CN205373641U - Three -dimensional micro -nano formula probe that triggers - Google Patents
Three -dimensional micro -nano formula probe that triggers Download PDFInfo
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- CN205373641U CN205373641U CN201620173147.5U CN201620173147U CN205373641U CN 205373641 U CN205373641 U CN 205373641U CN 201620173147 U CN201620173147 U CN 201620173147U CN 205373641 U CN205373641 U CN 205373641U
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- 239000000523 sample Substances 0.000 title claims abstract description 51
- 235000014676 Phragmites communis Nutrition 0.000 claims abstract description 33
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 7
- 238000010276 construction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910001051 Magnalium Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
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- 229910000838 Al alloy Inorganic materials 0.000 description 1
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- 241000018646 Pinus brutia Species 0.000 description 1
- 244000062793 Sorghum vulgare Species 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 239000008358 core component Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
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- 239000011888 foil Substances 0.000 description 1
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Abstract
The utility model discloses a three -dimensional micro -nano formula probe that triggers, characterized by comprises gauge head unit and measuring unit: the gauge head unit sets up the reed that is " ten " word on circular ring seat, the fixed suspension piece that is " ten " word that sets up forms the suspension structure of suspension piece on circular ring seat on the reed, it sets up each beam split reflecting prism and prism wedge, fixed mounting probe in the central perforating hole of suspension piece to fix respectively at the up end of suspension piece, constitute measuring unit by laser instrument and four -quadrant detector, utilize the four -quadrant detector to obtain to be located the displacement signal of the survey ball of probe front end. The utility model discloses can obtain high accuracy, high sensitivity and little dynamometric detection effect, have the high stability simultaneously, adjust nimble advantage.
Description
Technical field
This utility model relates to micro-nano field tests, more specifically a kind of trigger-type three-dimensional probe being applied in Nano Coordinate Measuring Machine, and the three-dimensional high-precision for body surface is measured.
Background technology
In recent decades, nanotechnology is advanced by leaps and bounds, and manufacturing industry comes into the nanometer processing stage.Microminiaturization, precise treatment are the core drives promoted development.The raising of manufacturing industry technology is necessarily required to the cooperation of Technology of Precision Measurement, so just can ensure that manufacturing high accuracy.Therefore, precision measurement equipment serves as important role in precision manufactureing, is the requisite link of precision manufactureing.But precision manufactureing is inseparable with Precision Machining again, along with the high speed development of precision processing technology, occurs in that the parts such as many micro partses, various complex surface part, microelectronic device, precison optical component.The machining accuracy of these micro partses is in micro-nano magnitude, these micro elements will be carried out accurate measurement it is necessary to develop special high-precision detecting method and technological means.
The probe segment of three coordinate measuring machine is one of core component of three coordinate measuring machine, and the certainty of measurement of probe determines the overall measurement accuracy of three coordinate measuring machine.Probe have contact and contactless point, contact probe can be used to measure non-contact optical probe the immeasurable workpiece with features such as inclined-plane, step, deep hole, circular arcs.
Contact of the prior art probe mainly has: atomic force probe, capacitance probe, fibre-optical probe, DVD probe, micro-touch feel probe, confocal probe etc..Existing probe needs integrated two to four high-precision sensors, there is structure complexity, resetting difficulty is big, cost is high problem.The such as three-dimensional micro-contact sensing probe based on strain gauge of Eindhoven university of Holland exploitation, it is by being jointly fabricated to overall structure after the techniques such as precipitation, plate-making, etching by strain gauge, circuit and flexible member, the power of gauge head all directions and the change of displacement are detected by the strain gauge being contained on sensitive fine strain of millet, its small volume, but the detection sensitivity of foil gauge and precision are all relatively low, and its gauge head adopts triangle topology structure, decoupling is complicated.The electromagnetic type micro tactile probe of measurement verification office of Swiss Confederation METAS exploitation, gauge head has the degree of freedom in three directions, the detection in each direction adopts inductance to realize, the dynamometry in three directions is identical, and structure is mainly made of aluminium, and the measurement scope of electromagnetic type gauge head is bigger, horizontal detection sensitivity is higher and contact force is less, but its structure is considerably complicated, debug difficulty, and adopting triangle suspended structure, decoupling is complicated.
Utility model content
This utility model is for avoiding the weak point existing for above-mentioned prior art, it is provided that a kind of three-dimensional micro-nano trigger probe, to obtaining the Effect on Detecting of high accuracy, high sensitivity and little dynamometry, has high stability simultaneously and debugs convenient advantage.
This utility model adopts the following technical scheme that for solving technical problem
Being structurally characterized in that of this three-dimensional micro-nano trigger probe is made up of head unit and measuring unit:
Described head unit is to arrange the reed in " ten " word on annulus seat, and the far-end of each cantilever of described reed and annular reed outer ring form entirety, and are connected so that described annular reed outer ring and annulus seat are fixing；Described reed upper surface, be in the center of reed and be fixedly installed the suspension sheet in " ten " word, form suspension sheet suspension structure on annulus seat；The first dichroic reflection prism, the second dichroic reflection prism and prism wedge it is fixedly installed respectively in the upper surface of described suspension sheet, the through hole of described suspension sheet and reed fixedly mounts probe, described probe convexedly stretches in the lower surface of suspension sheet, and the front end of probe is for surveying ball；Described first dichroic reflection prism and the second dichroic reflection prism are unpolarized dichroic reflection prism；
The light channel structure of described measuring unit is: laser instrument is be projected to the first dichroic reflection prism in level after the collimated light that goes out of horizontal emission sequentially passes through the reflection of the first plane mirror and the second plane mirror, and the reflection light formed in described first dichroic reflection prism is projected to the 3rd 4 quadrant detector as the first light beam；The transmission light formed in described first dichroic reflection prism is projected to the second dichroic reflection prism, and the transmission light formed in described second dichroic reflection prism is projected to the second 4 quadrant detector as the second light beam；The reflected light projects formed in described second dichroic reflection prism is to prism wedge, described prism wedge is formed transmission light and is projected to the first 4 quadrant detector as the 3rd light beam, utilize described 3rd 4 quadrant detector, the second 4 quadrant detector and the first 4 quadrant detector to obtain the displacement signal surveying ball.
The construction features of this utility model three-dimensional micro-nano trigger probe lies also in: described prism wedge is pasted onto the sidepiece of described second dichroic reflection prism.
The construction features of this utility model three-dimensional micro-nano trigger probe lies also in: the housing arranging described probe is cylinder, with dividing plate subregion for epicoele and cavity of resorption in described cylinder；
Described laser instrument is arranged in epicoele, and utilizes laser stent to be fixed on dividing plate；
Described first plane mirror utilizes the first plane reflection mirror support to be fixedly installed on the sidewall of epicoele；
Described second plane mirror utilizes the second plane reflection mirror support to be fixedly installed on the sidewall of cavity of resorption；
Described head unit is fixedly installed on the bottom port of described cylinder with its annulus seat；
First 4 quadrant detector, the second 4 quadrant detector and the 3rd 4 quadrant detector utilize the first detector carriage, the second detector carriage and the 3rd detector carriage to be arranged on the sidewall of cavity of resorption correspondingly.
The construction features of this utility model three-dimensional micro-nano trigger probe lies also in: include the first detector carriage, the second detector carriage with the fixed structure of each detector carriage of the 3rd detector carriage is: described detector carriage is to be locked on the sidewall of cavity of resorption by the office the first holding screw on the different circumferential position of detector carriage and the second holding screw；And arranging the office the first spring washer on diverse location and the second spring washer between the side and the sidewall of cavity of resorption of described detector carriage, the tightness adjusting described first spring washer and the second spring washer respectively realizes the adjustment of the corresponding locus of detector carriage.
The construction features of this utility model three-dimensional micro-nano trigger probe lies also in: be provided with fin in described detector carriage, on the medial wall of described cavity of resorption, corresponding position is provided with groove, realizes detector carriage spacing on a direction in cavity of resorption with the cooperation of described fin and groove.
Compared with the prior art, this utility model has the beneficial effect that:
1, this utility model adopts optical pickocff to sense, and can obtain higher sensitivity and precision than strain-type, pressure resistance type and inductance type transducer.
2, this utility model with three optical pickocffs simultaneously sense survey ball in the horizontal direction with the change in displacement on vertical direction, each optical pickocff is only responsible for measuring the change in displacement in a direction, and position can be carried out regulating, there is the distinguishing features such as clear, the flexible adjustment of measurement.
3, this utility model adopts high-precision optical pickocff, coordinates and has highly sensitive and high stability suspension structure, it is possible to reaches nanoscale resolving power and precision.
4, this utility model adopts the adjustment carrying out 4 quadrant detector locus by regulating the method for spring washer tightness, and method is simply applicable.
5, this utility model adopts novel circular reed, and the outer ring of circular reed and annulus seat fit, and the arm end of each cantilever of cross suspension sheet is fixed on circular reed central cross infall, form cross suspension sheet suspension structure in annulus seat, this structure stress is uniform, highly sensitive, it is simple to sensing.
Accompanying drawing explanation
Fig. 1 a is cylinder sectional structure schematic diagram in this utility model；
Fig. 1 b is cylinder appearance schematic diagram in this utility model；
Fig. 2 is this utility model population structure generalized section；
Fig. 3 is measurement structure schematic diagram in this utility model；
Fig. 4 is this utility model light channel structure schematic diagram；
Fig. 5 is head unit STRUCTURE DECOMPOSITION schematic diagram in this utility model；
Fig. 6 is reed and suspension sheet fit structure schematic diagram in this utility model；
Fig. 7 is reed and probe fit structure schematic diagram in this utility model；
Fig. 8 is reed structure schematic diagram in this utility model；
Fig. 9 is 4 quadrant detector and its supporting structure schematic diagram in this utility model；
Figure 10 is optical frames group structural representation in this utility model；
Figure 11 is this utility model midplane reflecting mirror and supporting structure schematic diagram thereof；
Figure 12 is laser instrument and supporting structure schematic diagram thereof in this utility model；
Figure 13 is Z-axis direction measuring principle schematic diagram in this utility model；
Figure 14 is X axis measuring principle schematic diagram in this utility model；
Figure 15 is Y-axis measuring principle front elevational schematic in this utility model；
Figure 16 is that in this utility model, schematic diagram is looked on the Y-axis measuring principle right side；
Number in the figure: 1a cylinder；1b epicoele；1c cavity of resorption；2 top covers；3a laser instrument；3b laser stent；4a the first plane mirror；4b the first plane reflection mirror support；5a the second plane mirror；5b the second plane reflection mirror support；6a the first 4 quadrant detector；6b the first detector carriage；6c the first spring washer；6d the second spring washer；6e the first holding screw；6f the second holding screw；7a the second 4 quadrant detector；7b the second detector carriage；8a the 3rd 4 quadrant detector；8b the 3rd detector carriage；9a the first dichroic reflection prism；9b the second dichroic reflection prism；9c prism wedge；10a annulus seat；10b suspension sheet；10c reed；10d surveys ball；10e probe.
Detailed description of the invention
In the present embodiment, three-dimensional micro-nano trigger probe is to be made up of head unit and measuring unit.
Referring to Fig. 2, Fig. 3, Fig. 5, Fig. 6 and Fig. 7, head unit is to arrange the reed 10c in " ten " word on annulus seat 10a, the far-end of each cantilever of the reed 10c shown in Fig. 8 and annular reed outer ring form entirety, and are connected so that annular reed outer ring is fixing with annulus seat 10a；Reed 10c upper surface, be in the center of reed 10c and be fixedly installed the suspension sheet 10b in " ten " word, form suspension sheet 10b suspension structure on annulus seat 10a；The first dichroic reflection prism 9a, the second dichroic reflection prism 9b and prism wedge 9c it is fixedly installed respectively in the upper surface of suspension sheet 10b, the through hole of suspension sheet 10b and reed 10c fixedly mounts probe 10e, probe 10e convexedly stretches in the lower surface of suspension sheet 10b, and the front end of probe 10e is for surveying ball 10d；First dichroic reflection prism 9a and the second dichroic reflection prism 9b is unpolarized dichroic reflection prism.
Referring to Fig. 3 and Fig. 4, the light channel structure of measuring unit is: laser instrument 3a is projected to the first dichroic reflection prism 9a in level after the collimated light that goes out of horizontal emission sequentially passes through the reflection of the first plane mirror 4a and the second plane mirror 5a, and the reflection light formed in the first dichroic reflection prism 9a is projected to the 3rd 4 quadrant detector 8a as the first light beam；The transmission light formed in the first dichroic reflection prism 9a is projected to the second dichroic reflection prism 9b, and the transmission light formed in the second dichroic reflection prism 9b is projected to the second 4 quadrant detector 7a as the second light beam；The reflected light projects formed in the second dichroic reflection prism 9b is to prism wedge 9c, prism wedge 9c is formed transmission light and is projected to the first 4 quadrant detector 6a as the 3rd light beam, utilizing the 3rd 4 quadrant detector 8a, the second 4 quadrant detector 7a and the first 4 quadrant detector 6a to obtain the displacement signal surveying ball 10d, prism wedge 9c is pasted onto the sidepiece of the second dichroic reflection prism 9b.
Referring to Fig. 1 a, Fig. 1 b and Fig. 2, the housing arranging probe is cylinder 1a, and the bottom of cylinder 1a is uncovered, and the top of cylinder 1a is fixedly installed top cover 2, with dividing plate subregion for epicoele 1b and cavity of resorption 1c in cylinder 1a,；Laser instrument 3a is arranged in epicoele 1b, and utilizes the laser stent 3b shown in Figure 12 to be fixed on dividing plate；First plane mirror 4a utilizes the first plane reflection mirror support 4b to be fixedly installed on the sidewall of epicoele 1b, connects so that bonding form is fixing between the first plane mirror 4a and the first plane reflection mirror support 4b；Second plane mirror 5a utilizes the second plane reflection mirror support 5b to be fixedly installed on the sidewall of cavity of resorption 1c, same with the fixing connection of bonding form between the second plane mirror 5a and the second plane reflection mirror support 5b；Head unit is fixedly installed on the bottom port of cylinder 1a with its annulus seat 10a；First 4 quadrant detector 6a, the second 4 quadrant detector 7a and the three 4 quadrant detector 8a utilize the first detector carriage 6b, the second detector carriage 7b and the three detector carriage 8b to be arranged on the sidewall of cavity of resorption 1c correspondingly.
In being embodied as, the fixed structure including the first detector carriage 6b, each detector carriage of the second detector carriage 7b and the three detector carriage 8b is: detector carriage is to be locked on the sidewall of cavity of resorption 1c by the office the first holding screw on detector carriage difference circumferential position and the second holding screw；And arranging the office the first spring washer on diverse location and the second spring washer between the sidewall of the side of detector carriage and cavity of resorption 1c, the tightness adjusting the first spring washer and the second spring washer respectively realizes the adjustment of the corresponding locus of detector carriage；Being provided with fin in detector carriage, on the medial wall of cavity of resorption 1c, corresponding position is provided with groove, realizes detector carriage spacing on a direction in cavity of resorption 1c with the cooperation of fin and groove.
Fig. 9 show the fit structure of the first 4 quadrant detector 6a and the first detector carriage 6b, wherein, the first detector carriage 6b is locked on the sidewall of cavity of resorption 1c by the office the first holding screw 6e on the first different circumferential position of detector carriage 6 and the second holding screw 6f；And office the first spring washer 6c on diverse location and the second spring washer 6b is set between the sidewall of the side of the first detector carriage 6b and cavity of resorption 1c, the tightness adjusting the first spring washer 6c and the second spring washer 6d respectively realizes the adjustment of the first corresponding locus of detector carriage 6b, thus realizing the adjustment of the position of the first 4 quadrant detector 6a；Being provided with fin on the first detector carriage 6b, on the medial wall of cavity of resorption 1c, corresponding position is provided with groove, realizes the first detector carriage 6b spacing on a direction in cavity of resorption 1c with the cooperation of fin and groove；When the first spring washer 6c and the second spring washer 6d is locked or unclamps simultaneously, indirectly have adjusted the first 4 quadrant detector 6a position in the horizontal direction；When the tight pine of the first spring washer 6c and the second spring washer 6d mono-, indirectly have adjusted the 4 quadrant detector 6a position at vertical direction, in the present embodiment, Z axis is vertical direction, X-axis and Y-axis are in horizontal direction, this mode regulates the two-dimensional position having distinguished each 4 quadrant detector simply, reaches accurately detection and receives the purpose of pattern displacement variable quantity.
In being embodied as, in order to reduce suspension sheet 10b impact of self gravitation when carrying out contact measurement, selecting suspension sheet 10b magnalium is material, magnalium density is more, specific strength is high, elastic modelling quantity is big, shock absorbing is good, the load-carrying ability that withstands shocks is bigger than aluminium alloy, and good rigidly, has certain corrosion resistance and dimensional stability.
As shown in figure 13, when probe 10e is touched in vertical Z-direction, the 3rd 4 quadrant detector 8a detect that light passes through the displacement variable of the first dichroic reflection prism 9a；As shown in figure 14, when probe 10e is touched in X-direction, the second 4 quadrant detector 7a detect that light passes through the first dichroic reflection prism 9a and the displacement variable of the second dichroic reflection prism 9b；As shown in Figure 15 and Figure 16, when probe 10e is touched in Y direction, the first 4 quadrant detector 6a detect light pass through the first dichroic reflection prism 9a, the second dichroic reflection prism 9b and prism wedge 9c after displacement variable.
The 4 quadrant detector applied in the present embodiment for the detection principle of displacement variable is: record the corresponding change of light spot form and position the 3rd 4 quadrant detector 8a, the second 4 quadrant detector 7a and the first 4 quadrant detector 6a of the displacement variable of Z-direction, X-direction and Y direction from the laser instrument 3a light sent through measuring unit, and then cause the change of current signal size that 4 quadrant detector exports, by current/voltage converter circuit, the current signal that four quadrants export is converted to voltage signal, is designated as V respectivelyA、VB、VC、VD.According to formula (a) and formula (b), respectively the shape of luminous point on 4 quadrant detector and the change of position are changed into the output of two-way voltage signal, this two-way voltage signal is corresponding with the first dichroic reflection prism 9a, the second dichroic reflection prism 9b and prism wedge 9c displacement in a vertical and horizontal direction respectively, and linear within the specific limits, thus realize the measurement surveying displacement of ball.
S1=K [(VA+VB)-(VC+VD)](a)
S2=K [(VA+VD)-(VB+VC)](b)
In formula (a) and formula (b), S1And S2Respectively survey the displacement of ball interior two mutually perpendicular directions in the same plane, including the displacement of X axis and the displacement of two mutually perpendicular directions of Y-axis, X axis and two mutually perpendicular directions of Z-axis direction, and the displacement of Y-axis and two mutually perpendicular directions of Z-axis direction；K is proportionality coefficient, and Proportional coefficient K is obtained by the mode demarcated.
Shown in Fig. 5, the present embodiment is the reed 10c of " ten " word, it is respectively arranged with the flexible structure of an elliptical ring in four cantilevers of reed 10, elliptical ring two ends on short-axis direction and cantilever are linked into a whole, elliptical ring is mutually perpendicular in fin at the cantilever of long axis direction Yu place, offering rectangular through-hole along long axis direction in elliptical ring, this flexible structure arranges the rigidity that can effectively reduce reed, so as to meet the requirement of probe measurement.
Claims (5)
1. a three-dimensional micro-nano trigger probe, is characterized in that being made up of head unit and measuring unit:
Described head unit is at the upper reed (10c) arranged in " ten " word of annulus seat (10a), the far-end of each cantilever of described reed (10c) and annular reed outer ring form entirety, and are connected so that described annular reed outer ring and annulus seat (10a) are fixing；Described reed (10c) upper surface, be in the center of reed (10c) and be fixedly installed the suspension sheet (10b) in " ten " word, form the suspension sheet (10b) suspension structure on annulus seat (10a)；The first dichroic reflection prism (9a), the second dichroic reflection prism (9b) and prism wedge (9c) it is fixedly installed respectively in the upper surface of described suspension sheet (10b), the through hole of described suspension sheet (10b) and reed (10c) fixedly mounts probe (10e), described probe (10e) convexedly stretches in the lower surface of suspension sheet (10b), and the front end of probe (10e) is for surveying ball (10d)；Described first dichroic reflection prism (9a) and the second dichroic reflection prism (9b) are unpolarized dichroic reflection prism；
The light channel structure of described measuring unit is: the collimated light that laser instrument (3a) goes out in horizontal emission is that level is projected to the first dichroic reflection prism (9a) after sequentially passing through the reflection of the first plane mirror (4a) and the second plane mirror (5a), and the reflection light formed in described first dichroic reflection prism (9a) is projected to the 3rd 4 quadrant detector (8a) as the first light beam；The transmission light formed in described first dichroic reflection prism (9a) is projected to the second dichroic reflection prism (9b), and the transmission light formed in described second dichroic reflection prism (9b) is projected to the second 4 quadrant detector (7a) as the second light beam；At the middle reflected light projects formed of described second dichroic reflection prism (9b) to prism wedge (9c), described prism wedge (9c) is formed transmission light and is projected to the first 4 quadrant detector (6a) as the 3rd light beam, utilize described 3rd 4 quadrant detector (8a), the second 4 quadrant detector (7a) and the first 4 quadrant detector (6a) to obtain the displacement signal surveying ball (10d).
2. three-dimensional micro-nano trigger probe according to claim 1, is characterized in that: described prism wedge (9c) is pasted onto the sidepiece of described second dichroic reflection prism (9b).
3. three-dimensional micro-nano trigger probe according to claim 1, it is characterized in that: the housing arranging described probe is cylinder (1a), with dividing plate subregion for epicoele (1b) and cavity of resorption (1c) in described cylinder (1a)；
Described laser instrument (3a) is arranged in epicoele (1b), and utilizes laser stent (3b) to be fixed on dividing plate；
Described first plane mirror (4a) utilizes the first plane reflection mirror support (4b) to be fixedly installed on the sidewall of epicoele (1b)；
Described second plane mirror (5a) utilizes the second plane reflection mirror support (5b) to be fixedly installed on the sidewall of cavity of resorption (1c)；
Described head unit is fixedly installed on the bottom port of described cylinder (1a) with its annulus seat (10a)；
First 4 quadrant detector (6a), the second 4 quadrant detector (7a) and the 3rd 4 quadrant detector (8a) utilize the first detector carriage (6b), the second detector carriage (7b) and the 3rd detector carriage (8b) to be arranged on the sidewall of cavity of resorption (1c) correspondingly.
4. three-dimensional micro-nano trigger probe according to claim 3, is characterized in that: include the first detector carriage (6b), the second detector carriage (7b) with the fixed structure of each detector carriage of the 3rd detector carriage (8b) is: described detector carriage is to be locked on the sidewall of cavity of resorption (1c) by the office the first holding screw on the different circumferential position of detector carriage and the second holding screw；And arranging the office the first spring washer on diverse location and the second spring washer between the sidewall of the side of described detector carriage and cavity of resorption (1c), the tightness adjusting described first spring washer and the second spring washer respectively realizes the adjustment of the corresponding locus of detector carriage.
5. three-dimensional micro-nano trigger probe according to claim 4, it is characterized in that: in described detector carriage, be provided with fin, on the medial wall of described cavity of resorption (1c), corresponding position is provided with groove, realizes detector carriage spacing on a direction in cavity of resorption (1c) with the cooperation of described fin and groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620173147.5U CN205373641U (en) | 2016-03-07 | 2016-03-07 | Three -dimensional micro -nano formula probe that triggers |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620173147.5U CN205373641U (en) | 2016-03-07 | 2016-03-07 | Three -dimensional micro -nano formula probe that triggers |
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| CN205373641U true CN205373641U (en) | 2016-07-06 |
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| CN201620173147.5U Withdrawn - After Issue CN205373641U (en) | 2016-03-07 | 2016-03-07 | Three -dimensional micro -nano formula probe that triggers |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547157A (en) * | 2016-03-07 | 2016-05-04 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano touch trigger probe |
| CN109827680A (en) * | 2019-03-19 | 2019-05-31 | 合肥工业大学 | It is a kind of based on the highly sensitive micrometer power of the three-dimensional of cmos sensor |
| TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
-
2016
- 2016-03-07 CN CN201620173147.5U patent/CN205373641U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547157A (en) * | 2016-03-07 | 2016-05-04 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano touch trigger probe |
| CN105547157B (en) * | 2016-03-07 | 2018-04-06 | 安徽电气工程职业技术学院 | Three-dimensional micro-nano trigger probe |
| TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
| CN109827680A (en) * | 2019-03-19 | 2019-05-31 | 合肥工业大学 | It is a kind of based on the highly sensitive micrometer power of the three-dimensional of cmos sensor |
| CN109827680B (en) * | 2019-03-19 | 2021-01-15 | 合肥工业大学 | Three-dimensional high-sensitivity micrometer based on CMOS sensor |
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