CN101788257A - Device and method for six degrees of freedom micro pose measurement based on capacitance sensor - Google Patents
Device and method for six degrees of freedom micro pose measurement based on capacitance sensor Download PDFInfo
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- CN101788257A CN101788257A CN201010300293A CN201010300293A CN101788257A CN 101788257 A CN101788257 A CN 101788257A CN 201010300293 A CN201010300293 A CN 201010300293A CN 201010300293 A CN201010300293 A CN 201010300293A CN 101788257 A CN101788257 A CN 101788257A
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Abstract
The invention discloses a device and a method for six degrees of freedom micro pose measurement based on a capacitance sensor, relating to a device and a method for micro pose measurement. The invention aims to accurately obtain an end pose of a micro mechanism. In the device, three sets of capacitance sensors are respectively fixed in through holes on three cuboids of an outer installation block, an inner installation block is arranged in a square groove of the outer installation block, and three adjacent surfaces of the inner installation block are respectively parallel to three inner surfaces of the outer installation block. The method comprises the following steps of fixing one surface of the inner installation block on the micro mechanism to be tested; and obtaining a measurement result by adopting poses with six degrees of freedom of the micro mechanism to be tested of the three sets of capacitance sensors. The invention is suitable for measurement occasions of micro poses of the micro mechanism.
Description
Technical field
The present invention relates to a kind of device and method of micro pose measurement.
Background technology
Along with the fast development of micro-nano technology, the requirement in various precision engineerings field to bearing accuracy improves day by day.In order to realize various high precision operations such as micro-nano device assembling, fiber alignment, biological tissue's manipulation, the jiggle robot technology with nano-precision has obtained paying close attention to widely.In six-freedom micro displacement robot Pose Control and kinematics parameters demarcation, the pose detection is a key wherein.For micromotion mechanism, the precision of measuring method and measurement mechanism has very big influence to measurement result.Therefore, in order to obtain the terminal pose of micromotion mechanism accurately, need to introduce high-precision measurement mechanism and corresponding measuring method.
Summary of the invention
The present invention is in order to obtain the terminal pose of micromotion mechanism accurately, thereby a kind of six degrees of freedom micro pose measurement device and method based on capacitive transducer is provided.
Based on the six degrees of freedom micro pose measurement device of capacitive transducer, it comprises outer mounting blocks, interior mounting blocks and three groups of capacitive transducers, and the quantity of capacitive transducer is two in described every group of capacitive transducer; The integrative-structure that outer mounting blocks vertically is made of mutually three rectangular parallelepipeds, the inside surface of described three rectangular parallelepipeds surrounds a square indentations; All have two through holes on each rectangular parallelepiped of described outer mounting blocks; Three groups of capacitive transducers are separately fixed in the through hole on three rectangular parallelepipeds of outer mounting blocks, and a capacitive transducer is corresponding with a through hole; Interior mounting blocks is a cube structure; Mounting blocks is arranged in the square indentations of outer mounting blocks in described, and three adjacent each other surfaces of interior mounting blocks are parallel with three inside surfaces of the square indentations of outer mounting blocks respectively.
Six degrees of freedom micro pose measurement method based on said apparatus is finished by following steps:
Step 1, a surface of interior mounting blocks is fixed on the micromotion mechanism to be measured;
Step 2, setting X-axis, Y-axis and Z axle are three coordinate axis; The quiet coordinate origin O of described three coordinate axis is based upon the central spot of the square indentations of outer mounting blocks, and three coordinate axis three inside surfaces with the square indentations of outer mounting blocks are vertical mutually respectively;
Step 3, interior mounting blocks is arranged in the square indentations of outer mounting blocks, described in the central point of mounting blocks overlap with quiet coordinate origin O, and three coordinate axis parallel with the corresponding sideline of interior mounting blocks respectively;
Step 4, when micromotion mechanism to be measured motion, six some Bit Shifts of mounting blocks in three groups of capacitive transducer groups are measured;
The one group of capacitive transducer that is positioned at the XOY face is measured the some Bit Shift of two sensor points S1 and S2, obtains S1 point Bit Shift value Δ X
S1With S2 point Bit Shift value Δ X
S2, and according to formula: Δ X=(Δ X
S1+ Δ X
S2)/2, the X of mounting blocks is to shift value Δ X in obtaining; And according to formula: γ-(Δ X
S2-Δ X
S1)/D, mounting blocks is around the corner γ of Z axle in obtaining;
The one group of capacitive transducer that is positioned at the XOZ face is measured the some Bit Shift of two sensor points S3 and S4, obtains S3 point Bit Shift value Δ Z
S3With S4 point Bit Shift value Δ Z
S1, and according to formula: Δ Z-(Δ Z
S3Δ Z
S1)/2, the Z of mounting blocks is to shift value Δ Z in obtaining; And according to formula: β-(Δ Z
S4-Δ Z
S3)/D obtains the corner β of micromotion mechanism to be measured around Y-axis;
The one group of capacitive transducer that is positioned at the YOZ face is measured the some Bit Shift of two sensor points S5 and S6, obtains S5 point Bit Shift value Δ Y
S5With S6 point Bit Shift value Δ Y
S6And according to formula: Δ Y-(Δ Y
S5(Δ Y
S6)/2, the Y of mounting blocks is to shift value Δ Y in obtaining; And according to formula: α-(Δ Y
S6-Δ Y
S5)/D obtains the corner α of micromotion mechanism to be measured around X-axis;
D is the distance between two capacitive transducers in one group of capacitive transducer in the formula;
The one group of capacitive transducer that is positioned at the XOY face is symmetrically distributed in the X-axis both sides; The one group of capacitive transducer that is positioned at the XOZ face is symmetrically distributed in Z axle both sides; The one group of capacitive transducer that is positioned at the YOZ face is symmetrically distributed in the Y-axis both sides.
The one group of capacitive transducer that is positioned at the XOY face is symmetrically distributed in the X-axis both sides; The one group of capacitive transducer that is positioned at the XOZ face is symmetrically distributed in Z axle both sides; The one group of capacitive transducer that is positioned at the YOZ face is symmetrically distributed in the Y-axis both sides.
Apparatus and method of the present invention can be measured the terminal pose of the six-freedom degree of micromotion mechanism to be measured simultaneously, and adopt differential mode, the influence of extraneous factor to measurement result such as float in the time of can effectively reducing; The capacitive transducer that the present invention adopts, relative displacement between two-plate variation is converted into capacitance variations, realize displacement measurement, and every group of capacitive transducer measured two degree of freedom of micromotion mechanism to be measured respectively, thereby obtain the measurement result of six-freedom degree, coupling and interference can not take place between every group.The present invention has the advantages that resolving power is strong, dynamic response is fast.
Description of drawings
Fig. 1 is the structural representation of apparatus of the present invention; Fig. 2 is that the position of the specific embodiment of the present invention three China and foreign countries' mounting blocks and three groups of capacitive transducers concerns synoptic diagram; The XOZ face perspective view of the position relation of three groups of capacitive transducers in Fig. 3 specific embodiment of the invention three; Fig. 4～Fig. 6 is the calculating principle schematic of measurement result of the present invention.
Embodiment
Embodiment one, this embodiment is described in conjunction with Fig. 1, six degrees of freedom micro pose measurement device based on capacitive transducer, it comprises outer mounting blocks 7, interior mounting blocks 8 and three groups of capacitive transducers 9, and the quantity of capacitive transducer is two in described every group of capacitive transducer 9; The integrative-structure that outer mounting blocks 7 vertically is made of mutually three rectangular parallelepipeds, the inside surface of described three rectangular parallelepipeds surrounds a square indentations; All have two through holes on each rectangular parallelepiped of described outer mounting blocks 7; Three groups of capacitive transducers 9 are separately fixed in the through hole on three rectangular parallelepipeds of outer mounting blocks 7, and a capacitive transducer is corresponding with a through hole; Interior mounting blocks 8 is a cube structure; Mounting blocks 8 is arranged in the square indentations of outer mounting blocks 7 in described, and three adjacent each other surfaces of interior mounting blocks 8 are parallel with three inside surfaces of the square indentations of outer mounting blocks 7 respectively.
Present embodiment has to install and adjusts characteristic of simple with respect to bipolar board-like capacitive transducer.
Principle of work: the present invention connects firmly interior mounting blocks 8 and micromotion mechanism to be measured, and wherein three adjacent each other dignity are as three pole plates.Six capacitive transducers are divided into three groups, are installed on respectively on three orthogonal of outer mounting blocks 7.By using three groups of capacitive transducers 9, realize the six degree of freedom pose measurement by measuring 6 displacements.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment two, this embodiment and embodiment one is, two through holes that have on each rectangular parallelepiped of outer mounting blocks 7 are positioned at same vertically or on the horizontal linear.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment three, this embodiment and embodiment two is that two through holes that have on each rectangular parallelepiped of outer mounting blocks 7 are positioned on this honorable center line.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment four, this embodiment and embodiment three is that the center line at the through hole place on three rectangular parallelepipeds of outer mounting blocks 7 is vertical mutually.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment five, this embodiment and embodiment one, two, three or four is, the distance between two capacitive transducer centers in every group of capacitive transducer 9 is 9mm.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment six, this embodiment and embodiment five is that each capacitive transducer is and measures translation resolution is the capacitive transducer of 1nm.
The measurement translation resolution of each capacitive transducer also can be better than 1nm in the present embodiment.
The difference of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment seven, this embodiment and embodiment one, two, three, four or six is that the model of each capacitive transducer probe is S601-0.05.
Embodiment eight, based on the six degrees of freedom micro pose measurement method based on capacitive transducer of the described six degrees of freedom micro pose measurement device based on capacitive transducer of embodiment one, it is finished by following steps:
Six degrees of freedom micro pose measurement method based on said apparatus is finished by following steps:
Step 1, a surface of interior mounting blocks 8 is fixed on the micromotion mechanism to be measured;
Step 2, setting X-axis, Y-axis and Z axle are three coordinate axis; The quiet coordinate origin O of described three coordinate axis is based upon the central spot of the square indentations of outer mounting blocks 7, and three coordinate axis three inside surfaces with the square indentations of outer mounting blocks 7 are vertical mutually respectively;
Step 3, interior mounting blocks 8 is arranged in the square indentations of outer mounting blocks 7, described in the central point of mounting blocks 8 overlap with quiet coordinate origin O, and three coordinate axis parallel with the corresponding sideline of interior mounting blocks 8 respectively;
Step 4, when micromotion mechanism to be measured motion, six some Bit Shifts of mounting blocks 8 in three groups of capacitive transducer groups 9 are measured;
The one group of capacitive transducer that is positioned at the XOY face is measured the some Bit Shift of two sensor points S1 and S2, obtains S1 point Bit Shift value Δ X
S1With S2 point Bit Shift value Δ X
S2, and according to formula: Δ X-(Δ X
S1(Δ X
S2)/2, the X of mounting blocks 8 is to shift value Δ X in obtaining; And according to formula: γ-(Δ X
S2-Δ X
S1)/D, mounting blocks 8 is around the corner γ of Z axle in obtaining;
The one group of capacitive transducer that is positioned at the XOZ face is measured the some Bit Shift of two sensor points S3 and S4, obtains S3 point Bit Shift value Δ Z
S3With S4 point Bit Shift value Δ Z
S4, and according to formula: Δ Z-(Δ Z
S3+ Δ Z
S4)/2, the Z of mounting blocks 8 is to shift value Δ Z in obtaining; And according to formula: β=(Δ Z
S4-Δ Z
S3)/D obtains the corner β of micromotion mechanism to be measured around Y-axis;
The one group of capacitive transducer that is positioned at the YOZ face is measured the some Bit Shift of two sensor points S5 and S6, obtains S5 point Bit Shift value Δ Y
S5With S6 point Bit Shift value Δ Y
S6, and according to formula: Δ Y-(Δ Y
S5+ Δ Y
S6)/2, the Y of mounting blocks 8 is to shift value Δ Y in obtaining; And according to formula: α=(Δ Y
S4-Δ Y
S5)/D obtains the corner α of micromotion mechanism to be measured around X-axis;
D is the distance between two capacitive transducers in one group of capacitive transducer in the formula;
In conjunction with Fig. 4-Fig. 6 our ratio juris is described: easy for calculating, quiet coordinate origin is based upon interior mounting blocks 8 central spot, the corresponding edge line parallel of three coordinate axis and interior mounting blocks 8.The one group of capacitive transducer 9 that is positioned at the XOY face is symmetrically distributed in the X-axis both sides; The one group of capacitive transducer 9 that is positioned at the XOZ face is symmetrically distributed in Z axle both sides; The one group of capacitive transducer 9 that is positioned at the YOZ face is symmetrically distributed in the Y-axis both sides.If during micromotion mechanism to be measured motion, the capacitive transducer 9 that is positioned at the XOY face is respectively Δ X in the displacement that its some S1 and S2 point record
S1, Δ X
S2, then in mounting blocks 8 X to displacement be Δ X=(Δ X
S1+ Δ X
S2)/2, micromotion mechanism to be measured is γ=(Δ X around the corner of Z axle
S2-Δ X
S1)/D; D is two distances between the capacitive transducer center in the formula.
In like manner, the one group of capacitive transducer 9 that is positioned at the XOZ face is respectively Δ Z in the displacement that its some position S3 and S4 record
S3With Δ Z
S4, the one group of capacitive transducer 9 that is positioned at the YOZ face is respectively Δ Y in the displacement that its some position S5 and S6 record
S5With Δ Y
S6, then in mounting blocks 8 Z to displacement be Δ Z=(Δ Z
S3+ Δ Z
S4)/2 are β=(Δ Z around the corner of Y-axis
S4-Δ Z
S3)/D, the Y of interior mounting blocks 8 to displacement be Δ Y=(Δ Y
S5+ Δ Y
S6)/2, micromotion mechanism to be measured is α=(Δ Y around the corner of X-axis
S6-Δ Y
S5)/D,
As can be seen, the one group of capacitive transducer that is positioned at the XOY face can obtain X to straight-line displacement and around the corner of Z axle; The one group of capacitive transducer 9 that is positioned at the XOZ face can obtain Z to straight-line displacement with around the corner of Y-axis; The one group of capacitive transducer 9 that is positioned at the YOZ face can obtain Y to straight-line displacement with around the corner of X-axis.Therefore can obtain the pose of moving platform six-freedom degree by six point measurements.
Claims (9)
1. based on the six degrees of freedom micro pose measurement device of capacitive transducer, it is characterized in that: it comprises outer mounting blocks (7), interior mounting blocks (8) and three groups of capacitive transducers (9), and the quantity of capacitive transducer is two in described every group of capacitive transducer (9); The integrative-structure that outer mounting blocks (7) vertically is made of mutually three rectangular parallelepipeds, the inside surface of described three rectangular parallelepipeds surrounds a square indentations; All have two through holes on each rectangular parallelepiped of described outer mounting blocks (7); Three groups of capacitive transducers (9) are separately fixed in the through hole on three rectangular parallelepipeds of outer mounting blocks (7), and a capacitive transducer is corresponding with a through hole; Interior mounting blocks (8) is a cube structure; Mounting blocks (8) is arranged in the square indentations of outer mounting blocks (7) in described, and three adjacent each other surfaces of interior mounting blocks (8) are parallel with three inside surfaces of the square indentations of outer mounting blocks (7) respectively.
2. the six degrees of freedom micro pose measurement device based on capacitive transducer according to claim 1 is characterized in that two through holes that have on each rectangular parallelepiped of outer mounting blocks (7) are positioned at same vertically or on the horizontal linear.
3. the six degrees of freedom micro pose measurement device based on capacitive transducer according to claim 2 is characterized in that two through holes that have on each rectangular parallelepiped of outer mounting blocks (7) are positioned on this honorable center line.
4. the six degrees of freedom micro pose measurement device based on capacitive transducer according to claim 3 is characterized in that the center line at the through hole place on three rectangular parallelepipeds of outer mounting blocks (7) is vertical mutually.
5. according to claim 1,2,3 or 4 described six degrees of freedom micro pose measurement devices, it is characterized in that the distance between two capacitive transducer centers in every group of capacitive transducer (9) is 9mm based on capacitive transducer.
6. the six degrees of freedom micro pose measurement device based on capacitive transducer according to claim 5 is characterized in that it is the capacitive transducer of 1nm that each capacitive transducer is measurement translation resolution.
7. according to claim 1,2,3,4 or 6 described six degrees of freedom micro pose measurement devices, it is characterized in that the model of each capacitive transducer probe is S601-0.05 based on capacitive transducer.
8. based on the six degrees of freedom micro pose measurement method based on capacitive transducer of the described six degrees of freedom micro pose measurement device based on capacitive transducer of claim 1, it is characterized in that: it is finished by following steps:
Step 1, a surface of interior mounting blocks (8) is fixed on the micromotion mechanism to be measured;
Step 2, to set X-axis, Y-axis and Z axle be three coordinate axis: the quiet coordinate origin 0 of described three coordinate axis is based upon the central spot of the square indentations of outer mounting blocks (7), and three coordinate axis three inside surfaces with the square indentations of outer mounting blocks (7) are vertical mutually respectively;
Step 3, interior mounting blocks (8) is arranged in the square indentations of outer mounting blocks (7), described in the central point of mounting blocks (8) overlap with quiet coordinate origin 0, and three coordinate axis parallel with the corresponding sideline of interior mounting blocks (8) respectively;
Step 4, when micromotion mechanism to be measured motion, six some Bit Shifts of mounting blocks (8) in three groups of capacitive transducer groups (9) are measured;
The one group of capacitive transducer that is positioned at the XOY face is measured the some Bit Shift of two sensor points S1 and S2, obtains S1 point Bit Shift value Δ X
S1With S2 point Bit Shift value Δ X
S2, and according to formula: Δ X=(Δ X
S1+ Δ X
S2)/2, the X of mounting blocks (8) is to shift value Δ X in obtaining; And according to formula: γ=(Δ X
S2-Δ X
S1)/D, mounting blocks (8) is around the corner γ of Z axle in obtaining;
The one group of capacitive transducer that is positioned at the XOZ face is measured the some Bit Shift of two sensor points S3 and S4, obtains S3 point Bit Shift value Δ Z
S3With S4 point Bit Shift value Δ Z
S4, and according to formula: Δ Z=(Δ Z
S3+ Δ Z
S4)/2, the Z of mounting blocks (8) is to shift value Δ Z in obtaining; And according to formula: β=(Δ Z
S4-Δ Z
S3)/D obtains the corner β of micromotion mechanism to be measured around Y-axis:
The one group of capacitive transducer that is positioned at the YOZ face is measured the some Bit Shift of two sensor points S5 and S6, obtains S5 point Bit Shift value Δ Y
S5With S6 point Bit Shift value Δ Y
S6, and according to formula: Δ Y=(Δ Y
S5+ Δ Y
S6)/2, the Y of mounting blocks (8) is to shift value Δ Y in obtaining; And according to formula: α=(Δ Y
S6-Δ Y
S5)/D obtains the corner α of micromotion mechanism to be measured around X-axis;
D is the distance between two capacitive transducers in one group of capacitive transducer in the formula;
Step 5, by three groups of capacitive transducers (9) to six some points position measure calculate obtain interior mounting blocks (8) X to shift value Δ X, Y to shift value Δ Y, Z to the corner α of shift value Δ Z, X-axis, the corner β of Y-axis and six parameters of corner γ of Z axle, be the six-freedom degree attitude of waiing upon the micrometer actuation mechanism.
9. the six degrees of freedom micro pose measurement method based on capacitive transducer according to claim 8 is characterized in that the one group of capacitive transducer (9) that is positioned at the XOY face is symmetrically distributed in the X-axis both sides; The one group of capacitive transducer (9) that is positioned at the XOZ face is symmetrically distributed in Z axle both sides; The one group of capacitive transducer (9) that is positioned at the YOZ face is symmetrically distributed in the Y-axis both sides.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010103002937A CN101788257B (en) | 2010-01-14 | 2010-01-14 | Device and method for six freedom degrees micro pose measurement based on capacitance sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010103002937A CN101788257B (en) | 2010-01-14 | 2010-01-14 | Device and method for six freedom degrees micro pose measurement based on capacitance sensor |
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| CN101788257A true CN101788257A (en) | 2010-07-28 |
| CN101788257B CN101788257B (en) | 2011-08-31 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095356A (en) * | 2010-11-09 | 2011-06-15 | 浙江大学 | Method and device for measuring five degrees of freedom of main shaft based on cylindrical surface capacitor sensor |
| CN104236459A (en) * | 2014-09-24 | 2014-12-24 | 烟台拓伟机械有限公司 | Six-point positioning type relative posture detection system |
| CN105804605A (en) * | 2016-03-14 | 2016-07-27 | 南京赛百联人防科技有限公司 | Multidimensional operation and maintenance monitoring sensor of protective door and protective door |
| CN106767512A (en) * | 2016-12-29 | 2017-05-31 | 哈尔滨工业大学 | Optical element high precision measuring device based on real-time monitoring kinematic error |
| CN111716331A (en) * | 2020-06-28 | 2020-09-29 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom parallel mechanism parameter calibration device and method |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
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2010
- 2010-01-14 CN CN2010103002937A patent/CN101788257B/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102095356A (en) * | 2010-11-09 | 2011-06-15 | 浙江大学 | Method and device for measuring five degrees of freedom of main shaft based on cylindrical surface capacitor sensor |
| CN102095356B (en) * | 2010-11-09 | 2012-06-27 | 浙江大学 | Method and device for measuring five degrees of freedom of main shaft based on cylindrical surface capacitor sensor |
| CN104236459A (en) * | 2014-09-24 | 2014-12-24 | 烟台拓伟机械有限公司 | Six-point positioning type relative posture detection system |
| CN104236459B (en) * | 2014-09-24 | 2015-06-17 | 烟台拓伟机械有限公司 | Six-point positioning type relative posture detection system |
| CN105804605A (en) * | 2016-03-14 | 2016-07-27 | 南京赛百联人防科技有限公司 | Multidimensional operation and maintenance monitoring sensor of protective door and protective door |
| CN106767512A (en) * | 2016-12-29 | 2017-05-31 | 哈尔滨工业大学 | Optical element high precision measuring device based on real-time monitoring kinematic error |
| CN111716331A (en) * | 2020-06-28 | 2020-09-29 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom parallel mechanism parameter calibration device and method |
| CN113183137A (en) * | 2020-06-28 | 2021-07-30 | 中国科学院长春光学精密机械与物理研究所 | Parameter calibration device and method for six-degree-of-freedom parallel mechanism |
| CN113183137B (en) * | 2020-06-28 | 2022-07-01 | 中国科学院长春光学精密机械与物理研究所 | Parameter calibration device and method for six-degree-of-freedom parallel mechanism |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
| CN115655094B (en) * | 2022-11-02 | 2024-03-29 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
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