CN201503259U - Full-automatic multi-functional sensor geometrical measurement system - Google Patents

Full-automatic multi-functional sensor geometrical measurement system Download PDF

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CN201503259U
CN201503259U CN2009202045247U CN200920204524U CN201503259U CN 201503259 U CN201503259 U CN 201503259U CN 2009202045247 U CN2009202045247 U CN 2009202045247U CN 200920204524 U CN200920204524 U CN 200920204524U CN 201503259 U CN201503259 U CN 201503259U
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precision
axis
mounted
sensor
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CN2009202045247U
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黄宏臻
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东莞市兆丰精密仪器有限公司
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Abstract

The utility model relates to a full-automatic multi-functional sensor geometrical measurement system, which comprises a base, an X-direction operating platform, a Y-direction operating platform, an upright post, a protective housing and a Z-direction operating platform, and the Z-direction operating platform comprises a slide way seat, a Z-axis lifting drive platform assembly, a Z-axis high-precision linear guide way, a Z-axis precision grating ruler, a Z-direction lifting platform, an integrated optical image unit, a sliding plate, an LED program-controlled illuminator, a touch-triggered probe and a CCD laser displacement sensor. During use, all target objects are placed on a glass carrying table, a full closed-loop motion control system, the integrated optical image unit, the CCD laser displacement sensor and the touch-triggered probe in the system are utilized to carry out each measurement operation, including geometrical measurement, planeness measurement, surface roughness measurement, geometrical tolerance measurement, and thereby the system has the advantages of powerful function, high precision, high automation degree, simple operation, high cost performance, reasonable structure design, unique and excellent component selection and wide application range.

Description

全自动多功能传感器几何测量系统 Automatic multifunction sensor geometry measurement system

【技术领域】 TECHNICAL FIELD

[0001] 本实用新型涉及一种高精密测量系统,具体是一种用于制造领域中的全自动多功 [0001] The present invention relates to a high-precision measurement system, in particular a method of manufacturing the field for automatic multi-function

能传感器几何测量系统。 Energy sensor geometry measurement system. 【背景技术】 【Background technique】

[0002] 随着世界经济一体化技术进步和发展,伴随着国内的制造工艺技术不断进步和提高,同时也伴随客户对产品的质量及精度要求越来越高。 [0002] As technology advances and the development of world economic integration, along with the domestic manufacturing technology continues to progress and improve, but also accompanied clients on the quality and accuracy of the product have become increasingly demanding. 现有用于加工产品工艺的机器大部分都是具有单一加工某工艺步骤的功能,若需要加工成某个完整的产品,则需要多台具有加工不同工艺的机器,导致设备利用率低及资金占用率大。 Most of the existing machine technology for processing products are functional processing of a single process step, if need be processed into a complete product, you need multiple machines with different processing technology, leading to low capacity utilization and capital occupation great rate. 另外,加工出来的产品的质量精度低、生产成本高、操作复杂以及自动化程度低。 Further, the low mass accuracy of processing of products, high production costs, complexity of operation, and low degree of automation.

【实用新型内容】 [SUMMARY

[0003] 本实用新型的技术目的是为了解决上述现有技术存在的问题而提供一种全自动多功能传感器几何测量系统,该全自动多功能传感器几何测量系统融汇于光学、激光技术、 机械、电子、自动化控制及计算机图像数字技术而成的,其具有功能强大、精度高、自动化程度高、操作简单、性价比优、结构设计合理、构件选材独特优良以及适用范围广阔的特点。 [0003] The technical object of the present invention is to solve the prior art problems and to provide a sensor-automatic geometric measuring system, the automatic multi sensor systems integrate the optical geometric measurement, laser technology, mechanical , electronic, computer and automation technology digital image formed which has a powerful, high-precision, high degree of automation, simple, cost advantages, rational design, selection of unique members and broad scope of excellent characteristics. [0004] 为了实现上述技术问题,本实用新型所提供一种全自动多功能传感器几何测量系统,包括底座、安装于底座上的X向工作台以及安装于X向工作台底部的Y向工作台;垂直竖立安装于底座上的立柱、安装于立柱上端的防护外罩壳体以及安装于立柱与防护外罩壳体之间的Z向工作台;其特征在于:所述的Z向工作台包括固定于防护外罩壳体顶部的滑轨座、与滑轨座连接的Z轴升降传动台组、设置于Z轴升降传动台组一侧部的Z轴高精密直线导轨、设置于Z轴升降传动台组另一侧部的Z轴精密光栅尺、安装于Z轴升降传动台组底端的Z向升降移动台、设置于Z向升降移动台外侧的光学影像集成装置、安装于Z向升降移动工作台底部的滑板、穿过于滑板上的光学影像集成装置尾端连接的LED程控照明装置、 安装于LED程控照明装置一侧部的与滑板连接一起的探针触发测头、 [0004] To achieve the above technical problem, the present invention is to provide an automatic multi-function sensor geometry measurement system, comprising a base, mounted on the base of the X stage to the bottom stage, and is mounted on the Y-table X ; mounted to stand vertically on the column base, the column is attached to the upper end of the housing and a protective cover is attached to the Z protecting shield between the column and the table housing; wherein: said stage comprises fixed to the Z-direction protective top rail seat housing case, the Z-axis from the rail seat lift transmission station group, the high precision linear guide is provided on the Z-axis elevator drive platform group Z-axis side portion, provided on Z-axis table lift transmission group Z-axis scale precision the other side portion, a bottom end attached to the Z-axis elevator drive platform elevation set to the mobile station Z, Z disposed in the optical imaging device moving up and down the outside of the integrated station, Z is attached to the bottom of the vertical movement table skateboard, programmable LED lighting device through the integrated device to the optical image on the slide trailing end connected programmable LED illumination apparatus is attached to a side portion connected to the slider with the probe trigger probe, 安装于LED程控照明装置另一侧部的与中间隔板连接一起的CCD激光位移传感器。 Attached to the CCD laser displacement sensor connected to the other intermediate partition programmable LED illumination apparatus of the side portions together.

[0005] 依据上述主要技术特征,所述的X向工作台包括安装于立柱底端处的X向传动组、 安装于X向传动组上面的X向移动平台、安装于X向移动平台上面的玻璃载物台、安装于X 向移动平台底面两侧的高精密交叉滚子导轨以及安装于高精密交叉滚子导轨侧面的X向精密光栅尺。 [0005] According to the above main technical features, including the X-stage mounted on the bottom end of the column to the X group transmission, the mobile platform is attached to X, X attached to the mobile platform above the above transmission group X stage glass mounted to the high-precision X-direction intersecting both sides of the bottom surface of the mobile platform mounted on roller guides and a high-precision X cross roller guide to a side surface of the precision grating.

[0006] 依据上述主要技术特征,所述的Y向工作台包括安装于X向移动平台底端的Y向移动平台、安装于X向精密光栅尺底面的Y向精密光栅尺、安装于Y向精密光栅尺侧面的Y 向传动组以及安装于Y向传动组背面的Y向高精密直线导轨。 [0006] According to the above main technical characteristics, according to the Y attached to the X stage comprises a mobile platform, attached to the bottom of the mobile platform in the Y direction X Y precision of the bottom surface of the grating scale precision, the precision is attached to Y Y rail side of the scale to the high precision linear actuator is attached to the Y group and the Y group on the back of the drive.

[0007] 依据上述主要技术特征,所述的防护外罩壳体包括安装于立柱上的立柱防护外罩体、安装于立柱防护外罩体正面的外围防护外罩体以及安装于底座侧面的底座防护外罩体。 [0007] According to the above main technical feature, the housing comprises a protective cover attached to the vertical posts on the protective outer cover, attached to the front of the column protective outer cover the outer cover and the base perimeter protection shield is attached to the outer cover of the chassis side. [0008] 依据上述主要技术特征,所述的光学影像集成装置包括固定于滑板上的集成装置、连接于集成装置下端的单筒显微镜以及安装于单筒显微镜下端上的连接件。 [0008] According to the above main technical characteristics, said optical imaging means comprises an integrated fixing means for integration on the slide, is connected to the lower end of the integrated device to monocular microscope and a connecting member mounted on the lower end monocular microscope.

[0009] 依据上述主要技术特征,所述的LED程控照明装置包括照明灯、安装于照明灯内 [0009] According to the above main technical feature, the lighting device comprises an LED illumination lamp programmable, mounted on the inner lights

部的镜头、安装于镜头上部的折射镜、设置于照明灯内部的表面光环以及安置于镜头下部 The lens portion attached to the upper portion of the refractor lens, disposed in the interior illumination lamp disposed in a lower surface of the lens and halo

的工件。 Workpiece.

[0010] 依据上述主要技术特征,所述的探针触发测头包括触发主体、设置于触发主体上端的探针螺帽以及设置于触发主体下端的探针测头。 [0010] According to the above main technical feature, the touch probe includes a probe body a trigger, the trigger is provided at the upper end of the probe body and a nut disposed at the lower end of the body of a trigger probe heads.

[0011] 依据上述主要技术特征,所述的CCD激光位移传感器包括传感器主体、设置于传 [0011] According to the above main technical characteristics, the CCD laser displacement sensor comprises a sensor body provided in mass

感器主体内部的垂直方向上的半导体镜头、活动安装于半导体镜头上的发射器镜头、安装 The semiconductor lens, activity in the vertical direction inside the sensor body is attached to the lens on a semiconductor emitter lens mounted

于传感器主体内部的倾斜方向的接收器镜头以及安装于接收器镜头上面的CCD。 In the oblique direction inside the sensor body is attached to the receiver lens and a receiver above the lens CCD.

[0012] 依据上述主要技术特征,所述的Z轴升降传动台组是由伺服马达驱动滚珠丝杠旋 [0012] According to the above main technical feature, the Z-axis table group lift transmission driven by a servo motor rotating a ball screw

转带动Z向升降移动台动换为直线运动的传动机构。 Z rotation drive into a linear movement of the movable transducer actuator to lift the mobile station.

[0013] 本实用新型的有益技术效果:因所述的Z向工作台包括固定于防护外罩壳体顶部的滑轨座、与转动座体连接的Z轴升降传动台组、设置于Z轴升降传动台组一侧部的Z轴高精密直线导轨、设置于Z轴升降传动台组另一侧部的Z轴精密光栅尺、安装于Z轴升降传动台组底端的Z向升降移动台、设置于Z向升降移动台外侧的光学影像集成装置、安装于Z向升降移动工作台底部的滑板、穿过于滑板上的光学影像集成装置尾端连接的LED程控照明装置、安装于LED程控照明装置一侧部的与中间隔板连接一起的探针触发测头、安装于LED 程控照明装置另一侧部的与中间隔板连接一起的CCD激光位移传感器。 [0013] In the present invention the beneficial technical effects: due to the Z stage comprises a protective casing fixed to the top of the slide housing seat, rotation of the Z axis base body connected to the drive platform lift assembly disposed in the Z-axis movements high-precision linear guide stage Z-axis drive portion side groups, is provided in the Z-axis drive platform lift another portion of the set of side Z-axis precision grating, attached to the bottom end of the Z-axis elevator drive platform elevator group Z to the mobile station, provided Z in the integrated optical imaging means is moved vertically outboard, Z is attached to the bottom of the slide table is moved up and down through the trailing end of the LED illumination apparatus connected to programmable optical image on the slide means integrated, programmable LED illumination apparatus is attached to a and the intermediate partition side portion are connected with a probe trigger probe, is attached to the CCD laser displacement sensor connected to the other intermediate partition programmable LED illumination apparatus of the side portions together. 使用时,可以将不同材质、表面状况、透明及半透明的所有目标物体放置于玻璃载物台上面,再利用本系统中的由高精密性线滑轨或高精密V型交叉导轨或Z轴高精密直线导轨和由大理石平板组合的X、 Y、 Z工作台形成的X、 Y、 Z三维坐标移动台及精滚珠丝杠、伺服马达和精密光栅尺组合实现的全闭环运动控制系统、光学影像集成装置、CCD激光位移传感器、探针触发测头,能够实现各复杂的接触与非接触几何测量,平面度测量,表面粗糙度测量,形位公差测量的测量工作,从而达到其具有功能强大、精度高、自动化程度高、操作简单、性价比优、结构设计合理、 构件选材独特优良以及适用范围广阔的特点。 When used, different materials, surface conditions, and semi-transparent for all of the target object placed on the glass above the stage, and then using a high-precision high-precision line or V-shaped rail cross rail, or Z-axis of the system high-precision linear guide, and a combination of X marble plate X, Y, Z table is formed, closed loop motion control system Y, Z three dimensional coordinates of the mobile station and fine ball screw, servo motor, and a combination of the precision grating, the optical integrated video apparatus, the CCD laser displacement sensor, a probe trigger probe, the complexity of each contact can be achieved with non-contact measurement geometry, measuring flatness, surface roughness measurement, measurements measured geometric tolerances, to achieve with a powerful high precision, high degree of automation, simple, cost advantages, reasonable structure, the range of selection of unique member excellent in characteristics and the application of broad. 另外,由融汇于光学、激光技术、机械、电子、 自动化控制及计算机图像数字技术而成的几何测量系统,可以适用于精密机械加工、模具、 五金、塑胶、电子、手机配件、纺织品、工艺品、冲压件、PCB板、钟表、各种机械配件、刀模、汽车零配件及教学、科研产品的检测、研发等领域,有利于具有很好的推广及使用价值。 In addition, the integrate optical, laser technology, mechanical, electronic, automatic control technology and computer digital image obtained by geometrical measurement system can be applied to precision machining, die, metal, plastics, electronics, mobile phone accessories, textiles, handicrafts , stamping parts, PCB, watches, machinery parts, die cutter, auto parts and teaching, scientific research and product testing, research and development and other fields, is conducive with good promotion and use value. [0014] 下面结合附图和实施例,对本实用新型的技术方案做进一步的详细描述。 [0014] accompanying drawings and the following embodiments, further detailed description of the technical solution of the present invention.

【附图说明】 BRIEF DESCRIPTION

[0015] 图1是本实用新型中全自动多功能传感器几何测量系统的立体示意图; [0016] 图2是本实用新型中光学影像集成装置的示意图; [0017] 图3是本实用新型中LED程控照明装置的示意图; [0018] 图4是本实用新型中探针触发测头的示意图; [0019] 图5是本实用新型中CCD激光位移传感器的示意图. [0015] FIG. 1 is a perspective schematic view of the present invention in automatic multifunction sensor geometry measurement system; [0016] FIG. 2 is a schematic diagram of the present invention, the optical image of the integrated device; [0017] FIG. 3 is a LED in the present invention a schematic view of an illumination device programmed; [0018] FIG. 4 is a schematic view of the probe of the present invention trigger probe; [0019] FIG. 5 is a schematic view of the present invention in CCD laser displacement sensor.

【具体实施方式】 【Detailed ways】

[0020] 请参考图1至图5所示,下面结合具体实施例来说明一种全自动多功能传感器几 [0020] Please refer to FIG. 1 to FIG. 5, in conjunction with the following specific examples describe a few automatic multi-function sensor

4何测量系统,包括底座1、安装于底座1上的X向工作台以及安装于X向工作台底部的Y向工作台;垂直竖立安装于底座1上的立柱2、安装于立柱2上端的防护外罩壳体以及安装于立柱2与防护外罩壳体之间的Z向工作台。 4 where the measuring system includes a base 1, X 1 is mounted on the base of the Y stage to the bottom stage of the table and is attached to the X-direction; vertical upright mounted to the column on the base 12, is attached to the upper end of the pillar 2 and a protective cover attached to the housing between the column Z and the protective housing case 2 to the table.

[0021] 所述的底座1、立柱2、移动台均采用优质天然大理石制作,Z向升降移动台采用优质航空硬铝合金制作,材料特性稳定质量轻,使设备具有高精度、高稳定性和很低的运动贯 Base 1 [0021] according to, column 2, the mobile station are made of high quality natural marble, Z high quality aviation hard aluminum alloy to lift the mobile station, light quality and material properties, so that the device with high precision, high stability and low penetration movement

[0022] 所述的X向工作台包括安装于立柱2底端处的X向传动组31、安装于X向传动组31上面的X向移动平台32、安装于X向移动平台32上面的玻璃载物台33、安装于X向移动平台32底面两侧的高精密交叉滚子导轨34以及安装于高精密交叉滚子导轨34侧面的X 向精密光栅尺35。 [0022] The X-direction stage comprises a column 2 attached to the bottom end of the transmission group X 31, X 32 is attached to, mounted on the X direction above the glass 32 to the mobile platform moves the platform 31 above the transmission group X stage 33 mounted on the mobile platform 32 X intersecting sides of the bottom surface of high precision roller guide 34 and is attached to the high-precision cross roller guide 34 to the side of the X precision grating 35. 所述的X向移动平台32通过高精密交叉滚子导轨34联接导向,在Y向移动平台41上沿X向左右移动。 X 32 by the cross roller guide high-precision guide 34 is coupled to the mobile platform to move around in the X-direction moving stage 41 in Y. 所述的X向传动组31是由X向的伺服马达驱动滚珠丝杠旋转带动X向移动平台32做直线运动,并控制X向移动台32的点位或轨迹运动,使得其相应速度快,定位准确。 X is the group 31 driven by the servo motor drive to a ball screw driven rotary X X linear motion of the mobile platform 32, and controls the X-point to the mobile station 32 or the trajectory, such that its corresponding fast speed, Positioning accuracy.

[0023] 所述的Y向工作台包括安装于X向移动平台32底端的Y向移动平台41、安装于X向精密光栅尺35底面的Y向精密光栅尺42、安装于Y向精密光栅尺42侧面的Y向传动组43以及安装于Y向传动组43背面的Y向高精密直线导轨44。 [0023] The stage includes a Y-direction Y is attached to X 32 to the bottom of the mobile platform 41, mounted on the X-precision grating 35 to the bottom surface of the precision grating Y 42, Y is attached to the moving platform to precise scale 42 Y-side transmission unit 43 and a Y rail 44 is mounted on the rear surface 43 to the Y group to the high precision linear actuator. 所述的Y向移动平台41 通过高精直线导轨44联接导向,在底座1上沿Y向前后移动。 41 is the Y guide rail 44 by a high precision linear guide is coupled to the mobile platform, on the chassis 1 in the Y move forward and backward. 所述的Y向传动组43是由Y向的伺服马达驱动滚珠丝杠旋转带动Y向移动平台41做直线运动,并控制Y向移动平台41的点位或轨迹运动,相应速度快,定位准确。 Y is the driven gear 43 is set by a servo-motor driven rotation Y-Y of the ball screw to linear motion of the mobile platform 41, and controls the Y-point or trajectory of the mobile platform 41, corresponding fast speed, accurate positioning .

[0024] 所述的防护外罩壳体包括安装于立柱2上的立柱防护外罩体51、安装于立柱防护外罩体51正面的外围防护外罩体52以及安装于底座1侧面的底座防护外罩体53。 Protective housing case [0024] The guard comprises uprights attached to the outer cover 51 on the upright 2, is mounted on the periphery of the front protective cover 52 and the base protective cover guard column cover 51 is attached to a side of the base 53. [0025] 所述的Z向工作台包括固定于防护外罩壳体顶部的滑轨座61、与滑轨座61连接的Z轴升降传动台组62、设置于Z轴升降传动台组62 —侧部的Z轴高精密直线导轨63、设置于Z轴升降传动台组62另一侧部的Z轴精密光栅尺64、安装于Z轴升降传动台组62底端的Z向升降移动台65、设置于Z向升降移动台65外侧的光学影像集成装置66、安装于Z 向升降移动台65底部的滑板67、穿过于滑板67上的光学影像集成装置66尾端连接的LED 程控照明装置68、安装于LED程控照明装置68 —侧部的与滑板67连接一起的探针触发测头69、安装于LED程控照明装置68另一侧部的与滑板67连接一起的CCD激光位移传感器60。 [0025] Z according to the table includes a fixed base 61 to the top of the guard rail housing case, the Z-axis slide base 61 is connected to the lift transmission station set 62, disposed in the Z-axis table lift transmission set 62 - Side Z-axis high-precision linear guide portion 63, disposed in the Z-axis Z-axis movements precision grating set 62 to 64 further transmission side portion attached to the bottom end of the Z-axis elevator drive platform set 62 is moved vertically to the Z stage 65, is provided Z in the vertical movement of the optical image integration device 66 outside the station 65, program-controlled LED lighting device attached to the trailing end 66 connected to the optical image integration unit Z stage 65 moved vertically at the bottom of the slide 67, the slide plate 67 through to 68, is mounted programmable LED illumination apparatus 68 to the - side portion of the slider 67 is connected to the trigger probe with a probe 69, mounted on the CCD laser displacement sensor 60 is connected to the slider 67 with the other side portion 68 of the LED illumination apparatus programmed.

[0026] 所述的Z轴升降传动台组62是由Z轴运动方向的伺服马达驱动滚珠丝杠旋转带动Z轴高精密直线导轨63为直线运动的传动构件,并控制Z向升降移动台65的点位或轨迹运动,使得其相应速度快,定位准确。 [0026] the group Z-axis elevator drive platform 62 is driven by a servo motor moving direction Z-axis ball screw driven Z axis rotation of high precision linear guide 63 for the linear movement of the drive member, and controls the Z stage 65 to vertical movement point position or trajectory, so that the corresponding fast speed, accurate positioning. 所述的Z向升降移动台65是由滑轨座61、Z轴高精密直线导轨63和滑板67组成。 Said Z-moving stage 65 by the slide holder 61 is to lift, Z-axis high-precision linear guide 63 and the slider 67 composition.

[0027] 所述的光学影像集成装置66包括固定于滑板67上的集成装置、连接于集成装置下端的单筒显微镜以及安装于单筒显微镜下端上的连接件。 [0027] The optical integrated device 66 includes a fixed image in an integrated device on a slide 67, is connected to the lower end of the integrated device to monocular microscope and a connecting member mounted on the lower end monocular microscope. 使用时,先将被测目标物体固定放置于玻璃载物台33上,开启LED程控照明装置68上被选择合适的组合照明方式,根据被测目标物体特征在"兆丰精密测量软件"内编辑好自动测量程序,保存并运行已经编辑好的测量程序,即可按设置要求取的所需的数据,在该种工作模式下是基于计算机像素处理技术所进行测量的工作,被测目标物体经可连续变倍的单筒显微镜放大成像,再由CCD摄 In use, the first object is fixed to the measured object placed on the stage glass 33, the selected open illumination suitable combination of the program-controlled LED lighting device 68, according to the measured characteristics of the target object in the editor "Mega precision measurement software" good automatic measurement procedure, and save the edited measurement program has been running, according to the required data set is required to take, in which operating modes are measured based on the work of pixel processing computer technology, the target object measured by monocular continuous zoom magnification imaging microscope, a CCD camera and then

5像头采集视频信号给计算机软件处理。 5 like the first video signal to a computer acquisition software processing.

[0028] 所述的LED程控照明装置68包括照明灯681、安装于照明灯681内部的镜头682、 安装于镜头682上部的折射镜683、设置于照明灯681内部的表面光环684以及安置于镜头682下部的工件685。 [0028] The LED illumination apparatus 68 includes a programmable illumination lamp 681, the lamp 681 is mounted inside the lens 682, 683 is attached to the upper portion of the refractor lens 682, an illumination lamp disposed in the interior surface 681 of the optical circulator 684 and the lens disposed the lower portion 682 of the workpiece 685. 所述的LED程控照明装置68可根据被测目标物的不同形状和表面颜色选择不同的组合方式照明,其组合方式为轮廓光、同轴光以及表面环光构成的,其中表面环光可分为"五环八区"任意组合并由软件程序控制,任选其中的一种或几种方式组合照明,其操作均可由软件程序控制。 The LED illumination apparatus 68 may be programmed according to the different surfaces of different shapes and color selection test target illumination combinations, which combinations of rim light, and a surface light coaxial ring made of light, wherein the optical surface of the ring can be divided into as "rings eight areas" by any combination of software control program, wherein optionally one or more lighting combination, the operation can be controlled by a software program.

[0029] 所述的探针触发测头69包括触发主体691、设置于触发主体691上端的探针螺帽692以及设置于触发主体691下端的探针测头693。 [0029] The probe 69 includes a trigger trigger probe body 691, a nut 691 provided on the upper end of the trigger probe main body 692 and a trigger 691 disposed on the lower end of the body 693 of the probe heads. 将被测目标物体固定在玻璃载物33上, 再根据被测目标物体特征在"兆丰精密测量软件"内进行编辑好自动测量程序,保存并运行已编辑好的测量程序,即可按设置要求取的所需的数据。 The measured target object was fixed on a glass slide 33, then the edited automatic measurement procedure, and save the edited measurement program running in the "Mega precision measurement software" according to the measured characteristics of the target object, can be provided by requirements to take data. 在这种工作模式下是由探针测头693接触到被测目标物体的瞬间所产生的一个通断电子信号转换而来数据指令,传递给计算机软件,并记录此点的三维坐值,再由计算机软件做后台处理后输出符合用户要求的测量结果。 In this mode the probe is a contact probe by the target object 693 to be measured in a moment generated electrical signal converted from off instruction data transmitted to the computer software, and recording three-dimensional coordinate values ​​of this point, and then computer software to do background processing the output measurements in line with user requirements.

[0030] 所述的CCD激光位移传感器60包括传感器主体601、设置于传感器主体601内部的垂直方向上的半导体镜头602、活动安装于半导体镜头602上的发射器镜头603、安装于传感器主体601内部的倾斜方向的接收器镜头604以及安装于接收器镜头604上面的CCD605。 [0030] the CCD laser displacement sensor 60 includes a sensor body 601, is provided on a semiconductor camera in the vertical direction of the inner body 601 of the sensor 602 attached to the active transmitter on a semiconductor camera lens 602,603, 601 is mounted inside the sensor body the receiver lens 604, and the inclination direction of upper 604 attached to the receiver lens CCD605.

[0031] 所述的CCD激光位移传感器60是采用三角形测量法的测量原理构成的,反射光在Li-CCD605上的位置随着目标物体位置的改变而改变,通过检测该变化就可以测量物体的位移量。 [0031] the CCD laser displacement sensor 60 is constituted, the position of the reflected light on the Li-CCD605 changes as the position of the target object is changed, by detecting the change in the measurement object can be measured using the principle of triangulation method the amount of displacement. 在这种工作模式下的操作方法和前两种模式一样:将被测目标物体固定在玻璃载物台33上,再根据被测目标物体特征在"兆丰精密测量软件"内进行编辑好自动测量程序, 保存并运行已编辑好的测量程序,即可按设置要求取的所需的数据。 Operation in this mode of operation as the previous two modes: the target object to be tested is fixed on the stage glass 33, then a good editor in "Mega precision measurement software" automatically according to the measured characteristics of the target object measurement procedure, and save the edited measurement program runs, the required data can be taken by the setup requirements. 在这种工作模式下系统是将CCD激光位移传感器60本身的检测距离再加上Z轴上下移动的距离合成得到Z轴坐标值。 In this mode the system is a CCD laser displacement sensor 60 detects the distance itself plus the distance moved in the Z-axis Z-axis coordinate value synthesized.

[0032] 如图l所示,所述的全自动多传感器几何测量系统的动作执行机构如下:所述的Y 向移动平台41通过Y向高精直线导44轨联接导向,在底座1上沿Y向前后移动。 [0032] As shown in Fig L, the automatic multi-sensor operation of the actuator geometry measurement system are as follows: the Y-Y to the mobile platform 41 to the high precision linear guides coupled to the guide rail 44, along the base 1 Y after moving forward. 所述的X 向移动平台32通过高精密交叉滚子导轨304联接导向,在Y向移动平台41上沿X向左右移动,以此组成XY平面坐标系。 X 32 by the cross roller guide high-precision guide 304 coupled to the mobile platform to move around, the composition of this coordinate system XY plane along the X direction moving stage 41 in Y. 所述的Z向升降移动台65是由滑轨座61、 Z轴高精密直线导轨63和滑板67组成。 Said Z-moving stage 65 by the slide holder 61 is to lift, Z-axis high-precision linear guide 63 and the slider 67 composition. 沿Z向上下移动且垂直于XY平面,从而形成XYZ三维空间坐标系。 Z moving along the XY plane and perpendicular to the vertical, thereby forming a three-dimensional XYZ coordinate system. 所述的Z轴升降传动台组62、X向传动组31、 Y向传动组43分别是由XYZ方向的伺服马达驱动滚珠丝杠将旋转动换为直线运动,分别控制Z向升降移动台65、X向移动平台32、Y向移动平台41完成空间三维点位或轨迹运动,响应速度快,定位准确。 The Z-axis table lift transmission group 62, X, Y, respectively, the transmission unit 43 to the transmission unit 31 is driven by a servo motor to a ball screw rotation direction XYZ motion to linear motion converter, to control the Z stage 65 moved up and down, X to the mobile platform 32, Y 41 to complete the three-dimensional space to a mobile platform or trajectory points, fast response, precise positioning. [0033] 所述的具有测量功的光学影像集成装置66、 CCD激光位移传感器60、探针触发测头69三种测量装置分别同一固定装配在Z向升降移动台62上,并标定三者相对坐标值,其测量数据可以无缝对接,经过计算机软件后台处理后还原到同一坐系内,因此被测目标物体在同一位置可以根据工件特征和测量精确度要求任选一种最理想之方式测量,在自动编程测量时三种测量装置可以复合同一个程序中工作。 [0033] The integrated optical image measuring apparatus 66 has a function of, the CCD laser displacement sensor 60, the probe trigger probe 69 are the same three kinds of measuring devices fixedly mounted in the Z-direction on the vertically movable table 62, and the three calibration opposite coordinate value, the measurement data may be seamless, after reduction of background processing computer software to take the same system, so the measured position of the target object at the same accuracy requirements may optionally wherein the workpiece and measuring one of the best way of measuring when the automatic programming apparatus measuring three measurements can be multiplexed in a program contract work.

[0034] 在坐标系统中,都是以XYZ方向上,不同的精密光栅尺来标定拾取的。 [0034] In the coordinate system, are based on the XYZ directions, a different scale calibrated precision picked. 整个测量系统设置有机械坐标原点"0",每次启动系统时可自动回到坐标原点"0",以保证系统的重 Whole measuring system is provided with a mechanical coordinate origin "0", the coordinate origin can be automatically returned to "0" whenever the system is to ensure the weight of the system

现精度。 Now precision. 当然用户也可以根据需要设置临时的用户坐标系以方便测量工作的完成。 Of course, the user can also set a temporary user coordinate system as necessary to facilitate the completion of the measurements.

[0035] 所述的X向移动平台32、高精密交叉滚子导轨34、Y向移动平台41、高精直线导轨 [0035] X to the mobile platform 32, a high-precision cross roller guides 34, Y 41, high-precision linear guide to the mobile platform

以及底座组合搭配的独具特色的两层工作台结构,其特点是:结构简单、装配方便、成本低、 And a unique two-table combination with the base structure, characterized by: simple structure, easy assembling, low cost,

稳定性好、精度更高;底座、立柱、移动台均采用优质天然大理石制作,Z向升降滑动台65采 Good stability, high accuracy; base, column, using a mobile station are made of high-quality natural marble, Z slide table 65 to lift Mining

用优质航空硬铝合金制作,材料特性稳定质量轻,使设备具有高精度、高稳定性和很低的运 Air hard aluminum alloy with a high, stable light weight material properties, so that the device with high precision, high stability and low transport

动贯量。 Move consistent amount.

[0036] 本几何测量系统还可以适合于不同材质、不同表面状况、透明及半透明的所有目标物体测量方法来实现。 [0036] This geometry measurement system may be further adapted to different materials, different surface conditions, and semi-transparent for all target objects measurement methods. 其主要功能部件有:由高精密性线滑轨或高精密V型交叉导轨以及大理石移动平板组合而成的X、Y、Z三维坐标移动台、精滚珠丝杠、伺服马达、精密光栅尺组合实现的全闭环运动控制系统、光学影像集成装置66、CCD激光位移传感器60、探针触发测头69。 Its main features are: a high precision high-precision line V-rail or cross rail as well as a combination of flat marble mobile X, Y, Z three dimensional coordinates of the mobile station, precision ball screw, servo motor, precise grating in combination closed loop motion control system implementation, integrated optical imaging device 66, CCD laser displacement sensor 60, the probe 69 to trigger probe. 本几何测量系统可以通过一台设备实现了以往要由多种相关设备相互配合才能完成的工作任务,并且测量数据和测量基准可共享,可操作性强,使用方便,效率高。 This geometry measurement system may be realized by a conventional device to be used by multiple devices associated with each other to complete the task, and the measurement and the reference measurement data may be shared, easy to operate, easy to use and high efficiency. 同时,也可以解决了以往同类设备无法测量或无法精确测量的或者非接触方式的透明及半透明目标物体,以及柔软目标物体精确测的技术难题目,极大的增强了该设备的测量功能。 At the same time, we can solve the conventional technical difficulties title or similar equipment can not be measured accurately measure translucent or transparent and non-contact of a target object, the target object and the accurate measurement of the softness, greatly enhanced measurement capability of the device. [0037] 所述的X、 Y移动平台32、41是采用两层结构直接在底座上移动组成X_Y平面坐标,伺服马达驱动精密滚珠丝传动,辅以光栅尺示值实时补偿,真正实现了全闭环控制、精确定位。 [0037] The X, Y, the mobile platform 32, 41 is two-layer structure directly on the base composition X_Y plane coordinate movement, motor driven precision ball screw servo drive, combined with real-time compensation scale indication, the real full closed-loop control, precise positioning. CCD激光位移传感器60、光学影像集成装置66以及探针触发测头69分别同一固定装配在Z向升降移动台65上,并且标定相对坐标值,使其在三种测量方式下所取的测量数据可以无缝对接,经过计算机软件后台处理后还原到同一坐系内。 CCD laser displacement sensor 60, the optical integrated device 66 and the image probe trigger probe 69 are fixedly mounted in the same vertical movement on the Z stage 65, the relative coordinate value and the calibration, so the measurement data measured in three ways, taken It can be seamless, after a reduction of background processing computer software to sit in the same system. 所述的底座1、立柱2、 移动台均采用优质天然大理石制作,Z向升降移动台65采用优质航空硬铝合金制作,材料特性稳定质量轻,使设备具有高精度、高稳定性和很低的运动贯量。 The base 1, column 2, the mobile station are made of high quality natural marble, Z high quality aviation hard aluminum alloy to lift the mobile station 65, the material properties of light weight and stability, so that the device with high precision, high stability and low consistent amount of movement.

[0038] 所述的几何测量系统可以沿X\Y\Z三轴方向运动,取得任意三维坐标值。 [0038] The geometry of the measurement system may be in the X \ Y \ Z three-axis direction, to obtain an arbitrary three-dimensional coordinate values. 由操作软件发送控制指令到伺服驱动器,该伺服驱动器驱动伺服马达带动滚珠丝杠旋转,滚珠丝杠将旋转运动转换为直线运动分别带动X\Y\Z三轴移动平台完成空间三维点位或轨迹运动。 Controlled by the operating software instructions sent to the servo driver, the servo driver drives a servo motor driven ball screw rotates, the ball screw converts rotational motion into linear motion are driven X \ Y \ Z triaxial mobile internet complete three-dimensional spatial trajectory of points or motion.

[0039] 所述的标定滚珠丝杠导程是根据目标位置计算机软件预算出伺服驱动器应发送复数个具有正负方向之分的脉冲信号到伺服马达,当伺服马达接近目标位置时由精密光栅尺实时检测已达位置并将数据反馈到计算机及时修正控制指令,从而系统可精确到达目标位置。 Ball screw lead Calibration [0039] The servo driver is to be transmitted a plurality of pulse signals having positive and negative directions of the points based on the target position of the computer software to estimate the servomotor, when the servomotor near the target position by a precision scale real-time detection of the position reached and timely correction data back to the computer control command, so that the system can accurately reach the target position. 此种控制方式的特点为:预先设定一个目标位置,在接近目标位置时再实时检测反馈,这种全闭环的控制方式大大提高了计算机的运算速度和系统的响应速度,同时又保证了定位运动的精确性。 Features such as control: a target position set in advance, and then real-time detection feedback when approaching the target position, the closed loop control that greatly improves response speed and operation speed of the computer system, while ensuring the positioning the accuracy of movement.

[0040] 综上所述,因所述的Z向工作台包括固定于防护外罩壳体顶部的滑轨座61、与滑轨座61连接的Z轴升降传动台组62、设置于Z轴升降传动台组62 —侧部的Z轴高精密直线导轨63、设置于Z轴升降传动台组62另一侧部的Z轴精密光栅尺64、安装于Z轴升降传动台组62底端的Z向升降移动台65、设置于Z向升降移动台65外侧的光学影像集成装置66、安装于Z向升降移动台65底部的滑板67、穿过于滑板67上的光学影像集成装置66 尾端连接的LED程控照明装置68、安装于LED程控照明装置68 —侧部的与滑板67连接一起的探针触发测头69、安装于LED程控照明装置68另一侧部的与滑板67连接一起的CCD激光位移传感器60。 [0040] In summary, due to the Z stage comprises a protective casing fixed to the top of the slide housing seat 61, the Z-axis slide base 61 is connected to the lift transmission station group 62, disposed in the Z-axis lift drive platform set 62 - Z-side portion of the high-precision linear guide 63, disposed in the Z-axis set 62 lifts the other side portion of the Z-axis drive precision grating 64, is attached to the bottom end of the Z-axis elevator drive platform 62 in the Z group to lifting the mobile station 65, disposed in the Z direction vertical movement of the optical image integration device 65 outside of the station 66, the LED attached to the bottom of the Z-stage 65 vertically movable slide 67, the slide plate 67 to pass through the imaging optical integrated device 66 connected to the trailing end programmable lighting device 68, 68 mounted on the programmable LED lighting device - is connected to the slider 67 along the side of the probe touch probe portion 69, attached to the CCD laser displacement connector 68 with the slider 67 together with another LED lighting device programmed side portion sensor 60. 使用时,可以将不同材质、表面状况、透明及半透明的所有目标物体放置于玻璃载物台上面,再利用本系统中的由高精密性线滑轨或高精密V型交叉导轨或Z轴高精密直线导轨和由大理石平板组合的X、 Y、 Z工作台形成的X、 Y、 Z三维坐标移动台及精滚珠丝杠、伺服马达和精密光栅尺组合实现的全闭环运动控制系统、光学影像集成装置66、 CCD激光位移传感器60、探针触发测头69,能够实现各复杂的接触与非接触几何测量,平面度测量,表面粗糙度测量,形位公差测量的测量工作,从而达到其具有功能强大、精度高、自动化程度高、操作简单、性价比优、结构设计合理、构件选材独特优良以及适用范围广阔的特点。 When used, different materials, surface conditions, and semi-transparent for all of the target object placed on the glass above the stage, and then using a high-precision high-precision line or V-shaped rail cross rail, or Z-axis of the system high-precision linear guide, and a combination of X marble plate X, Y, Z table is formed, closed loop motion control system Y, Z three dimensional coordinates of the mobile station and fine ball screw, servo motor, and a combination of the precision grating, the optical image integration device 66, CCD laser displacement sensor 60, the probe trigger probe 69, can be realized respective complex contact and contactless measurement geometry, measuring flatness, surface roughness measurement, measurements measured geometric tolerances, to achieve which It has a powerful, high-precision, high degree of automation, simple, cost advantages, reasonable structure, the range of selection of unique member excellent in characteristics and the application of broad. 另外,由融汇于光学、激光技术、机械、电子、自动化控制及计算机图像数字技术而成的几何测量系统,可以适用于精密机械加工、模具、五金、塑胶、电子、手机配件、纺织品、工艺品、冲压件、PCB板、钟表、各种机械配件、刀模、汽车零配件及教学、科研产品的检测、研发等领域,有利于具有很好的推广及使用价值。 In addition, the integrate optical, laser technology, mechanical, electronic, automatic control technology and computer digital image obtained by geometrical measurement system can be applied to precision machining, die, metal, plastics, electronics, mobile phone accessories, textiles, handicrafts , stamping parts, PCB, watches, machinery parts, die cutter, auto parts and teaching, scientific research and product testing, research and development and other fields, is conducive with good promotion and use value.

Claims (9)

  1. 一种全自动多功能传感器几何测量系统,包括底座、安装于底座上的X向工作台以及安装于X向工作台底部的Y向工作台;垂直竖立安装于底座上的立柱、安装于立柱上端的防护外罩壳体以及安装于立柱与防护外罩壳体之间的Z向工作台;其特征在于:所述的Z向工作台包括固定于防护外罩壳体顶部的滑轨座、与滑轨座连接的Z轴升降传动台组、设置于Z轴升降传动台组一侧部的Z轴高精密直线导轨、设置于Z轴升降传动台组另一侧部的Z轴精密光栅尺、安装于Z轴升降传动台组底端的Z向升降移动台、设置于Z向升降移动台外侧的光学影像集成装置、安装于Z向升降移动工作台底部的滑板、穿过于滑板上的光学影像集成装置尾端连接的LED程控照明装置、安装于LED程控照明装置一侧部的与滑板连接一起的探针触发测头、安装于LED程控照明装置另一侧部的与中间隔板连 A fully automatic multi-function sensor geometry measurement system, comprising a base, mounted on the base X to the X stage and the Y attached to the bottom of the table to the table; attached to the vertical upright perpendicularly on the base, is attached to the upper end of the column and a protective housing case Z is attached to the housing between a column and protecting shield to the table; characterized in that: said stage comprises a Z-direction is fixed to the top of the seat rail protective housing case, and the seat rail Z-axis elevator drive platform and connected, is provided in the high-precision linear guide Z-axis Z-axis table group lift transmission side portion is provided to the Z axis drive platform lift another portion of the set of side Z-axis precision grating, attached to Z the bottom end of the lift shaft drive platform elevation set to the mobile station Z, Z disposed in the optical imaging device moving up and down the outside of the integrated station attached to the integrated optical imaging means moving up and down the bottom of the Z-slide table, slide through to the trailing end LED lighting device connected programmable, mounted on the slider together with a probe connected to the trigger probe programmable LED illumination apparatus of the side portion attached to the intermediate partition plate attached LED illumination apparatus of another side portion of the programmable 一起的CCD激光位移传感器。 With a CCD laser displacement sensor.
  2. 2. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的X 向工作台包括安装于立柱底端处的X向传动组、安装于X向传动组上面的X向移动平台、安装于X向移动平台上面的玻璃载物台、安装于X向移动平台底面两侧的高精密交叉滚子导轨以及安装于高精密交叉滚子导轨侧面的X向精密光栅尺。 The automatic multi-function sensor according to claim 1 geometry measurement system, wherein: said X-direction on the X stage comprises a column mounted at the bottom end of the transmission group, the transmission is attached to the upper group X X to the mobile platform, the platform is attached to the X-direction moving glass above the stage, is mounted on the X-roller guide high-precision cross bottom surface and both sides of the mobile platform is mounted on a high precision X cross roller guide to a side surface of the precision grating .
  3. 3. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的Y 向工作台包括安装于X向移动平台底端的Y向移动平台、安装于X向精密光栅尺底面的Y向精密光栅尺、安装于Y向精密光栅尺侧面的Y向传动组以及安装于Y向传动组背面的Y向高精密直线导轨。 3. The system-automatic geometric measuring sensor according to claim 1, wherein: said stage comprises a Y-X is attached to the mobile platform, attached to X to Y to the bottom end of the precision grating mobile platform the bottom surface of the precision grating Y, Y Y attached to the side surface of the grating precision high precision linear guide to the rear of the Y group to the drive gear and mounted on the Y group.
  4. 4. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的防护外罩壳体包括安装于立柱上的立柱防护外罩体、安装于立柱防护外罩体正面的外围防护外罩体以及安装于底座侧面的底座防护外罩体。 4. The system-automatic geometric measuring sensor according to claim 1, wherein: said housing comprises a protective cover attached to the vertical posts on the protective outer cover, attached to the periphery of the front protective shield pillar outer cover the outer cover and the protective cover member attached to the base side of the base.
  5. 5. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的光学影像集成装置包括固定于滑板上的集成装置、连接于集成装置下端的单筒显微镜以及安装于单筒显微镜下端上的连接件。 5. The automatic geometric measuring system according to the multifunction sensor as claimed in claim 1, wherein: said integrated optical device comprises an integrated image is fixed to the slide means is connected to the lower end of the integrated device and attached to a microscope monocular Monocular microscope connecting member on the lower end.
  6. 6. 根据权利要求l所述的全自动多功能传感器几何测量系统,其特征在于:所述的LED 程控照明装置包括照明灯、安装于照明灯内部的镜头、安装于镜头上部的折射镜、设置于照明灯内部的表面光环以及安置于镜头下部的工件。 6. The automatic geometric measuring system according to the multifunction sensor as claimed in claim l, wherein: said lighting device comprises an LED illumination lamp programmed, the lens is mounted on the interior lights, mounted on the upper portion of the refractor lens, provided halo interior to the surface of the lamp and the workpiece disposed in the lower portion of the lens.
  7. 7. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的探针触发测头包括触发主体、设置于触发主体上端的探针螺帽以及设置于触发主体下端的探针测头。 7. The system-automatic geometric measuring sensor according to claim 1, wherein: said probe includes a trigger trigger probe body, the nut body is provided on the upper end of the probe trigger and the trigger is provided in the lower end of the body the probe heads.
  8. 8. 根据权利要求l所述的全自动多功能传感器几何测量系统,其特征在于:所述的CCD激光位移传感器包括传感器主体、设置于传感器主体内部的垂直方向上的半导体镜头、活动安装于半导体镜头上的发射器镜头、安装于传感器主体内部的倾斜方向的接收器镜头以及安装于接收器镜头上面的CCD。 8. The automatic geometric measuring system according to the multifunction sensor as claimed in claim l, wherein: said CCD laser displacement sensor comprises a sensor body disposed on a semiconductor camera in the vertical direction inside the sensor body is attached to the semiconductor active transmitter lens on the lens, mounted in an oblique direction inside the sensor body is attached to the receiver lens and a receiver above the lens CCD.
  9. 9. 根据权利要求1所述的全自动多功能传感器几何测量系统,其特征在于:所述的Z轴升降传动台组是由伺服马达驱动滚珠丝杠旋转带动z向升降移动台动换为直线运动的传动机构。 9. Automatic multi-function sensor according to claim 1 geometry measurement system, wherein: the Z-axis table group lift transmission driven by a servo motor rotating a ball screw to drive down the mobile station z rectilinear motion Wrap the transmission mechanism.
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CN105890522A (en) * 2016-06-20 2016-08-24 昆山杰士德精密工业有限公司 3D camera detection equipment
CN107543511A (en) * 2016-06-29 2018-01-05 大族激光科技产业集团股份有限公司 The flatness detecting system and its method of a kind of PCB equipment workbench
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CN108844501A (en) * 2018-05-23 2018-11-20 清华大学 A kind of laser frequency doubling crystal surface vertical measurement system and performance characterization method
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