CN108319299B - Adjusting device for multi-measuring-head installation angle, and measuring and compensating method - Google Patents

Adjusting device for multi-measuring-head installation angle, and measuring and compensating method Download PDF

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CN108319299B
CN108319299B CN201711236549.0A CN201711236549A CN108319299B CN 108319299 B CN108319299 B CN 108319299B CN 201711236549 A CN201711236549 A CN 201711236549A CN 108319299 B CN108319299 B CN 108319299B
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measuring
angle
mounting
arm
precise
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CN108319299A (en
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石照耀
王涛
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Beijing University of Technology
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Beijing University of Technology
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00Control of position or direction
    • G05D3/12Control of position or direction using feedback
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
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Abstract

The invention discloses a device for adjusting the installation angle of multiple measuring heads, and a measuring and compensating method, and belongs to the technical field of precision testing technology, instrument technology and test. The measuring device is formed by combining a left adjusting system, a right adjusting system and a measuring system, wherein the left measuring system and the right measuring system are respectively provided with two groups of long gratings, are coaxially arranged and independently operate through precise screw rods respectively, and can measure independent variable displacement respectively, so that the installation angle can be accurately obtained through corner relation conversion. The invention also provides a device and a method for measuring the specific angle. The invention overcomes the problems of poor self-adaptability of a plurality of measuring heads installation angles and self manufacturing errors of device parts in non-contact laser measurement and test, the installation angles can be automatically and accurately adjusted only by inputting angle parameter values required by a left measuring head and a right measuring head, a self-adaptive coarse adjustment and fine adjustment method is provided in the adjustment process, and the angle deviation caused by the manufacturing errors can be automatically compensated after the measuring method is adopted.

Description

Adjusting device for multi-measuring-head installation angle, and measuring and compensating method
Technical Field
The invention relates to a device capable of automatically adjusting the mounting angle of a measuring head when two non-contact laser measuring heads carry out precision measurement on mechanical parts, an angle measurement and error compensation method, and belongs to the technical field of precision testing technology, instrument technology and test.
Background
The angle is one of important parameters in precision testing, and belongs to an indispensable basic index in the fields of national defense industry, scientific research, mechanical manufacturing and the like. When a non-contact optical measuring instrument is used for measuring parts with mechanical complex curved surfaces, laser is often projected to the measured surface at a certain angle according to the measuring principle of the non-contact optical measuring instrument, namely, a plurality of measuring head space angle parameters are required to be adjusted before measurement is started, so that the measuring head space angle parameters meet the measuring algorithm requirements and meet the effective measuring range of the measuring head. Usually, two or even a plurality of laser measuring heads are adopted to measure objects with complex surfaces and symmetrical change rule properties, such as various gears, bearings, worm and gear and the like. For convenience of description, the non-contact laser probe is referred to herein as a probe. The advantage that a plurality of gauge heads measure simultaneously lies in can greatly improving measuring speed and efficiency, and a plurality of gauge heads measure the gear left and right flank simultaneously, can realize than only using a gauge head several times or even tens of times higher measurement efficiency, not only save angle adjustment once more and the time of calibration, very big assurance measurement accuracy and repeatability again.
When the laser measuring head is tested and measured, the traditional angle adjustment has 2 modes: (1) the angle is determined with the adjustment block. The same model product is measured, the installation angle is mainly in a mode of using an adjusting block and then fine adjusting, and the angle parameter is relatively stable. The adjusting block has the characteristics of simple structure, low cost and poor flexibility. (2) The mechanical structure variation determines the angle. The measurement of different models and different objects often needs greatly-adjusted angle parameters according to corresponding algorithm requirements, and the current adjustment mode mainly adopts a mechanical arm and a multi-degree-of-freedom measurement platform, and is characterized by high precision, complex structure, high price and the like. Therefore, the traditional angle adjustment has the defects that a plurality of measuring heads need to be provided with a plurality of mechanical arms, the cost is too high and unrealistic, and the self-adaptability is not strong.
As is known, the manufacturing error of parts can not be eliminated, the dimensional tolerance can reach 1 μm in a precision instrument, and the rotation precision of a shaft system can reach 0.01-0.02 μm or less. Manufacturing errors of the parts are introduced into the installation and measurement of the whole equipment, and the measurement accuracy of the device and the equipment is greatly influenced. In the automatic control, the device angle is continuously and accurately adjusted to a preset value through a corresponding compensation algorithm and data acquired synchronously at high speed, so that the key is very important, and the angle deviation caused by manufacturing errors can be greatly reduced.
Disclosure of Invention
The invention overcomes the problems of poor self-adaptability of a plurality of measuring heads installation angles and self manufacturing errors of device parts in non-contact laser measurement and tests, the installation angles can be automatically and accurately adjusted only by inputting angle parameter values required by a left measuring head and a right measuring head, and a self-adaptive coarse adjustment and fine adjustment method is provided in the adjustment process.
Aiming at the defects of the traditional angle adjusting method and the manufacturing errors of parts, the invention carries out principle innovation, and the basic idea is as follows: 1. the error cannot be eliminated, but can be compensated as much as possible. 2. The precision measuring instrument takes the Abbe principle as a first criterion. In order to meet the two criteria, the problems of poor flexibility, complex structure and the like of the traditional angle adjusting device or instrument are broken through. The invention provides a mode of combining two different algorithms, compensates the angle deviation caused by the manufacturing error of mechanical parts, realizes accurate adjustment of the angle, simplifies the structure, adopts the grating displacement variable quantity to automatically and accurately adjust the angle, and realizes the principle innovation of the installation angle adjustment and the test technology thereof.
The invention adopts the following technical scheme:
a device for adjusting the installation angle of a multi-measuring-head consists of a workbench, a left adjusting and measuring system A and a right adjusting and measuring system B. The left adjusting and measuring system A and the right adjusting and measuring system B are symmetrically arranged on the workbench.
Left adjustment and measurement system a: the left side laser gauge head is fixed on the preset hole at one end of the left side mounting arm through a refined locking nut, the axial long grating of the left side mounting arm is mounted in the upper end axis direction of the left side mounting arm, the other end of the left side mounting arm is connected with the left side special nut through a pin shaft, the horizontal fine adjustment gauge block a is connected together, the left side special nut is connected to the left side x-direction precise screw rod in a threaded screw hole mode, the left side x-direction precise screw rod is connected with the precise ball bearing a and the precise ball bearing b to achieve positioning, the left side x-direction precise screw rod is connected with a left side servo motor through a shaft coupler a on one side, the long grating reading head a is connected with a supporting point adjusting buckle a to provide supporting force, and the long grating reading head a is used. The left adjusting and measuring system A is used for realizing the automatic adjustment of the left mounting angle by driving a servo motor through a computer.
Right adjustment and measurement system B: the right side laser gauge head is fixed on right side installation arm one end preset hole through refined lock nut, the upper end axis direction at right side installation arm is installed to the long grating of right side installation arm axial, the right side installation arm other end is through round pin axle b and the special nut in right side, horizontal fine setting gage block b links together, the special nut in right side is connected to right side x with the screw mode and is to accurate lead screw, right side x realizes the location to accurate lead screw both ends connection two accurate dense pearl bearings c and accurate dense pearl bearing d, right side x is connected with right side servo motor through shaft coupling b to accurate lead screw in one side, the long grating reading head b and the strong point adjustment buckle b of installation arm are measured to the top are connected and are provided the holding power. The long grating reading head b of the upper measuring installation arm is used for reading data of the axial long grating of the right installation arm. The right adjusting and measuring system B is used for realizing the automatic adjustment of the right mounting angle by driving a servo motor through a computer
In the measuring process, the left adjusting and measuring system A and the right adjusting and measuring system B are two completely symmetrical systems which can independently operate and measure. The left adjustment and measurement system a measurement procedure is as follows: the support point adjusting buckle a is enabled to determine a support position on a workbench, a z-direction rotation degree of freedom is reserved on a long grating reading head a at the support position, the five degrees of freedom of a left side installation arm are limited, the axial movement value of the left side installation arm is measured by combining an axial long grating of the left side installation arm, a plurality of left side laser measuring heads are installed in an array mode through matching with a precise locking nut in a preset installation hole on an installation surface at one end of the left side installation arm, the other end of the left side installation arm is connected to a left side special nut through a pin shaft a, and the horizontal fine adjustment measuring block achieves fine adjustment of the oxy surface of the left side installation arm and provides longitudinal support force of a left adjusting and measuring system A in. The power of the x-axis movement of the left special nut comes from the left x-direction precision lead screw. If the left-side x-direction precise lead screw rotates for a circle, the matched left-side special nut linearly moves a lead in the x direction, the axial movement value of the left-side mounting arm is measured, and the measurement and coarse adjustment of the mounting angle are realized through the conversion of corner relation.
The left special nut and the right special nut are identical in structure, and the inner hole tapping of the left special nut is left-handed, and the inner hole tapping of the right special nut is right-handed. The z-axis of the left special nut is longitudinally provided with a mounting hole which can be connected with one end of a left mounting arm a through a pin shaft. The X-axis tapping in the middle of the left special nut is matched with the X-axis precision lead screw on the left, and the lower part of the left special nut is designed into a V shape to ensure the axial linear motion and the mutual position relation with the supporting position. The reading head of the left-side measuring x-direction precise lead screw displacement long grating is fixedly connected with the threaded hole arranged above the central axis of the left-side special nut, and the x-direction displacement value of the left-side special nut is measured for reducing the influence of Abbe errors.
The device realizes six motions of two rotary motions and four linear motions. The two rotational movements are: the left servo motor is connected with and drives the left x-direction precise screw rod to rotate through a coupling a, and the right servo motor is connected with and drives the right x-direction precise screw rod to rotate through a coupling b; the four linear motions are: the left special nut and the right special nut move in the X direction in the V-shaped guide rail on the workbench. The left side mounting arm and the right side mounting arm perform two linear motions in the axial direction of the mounting arms by taking the centers of the pin shaft holes as starting points and taking the supporting position reading heads as evaluation points. Support position holes with different vertical distances from the axes of the left x-direction precise lead screw and the right x-direction precise lead screw are reserved on the workbench, and the arrangement is used for providing an agreed true value parameter for an angle algorithm.
The device also comprises an electric control part, wherein the electric control part consists of a computer, a synchronous data acquisition system and a servo motor driving and controlling system. The measuring and adjusting device is provided with two servo motors and four sensors, the two servo motors are a left servo motor and a right servo motor, and the two servo motors are controlled by a servo motor driving and controlling system driven by a computer. The four sensors are axial long gratings of a left mounting arm, an axial long grating of a right mounting arm, a long grating for measuring the displacement of the x-direction precise lead screw on the right side, and a long grating for measuring the displacement of the x-direction precise lead screw on the left side, and signals of the four sensors are processed by a synchronous data acquisition system and then are transmitted to a computer. And the encoder signal of the servo motor and the data signal of the long grating sensor are finally fed back to the computer. The computer is used for realizing the functions of motor control, measured data receiving and storing, angle algorithm automatic operation, report printing and displaying in the measuring process.
A method for measuring by an adjusting device of a multi-measuring-head installation angle is realized by the following steps:
1) and measuring heads are installed on the left installation arm and the right installation arm through refined locking nuts, and then the position of a supporting point on the workbench is adjusted according to the installation angle input on the computer, so that a vertical distance parameter value d' from the supporting point to the axial lead of the screw can be obtained. The parameter value d 'is an approximate true value with manufacturing errors and mounting errors, and d' is d + ds, wherein d is a true value and ds is an error caused by the manufacturing errors and the mounting errors.
2) Coarse adjustment measurement, and obtaining the axial movement value l of the left mounting arm through the arcsine theorem0Right side mounting arm axial movement value l1The axial long gratings of the left and right mounting arms feed the axial movement of the mounting arms back to the computer after signal processing, and the computer controls the servo motor drive and control system to drive the precise screw rod to rotate so as to realize the L-shaped mounting arm0、l1The movement amount is adjusted, thereby meeting the requirement of installation angle. Then, coarse tuning measurement can be achieved by measuring the long grating data on the mounting arm.
Figure GDA0002893070230000041
Wherein, thetaLeft side of、θRight sideThe angle values measured for the left and right mounting arms. Coarse adjustment 1) the ds manufacturing and mounting errors introduced into the measurement and adjustment of the angle, l obtained in equation (1)0、θLeft side of、l1And thetaRight sideIn practice there will be theoretical deviations. In order to meet the requirement of precise measurement, a corresponding angle measurement and adjustment compensation method is proposed.
3) After coarse tuning, fine tuning is achieved by adopting the inverse cosine theorem: and respectively acquiring the moving value of the mounting arm before and after axial readjustment and the x axial variation difference value of the precise screw rod by adopting the long grating on the mounting arm and the long grating in the axial direction of the screw rod.
Under the condition of positive rotation of the precision lead screw, the arm length grating is installed to obtain the fact that the special nut moves from the position B to the position C, and the variation delta S1. And adjusting the length AB of the corresponding mounting arm obtained by the axial long grating of the screw rod to AC.
Figure GDA0002893070230000051
Wherein, Delta theta1Is the first angular deviation value, Δ S, due to ds1The positive fine adjustment quantity of the precise screw rod x is obtained.
The reverse rotation of the precise screw rod is realized by moving the special nut obtained by mounting the arm length grating from the position B to the position D and changing the quantity delta S2. The length AB of the corresponding mounting arm obtained by the axial long grating of the lead screw is changed to AD.
Figure GDA0002893070230000052
Wherein, Delta theta2A second angular deviation value, Δ S, due to ds2The reverse fine adjustment quantity of the precision screw rod x is obtained.
χ=π-(θLR) (4)
Wherein χ is the angle between the two mounting arms, θL、θRRespectively are the installation angles of the left and right installation arms after fine adjustment.
The angle accuracy is guaranteed by the transmission accuracy of the precise lead screw and the resolution of the long grating, and the influence of the manufacturing and mounting errors of mechanical structure parts in the steps 1) and 2) on the angle can be reduced to the maximum extent. The precise installation angle can be obtained by the precise forward and backward rotation adjustment of the precise screw rod, the synchronous data acquisition and processing of the two long gratings and the computer control.
The method of the invention has the following beneficial effects:
the invention provides a device for adjusting the installation angle of multiple measuring heads, a measuring and compensating method for the first time, and the method can be used for quickly adjusting in a large range during coarse adjustment and then adjusting in a small range and in a small range during fine adjustment, so that the required adjustment time can be greatly shortened during the installation of the laser measuring heads, the accurate and self-adaptive adjustment of the installation angle is improved, and the current situation that the adjustment of the existing device is difficult and has low self-adaptability is greatly improved. The device can be provided with at least more than 2 laser measuring heads, and compared with a single laser measuring or contact type measuring method, the laser measuring efficiency can be improved by more than several times by adopting the invention.
The invention takes the long grating as a precision measurement element of the installation angle adjusting device, overcomes the influence of the self manufacturing error of the device parts on the installation angle, adopts the algorithm 2 to carry out angle compensation, and can furthest reduce the problem of low measurement precision caused by the installation angle error.
Drawings
Fig. 1 is a schematic structural diagram of a multi-gauge head mounting angle adjusting device.
Fig. 2 is a schematic diagram of the structure of the left adjustment and measurement system (a).
Fig. 3 is a schematic view of the structure of the right adjustment and measurement system (B).
Fig. 4 is a schematic structural outline of the special nut 11.
Fig. 5 is a diagram of a multi-stylus mount angle measurement and compensation system.
Fig. 6.1 is a diagram of the principle of coarse tuning implemented by the arcsine theorem.
Fig. 6.2 is a schematic diagram of the implementation of fine tuning by the arccosine theorem.
Fig. 7 is a measurement process flow diagram.
In the figure, 1-left servo motor, 2.1-coupler a, 2.2-coupler b, 3.1-precise ball bearing a, 3.2-precise ball bearing b, 3.3-precise ball bearing c, 3.4-precise ball bearing d, 4-left side x-direction precise screw rod, 5.1-horizontal fine adjustment gauge block a, 5.2-horizontal fine adjustment gauge block b, 6.1-pin shaft a, 6.2-pin shaft b, 7.1-long grating reading head a, 7.2-long grating reading head b, 8-left side installation arm axial long grating, 9-left side installation arm, 10-left side laser measuring head, 11-left side special nut, 12-workbench, 13-right side servo motor, 14-right side x-direction precise screw rod, 15-right side special nut, 16-right side installation arm axial long grating, 17-right laser measuring head, 18-right mounting arm, 19.1-supporting point adjusting buckle a, 19.2-supporting point adjusting buckle B, 20-right side measuring x-direction precise screw rod displacement long grating, 21-left side measuring x-direction precise screw rod displacement long grating, A-left adjusting and measuring system and B-right adjusting and measuring system.
Detailed Description
The present embodiment is further described with reference to the accompanying drawings:
the working principle of the invention is shown in figure 1, each structural member is shown in figures 2-4, and the device for adjusting the installation angle of the multi-measuring-head consists of a workbench (12), a left adjusting and measuring system (A) and a right adjusting and measuring system (B). The left adjusting and measuring system (A) and the right adjusting and measuring system (B) are symmetrically arranged on the workbench (12).
Left adjustment and measurement system (a): a left laser measuring head (10) is fixed on a preset hole at one end of a left mounting arm (9) through a refined locking nut, a left mounting arm axial long grating (8) is mounted in the upper end axial direction of the left mounting arm (9), the other end of the left mounting arm (9) is connected with a left special nut (11) through a pin shaft (6.1), horizontal fine setting gage block a (5.1) links together, left side special nut (11) are connected to left side x to accurate lead screw (4) with the screw mode, accurate dense ball bearing a (3.1) and accurate dense ball bearing b (3.2) are connected to left side x to accurate lead screw (4) both ends in order to realize the location, left side x is connected with left side servo motor (1) through shaft coupling a (2.1) in one side to accurate lead screw (4), long grating reading head a (7.1) is connected with strong point adjustment buckle a (19.1) and is provided the holding power, the effect of long grating reading head a (7.1) is the data of reading left side installation arm axial long grating (8). The left adjusting and measuring system (A) is used for realizing the automatic adjustment of the left mounting angle by driving a servo motor through a computer.
In the right adjustment and measurement system (B): a right laser measuring head (17) is fixed on a preset hole at one end of a right mounting arm (18) through a refined locking nut, an axial long grating (16) of the right mounting arm is arranged in the axial direction of the upper end of the right mounting arm (18), the other end of the right mounting arm (18) is connected with a right special nut (15) through a pin b (6.2), horizontal fine setting gage block b (5.2) link together, special nut (15) in right side are connected to right side x with the screw mode and to accurate lead screw (14), two accurate dense ball bearings c (3.3) and accurate dense ball bearing d (3.4) are connected to right side x to accurate lead screw (14) both ends and are realized the location, right side x is connected with right side servo motor (13) through shaft coupling b (2.2) in one side to accurate lead screw (14), long grating reading head b (7.2) and the strong point adjustment buckle b (19.2) of installation arm are measured to the top and are connected and provide the holding power. The long grating reading head b (7.2) of the upper measuring mounting arm is used for reading data of the axial long grating (16) of the right mounting arm. The right adjusting and measuring system (B) is used for realizing the automatic adjustment of the right installation angle by driving a servo motor through a computer
In the measurement process, the left adjusting and measuring system (A) and the right adjusting and measuring system (B) are two completely symmetrical systems, and the two systems can be operated and measured independently, as shown in figures 2-3. Therefore, the measurement principle is explained by taking the left adjustment and measurement system (a) as an example, and fig. 2 is taken as an example. The support point adjusting buckle a (19.1) is enabled to determine a support position on a workbench (12), a z-direction rotation freedom degree is reserved on the support position of a long grating reading head a (7.1) and is used for limiting five freedom degrees of a left side installation arm (9) and measuring an axial movement value of the left side installation arm (9) by combining an axial long grating (8) of the left side installation arm, a plurality of left side laser measuring heads (10) are installed on an installation surface at one end of the left side installation arm (9) in an array mode through preset installation holes matched with refined locking nuts, the other end of the left side installation arm is connected to a left side special nut (11) through a pin shaft a (6.1), and a horizontal fine adjustment gauge block a (5.1) achieves fine adjustment of an oxy surface of the left side installation arm (9) and provides a longitudinal support force of a left adjusting and measuring system (A) in the z. The power of the x-axis movement of the left special nut (11) comes from the left x-direction precision screw rod (4). If the left-side x-direction precise lead screw (4) rotates for a circle, the matched left-side special nut (11) linearly moves for a lead in the x direction, the axial movement value of the left-side mounting arm (9) is measured, and the measurement and coarse adjustment of the mounting angle are realized through the conversion of corner relation.
The left special nut (11) and the right special nut (15) are identical in structure, the inner hole tapping of the left special nut (11) is left-handed, and the inner hole tapping of the right special nut (15) is right-handed. The structure will be described by taking the left special nut (11) as an example, as shown in fig. 4. The z-axis is provided with a mounting hole in the longitudinal direction and can be connected with one end of a left mounting arm a (9.1) through a pin shaft a (6.1). The X-axis tapping at the middle part of the left special nut (11) is matched with the X-axis precision lead screw (4) at the left, and the lower part is designed into a V shape to ensure the axial linear motion and the mutual position relation with the supporting position. The reading head of the left side measuring x-direction precise lead screw displacement long grating (21) is fixedly connected with a threaded hole arranged above the central axis of the left side special nut (11), and the x axial displacement value of the left side special nut (11) is measured for reducing the influence of Abbe errors.
This embodiment designs and manufactures an adjusting device of a multi-stylus mounting angle by combining a left adjusting and measuring system (a) and a right adjusting and measuring system (B), and describes a measuring and error compensating method using the adjusting device of the angle. According to the embodiment, the mounting angle is adjusted and measured by driving the precise screw rod through the servo motor, a screw rod x axial displacement signal and a mounting arm axial displacement signal generated by a left and right adjusting system in the adjusting process of driving the special nut through the precise screw rod are converted into electric signals through the long grating, the electric signals are input into a computer through data acquisition, automatic adjustment, measurement and error compensation of the mounting angle can be rapidly realized according to coarse adjustment and fine adjustment after data processing and two calculation operations, and a measurement result and a corresponding compensation error can be displayed and printed.
By using the device and the method provided by the embodiment, a plurality of measuring heads can be arranged on the left side installation arm (9) and the right side installation arm (18), the relation between the left installation angle and the right installation angle can be controlled and calculated, the measuring efficiency is improved, the self-adaptability of the device for measurement is enhanced, the adjustment time is saved, the stability of a measuring system is improved, and the measuring efficiency which is higher than that of a single measuring head by a plurality of times or even tens of times is improved.
The mechanical part of this embodiment is shown in fig. 5. Six motions of two rotary motions and four linear motions can be realized. The two rotational movements are: the left servo motor (1) is connected with and drives the left x-direction precise lead screw (4) to rotate through a coupler a (2.1), and the right servo motor (13) is connected with and drives the right x-direction precise lead screw (14) to rotate through a coupler b (2.2); the four linear motions are: the left special nut (11) and the right special nut (15) move in two straight lines along the x direction in the V-shaped guide rail on the workbench (12). The left mounting arm (9) and the right mounting arm (18) perform two linear motions in the mounting arm axial direction with the pin shaft hole center as a starting point and the supporting position reading head as an evaluation point. Support position holes with different vertical distances from the axes of the left x-direction precise lead screw (4) and the right x-direction precise lead screw (14) are reserved on the workbench (12), and the arrangement is used for providing an agreed true value parameter for a following angle algorithm. The length factor of the precise lead screw is considered, the moving range of the special nuts (11, 15) corresponding to the precise lead screw is fixed, and the adjusting range of the angle which can be limited by different supporting positions can be obtained by solving the corner relation conversion of the triangle.
The electric control part of the measuring and adjusting device of the present embodiment is shown in fig. 5. The electric control part of the invention is composed of a computer, a synchronous data acquisition system and a servo motor driving and controlling system. The measuring and adjusting device is internally provided with two servo motors and four sensors, the two servo motors are a left servo motor (1) and a right servo motor (13), and the two servo motors are controlled by a servo motor driving and controlling system driven by a computer. The four sensors are characterized in that the four sensors are a left side mounting arm axial long grating (8), a right side mounting arm axial long grating (16) and a right side measuring x-direction precise screw rod displacement long grating (20), the left side measuring x-direction precise screw rod displacement long grating (21), and signals of the four sensors are processed by a synchronous data acquisition system and then are conveyed to a computer. And the encoder signal of the servo motor and the data signal of the long grating sensor are finally fed back to the computer. The computer in the invention is used for realizing the functions of motor control, measured data receiving and storing, angle algorithm automatic operation, report printing and displaying and the like in the measuring process.
The measuring and compensating method of the adjusting device for the multi-measuring-head installation angle is used.
As shown in fig. 7, the steps of measurement and compensation of the present invention are as follows:
1) according to the position of the supporting point on the mounting angle adjusting workbench (12) input by a computer, the supporting point adjusting buckle (19) is adjusted, and thus the vertical distance parameter value d' from the supporting point to the axis of the precise screw rod can be obtained. Note that the distance parameter is an approximate true value with manufacturing errors and mounting errors, where d is true and ds is the error due to manufacturing errors and mounting errors.
2) As shown in fig. 6.1, coarse tuning is achieved using the arcsine theorem of algorithm 1. The axial movement value l of the left mounting arm (9) can be obtained by the arcsine theorem0Axial displacement value l of right side mounting arm (18)1The axial movement of the mounting arms is fed back to the computer after signal processing by the left and right mounting arm axial long gratings (8, 16), and the computer controls the servo motor driving and controlling system to drive the precise screw rods (4, 14) to rotate, thus being capable of realizing high efficiency,Quick mounting arm0、l1The movement amount is adjusted, thereby meeting the requirement of installation angle. Then, the coarse tuning measurement can be realized by measuring the long grating data on the mounting arm:
Figure GDA0002893070230000101
wherein, thetaLeft side of、θRight sideThe angle values measured for the left and right mounting arms. Coarse adjustment 1) the ds manufacturing and mounting errors introduced into the measurement and adjustment of the angle, l obtained in equation (1)0、θLeft side of、l1And thetaRight sideIn practice there will be theoretical deviations. In order to meet the requirement of precise measurement, a corresponding angle measurement and adjustment compensation method is proposed.
3) As shown in fig. 6.2, the method for compensating by the adjusting device of the multi-measuring-head installation angle is characterized in that after the coarse adjustment, the fine adjustment is realized by using the algorithm 2 arccosine law. Axial long gratings (8, 16) on the mounting arms and left and right side x-direction measurement precision lead screw displacement long gratings (20, 21) are adopted to respectively acquire the movement values before and after the axial readjustment of the mounting arms (9, 18) and the x-direction change difference value of the precision lead screw.
The positive rotation condition of the precise screw: mounting arm length grating to obtain special nut moving from B position to C position with variable quantity delta S1. And adjusting the length AB of the corresponding mounting arm obtained by the axial long grating of the screw rod to AC.
Figure GDA0002893070230000102
Wherein, Delta theta is an angle deviation value caused by ds, Delta S1The positive fine adjustment quantity of the precise screw rod x is obtained.
The reverse rotation condition of the precision lead screw: mounting arm length grating to obtain special nut moving from B position to D position with variable quantity delta S2. The length AB of the corresponding mounting arm obtained by the axial long grating of the lead screw is changed to AD.
Figure GDA0002893070230000103
Wherein, Delta theta is an angle deviation value caused by ds, Delta S2The reverse fine adjustment quantity of the precision screw rod x is obtained.
χ=π-(θLR) (8)
Wherein χ is the angle between the left and right mounting arms (9, 18), θL、θRThe installation angles of the left and right installation arms (9, 18) are respectively adjusted.
The angle accuracy is guaranteed by the transmission accuracy of the precise lead screw and the resolution of the long grating, and the influence of the manufacturing and mounting errors of mechanical structure parts in the steps 1) and 2) on the angle can be reduced to the maximum extent. The precise installation angle can be obtained by the precise forward and backward rotation adjustment of the precise screw rod, the synchronous data acquisition and processing of the two long gratings and the computer control.

Claims (4)

1. The utility model provides a multi-measuring-head installation angle's adjusting device which characterized in that: the device consists of a workbench, a left adjusting and measuring system A and a right adjusting and measuring system B; the left adjusting and measuring system A and the right adjusting and measuring system B are symmetrically arranged on the workbench;
left adjustment and measurement system a: the left laser measuring head is fixed on a preset hole at one end of a left mounting arm through a refined locking nut, an axial long grating of the left mounting arm is mounted in the axial direction of the upper end of the left mounting arm, the other end of the left mounting arm is connected with a left special nut and a horizontal fine adjustment gauge block a through a pin shaft a, the left special nut is connected to a left x-direction precision lead screw in a threaded screw hole mode, two ends of the left x-direction precision lead screw are connected with a precision dense ball bearing a and a precision dense ball bearing b to achieve positioning, the left x-direction precision lead screw is connected with a left servo motor through a coupler a at one side, a long grating reading head a is connected with a supporting point adjusting buckle a to provide supporting force, and the long grating reading head a is used for reading data of the axial long grating; the left adjusting and measuring system A is used for realizing the automatic adjustment of the left mounting angle by driving a servo motor through a computer;
right adjustment and measurement system B: the right laser measuring head is fixed on a preset hole at one end of a right mounting arm through a refined locking nut, an axial long grating of the right mounting arm is mounted in the axial direction of the upper end of the right mounting arm, the other end of the right mounting arm is connected with a right special nut and a horizontal fine adjustment gauge block b through a pin shaft b, the right special nut is connected to a right x-direction precision lead screw in a threaded screw hole mode, two precision dense ball bearings c and a precision dense ball bearing d are connected to two ends of the right x-direction precision lead screw to realize positioning, the right x-direction precision lead screw is connected with a right servo motor at one side through a coupler b, and a long grating reading head b of an upper measurement mounting arm is connected with a supporting point adjustment buckle b to; the long grating reading head b of the upper measuring installation arm is used for reading the data of the axial long grating of the right installation arm; the right adjusting and measuring system B is used for realizing the automatic adjustment of the right mounting angle by driving a servo motor through a computer;
in the measuring process, the left adjusting and measuring system A and the right adjusting and measuring system B are completely symmetrical two systems which can independently operate and measure; the left adjustment and measurement system a measurement procedure is as follows: the support point adjusting buckle a is enabled to determine a support position on a workbench, a z-direction rotational degree of freedom is reserved on a long grating reading head a at the support position, the function of the z-direction rotational degree of freedom is to limit five degrees of freedom of a left side installation arm, the axial movement value of the left side installation arm is measured by combining the axial long grating of the left side installation arm, a plurality of left side laser measuring heads are installed in an array mode through matching with a precise locking nut in a preset installation hole on an installation surface at one end of the left side installation arm, the other end of the left side installation arm is connected to a left side special nut through a pin shaft a, and a horizontal fine adjustment measuring block achieves fine adjustment of an oxy surface of the left side installation arm and provides longitudinal; the power of the x-axis motion of the left special nut comes from a left x-direction precision lead screw; if the left-side x-direction precise lead screw rotates for a circle, the matched left-side special nut linearly moves a lead in the x direction, the axial movement value of the left-side mounting arm is measured, and the measurement and coarse adjustment of the mounting angle are realized through the conversion of the corner relation;
the left special nut and the right special nut have the same structure, and the inner hole tapping of the left special nut is left-handed, and the inner hole tapping of the right special nut is right-handed; a mounting hole is longitudinally designed on the z axis of the left special nut and is connected with one end of the left mounting arm through a pin shaft a; the X-axis tapping is matched with the X-axis precision lead screw at the middle part of the left special nut, and the lower part of the left special nut is designed into a V shape to ensure the axial linear motion and the mutual position relation with the supporting position; the reading head of the left-side measuring x-direction precise lead screw displacement long grating is fixedly connected with the threaded hole arranged above the central axis of the left-side special nut, and the x-direction displacement value of the left-side special nut is measured for reducing the influence of Abbe errors.
2. The apparatus for adjusting a mounting angle of a multiple measuring head according to claim 1, wherein: the device realizes six motions of two rotary motions and four linear motions; the two rotational movements are: the left servo motor is connected with and drives the left x-direction precise screw rod to rotate through a coupling a, and the right servo motor is connected with and drives the right x-direction precise screw rod to rotate through a coupling b; the four linear motions are: the left special nut and the right special nut move in a V-shaped guide rail on the workbench along two straight lines in the x direction; the left mounting arm and the right mounting arm perform two linear motions in the axial direction of the mounting arms by taking the centers of the pin shaft holes as starting points and taking the reading heads of the supporting positions as evaluation points; support position holes with different vertical distances from the axes of the left x-direction precise lead screw and the right x-direction precise lead screw are reserved on the workbench, and the arrangement is used for providing an agreed true value parameter for an angle algorithm.
3. The apparatus for adjusting a mounting angle of a multiple measuring head according to claim 1, wherein: the device also comprises an electric control part, wherein the electric control part consists of a computer, a synchronous data acquisition system and a servo motor driving and controlling system; the measuring and adjusting device is provided with two servo motors and four sensors, the two servo motors are a left servo motor and a right servo motor, and the two servo motors are regulated and controlled by a servo motor driving and controlling system driven by a computer; the four sensors are axial long gratings of a left mounting arm, an axial long grating of a right mounting arm, a precise lead screw displacement long grating of a right side measuring x direction, and the precise lead screw displacement long grating of the left side measuring x direction, and signals of the four sensors are processed by a synchronous data acquisition system and then are transmitted to a computer; the encoder signal of the servo motor and the data signal of the long grating sensor are finally fed back to the computer; the computer is used for realizing the functions of motor control, measured data receiving and storing, angle algorithm automatic operation, report printing and displaying in the measuring process.
4. A method for measuring by using the device of claim 1, wherein the device for adjusting the installation angle of the multiple measuring heads is implemented by the following steps:
1) mounting measuring heads on the left mounting arm and the right mounting arm through refined locking nuts, and then adjusting the position of a supporting point on the workbench according to the mounting angle input on the computer, so that a vertical distance parameter value d' from the supporting point to the axial lead of the screw can be obtained; the parameter value d 'is an approximate true value with manufacturing errors and installation errors, and d' is d + ds, wherein d is a true value, and ds is errors caused by the manufacturing errors and the installation errors;
2) coarse adjustment measurement, and obtaining the axial movement value l of the left mounting arm through the arcsine theorem0Right side mounting arm axial movement value l1The axial long gratings of the left and right mounting arms feed the axial movement of the mounting arms back to the computer after signal processing, and the computer controls the servo motor drive and control system to drive the precise screw rod to rotate so as to realize the L-shaped mounting arm0、l1The movement amount is adjusted, so that the requirement of the installation angle is met; then, the coarse adjustment measurement can be realized by measuring the data of the long grating on the mounting arm;
Figure FDA0002903427710000031
wherein, thetaLeft side of、θRight sideAngle values measured for the left and right mounting arms; coarse adjustment 1) the ds manufacturing and mounting errors introduced into the measurement and adjustment of the angleL obtained in formula (1)0、θLeft side of、l1And thetaRight sideIn practice there will be theoretical deviations; in order to meet the requirement of precise measurement, a corresponding angle measurement and adjustment compensation method is provided;
3) after coarse tuning, fine tuning is achieved by adopting the inverse cosine theorem: respectively collecting a moving value before and after the axial readjustment of the mounting arm and an x axial change difference value of the precise screw by adopting a long grating on the mounting arm and a long grating in the axial direction of the screw;
under the condition of positive rotation of the precision lead screw, the arm length grating is installed to obtain the fact that the special nut moves from the position B to the position C, and the variation delta S1(ii) a Adjusting the length AB of the corresponding mounting arm obtained by the axial long grating of the screw rod to AC;
Figure FDA0002903427710000032
wherein, Delta theta1Is the first angular deviation value, Δ S, due to ds1The positive fine adjustment quantity of a precise screw rod x is obtained;
the reverse rotation of the precise screw rod is realized by moving the special nut obtained by mounting the arm length grating from the position B to the position D and changing the quantity delta S2(ii) a The length AB of the corresponding mounting arm is changed to AD by the axial long grating of the lead screw;
Figure FDA0002903427710000041
wherein, Delta theta2A second angular deviation value, Δ S, due to ds2The reverse fine adjustment quantity of a precise screw rod x is obtained;
χ=π-(θLR) (4)
wherein χ is the angle between the two mounting arms, θL、θRRespectively are installation angles of the left installation arm and the right installation arm after fine adjustment;
the angle accuracy is guaranteed by the transmission accuracy of the precise lead screw and the resolution of the long grating, and the influence of the manufacturing and mounting errors of mechanical structure parts in the steps 1) and 2) on the angle can be reduced to the maximum extent; the precise installation angle can be obtained by the precise forward and backward rotation adjustment of the precise screw rod, the synchronous data acquisition and processing of the two long gratings and the computer control.
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