CN204405077U - A kind of Z axis MEMS tuning fork gyroscope - Google Patents
A kind of Z axis MEMS tuning fork gyroscope Download PDFInfo
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- CN204405077U CN204405077U CN201520111021.0U CN201520111021U CN204405077U CN 204405077 U CN204405077 U CN 204405077U CN 201520111021 U CN201520111021 U CN 201520111021U CN 204405077 U CN204405077 U CN 204405077U
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Abstract
The utility model discloses a kind of Z axis MEMS tuning fork gyroscope, comprise substrate and suprabasil two masses, the above-below direction of two described masses is connected with four by elastic beam and drives mass, and the left and right directions of two described masses is connected with four Detection job blocks by elastic beam; Drive between mass and be provided with lever connector, between adjacent two Detection job blocks, be provided with folded beam connector; Be connected with anchor point rotationally in the middle part of lever connector, described anchor point is fixed on substrate; Drive mass to be provided with driving capacitance group, Detection job block is provided with Detection capacitance group.The utility model drives the lever connector of mass to control the displacement coordination of the right and left driving mass unanimously by connecting the right and left, and structure is simple, with low cost.
Description
Technical field
The utility model relates to micro electro mechanical system field, particularly relates to a kind of Z axis MEMS tuning fork gyroscope.
Background technology
Micro-electro-mechanical gyroscope is mainly used to the angular velocity measuring moving object, it is the inertial sensor of based semiconductor technology, it is little that it has size, low in energy consumption, cheap advantage, can smart mobile phone be used in, realize the action recognition of body induction game in the emerging consumer electronics product such as panel computer, the functions such as navigator fix.MEMS gyro instrument realizes the detection of angular velocity signal based on Coriolis force, comprising driving and detection two large divisions.Wherein, drive circuit makes mass do simple harmonic motion with driving shaft natural frequency, when mass has the turning rate input vertical with driving direction, Coriolis force can produce on the direction vertical with input angular velocity direction with driving direction, gyrostatic test side can detect the displacement that Coriolis force produces can record the size of angular velocity by this detection signal.
Existing micro-electro-mechanical gyroscope, drives between mass and does not have lever to be coupled, and causes the right and left to drive mass moving displacement inconsistent, makes like this to drive to there is larger coupled signal between sensed-mode, and mass displacement amplitude is uncontrollable.
Utility model content
The technical problems to be solved in the utility model solves aforementioned drawback at least to a certain extent, provides a kind of the right and left to drive mass displacement consistent, the micro electronmechanical tuning fork gyroscope that mass displacement amplitude is controlled.
In order to solve the problems of the technologies described above, the utility model provides a kind of Z axis MEMS tuning fork gyroscope, comprise substrate and suprabasil mass, described mass comprises the first mass and second mass of left and right distribution, the above-below direction of two described masses is connected with the first driving mass, second by elastic beam and drives mass, the 3rd to drive mass, four-wheel drive mass, and the left and right directions of two described masses is connected with the first Detection job block, the second Detection job block, the 3rd Detection job block, the 4th Detection job block by elastic beam; The first lever connector is provided with between described first driving mass and the 3rd mass, the second lever connector is provided with between described second driving mass and four-wheel drive mass, be connected with anchor point rotationally in the middle part of two described lever connectors, described anchor point is fixed on substrate; Four described driving masses and four described Detection job blocks also connect anchor point by elastic beam; Four described driving masses are provided with driving capacitance group, and four described Detection job blocks are provided with Detection capacitance group; Folded beam connector is provided with between described second Detection job block and the 3rd Detection job block.
Further, also include multiple stopper posts, multiple described stopper posts is fixed on substrate, and two described masses are provided with stopper posts form fit in order to install the groove of stopper posts.
Further, described stopper posts outside surface is evenly equipped with microprotrusion structure.
Further, described stopper posts has four, is distributed in the upper bottom of two described masses.
Further, two described lever connectors comprise connector body, and the two ends of described connector body are provided with the flexible terminal connecting and drive mass, and the middle part of described connector body is provided with the flexible terminal connecting anchor point rotationally.
Further, described driving capacitance group comprises driving fixed fingers and drives movable comb, and described driving movable comb is fixed on and drives on mass, and described driving fixed fingers is fixed in substrate.
Further, described Detection capacitance group comprises detection fixed fingers and detects movable comb, and described detection movable comb is fixed on Detection job block, and described detection fixed fingers is fixed in substrate.
Further, described driving capacitance group and Detection capacitance group adopt slide-film damping.
Further, two described masses are symmetrical along Y-axis.
The utility model drives the lever connector of mass to control the displacement coordination of the right and left driving mass unanimously by connecting the right and left, and make mass displacement controlled by stopper posts, structure is simple, with low cost.
Additional aspect of the present utility model and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present utility model.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is driving capacitance group structure partial enlarged drawing A of the present utility model.
Fig. 3 is Detection capacitance group structure partial enlarged drawing B of the present utility model.
Fig. 4 is lever connector structure partial enlarged drawing C of the present utility model.
In figure: 10, substrate; 20, mass; 21, first mass; 211, groove; 22, second mass; 221, groove; 30, elastic beam; 41, first drives mass; 42, second drives mass; 43, three drives mass; 44, four-wheel drive mass; 45, drive capacitance group; 451, drive fixed fingers; 452, drive movable comb; 51, first Detection job block; 52, second Detection job block; 53, three Detection job block; 54, four Detection job block; 55, Detection capacitance group; 551, detect fixed fingers; 552, detect movable comb; 61, first lever connector; 611, connector body; 612,613, flexible terminal; 62, second lever connector; 63, folded beam connector; 70, anchor point; 80, stopper posts.
Embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail, and to make those skilled in the art better can understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
As shown in Figure 1, a kind of Z axis MEMS of the utility model tuning fork gyroscope, comprise substrate 10 and suprabasil mass 20, mass 20 comprise left and right distribution the first mass 21 and the second mass 22, two masses 21,22 along Y-axis symmetrical and suspend on the substrate 10.The above-below direction of two masses 21,22 is connected with the first driving mass 41, second by elastic beam 30 and drives mass 42, the 3rd to drive mass 43, four-wheel drive mass 44, four drive mass 41 ~ 44 symmetrical along X-axis, Y-axis, and are suspended in substrate 10.The left and right directions of two masses 21,22 is connected with the first Detection job block 51, second Detection job block 52, the 3rd Detection job block 53, the 4th Detection job block 54 by elastic beam 30, and Detection job block 51 ~ 54 is also suspended in substrate.The first lever connector 61 is provided with between first driving mass 41 and the 3rd mass 43, the second lever connector 62 is provided with between second driving mass 42 and four-wheel drive mass 44, be connected with anchor point 70 rotationally in the middle part of two lever connectors 61,62, anchor point 70 is fixed on substrate 10.Lever connector 60,62 of the present utility model can rotate around anchor point 70, thus ensures that four drive mass 41 ~ 44 moving displacement size identical, and direction is contrary.Four drive mass 41 ~ 44 and four Detection job blocks 51 ~ 54 also to connect anchor point 70 by elastic beam 30.Four driving masses 41 ~ 44 are provided with and drive capacitance group 45, four Detection job blocks 51 ~ 54 to be provided with Detection capacitance group 55.Be provided with folded beam connector 63 between second Detection job block 52 and the 3rd Detection job block 53, folded beam connector ensures that Detection job block has identical resonance frequency.
Two masses 21,22 of the present utility model float on above matrix, and can rotate relative to matrix 10, for the amplitude that Mass Control block rotates, the utility model also includes multiple stopper posts 80, the plurality of stopper posts is fixed on substrate, and in a kind of preferred implementation, two masses 21,22 are provided with stopper posts form fit in order to install the groove 211,221 of stopper posts, stopper posts is positioned at groove, and the rotation amplitude of mass is controlled.More preferably, stopper posts 80 outside surface is evenly equipped with microprotrusion structure (not shown), and microprotrusion structure makes the surface of contact of stopper posts and mass has always space exist, vacuum suction when preventing mass from contacting with stopper posts.Optimally, this stopper posts 80 has four, is distributed in the upper bottom of two masses 21,22, and namely a stopper posts is respectively mated in the upper bottom of each mass.
Fig. 4 provides a kind of preferred implementation of lever connector 61,62, is the partial enlarged drawing about the first lever connector part C in Fig. 1.This lever connector 61 comprises connector body 611, the two ends of connector body are provided with the flexible terminal 612 that connection first, the 3rd drives mass 41,43, the middle part of connector body 611 is provided with the flexible terminal 613 connecting anchor point 70 rotationally, so when first lever connector 61 left side declines time, rise in the right, and the right and left displacement is consistent.It should be noted that, the second lever connector is identical with the first lever connector structure, repeats no more herein.
In preferred implementation, driving capacitance group 45 of the present utility model comprises driving fixed fingers 451 and drives movable comb 452, drives movable comb to be fixed on and drives on mass, and driving fixed fingers is fixed in substrate, see Fig. 2.The drive singal driving the driving fixed fingers of capacitance group can accept external circuit to provide, be electrostatic force by photovoltaic conversion, drive Motions of Gyroscope, the capacitance change of capacitance group is driven to be directly proportional to drive displacement, drive displacement signal can be converted into voltage signal by the capacitive detection circuit of outside, drive capacitance group to adopt slide-film damping.Detection capacitance group 55 comprises detection fixed fingers 551 and detects movable comb 552, detects movable comb and is fixed on Detection job block, detects fixed fingers and is fixed in substrate, see Fig. 3.Detection capacitance group also adopts slide-film damping, and the fixed fingers of Detection capacitance group can accept the detection feedback signal that external circuit provides, and makes detection axis be operated in dynamic balance state.The capacitance change of Detection capacitance group is directly proportional to angular velocity size, reads Detection capacitance group capacitance change so just know angular velocity size by outside capacitive detection circuit.Gyroscope of the present utility model is symmetrical along X-axis, Y-axis.
From the principle of work of condenser type resonator gyroscope, at least there are two mode in it: driven-mode and sensed-mode.
Driven-mode of the present utility model, the first mass, the second mass 21,22 do rightabout moving along Y-axis simultaneously.First mass 21 drives first, second to drive mass 41,42 to move by elastic beam 30, second mass 22 on the right drives the 3rd by elastic beam 30, four-wheel drive mass 43,44 moves, and the correspondence that lever connector 61,62 connects the right and left respectively drives mass, first, second mass 21,22 of the right and left is made to have amplitude identical, the displacement that direction is contrary.Capacitance group 45 is driven to be arranged to when the left side when first, second drives the 3rd of mass and the right the, four-wheel drive mass sense of displacement is contrary, the displacement size driving mass can be detected, when the driving mass of the right and left has the displacement of homophase, capacitance variations is zero.The capacitance variations quantitative response of such driving capacitance group drives displacement size and the direction of mass.When two masses 21,22 move along Y-axis time, because the elastic beam of quality of connection block and Detection job block is very little in Y-axis rigidity, and the elastic beam connecting Detection job block and anchor point has very large rigidity in Y-axis, therefore Detection job block is when mass moves along Y-axis, keeps static.This ensure that drive displacement is not coupled in detection axis.
Sensed-mode is: when driven-mode normally works, when there being the turning rate input of Z axis, first mass 21 on the left side with second mass 22 on the right because direction of motion is contrary, therefore the Coriolis force that they are subject to also is that direction is contrary, when first mass 21 on the left side is along X axis left movement, second mass 22 on the right moves right along X-axis.First mass 21 on the left side drives first, second Detection job block 51,52 on the left side to move by elastic beam 30, and second mass 22 on the right drives the 3rd, the 4th Detection job block 53,54 on the right to move in the opposite direction along X-axis by elastic beam 30.Detection capacitance group 55 is arranged to when the Detection job block of the right and left moves in the opposite direction, the displacement size of four Detection job blocks can be detected, when the Detection job block of the right and left moves in the same direction, the capacitance change of Detection capacitance group is zero.The displacement size of the capacitance variations quantitative response of such Detection capacitance group Detection job block and direction.Second, third Detection job block 52,53 is linked together by folded beam connector 63, this ensure that the Detection job block of the right and left has identical resonance frequency.When mass moves along X-axis time, because quality of connection block is very little in X-axis rigidity with the elastic beam of driving mass, and the elastic beam connecting driving mass and anchor point has very large rigidity in X-axis, therefore drive mass when mass moves along X-axis, keep static.This ensure that detecting displacement is not coupled on driving shaft.
In description of the present utility model, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the utility model and simplified characterization for convenience of description, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore can not be interpreted as restriction of the present utility model.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In description of the present utility model, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the utility model, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, the concrete meaning of above-mentioned term in the utility model can be understood as the case may be.
In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary indirect contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present utility model or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, when not conflicting, the feature of the different embodiment described in this instructions or example and different embodiment or example can carry out combining and combining by those skilled in the art.
The above embodiment is only for absolutely proving the preferred embodiment that the utility model is lifted, and protection domain of the present utility model is not limited thereto.The equivalent alternative or conversion that those skilled in the art do on the utility model basis, all within protection domain of the present utility model.Protection domain of the present utility model is as the criterion with claims.
Claims (9)
1. a Z axis MEMS tuning fork gyroscope, comprise substrate and suprabasil mass, it is characterized in that, described mass comprises the first mass and second mass of left and right distribution, the above-below direction of two described masses is connected with the first driving mass, second by elastic beam and drives mass, the 3rd to drive mass, four-wheel drive mass, and the left and right directions of two described masses is connected with the first Detection job block, the second Detection job block, the 3rd Detection job block, the 4th Detection job block by elastic beam;
The first lever connector is provided with between described first driving mass and the 3rd mass, the second lever connector is provided with between described second driving mass and four-wheel drive mass, be connected with anchor point rotationally in the middle part of two described lever connectors, described anchor point is fixed on substrate;
Four described driving masses and four described Detection job blocks also connect anchor point by elastic beam;
Four described driving masses are provided with driving capacitance group, and four described Detection job blocks are provided with Detection capacitance group;
Folded beam connector is provided with between described second Detection job block and the 3rd Detection job block.
2. Z axis MEMS tuning fork gyroscope according to claim 1, is characterized in that, also include multiple stopper posts, and multiple described stopper posts is fixed on substrate, and two described masses are provided with stopper posts form fit in order to install the groove of stopper posts.
3. Z axis MEMS tuning fork gyroscope according to claim 2, is characterized in that, described stopper posts outside surface is evenly equipped with microprotrusion structure.
4. Z axis MEMS tuning fork gyroscope according to claim 3, it is characterized in that, described stopper posts has four, is distributed in the upper bottom of two described masses.
5. Z axis MEMS tuning fork gyroscope according to claim 1, it is characterized in that, two described lever connectors comprise connector body, the two ends of described connector body are provided with the flexible terminal connecting and drive mass, and the middle part of described connector body is provided with the flexible terminal connecting anchor point rotationally.
6. Z axis MEMS tuning fork gyroscope according to claim 1, it is characterized in that, described driving capacitance group comprises driving fixed fingers and drives movable comb, and described driving movable comb is fixed on and drives on mass, and described driving fixed fingers is fixed in substrate.
7. Z axis MEMS tuning fork gyroscope according to claim 1, it is characterized in that, described Detection capacitance group comprises detection fixed fingers and detects movable comb, and described detection movable comb is fixed on Detection job block, and described detection fixed fingers is fixed in substrate.
8. Z axis MEMS tuning fork gyroscope according to claim 1, is characterized in that, described driving capacitance group and Detection capacitance group adopt slide-film damping.
9. Z axis MEMS tuning fork gyroscope according to claim 1, is characterized in that, two described masses are symmetrical along Y-axis.
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| CN201520111021.0U CN204405077U (en) | 2015-02-15 | 2015-02-15 | A kind of Z axis MEMS tuning fork gyroscope |
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| CN201520111021.0U CN204405077U (en) | 2015-02-15 | 2015-02-15 | A kind of Z axis MEMS tuning fork gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105352488A (en) * | 2015-10-08 | 2016-02-24 | 北京理工大学 | Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope |
| CN106500682A (en) * | 2016-10-12 | 2017-03-15 | 中国科学院地质与地球物理研究所 | A kind of MEMS gyroscope and its manufacturing process |
| CN107082405A (en) * | 2017-05-26 | 2017-08-22 | 深迪半导体(上海)有限公司 | A kind of MEMS structure |
| CN107607100A (en) * | 2017-10-19 | 2018-01-19 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
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2015
- 2015-02-15 CN CN201520111021.0U patent/CN204405077U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105352488A (en) * | 2015-10-08 | 2016-02-24 | 北京理工大学 | Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope |
| CN106500682A (en) * | 2016-10-12 | 2017-03-15 | 中国科学院地质与地球物理研究所 | A kind of MEMS gyroscope and its manufacturing process |
| CN106500682B (en) * | 2016-10-12 | 2019-10-22 | 中国科学院地质与地球物理研究所 | A kind of MEMS gyroscope |
| CN107082405A (en) * | 2017-05-26 | 2017-08-22 | 深迪半导体(上海)有限公司 | A kind of MEMS structure |
| CN107082405B (en) * | 2017-05-26 | 2023-08-18 | 深迪半导体(绍兴)有限公司 | MEMS device structure |
| CN107607100A (en) * | 2017-10-19 | 2018-01-19 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
| CN107607100B (en) * | 2017-10-19 | 2019-09-27 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
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Effective date of registration: 20220629 Address after: 528400 room 103, East 1st floor, building 2, Shennong Road, Torch Development Zone, Zhongshan City, Guangdong Province Patentee after: Guangdong Tianmu Zhixin Sensor Technology Co.,Ltd. Address before: 102206 room 1008, building C, North China Electric Power University, Changping District, Beijing Patentee before: TUMEMS TECHNOLOGY (BEIJING) CO.,LTD. |
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