CN207908539U - A kind of comb capacitance type 3 axis MEMS acceleration transducer - Google Patents
A kind of comb capacitance type 3 axis MEMS acceleration transducer Download PDFInfo
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- CN207908539U CN207908539U CN201721659689.4U CN201721659689U CN207908539U CN 207908539 U CN207908539 U CN 207908539U CN 201721659689 U CN201721659689 U CN 201721659689U CN 207908539 U CN207908539 U CN 207908539U
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- broach
- acceleration transducer
- comb
- pillar
- mass block
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Abstract
The utility model belongs to acceleration transducer technical field, relate to a kind of comb capacitance type 3 axis MEMS acceleration transducer it is characterized in that：Including the fixation pillar of silicon substrate, a four sides with several comb electrodes, four mass blocks of the one side with several comb electrodes, four cantilever beams, four anchor points, fixed pillar is set to anchor point on silicon substrate, four cantilever beam one end are connected on four anchor points, and the other end, which is connected on four mass blocks, keeps it hanging；The broach of four mass blocks equidistant four direction all around for being placed in center and fixing pillar respectively, the broach of mass block and fixed pillar is staggeredly placed and there are equidistant free gaps.The differential capacitance detection structure of comb-tooth-type in the utility model can preferably eliminate inter-axis coupling interference, improve the measurement accuracy of acceleration transducer.
Description
Technical field
The utility model belongs to acceleration transducer technical field more particularly to a kind of comb capacitance type 3 axis MEMS accelerates
Spend sensor.
Background technology
Acceleration transducer is a kind of electronic equipment that can measure acceleration, it can experience acceleration and be converted into can
Output signal is earliest by one of the micromachined process studied.Its research and development start from the end of the sixties
The beginning of the seventies.Due to the diversity that mode and technique of its different detection acceleration are realized, MEMS acceleration transducers
Type is various, is broadly divided into condenser type, pressure resistance type, servo-type, four type of piezoelectric type, is applied to a variety of different occasions.
Capacitance acceleration transducer is a kind of MEMS capacitance acceleration sensor of force balance type, is also based on
The capacitance sensor of the pole span change type of capacitance principle, electrode are divided into fixed electrode and movable electrode.Movable electrode is in external force
Under the action of be subjected to displacement, the variation of the pole span of generation makes capacitance change, formed differential capacitance to output one with plus
The directly proportional differential wave of velocity magnitude.Capacitance acceleration sensor has preferable low frequency characteristic, and has DC response,
Compared with other types of acceleration transducer its high sensitivity, good environmental adaptability, temperature drift is small, noise characteristic is good and
Low-power consumption.Be disadvantageous in that its input/output signal in non-linear relation, range it is limited, by cable capacitive effect it is larger.
Comb-tooth-type capacitance acceleration sensor forms capacitance using the comb electrodes of many cross-distributions, and broach is divided into
Two kinds of moving teeth and fixed tooth, fixed tooth is fixed on substrate, and moving teeth is then attached on mass block.Under the effect of external force, moving teeth with
Mass block moves together, and generates displacement, and the capacitance between moving teeth and fixed tooth is made to change, then is measured specifically by detection circuit
Capacitance change, to which the value of acceleration be calculated.Comb-tooth-type capacitance improves the resolution ratio and essence of acceleration transducer
Degree, but its structure is more complicated, technique difficulty of processing is larger.
3 axis MEMS acceleration transducer can accurately detect out object to be detected space X, tri- axial directions of Y, Z plus
Speed signal accurately reflects the kinetic property of the object comprehensively to obtain the three-dimensional acceleration value of the object.Three axis add
Velocity sensor is based on gravity principle, and compared to double-shaft acceleration sensor, measurement accuracy higher, the scope of application is more extensive.Separately
Outside, the interference and coupling of acceleration detection are an important factor for influencing multi-shaft acceleration transducer precision between each axial direction.
Invention content
In order to solve the above technical problems, the utility model provides a kind of comb capacitance type 3 axis MEMS acceleration sensing
Device, the characteristics such as high-precision, highly sensitive and lower coupling.
Solve a kind of comb capacitance type 3 axis MEMS acceleration transducer of the above technical problem, including silicon substrate, one
Fixation pillar of the four sides with several comb electrodes, four mass blocks of the one side with several comb electrodes, four cantilever beams, four anchors
Point, fixed pillar are set to anchor point on silicon substrate, and four cantilever beam one end are connected on four anchor points, and the other end connects respectively
Being connected on four mass blocks keeps it hanging；Equidistant center that is placed in fixes all around four of pillar to four mass blocks respectively
The broach of direction, the broach of mass block and fixed pillar is staggeredly placed and there are equidistant free gaps.
The fixed pillar is set to the center of silicon substrate, and full symmetric square structure is constituted with four mass blocks.
The broach on broach and mass block on the fixed pillar is not contour, and the broach area that interlocks is half.
The fixed pillar is cuboid or square build, all around four sides be all attached with several homalographics, etc. between
Every comb-tooth-type electrode plate, broach direction is attached to the pillar perpendicular to the horizontal plane where silicon substrate, the broach of wherein X axis
Lower half portion, the broach of Y-axis is attached to the top half of the pillar, and there are equidistant gaps between broach.
The mass block is sensitive-mass block.
The mass block is cuboid or square build, mass block comb electrodes area equation, the height and quality of broach
The height of block is identical, and there are equidistant gaps between broach.
The mass block is hanging by cantilever beam and equal to the distance of horizontal plane, with fixed pillar not in same level
On.
The cantilever beam is L-type elastic cantilever, and four cantilever beams are in anti-clockwise loops for example structure.L-type elastic cantilever
Anchor point and mass block are connected, effect is to keep mass block hanging, is moved.
The silicon substrate is square.
Four anchor points are located at four corner positions of silicon substrate.
It is described that several damping holes are equipped on mass block, damping can be reduced, reduce noise and improve measuring acceleration
Precision.Position of the damping hole on mass block can be set according to actual needs, to have better effect.
In the utility model when mass block is by outer force effect, mass block can be along plane or so or up and down motion, comb
Spacing or facing area between tooth change to change so as to cause the capacitance between comb electrodes, to realize detected material
Measurement of the body in tri- space X, Y, Z axial accelerations.The differential capacitance detection structure of its comb-tooth-type, can preferably eliminate axis
Between coupled interference, improve the measurement accuracy of acceleration transducer.
Description of the drawings
With reference to the accompanying drawings and detailed description, the technical solution of the utility model is further explained.
Fig. 1 is the planar structure schematic diagram of comb capacitance type 3 axis MEMS acceleration transducer.
Fig. 2 is the three dimensional structure diagram of comb capacitance type 3 axis MEMS acceleration transducer.
Fig. 3 is the three dimensional structure diagram of fixed pillar.
Fig. 4 is the three dimensional structure diagram of mass block.
Fig. 5 is that mass block places schematic diagram with fixed pillar broach.
Fig. 6 is that L-type elastic cantilever connects anchor point and mass block schematic diagram.
Wherein, mark is specially：
1. silicon substrate, 2. anchor points, 3. fixation pillars, 4. mass blocks, 5. comb electrodes, 6. cantilever beams, 7. free gaps, 8.
Damping hole
Specific implementation mode
The utility model is further described with specific implementation mode with reference to the accompanying drawings of the specification：
Embodiment 1
A kind of comb capacitance type 3 axis MEMS acceleration transducer, including silicon substrate, a four sides are with several comb electrodes
Fixation pillar, four mass blocks of the one side with several comb electrodes, four cantilever beams, four anchor points, fixed pillar and anchor point
On silicon substrate, four cantilever beam one end are connected on four anchor points, and the other end is connected on four mass blocks
Keep it hanging；Four mass blocks respectively it is equidistant be placed in center fix pillar four direction all around, the comb of mass block
The broach of tooth and fixed pillar is staggeredly placed and there are equidistant free gaps.Four anchor points are located at four apex angles of silicon substrate
Position.
Fixed pillar is cuboid-type, is set to the center of silicon substrate, and all around four sides is all attached with several etc.
Area, equally spaced comb-tooth-type electrode plate, perpendicular to the horizontal plane where silicon substrate, the broach of wherein X axis is attached in broach direction
It in the lower half portion of the pillar, the broach of Y-axis is attached to the top half of the pillar, and there are equidistant between broach
Gap.The broach on broach and mass block on fixed pillar is not contour, and the broach area that interlocks is half, and with four matter
Gauge block constitutes full symmetric square structure.
Mass block is the sensitive-mass block of cuboid, mass block comb electrodes area equation, the height and mass block of broach
Height it is identical, there are equidistant gaps between broach.Mass block is hanging by cantilever beam and equal to the distance of horizontal plane, with
Fixed pillar is not in same level.
Cantilever beam is L-type elastic cantilever, and four cantilever beams are in anti-clockwise loops for example structure.L-type elastic cantilever connects
Anchor point and mass block, effect is to keep mass block hanging, is moved.
Embodiment 2
A kind of comb capacitance type 3 axis MEMS acceleration transducer, including silicon substrate, a four sides are with several comb electrodes
Fixation pillar, four mass blocks of the one side with several comb electrodes, four cantilever beams, four anchor points, fixed pillar and anchor point
On silicon substrate, four cantilever beam one end are connected on four anchor points, and the other end is connected on four mass blocks
Keep it hanging；Four mass blocks respectively it is equidistant be placed in center fix pillar four direction all around, the comb of mass block
The broach of tooth and fixed pillar is staggeredly placed and there are equidistant free gaps.Silicon substrate is square, and four anchor points are located at
Four corner positions of silicon substrate.
Fixed pillar is square build, is set to the center of silicon substrate, and all around four sides is all attached with several etc.
Area, equally spaced comb-tooth-type electrode plate, perpendicular to the horizontal plane where silicon substrate, the broach of wherein X axis is attached in broach direction
It in the lower half portion of the pillar, the broach of Y-axis is attached to the top half of the pillar, and there are equidistant between broach
Gap.The broach on broach and mass block on fixed pillar is not contour, and the broach area that interlocks is half, and with four matter
Gauge block constitutes full symmetric square structure.
Mass block is the sensitive-mass block of square build, mass block comb electrodes area equation, the height and quality of broach
The height of block is identical, and there are equidistant gaps between broach.Mass block is hanging by cantilever beam and equal to the distance of horizontal plane,
With fixed pillar not in same level.It is equipped with several damping holes on mass block, damping can be reduced, reduce noise and carries
The precision of high measurement acceleration.
Cantilever beam is L-type elastic cantilever, and four cantilever beams are in anti-clockwise loops for example structure.L-type elastic cantilever connects
Anchor point and mass block, effect is to keep mass block hanging, is moved.
When mass block is by outer force effect, mass block along plane or so or can move up and down, the spacing between broach
Or facing area changes and changes so as to cause the capacitance between comb electrodes, with realize object to be detected space X, Y,
The measurement of tri- axial accelerations of Z.The differential capacitance detection structure of its comb-tooth-type can preferably eliminate inter-axis coupling interference,
Improve the measurement accuracy of acceleration transducer.
The above be the utility model specific embodiment and structure explanation, do not depart from right it
It is interior, the variations such as modification, form replacement are made to the utility model in the form and details, belong to the protection of the utility model
Range.
Claims (10)
1. a kind of comb capacitance type 3 axis MEMS acceleration transducer, it is characterised in that：Including silicon substrate, a four sides with several
The fixation pillar of comb electrodes, four mass blocks of the one side with several comb electrodes, four cantilever beams, four anchor points, fixed branch
Column is set to anchor point on silicon substrate, and four cantilever beam one end are connected on four anchor points, and the other end is connected to four
Make it hanging on mass block；Four mass blocks respectively it is equidistant be placed in center fix pillar four direction all around, matter
The broach of the broach of gauge block and fixed pillar is staggeredly placed and there are equidistant free gaps.
2. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：It is described solid
Determine the center that pillar is set to silicon substrate, full symmetric square structure to be constituted with four mass blocks.
3. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1 or 2, it is characterised in that：Institute
The broach stated on the broach and mass block on fixed pillar is not contour, and the broach area that interlocks is half.
4. comb capacitance type 3 axis MEMS acceleration transducer according to claim 3, it is characterised in that：The fixed branch
Column is cuboid or square build, is all around all attached with several homalographics, equally spaced comb-tooth-type electrode plate on four sides, combs
Tooth direction is attached to the lower half portion of the pillar perpendicular to the horizontal plane where silicon substrate, the broach of wherein X axis, Y-axis
Broach is attached to the top half of the pillar, and there are equidistant gaps between broach.
5. comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：The mass block
For sensitive-mass block；The mass block is cuboid or square build, mass block comb electrodes area equation, the height of broach with
The height of mass block is identical, and there are equidistant gaps between broach.
6. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1 or 5, it is characterised in that：Institute
It is hanging by cantilever beam and equal to the distance of horizontal plane to state mass block, with fixed pillar not in same level.
7. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：It is described outstanding
Arm beam is L-type elastic cantilever, and four cantilever beams are in anti-clockwise loops for example structure.
8. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：The silicon
Substrate is square.
9. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：Described four
A anchor point is located at four corner positions of silicon substrate.
10. a kind of comb capacitance type 3 axis MEMS acceleration transducer according to claim 1, it is characterised in that：It is described
Several damping holes are equipped on mass block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721659689.4U CN207908539U (en) | 2017-12-04 | 2017-12-04 | A kind of comb capacitance type 3 axis MEMS acceleration transducer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721659689.4U CN207908539U (en) | 2017-12-04 | 2017-12-04 | A kind of comb capacitance type 3 axis MEMS acceleration transducer |
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| CN207908539U true CN207908539U (en) | 2018-09-25 |
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| CN201721659689.4U Expired - Fee Related CN207908539U (en) | 2017-12-04 | 2017-12-04 | A kind of comb capacitance type 3 axis MEMS acceleration transducer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095632A (en) * | 2019-05-29 | 2019-08-06 | 四川知微传感技术有限公司 | A kind of mems accelerometer based on zero correction |
| CN110531116A (en) * | 2019-09-27 | 2019-12-03 | 中国工程物理研究院电子工程研究所 | Three axis capacitance microaccelerators |
| CN111007442A (en) * | 2019-12-09 | 2020-04-14 | 中国科学院电子学研究所 | MEMS resonant magnetoresistive sensor for improving resolution of low-frequency magnetic field |
| WO2020167605A1 (en) * | 2019-02-11 | 2020-08-20 | Texas Instruments Incorporated | Differential capacitive sensing system |
| CN112261526A (en) * | 2020-07-21 | 2021-01-22 | 瑞声声学科技(深圳)有限公司 | MEMS acoustic sensor |
| CN114296014A (en) * | 2021-12-29 | 2022-04-08 | 东南大学 | Three-dimensional MEMS magnetic field sensor based on Lorentz force and preparation method thereof |
-
2017
- 2017-12-04 CN CN201721659689.4U patent/CN207908539U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020167605A1 (en) * | 2019-02-11 | 2020-08-20 | Texas Instruments Incorporated | Differential capacitive sensing system |
| US11929744B2 (en) | 2019-02-11 | 2024-03-12 | Texas Instruments Incorporated | Differential capacitive sensing system |
| CN110095632A (en) * | 2019-05-29 | 2019-08-06 | 四川知微传感技术有限公司 | A kind of mems accelerometer based on zero correction |
| CN110095632B (en) * | 2019-05-29 | 2024-04-05 | 四川知微传感技术有限公司 | MEMS accelerometer based on zero correction |
| CN110531116A (en) * | 2019-09-27 | 2019-12-03 | 中国工程物理研究院电子工程研究所 | Three axis capacitance microaccelerators |
| CN111007442A (en) * | 2019-12-09 | 2020-04-14 | 中国科学院电子学研究所 | MEMS resonant magnetoresistive sensor for improving resolution of low-frequency magnetic field |
| CN112261526A (en) * | 2020-07-21 | 2021-01-22 | 瑞声声学科技(深圳)有限公司 | MEMS acoustic sensor |
| US11159893B1 (en) | 2020-07-21 | 2021-10-26 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | MEMS sound transducer |
| WO2022016735A1 (en) * | 2020-07-21 | 2022-01-27 | 瑞声声学科技(深圳)有限公司 | Mems acoustic sensor |
| CN114296014A (en) * | 2021-12-29 | 2022-04-08 | 东南大学 | Three-dimensional MEMS magnetic field sensor based on Lorentz force and preparation method thereof |
| CN114296014B (en) * | 2021-12-29 | 2023-11-14 | 东南大学 | Lorentz force-based three-dimensional MEMS magnetic field sensor and preparation method thereof |
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| CF01 | Termination of patent right due to non-payment of annual fee |