CN107607100B - A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure - Google Patents
A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure Download PDFInfo
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- CN107607100B CN107607100B CN201710978663.4A CN201710978663A CN107607100B CN 107607100 B CN107607100 B CN 107607100B CN 201710978663 A CN201710978663 A CN 201710978663A CN 107607100 B CN107607100 B CN 107607100B
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- mass block
- anchor point
- cantilever beam
- shock resistance
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Abstract
The invention discloses a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structures, mass block is by center anchor point support suspension in substrate, it is connected between mass block and center anchor point by girder construction, several cantilever beam structures are set on the anchor point of center, using center anchor point as fixed pivot, the movable end of cantilever beam structure protrudes into mass block always cantilever beam structure.Stop configurations avoid by center anchor point and mass block equipotential link and generate electrostatic attraction since stop configurations have potential difference with mass block in the present invention.Stop configurations can generate deformation, further shock absorbing energy after mass block is contacted with stopper hits.The invention avoids increasing gyro area caused by mass block periphery increases stop configurations, and then the problem of dramatically increase gyro cost, while also simplifying the peripheral electric signal Networking Design of gyroscope structure.
Description
Technical field
The present invention relates to electronic fields, and in particular to a kind of micromechanics of the shock resistance overload of silicon micro mechanical angular oscillation gyro
Structure.
Background technique
Silicon micromechanical gyroscope is a kind of based on silicon materials production, and sensitive structure characteristic size is in micron to millimeter magnitude
, for detecting the microsensor of angular velocity of rotation or angle.Silicon micromechanical gyroscope includes sensitive movable microstructure, passes through
Coriolis effect (Coriolis effect) measurement detection axial angular speed or angle signal.There is input when detection is axial
When angular speed or angle signal, Coriolis effect is existed in the energy coupling to sensitive axes of drive shaft by detecting movable mass
The upward motion conditions of sensitive axes counter can speculate and calculate input angular velocity or angle signal.
Silicon micromechanical gyroscope has the characteristics that small in size, light weight, cheap, can be widely used in the military and people
Use field.In industrial automation, which are mainly applied to advanced automatic safety systems, high performance navigation system, navigation
Stability, the detection of rolling and prevention and air bag and braking system.In consumer electronics sector, it is mainly used in
Image stabilization, virtual reality products and computer game in the digital products such as mobile phone, tablet computer, photographic goods.In army
Thing application aspect mainly applies to the inertial guidance of ammunition, the navigation of aircraft and gesture stability, platform stable, portable mono
Soldier's navigation etc..
The stronger application of shock and vibration in part, silicon micromechanical gyroscope need to have corresponding impact resistance
It can guarantee that failure or performance degradation do not occur for device under thump or vibration environment, realize the angular velocity measurement under adverse circumstances.
Application for a patent for invention " a kind of capacitance acceleration transducer with acoustic cavity " is proposed in acceleration transducer sensitivity
The back side design of structure processes the back pole plate with damping hole and limit salient point.Pass through the damping hole on integrated use back pole plate
Regulating system damping, while adherency when overloading is prevented using limit salient point, improve the anti-Qiang Chong of capacitance acceleration transducer
The ability hit.Application for a patent for invention " a kind of MEMS gyro of anti high overload " proposes the symmetrical band of surrounding in gyro mass block
There is the fixed block of anticollision salient point, while being provided with the center fixed block of anticollision salient point, quality in mass block center etched-off area
Block is designed using grid cavity, improves gyro anti-overload ability." mems device, subtracts deceleration stop for application for a patent for invention
The method and gyroscope gently impacted ", European patent application EP2146182A1 " Multistage Proof-mass movement
Deceleration within mems structure " it proposes to extend at least one deceleration beam from mass block.Deceleration beam
It is configured to slowing-down structure with deceleration indentation, so that gyro comb structure is able to slow down or stop before impact condition issues raw collision
Only.
" the Semiconductor Physical Quantity Sensor With of United States Patent (USP) US Patent 6065341
Stopper Portion ", " the Accelerometer with integral of United States Patent (USP) US Patent 4882933
Bidirectional shock protection and controllable viscous damping ", United States Patent (USP) US
Patent 5721377 " Angular Velocity sensor with built-in Limit stops " etc. proposes difference
The stop configurations of the shock resistance overload of structure type.
The existing most stop configurations of patent are arranged in the periphery of silicon micromechanical gyroscope mass block.The usual stop configurations connect
Ground or electric potential floating, and mass block current potential is usually nonzero value in the gyro course of work, therefore the peripheral stop configurations being grounded
Or there are certain voltage differences with mass block for the stop configurations (can generate non-constant current potential by induction) to suspend.And the voltage difference
The electrostatic force to attract each other can be generated between stop configurations and mass block.The electrostatic attraction is unfavorable for mass block and touches with backstop
It is separated after hitting contact and restores initial position.To solve the problems, such as the electrostatic attraction between stop configurations and mass block, using leading
Stop configurations and mass block are carried out equipotential link by dielectric.However the working electrode of usually gyro also is disposed on mass block
Periphery, therefore the pin interconnection that stop configurations carry out equipotential link and gyro working electrode with mass block can generally be handed over
Fork, this can greatly increase the complexity of gyro peripheral structure design and processing technology.
Patents such as a kind of " MEMS gyros of anti high overload " propose in the stop configurations of mass block periphery design to be that fixation stops
Gear.However the shortcomings that fixed stop, is, when mass block is in the case where large impact overloads environment, collides after contact with fixed stop.
Fixed stop is very big due to rigidity, it is not easy to biggish deformation occur, collision energy is difficult to inhale energy by biggish deformation
It receives, causes mass block and de contact position stress very big, be easy to happen the failures such as broken, fracture.
Summary of the invention
To solve problems of the prior art, this patent provides a kind of based on silicon micro mechanical angular oscillation gyroscope structure
Peculiar shock resistance micromechanics elastic bolster guide structure.
The mass block structure of silicon micro mechanical angular oscillation gyro by center anchor point support suspension in substrate, mass block and center
Anchor point is connected by girder construction.Reasonable design girder construction, can make mass block that can planar turn around center anchor point
It is dynamic, and can be swung up and down outside horizontal plane along the horizontal axis for passing through center anchor point.When gyro works normally, driving force makes
It obtains gyro mass block planar to rotate around center anchor point, that is, realizes the driving motion state of gyro；If there is detection in the external world at this time
The turning rate input of axis, then gyro mass block can be around the horizontal axis across center anchor point in level under the action of Coriolis effect
It is swung up and down outside face, that is, realizes the sensitive motion state of gyro.
When the external world is there are when impact acceleration, the gyro mass block of no special shock resistance design will occur under thump effect
Offset or deflection, cause dynamic comb structure and fixed broach in corresponding mass block peripheral electrode on mass block to collide.For
Under the conditions of avoiding thump, failure or girder construction occur for weak comb structure due to substantially deformation generation fracture mistake due to colliding
Effect, need to limit displacement or deflection of the mass block under the conditions of thump.
By on the anchor point of gyroscope structure center design process several extend cantilever beam structures existing silicon can be improved
The ability of the resisting strong impact of micromechanical angle oscillation gyro structure.
For cantilever beam structure using center anchor point as fixed pivot, the movable end of cantilever beam protrudes into always angular oscillation gyro matter
In gauge block.The cantilever beam structure extended on the anchor point of center is around the distribution in a center of symmetry of center anchor point.The quantity of cantilever beam structure
It can be 4,6 or 8.Stopper hits structure, stopper hits knot are processed in the end design that cantilever beam protrudes into mass block
The vertical view figure of structure is the special shapes such as round, ellipse or rectangle.It is set in the structure of corresponding original angular oscillation gyro mass block
Meter processes the groove structure slightly larger compared with cantilever beam stopper hits structure, and the groove structure is by the stopper hits of cantilever beam movable end
Structure is included in.The stopper hits structure of groove structure and cantilever beam movable end on mass block is designed to equal gap
Conformal structure.
When external environment deposits planar thump overload, mass block is shifted or is deflected under thump effect.
By reasonably designing the interval between groove structure and stopper hits structure, it can both guarantee mass block in normal operating conditions
Under collision is not in contact with stopper hits structure, and can guarantee that stopper hits structure and mass block are sent out under the conditions of thump
Raw contact, limits the offset or deflection of mass block.
After being contacted due to mass block with stopper hits structure, mass block is limited by cantilever beam, the offset of mass block or
Deflection angle is controlled, and ensure that comb structure does not collide under thump, while big shape will not occur for gyro girder construction
Become.Further after gyro mass block and stopper hits structure are in contact, cantilever beam can pass through deformation snubber
Collision energy.Although elasticity cantilever beam mass block and its collide after understand deformation occurs, which is far smaller than quality
Offset or deflection of the block under no stop configurations, thus under thump mass block the available effective control of offset or deflection angle
System.
Advantageous effects of the invention:
The shock resistance micromechanics elastic bolster guide structure based on silicon micro mechanical angular oscillation gyroscope structure, during stop configurations pass through
Heart anchor point and gyro mass block equipotential link are avoided since stop configurations and mass block generate electrostatic there are potential difference and inhale
The problem of gravitation.The stop configurations of cantilever beam-like are elastic bolster guide structure, can be generated after mass block is contacted with stopper hits
Deformation, further shock absorbing energy.The cantilever beam-like elastic bolster guide structure extended by using center anchor point, avoids
The problem of increasing gyro area caused by mass block periphery increase stop configurations, and then dramatically increasing gyro cost.Simultaneously
Simplify the electric signal interconnection design of gyroscope structure.
Detailed description of the invention
Fig. 1 is a kind of silicon micro mechanical angular oscillation gyroscope structure schematic top plan view.
Fig. 2 is a kind of silicon micro mechanical angular oscillation gyroscope structure schematic side view.
Fig. 3 is that the silicon micro mechanical angular oscillation gyro sensitive-mass block that Coriolis effect generates deflects schematic diagram.
Fig. 4 is the shock resistance micro mechanical structure schematic diagram based on silicon micro mechanical angular oscillation gyroscope structure.
Fig. 5 is the silicon micro mechanical angular oscillation gyroscope structure top view using shock resistance micromechanics elastic bolster guide structure.
Specific embodiment
A kind of way of realization of the invention is further described with reference to the accompanying drawing.
The top view of the sensitive structure of traditional silicon micro mechanical angular oscillation gyro is as shown in Figure 1, side view is as shown in Figure 2.
The mass block structure 103 of silicon micro mechanical angular oscillation gyro by 101 support suspension of center anchor point in silicon base (not shown),
It is connected between mass block 103 and center anchor point 101 by girder construction 102.By reasonably designing girder construction 102, can make
Mass block 103 can rotate in X/Y plane around center anchor point 101, and can exist around the horizontal Y-axis for passing through center anchor point 101
Horizontal plane is swung up and down outside.When gyro works normally, driving force makes gyro mass block 103 flat in XY around center anchor point 101
Rotation in surface, i.e. the driven-mode movement of gyro；If there are the turning rate input of detection axis (Z axis), gyro quality in the external world at this time
Block 103 can be swung up and down, i.e., gyro is quick under the action of Coriolis effect around the Y-axis for passing through center anchor point 101 outside X/Y plane
Feel mode motion.
The driving electrodes 104 of gyro are distributed in the periphery of gyro mass block 103, have fixed broach knot in driving electrodes 104
Structure 105.It is corresponding with fixed broach structure 105, there is comb structure 106 on mass block 103.Fixed broach structure 105
Comb teeth capacitor is constituted with dynamic comb structure 106, when there are generate electrostatic when voltage difference, between comb teeth capacitor to inhale on comb teeth capacitor
Gravitation, the driven-mode that gyro can be realized by changing the voltage difference move.
Gyro sensitivity detecting electrode 110a and sensitive detecting electrode 110b is distributed in the lower section of gyro mass block 103.When
When there is the turning rate input of detection Z axis in the external world, the X/Y plane around Y-axis occurs under the action of Coriolis effect for gyro mass block 103
Outer deflection, deflection angle θ, as shown in Figure 3.Sensitivity movement leads to gyro mass block 103 and sensitive detecting electrode 110a
With spacing one increase of 110b, a reduction.Pass through detection gyro mass block 103 and sensitive detecting electrode 110a and 110b structure
At capacitance change, the measurement of input angular velocity can be realized.
When impact acceleration in external world's input X/Y plane, gyro mass block 103 will will shift under thump effect
Or deflection, the dynamic comb structure 106 that will lead on mass block collide with fixed broach 105 on counter electrode.It is strong to avoid
Under the conditions of impact, weak comb structure since failure or girder construction 102 occur for collision since fracture failure occurs for substantially deformation,
Offset or deflection of the mass block 102 under the conditions of thump need to be limited.
The present invention processes 4 extension cantilever beam structures 201 by designing on gyroscope structure center anchor point 101, can be with
Improve the ability of the resisting strong impact of existing silicon micro mechanical angular oscillation gyroscope structure.The cantilever beam knot extended on center anchor point 101
Structure 201 is around the distribution in a center of symmetry of center anchor point 101.Cantilever beam structure 201 is fixed branch with the center anchor point 101 of original structure
Point, the other end of cantilever beam extend always in deeply former angular oscillation gyro mass block.Go deep into the end of mass block in cantilever beam 201
Design processes circular stopper hits structure 202.In the structure of corresponding original angular oscillation gyro mass block design process compared with
The slightly larger groove structure 210 of the stopper hits structure 202 of cantilever beam 201, the groove structure 210 is by 201 movable end of cantilever beam
Stopper hits structure 202 is included in.Groove structure 210 and the backstop of 201 movable end of cantilever beam structure on mass block touch
It hits structure 202 and is designed to the equal conformal structure in gap.
When external environment there are in X/Y plane thump overload when, mass block 103 thump effect under, shift or
Deflection.By reasonably designing the gap between groove structure 210 and stopper hits structure 202, it can both guarantee mass block 103
Collision is not in contact with stopper hits structure 202 in normal operation, and backstop can be allowed to touch under the conditions of thump
It hits structure 202 to be in contact with mass block 103, limits the offset or deflection of mass block.
Further deformation occurs for the cantilever beam structure 201 of elasticity, snubber touches after mass block is in contact with it collision
Hit energy.The deformation quantity of cantilever beam structure 201 is far smaller than offset or deflection of the mass block under the conditions of no stop configurations, because
Under the conditions of this thump, the offset or deflection of mass block are effectively controlled, and ensure that comb structure 105 and 106 will not occur
It collides and big deformation will not occur for gyro girder construction 102.
Cantilever beam structure 201 can require to close around the distribution in a center of symmetry of center anchor point, the quantity of cantilever beam according to shock resistance
Reason design, can be 4 or 8 or other quantity.Figure can be circle in the face XY of stopper hits structure 202, can also be with
It is designed to the special shapes such as ellipse or rectangle.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvement and deformations can also be made, these improvement and deformations
Also it should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure, mass block is by center anchor point support suspension in substrate
On, it is connected between mass block and center anchor point by girder construction, characterized in that several cantilever beam knots are set on the anchor point of center
Structure, using center anchor point as fixed pivot, the movable end of cantilever beam structure protrudes into mass block always cantilever beam structure.
2. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 1, characterized in that institute
Cantilever beam structure is stated around the distribution in a center of symmetry of center anchor point.
3. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 1, characterized in that outstanding
The end that arm beam protrudes into mass block forms stopper hits structure.
4. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 3, characterized in that institute
The plan view shape of stopper hits structure is stated as round, ellipse or rectangle.
5. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 3, characterized in that matter
Groove structure corresponding with stopper hits structure is provided on gauge block, which includes by corresponding stopper hits structure
Wherein.
6. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 5, characterized in that matter
The gap that formation spacing is equal between groove structure and the stopper hits structure of cantilever beam structure movable end on gauge block.
7. a kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure according to claim 1 or 2, feature
It is that the quantity of cantilever beam structure is 4,6 or 8.
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| CN201710978663.4A CN107607100B (en) | 2017-10-19 | 2017-10-19 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109188012B (en) * | 2018-11-15 | 2024-02-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | Honeycomb micro-stop structure |
| CN109374917B (en) * | 2018-11-15 | 2020-07-31 | 中国兵器工业集团第二一四研究所苏州研发中心 | Design method of honeycomb micro stop structure |
| CN110044346A (en) * | 2019-04-08 | 2019-07-23 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN109900262B (en) * | 2019-04-08 | 2021-08-10 | 瑞声科技(新加坡)有限公司 | Gyroscope |
| CN110058041A (en) * | 2019-04-08 | 2019-07-26 | 瑞声科技(新加坡)有限公司 | Gyroscope |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1748121A (en) * | 2002-12-16 | 2006-03-15 | 霍尼韦尔国际公司 | Methods and systems for decelerating proof mass movements within mems structures |
| CN101563616A (en) * | 2006-12-19 | 2009-10-21 | 罗伯特·博世有限公司 | Acceleration sensor with comb-shaped electrodes |
| CN102156194A (en) * | 2011-03-07 | 2011-08-17 | 东南大学 | Stop structure of accelerometer |
| CN103675344A (en) * | 2012-09-21 | 2014-03-26 | 中国科学院地质与地球物理研究所 | Accelerometer and manufacturing process thereof |
| CN204405077U (en) * | 2015-02-15 | 2015-06-17 | 水木智芯科技（北京）有限公司 | A kind of Z axis MEMS tuning fork gyroscope |
| CN106123884A (en) * | 2016-06-17 | 2016-11-16 | 中北大学 | A kind of highly sensitive MEMS annular vibration gyro harmonic oscillator structure |
| CN106289214A (en) * | 2016-10-21 | 2017-01-04 | 中北大学 | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro harmonic oscillator structure |
| CN106970244A (en) * | 2017-04-18 | 2017-07-21 | 四川知微传感技术有限公司 | A kind of multiple range MEMS closed-loop accelerometers |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616528A (en) * | 2013-12-11 | 2014-03-05 | 江苏物联网研究发展中心 | Single elastic beam interdigital capacitor angular speed meter and manufacturing method thereof |
-
2017
- 2017-10-19 CN CN201710978663.4A patent/CN107607100B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1748121A (en) * | 2002-12-16 | 2006-03-15 | 霍尼韦尔国际公司 | Methods and systems for decelerating proof mass movements within mems structures |
| CN101563616A (en) * | 2006-12-19 | 2009-10-21 | 罗伯特·博世有限公司 | Acceleration sensor with comb-shaped electrodes |
| CN102156194A (en) * | 2011-03-07 | 2011-08-17 | 东南大学 | Stop structure of accelerometer |
| CN103675344A (en) * | 2012-09-21 | 2014-03-26 | 中国科学院地质与地球物理研究所 | Accelerometer and manufacturing process thereof |
| CN204405077U (en) * | 2015-02-15 | 2015-06-17 | 水木智芯科技（北京）有限公司 | A kind of Z axis MEMS tuning fork gyroscope |
| CN106123884A (en) * | 2016-06-17 | 2016-11-16 | 中北大学 | A kind of highly sensitive MEMS annular vibration gyro harmonic oscillator structure |
| CN106289214A (en) * | 2016-10-21 | 2017-01-04 | 中北大学 | A kind of anti-HI high impact S-shaped spring beam MEMS annular vibration gyro harmonic oscillator structure |
| CN106970244A (en) * | 2017-04-18 | 2017-07-21 | 四川知微传感技术有限公司 | A kind of multiple range MEMS closed-loop accelerometers |
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