CN110095632A - A kind of mems accelerometer based on zero correction - Google Patents
A kind of mems accelerometer based on zero correction Download PDFInfo
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- CN110095632A CN110095632A CN201910458116.2A CN201910458116A CN110095632A CN 110095632 A CN110095632 A CN 110095632A CN 201910458116 A CN201910458116 A CN 201910458116A CN 110095632 A CN110095632 A CN 110095632A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0868—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using self-test structures integrated into the microstructure
Abstract
The invention discloses a kind of mems accelerometers based on zero correction, it include: substrate, substrate is equipped with oxide layer, several anchor points are fixed on substrate by oxide layer, oxide layer is equipped with Sensitive Apparatus layer, and Sensitive Apparatus layer includes: differential capacitor detection structure, accelerometer closed loop feedback electrode structure, several cantilever beams, zero correction structure, sensitive-mass block, 2 stop configurations, 2 fixed structures；Different problem can be changed since mismachining tolerance, installation error and environment temperature etc. change the output of bring zero-bit with correcting structure by the design to arrangements of accelerometers, eliminated since zero-bit variation is influenced caused by the performances such as device stability, temperature characterisitic.
Description
Technical field
The present invention relates to micromechanics mems accelerometer fields, and in particular, to a kind of MEMS based on zero correction adds
Speedometer.
Background technique
Micromechanics mems accelerometer be it is a kind of measure acceleration magnitude device or device, Industry Control, aviation,
The high-precisions such as space flight, military affairs field has a wide range of applications demand.However, since mems accelerometer exists in process of production
Structure mismachining tolerance, there are the variations such as installation error and ambient temperature in use process, and device zero-bit will be caused to export
Change different, this not only influences the batch production of mems accelerometer, also makes the performances such as stability, temperature characterisitic to device
At larger impact, synthesis precision is not high, this will seriously hinder it in the application in high-precision field.Therefore, it is necessary to take improvement plan
Slightly the output of mems accelerometer zero-bit is corrected.
Summary of the invention
The invention proposes a kind of mems accelerometers based on zero correction, can by the design to arrangements of accelerometers
It is asked with correcting structure since the variation bring zero-bit output variation such as mismachining tolerance, installation error and environment temperature is different
Topic is eliminated since zero-bit variation is influenced caused by the performances such as device stability, temperature characterisitic.
For achieving the above object, this application provides a kind of mems accelerometers based on zero correction, described to add
Speedometer includes:
Substrate, substrate are equipped with oxide layer, several anchor points are fixed on substrate by oxide layer, and oxide layer is equipped with quick
Inductor component layer, Sensitive Apparatus layer include: differential capacitor detection structure, accelerometer closed loop feedback electrode structure, several cantilevers
Beam, zero correction structure, sensitive-mass block, 2 stop configurations, 2 fixed structures；
Differential capacitor detection structure is connect with anchor point and sensitive-mass block, for capacitance variations caused by acceleration signal
It is detected；Accelerometer closed loop feedback electrode structure is connect with anchor point and sensitive-mass block, for causing to acceleration signal
Displacement be balanced, so that sensitive-mass block is maintained at mechanical zero；
Sensitive-mass block is equipped with several first cavitys, central symmetry point of several first cavitys about sensitive-mass block
Cloth, the center of each first cavity are respectively equipped with an anchor point, and the interior central symmetry about the first cavity of each first cavity is distributed
There are 2 cantilever beams, one end of cantilever beam is connect with anchor point, and the other end of cantilever beam is connect with sensitive-mass block；
The second cavity is equipped in the middle part of sensitive-mass block, zero correction structure is located in the second cavity, zero correction structure packet
Include: upper and lower zero correction electrode, 2 anchor points, upper zero correction electrode are connect with upper anchor point and sensitive-mass block, lower zero correction
Electrode is connect with anchorage and sensitive-mass block, and zero correction structure top half and lower half portion are about in zero correction structure
The heart is symmetrical, and zero correction structure is used to carry out zero correction to sensitive-mass block；
The center bilateral symmetry of 2 stop configurations and 2 fixed structures respectively about sensitive-mass block, fixed structure and anchor
Point connection, stop configurations one end are connect with sensitive-mass block, and fixed structure is used to carry out position limitation protection to the stop configurations other end.
Wherein, the characteristics of present invention accelerometer is: 1, zero correction structure is divided into upper and lower two modules, Mei Gemo
Block includes fixed anchor point, zero correction fixed electrode, zero correction movable electrode, and fixed electrode one end is connect with anchor point, movably
Electrode one end is connect with mass block, and fixed electrode is equal with the movable electrode spacing of two sides, the lap with certain length,
Two modules are distributed about arrangements of accelerometers origin central symmetry；2, supporting beam is cantilever beam, totally eight, is located at movable quality
Block quadrangle, every two by fixed anchor point link together composition one group, four groups of beams about structure origin central symmetry be distributed, should
Design can avoid well X axis, Z axis to interference, prevent structural collapse, enhance structure antivibration kinetic force；3, pass through
Design spill anti-collision structure, can effectively enhancing structure impact resistance；4, using differential detection, the side of Closed loop operation
Formula can enhance accelerometer signal-to-noise ratio, effectively limit the displacement of accelerometer movable structure, good overall linearity, measurement
Precision is high；5, overall construction design is compact, and chip size is small.
Further, the cantilever beam in the accelerometer be 8, sensitive-mass block be equipped with 4 the first cavitys, 4
First cavity is distributed about the central symmetry of sensitive-mass block, and the center of each first cavity is respectively equipped with an anchor point, Mei Ge
2 cantilever beams are distributed in central symmetry in one cavity about the first cavity, and one end of cantilever beam is connect with anchor point, cantilever beam
The other end is connect with sensitive-mass block.
Further, the accelerometer specifically includes: 2 stop configurations and 2 spill fixed structures, 2 backstop knots
Structure and 2 spill fixed structures respectively about sensitive-mass block center bilateral symmetry, spill fixed structure include: fixed block and
Anchor point, fixed block are connect with anchor point, and fixed block is equipped with groove, and stop configurations one end is connect with sensitive-mass block, stop configurations
The other end extends in groove.
Further, differential capacitor detection structure includes:
Upper and lower two groups of detecting electrodes, upper detecting electrode include several to upper detection capacitor, and lower detecting electrode includes several right
Lower detection capacitor, each pair of upper detection capacitor include: upper detection fixed broach, upper detection movable comb, upper detection fixed broach one
End is connect with anchor point, and upper detection movable comb one end is connect with sensitive-mass block, and the upper detection movable comb other end detects upwards
The fixed broach other end extends, and upper detection fixed broach and upper detection movable comb have lap in vertical direction；Often
It include: lower detection fixed broach, lower detection movable comb to lower detection capacitor, lower detection fixed broach one end is connect with anchor point,
Lower detection movable comb one end is connect with sensitive-mass block, and the lower detection movable comb other end detects downwards the fixed broach other end
Extend, and lower detection fixed broach and lower detection movable comb have lap in vertical direction.
Further, accelerometer closed loop feedback electrode structure includes:
Upper and lower two groups of force feedback electrodes, upper force feedback electrode include several to upper force feedback capacitor, feedback electrode packet of exerting oneself
Include several to feedback capacity of exerting oneself, upper force feedback capacitor includes: upper force feedback fixed broach, upper force feedback movable comb；Upper power
Feedback fixed broach one end is connect with anchor point, and upper force feedback movable comb one end is connect with sensitive-mass block, and upper force feedback is movable
The upward force feedback fixed broach other end of the comb teeth other end extends, and upper force feedback fixed broach and upper force feedback movable comb exist
Vertical direction has lap；Lower force feedback fixed broach one end is connect with anchor point, lower force feedback movable comb one end with it is quick
Feel mass block connection, the lower downward force feedback fixed broach other end of the force feedback movable comb other end extends, and lower force feedback is solid
Determining comb teeth and lower force feedback movable comb has lap in vertical direction.
Further, zero correction structure includes:
About the symmetrical two zero correction modules of X-axis, zero correction module includes: anchor point, zero correction electrode, zero-bit
Correcting electrode includes several pairs of zero correction capacitors, and each pair of zero correction capacitor includes: zero correction fixed broach and zero-bit school
Positive movable comb, zero correction fixed broach one end are connect with anchor point, and zero correction movable comb one end and sensitive-mass block connect
It connects, the zero correction movable comb other end extends to the zero correction fixed broach other end, and zero correction fixed broach and zero
Bit correction movable comb has lap in vertical direction.
Further, zero correction fixed broach is equal with the zero correction movable comb spacing of two sides.
Further, its material of substrate can be DOPOS doped polycrystalline silicon or glass；Sensitive Apparatus layer material is heavily doped silicon.
Further, accelerometer is completed by MEMS processing technology.
Further, the gap of the zero correction fixed broach in zero correction structure and zero correction movable comb is d,
Zero correction fixed broach and zero correction movable comb are l in the overlap length of vertical direction, zero correction fixed broach with
The comb teeth thickness h of zero correction movable comb, then in the capacitance of zero correction module composition are as follows:
In formula, N is the logarithm of zero correction module capacitance, ε0For permittivity of vacuum, ε1For air relative dielectric constant；
Zero correction module can be obtained when comb teeth overlap length changes by formula (1), generated electrostatic force, i.e., zero
Bit correction power size are as follows:
In formula, VMTo load the fixed voltage value on sensitive-mass block, VSchoolTo load in zero correction fixed broach
Adjustable voltage value, can pass through change VSchoolValue change the size of zero correction power.
One or more technical solution provided by the present application, has at least the following technical effects or advantages:
The invention proposes a kind of mems accelerometers based on zero correction, can by the design to arrangements of accelerometers
It is asked with correcting structure since the variation bring zero-bit output variation such as mismachining tolerance, installation error and environment temperature is different
Topic, eliminating influences caused by the performances such as device stability, temperature characterisitic since zero-bit changes, and helps to make arrangements of accelerometers
High performance nature when Theoretical Design is kept, technique manufacturing yield can be improved at the same time, batch consistency is improved, substantially reduces
Production cost；Using Closed loop operation control mode, good overall linearity, overall construction design is compact, and chip size is small, shock resistance
Ability is strong；Measurement accuracy is high.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes one of the application
Point, do not constitute the restriction to the embodiment of the present invention；
Fig. 1 is the structural schematic diagram of the mems accelerometer in the application based on zero correction；
Fig. 2 is the structural schematic diagram of zero correction structure in the application.
Specific embodiment
To better understand the objects, features and advantages of the present invention, with reference to the accompanying drawing and specific real
Applying mode, the present invention is further described in detail.It should be noted that in the case where not conflicting mutually, the application's
Feature in embodiment and embodiment can be combined with each other.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, still, the present invention may be used also
Implemented with being different from the other modes being described herein in range using other, therefore, protection scope of the present invention is not by under
The limitation of specific embodiment disclosed in face.
As shown in Figure 1, the mems accelerometer according to an embodiment of the present invention based on zero correction, includes substrate 1,
Material can be DOPOS doped polycrystalline silicon or glass；The oxide layer for having layer relatively thin on substrate 1, oxide layer rise and are dielectrically separated from and fix work
With anchor point 2 is Sensitive Apparatus layer on the substrate 1, above oxide layer by oxide layer fixation, and material is heavily doped silicon, sensitive
Device layer includes upper detection fixed broach 4, upper detection movable comb 3, lower detection fixed broach 14, lower detection movable comb
13, upper force feedback fixed broach 5, upper force feedback movable comb 6, lower force feedback fixed broach 7, lower force feedback movable comb 8, hang
Arm beam 9, zero correction structure 10, sensitive-mass block 15, stop configurations 11, spill fixed structure 12, each structure are added by MEMS
Work technique completes.
The upper and lower detection fixed broach 4,14 is fixed on the substrate 1 by the anchor point 2 respectively, described upper and lower
Detection movable comb 3,13 one end are connect with the sensitive-mass block 15, the upper and lower detection fixed broach 4,14 respectively with institute
It states upper and lower detection movable comb 3,13 and constitutes a pair of of detection capacitor, several pairs of detection capacitors constitute one group of detecting electrode, above and below
Two groups of detecting electrodes constitute accelerometer differential capacitor detection structure, detect to capacitance variations caused by acceleration signal.
The upper and lower force feedback fixed broach 5,7 is fixed on the substrate 1 by the anchor point 2 respectively, it is described it is upper,
Lower force feedback movable comb 6,8 one end are connect with the sensitive-mass block 15, and the upper and lower force feedback fixed broach 5,7 is distinguished
A pair of of force feedback capacitor is constituted with the upper and lower force feedback movable comb 6,8, several pairs of force feedback capacitors constitute one group of force feedback
Electrode, upper and lower two groups of force feedback electrodes constitute accelerometer closed loop feedback electrode structure, to be displaced caused by acceleration signal into
Row balance, makes sensitive-mass block remain at mechanical zero.
The zero correction structure 10, as shown in Fig. 2, being divided into upper and lower two modules, each module includes fixed anchor point
10e, zero correction fixed broach 10b, 10c, zero correction movable comb 10a, 10d, the zero correction fixed broach 10b,
10c passes through the fixed anchor point 10e respectively and is fixed on the substrate 1, zero correction movable comb 10a, 10d one end with
The sensitive-mass block 15 connects, zero correction fixed broach 10b, 10c respectively with the zero correction movable comb
10a, 10d constitute a pair of of zero correction capacitor, and several pairs of zero correction capacitors constitute one group of zero correction electrode, i.e. zero correction
Device can be achieved by the design to module relevant parameter in module, upper and lower two module compositions accelerometer zero correcting structure
Zero correction.
The stop configurations 11, one end are connect with the sensitive-mass block 15, by spill fixed structure 12, are realized to knot
Structure is in X axis, the overload protection of Y-axis.
It is to be noted that detecting electrode, force feedback electrode, zero correction structure that the present embodiment provides, respectively about
The central symmetry of Sensitive Apparatus is distributed, but is not to say that present invention is limited only by one group of cellular constructions, if can increase and decrease as needed
Dry group homogeneous unit structure.
Closed loop operation principle of the present invention: when there is the effect of extraneous acceleration signal, differential capacitor detection structure tested will add
Speed signal is converted to capacitance change signal, and by the analysis of further interface circuit, feedback voltage is applied to force feedback electrode
In structure, inertia force caused by acceleration signal is balanced, so that sensitive-mass is maintained at mechanical zero, while output phase is answered
Voltage signal realizes the closed-loop measuring to acceleration.
Zero correction working principle of the present invention:
The gap between zero correction structure fixed broach and movable comb might as well be set as d, overlap length l, comb teeth thickness
H, then in the capacitance of zero correction module composition are as follows:
In formula, N is the logarithm of zero correction module capacitance, ε0For permittivity of vacuum, ε1For air relative dielectric constant.
Zero correction module can be obtained when comb teeth overlap length changes by formula (1), generated electrostatic force, i.e., zero
Bit correction power size are as follows:
In formula, VMTo load the fixed voltage value on sensitive-mass block, VSchoolTo load in zero correction fixed broach
Adjustable voltage value, can pass through change VSchoolValue change the size of zero correction power.
When arrangements of accelerometers is non-since the variations such as mismachining tolerance, installation error and environment temperature cause zero-bit output
When zero, when might as well assume that arrangements of accelerometers mechanical zero is offset up, zero-bit output is positive, and can start zero correction at this time
Upper mold module unit, by the voltage value V for adjusting load fixed broach in zero correctionSchoolChange the size of zero correction power,
To complete the correction to arrangements of accelerometers mechanical zero, making zero-bit output is zero；When arrangements of accelerometers mechanical zero to
When lower offset, zero-bit output is negative, and can start zero correction lower die module unit at this time, solid under zero correction by adjusting load
Determine the voltage value V of comb teethSchoolChange the size of zero correction power, so that the correction to arrangements of accelerometers mechanical zero is completed,
Making zero-bit output is zero, so far realizes the zero correction of arrangements of accelerometers.
Although preferred embodiments of the present invention have been described, it is created once a person skilled in the art knows basic
Property concept, then additional changes and modifications may be made to these embodiments.So it includes excellent that the following claims are intended to be interpreted as
It selects embodiment and falls into all change and modification of the scope of the invention.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (10)
1. a kind of mems accelerometer based on zero correction, which is characterized in that the accelerometer includes:
Substrate, substrate are equipped with oxide layer, several anchor points are fixed on substrate by oxide layer, and oxide layer is equipped with sensor
Part layer, Sensitive Apparatus layer include: differential capacitor detection structure, accelerometer closed loop feedback electrode structure, several cantilever beams, zero
Bit correction structure, sensitive-mass block, 2 stop configurations, 2 fixed structures；
Differential capacitor detection structure is connect with anchor point and sensitive-mass block, for carrying out to capacitance variations caused by acceleration signal
Detection；Accelerometer closed loop feedback electrode structure is connect with anchor point and sensitive-mass block, for position caused by acceleration signal
Shifting is balanced, and sensitive-mass block is made to be maintained at mechanical zero；
Sensitive-mass block is equipped with several first cavitys, and several first cavitys are distributed about the central symmetry of sensitive-mass block,
The center of each first cavity is respectively equipped with an anchor point, and the interior central symmetry about the first cavity of each first cavity is distributed with 2
One end of a cantilever beam, cantilever beam is connect with anchor point, and the other end of cantilever beam is connect with sensitive-mass block；
The second cavity is equipped in the middle part of sensitive-mass block, zero correction structure is located in the second cavity, on zero correction structure includes:
Lower zero correction electrode, 2 anchor points, upper zero correction electrode are connect with upper anchor point and sensitive-mass block, lower zero correction electrode
It is connect with anchorage and sensitive-mass block, zero correction structure top half and lower half portion are about zero correction structure centre pair
Claim, zero correction structure is used to carry out zero correction to sensitive-mass block；
Respectively about the center bilateral symmetry of sensitive-mass block, fixed structure and anchor point connect for 2 stop configurations and 2 fixed structures
It connects, stop configurations one end is connect with sensitive-mass block, and fixed structure is used to carry out position limitation protection to the stop configurations other end.
2. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that in the accelerometer
Cantilever beam be 8, sensitive-mass block be equipped with 4 the first cavitys, central symmetry of 4 the first cavitys about sensitive-mass block
Distribution, the center of each first cavity are respectively equipped with an anchor point, the interior central symmetry about the first cavity point of each first cavity
2 cantilever beams are furnished with, one end of cantilever beam is connect with anchor point, and the other end of cantilever beam is connect with sensitive-mass block.
3. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that the accelerometer tool
Body includes: 2 stop configurations and 2 spill fixed structures, and 2 stop configurations and 2 spill fixed structures are respectively about sensitivity
The center bilateral symmetry of mass block, spill fixed structure includes: fixed block and anchor point, and fixed block is connect with anchor point, on fixed block
Equipped with groove, stop configurations one end is connect with sensitive-mass block, and the stop configurations other end extends in groove.
4. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that differential capacitor detection knot
Structure includes:
Upper and lower two groups of detecting electrodes, upper detecting electrode include several to upper detection capacitor, and lower detecting electrode includes several to lower inspection
Survey capacitor, each pair of upper detection capacitor includes: upper detection fixed broach, upper detection movable comb, upper detection fixed broach one end and
Anchor point connection, upper detection movable comb one end are connect with sensitive-mass block, and the upper detection movable comb other end detects fixation upwards
The comb teeth other end extends, and upper detection fixed broach and upper detection movable comb have lap in vertical direction；Under each pair of
Detecting capacitor includes: lower detection fixed broach, lower detection movable comb, and lower detection fixed broach one end is connect with anchor point, lower inspection
It surveys movable comb one end to connect with sensitive-mass block, the lower detection movable comb other end detects downwards the fixed broach other end and prolongs
It stretches, and lower detection fixed broach and lower detection movable comb have lap in vertical direction.
5. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that accelerometer closed loop is anti-
Feeding electrode structure includes:
Upper and lower two groups of force feedback electrodes, upper force feedback electrode include several to upper force feedback capacitor, if feedback electrode of exerting oneself includes
It does to feedback capacity of exerting oneself, upper force feedback capacitor includes: upper force feedback fixed broach, upper force feedback movable comb；Upper force feedback
Fixed broach one end is connect with anchor point, and upper force feedback movable comb one end is connect with sensitive-mass block, upper force feedback movable comb
The upward force feedback fixed broach other end of the other end extends, and upper force feedback fixed broach with upper force feedback movable comb vertical
Direction has lap；Lower force feedback fixed broach one end is connect with anchor point, lower force feedback movable comb one end and sensitive matter
Gauge block connection, the lower downward force feedback fixed broach other end of the force feedback movable comb other end extend, and the fixed comb of lower force feedback
Tooth has lap in vertical direction with lower force feedback movable comb.
6. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that zero correction structure packet
It includes:
About the symmetrical two zero correction modules of X-axis, zero correction module includes: anchor point, zero correction electrode, zero correction
Electrode includes several pairs of zero correction capacitors, and each pair of zero correction capacitor includes: zero correction fixed broach and zero correction can
Dynamic comb teeth, zero correction fixed broach one end are connect with anchor point, and zero correction movable comb one end is connect with sensitive-mass block, and zero
The bit correction movable comb other end extends to the zero correction fixed broach other end, and zero correction fixed broach and zero correction
Movable comb has lap in vertical direction.
7. the mems accelerometer according to claim 6 based on zero correction, which is characterized in that the fixed comb of zero correction
Tooth is equal with the zero correction movable comb spacing of two sides.
8. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that its material of substrate can be
DOPOS doped polycrystalline silicon or glass；Sensitive Apparatus layer material is heavily doped silicon.
9. the mems accelerometer according to claim 1 based on zero correction, which is characterized in that accelerometer passes through
MEMS processing technology completes.
10. the mems accelerometer according to claim 6 based on zero correction, which is characterized in that zero correction structure
In zero correction fixed broach and the gap of zero correction movable comb be d, zero correction fixed broach and zero correction can
Dynamic comb teeth is l in the overlap length of vertical direction, the comb teeth thickness h of zero correction fixed broach and zero correction movable comb,
Then in the capacitance of zero correction module composition are as follows:
In formula, N is the logarithm of zero correction module capacitance, ε0For permittivity of vacuum, ε1For air relative dielectric constant；
Zero correction module can be obtained when comb teeth overlap length changes by formula (1), generated electrostatic force, i.e. zero-bit school
Positive force size are as follows:
In formula, VMTo load the fixed voltage value on sensitive-mass block, VSchoolIt is adjustable in zero correction fixed broach to load
Voltage value, can be by changing VSchoolValue change the size of zero correction power.
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| CN201910458116.2A CN110095632B (en) | 2019-05-29 | 2019-05-29 | MEMS accelerometer based on zero correction |
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| CN201910458116.2A CN110095632B (en) | 2019-05-29 | 2019-05-29 | MEMS accelerometer based on zero correction |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114088976A (en) * | 2022-01-24 | 2022-02-25 | 成都华托微纳智能传感科技有限公司 | Comb gap adjustable MEMS accelerometer |
| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
| CN117705199A (en) * | 2024-02-05 | 2024-03-15 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
| CN117825749A (en) * | 2024-03-04 | 2024-04-05 | 四川芯音科技有限公司 | Triaxial acceleration sensor processing circuit |
| CN117705199B (en) * | 2024-02-05 | 2024-05-03 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088976A (en) * | 2022-01-24 | 2022-02-25 | 成都华托微纳智能传感科技有限公司 | Comb gap adjustable MEMS accelerometer |
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| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
| CN117705199A (en) * | 2024-02-05 | 2024-03-15 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
| CN117705199B (en) * | 2024-02-05 | 2024-05-03 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
| CN117825749A (en) * | 2024-03-04 | 2024-04-05 | 四川芯音科技有限公司 | Triaxial acceleration sensor processing circuit |
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