CN202974174U - Three-dimensional micro-contact-type measuring head based on capacitive sensor array - Google Patents
Three-dimensional micro-contact-type measuring head based on capacitive sensor array Download PDFInfo
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- CN202974174U CN202974174U CN 201220709762 CN201220709762U CN202974174U CN 202974174 U CN202974174 U CN 202974174U CN 201220709762 CN201220709762 CN 201220709762 CN 201220709762 U CN201220709762 U CN 201220709762U CN 202974174 U CN202974174 U CN 202974174U
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- sensor array
- top crown
- chaining pin
- rood beam
- capacitance sensor
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Abstract
The utility model discloses a three-dimensional micro-contact-type measuring head based on a capacitive sensor array. The measuring head is composed of a square bottom plate, the capacitive sensor array, a cross beam and a measuring needle; and the measuring head is characterized by being provided with a plurality of capacitive sensing units which are distributed on the square bottom plate in the form of an array, the measuring needle is connected to the central connecting body of the cross beam, the suspension arm of the cross beam is connected with the upper pole plates of capacitive sensors, and the upper pole plates are suspended via micro-spring suspension units; the suspension of the upper pole plates is realized by adopting a plurality of micro-springs, the micro-springs are used for fixing the upper pole plates on the capacitive sensors, and supporting the weights of the cross beam and the measuring needle; a lever structure composed of the measuring needle and the cross beam is used for amplifying the transversal displacement of the measured object and converting the transversal displacement of the measured object to the axial displacements of the upper pole plates of the capacitors, thus solving the problem of low transversal resolving power during the measurement of a single capacitive sensor. With the adoption of the measuring head disclosed by the utility model, the defect of low transversal resolving power of a single capacitive sensor is made up, the resolving power and the accuracy are improved, and the transversal measurement range is effectively expanded.
Description
Technical field
The utility model relates to a kind of ultraprecise size three-dimensional measurement instrument, particularly discloses a kind of three-dimensional micro tactile probe based on capacitance sensor array, and the submicron order geometric sense 3D that is used for microstructure measures.
Background technology
Fast development along with Ultraprecision Machining, MEMS processing technology, in semi-conductor industry, the manufacturing of the relevant micro devices of high precision and structure has obtained great development, be mainly reflected in that the size span is increasing, the complex structure degree is more and more higher, manufacturing accuracy improves constantly, thereby micro-or nano size is measured with characterization technique had higher requirement.From engineering design to the prototyping manufacturing again to Quality Control Analysis and final manufacturing and final element and the inspection of workpiece at product, nearly all field, micro-or nano size is measured with the influence power of characterization technique increasing.This has promoted based on new principle, new algorithm, the more research of the measurement mechanism of high precision and size span.Have on a large scale, high precision, development research is used for measuring coordinate measuring method and the corresponding device of three-dimensional dimension, position and other shape characteristics, becomes the main research work of micro element and microstructure field tests.
The measurement of coordinates technology is take traditional coordinate measuring machine as measuring table, in conjunction with trigger-type or analog gauge head, measured workpiece is detected, but the accuracy of detection of traditional measurement of coordinates technology can only reach micron or hundreds of nanometer, can not satisfy the requirement of above-mentioned measurement.Many industrial mechanisms and scientific research field all require the 3 D Coordinate Measuring System of sub-nm resolution to come Measurement Resolution high, the optical element of good mechanical property.And can measure to make making element and the tools of microlens.In order to reach above-mentioned requirements, nanometer positioning and nano measurement instrument must upgrade to the system that has simultaneously 3D function and 3D contact type probe function.
Summary of the invention
The purpose of this utility model is to address the deficiencies of the prior art, design a kind of three-dimensional micro tactile probe based on capacitance sensor array, the utility model is in conjunction with accurate mounting technology, adopt the MEMS micro fabrication, can be used as the zero-point positioning sensor of nanometer coordinate measuring machine, realize measurement and sign to microstructure and device.
the utility model is achieved in that a kind of three-dimensional micro tactile probe based on capacitance sensor array, described gauge head is by square floor, capacitance sensor array, rood beam and chaining pin form, it is characterized in that: described gauge head has a plurality of capacitance sensings unit, being array is distributed on square floor, chaining pin is connected on the center connector of rood beam, the cantilever of rood beam is connected with the capacitive transducer top crown, top crown hangs by the Microspring suspension unit, the suspension of described top crown adopts several Microsprings to realize, Microspring not only is used for the top crown of fixed capacity sensor, also be used for supporting rood beam and chaining pin weight, the lever construction that is comprised of chaining pin and rood beam amplifies the transversal displacement of measured object and be converted into the axial displacement of electric capacity top crown, the low problem of transverse resolution when solving single capacitive transducer measurement.Adopt 4 capacitive transducers to form circumference array as sensing unit, two capacitive transducers on same direction connect into differential mode, improve gauge head sensitivity and antijamming capability.Described gauge head has two kinds of assembling modes, selects support type or mounted model assembling mode according to different measurement occasions.
A kind of three-dimensional micro tactile probe based on capacitance sensor array of the utility model has following characteristics:
1, described rood beam and chaining pin are as the displacement transfer unit, and capacitance sensor array is as sensing unit.Chaining pin forms by surveying end ball and measuring staff, utilizes epoxy resin to be fixed on the center connector central authorities of rood beam.During measurement, the displacement of surveying the end ball is delivered to the top crown of capacitive transducer by measuring staff and rood beam, cause the capacitive transducer polar plate spacing from the change of area, thereby capacitance is changed.By the variable quantity of Detection capacitance value, set up rational mathematical model, can obtain small displacement.
2, adopt the MEMS micro fabrication, make capacitance sensor array on square floor.Capacitive transducer comprises top crown, bottom crown and top crown suspension unit three parts.The suspension of top crown adopts 4 Microsprings to realize, the quality of Microspring performance directly affects measuring accuracy.The quantity of Microspring and intensity can be determined according to the weight of rood beam and chaining pin, also can be designed to have the suspension unit of 8 Microsprings.
3, the cross beam action is chaining pin to be surveyed hold the displacement of ball to pass to capacitance sensor array, thereby changes the sensor capacitance value.Simultaneously, rood beam should have rigidity preferably, with the error that reduces to introduce because of cantilever deflection.The center connector Thickness Design of rood beam is identical with cantilever, with minimizing weight, thereby reduces cantilever deflection.Jib-length can require determine according to sensitivity, and cantilever is longer in theory, and the sensitivity of detection is higher, but along with the increase of length, and the cantilever degree of disturbing that is caused by gravity and ergometry is also along with increase.
4, for the deadweight problem of rood beam and chaining pin, also can by in connector bottom, center or top add shock mount and compensate.When spring is positioned at the bottom, be in compressive state; When being positioned at top, be in extended state.
5, the measuring staff of chaining pin adopts tungsten carbide material, to guarantee rigidity and to reduce the weight of chaining pin; Survey the end ball and adopt the ruby material, to subtract spherular wearing and tearing and distortion, ruby is one of the hardest known material.
6, verticality and the reliability for guaranteeing that chaining pin and rood beam, rood beam are connected with capacitance sensor array uses the sticking pin platform of high precision to assemble.
7, adopt 4 capacitive transducers to form the sensing unit array, with respect to traditional single capacitance structure, effectively improved the sensitivity of displacement detecting, particularly for the measurement of lateral dimension, the leverage that is comprised of chaining pin and rood beam has an amplification to transversal displacement, and can be translated into the axially-movable of capacitor plate, significant for adopting capacitive method to detect micro-displacement.
8, due to a plurality of capacitive transducers of employing, and it is opposite to be in unidirectional two capacitive transducer top crown direction of motion, therefore can connect into differential form, not only can improve detection sensitivity, can also effectively eliminate interference, improves the displacement detecting precision.
The beneficial effects of the utility model are: the utility model adopts capacitance sensor array as sensing unit, by the design rood beam, the transversal displacement of chaining pin has been transformed into axial displacement, has made up the low defective of single capacitive transducer transverse resolution.Than the measuring head structure of single capacitive transducer, the utility model has not only improved resolving power and precision, has also effectively expanded the cross measure scope.When the electric capacity that detects same direction displacement works in differential mode, resolving power and antijamming capability will be further enhanced.
Description of drawings
Fig. 1 is that the utility model is based on the three-dimensional micro tactile probe structural representation of capacitance sensor array.
Fig. 2 is the utility model capacitor sensor structure schematic diagram.
Fig. 3 is rood beam structural representation of the present utility model.
Fig. 4 is chaining pin structural representation of the present utility model.
Fig. 5 is the differential connection schematic diagram of capacitance sensor array of the present utility model.
Fig. 6 is assembling mode two structural representations of the present utility model.
In figure: 1, capacitive transducer; 2, rood beam; 3, chaining pin; 4, square floor; 5, top crown; 6, bottom crown; 7, spacing hole; 8, Microspring; 9, cantilever; 10, center connector; 11, insulation course; 12, measuring staff; 13, survey the end ball; 14, connecting line I; 15, connecting line II; 16, connecting line III; 17, pad.
Embodiment
With reference to the accompanying drawings 1～5, a kind of three-dimensional micro tactile probe based on capacitance sensor array of the utility model, gauge head is comprised of square floor 4, capacitance sensor array, rood beam 2 and chaining pin 3.gauge head has a plurality of capacitance sensings unit, being array is distributed on square floor, chaining pin 3 is connected on the center connector 10 of rood beam 2, the cantilever 9 of rood beam 2 is connected with the top crown 5 of capacitive transducer 1, top crown 5 hangs by several Microspring 8 suspension units, Microspring 8 not only is used for the top crown 5 of fixed capacity sensor 1, also be used for supporting rood beam 2 and chaining pin 3 weight, the lever construction that is comprised of chaining pin 3 and rood beam 2 amplifies the transversal displacement of measured object and be converted into the axial displacement of electric capacity top crown 5, the low problem of transverse resolution when solving single capacitive transducer measurement.The utility model adopts 4 capacitive transducers 1 to form circumference array as sensing unit, and two capacitive transducers on same direction connect into differential mode, improve gauge head sensitivity and antijamming capability.Gauge head has two kinds of assembling modes, selects support type or mounted model assembling mode according to different measurement occasions.
With reference to the accompanying drawings 1 and 2, have the spacing hole 7 of a chaining pin 3 in the middle of square floor 4 of the present utility model, in order to limiting the transverse shifting scope of chaining pin 3, thereby play the effect of protection capacitance sensor array.If the transverse shifting scope of chaining pin 3 is excessive, may cause Microspring to damage and the up and down short circuit of polar.Capacitive transducer of the present utility model adopts 4 capacitive transducers as sensing unit, be the circumference array mode be arranged in equably square on, each two of X, Y-directions.The top crown of capacitive transducer 1 hangs with 4 Microsprings 8, and capacitance structure adopts the MEMS processes, can directly generate on square floor 4 or be fixed on square floor 4 by the bonding mode.Electric capacity top crown 5 and bottom crown 6 are designed to circle.Because upper and lower polar plate spacing is from being only tens microns, and four jiaos of square pole plate easily subside, if adopt square pole plate easily to cause upper and lower short circuit of polar, and the yield rate of impact preparation.
With reference to the accompanying drawings 3, be a circular central connector 10 in the middle of rood beam 2 of the present utility model, in order to fixing chaining pin 3 and reduce near cantilever 9 point of crossing stress.Connector 10 thickness in center are identical with cantilever 9, in order in the situation that satisfy the weight that requirement of strength reduces cantilever 9 as far as possible.Increase again by an insulation course at cantilever 9 ends, with being electrically connected to of blocking-up top crown 5 and cantilever 9.
With reference to the accompanying drawings 4, chaining pin 3 of the present utility model comprises measuring staff 12 and surveys end ball 13 two parts, utilizes Ultraprecision Machining processing.Measuring staff 12 adopts tungsten carbide material, to satisfy simultaneously the requirement of high rigidity and low weight.Survey end ball 13 and adopt the ruby material, in having the survey end ball material of industrywide standard and optkmal characteristics, ruby is one of the hardest known material.It is very smooth that ruby is surveyed the surface of end ball, has high compressive strength and very high mechanical endurance.
With reference to the accompanying drawings 2 and 5, the differential connection of capacitance sensor array of the present utility model, the bottom crown 6 of unidirectional two capacitive transducers is connected by connecting line II 15, then receive the common negative terminal of electric capacity acquisition channel, two top crowns are received respectively two anodes of electric capacity Acquisition Circuit by connecting line I 14 and connecting line III 16, consist of differential connection.Each connecting line is welded on capacitive transducer by the pad 17 of correspondence respectively.When surveying the stressed generation transversal displacement of end ball 13, by the transmission of rood beam 2, be in one of unidirectional two capacitive transducer top crown and move down, one moves up, and causes the both sides capacitance increase respectively and reduce.
Closure according to chaining pin 3 on rood beam 2 is different, and gauge head can be assembled into two kinds of patterns: support type and mounted model, accompanying drawing 1 are the assembling mode one of the utility model gauge head: support type.Support type assembling mode is relatively safe, the spacing hole 7 of square floor 4 can limit the transverse movement amplitude of chaining pin 3, but bear the gravity of chaining pin 3 and cantilever 9 due to the top crown of capacitive transducer, upper and lower pole plate is short-circuited, can one support spring (not shown) be installed in center connector 10 bottoms, with the gravity of compensation chaining pin 3 and cantilever 9.With reference to the accompanying drawings 6, the assembling mode two of the utility model gauge head: mounted model.Mounted model assembling mode can take full advantage of the length of chaining pin 3, to survey darker structure, also can carry out gravity compensation to chaining pin 3 and cantilever 9 simultaneously, but the transversal displacement of chaining pin 3 does not retrain, and the situation of overrange easily occurs, and causes the damage of sensing unit.
Be the verticality and the reliability that guarantee that chaining pin 3 and rood beam 2, rood beam 2 are connected with capacitive transducer 1, during assembling, all operations all carries out on high-precision sticking pin platform.Center connector 10 is with chaining pin 3, cantilever 9 and being connected of top crown 6 of capacitive transducer 1 pass through epoxy resin bonding.
Claims (4)
1. three-dimensional micro tactile probe based on capacitance sensor array, described gauge head is by square floor, capacitance sensor array, rood beam and chaining pin form, it is characterized in that: described gauge head has a plurality of capacitance sensings unit, being array is distributed on square floor, chaining pin is connected on the center connector of rood beam, the cantilever of rood beam is connected with the capacitive transducer top crown, top crown hangs by the Microspring suspension unit, the suspension of described top crown adopts several Microsprings to realize, Microspring not only is used for the top crown of fixed capacity sensor, also be used for supporting rood beam and chaining pin weight, the lever construction that is comprised of chaining pin and rood beam amplifies the transversal displacement of measured object and be converted into the axial displacement of electric capacity top crown, the low problem of transverse resolution when solving single capacitive transducer measurement.
2. described a kind of three-dimensional micro tactile probe based on capacitance sensor array according to claim 1, it is characterized in that: the suspension of described top crown adopts 4 Microsprings to realize.
3. described a kind of three-dimensional micro tactile probe based on capacitance sensor array according to claim 1, it is characterized in that: adopt 4 capacitive transducers to form circumference array as sensing unit, two capacitive transducers on same direction connect into differential mode, improve gauge head sensitivity and antijamming capability.
4. described a kind of three-dimensional micro tactile probe based on capacitance sensor array according to claim 1, it is characterized in that: described gauge head has two kinds of assembling modes, selects support type or mounted model assembling mode according to different measurement occasions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220709762 CN202974174U (en) | 2012-12-20 | 2012-12-20 | Three-dimensional micro-contact-type measuring head based on capacitive sensor array |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220709762 CN202974174U (en) | 2012-12-20 | 2012-12-20 | Three-dimensional micro-contact-type measuring head based on capacitive sensor array |
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| CN202974174U true CN202974174U (en) | 2013-06-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220709762 Withdrawn - After Issue CN202974174U (en) | 2012-12-20 | 2012-12-20 | Three-dimensional micro-contact-type measuring head based on capacitive sensor array |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103075951A (en) * | 2012-12-20 | 2013-05-01 | 上海市计量测试技术研究院 | Three-dimensional micro touch probe based on capacitive sensor array |
| PL423137A1 (en) * | 2017-10-11 | 2019-04-23 | Gg Tech W Garus I T Gromek Spolka Jawna | Device for measuring three-dimensional objects |
| PL126694U1 (en) * | 2017-10-11 | 2019-04-23 | Gg Tech W Garus I T Gromek Spolka Jawna | Device for measuring three-dimensional objects |
-
2012
- 2012-12-20 CN CN 201220709762 patent/CN202974174U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103075951A (en) * | 2012-12-20 | 2013-05-01 | 上海市计量测试技术研究院 | Three-dimensional micro touch probe based on capacitive sensor array |
| CN103075951B (en) * | 2012-12-20 | 2015-04-29 | 上海市计量测试技术研究院 | Three-dimensional micro touch probe based on capacitive sensor array |
| PL423137A1 (en) * | 2017-10-11 | 2019-04-23 | Gg Tech W Garus I T Gromek Spolka Jawna | Device for measuring three-dimensional objects |
| PL126694U1 (en) * | 2017-10-11 | 2019-04-23 | Gg Tech W Garus I T Gromek Spolka Jawna | Device for measuring three-dimensional objects |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130605 Effective date of abandoning: 20150429 |