CN109900262B - Gyroscope - Google Patents
Gyroscope Download PDFInfo
- Publication number
- CN109900262B CN109900262B CN201910276698.2A CN201910276698A CN109900262B CN 109900262 B CN109900262 B CN 109900262B CN 201910276698 A CN201910276698 A CN 201910276698A CN 109900262 B CN109900262 B CN 109900262B
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- rod body
- arc
- annular
- gyroscope
- shaped rod
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention provides a gyroscope which comprises an annular supporting plate and a vibrating piece, wherein the vibrating piece comprises an annular part and a plurality of elastic connecting parts arranged at intervals in a surrounding mode along the circumferential direction of the annular part, each elastic connecting part comprises an arc-shaped rod body arranged at the periphery of the annular part at intervals, a first rod body connected between the arc-shaped rod body and the peripheral wall of the annular part and a second rod body extending from the arc-shaped rod body and fixed on the annular supporting plate, and the arc-shaped rod bodies are distributed at intervals along a circumference which is concentric with the annular part. According to the gyroscope provided by the invention, the vibrating piece is erected on the annular supporting plate, and when the vibrating piece rotates under the action of external force, the current changes, and the angular velocity is detected; the arrangement of the plurality of elastic connecting parts not only maintains the elasticity of rotation but also can inhibit unnecessary vibration; and the elastic connecting part is provided with an arc-shaped rod body which is concentric with the annular part, so that the whole vibrating piece structure has no acute angle, and the elastic vibrating piece structure is easier to manufacture while keeping the elasticity and the unnecessary vibration resistance.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of gyroscopes, in particular to a gyroscope.
[ background of the invention ]
A gyroscope is an angular velocity detection device.
The prior art gyroscope has a complex structure, and generates some unnecessary vibration while maintaining the elasticity of rotation, so that the accuracy of rotation detection is not high enough.
Therefore, it is necessary to provide a gyro which vibrates smoothly.
[ summary of the invention ]
The invention aims to provide a gyroscope which can restrain unnecessary vibration and is easy to manufacture.
The technical scheme of the invention is as follows:
the utility model provides a gyroscope, includes cyclic annular backup pad and erects in the vibrating part of cyclic annular backup pad one side, the vibrating part includes cyclic annular portion and a plurality of edge cyclic annular portion circumference interval is around setting in the elastic connection portion of cyclic annular portion periphery, every elastic connection portion all includes and is arc extension and interval and locates the arc body of rod of cyclic annular portion periphery, connect in the arc body of rod with first body of rod between the cyclic annular portion periphery wall and follow the arc body of rod extends to be fixed in the last second body of rod of cyclic annular backup pad, each the arc body of rod along one with the circumference interval distribution of the same centre of a circle of cyclic annular portion.
Preferably, every elastic connection portion all includes one the arc body of rod, two first body of rod and one the second body of rod, two first bodies of rod are followed respectively the both ends of the arc body of rod extend to be connected the periphery wall of cyclic annular portion, the second body of rod is connected the arc body of rod with cyclic annular backup pad.
Preferably, the second rod body is connected to the middle point of the arc-shaped rod body; and/or the presence of a gas in the atmosphere,
and a pin for electric connection is arranged at the joint of the second rod body and the annular supporting plate.
Preferably, the included angle formed by connecting the second rod body with the arc-shaped rod body and the included angle formed by connecting the first rod body with the annular part are both larger than or equal to 90 degrees.
Preferably, the number of the elastic connecting parts is even, and the even number of the elastic connecting parts are distributed at equal intervals along the circumferential direction.
Preferably, the annular support plate has a hollow inner hole, and a central axis of the hollow inner hole coincides with a central axis of the annular portion.
Preferably, the hollow inner hole is a regular polygon hole.
Preferably, the number of the sides of the regular polygonal hole is even, the number of the sides of the regular polygonal hole is the same as the number of the elastic connecting parts, and each second rod body corresponds to the midpoint of each side of the regular polygonal hole one by one and is connected to the annular supporting plate in an extending manner.
Preferably, the vibrating member is made of metal; and/or the presence of a gas in the atmosphere,
the vibrating member is integrally formed.
Preferably, the gyroscope further includes a substrate, and a side of the annular support plate facing away from the vibrating element is fixed on the substrate in a stacked manner.
The invention has the beneficial effects that: the invention provides a gyroscope, wherein a vibrating piece is erected on an annular supporting plate, and when the vibrating piece rotates under the action of external force, current changes, so that angular velocity is detected; the invention has simple structure, and the arrangement of a plurality of elastic connecting parts not only keeps the rotation elasticity, but also can restrain unnecessary vibration; and the elastic connecting part is provided with an arc-shaped rod body which is concentric with the annular part, so that the whole vibrating piece structure has no acute angle, and the elastic vibrating piece structure is easier to manufacture while keeping the elasticity and the unnecessary vibration resistance.
[ description of the drawings ]
FIG. 1 is an exploded view of a gyroscope provided by an embodiment of the present invention;
fig. 2 is a schematic overall structure diagram of a gyroscope provided in the embodiment of the present invention;
FIG. 3 is a cross-sectional view A-A of FIG. 2;
fig. 4 is a top view of a gyroscope provided by an embodiment of the present invention.
[ detailed description ] embodiments
The invention is further described with reference to the following figures and embodiments.
Referring to fig. 1 and 2, a preferred embodiment of the present invention provides a gyroscope 100, which includes a substrate 10, a ring-shaped support plate 20, and a vibrating element 30 mounted on one side of the ring-shaped support plate 20, wherein the vibrating element 30 includes a ring-shaped portion 31 and a plurality of elastic connection portions 32 disposed around the outer periphery of the ring-shaped portion 31 at intervals along the circumferential direction of the ring-shaped portion 31, each elastic connection portion 32 includes an arc-shaped rod 321 extending in an arc shape and disposed around the outer periphery of the ring-shaped portion 31 at intervals, a first rod 322 connected between the arc-shaped rod 321 and the outer circumferential wall of the ring-shaped portion 31, and a second rod 323 extending from the arc-shaped rod 321 and fixed on the ring-shaped support plate 20, and each arc-shaped rod 321 is disposed at intervals along a circumference concentric with the ring-shaped portion 31. The elastic connection portion 32 is provided with a pin 324 for electrical connection at a connection with the ring-shaped support plate 20, the ring-shaped support plate 20 is made of silicon dioxide, and the vibrating member 30 is made of metal. The pin 324 is in a state of continuous energization, and thus the vibrating member 30 is also in a conductive state. The vibrating member 30 is erected on the annular supporting plate 20, and the current is normal and has no fluctuation in a normal state; when the annular portion 31 is pressed by the outside, the elastic connection portion 32 rotates, so that the current changes, and the gyroscope 100 can detect the corresponding angular velocity change through the change of the current. The gyroscope 100 provided by the embodiment of the invention has a simple structure, and the plurality of elastic connecting parts 32 can keep the rotation elasticity and inhibit unnecessary vibration; the elastic connecting portion 32 is provided with the arc rod 321 concentric with the annular portion 31, so that the entire vibrating member 30 has no acute angle, and is easier to manufacture while maintaining the elastic and unnecessary vibration resistance.
Referring to fig. 1 and 4, each of the elastic connection portions 32 preferably includes an arc-shaped rod 321, two first rods 322 and a second rod 323, and the two first rods 322 extend from both ends of the arc-shaped rod 321 to connect the outer peripheral walls of the ring portion 31. The distance is kept between two adjacent elastic connecting parts 32, so that the elastic connecting parts 32 can be prevented from colliding with each other during vibration, and the accuracy and reliability of detection results are improved.
Preferably, the second rod 323 is connected to the middle point of the arc-shaped rod 321. The included angle formed by the connection of the second rod 323 and the arc-shaped rod 321 and the included angle formed by the connection of the first rod 322 and the annular part 31 are both greater than or equal to 90 degrees. The overall structure of the vibrating member 30 is not sharp, and is easier to manufacture while maintaining rotational flexibility and resistance to unwanted vibrations.
Preferably, the number of the elastic connection portions 32 is even, and the even number of the elastic connection portions 32 are equally spaced in the circumferential direction. The elastic connection portions 32 are distributed at intervals along a circumference concentric with the annular portion 31, and are uniformly distributed and stably connected, so that the gyro 100 has stronger unnecessary vibration resistance.
Preferably, the annular portion 31 has a circular shape, which is simple in structure, easy to manufacture and mold, and facilitates symmetrical connection of an even number of the elastic connection portions 32. Of course, the annular portion 31 may have other regular polygonal shapes.
Preferably, the vibration member 30 is integrally formed. The vibrating member 30 is manufactured in an integrated manner, which is beneficial to the overall stability of the vibrating member 30, makes the unnecessary vibration resistance stronger, and is convenient for industrial production and manufacturing.
Referring to fig. 1 and 3, preferably, the outer contour of the annular support plate 20 is rectangular, and the annular support plate 20 has a hollow inner hole 21, and the central axis of the hollow inner hole 21 coincides with the central axis of the annular portion 31. The vibrating member 30 is erected on the annular supporting plate 20, and the part of the annular supporting plate 20 facing the vibrating member 30 is provided with a through hole, so that the elastic connecting part 32 can be prevented from colliding with the annular supporting plate 20 when the vibrating member 30 vibrates, and the detection result can be prevented from being influenced.
Preferably, the hollow inner hole 21 is a regular polygonal hole, the number of sides of the regular polygonal hole is even, the number of the sides of the regular polygonal hole is the same as the number of the elastic connection portions 32, and the second rod bodies 323 respectively correspond to the middle points of the sides of the regular polygonal hole one by one and are connected to the annular support plate 20 in an extending manner, so that the overall stability of the vibrating member 30 is better. In the embodiment of the present invention, the number of the elastic connection portions 32 and the number of sides of the regular polygonal hole are both eight. Of course, the number of the sides of the regular polygonal hole may be any even number, so as to ensure that the elastic connection portions 32 are uniformly arranged and stably connected, thereby suppressing unnecessary vibration.
Preferably, the gyroscope 100 includes a substrate 10, and a side of the annular support plate 20 facing away from the vibrating element 30 is fixed to the substrate 10 in a stacked manner. Preferably, the substrate 10 is a rectangular plate. Here, the addition of the substrate 10 can increase the strength of the entire gyroscope 100.
The principle of detecting the angular velocity of the gyroscope 100 provided by the embodiment of the invention is as follows: the vibrating member 30 is mounted on the annular supporting plate 20, and when the vibrating member 30 rotates due to an external force, the current changes, and the angular velocity is detected. The gyroscope 100 provided by the embodiment of the invention has a simple structure, and the plurality of elastic connecting parts 32 can keep the rotation elasticity and inhibit unnecessary vibration; the elastic connecting portion 32 is provided with the arc rod 321 concentric with the annular portion 31, so that the entire vibrating member 30 has no acute angle, and is easier to manufacture while maintaining the elastic and unnecessary vibration resistance.
While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.
Claims (7)
1. A gyroscope is characterized by comprising an annular supporting plate and a vibrating piece erected on one side of the annular supporting plate, wherein the vibrating piece comprises an annular part and a plurality of elastic connecting parts which are arranged on the periphery of the annular part in a surrounding mode at intervals along the circumferential direction of the annular part, each elastic connecting part comprises an arc-shaped rod body which extends in an arc shape and is arranged on the periphery of the annular part at intervals, a first rod body which is connected between the arc-shaped rod body and the peripheral wall of the annular part and a second rod body which extends from the arc-shaped rod body and is fixed on the annular supporting plate, and each arc-shaped rod body is distributed at intervals along a circumference which is concentric with the annular part;
each elastic connecting part comprises one arc-shaped rod body, two first rod bodies and one second rod body, the two first rod bodies extend from two ends of the arc-shaped rod body respectively to be connected with the outer peripheral wall of the annular part, and the second rod body is connected with the arc-shaped rod body and the annular supporting plate;
the second rod body is connected to the middle point of the arc-shaped rod body; and/or the presence of a gas in the atmosphere,
a pin for electrical connection is arranged at the joint of the second rod body and the annular supporting plate;
the second body of rod with the contained angle that the arc body of rod connected formation with the first body of rod with the contained angle that the annular portion connected formation all is more than or equal to 90 degrees.
2. The gyroscope of claim 1, wherein the number of the elastic connection portions is an even number, and the even number of the elastic connection portions are equally spaced in a circumferential direction.
3. The gyroscope of claim 1, wherein the annular support plate has a hollow bore having a central axis coincident with a central axis of the annular portion.
4. The gyroscope of claim 3, wherein the hollow bore is a regular polygonal bore.
5. The gyroscope according to claim 4, wherein the number of sides of the regular polygonal hole is even, the number of sides of the regular polygonal hole is the same as the number of the elastic connecting portions, and each of the second rods respectively corresponds to a middle point of each side of the regular polygonal hole and is connected to the annular supporting plate in an extending manner.
6. The gyroscope of claim 1, wherein the vibrating member is made of metal; and/or the presence of a gas in the atmosphere,
the vibrating member is integrally formed.
7. The gyroscope of claim 1, further comprising a substrate, wherein a side of the annular support plate facing away from the vibrating member is fixed to the substrate in a stacked manner.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910276698.2A CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
| PCT/CN2019/083326 WO2020206712A1 (en) | 2019-04-08 | 2019-04-19 | Gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910276698.2A CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109900262A CN109900262A (en) | 2019-06-18 |
| CN109900262B true CN109900262B (en) | 2021-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910276698.2A Active CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109900262B (en) |
| WO (1) | WO2020206712A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110631569A (en) * | 2019-10-12 | 2019-12-31 | 东南大学 | MEMS single-ring annular vibration gyro structure |
| CN112857351B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
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| CN102089620A (en) * | 2008-07-12 | 2011-06-08 | 大西洋惯性系统有限公司 | Improvements in or relating to vibrating structure gyroscopes |
| CN102246003A (en) * | 2008-12-09 | 2011-11-16 | 株式会社村田制作所 | Oscillating gyro element and manufacturing method therefor |
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| EP3441719A1 (en) * | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Limited | Angular rate sensor |
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| GB2322196B (en) * | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
| GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
| ATE476638T1 (en) * | 1999-09-17 | 2010-08-15 | Kionix Inc | ELECTRICALLY DISCONNECTED MICRO-MANUFACTURED GYRO |
| GB0122256D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
| CN2618143Y (en) * | 2003-05-30 | 2004-05-26 | 财团法人工业技术研究院 | Annular body and bearing structure of vibration style annular gyroscope |
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2019
- 2019-04-08 CN CN201910276698.2A patent/CN109900262B/en active Active
- 2019-04-19 WO PCT/CN2019/083326 patent/WO2020206712A1/en active Application Filing
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| CN102089620A (en) * | 2008-07-12 | 2011-06-08 | 大西洋惯性系统有限公司 | Improvements in or relating to vibrating structure gyroscopes |
| CN102246003A (en) * | 2008-12-09 | 2011-11-16 | 株式会社村田制作所 | Oscillating gyro element and manufacturing method therefor |
| CN104132658A (en) * | 2013-04-30 | 2014-11-05 | 大西洋惯性系统有限公司 | Mems sensor |
| CN206341427U (en) * | 2016-10-25 | 2017-07-18 | 瑞声科技(新加坡)有限公司 | Mems microphone |
| EP3441719A1 (en) * | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Limited | Angular rate sensor |
| CN107607100A (en) * | 2017-10-19 | 2018-01-19 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109900262A (en) | 2019-06-18 |
| WO2020206712A1 (en) | 2020-10-15 |
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