CN106767512A - Optical element high precision measuring device based on real-time monitoring kinematic error - Google Patents
Optical element high precision measuring device based on real-time monitoring kinematic error Download PDFInfo
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- CN106767512A CN106767512A CN201611251406.2A CN201611251406A CN106767512A CN 106767512 A CN106767512 A CN 106767512A CN 201611251406 A CN201611251406 A CN 201611251406A CN 106767512 A CN106767512 A CN 106767512A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
Optical element high precision measuring device based on real-time monitoring kinematic error, belongs to optical precision measurement field, to solve the problems, such as that existing kinematic error monitoring means can not be met to optical elements of large caliber contour detecting accuracy requirement.X of the present invention to laser interferometer be used to monitor X in real-time displacement, Y-direction guide rail motion process that Y-direction guide rail is moved to straightness error and Y-direction guide rail motion process in X to angle beat；Y-direction Double passage laser interferometer is used for the angle beat of Y-direction in the straightness error and X direction guiding rail motion processes of Y-direction in real-time displacement, the X direction guiding rail motion processes for monitor X direction guiding rails；The confocal gauge head laser interferometer of Z-direction is used to monitor the real-time displacement in the confocal gauge head motion process of Z-direction；The angle beat of confocal laser gauge head Z-direction is obtained by the X of two-way capacitance sensor measurement in real time to displacement difference, and capacitance sensor is used for the X of measurement confocal laser gauge head in real time to straightness error.The present invention is for the detection to optical element.
Description
Technical field
The invention belongs to optical precision measurement field.
Background technology
Detection is the premise of processing, and detection is to having processed directiveness effect.And with electronic computer technology, light in recent years
System manufacturing technology, digital image processing techniques, Machine Manufacturing Technology etc. are continued to develop so as to optical element especially
The detection technique of optical elements of large caliber proposes requirement higher, and optical element contour detecting technology is optical element processing
Important technical so that also the measurement to optical element contourgraph proposes technical indicator higher, except to original
Mechanical structure is optimized and measurement device carries out type selecting, the kinematic error of each direction of motion of contourgraph is monitored and
Compensation is also an important means for improving optical element contour detecting precision, and three tunnel kinematic error monitorings can not meet right
The demand of optical element contour detecting precision, and the error-detecting means being monitored using multipath interference instrument increasingly into
It is an important directions of contourgraph development.
The content of the invention
Can not meet to optical elements of large caliber profile the invention aims to solve existing kinematic error monitoring means
A kind of problem of accuracy of detection demand, there is provided optical element high precision measuring device based on real-time monitoring kinematic error.
Optical element high precision measuring device based on real-time monitoring kinematic error of the present invention, the measurement apparatus include
Two-dimensional gas floating guide rail, laser interferometer module, capacitive sensor modules and confocal laser gauge head；
Laser interferometer module includes X to laser interferometer, Y-direction Double passage laser interferometer, the confocal gauge head laser interference of Z-direction
Instrument, X are to reflection optical flat, Y-direction reflection optical flat and Z-direction reflection optical flat；
Capacitive sensor modules include two-way capacitance sensor and capacitance sensor；
Optical elements of large caliber is placed on the air floating platform above two-dimensional gas floating guide rail；
X to laser interferometer be used to monitor X in real-time displacement, Y-direction guide rail motion process that Y-direction guide rail is moved to straight line
Degree error and Y-direction guide rail motion process in X to angle beat；X is arranged on two-dimensional gas floating guide rail side to reflection optical flat, and with
X is just relative to laser interferometer；
Y-direction Double passage laser interferometer is used for the straight line of Y-direction in real-time displacement, the X direction guiding rail motion processes for monitor X direction guiding rails
The angle beat of Y-direction in degree error and X direction guiding rail motion processes；Y-direction reflection optical flat is arranged on two-dimensional gas floating guide rail side, and with
Y-direction Double passage laser interferometer is just relative；
The confocal gauge head laser interferometer of Z-direction is used to monitor the real-time displacement in the confocal gauge head motion process of Z-direction；Z-direction reflects
Optical flat is arranged on two-dimensional gas floating guide rail top, and just relative with the confocal gauge head laser interferometer of Z-direction；
Confocal laser gauge head is arranged on the surface of two-dimensional gas floating guide rail, and two-way capacitance sensor is arranged on confocal laser survey
The side of head, and in YZ planes, capacitance sensor is arranged on the side of confocal laser gauge head, and in XZ planes, swash
The angle beat of the confocal gauge head Z-direction of light is obtained by the X of two-way capacitance sensor measurement in real time to displacement difference, capacitance sensor
For measuring the X of confocal laser gauge head in real time to straightness error.
Advantages of the present invention：The present invention is not only realized to heavy caliber from contourgraph XYZ multichannel kinematic error monitorings
The detection of the surface profile of optical element, while by the path laser interferometer of Y-direction two, Z-direction two-way capacitance sensor to measuring
The angular motion error and straightness error of journey middle guide are monitored and compensate, and substantially increase the accuracy of detection of optical element.
The present invention can realize the real-time multichannel error monitoring to optical element high precision measuring device, compared with profile and other
Optical element measurement apparatus are compared, and except high-accurate outline detection, Double passage laser interferometer and two-way capacitance sensor simultaneously can
Can cause to miss with capacitance sensor with real-time monitoring guide rail and the angular motion error of gauge head, and high-precision laser interferometer
Difference monitoring reaches a level very high, conveniently carries out uncertainty and the error analysis compensation of later stage device.
Brief description of the drawings
Fig. 1 is the structural representation of the optical element high precision measuring device based on real-time monitoring kinematic error.
Specific embodiment
Specific embodiment one：With reference to Fig. 1 explanation present embodiments, transported based on real-time monitoring described in present embodiment
The optical element high precision measuring device of dynamic error, the measurement apparatus include two-dimensional gas floating guide rail 9, laser interferometer module, electricity
Hold sensor assembly and confocal laser gauge head 7；
Laser interferometer module includes that X does to laser interferometer 1, the confocal gauge head laser of Y-direction Double passage laser interferometer 2, Z-direction
Interferometer 3, X is to reflection optical flat 4, Y-direction reflection optical flat 5 and Z-direction reflection optical flat 6；
Capacitive sensor modules include two-way capacitance sensor 8-1 and capacitance sensor 8-2；
Optical elements of large caliber is placed on the air floating platform of the top of two-dimensional gas floating guide rail 9；
X to laser interferometer 1 be used to monitor X in real-time displacement, Y-direction guide rail motion process that Y-direction guide rail is moved to it is straight
In dimension error and Y-direction guide rail motion process X to angle beat；X is arranged on the side of two-dimensional gas floating guide rail 9 to reflection optical flat 4,
And it is just relative to laser interferometer 1 with X；
Y-direction Double passage laser interferometer 2 is used to monitoring the straight of Y-direction in real-time displacement, the X direction guiding rail motion processes of X direction guiding rails
The angle beat of Y-direction in dimension error and X direction guiding rail motion processes；Y-direction reflection optical flat 5 is arranged on the side of two-dimensional gas floating guide rail 9,
And it is just relative with Y-direction Double passage laser interferometer 2；
The confocal gauge head laser interferometer 3 of Z-direction is used to monitor the real-time displacement in the confocal gauge head motion process of Z-direction；Z-direction reflects
Optical flat 6 is arranged on the top of two-dimensional gas floating guide rail 9, and just relative with the confocal gauge head laser interferometer 3 of Z-direction；
Confocal laser gauge head 7 is arranged on the surface of two-dimensional gas floating guide rail 9, and two-way capacitance sensor 8-1 is arranged on laser
The side of confocal gauge head 7, and in YZ planes, capacitance sensor 8-2 is arranged on the side of confocal laser gauge head 7, and is located at
In XZ planes, confocal laser gauge head 7Z to angle beat by two-way capacitance sensor 8-1 in real time measurement X to displacement difference come
Obtain, capacitance sensor 8-2 is used for the X of measurement confocal laser gauge head 7 in real time to straightness error.
In present embodiment, because measurement sample is because measurement sample is mainly for heavy caliber higher curvature optical element, Z is surveyed
The small linearity deviation in amount direction may cause very big measurement error, so needing to enter in real time using capacitance sensor 8-2
Row monitoring.
Specific embodiment two：Present embodiment is illustrated with reference to Fig. 1, present embodiment is made into one to implementation method one
Step explanation, X is double-frequency laser to laser interferometer 1, Y-direction Double passage laser interferometer 2 and the confocal gauge head laser interferometer 3 of Z-direction
Interferometer, Measurement Resolution is 0.6nm.
In present embodiment, X is to laser interferometer 1, Y-direction Double passage laser interferometer 2 and the confocal gauge head laser interferometer of Z-direction
3 can not only real-time monitoring XY to moving displacement, additionally it is possible in real time be given X direction guiding rails motion in Y-direction angular motion error, so as to
The analysis of uncertainty and compensation in later stage.
Specific embodiment three：Present embodiment is illustrated with reference to Fig. 1, present embodiment is made to implementation method one or two
Further illustrate, Y-direction Double passage laser interferometer 2 is by monitoring the position of two-way laser interferometer measurement in X direction guiding rail motion processes
Difference is moved to determine that the motion of X direction guiding rails has angle beat.
In present embodiment, when Y-direction Double passage laser interferometer 2 monitors that the motion of X direction guiding rails has angle beat, in time
Compensate.
Specific embodiment four：Present embodiment is illustrated with reference to Fig. 1, present embodiment is made into one to implementation method one
Step explanation, the measurement range of two-way capacitance sensor 8-1 and capacitance sensor 8-2 is 1mm, and Measurement Resolution is 5nm.
In present embodiment, two-way capacitance sensor 8-1 and capacitance sensor 8-2 is serial according to CS1 using rice, can not only
The angular motion error of monitoring confocal laser gauge head 7, additionally it is possible to Y-direction straightness error is monitored, so as to the analysis on Uncertainty in later stage
And compensation.
Specific embodiment five：Present embodiment is illustrated with reference to Fig. 1, present embodiment is made into one to implementation method one
Step explanation, two-dimensional gas floating guide rail 9XY directional runs are 200mm.
Specific embodiment six：Present embodiment is illustrated with reference to Fig. 1, present embodiment is made into one to implementation method one
Step explanation, the range in confocal laser gauge head 7Z directions is 150mm.
In the present invention, Contents for Monitoring mainly includes the following aspects：
1st, the straightness error and X direction guiding rails of Y-direction are moved through in the real-time displacement of X direction guiding rails, X direction guiding rail motion processes
The angle beat of Y-direction in journey；
2nd, Y-direction guide rail motion real-time displacement, Y-direction guide rail motion process in X to straightness error and Y-direction guide rail transport
During dynamic X to angle beat；
3rd, the real-time displacement in the confocal gauge head motion process of Z-direction, the Y-direction in the confocal gauge head motion process of Z-direction angle it is inclined
X in pendulum error and the confocal gauge head motion process of Z-direction is to straightness error.
In the present invention, the movement warp of measurement apparatus is monitored using No. four interferometers, No. three capacitance sensors first, adopted
Being monitored with seven roads can be with the displacement of comprehensive, high-precision real-time monitoring guide rail and gauge head；Secondly, in the two-way interferometer of Y-direction
Can high accuracy real-time monitoring move when guide rail angular movement deviation；Furthermore, the confocal cephalomotor angular movement deviation of survey of Z-direction also may be used
Monitored in real time with by two-way capacitance sensor, and also be used for monitoring the straight of confocal gauge head with capacitance sensor all the way
Dimension error.Guide rail linearity and angular motion error are measured present invention employs Multi-channel monitoring device, can be to optics
Element measurement apparatus carry out high accuracy error monitoring and compensation, high with monitoring accuracy, monitor the excellent of kinematic error broad covered area
Point.
Claims (6)
1. the optical element high precision measuring device of real-time monitoring kinematic error is based on, it is characterised in that the measurement apparatus include
Two-dimensional gas floating guide rail (9), laser interferometer module, capacitive sensor modules and confocal laser gauge head (7)；
Laser interferometer module includes that X does to laser interferometer (1), Y-direction Double passage laser interferometer (2), the confocal gauge head laser of Z-direction
Interferometer (3), X reflect optical flat (5) to reflection optical flat (4), Y-direction and Z-direction reflects optical flat (6)；
Capacitive sensor modules include two-way capacitance sensor (8-1) and capacitance sensor (8-2)；
Optical elements of large caliber is placed on the air floating platform above two-dimensional gas floating guide rail (9)；
X to laser interferometer (1) for monitor X in the real-time displacement, Y-direction guide rail motion process that Y-direction guide rail is moved to straight line
Degree error and Y-direction guide rail motion process in X to angle beat；X is arranged on two-dimensional gas floating guide rail (9) side to reflection optical flat (4)
Side, and it is just relative to laser interferometer (1) with X；
Straight line of Y-direction Double passage laser interferometer (2) for Y-direction in real-time displacement, the X direction guiding rail motion processes of monitoring X direction guiding rails
The angle beat of Y-direction in degree error and X direction guiding rail motion processes；Y-direction reflects optical flat (5) and is arranged on two-dimensional gas floating guide rail (9) side
Side, and it is just relative with Y-direction Double passage laser interferometer (2)；
The confocal gauge head laser interferometer (3) of Z-direction is for monitoring the real-time displacement in the confocal gauge head motion process of Z-direction；Z-direction reflection is flat
Brilliant (6) are arranged on two-dimensional gas floating guide rail (9) top, and just relative with the confocal gauge head laser interferometer (3) of Z-direction；
Confocal laser gauge head (7) is arranged on the surface of two-dimensional gas floating guide rail (9), and two-way capacitance sensor (8-1) is arranged on sharp
The side of the confocal gauge head of light (7), and in YZ planes, capacitance sensor (8-2) is arranged on the side of confocal laser gauge head (7)
Side, and in XZ planes, the angle beat of confocal laser gauge head (7) Z-direction is measured in real time by two-way capacitance sensor (8-1)
X obtained to displacement difference, capacitance sensor (8-2) be used in real time measurement confocal laser gauge head (7) X to straightness error.
2. the optical element high precision measuring device based on real-time monitoring kinematic error according to claim 1, its feature
It is that X is double frequency to laser interferometer (1), Y-direction Double passage laser interferometer (2) and the confocal gauge head laser interferometer (3) of Z-direction
Laser interferometer, Measurement Resolution is 0.6nm.
3. the optical element high precision measuring device based on real-time monitoring kinematic error according to claim 1 and 2, it is special
Levy and be, Y-direction Double passage laser interferometer (2) is by monitoring the displacement of two-way laser interferometer measurement in X direction guiding rail motion processes
Differ to determine that the motion of X direction guiding rails has angle beat.
4. the optical element high precision measuring device based on real-time monitoring kinematic error according to claim 1, its feature
It is that the measurement range of two-way capacitance sensor (8-1) and capacitance sensor (8-2) is 1mm, and Measurement Resolution is 5nm.
5. the optical element high precision measuring device based on real-time monitoring kinematic error according to claim 1, its feature
It is that two-dimensional gas floating guide rail (9) XY directional runs are 200mm.
6. the optical element high precision measuring device based on real-time monitoring kinematic error according to claim 1, its feature
It is that the range of confocal laser gauge head (7) Z-direction is 150mm.
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| CN201611251406.2A CN106767512A (en) | 2016-12-29 | 2016-12-29 | Optical element high precision measuring device based on real-time monitoring kinematic error |
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| CN201611251406.2A CN106767512A (en) | 2016-12-29 | 2016-12-29 | Optical element high precision measuring device based on real-time monitoring kinematic error |
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Cited By (10)
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| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108844501A (en) * | 2018-05-23 | 2018-11-20 | 清华大学 | A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method |
| CN109211273A (en) * | 2018-09-28 | 2019-01-15 | 北京控制工程研究所 | A kind of star sensor optical axis derivation mechanism calibration method |
| CN110954019A (en) * | 2019-11-28 | 2020-04-03 | 北京理工大学 | Large-inclination-angle free-form surface measuring method and device based on reference plane comparison measurement |
| CN112113509A (en) * | 2019-06-20 | 2020-12-22 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN113175893A (en) * | 2021-04-15 | 2021-07-27 | 中国工程物理研究院激光聚变研究中心 | Optical free-form surface full-aperture detection method based on multi-error real-time compensation |
| CN114216396A (en) * | 2021-12-16 | 2022-03-22 | 哈尔滨工业大学 | Compound eye unit motion error measuring device based on laser interferometer |
| CN114654092A (en) * | 2022-04-18 | 2022-06-24 | 北京理工大学 | Method and device for efficient processing and precise measurement of laser microstructure |
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Cited By (16)
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| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
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| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108844501A (en) * | 2018-05-23 | 2018-11-20 | 清华大学 | A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method |
| CN109211273A (en) * | 2018-09-28 | 2019-01-15 | 北京控制工程研究所 | A kind of star sensor optical axis derivation mechanism calibration method |
| CN112113509B (en) * | 2019-06-20 | 2022-06-17 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN112113509A (en) * | 2019-06-20 | 2020-12-22 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
| CN110954019A (en) * | 2019-11-28 | 2020-04-03 | 北京理工大学 | Large-inclination-angle free-form surface measuring method and device based on reference plane comparison measurement |
| CN113175893B (en) * | 2021-04-15 | 2022-02-11 | 中国工程物理研究院激光聚变研究中心 | Optical free-form surface full-aperture detection method based on multi-error real-time compensation |
| CN113175893A (en) * | 2021-04-15 | 2021-07-27 | 中国工程物理研究院激光聚变研究中心 | Optical free-form surface full-aperture detection method based on multi-error real-time compensation |
| CN114216396A (en) * | 2021-12-16 | 2022-03-22 | 哈尔滨工业大学 | Compound eye unit motion error measuring device based on laser interferometer |
| CN114654092A (en) * | 2022-04-18 | 2022-06-24 | 北京理工大学 | Method and device for efficient processing and precise measurement of laser microstructure |
| CN114654092B (en) * | 2022-04-18 | 2023-03-14 | 北京理工大学 | Method and device for efficient processing and precise measurement of laser microstructure |
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Application publication date: 20170531 |