an electric field can be reduced, and the uniformity of electric field distribution can be improved. However, errors introduced in the manufacturing and installation processes cause the electrode plate in the capacitance displacement sensor probe in the capacitance static leveling system to be unparallel with another electrode plate, namely, the detection liquid level, and the distance between the electrode plates is not constant, but is changed along with the space, so that the signal of the capacitance static leveling system is distorted.
Under the condition of only considering the non-parallelism error of the polar plate, the methods for improving the displacement measurement precision of the capacitance displacement sensor mainly comprise two methods: the first is to improve the parallelism between the polar plates and reduce the inclination angle between the polar plates as much as possible so as to ignore the non-parallelism error, and the metal finger-shaped thermal stepping mechanism for controlling the position and the posture of the polar plates of the capacitance displacement sensor has a complex structure, thus leading to poor performance stability and low reliability of the sensor; the second method is that in the capacitance displacement sensor, the electrode plate adopts a circular electrode with 3 same areas separated by Kelvin protection rings, and the inclination angle between the two electrode plates in the capacitance displacement sensor is calculated. Because the polar plate of the capacitance displacement sensor needs a plurality of subsystems formed by a plurality of equivalent electrodes and extracts corresponding weak electric signals, the complexity of signal processing is increased; in addition, in the process of the inclination angle phi, a repeated iteration calculation process is involved, and the calculation amount is large and time is consumed.
Disclosure of Invention
The invention aims to provide an online calibration method for a capacitance displacement sensor of a hydrostatic level system, which can realize real-time online compensation of capacitance displacement distortion signals, improve displacement resolving precision and endow the capacitive hydrostatic level system with reliability and adaptivity.
In order to achieve the purpose, the invention adopts the following technical scheme: an on-line calibration method for a capacitance displacement sensor of a hydrostatic leveling system, the method comprising the sequential steps of:
(1) obtaining the pitch angle theta and the roll angle of the plane of a circular electrode plate of a capacitance displacement measurement module in a capacitance displacement sensor probe relative to the detection liquid level
(2) Acquiring an inclination angle phi of a plane where the circular electrode plate is located relative to a detection liquid level;
(3) determining the relation among the capacitance C of the capacitance displacement measurement module, the distance d between the center point of the circular electrode plate and the detection liquid level and the inclination angle phi;
(4) and (3) finishing attitude online compensation, namely, in the process of calculating the distance d through the capacitance C of the capacitance displacement measurement module, considering the influence of the inclination angle phi and eliminating the distortion of the inclination angle phi on the output distance d of the capacitance displacement sensor probe.
The step (1) specifically comprises the following steps: the capacitance displacement measurement module and the inclination angle measurement module jointly form a capacitance displacement sensor probe, and the positions of the capacitance displacement measurement module and the inclination angle measurement module are relatively fixed; the circular electrode plate of the capacitance displacement measurement module records two mutually perpendicular directions in a plane as an X axis and a Y axis, the direction perpendicular to the plane of the circular electrode plate is a Z axis, and the directions of the X axis, the Y axis and the Z axis follow the right-hand rule; the inclination angle measurement module obtains the pitch angle of the circular electrode plate relative to the detection liquid level and records the theta, and obtains the roll angle of the circular electrode plate relative to the detection liquid level and records the theta
Pitch angle theta is the angle of rotation around the Y axis, roll angle
Is the angle of rotation about the X axis.
The calculation formula of the inclination angle phi in the step (2) is as follows:
the relationship among the capacitance C, the distance d and the inclination angle phi in the step (3) is as follows:
wherein r is the effective radius of the circular electrode plate, A is the effective area of the circular electrode plate,0in order to have a dielectric constant in a vacuum,rthe relative dielectric constant of the medium between the circular electrode plate and the detection liquid level.
According to the technical scheme, the beneficial effects of the invention are as follows: the capacitance displacement sensor probe for the static leveling system is integrated by adopting the capacitance displacement measuring module and the inclination angle measuring module, the inclination angle measuring module detects the inclination angle of the circular electrode plate of the capacitance displacement sensor probe in the static leveling system relative to the detection liquid level in real time, and the attitude online compensation of the capacitance displacement sensor for the static leveling system in the process of resolving the distance between the circular electrode plate and the detection liquid level by using capacitance is realized, so that a simple and easy means and a method are provided for improving the detection precision and reliability of the capacitance static leveling system.
Drawings
FIG. 1 is a flow chart of a method of the present invention;
FIG. 2 is a block diagram of a capacitive displacement transducer probe;
FIG. 3 shows pitch angle θ and roll angle
A schematic diagram of (a);
fig. 4 is a schematic diagram of the tilt angle phi.
Detailed Description
As shown in fig. 1, a method for online calibration of a capacitive displacement sensor of a hydrostatic leveling system, the method comprising the following sequential steps:
(1) obtaining the pitch angle theta and the roll angle of the plane where the circular electrode plate 101 of the capacitance displacement measurement module 1 in the capacitance displacement sensor probe is located relative to the detection liquid level 3
(2) Acquiring an inclination angle phi of a plane where the circular electrode plate 101 is located relative to the detection liquid level 3;
(3) determining the relation among the capacitance C of the capacitance displacement measurement module 1, the distance d between the central point of the circular electrode plate 101 and the detection liquid level 3 and the inclination angle phi; the capacitance C is a characteristic parameter of the capacitance displacement sensor;
(4) and (3) finishing attitude online compensation, namely, in the process of calculating the distance d through the capacitance C of the capacitance displacement measurement module 1, considering the influence of the inclination angle phi, and eliminating the distortion of the inclination angle phi on the output distance of the capacitance displacement sensor probe, wherein the output distance of the capacitance displacement sensor probe is d.
The step (1) specifically comprises the following steps: the capacitance displacement measurement module 1 and the inclination angle measurement module 2 jointly form a capacitance displacement sensor probe, and the positions of the capacitance displacement measurement module 1 and the inclination angle measurement module 2 are relatively fixed; the circular electrode plate 101 of the capacitance displacement measurement module 1 records two mutually perpendicular directions in a plane as an X axis and a Y axis, the direction perpendicular to the plane of the circular electrode plate 101 is a Z axis, and the directions of the X axis, the Y axis and the Z axis follow the right-hand rule; the inclination angle measurement module 2 obtains the pitch angle of the circular electrode plate 101 relative to the detection liquid level as theta, and obtains the roll angle of the circular electrode plate 101 relative to the detection liquid level as theta
Pitch angle theta is the angle of rotation around the Y axis, roll angle
Is the angle of rotation about the X axis.
The calculation formula of the inclination angle phi in the step (2) is as follows:
the relationship among the capacitance C, the distance d and the inclination angle phi in the step (3) is as follows:
wherein r is the effective radius of the circular electrode plate 101, A is the effective area of the circular electrode plate 101,0in order to have a dielectric constant in a vacuum,ris the relative dielectric constant of the medium between the circular electrode plate 101 and the detection liquid level 3.
The device for realizing the method comprises a capacitance displacement sensor probe which is integrated with a capacitance displacement measuring module 1 and an inclination angle measuring module 2 and is used for the static leveling system. In the capacitance type static leveling system, a capacitance displacement measuring module 1 is a single electrode plate structure, namely a circular electrode plate 101, the other electrode plate is a detection liquid level 3 in the static leveling system, and the detection liquid level 3 is in a horizontal state; the inclination angle measuring module 2 is used for detecting an included angle between the electrode plate of the capacitance displacement measuring module 1 and the horizontal plane, namely an inclination angle phi on line, so as to obtain an angle between the circular electrode plate 101 of the capacitance displacement measuring module 1 and the electrode of the detection liquid level 3. Through the included angle between the circular electrode plate 101 of the capacitance displacement measurement module 1 and the detection liquid level 3, the non-parallelism error between the electrode plate of the capacitance displacement measurement module 1 and the detection liquid level 3 in the static leveling system can be compensated effectively on line, so that the measurement accuracy and reliability of the capacitance displacement sensor of the static leveling system are ensured.
The dip angle measurement module 2 is one of 2 single-axis tilt sensors, 1 two-axis tilt angle sensor, 3 single-axis accelerometers, 1 double-axis accelerometer, 1 single-axis accelerometer and 1 three-axis accelerometer.
The included angle phi between the plane of the circular electrode plate 101 of the capacitance displacement measurement module 1 and the plane of the detection liquid level 3 can be regarded as a vector a perpendicular to an intersecting line vector n between the plane of the circular single electrode plate 101 and the detection liquid level 3 in the detection liquid level 3, and the vector n is taken as a rotating shaft, and when the vector n rotates to the plane of the circular single electrode plate, the vector a' perpendicular to the intersecting line n becomes an angle phi required to rotate. Thus, the Euler angles, i.e. the pitch, roll and heading psi for rotation about the Z axis, are related by q1、q2、q3And q is4The conversion algorithm between the expressed quaternions Q, i.e., equation (4), is as follows:
wherein n is q1xw+q2yw+q3zw，q3＝0；φ＝2arccosq4Since the magnitude of ψ has no effect on φ, here ψ takes zero.
From the pitch angle θ and the roll angle according to equation (4)
The included angle phi of the plane where the circular electrode plate 101 is located relative to the counter electrode detection liquid level 3 can be directly calculated on line in real time,
i.e. parallelism errors introduced during packaging and mounting.
Since the electrode plates in the capacitance displacement measurement module 1 are circular, the size of psi has no influence on the size of the capacitor C. Under the condition that the electric field distribution between the circular electrode plate 101 and the electrode of the detection liquid level 3 is short-sighted and uniform, the relationship between the distance d between the central point of the circular electrode plate 101 and the detection liquid level 3 and the capacitance C is as follows:
in the formula, r is the effective radius of the circular electrode plate 101; a is the effective area of the circular electrode plate 101; 0 is the vacuum dielectric constant; r relative dielectric constant of the medium between the micro-circular electrode plate 101 and the liquid surface. According to a formula, the online attitude compensation is realized in the process of resolving the distance d between the electrode plate in the capacitance displacement sensor probe and the detection liquid level 3 in the capacitance static leveling system by using the capacitor C, and the influence of the inclination angle phi is eliminated.
In summary, the capacitance displacement sensor probe for the hydrostatic leveling system is integrated by the capacitance displacement measurement module and the inclination angle measurement module, the inclination angle measurement module detects the inclination angle of the circular electrode plate of the capacitance displacement sensor probe in the hydrostatic leveling system relative to the detection liquid level in real time, and the online attitude compensation of the capacitance displacement sensor for the hydrostatic leveling system in the process of resolving the distance between the circular electrode plate and the detection liquid level by using capacitance is realized, so that a simple and easy means and a method are provided for improving the detection precision and reliability of the capacitance hydrostatic leveling system.
Claims (3)
1. An on-line calibration method for a capacitance displacement sensor of a hydrostatic leveling system, the method comprising the sequential steps of:
(1) obtaining the pitch angle theta and the roll angle of the plane of a circular electrode plate of a capacitance displacement measurement module in a capacitance displacement sensor probe relative to the detection liquid level
(2) Acquiring an inclination angle phi of a plane where the circular electrode plate is located relative to a detection liquid level; the calculation formula of the inclination angle phi in the step (2) is as follows:
(3) determining the relation among the capacitance C of the capacitance displacement measurement module, the distance d between the center point of the circular electrode plate and the detection liquid level and the inclination angle phi;
(4) and (3) finishing attitude online compensation, namely, in the process of calculating the distance d through the capacitance C of the capacitance displacement measurement module, considering the influence of the inclination angle phi and eliminating the distortion of the inclination angle phi on the output distance of the capacitance displacement sensor probe.
2. The method for the on-line calibration of a capacitive displacement sensor for a hydrostatic leveling system of claim 1, wherein: the step (1) specifically comprises the following steps: the capacitance displacement measurement module and the inclination angle measurement module jointly form a capacitance displacement sensor probe, and the positions of the capacitance displacement measurement module and the inclination angle measurement module are relatively fixed; the circular electrode plate of the capacitance displacement measurement module records two mutually perpendicular directions in a plane as an X axis and a Y axis, the direction perpendicular to the plane of the circular electrode plate is a Z axis, and the directions of the X axis, the Y axis and the Z axis follow the right-hand rule; the inclination angle measurement module obtains the pitch angle of the circular electrode plate relative to the detection liquid level and records the theta, and obtains the roll angle of the circular electrode plate relative to the detection liquid level and records the theta
Pitch angle theta is the angle of rotation around the Y axis, roll angle
Is the angle of rotation about the X axis.
3. The method for the on-line calibration of a capacitive displacement sensor for a hydrostatic leveling system of claim 1, wherein: the relationship among the capacitance C, the distance d and the inclination angle phi in the step (3) is as follows:
wherein r is the effective radius of the circular electrode plate, A is the effective area of the circular electrode plate,0in order to have a dielectric constant in a vacuum,rthe relative dielectric constant of the medium between the circular electrode plate and the detection liquid level.
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