CN106970244A - A kind of multiple range MEMS closed-loop accelerometers - Google Patents
A kind of multiple range MEMS closed-loop accelerometers Download PDFInfo
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- CN106970244A CN106970244A CN201710252303.6A CN201710252303A CN106970244A CN 106970244 A CN106970244 A CN 106970244A CN 201710252303 A CN201710252303 A CN 201710252303A CN 106970244 A CN106970244 A CN 106970244A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
Abstract
The invention discloses a kind of multiple range MEMS closed-loop accelerometers, the MEMS closed-loop accelerometers include：Substrate, Sensitive Apparatus layer, have insulating barrier between substrate and Sensitive Apparatus layer；Sensitive Apparatus layer includes：Fixed frame, anchor point, sensitive-mass block, multiple folded beams, multiple fixed test broach, multiple movable detection combs, multiple stable equilibrium broach, multiple mobile equilibrium broach；Multiple stable equilibrium broach separately constitute 4 groups of balance broach pair with multiple mobile equilibrium broach, respectively constitute：First electrostatic torquer, the second electrostatic torquer, the 3rd electrostatic torquer, can be achieved the small middle multiple range application of height, and the linearity is good, and sensitivity is high, and chip size is small, easy processing, the low technique effect of manufacturing cost.
Description
Technical field
The present invention relates to accelerometer field, in particular it relates to a kind of multiple range MEMS closed-loop accelerometers.
Background technology
Mems accelerometer be mainly used in measure moving object relative to inertial space acceleration, due to its small volume,
It is low in energy consumption, easy of integration, the features such as can be mass, make it in fields such as automobile engineering, vibration detection, aerial navigation and Military Applications
More and more important effect is played in conjunction, market potential is huge.
Mems accelerometer according to its application field difference will there are different requirements to its range, inclination angle detection,
The fields such as earthquake detection need the high-precision accelerometer of lower range, high in then being needed in fields such as vibration detection, inertial navigations
The accelerometer of range, and in the whole test flight of body, it is necessary to measure difference g value models in emission process and flight course
The acceleration situation enclosed.
The mems accelerometer of single range, can be only applied to and tested in a certain specific range ability, and exceed
The application of its range is limited, and can not apply to and Detection task is carried out in multrirange working environment, and this will be caused greatly
The wasting of resources, current existing multrirange accelerometer technical scheme mainly carries out segmentation survey using multiple sensitive-mass units
The mode of amount, this scheme is unfortunately：Need to elect between accelerometer response and range, changing range will influence
The size of sensitivity so that the precision in each range differs, and chip size area is big, complicated, difficult processing, cost
It is high.
The content of the invention
To overcome the deficiencies in the prior art, the invention provides a kind of multiple range MEMS closed-loop accelerometers,
The small middle multiple range application of height can be achieved, the linearity is good, sensitivity is high, chip size is small, easy processing, the low technology of manufacturing cost
Effect.
In order to solve the above technical problems, this application provides a kind of multiple range MEMS closed-loop accelerometers：Including substrate,
Sensitive Apparatus layer, has insulating barrier between substrate and Sensitive Apparatus layer；Sensitive Apparatus layer includes fixed frame, anchor point, folded beam, quick
Feel mass, fixed broach, movable comb and position limiting structure；Movable mass combines 12 beam centers pair in Sensitive Apparatus layer
Design is claimed to realize multiple range acceleration with detection comb group, the first electrostatic dynamic balance comb group, the second electrostatic dynamic balance comb group
Spend signal detection；On sensitive-mass block multipair movable detection comb, n have been made using surface silicon process technologyfTo the first electrostatic
Dynamic balance movable comb, 2nfTo the second electrostatic dynamic balance movable comb, the corresponding multipair fixation that made is examined on fixed frame
Survey broach, nfTo the first electrostatic dynamic balance fixed broach, 2nfIt is multipair to separately constitute to the second electrostatic dynamic balance fixed broach
Sensitization capacitance and nfTo, 2nfTo electrostatic force balancing capacitance, when accelerometer needs to apply in different range fields, by right
The electrostatic dynamic balance comb group structure of design carries out different connected mode controls, just can realize that small middle high multiple range acceleration is surveyed
Amount.
Further, the folded beam in described multrirange MEMS closed-loop accelerometers is that 12 beam Central Symmetries are set
Meter, wherein four groups of beams are located at two corners of the sensitive axial direction of the mass, eight groups of beams are located at the inner chamber of mass in addition, go here and there two-by-two
Connection, be centrosymmetric distribution, and one end of the folded beam is connected to the fixed frame, and the other end is connected to the sensitive-mass
Block.
Further, the folded beam is relatively small in sensitive axes Y direction rigidity, is easily deformed, in non-sensitive axle side
It is very big to rigidity, it is unlikely to deform, cross sensitivity can be suppressed, prevent quadrature error from influenceing, while the folded beam nonlinearity
Very little, can discharge structure residual stress, the influence of reduction residual stress and temperature to device.
Further, the anchor point is divided into the anchor in the anchor point of the mass surrounding and the mass inner chamber
Point, the anchor point of surrounding is used for fixed test broach, and constituting the anchor point in sensitization capacitance pair, inner chamber with corresponding movable comb is used for
Fixed electrostatic dynamic balance broach, with corresponding electrostatic dynamic balance movable comb Compositional balance broach pair.
Wherein, balance broach is to having four groups, and first group of balance broach pair is quiet to constituting first with second group of balance broach
Electric moment device, for small-range measurement, the 3rd group of balance broach pair with the 4th group of balance broach to constituting the second electrostatic torquer,
For the measurement of middle range, first and third group of balance broach pair is with second, four groups of balance broach are to the 3rd electrostatic of composition after in parallel respectively
Torquer, for the measurement of middle high range.
Wherein, electrostatic torquer constitutes accelerometer closed-loop control and returned by detecting that reading circuit is connected with external capacitive
Road, for balancing the inertia force produced by extraneous acceleration signal, realizes closed-loop acceleration signal detection.
Further, the fixed broach is parallel with the movable comb, and both have overlapping region in the horizontal direction,
To make accelerometer response sufficiently large, at the same improve chip area utilization, make chip structure compact, the movable comb with
Gap between two adjacent fixed broach differs 2~5 times, but not limited to this value.
Further, the position limiting structure is that spill is nested, is symmetrically distributed in the mass both sides, X can be realized respectively
The acceleration overload protection of axle, Y direction of principal axis.
Further, the material of the substrate can be silicon or glass material, and the Sensitive Apparatus layer material is heavy doping
Silicon materials, completed by MEMS processing technologys.
One or more technical schemes that the application is provided, have at least the following technical effects or advantages：
1st, the present invention realizes precision in the small middle multiple range application of height of accelerometer, each range by single mass design
Unanimously, and sensitive-mass block is big, accelerometer response is high, while using differential type capacitance detecting, can effectively suppress altogether
Mould is disturbed, and improves accelerometer signal to noise ratio.
2nd, the present invention restrained effectively structural quadrature error using the design of ten eighty percent discount stoplog Central Symmetries, effectively drop
Low cross jamming, with higher accuracy of detection.
3rd, the present invention uses closed loop electrostatic force balance type detection mode, and the accelerometer linearity is good.
4th, by designing the nested position limiting structure of symmetrical spill in mass both sides, it is therefore prevented that overload that is dynamic, determining broach is inhaled
Conjunction, Problem of Failure, add the stability and reliability of multrirange accelerometer.
5th, compact conformation of the present invention, chip size is small, and processing is easy, can batch micro operations, cost is low.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding the embodiment of the present invention, constitutes one of the application
Point, do not constitute the restriction to the embodiment of the present invention；
Fig. 1 is the structural representation of multiple range MEMS closed-loop accelerometers in the application；
Fig. 2 is the structural representation of position limiting structure in the application；
Fig. 3 is the first electrostatic torquer signal detection control loop schematic diagram in the application；
Fig. 4 is the second electrostatic torquer signal detection control loop schematic diagram in the application；
Fig. 5 is the 3rd electrostatic torquer signal detection control loop schematic diagram in the application；
Fig. 6 is capacitance detecting reading circuit schematic diagram in the application.
Embodiment
To overcome the deficiencies in the prior art, the invention provides a kind of multiple range MEMS closed-loop accelerometers,
The small middle multiple range application of height can be achieved, the linearity is good, sensitivity is high, chip size is small, easy processing, the low technology of manufacturing cost
Effect.
It is below in conjunction with the accompanying drawings and specific real in order to be more clearly understood that the above objects, features and advantages of the present invention
Mode is applied the present invention is further described in detail.It should be noted that in the case where not conflicting mutually, the application's
Feature in embodiment and embodiment can be mutually combined.
Many details are elaborated in the following description to facilitate a thorough understanding of the present invention, still, the present invention may be used also
Implemented with the other modes in the range of being different from being described herein using other, therefore, protection scope of the present invention is not by under
The limitation of specific embodiment disclosed in face.
Fig. 1-Fig. 5 is refer to, this application provides multiple range MEMS closed-loop accelerometers according to embodiments of the present invention,
Include substrate 101, its material is n-type doped silicon；There is the relatively thin silicon oxide layer of layer on substrate 101, silicon oxide layer plays insulation
Isolation and fixation；It is Sensitive Apparatus layer above silicon oxide layer, Sensitive Apparatus layer material is p-type heavily doped silicon, Sensitive Apparatus
Layer includes fixed frame 102, anchor point 103, sensitive-mass block 104, folded beam 105, fixed test broach 106,108, movably
Detection comb 107,109, stable equilibrium broach 111,113,115,117, mobile equilibrium broach 110,112,114,116 is spacing
Structure：Spill backstop tooth 118, a word catch arm 119, each structure are completed by MEMS processing technologys；Fixed frame 102 leads to
Cross anchor point 103 to be fixed on substrate 101, fixed frame 102 and anchor point 103 are distributed in sensitive structure surrounding and inside, center
12 folded beams 105 of symmetric design, the sensitive axes for being distributed in structure are upward, wherein four are distributed in sensitive-mass block 104
Both sides, remaining eight are distributed in mass inner chamber, and the one end of folded beam 105 is connected with fixed frame 102, one end and sensitive matter
Gauge block 104 is connected, and fixed test broach 106,108 designs the surrounding in structure, is connected by stripping fork with surrounding fixed frame, often
Individual fixed test broach 106,108 has a corresponding movable detection comb 107,109 to correspond to a pair of detections of composition therewith
Capacitance structure, movable detection comb 107,109 is connected by stripping fork with sensitive-mass block 104, each fixed test broach 106,
Movable detection comb 107 and each fixed test broach 108, movable detection comb 109 are symmetrical respectively about structure X axis, it
Constitute multipair difference sensitization capacitance structure up and down, each movable detection comb 107,109 and two adjacent fixed tests together
Gap between broach differs 2~5 times, but not limited to this value, and stable equilibrium broach 111,113,115,117 is designed in sensitivity
The inside of structure, is connected, each stable equilibrium broach 111,113,115,117 has one by stripping fork with internal fixed frame
Individual corresponding mobile equilibrium broach 110,112,114,116 is corresponded to therewith constitutes a pair of balancing capacitance structures, mobile equilibrium comb
Tooth 110,112,114,116 is connected by stripping fork with sensitive-mass block 104, stable equilibrium broach 113 and mobile equilibrium broach 112
First group of balance broach pair is constituted, stable equilibrium broach 111 and mobile equilibrium broach 110 constitute second group of balance broach pair, Gu
Allocate weighing apparatus broach 115 and mobile equilibrium broach 114 constitutes the 3rd group of balance broach pair, stable equilibrium broach 117 and mobile equilibrium
Broach 116 constitutes the 4th group of balance broach pair, and first group of balance broach pair is with second group of balance broach on structure X axis pair
Claim, constitute the first electrostatic torquer, the 3rd group of balance broach pair is with the 4th group of balance broach to symmetrical, the structure on structure X axis
Into the second electrostatic torquer, between each mobile equilibrium broach 110,112,114,116 and two adjacent stable equilibrium broach
Gap differs 2~5 times, but not limited to this value.
Position limiting structure：Spill backstop tooth 118, a word catch arm 119, as shown in Fig. 2 be spill nested designs, symmetrical point
Cloth is in the both sides of sensitive-mass block 104, wherein 118 connect as one with sensitive-mass block 104,119 are fixed on frame by anchor point 113
On frame, the gap between 118 and 119 is less than the minimum clearance between fixed broach and movable comb, and X-axis, Y can be realized respectively
The acceleration overload protection of direction of principal axis.
Present invention work realization principle：It will be turned by acceleration signals by multipair difference sensitization capacitance construction unit up and down
Capacitance change signal is changed to, sense voltage signal is exported after external capacitor detection reading circuit processing, by voltage signal point
The the first electrostatic torquer, the second electrostatic torquer, the 3rd electrostatic torquer of design are not fed back to, and multiple range MEMS can be achieved
Closed-loop acceleration is detected.
Small-range is measured：As shown in figure 3, when accelerometer needs to apply in small-range scope, now voltage signal connects
Enter to the first electrostatic torquer 204, by the first electrostatic torquer 204 come produced by the sensitive extraneous acceleration of balance acceleration meter
Inertia force size, realize closed loop detect.
When sensitive-mass block 104 is subjected to displacement x under acceleration signal a effects in sensitive direction of principal axis, by external capacitor
Reading circuit 202 is detected, sense voltage signal is exported, the first electrostatic torquer 204 is fed back to, by the first electrostatic torquer
204 effects produce the inertia force that the extraneous acceleration of electrostatic equilibrium dynamic balance are produced, now the first electrostatic torquer 204 produce it is total
Electrostatic equilibrium power size is：
Wherein, nfFor first group of balance broach logarithm, ε is dielectric constant, and s is broach pole plate overlapping area, d0,D0For comb
Tooth pole plate spacing, VrTo preload DC voltage, VfFor electrostatic force balanced voltage.
When accelerometer normal closed loop works, the displacement x ≈ 0, x of movable plate electrode<<D0, ignores x2, by (1) Shi Ke get,
Therefore as the big I of inertia force produced by the sensitive extraneous acceleration of the balance acceleration meter of the first electrostatic torquer 204
：The acceleration range that first electrostatic torquer 204 can be measured is：
Middle range measurement：As shown in figure 4, when accelerometer needs to apply in middle range ability, now voltage signal connects
Enter to the second electrostatic torquer 205, by the second electrostatic torquer 205 come produced by the sensitive extraneous acceleration of balance acceleration meter
Inertia force size, realize closed loop detect.
When sensitive-mass block 104 is subjected to displacement x under acceleration signal a effects in sensitive direction of principal axis, by external capacitor
Reading circuit 202 is detected, sense voltage signal is exported, the second electrostatic torquer 205 is fed back to, by the second electrostatic torquer
205 effects produce the inertia force that the extraneous acceleration of electrostatic equilibrium dynamic balance are produced, now the second electrostatic torquer 205 produce it is total
Electrostatic equilibrium power size is：
Wherein, 2*nfFor second group of balance broach logarithm.
Therefore as the big I of inertia force produced by the sensitive extraneous acceleration of the balance acceleration meter of the second electrostatic torquer 205
：The acceleration range that second electrostatic torquer 205 can be measured is：
Middle high range measurement：As shown in figure 5, when accelerometer needs to apply in middle high range scope, now voltage is believed
Number the 3rd electrostatic torquer 206 is accessed to, wherein, the 3rd electrostatic torquer 206 is by the first electrostatic torquer 204 and the second electrostatic
Torquer 205 is composed in parallel, by the 3rd electrostatic torquer 206 come used produced by the sensitive extraneous acceleration of balance acceleration meter
Property power size, realize closed loop detect.
When sensitive-mass block 104 is subjected to displacement x under acceleration signal a effects in sensitive direction of principal axis, by external capacitor
Reading circuit 202 is detected, sense voltage signal is exported, the 3rd electrostatic torquer 206 is fed back to, by the 3rd electrostatic torquer
206 effects produce the inertia force that the extraneous acceleration of electrostatic equilibrium dynamic balance are produced, now the 3rd electrostatic torquer 206 produce it is total
Electrostatic equilibrium power size is：
Wherein, 3*nfFor the 3rd group of balance broach logarithm.
Therefore as the big I of inertia force produced by the sensitive extraneous acceleration of the balance acceleration meter of the 3rd electrostatic torquer 206
：The acceleration range that 3rd electrostatic torquer 206 can be measured is：
The present invention can realize small middle high multiple range MEMS acceleration closed loop inspection it can be seen from formula (3), (5), (7)
Survey, and be same sensitive detection electric capacity in each range ability, same sensitive-mass block, multiple range application need not be sacrificial
Domestic animal sensitivity, precision uniformity is good, and sensitivity is high.
Technical scheme in above-mentioned the embodiment of the present application, at least has the following technical effect that or advantage：
1st, the present invention realizes precision in the small middle multiple range application of height of accelerometer, each range by single mass design
Unanimously, and sensitive-mass block is big, accelerometer response is high, while using differential type capacitance detecting, can effectively suppress altogether
Mould is disturbed, and improves accelerometer signal to noise ratio.
2nd, the present invention restrained effectively structural quadrature error using the design of ten eighty percent discount stoplog Central Symmetries, effectively drop
Low cross jamming, with higher accuracy of detection.
3rd, the present invention uses closed loop electrostatic force balance type detection mode, and the accelerometer linearity is good.
4th, by designing the nested position limiting structure of symmetrical spill in mass both sides, it is therefore prevented that overload that is dynamic, determining broach is inhaled
Conjunction, Problem of Failure, add the stability and reliability of multrirange accelerometer.
5th, compact conformation of the present invention, chip size is small, and processing is easy, can batch micro operations, cost is low.
, but those skilled in the art once know basic creation although preferred embodiments of the present invention have been described
Property concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to include excellent
Select embodiment and fall into having altered and changing for the scope of the invention.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (8)
1. a kind of multiple range MEMS closed-loop accelerometers, it is characterised in that the MEMS closed-loop accelerometers include：
Substrate, Sensitive Apparatus layer, have insulating barrier between substrate and Sensitive Apparatus layer；Sensitive Apparatus layer includes：Fixed frame, anchor
Point, sensitive-mass block, multiple folded beams, multiple fixed test broach, multiple movable detection combs, multiple stable equilibrium broach,
Multiple mobile equilibrium broach；Fixed frame is fixed on substrate by anchor point, and fixed frame includes external stability framework and inside
Fixed frame, fixed test broach and movable detection comb are corresponded, a pair of stable equilibrium broach and mobile equilibrium broach 1
Should；Fixed test broach is connected with external stability framework, and movable detection comb is connected with sensitive-mass block；Folded beam one end with it is outer
Portion's fixed frame connection, the folded beam other end is connected with sensitive-mass block；Cavity, stable equilibrium broach are provided with sensitive-mass block
It is respectively positioned on mobile equilibrium broach in cavity, stable equilibrium broach is connected by stripping fork with internal fixed frame, mobile equilibrium comb
Tooth is connected by stripping fork with sensitive-mass block；Multiple stable equilibrium broach separately constitute 4 groups of balances with multiple mobile equilibrium broach
Broach pair, be respectively：First group of balance broach is combed to, second group of balance broach to, the 3rd group of balance broach to, the 4th group of balance
Tooth pair, wherein, first group of balance broach pair, to symmetrical on X axis, constitutes the first electrostatic torquer with second group of balance broach,
3rd group of balance broach pair, to symmetrical on X axis, constitutes the second electrostatic torquer, first and third group with the 4th group of balance broach
Balance broach pair with second, four groups of balance broach are to the 3rd electrostatic torquer of composition after in parallel respectively.
2. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that the Sensitive Apparatus layer is also
Including position limiting structure, the position limiting structure includes：Spill backstop tooth, a word catch arm, spill backstop tooth are connected with substrate, a word
Catch arm is connected with sensitive-mass block, is carried out in the groove of the jag insertion spill backstop tooth of a word catch arm spacing.
3. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that the MEMS closed loops accelerate
Degree meter be connected with capacitance detecting reading circuit, capacitance detecting reading circuit respectively with the first electrostatic torquer, the second electrostatic torque
Device, the connection of the 3rd electrostatic torquer.
4. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that folded beam is 12,12
Individual folded beam is symmetrical on X-axis and Y-axis, wherein, four beams are located at two corners of the sensitive axial direction of sensitive-mass block；Other eight
The folded beam that beam is located in the inner chamber of sensitive-mass block, inner chamber is connected two-by-two, and be centrosymmetric distribution.
5. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that in closed-loop accelerometer
Anchor point includes：Positioned at the outer anchor point and the interior anchor point in sensitive-mass block inner chamber of sensitive-mass block surrounding, outer anchor point is used
In fixed test broach, fixed test broach constitutes sensitization capacitance pair with corresponding movable comb, and interior anchor point is used for fixed
Balance broach, stable equilibrium broach and corresponding mobile equilibrium broach Compositional balance broach pair.
6. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that the first electrostatic torquer is used
In small-range measurement, the second electrostatic torquer is measured for middle range, and the 3rd electrostatic torquer is measured for middle high range.
7. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that fixed test broach with can
Dynamic detection comb is parallel and horizontal direction has an overlapping region, and stable equilibrium broach is parallel with mobile equilibrium broach and horizontal direction
With overlapping region, the gap ratio between movable detection comb and two adjacent fixed test broach is 1 to 2 to 5, movably
It is 1 to 2 to 5 to balance the gap ratio between broach and two adjacent stable equilibrium broach.
8. multiple range MEMS closed-loop accelerometers according to claim 1, it is characterised in that the material of the substrate is
Silicon or glass material, the Sensitive Apparatus layer material are the silicon materials of heavy doping.
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| CN108344881A (en) * | 2018-02-10 | 2018-07-31 | 中国工程物理研究院电子工程研究所 | A kind of sensitive structure of closed loop micro-acceleration gauge |
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| CN109946481A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of MEMS closed-loop accelerometer based on rigidity compensation |
| CN110095632A (en) * | 2019-05-29 | 2019-08-06 | 四川知微传感技术有限公司 | A kind of mems accelerometer based on zero correction |
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| CN114088976A (en) * | 2022-01-24 | 2022-02-25 | 成都华托微纳智能传感科技有限公司 | Comb gap adjustable MEMS accelerometer |
| CN114354976A (en) * | 2022-03-21 | 2022-04-15 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer for reducing edge effect |
| CN114814293A (en) * | 2022-06-29 | 2022-07-29 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer with sawtooth-shaped comb tooth structure |
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