CN204514280U - A kind of contactless sample surface profiles proving installation - Google Patents
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Abstract
本实用新型涉及非接触式测试技术领域，具体涉及一种非接触式样品表面轮廓测试装置。一种非接触式样品表面轮廓测试装置，激光位移传感器数据采集装置，三维精密平移台，X向精密平移台，Y向精密平移台，X向步进电机，Y向步进电机，平移台控制机，数据采集计算机，电机控制线路和数据传输线路,精密平移台在平面方向移动时激光位移传感器对样品表面的轮廓进行测试并将测试结果经数据传输线传输给数据采集计算机，数据采集计算机对数据进行存储及显示，表面数据用来表征样品表面轮廓形貌，进而作为下一步对样品表面进行分析数据。整个结构具有精度高、测量重复性好、经济性好，装置搭建简单等优点。
The utility model relates to the technical field of non-contact testing, in particular to a non-contact sample surface profile testing device. A non-contact sample surface profile testing device, laser displacement sensor data acquisition device, three-dimensional precision translation stage, X-direction precision translation stage, Y-direction precision translation stage, X-direction stepping motor, Y-direction stepping motor, translation stage control Machine, data acquisition computer, motor control circuit and data transmission line, when the precision translation stage moves in the plane direction, the laser displacement sensor tests the profile of the sample surface and transmits the test results to the data acquisition computer through the data transmission line, and the data acquisition computer For storage and display, the surface data is used to characterize the surface profile of the sample, and then as the next step to analyze the data on the sample surface. The whole structure has the advantages of high precision, good measurement repeatability, good economy, simple device construction and the like.
Description
技术领域 technical field
本实用新型涉及非接触式测试技术领域，具体涉及一种非接触式样品表面轮廓测试装置。 The utility model relates to the technical field of non-contact testing, in particular to a non-contact sample surface profile testing device.
背景技术 Background technique
以高分子为基材的功能薄膜越来越多的应用于MEMS器件结构的制作，尤其是超导薄膜、介电薄膜、磁性薄膜、光电薄膜、透明导电薄膜、压电薄膜等，由于采用功能薄膜制备的器件具有性能好、尺寸小、经济效益好等优点，已越来越引起人们的重视，成为替代传统材料的一种新材料。 Functional films based on polymers are increasingly used in the manufacture of MEMS device structures, especially superconducting films, dielectric films, magnetic films, photoelectric films, transparent conductive films, piezoelectric films, etc., due to the use of functional Devices made of thin films have the advantages of good performance, small size, and good economic benefits, and have attracted more and more people's attention, becoming a new material to replace traditional materials.
采用功能薄膜制备的微器件最大的缺点是器件的性能随着薄膜性能的改变而改变。功能薄膜中大的残余应力往往导致所制作的薄膜卷曲、开裂、剥落，甚至导致器件制作的失败。精确测量在特定的工艺条件下制备的薄膜中的应力已经成为制备功能薄膜工艺中的一部分。 The biggest disadvantage of micro-devices prepared by using functional thin films is that the performance of the device changes with the change of the properties of the thin film. The large residual stress in the functional film often leads to curling, cracking, peeling off of the fabricated film, and even the failure of device fabrication. Accurately measuring the stress in thin films prepared under specific process conditions has become a part of the preparation of functional thin films.
目前常用的测量薄膜应力的方法为基片曲率法，基片曲率法根据在功能薄膜沉积前后衬底的曲率半径的变化来表征薄膜的残余应力，用于测量基片曲率的方法目前常用的有轮廓仪、薄膜厚度仪，但这两种仪器实验费用过高，导致实验成本过高，因此寻求一种经济性好、精度高的薄膜表面轮廓测量装置非常必要。 At present, the commonly used method for measuring film stress is the substrate curvature method. The substrate curvature method characterizes the residual stress of the film according to the change of the curvature radius of the substrate before and after the deposition of the functional film. The commonly used method for measuring the substrate curvature is Profiler and film thickness meter, but the experimental cost of these two instruments is too high, resulting in high experimental cost, so it is necessary to find an economical and high-precision film surface profile measurement device.
实用新型内容 Utility model content
为了解决上述技术问题，本实用新型所提供了一种非接触式样品表面轮廓测试装置，基于激光位移传感器的对样品表面轮廓进行测试的非接触式表面轮廓测试装置。具有精度高、测量重复性好、经济性好，装置搭建简单等优点，适合于实验室对薄膜轮廓测量。 In order to solve the above technical problems, the utility model provides a non-contact sample surface profile testing device, which is a non-contact surface profile testing device for testing the sample surface profile based on a laser displacement sensor. It has the advantages of high precision, good measurement repeatability, good economy, simple device construction, etc., and is suitable for laboratory measurement of thin film contours.
为了达到上述目的，本实用新型所采用的技术方案是，一种非接触式样品表面轮廓测试装置，激光位移传感器数据采集装置，三维精密平移台，X向精密平移台，Y向精密平移台，X向步进电机，Y向步进电机，平移台控制机，数据采集计算机，电机控制线路和数据传输线路，所述X向精密平移台设置在Y向精密平移台上，所述三维精密平移台设置在X向精密平移台一侧，所述三维精密平移台上设有载物台，所述载物台垂直朝向X向精密平移台，X向精密平移台上设有固定带，用于将样品固定在X向精密平移台上，所述激光位移传感器数据采集装置设置包括激光位移传感器和数据采集计算机，激光位移传感器和数据采集计算机通过数据传输线路实现数据传输，所述激光位移传感器设置在载物台上并朝向被固定带固定的样品上方，X向精密平移台在X向步进电机驱动下沿水平X轴运动， Y向精密平移台在Y向步进电机驱动下带动X向精密平移台沿水平Y轴运动，三维精密平移台通过X向、Y向和Z向调节按钮带动载物台及激光位移传感器实现三维运动。 In order to achieve the above purpose, the technical solution adopted by the utility model is a non-contact sample surface profile testing device, a laser displacement sensor data acquisition device, a three-dimensional precision translation platform, an X-direction precision translation platform, a Y-direction precision translation platform, X-direction stepping motor, Y-direction stepping motor, translation platform controller, data acquisition computer, motor control circuit and data transmission circuit, the X-direction precision translation platform is arranged on the Y-direction precision translation platform, and the three-dimensional precision translation The platform is set on one side of the X-direction precision translation platform, and the three-dimensional precision translation platform is provided with a stage, and the object platform is vertically facing the X-direction precision translation platform, and the X-direction precision translation platform is provided with a fixing belt for The sample is fixed on the X-direction precision translation platform, the laser displacement sensor data acquisition device is set to include a laser displacement sensor and a data acquisition computer, the laser displacement sensor and the data acquisition computer realize data transmission through a data transmission line, and the laser displacement sensor is set On the stage and facing above the sample fixed by the fixing belt, the X-direction precision translation stage moves along the horizontal X-axis under the drive of the X-direction stepping motor, and the Y-direction precision translation stage drives the X-direction under the drive of the Y-direction stepping motor. The precision translation stage moves along the horizontal Y axis, and the three-dimensional precision translation stage drives the stage and the laser displacement sensor to realize three-dimensional movement through the X-, Y-, and Z-direction adjustment buttons.
进一步的，所述X向步进电机和Y向步进电机通过电机控制线路与平移台控制机电性连接。 Further, the X-direction stepping motor and the Y-direction stepping motor are electromechanically connected with the translation stage control through a motor control circuit.
进一步的，所述三维精密平移台包括X向移动板、Y向移动板和Z向移动板，所述Y向移动板设置在X向移动板上，所述Z向移动板为L型Z向移动板，所述Z向移动板一面设置在Y向移动板上，所述Z向移动板另一面与所述载物台固定连接，X向移动板在X向调节按钮作用下并依次带动Y向移动板Z向移动板沿水平X轴移动，Y向移动板在Y向调节按钮作用下带动Z向移动板沿水平Y轴移动，Z向移动板在Z向调节按钮作用下沿竖直Z轴移动。 Further, the three-dimensional precision translation stage includes an X-direction moving plate, a Y-direction moving plate and a Z-direction moving plate, the Y-direction moving plate is arranged on the X-direction moving plate, and the Z-direction moving plate is an L-shaped Z-direction moving plate. A moving plate, one side of the Z-direction moving plate is set on the Y-direction moving plate, the other side of the Z-direction moving plate is fixedly connected with the stage, and the X-direction moving plate drives the Y direction in turn under the action of the X-direction adjustment button. The Z-direction moving board moves along the horizontal X-axis, the Y-direction moving board drives the Z-direction moving board to move along the horizontal Y-axis under the action of the Y-direction adjustment button, and the Z-direction moving board moves along the vertical Z axis under the action of the Z-direction adjustment button. Axis movement.
本实用新型通过采用上述技术方案，与现有技术相比，具有如下优点： Compared with the prior art, the utility model has the following advantages by adopting the above-mentioned technical scheme:
本实用新型采用固定带将样品贴敷于X向精密平移台表面，样品位于激光位移传感器正下方，激光位移传感器固定在三维精密平移台的载物台的表面，调节三维精密平移台XYZ向调节按钮来调整激光位移传感器距离样品的位置，使得距离满足最佳测试范围，平移台控制机经电机控制线路控制XY向步进电机进而控制XY向精密平移台，精密平移台在平面方向移动时激光位移传感器对样品表面的轮廓进行测试并将测试结果经数据传输线传输给数据采集计算机，数据采集计算机对数据进行存储及显示，表面数据用来表征样品表面轮廓形貌，进而作为下一步对样品表面进行分析数据。整个结构具有精度高、测量重复性好、经济性好，装置搭建简单等优点。 The utility model adopts a fixed belt to stick the sample on the surface of the X-direction precision translation platform, the sample is located directly below the laser displacement sensor, and the laser displacement sensor is fixed on the surface of the object stage of the three-dimensional precision translation platform to adjust the XYZ direction adjustment of the three-dimensional precision translation platform Button to adjust the position of the laser displacement sensor from the sample, so that the distance meets the best test range. The translation stage controller controls the XY direction stepping motor through the motor control circuit and then controls the XY direction precision translation stage. When the precision translation stage moves in the plane direction, the laser The displacement sensor tests the profile of the sample surface and transmits the test results to the data acquisition computer through the data transmission line. The data acquisition computer stores and displays the data. Analyze data. The whole structure has the advantages of high precision, good measurement repeatability, good economy, and simple device construction.
附图说明 Description of drawings
图1是本实用新型的实施例的立示意图。 Fig. 1 is a perspective view of an embodiment of the present invention.
图2是本实用新型的实施例利用激光束对样品进行数据采集示意图。 Fig. 2 is a schematic diagram of data collection of a sample by using a laser beam according to an embodiment of the present invention.
具体实施方式 Detailed ways
现结合附图和具体实施方式对本实用新型进一步说明。 The utility model is further described now in conjunction with accompanying drawing and specific embodiment.
作为一个具体的实施例，如图1和图2所示，本实用新型的一种非接触式样品表面轮廓测试装置，激光位移传感器数据采集装置A，三维精密平移台7，X向精密平移台1a，Y向精密平移台1b，X向步进电机2b，Y向步进电机2a，平移台控制机3，数据采集计算机5，电机控制线路4和数据传输线路6，所述X向精密平移台1A设置在Y向精密平移台1b上，所述三维精密平移台7设置在X向精密平移台1a一侧，所述三维精密平移台7上设有载物台，所述载物台垂直朝向X向精密平移台1a，X向精密平移台1a上设有固定带，用于将样品固定在X向精密平移台1a上，所述激光位移传感器数据采集装置A设置包括激光位移传感器9和数据采集计算机5，激光位移传感器9和数据采集计算机5通过数据传输线路实现数据传输，所述激光位移传感器9通过螺钉设置在载物台上，激光位移传感器9沿被固定带固定的样品11正上方设置，所述X向步进电机2b和Y向步进电机2a通过电机控制线路与平移台控制机3电性连接，X向步进电机2b和Y向步进电机2a的输出端分别通过螺纹与X向精密平移台1a和Y向精密平移台1b铰接连接，平移台控制机对X向步进电机2b和Y向步进电机2a进行驱动，X向精密平移台1a在X向步进电机2b驱动下沿水平X轴运动， Y向精密平移台1b在Y向步进电机2a驱动下带动X向精密平移台1a沿水平Y轴运动，三维精密平移台7通过X向、Y向和Z向调节按钮7a、7b、7c带动载物台及激光位移传感器实现三维运动。 As a specific embodiment, as shown in Figure 1 and Figure 2, a non-contact sample surface profile testing device of the present invention, a laser displacement sensor data acquisition device A, a three-dimensional precision translation platform 7, and an X-direction precision translation platform 1a, Y-direction precision translation platform 1b, X-direction stepping motor 2b, Y-direction stepping motor 2a, translation platform controller 3, data acquisition computer 5, motor control circuit 4 and data transmission circuit 6, the X-direction precision translation Stage 1A is set on the Y-direction precision translation platform 1b, and the three-dimensional precision translation platform 7 is arranged on the X-direction precision translation platform 1a side, and the three-dimensional precision translation platform 7 is provided with a stage, and the described object stage is vertical Towards the X-direction precision translation platform 1a, the X-direction precision translation platform 1a is provided with a fixed belt for fixing the sample on the X-direction precision translation platform 1a, and the laser displacement sensor data acquisition device A is provided with a laser displacement sensor 9 and The data acquisition computer 5, the laser displacement sensor 9 and the data acquisition computer 5 realize data transmission through the data transmission line, the laser displacement sensor 9 is arranged on the stage by screws, and the laser displacement sensor 9 is fixed along the sample 11 fixed by the fixing belt. Set above, the X-direction stepping motor 2b and Y-direction stepping motor 2a are electrically connected to the translation platform control machine 3 through the motor control circuit, and the output ends of the X-direction stepping motor 2b and Y-direction stepping motor 2a are respectively passed through The thread is hingedly connected with the X-direction precision translation platform 1a and the Y-direction precision translation platform 1b. The translation platform controller drives the X-direction stepping motor 2b and the Y-direction stepping motor 2a, and the X-direction precision translation platform 1a moves in the X direction. Driven by the motor 2b, it moves along the horizontal X-axis. The Y-direction precision translation platform 1b drives the X-direction precision translation platform 1a to move along the horizontal Y-axis under the drive of the Y-direction stepping motor 2a. The three-dimensional precision translation platform 7 passes through the X-direction, Y-direction and The Z-direction adjustment buttons 7a, 7b, 7c drive the stage and the laser displacement sensor to realize three-dimensional movement.
所述三维精密平移台7包括X向移动板71、Y向移动板72和Z向移动板73，所述Y向移动板72设置在X向移动板71上，所述Z向移动板73为L型Z向移动板73，所述Z向移动板73一面设置在Y向移动板72上，所述Z向移动板73另一面与所述载物台8固定连接，X向移动板71在X向调节按钮7a作用下并依次带动Y向移动板72和Z向移动板73沿水平X轴移动，Y向移动板72在Y向调节按钮7b作用下带动Z向移动板73沿水平Y轴移动，Z向移动板73在Z向调节按钮7c作用下沿竖直Z轴移动。调节三维精密平移台XYZ向调节按钮7a、7b、7c来调整激光位移传感器9距离样品11的位置，使得距离满足最佳测试范围。 The three-dimensional precision translation stage 7 includes an X-direction moving plate 71, a Y-direction moving plate 72 and a Z-direction moving plate 73, the Y-direction moving plate 72 is arranged on the X-direction moving plate 71, and the Z-direction moving plate 73 is L-shaped Z-direction moving plate 73, one side of the Z-direction moving plate 73 is arranged on the Y-direction moving plate 72, the other side of the Z-direction moving plate 73 is fixedly connected with the loading table 8, and the X-direction moving plate 71 is on the Y-direction moving plate 72. Under the action of the X-direction adjustment button 7a, it sequentially drives the Y-direction moving plate 72 and the Z-direction moving plate 73 to move along the horizontal X-axis, and the Y-direction moving plate 72 drives the Z-direction moving plate 73 to move along the horizontal Y-axis under the action of the Y-direction adjustment button 7b Move, the Z-direction moving plate 73 moves along the vertical Z-axis under the action of the Z-direction adjustment button 7c. Adjust the XYZ adjustment buttons 7a, 7b, and 7c of the three-dimensional precision translation stage to adjust the position of the laser displacement sensor 9 from the sample 11, so that the distance meets the optimum test range.
X向精密平移台1a、Y向精密平移台1b在平面方向移动时激光位移传感器9对样品11表面的轮廓进行测试并将测试结果经数据传输线6传输给数据采集计算机5，数据采集计算机5对数据进行存储及显示，表面数据用来表征样品表面轮廓形貌，进而作为下一步对样品表面进行分析数据。 When the X-direction precision translation stage 1a and the Y-direction precision translation stage 1b move in the plane direction, the laser displacement sensor 9 tests the profile of the sample 11 surface and transmits the test results to the data acquisition computer 5 through the data transmission line 6, and the data acquisition computer 5 pairs The data is stored and displayed, and the surface data is used to characterize the surface profile of the sample, and then as the next step to analyze the data on the sample surface.
工作原理，激光位移传感器9发射激光束10照射到样品11表面，通过样品11表面反射的激光束10对样品11表面测量点在Z向相对于X向精密平移台1a表面位移进行测量，通过数据传输线6将数据传输给数据采集计算机5，根据采集数据对样品表面轮廓进一步分析。样品11表面的测量位置通过平移台控制机3进行控制，在测量样品11的X向轮廓时，平移台控制机3通过电机控制线路4对X向步进电机2b加电，X向步进电机2b带动X向精密平移台1a运动，激光束10对样品11的X方向的轮廓进行测量，并记录测量线上的各个测量点Z向的相对位移，由测量数据可得X向表面轮廓。测量样品11的Y向轮廓时，平移台控制机3通过电机控制线路4对Y向步进电机2a加电，Y向步进电机2a带动Y向精密平移台1b运动，激光束10对样品11的Y方向的轮廓进行测量，并记录测量线上的各个测量点Z向的相对位移，由测量数据可得Y向表面轮廓。测量样品11其它方向轮廓时，平移台控制机3通过电机控制线路4对XY向步进电机2a、2b加电，XY向步进电机2a、2b带动XY向精密平移台1a、1b运动，激光束10对样品11方向的轮廓进行测量，并记录测量线上的各个测量点Z向的相对位移，由测量数据可得非标准方向表面轮廓。 The working principle is that the laser displacement sensor 9 emits a laser beam 10 to irradiate the surface of the sample 11, and the laser beam 10 reflected by the surface of the sample 11 measures the displacement of the measurement point on the surface of the sample 11 in the Z direction relative to the surface of the precision translation stage 1a in the X direction. The transmission line 6 transmits the data to the data acquisition computer 5, and the profile of the sample surface is further analyzed according to the collected data. The measurement position on the surface of the sample 11 is controlled by the translation stage controller 3. When measuring the X-direction profile of the sample 11, the translation stage controller 3 energizes the X-direction stepping motor 2b through the motor control circuit 4, and the X-direction stepping motor 2b drives the X-direction precision translation table 1a to move, the laser beam 10 measures the X-direction profile of the sample 11, and records the relative displacement of each measurement point on the measurement line in the Z-direction, and the X-direction surface profile can be obtained from the measurement data. When measuring the Y-direction profile of the sample 11, the translation stage controller 3 energizes the Y-direction stepping motor 2a through the motor control circuit 4, and the Y-direction stepping motor 2a drives the Y-direction precision translation stage 1b to move, and the laser beam 10 moves to the sample 11 The profile in the Y direction of the machine is measured, and the relative displacement of each measurement point on the measurement line in the Z direction is recorded, and the surface profile in the Y direction can be obtained from the measurement data. When measuring the profile of the sample 11 in other directions, the translation stage controller 3 powers up the XY stepping motors 2a and 2b through the motor control circuit 4, and the XY stepping motors 2a and 2b drive the XY movement to the precision translation stage 1a and 1b. The beam 10 measures the profile in the direction of the sample 11, and records the relative displacement of each measurement point on the measurement line in the Z direction, and the surface profile in a non-standard direction can be obtained from the measurement data.
尽管结合优选实施方案具体展示和介绍了本实用新型，但所属领域的技术人员应该明白，在不脱离所附权利要求书所限定的本实用新型的精神和范围内，在形式上和细节上可以对本实用新型做出各种变化，均为本实用新型的保护范围。 Although the utility model has been specifically shown and described in conjunction with preferred embodiments, those skilled in the art should understand that, without departing from the spirit and scope of the utility model defined by the appended claims, changes in form and details may be made. Making various changes to the utility model is within the protection scope of the utility model.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105789083A (en) * | 2016-05-27 | 2016-07-20 | 中南大学 | Light waveguide wafer surface detecting device |
| CN111076673A (en) * | 2019-11-27 | 2020-04-28 | 中国科学院金属研究所 | Non-contact type contourgraph pipe sample rapid positioning device and operation method |
| CN111750801A (en) * | 2020-06-17 | 2020-10-09 | 武汉钢铁有限公司 | A method and measurement platform for offline non-contact evaluation of steel plate type |
| CN118565382A (en) * | 2024-07-31 | 2024-08-30 | 豪尔沃(山东)机械科技有限公司 | Radian detection device for automobile roof cover |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105789083A (en) * | 2016-05-27 | 2016-07-20 | 中南大学 | Light waveguide wafer surface detecting device |
| CN105789083B (en) * | 2016-05-27 | 2019-02-01 | 中南大学 | A kind of optical waveguide crystal column surface detection device |
| CN111076673A (en) * | 2019-11-27 | 2020-04-28 | 中国科学院金属研究所 | Non-contact type contourgraph pipe sample rapid positioning device and operation method |
| CN111076673B (en) * | 2019-11-27 | 2024-05-24 | 中国科学院金属研究所 | Quick positioning device for non-contact profiler pipe sample and operation method |
| CN111750801A (en) * | 2020-06-17 | 2020-10-09 | 武汉钢铁有限公司 | A method and measurement platform for offline non-contact evaluation of steel plate type |
| CN118565382A (en) * | 2024-07-31 | 2024-08-30 | 豪尔沃(山东)机械科技有限公司 | Radian detection device for automobile roof cover |
| CN118565382B (en) * | 2024-07-31 | 2024-11-08 | 豪尔沃(山东)机械科技有限公司 | A device for detecting the curvature of a car roof |
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