CN108844501A - A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method - Google Patents
A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method Download PDFInfo
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- CN108844501A CN108844501A CN201810499225.4A CN201810499225A CN108844501A CN 108844501 A CN108844501 A CN 108844501A CN 201810499225 A CN201810499225 A CN 201810499225A CN 108844501 A CN108844501 A CN 108844501A
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- translation stage
- electric precise
- precise translation
- displacement sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
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Abstract
A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method, the system include high rigidity substrate, braced frame, support board, crystal installing frame, high precision laser displacement sensor, controller module and X, Y, Z-direction electric precise translation stage；Dynamic to reforwarding between the alternating of translation stage by Y-direction and X, high precision laser displacement sensor samples frequency-doubling crystal clear aperture surface point by point, obtains face shape information；When carrying out the characterization operation of large-caliber laser frequency-doubling crystal surface property in high-cleanness optical measurement environment, after completing initial operation, measuring system can be completed to sample and calculate the GRMS value for characterizing frequency-doubling crystal surface property automatically by particular track under the control of its controller module；Measuring system of the present invention can meet large-caliber laser frequency-doubling crystal surface horizontal attitude measurement demand, characterizing method science, concise, frequency-doubling crystal Surface contral technique study and assembled in situ calibration test suitable for high power inertial confinement fusion laser.
Description
Technical field
The invention belongs to optical element Technology of Precision Measurement field, it is related to high power laser light in inertially confinement fusion device and drives
The accurate measurement of heavy caliber frequency-doubling crystal component side shape in dynamic device, in particular to a kind of laser frequency doubling crystal surface vertical measurement
System and performance characterization method.
Background technique
Since the sixties in last century, rely on its superior nonlinear characteristic, potassium dihydrogen phosphate (KDP) crystal is by widely
It applies in laser freuqency doubling field.Nowadays, work as in inertial confinement fusion (ICF) device driven by high power solid state laser
In, KDP crystal still carries the important function that fundamental frequency infrared light is converted to frequency tripling ultraviolet light, the height of frequency conversion efficiency
The low size that will directly decide target center energy density also can generate significant impact to the overall performance of device.With it is general
KDP crystal phase is same, and the KDP frequency multiplication element in ICF also only can realize highest frequency conversion when phase exactly matches
Efficiency；However, special, the bore of every Shu Jiguang is more than 300mm, the KDP in Final optical assembly in ICF device
The bore of crystal is more than 400mm and its thickness only has 12mm, and such geomery makes its face shape outer to gravity, chucking power etc.
Power effect is extremely sensitive, and the direct bring of face deformation is the variation of surface phase gradient, this will seriously affect KDP crystal
Working performance.
Traditionally, the heavy caliber KDP frequency multiplication component side shape in inertially confinement fusion device all passes through horizontal heavy caliberLaser interferometer measures, and result can only symbolize the crystal placed vertically under offline assembled state
Face shape.By long-term engineering practice, it is found that there are apparent technical deficiencies for such mode, i.e., measured under vertical state
To face shape can not be truly reflected out face deformation caused by gravity reality.Since the gravity of element on a microscopic scale carries
Lotus and installation prefastening load can be there is certain coupled relations, this will lead to different placement postures can be to the change of component side shape
Change has an important influence on.Therefore, grasp the component side shape that is affected by gravity under actual installation posture, have great necessity and
Importance.However, the large-scale vertical interferometer cost of hundreds of millimeters of bores is extremely high on Vehicles Collected from Market and application environment is harsh,
It is significantly limited in the assembly of ICF optical elements of large caliber engineering and the use in on-site test.Therefore, there is an urgent need to from
The actual technical performance of ICF large-caliber laser frequency-doubling crystal element and engineering characteristic set out, and develop a kind of with good technique
Performance, meet element surface efficiently, accurately measure requirement, and the heavy caliber of engineering-environment adaptability and economy with higher
Optical element surface vertical measuring device and its mating data processing method.
Summary of the invention
In order to overcome the disadvantages of the above prior art, it is vertical that the purpose of the present invention is to provide a kind of laser frequency doubling crystal surfaces
Formula measuring system and performance characterization method, to meet next-generation huge laser fusion facility for heavy caliber frequency-doubling crystal element object
The harsh technical requirements of rationality energy.
To achieve the goals above, the technical solution adopted by the present invention is that：
A kind of laser frequency doubling crystal surface vertical measurement system, which is characterized in that including：
High rigidity substrate 1, is square plate, to install braced frame 2 and Y-direction electric precise translation stage 3；
Braced frame 2, four feet are fixed on the quadrangle of the high rigidity substrate 1, for installing crossbeam 11 and controller module
10；
Y-direction electric precise translation stage 3 is fixed on 1 center of high rigidity substrate, for carrying X to electric precise
Translation stage 4, and realize that Y-direction moves horizontally；
X is fixed on 3 center of Y-direction electric precise translation stage, for installing loading to electric precise translation stage 4
Plate 5, and realize that X-direction moves horizontally；
Support board 5 is fixed on the X to 4 center of electric precise translation stage, for carrying crystal installing frame 6；
Crystal installing frame 6 is set on support board 5, for installing and clamping KDP crystal element 7；
Z-direction electric precise translation stage 8 is fixed on 11 middle position of crossbeam, for installing pinboard 12, the pinboard 12
Diverter 13 is installed in lower part, and the diverter 13 has Universal-head and mounting plate, for installing high precision laser displacement sensor 9
And sensor angles are adjusted flexibly, the Z-direction electric precise translation stage 8 can drive the pinboard 12, diverter 13 along Z-direction
It is moved up and down with high precision laser displacement sensor 9, to meet the measurement need to KDP crystal element 7 with different thickness
It asks；
High precision laser displacement sensor 9, for relative distance of any point away from gauge head on measurement object surface into
Keyemce LK-H022K, precision 1um can be used in row accurate measurement, and the most short sampling period is 2.5us；
Controller module 10, including controller, calculator, display screen 14, control panel 15 and data transmission interface, one
Aspect for realizing to the X to electric precise translation stage 4, Y-direction electric precise translation stage 3 and Z-direction electric precise translation stage 8
Motion control is realized to the alternating movement of electric precise translation stage 4, Y-direction electric precise translation stage 3 to the KDP by the X
The traversal formula of 7 clear aperture of crystal element measures；On the other hand, it realizes and the high precision laser displacement sensor 9 was measured
Initial setting up, real time monitoring and the data processing of journey.
The present invention also provides the surface property characterizing method based on the laser frequency doubling crystal surface vertical measurement system,
In meeting 5 grades of clean optical precision measurement environment for requiring (according to ISO14644-1 standard), following steps are specifically executed：
Step 1：The KDP crystal element 7 being already fixed in crystal installing frame 6 is placed in load together with installing frame 6
Marked locations on object plate 5；
Step 2：8 height of Z-direction electric precise translation stage is adjusted, 13 angle of diverter is then finely tuned, until high-precision laser
Displacement sensor 9 can capture the data of distance between point and sensor on 7 surface of KDP crystal element；
Step 3：X is moved at coordinate origin to electric precise translation stage 4, Y-direction electric precise translation stage 3；
Step 4：Set the sampling interval of high precision laser displacement sensor 9；
Step 5：X is dynamic to reforwarding between electric precise translation stage 4, the alternating of Y-direction electric precise translation stage 3, high-precision laser position
Displacement sensor 9 acquires data point by point, until the traversal complete clear aperture of KDP crystal element 7, obtains face shape matrix z；
Step 6：Calculator in controller module 10 is gradually solved according to the face shape matrix z measured obtains characterization KDP crystalline substance
The root mean square gradient GRMS value of the full clear aperture phase gradient size of volume elements part 7；
Step 7：The calculated result of GRMS value is shown on the display screen 14 of controller module 10, the face shape matrix z measured
And GRMS calculated result can be exported by the data transmission interface in controller module 10.
Compared with prior art, the beneficial effects of the invention are as follows：Firstly, the optics based on high precision laser displacement sensor
The accurate measurement to the large-caliber laser frequency-doubling crystal face shape in horizontal attitude may be implemented in surface vertical measurement system, can be with
Necessary measuring table is provided to the affecting laws of face deformation for research gravity；Secondly, using root mean square gradient as the table of index
Sign method covers the face shape information of KDP crystal element whole, close with its laser physics property relationship, is able to reflect its phase
Match condition；Finally, large-caliber laser frequency-doubling crystal surface vertical measurement system swashs compared to the vertical of same measurement range
Optical interferometer had both been able to satisfy measurement accuracy requirement, and price economy is good, flexible operation degree is high, was more suitable for China next generation
The assembled in situ and detection of hundreds of crystal element in inertially confinement fusion device.
Detailed description of the invention
Fig. 1 is large-caliber laser frequency-doubling crystal of the present invention surface vertical measurement overall system architecture figure.
Fig. 2 is large-caliber laser frequency-doubling crystal of the present invention surface vertical measurement system front view.
Fig. 3 is Large diameter laser frequency doubling crystal of the present invention surface phase gradient measuring principle schematic diagram.
Fig. 4 is actual measurement process high precision laser displacement sensor sample track schematic diagram of the present invention.
Specific embodiment
The embodiment that the present invention will be described in detail with reference to the accompanying drawings and examples.
The embodiment that the present invention will be described in detail with reference to the accompanying drawings and examples.
As illustrated in fig. 1 and 2, the present invention is a kind of laser frequency doubling crystal surface vertical measurement system, mainly by high rigidity base
Plate 1, braced frame 2, Y-direction electric precise translation stage 3, X are brilliant to electric precise translation stage 4, support board 5, crystal installing frame 6, KDP
Volume elements part 7, Z-direction electric precise translation stage 8, high precision laser displacement sensor 9 and controller module 10 form.
Wherein, high rigidity substrate 1 is having a size of the high flatness steel plate of 1000mm*1000mm*10mm square, to pacify
Fill braced frame 2 and Y-direction electric precise translation stage 3；
Braced frame 2 assembles for aluminium alloy extrusions (cross sectional dimensions 40mm*40mm), and four supporting legs are used respectively
Screw is fixed on 1 four jiaos of the high rigidity substrate, for installing crossbeam 11 and controller module 10；
The Y-direction electric precise translation stage 3, range 400mm, are screwed in the height by 10 μm of kinematic accuracy
1 center of rigidity substrate for carrying X to electric precise translation stage 4, and realizes that Y-direction moves horizontally；
The X 10 μm of kinematic accuracy, is screwed in the Y-direction to electric precise translation stage 4, range 400mm
3 center of electric precise translation stage for installing support board 5, and can realize that X-direction moves horizontally；
The support board 5 is screwed in the X to 4 center of electric precise translation stage, for carrying crystal peace
Frame up 6；
The crystal installing frame 6 is the framework of stainless steel material, is 410mm*410mm* for installation and clamping dimension
The KDP crystal element 7 of 12mm；
The Z-direction electric precise translation stage 8 is screwed in 11 middle position of crossbeam, for installing pinboard 12, institute
Stating 12 lower part of pinboard has Universal-head and mounting plate for installing diverter 13, the diverter 13, for installing high-precision
Simultaneously sensor angles are adjusted flexibly in laser displacement sensor 9, and the Z-direction electric precise translation stage 8 can drive described turn along Z-direction
Fishplate bar 12, diverter 13 and high precision laser displacement sensor 9 move up and down, brilliant to KDP with different thickness to meet
The measurement demand of volume elements part 7；
The high precision laser displacement sensor 9, maximum measurement range 0-3mm, 1 μm of measurement accuracy, for measurement pair
As relative distance of any point away from gauge head carries out accurate measurement on surface；
The controller module 10, including controller, calculator, memory, display screen 14, control panel 15 and data
Coffret translates for realizing to the X to electric precise translation stage 4, Y-direction electric precise translation stage 3 and Z-direction electric precise
The motion control of platform 8, and the initial setting up to 9 measurement process of high precision laser displacement sensor, real time monitoring sum number
According to processing.According to the sampling interval of setting, controller sends move to electricity driving displacement platform, after displacement platform movement in place,
Controller sends to laser displacement sensor read measurement data instruction again, and measurement data return value is recorded in memory,
Then controller continues to send move to electricity driving displacement platform, recycles aforesaid operations, until traversing the KDP crystal element 7
Complete clear aperture (360mm*360mm), obtains face shape matrix z,
Wherein zi+1,j+1The data value that the as described laser displacement sensor measures at each sampled point, further
It can be by formulaThe phase of X-direction and Y-direction is acquired respectively
Potential gradient gradx(x, y) and grady(x, y),
Later, being locally synthesized at the point is obtained to the phase gradient extraction of square root of X-direction at each sampled point and Y-direction
Gradient value gi,j,
Finally, the gradient value that is locally synthesized to all sampled points seeks root-mean-square value, i.e.,
Root mean square gradient (GRMS) value of the characterization full clear aperture phase gradient size of KDP crystal element 7 can just be obtained.
It is specific to execute such as in meeting 5 grades of clean optical precision measurement environment for requiring (according to ISO14644-1 standard)
Lower step：
Step 1：The KDP crystal element 7 being already fixed in crystal installing frame 6 is placed in loading together with installing frame 6
Marked locations on plate 5；
Step 2：The arrow button on control panel 15 is pressed, 8 height of adjustment Z-direction electric precise translation stage is then finely tuned
13 angle of diverter, until high precision laser displacement sensor 9 can capture on KDP crystal element surface a little away from sensor
The real-time sampling data that the data of distance, i.e. display screen 14 are shown is in the measurement range of 0-3mm；
Step 3：" zero " button on control panel 15 is pressed, X is translated to electric precise translation stage 4, Y-direction electric precise
Platform 3 is moved at coordinate origin simultaneously, the laser measuring point and Fig. 4 that high precision laser displacement sensor 9 shown in Fig. 3 projects at this time
Shown coordinate origin is overlapped；
Step 4：The sampling interval of high precision laser displacement sensor 9 is set by control panel 15, i.e. X is to electric precise
Translation stage 4 and the every moved further distance of Y-direction electric precise translation stage 3, default setting 1mm；
Step 5：The START button on control panel is pressed, under the control of controller module, X is translated to electric precise
Platform 4 and the reforwarding between the alternating of sample track shown in Fig. 4 of Y-direction electric precise translation stage 3 are dynamic；At Fig. 4 grid intersection, high-precision
Laser displacement sensor 9 acquires data point by point, until the traversal complete clear aperture of KDP crystal element, obtains face shape matrix z；
Step 6：Calculator built in controller module 10 is gradually solved according to the face shape matrix z measured obtains characterization KDP
Root mean square (GRMS) value of the full clear aperture phase gradient size of crystal element；
Step 7：The calculated result of GRMS value is shown on the display screen 14 of controller module 10, the face shape matrix z measured
And GRMS calculated result can be exported by the data transmission interface in controller module 10, facilitate further data processing
And analysis.
Claims (2)
1. a kind of laser frequency doubling crystal surface vertical measurement system, which is characterized in that including：
High rigidity substrate (1), is square plate, to install braced frame (2) and Y-direction electric precise translation stage (3)；
Braced frame (2), four feet are fixed on the quadrangle of the high rigidity substrate (1), for installing crossbeam (11) and controller mould
Block (10)；
Y-direction electric precise translation stage (3) is fixed on high rigidity substrate (1) center, for carrying X to electric precise
Translation stage (4), and realize that Y-direction moves horizontally；
X is fixed on Y-direction electric precise translation stage (3) center, for installing loading to electric precise translation stage (4)
Plate (5), and realize that X-direction moves horizontally；
Support board (5) is fixed on the X to electric precise translation stage (4) center, for carrying crystal installing frame (6)；
Crystal installing frame (6) is set on support board (5), for installing and clamping KDP crystal element (7)；
Z-direction electric precise translation stage (8) is fixed on crossbeam (11) middle position, for installing pinboard (12), the pinboard
(12) lower part installation diverter (13), the diverter (13) has Universal-head and mounting plate, for installing high-precision laser position
Simultaneously sensor angles are adjusted flexibly in displacement sensor (9), and the Z-direction electric precise translation stage (8) can drive the switching along Z-direction
Plate (12), diverter (13) and high precision laser displacement sensor (9) move up and down, to meet to different thickness
The measurement demand of KDP crystal element (7)；
High precision laser displacement sensor (9) is carried out for the relative distance to any point on measurement object surface away from gauge head
Accurate measurement；
Controller module (10), including controller, calculator, display screen (14), control panel (15) and data transmission interface,
On the one hand for realizing flat to electric precise translation stage (4), Y-direction electric precise translation stage (3) and Z-direction electric precise to the X
The motion control of moving stage (8), the alternating movement by the X to electric precise translation stage (4), Y-direction electric precise translation stage (3)
It realizes and the traversal formula of KDP crystal element (7) clear aperture is measured；On the other hand, it realizes to the high-precision laser position
The initial setting up, real time monitoring and data processing of displacement sensor (9) measurement process.
2. based on the surface property characterizing method of laser frequency doubling crystal surface vertical measurement system described in claim 1, feature
It is, in meeting 5 grades of clean desired optical precision measurement environment, specifically executes following steps：
Step 1：The KDP crystal element (7) being already fixed in crystal installing frame (6) is placed in together with installing frame (6)
Marked locations on support board (5)；
Step 2：Z-direction electric precise translation stage (8) height is adjusted, diverter (13) angle is then finely tuned, until high-precision laser
Displacement sensor (9) can capture the data of distance between point and sensor on KDP crystal element (7) surface；
Step 3：X is moved at coordinate origin to electric precise translation stage (4), Y-direction electric precise translation stage (3)；
Step 4：Set the sampling interval of high precision laser displacement sensor (9)；
Step 5：X is dynamic to reforwarding between electric precise translation stage (4), Y-direction electric precise translation stage (3) alternating, high-precision laser position
Displacement sensor (9) acquires data point by point, until traversal KDP crystal element (7) complete clear aperture, obtains face shape matrix z；
Step 6：Calculator in controller module (10) is gradually solved according to the face shape matrix z measured obtains characterization KDP crystal
Root mean square gradient (GRMS) value of the full clear aperture phase gradient size of element (7)；
Step 7：The calculated result of GRMS value is shown on the display screen (14) of controller module (10), the face shape matrix z measured
And GRMS calculated result all passes through the export of the data transmission interface in controller module (10).
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