CN108319299A - A kind of regulating device, measurement and the compensation method of more gauge head setting angles - Google Patents
A kind of regulating device, measurement and the compensation method of more gauge head setting angles Download PDFInfo
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- CN108319299A CN108319299A CN201711236549.0A CN201711236549A CN108319299A CN 108319299 A CN108319299 A CN 108319299A CN 201711236549 A CN201711236549 A CN 201711236549A CN 108319299 A CN108319299 A CN 108319299A
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- installing arm
- lead screw
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- measurement
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
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- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of efficient regulating device, measurement and the compensation methodes of more gauge head setting angles, belong to Precision Inspection and technical device and experimental technique field.Measuring device is composed of left and right adjusting and measuring system, left and right measuring system is separately installed with two groups of long gratings, it is co-axially mounted and each by precision lead screw independent operation, separate variation displacement can be measured, to be accurately obtained setting angle by the conversion of corner relationship.The device and method that the present invention proposes specific angle measurement simultaneously.The problem of the present invention overcomes multiple gauge head setting angle adaptivity differences in non-contact laser measurement and experiment and itself foozles of device parts, in the present invention only need by input left and right gauge head needed for angle parameter value can automatic and accurate adjustment setting angle, during the adjustment, the method for proposing adaptive coarse adjustment and accurate adjustment can automatically compensate angular deviation caused by foozle after measurement method using the present invention.
Description
Technical field
When carrying out accurate measurement to component of machine the present invention relates to a kind of two non-contact laser gauge heads, gauge head installation
The self-adjustable device of angle, angle measurement and error compensating method, belong to Precision Inspection and technical device and experiment
Technical field.
Background technology
Angle is one of parameter important in precision measurement, and angle is in necks such as national defense industry, scientific research and machine-building
Belong to indispensable base values in domain.It is carried out using the non-contact optical measuring instrument parts complex-curved to machinery
When measurement, laser is often projected to measured surface according to its measuring principle at an angle, that is, is needed before the start of the measurement
Multiple gauge head space angle parameters are adjusted, the algorithm requirement for complying with measurement meets again in gauge head useful range.Generally use
Two even more than laser feeler, object complicated to surface and that symmetrical changing rule property is presented measures, such as various
The gear of type, bearing, worm and gear etc..In order to describe conveniently, above-mentioned Non-contact Laser Probe is referred to as gauge head herein.
The advantages of multiple gauge heads are carried out at the same time measurement be that the speed and efficiency of measurement can be greatly improved, and multiple gauge heads are to gear or so
The flank of tooth measures simultaneously, can realize than only with the high several times of a gauge head or even the measurement efficiency of decades of times, not only saving angle again
The time of adjustment and calibration, and greatly ensure that measurement accuracy and repeatability.
When laser feeler is tested and measured, conventional angle adjustment has 2 kinds of modes：(1) angle is determined with adjustment block.It is right
Same model product measures, and setting angle is mainly using the mode finely tuned again after adjustment block, and angle parameter is relatively steady
It is fixed.The characteristics of adjustment block be it is simple in structure, it is at low cost, but flexibility is poor.(2) mechanical structure, which changes, determines angle.To different shaped
Number, the measurement of different object according to the angle parameter that corresponding algorithm requirements generally require substantially to adjust be currently with machinery
Adjustment mode based on arm, multivariant measuring table, its main feature is that precision is high, but it is complicated, it is expensive etc..Institute
It need to install that multiple mechanical arm costs are too high unrealistic, and adaptivity is not strong there are multiple gauge heads with the adjustment of, traditional angle
Disadvantage.
It is well known that the foozle of parts is can not to eliminate, dimensional tolerance may be up to 1 μm in precision instrument, axis
It is that rotating accuracy can reach 0.01~0.02 μm or smaller.The foozle of parts can be introduced into the installation of whole equipment with
And measure, to the measurement accuracy extreme influence of device and equipment.In automation control, by corresponding backoff algorithm and
The data of high speed synchronous sample, constantly accurately adjusting design factors to preset value just seems very crucial, can greatly subtract
Angular deviation caused by small foozle.
Invention content
Multiple gauge head setting angle adaptivity differences and device zero in measuring and test the present invention overcomes non-contact laser
The problem of component itself foozle, only being needed in of the invention can be certainly by the angle parameter value needed for input left and right gauge head
Dynamic accurate adjustment setting angle, during the adjustment, it is proposed that the method for adaptive coarse adjustment and accurate adjustment, survey using the present invention
Angular deviation caused by foozle can be compensated automatically after amount method, promote higher than single gauge head several times or even tens of
Measurement efficiency again.
The present invention carries out principle wound for the defect of existing conventional angle method of adjustment and the foozle of parts
Newly, basic thought is：1, error can not be eliminated, but can compensate as possible.2, fine measuring instrument is first accurate with abbe's principle
Then.In order to meet this two criterion, breaks traditional angular adjustment apparatus or instrument flexibility is poor, complex structure and other problems.This
Invention proposes the mode that two different algorithms combine, and is compensated to angular deviation caused by component of machine foozle,
Accurate adjustment is realized to angle, and is simplified in structure, is adjusted the angle, is realized using pattern displacement variable quantity automatic and accurate
The principle innovation of setting angle adjustment and its experimental technique.
The present invention adopts the following technical scheme that：
A kind of regulating device of more gauge head setting angles is by workbench, left adjusting and measuring system A and right adjustings measurement
System B is formed.Left adjusting and measuring system A are symmetrical arranged on the table with right adjusting and measuring system B.
In left adjusting and measuring system A：Left side laser feeler is fixed on left side installing arm one end by refined locking nut
Preset holes on, axially long grating is mounted on the upper end axis direction of left side installing arm to left side installing arm, and left side installing arm is another
End is linked together by axis pin and the special nut in left side, WidFin gauge block a, and the special nut in left side is connected in a manner of threaded screw bore
Left side x is connected to precision lead screw, left side x is to precision lead screw both ends connection precision sealed bead bearing a and precision sealed bead bearing b to realize
Positioning, left side x are connect by shaft coupling a with left side servo motor to precision lead screw in side, long grating reading head a and supporting point
Adjustment buckle a connections provide support force, and the effect of long grating reading head a is the data of the axial long grating of installing arm on the left of reading.
Left adjusting and measuring system A effects are that the adjust automatically of left side setting angle is realized by computer drives servo motor.
In right adjusting and measuring system B：Right side laser feeler is fixed on right side installing arm one end by refined locking nut
On preset holes, right side installing arm axially long grating be mounted on right side installing arm upper end axis direction, the right side installing arm other end
It is linked together by axis pin b and the special nut in right side, WidFin gauge block b, the special nut in right side is connected in a manner of threaded screw bore
Right side x is connected to precision lead screw, right side x connects two precision sealed bead bearing c to precision lead screw both ends and accurate sealed bead bearing d is real
It now positions, right side x is connect by shaft coupling b with right side servo motor to precision lead screw in side, and top measures the length of installing arm
Grating reading head b adjusts buckle b with supporting point and connect offer support force.Top measure installing arm long grating reading head b to
Read the data of the axial long grating of right side installing arm.Its effect of right adjusting and measuring system B is by computer drives servo electricity
Machine realizes the adjust automatically of right side setting angle
In measurement process, left adjusting and measuring system A and right adjusting are full symmetric two with measuring system B and are
System, two systems can respectively independent operation, measurements.Left adjusting and measuring system A measurement process are as follows：Enable supporting point adjustment card
It detains a and determines that Support Position, long grating reading head a are stayed there are one z to rotary freedom on Support Position, made on the table
With being five degree of freedom of limitation left side installing arm, and combine left side installing arm axially on the left of long grating measuring installing arm axial direction
Movement value presets mounting hole cooperation on the mounting surface of left side installing arm one end and refines locking nut array and installs multiple left side laser
Gauge head, the other end are connected to the special nut in left side by axis pin a, and WidFin gauge block realizes the faces the oxy fine tuning of left side installing arm
And provide longitudinal holding power of the left adjusting with measuring system A in z-axis direction.The x-axis of the special nut in left side is come to the power of movement
Derived from left side x to precision lead screw.If left side x to one circle of precision lead screw rotation, if the special nut in matching left side x to
Horizontal linearity moves a helical pitch, measures the axial movement value of left side installing arm, and established angle is realized by the conversion of corner relationship
The measurement and coarse adjustment of degree.
The special nut in left side is identical with the special nut structure in right side, and the endoporus tapping of the special nut in left side is left-handed, right side
The endoporus tapping of special nut is dextrorotation.The z-axis longitudinal design of the special nut in left side has mounting hole, can be pacified by axis pin and left side
One end of dress arm a is connected.X-axis matches with left side x to precision lead screw to tapping in the middle part of the special nut in left side, lower part design
Designed for V-shaped ensure axial linear movement and with the mutual alignment relation of Support Position.X is surveyed into precision lead screw position in left side
It moves the threaded hole being arranged above the reading head and the special nut central axis in left side of long grating to be fixedly connected, to reduce Abbe
The influence of error measures the special nut x-axis in left side to displacement magnitude.
The present apparatus realizes two rotary motions and totally six movements of four linear motions.Two rotary motions are：It watches in left side
Take motor drives rotary motions and right side servo motor of the left side x to precision lead screw to pass through shaft coupling b by shaft coupling a connections
Rotary motions of the connection driving right side x to precision lead screw；Four linear motions are：The special nut in left side, the special nut in right side exist
In the x-direction two linear motions on workbench in V-type rail.Left side installing arm, right side installing arm are in respective pin shaft hole
The heart is two linear motions of starting point point progress installing arm axis direction by evaluation of Support Position reading head.It is pre- on the table
The Support Position hole with the different vertical distance of the axis of left side x to precision lead screw, right side x to precision lead screw is stayed, is arranged in this way
Effect is to provide a conventional true value parameter for angle algorithm.
The present apparatus further includes electric control part, and electric control part is driven by computer, Channels Synchronous Data Acquisition System and servo motor
It is formed with control system.It measures, there are two servo motor and four sensors, two servo motors i.e. left sides in adjusting apparatus
Servo motor and right side servo motor, the two servo motors are all to be driven by computer drives servo motor and control system
Regulated and controled.Four sensors are that axially axially x is surveyed to precision in long grating, right side to left side installing arm for long grating, right side installing arm
X is surveyed to the long grating of precision lead screw displacement in the long grating of leading screw displacement, left side, and the signal of this four sensors is by synchronous data collection system
After system is handled, it is delivered to computer.The code device signal of servo motor, long grating sensor data-signal are finally fed back
Into computer.Computer controls for realizing measurement process motor, measurement data receives and storage, angle algorithm are transported automatically
Calculation, printing reports and display function.
A kind of method that the regulating device of more gauge head setting angles measures, this method are realized according to the following steps：
1) gauge head is installed by refined locking nut in left installing arm, right installing arm, is then inputted according on computer
Setting angle adjustment workbench on supporting point position, can thus be supported a little to the vertical range of leading screw axial line ginseng
Numerical value d '.Parameter value d ' is an approximate true value with foozle and installation error, and it is true value to enable d '=d+ds, wherein d,
Ds is error caused by foozle and installation error.
2) coarse adjustment measures, and left side installing arm axial movement value l is acquired by arcsine theorem0, right side installing arm axially move
Dynamic value l1, axially installing arm axial internal clearance is fed back computer to left and right side installing arm by long grating after signal processing, is calculated
Machine control servomotor drives to be rotated with control system driving precision lead screw, realizes the l of installing arm0、l1Amount of movement, to meet
Setting angle requirement.So, coarse adjustment measurement needs the long raster data measurement in installing arm can be realized.
Wherein, θIt is left、θIt is rightFor the angle value of left and right installation arm measure.In coarse adjustment 1) described in ds foozles and installation error
It is introduced to the measurement and adjustment of angle, the l obtained in formula (1)0、θIt is left、l1And θIt is rightActually can all there be stripped deviation.For
Meet accurate measurement demand, herein proposes the compensation method of corresponding angle measurement and adjustment.
3) after coarse adjustment, accurate adjustment is realized using anticosine theorem：Using in installing arm long grating and leading screw it is axial
Long grating acquires installing arm and axially adjusts front and back movement value and precision lead screw x-axis again to variation difference respectively.
Precision lead screw rotates forward situation, and installation brachium grating obtains special nut and is moved to location of C, variation delta from B location
S1.Axially long grating obtains corresponding installation arm lengths AB and adjusts to AC leading screw.
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S1For precision lead screw x forward direction amount trimmeds.
Precision lead screw Reversion, installation brachium grating obtain special nut and are moved to the positions D, variation delta from B location
S2.Axially long grating obtains corresponding installation arm lengths AB and is changed to AD leading screw.
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S2For the reversed amount trimmeds of precision lead screw x.
χ=π-(θL+θR) (4)
Wherein, χ is the angle between two installing arms, θL、θREstablished angle after respectively left and right installing arm accurate adjustment.
With precision lead screw transmission accuracy and long grating resolution come the angular accuracy ensured, step can be reduced to greatest extent
1), 2) in mechanical components influence of the manufacturing and fixing error to angle.By precision lead screw forward and backward accurate adjustment, two
Synchronous data collection, processing and the computer control of a long grating, can be obtained accurate setting angle.
The method of the present invention has the advantages that：
Present invention firstly provides a kind of regulating device, measurement and the compensation methodes of more gauge head setting angles, utilize this method
It can quickly be adjusted on a large scale in coarse adjustment, then small range adjusts by a small margin when accurate adjustment, so laser feeler can be great when installing
Adjustment time needed for shortening improves accurate, the adaptive adjustment of setting angle, greatly improves existing device and adjusts difficulty certainly
The not high present situation of adaptability.Few 2 or more laser feelers are can mount on the device, with single laser measurement or contact
Method measurement method is compared, and after applying the present invention, several times or more can be improved in laser measurement efficiency.
Accurate measurement element of the present invention using long grating as setting angle regulating device, overcomes device parts itself
Foozle is influenced caused by setting angle, is carried out angle compensation using algorithm 2, can be reduced setting angle error to greatest extent
Caused by the low problem of measurement accuracy.
Description of the drawings
Fig. 1 is more gauge head setting angle regulating device structural schematic diagrams
Fig. 2 is the structural schematic diagram of left adjusting and measuring system (A)
Fig. 3 is the structural schematic diagram of right adjusting and measuring system (B)
Fig. 4 is the construction profile schematic diagram of special nut 11
Fig. 5 is measurement and the compensation system figure of more gauge head setting angles
Fig. 6 .1 are that arcsine theorem realizes coarse adjustment schematic diagram
Fig. 6 .2 are that anticosine theorem realizes accurate adjustment schematic diagram
Fig. 7 is measurement process flow chart
In figure, servo motor on the left of 1-, 2.1 shaft coupling a, 2.2- shaft coupling b, 3.1, accurate sealed bead bearing a, 3.2, accurate
Sealed bead bearing b, 3.3, x is to precision lead screw on the left of accurate sealed bead bearing c, 3.4- precision sealed bead bearing d, 4-, 5.1, WidFin
Gauge block a, 5.2- WidFin gauge block b, 6.1, axis pin a, 6.2- axis pin b, 7.1, long grating reading head a, 7.2- long grating readings
Head b, the axial long grating of installing arm on the left of 8-, installing arm on the left of 9-, laser feeler on the left of 10-, special nut on the left of 11-, 12- works
Make platform, servo motor on the right side of 13-, x is to precision lead screw on the right side of 14-, special nut on the right side of 15-, the axial long light of installing arm on the right side of 16-
Grid, laser feeler on the right side of 17-, installing arm on the right side of 18-, 19.1, supporting point adjustment buckle a, 19.2- supporting points adjustment buckle b,
X is surveyed on the right side of 20- to the long grating of precision lead screw displacement, 21- surveys in left side x to the long grating of precision lead screw displacement, the left adjustings of A- and measurement
System, the right adjustings of B- and measuring system.
Specific implementation mode
The present embodiment is described further below in conjunction with the accompanying drawings：
The operation principle of the present invention is as shown in Figure 1, shown in each structural member Fig. 2-4, a kind of tune of more gauge head setting angles
Regulating device is made of workbench (12), left adjusting and measuring system (A) and right adjusting measuring system (B).Left adjusting and survey
Amount system (A) is symmetrical arranged with right adjusting and measuring system (B) on workbench (12).
In left adjusting and measuring system (A)：Left side laser feeler (10) is fixed on left side installation by refined locking nut
On the preset holes of arm (9) one end, left side installing arm axially long grating (8) be mounted on left side installing arm (9) upper end axis direction,
Installing arm (9) other end in left side is connected to one by axis pin (6.1) and the special nut in left side (11), WidFin gauge block a (5.1)
It rises, the special nut in left side (11) is connected to left side x to precision lead screw (4) in a manner of threaded screw bore, and left side x is to precision lead screw (4)
Both ends connection precision sealed bead bearing a (3.1) and precision sealed bead bearing b (3.2) is to realize that positioning, left side x exist to precision lead screw (4)
Side is connect by shaft coupling a (2.1) with left side servo motor (1), long grating reading head a (7.1) and supporting point adjustment buckle a
(19.1) connection provides support force, and the effect of long grating reading head a (7.1) is to read left side installing arm axially long grating (8)
Data.Left adjusting and measuring system (A) effect are that the automatic tune of left side setting angle is realized by computer drives servo motor
It is whole.
In right adjusting and measuring system (B)：Right side laser feeler (17) is fixed on right side installation by refined locking nut
On the preset holes of arm (18) one end, right side installing arm axially long grating (16) be mounted on right side installing arm (18) upper end axis side
To installing arm (18) other end in right side is connected by axis pin b (6.2) and the special nut in right side (15), WidFin gauge block b (5.2)
It is connected together, the special nut in right side (15) is connected to right side x to precision lead screw (14) in a manner of threaded screw bore, and right side x is to precision
Leading screw (14) both ends connect two precision sealed bead bearing c (3.3) and precision sealed bead bearing d (3.4) realizations position, and right side x is to essence
Close leading screw (14) is connect by shaft coupling b (2.2) with right side servo motor (13) in side, and top measures the long grating of installing arm
Reading head b (7.2) adjusts buckle b (19.2) with supporting point and connect offer support force.Top measures the long grating reading of installing arm
Head b (7.2) is reading the data of the axial long grating (16) of right side installing arm.Its effect is logical with measuring system (B) for right adjusting
Cross the adjust automatically that computer drives servo motor realizes right side setting angle
In measurement process, left adjusting and measuring system (A) and right adjust with measuring system (B) are full symmetric two
System, two systems can respectively independent operation, measure, as Figure 2-3.Therefore, by taking left adjusting and measuring system (A) as an example
Principle explanation is measured, by taking Fig. 2 as an example.Supporting point adjustment buckle a (19.1) is enabled to determine Support Position on workbench (12),
Long grating reading head a (7.1) stays there are one z to rotary freedom on Support Position, and effect is limitation left side installing arm (9)
Five degree of freedom, and combine left side installing arm axially long grating (8) measure the axial movement value of left side installing arm (9), left side
Mounting hole cooperation is preset on the mounting surface of installing arm (9) one end refines the multiple left side laser feelers of locking nut array installation
(10), the other end is connected to the special nut (11) in left side by axis pin a (6.1), and WidFin gauge block (5 I) realizes left side installation
It finely tunes and longitudinal holding power of the left adjusting with measuring system (A) in z-axis direction is provided in the faces oxy of arm (9).The special nut in left side
(11) power resources from x-axis to movement in left side x to precision lead screw (4).If left side x is enclosed to precision lead screw (4) rotation one,
The special nut in matching left side (11) then moves a helical pitch in x to horizontal linearity, measures the axial direction of left side installing arm (9)
Movement value realizes the measurement and coarse adjustment of setting angle by the conversion of corner relationship.
The special nut in left side (11) is identical with right side special nut (15) structure, the endoporus tapping of the special nut in left side (11)
Be left-handed, the special nut in right side (15) endoporus tapping it is dextrorotation.Structure is illustrated by taking the special nut in left side (11) as an example,
As shown in Figure 4.Z-axis longitudinal design mounting hole can be connected by axis pin (6 I) with one end of left side installing arm a (9.1).On a left side
X-axis matches with left side x to precision lead screw (4) to tapping in the middle part of the special nut in side (11), and lower part is designed as V-shaped design and ensures
Axial linear movement and the mutual alignment relation with Support Position.X is surveyed into the long grating of precision lead screw displacement (21) in left side
Reading head is fixedly connected with the threaded hole being arranged above left side special nut (11) central axis, to reduce Abbe error
It influences, measures special nut (11) x-axis in left side to displacement magnitude.
The present embodiment is designed and manufactured to be composed of left adjusting and measuring system (A) and right adjusting and measuring system (B)
A kind of regulating device of more gauge head setting angles, and illustrate the measurement and the error compensating method that use the regulating device of the angle.
The present embodiment drives precision lead screw to realize and adjusts and measure to setting angle by servo motor, by long grating by left and right adjusting
The leading screw x-axis that system drives special nut adjustment to generate in the process in precision lead screw is believed to displacement signal and installing arm axial displacement
Number it is changed into electric signal, input computer is acquired through data, it can be according to coarse adjustment and accurate adjustment after operations are calculated in data processing and two kinds
Adjust automatically, measurement and the error compensation of setting angle are fast implemented, and can show and print measurement result and corresponding compensation
Error.
The device and method provided using the present embodiment can be pacified in left side installing arm (9) and right side installing arm (18)
Multiple gauge heads are filled, realizes that the relationship between the setting angle of left and right is controllable, can calculate, improve the efficiency of measurement, intensifier measures
Adaptivity, save adjustment time, improve the stability of measuring system, promote several times higher than single gauge head or even decades of times
Measurement efficiency.
The mechanical part of the present embodiment, as shown in Figure 5.Two rotary motions and four linear motions totally six fortune can be achieved
It is dynamic.Two rotary motions are：Left side servo motor (1) drives left side x to precision lead screw (4) by shaft coupling a (2.1) connections
Rotary motion and right side servo motor (13) drive rotations of the right side x to precision lead screw (14) by shaft coupling b (2.2) connections
Movement；Four linear motions are：The special nut in left side (11), the special nut in right side (15) are on workbench (12) in V-type rail
In the x-direction two linear motion.Left side installing arm (9), right side installing arm (18) using respective pin shaft hole center as starting point with
Support Position reading head is two linear motions that evaluation point carries out installing arm axis direction.It is reserved on workbench (12) and a left side
Side x is arranged in this way to precision lead screw (4), right side x to the Support Position hole of the different vertical distance of axis of precision lead screw (14)
Effect is to provide a conventional true value parameter for subsequent angle algorithm.Consider precision lead screw length factor, corresponding spy
Different nut (11,15) moving range is certain, can be converted by solving the corner relationship of triangle in the present invention, obtain difference
Support Position can limit the adjusting range of angle.
The measurement of the present embodiment, the electric control part of adjusting apparatus, as shown in Figure 5.The present invention electric control part by computer,
Channels Synchronous Data Acquisition System and servo motor driving are formed with control system.It measures, there are two servo motors in adjusting apparatus
With four sensors, two servo motors are left side servo motor (1) and right side servo motor (13), the two servo motors are all
It is to be regulated and controled by the driving of computer drives servo motor and control system.Four sensors are left side installing arm axially long light
Axially x is surveyed to the long grating of precision lead screw displacement (20) in long grating (16), right side for grid (8), right side installing arm, and x is surveyed to precision in left side
The long grating of leading screw displacement (21) is delivered to calculating after the signals of this four sensors is handled by Channels Synchronous Data Acquisition System
Machine.The code device signal of servo motor, long grating sensor data-signal are finally fed back in computer.Meter in the present invention
Calculation machine is for realizing the control of measurement process motor, measurement data reception and storage, the automatic operation of angle algorithm, printing reports and shows
The functions such as show.
Use the measurement and compensation method of the regulating device of above-mentioned more gauge head setting angles.
As shown in fig. 7, the step of measurement and compensation of the present invention, is as follows：
1) according to the supporting point position on the setting angle adjustment workbench (12) inputted on computer, supporting point tune is adjusted
Whole buckle (19) can complete, and can thus be supported a little to the vertical range parameter value d ' of precision lead screw axial line.Pay attention to this
A distance parameter is an approximate true value with foozle and installation error, and it is true value to enable d '=d+ds, wherein d, and ds is
Error caused by foozle and installation error.
2) it as shown in Fig. 6 .1, realizes coarse adjustment, uses 1 arcsine theorem of algorithm.Left side peace can be acquired by arcsine theorem
Fill arm (9) axial movement value l0, right side installing arm (18) axial movement value l1, axially long grating (8,16) will for left and right side installing arm
Installing arm axial internal clearance, feeds back computer after signal processing, and computer-controlled servo motor driving drives with control system
Precision lead screw (4,14) rotates, can l that is efficient, fast implementing installing arm0、l1Amount of movement, to meet setting angle requirement.That
, the measurement of coarse adjustment needs the long raster data measurement in installing arm can be realized：
Wherein, θIt is left、θIt is rightFor the angle value of left and right installation arm measure.In coarse adjustment 1) described in ds foozles and installation error
It is introduced to the measurement and adjustment of angle, the l obtained in formula (1)0、θIt is left、l1And θIt is rightActually can all there be stripped deviation.For
Meet accurate measurement demand, herein proposes the compensation method of corresponding angle measurement and adjustment.
3) as shown in Fig. 6 .2, the method that the regulating devices of more gauge head setting angles a kind of compensates, feature
It is, after above-mentioned coarse adjustment, accurate adjustment is realized using 2 anticosine theorem of algorithm.Using in installing arm the long grating of axial direction (8,
16) and left and right side surveys x to the long grating of precision lead screw displacement (20,21), before and after acquisition installing arm (9,18) axially adjusts again respectively
Movement value and precision lead screw x-axis to variation difference.
Precision lead screw rotates forward situation：Installation brachium grating obtains special nut and is moved to location of C, variation delta from B location
S1.Axially long grating obtains corresponding installation arm lengths AB and adjusts to AC leading screw.
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S1For precision lead screw x forward direction amount trimmeds.
Precision lead screw Reversion：Installation brachium grating obtains special nut and is moved to the positions D, variation delta from B location
S2.Axially long grating obtains corresponding installation arm lengths AB and is changed to AD leading screw.
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S2For the reversed amount trimmeds of precision lead screw x.
χ=π-(θL+θR) (8)
Wherein, angles of the χ between left and right installing arm (9,18), θL、θRAfter respectively left and right installing arm (9,18) accurate adjustment
Respective established angle.
With precision lead screw transmission accuracy and long grating resolution come the angular accuracy ensured, step can be reduced to greatest extent
1), 2) in mechanical components influence of the manufacturing and fixing error to angle.By precision lead screw forward and backward accurate adjustment, two
Synchronous data collection, processing and the computer control of a long grating, can be obtained accurate setting angle.
Claims (6)
1. a kind of regulating device of more gauge head setting angles, it is characterised in that：By workbench, it is left adjusting and measuring system A and
Right adjusting measuring system B is formed；Left adjusting and measuring system A are symmetrical arranged on the table with right adjusting and measuring system B；
In left adjusting and measuring system A：Left side laser feeler is fixed on the pre- of left side installing arm one end by refining locking nut
It sets on hole, axially long grating is mounted on the upper end axis direction of left side installing arm to left side installing arm, and the left side installing arm other end is logical
It crosses axis pin to link together with the special nut in left side, WidFin gauge block a, the special nut in left side is connected in a manner of threaded screw bore
To precision lead screw, it is fixed that left side x is realized left side x to precision lead screw both ends connection precision sealed bead bearing a and precision sealed bead bearing b
Position, left side x are connect by shaft coupling a with left side servo motor to precision lead screw in side, long grating reading head a and supporting point tune
Whole buckle a connections provide support force, and the effect of long grating reading head a is to read the data of the axial long grating of left side installing arm；It is left
It adjusts and measuring system A effects is to realize the adjust automatically of left side setting angle by computer drives servo motor；
In right adjusting and measuring system B：It is preset that right side laser feeler by refined locking nut is fixed on right side installing arm one end
Kong Shang, axially long grating is mounted on the upper end axis direction of right side installing arm to right side installing arm, and the right side installing arm other end passes through
Axis pin b links together with the special nut in right side, WidFin gauge block b, and the special nut in right side is connected in a manner of threaded screw bore
Right side x is to precision lead screw, and right side x connects two precision sealed bead bearing c to precision lead screw both ends and accurate sealed bead bearing d is realized and determined
Position, right side x are connect by shaft coupling b with right side servo motor to precision lead screw in side, and top measures the long grating of installing arm
Reading head b adjusts buckle b with supporting point and connect offer support force；Top measures the long grating reading head b of installing arm to read
The data of the axial long grating of right side installing arm；Its effect of right adjusting and measuring system B is real by computer drives servo motor
The adjust automatically of existing right side setting angle.
2. a kind of regulating device of more gauge head setting angles according to claim 1, it is characterised in that：In measurement process
In, left adjusting and measuring system A and right adjust with measuring system B are full symmetric two systems, and two systems can be respective
Independent operation, measurement；Left adjusting and measuring system A measurement process are as follows：Supporting point adjustment buckle a is enabled to determine branch on the table
Position is supportted, long grating reading head a stays there are one z to rotary freedom on Support Position, and effect is limitation left side installing arm
Five degree of freedom, and combine left side installing arm axially on the left of long grating measuring installing arm axial movement value, left side installing arm
Mounting hole cooperation is preset on the mounting surface of one end and refines the multiple left side laser feelers of locking nut array installation, and the other end passes through pin
Axis a is connected to the special nut in left side, and WidFin gauge block realizes that the faces oxy of left side installing arm finely tune and provide left adjusting and measurement
Longitudinal holding powers of the system A in z-axis direction；Power resources from the x-axis of the special nut in left side to movement in left side x to accurate silk
Thick stick；If left side x to one circle of precision lead screw rotation, moves one if the special nut in matching left side in x to horizontal linearity
Helical pitch measures the axial movement value of left side installing arm, and the measurement and coarse adjustment of setting angle are realized by the conversion of corner relationship.
3. a kind of regulating device of more gauge head setting angles according to claim 1, it is characterised in that：The special nut in left side
Identical with the special nut structure in right side, the endoporus tapping of the special nut in left side, which is left-handed, the special nut in right side endoporus tapping, is
Dextrorotation；The z-axis longitudinal design of the special nut in left side has mounting hole, can be connected with one end of left side installing arm a by axis pin；
X-axis matches with left side x to precision lead screw to tapping in the middle part of the special nut in left side, and lower part is designed as V-shaped design and ensures axially
Linear movement and mutual alignment relation with Support Position；By left side survey reading head from x to the long grating of precision lead screw displacement with
The threaded hole being arranged above the special nut central axis in left side is fixedly connected, and to reduce the influence of Abbe error, is measured left
The special nut x-axis in side is to displacement magnitude.
4. a kind of regulating device of more gauge head setting angles according to claim 1, it is characterised in that：The present apparatus realizes two
A rotary motion and totally six movements of four linear motions；Two rotary motions are：Left side servo motor is connected by shaft coupling a
Rotary motions of the driving left side x to precision lead screw connects driving right side x to accurate silk with right side servo motor by shaft coupling b
The rotary motion of thick stick；Four linear motions are：The special nut in left side, the special nut in right side on the table in V-type rail along x
Two linear motions in direction；Left side installing arm, right side installing arm are read as starting point with Support Position using respective pin shaft hole center
Head is two linear motions that evaluation point carries out installing arm axis direction；It reserves on the table with left side x to precision lead screw, the right side
The Support Position hole of the different vertical distance of axis of side x to precision lead screw, the effect being arranged in this way are to provide one for angle algorithm
A conventional true value parameter.
5. a kind of regulating device of more gauge head setting angles according to claim 1, it is characterised in that：The present apparatus further includes
Electric control part, electric control part are driven by computer, Channels Synchronous Data Acquisition System and servo motor and are formed with control system；It surveys
There are two servo motor and four sensors, two servo motors i.e. left side servo motor and right side servos in amount, adjusting apparatus
Motor, the two servo motors are regulated and controled by the driving of computer drives servo motor and control system；Four sensings
Device is that axially axially x is surveyed to the long grating of precision lead screw displacement, a left side in long grating, right side to left side installing arm for long grating, right side installing arm
X is surveyed to the long grating of precision lead screw displacement in side, after the signals of this four sensors is handled by Channels Synchronous Data Acquisition System, conveying
To computer；The code device signal of servo motor, long grating sensor data-signal are finally fed back in computer；Computer
For realizing the control of measurement process motor, measurement data receives and storage, the automatic operation of angle algorithm, printing reports and display work(
Energy.
6. the method that a kind of regulating device of the more gauge head setting angles carried out using claim 1 described device is measured,
This method is realized according to the following steps：
1) gauge head is installed by refined locking nut in left installing arm, right installing arm, then according to the peace inputted on computer
The supporting point position on angle adjustment workbench is filled, can be thus supported a little to the vertical range parameter value of leading screw axial line
d’；Parameter value d ' is an approximate true value with foozle and installation error, and it is true value to enable d '=d+ds, wherein d, and ds is
Error caused by foozle and installation error；
2) coarse adjustment measures, and left side installing arm axial movement value l is acquired by arcsine theorem0, right side installing arm axial movement value
l1, axially installing arm axial internal clearance is fed back computer, computer control to left and right side installing arm by long grating after signal processing
Servo motor driving processed and control system driving precision lead screw rotation, realize the l of installing arm0、l1Amount of movement, to meet installation
Angle requirement；So, coarse adjustment measurement needs the long raster data measurement in installing arm can be realized；
Wherein, θIt is left、θIt is rightFor the angle value of left and right installation arm measure；In coarse adjustment 1) described in ds foozles and installation error introduce
To the measurement and adjustment of angle, the l that is obtained in formula (1)0、θIt is left、l1And θIt is rightActually can all there be stripped deviation；In order to full
Sufficient accurate measurement demand, herein proposes the compensation method of corresponding angle measurement and adjustment；
3) after coarse adjustment, accurate adjustment is realized using anticosine theorem：Using the long light of long grating and leading screw axial direction in installing arm
Grid acquire installing arm and axially adjust front and back movement value and precision lead screw x-axis again to variation difference respectively；
Precision lead screw rotates forward situation, and installation brachium grating obtains special nut and is moved to location of C, variation delta S from B location1；Silk
Axially long grating obtains corresponding installation arm lengths AB and adjusts to AC thick stick；
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S1For precision lead screw x forward direction amount trimmeds；
Precision lead screw Reversion, installation brachium grating obtain special nut and are moved to the positions D, variation delta S from B location2；Silk
Axially long grating obtains corresponding installation arm lengths AB and is changed to AD thick stick；
Wherein, Δ θ is angu-lar deviation caused by ds, Δ S2For the reversed amount trimmeds of precision lead screw x；
χ=π-(θL+θR) (4)
Wherein, χ is the angle between two installing arms, θL、θREstablished angle after respectively left and right installing arm accurate adjustment；
With precision lead screw transmission accuracy and long grating resolution come the angular accuracy that ensures, can reduce to greatest extent step 1),
2) influence of the manufacturing and fixing error of mechanical components to angle in；It is two long by precision lead screw forward and backward accurate adjustment
Synchronous data collection, processing and the computer control of grating, can be obtained accurate setting angle.
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