CN206848299U - Three axle silicon micro accerometers - Google Patents
Three axle silicon micro accerometers Download PDFInfo
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- CN206848299U CN206848299U CN201720595211.3U CN201720595211U CN206848299U CN 206848299 U CN206848299 U CN 206848299U CN 201720595211 U CN201720595211 U CN 201720595211U CN 206848299 U CN206848299 U CN 206848299U
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Abstract
It the utility model is related to a kind of three axle silicon micro accerometers, including the first sensing assembly and the second sensing assembly；First sensing assembly includes the first sensing unit and the second sensing unit, the setting orthogonal with the sensitive direction of second sensing unit of the sensitive direction of first sensing unit；Second sensing assembly includes the 3rd sensing unit and the 4th sensing unit, the sensitive direction setting orthogonal with the sensitive direction of the 4th sensing unit of the 3rd sensing unit；First sensing assembly is set with the second sensing assembly perpendicular quadrature, sensitive X, Y, Z-direction acceleration.Three axles silicon micro accerometer provided by the utility model can sensitive multidirectional acceleration magnitude, anti-overload ability is strong.
Description
Technical field
Micromechanical Inertial Instruments field is the utility model is related to, more particularly to a kind of three axle silicon micro accerometers.
Background technology
The inertial navigation system extensive use in the fields such as navigation, Aeronautics and Astronautics and military affairs.Silicon micro-resonance type acceleration
The characteristics of meter is with stability height, high resolution, big dynamic range, it is considered to be the microelectronics machine of high-acruracy survey can be realized
Tool system (MEMS) inertial navigation device, there is important application in national defence.It is high-precision for silicon micro-resonance type accelerometer
Degree, miniaturization, the research of high integration are also carried out.
Just progressively substitute the conventional inertia instrument such as quartz flexible accelerometer in the application field of middle low performance at present.It is international
Upper mems accelerometer is had started in navigation and tactical arena application.The high-precision field in part also will be by micro electronmechanical acceleration simultaneously
The research that meter substitutes single shaft silicon micro-resonance type accelerometer is progressively ripe.
However, conventional resonance formula accelerometer is integrated, volume to be present big, complicated, it is difficult to meets high on three direction of principal axis
Precision, the acceleration test demand of high range, influence the development and use of silicon micro-resonance type accelerometer.
Utility model content
Based on this, it is necessary to for volume it is big, complicated the problem of, there is provided a kind of three axle silicon micro accerometers.
A kind of three axle silicon micro accerometers, including the first sensing assembly and the second sensing assembly；
First sensing assembly includes the first sensing unit and the second sensing unit, the sensitivity of first sensing unit
Direction setting orthogonal with the sensitive direction of second sensing unit；
Second sensing assembly includes the 3rd sensing unit and the 4th sensing unit, the sensitivity of the 3rd sensing unit
Direction setting orthogonal with the sensitive direction of the 4th sensing unit；
First sensing assembly is set with the second sensing assembly perpendicular quadrature, sensitive X, Y, Z-direction acceleration.
Above-mentioned three axles silicon micro accerometer, using two groups of sensing assemblies, and two groups of sensing assembly perpendicular quadratures are set, each
Group sensing assembly all includes the sensing unit of two orthogonal settings.Therefore, above-mentioned three axles silicon micro accerometer can be sensitive multi-party
To acceleration magnitude, and anti-overload ability simple in construction is strong.
In one of the embodiments, in addition to housing, sensitive with second group of the housing and first sensing assembly
Part matches, for the fixed orthohormbic structure for supporting first sensing assembly and the second sensing assembly.
In one of the embodiments, the sensing unit includes comb-tooth-type differential capacitive structure, and the comb-tooth-type is differential
Capacitance structure includes moving teeth and fixed tooth, and the moving teeth is staggeredly arranged at intervals with fixed tooth, and the moving teeth is arranged at two fixed tooth
Between, and the moving teeth is set relative to two adjacent fixed tooth offsets.
In one of the embodiments, the sensing unit includes mass, and the mass is connected with the moving teeth, uses
Moved in driving the moving teeth.
In one of the embodiments, in addition to detection circuit, the detection circuit respectively with the first sensing assembly and the
Two sensing assemblies electrically connect, for detecting the capacitance variations of first sensing assembly and the second sensing assembly.
In one of the embodiments, the detection circuit includes exiting signal generating circuit, capacitive detection circuit and letter
Number amplification modulate circuit：
The exiting signal generating circuit electrically connects with the capacitive detection circuit, for being carried for the capacitive detection circuit
For pumping signal；
The capacitive detection circuit is used to detect first sensing assembly and the second sensing assembly capacitance variations, output electricity
Hold variable signal；
The signal amplifying and conditioning circuit electrically connects with the capacitive detection circuit, for defeated to the capacitive detection circuit
The capacitance change signal gone out amplifies and carries out filtering process.
In one of the embodiments, the capacitive detection circuit includes the first capacitive detection circuit and the second capacitance detecting
Circuit, first capacitive detection circuit are used to detect the first sensing assembly capacitance variations, the second capacitance detecting electricity
Road is used to detect the second sensing assembly capacitance variations.
In one of the embodiments, the signal amplifying and conditioning circuit includes the first signal amplifying and conditioning circuit and second
Signal amplifying and conditioning circuit, first signal amplifying and conditioning circuit are used for the electric capacity to first capacitive detection circuit output
Variable signal amplifies and carries out filtering process, and the secondary signal amplification modulate circuit is used for second capacitive detection circuit
The capacitance change signal of output amplifies and carries out filtering process.
In one of the embodiments, the detection circuit also includes temperature sensing circuit, and the temperature sensing circuit is used
Change in detection temperature.
A kind of three axle silicon micro accerometers, including：
First sensing assembly, includes the first single-axis accelerometer and the second single-axis accelerometer of orthogonal setting, and described
One single-axis accelerometer and the second single-axis accelerometer include multiple sensing units respectively；
Second sensing assembly, including the 3rd single-axis accelerometer of orthogonal setting and the 4th single-axis accelerometer, the 3rd is single
Axis accelerometer and the 4th single-axis accelerometer include multiple sensing units respectively；
First sensing assembly is set with the second sensing assembly perpendicular quadrature, sensitive X, Y, Z-direction acceleration.
Above-mentioned three axles silicon micro accerometer, four single-axis accelerometers are set, pass through the axle of mode three of orthogonal installation
Accelerometer sensitive X, Y, Z-direction acceleration, three axles silicon micro accerometer provided by the utility model can be sensitive multidirectional
Acceleration, anti-overload ability are strong.
Brief description of the drawings
Fig. 1 is the three axle silicon micro accerometer schematic diagrames that the utility model embodiment provides；
Fig. 2 is the sensing unit structural representation that the utility model embodiment provides；
Fig. 3 is the three axle silicon micro accerometer part-structure schematic diagrams that the utility model embodiment provides；
Fig. 4 is the three axle silicon micro accerometer structural representations that the utility model embodiment provides；
Fig. 5 is the detection circuit diagram that the utility model embodiment provides；
Fig. 6 is the detection circuit module figure that the utility model embodiment provides.
Wherein：
The axle silicon micro accerometers of 100- tri-；
The sensing assemblies of 110- first；
The sensing units of 112- first；
The sensing units of 114- second；
The sensing assemblies of 120- second；
The sensing units of 122- the 3rd；
The sensing units of 124- the 4th；
130- housings；
The single-axis accelerometers of 132- first；
The single-axis accelerometers of 134- second；
The single-axis accelerometers of 136- the 3rd；
The single-axis accelerometers of 138- the 4th；
140- comb-tooth-type differential capacitive structures；
141- moving teeths；
142- fixed tooth；
150- folded beams；
160- masses；
170- detects circuit；
171- exiting signal generating circuits；
172- capacitive detection circuits；
The capacitive detection circuits of 173- first；
The capacitive detection circuits of 174- second；
175- signal amplifying and conditioning circuits；
The signal amplifying and conditioning circuits of 176- first；
177- secondary signals amplify modulate circuit；
178- temperature sensing circuits.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing to this reality
It is further elaborated with three new axle silicon micro accerometers.It should be appreciated that specific embodiment described herein is only
To explain the utility model, it is not used to limit the utility model.
Referring to Fig. 1, the utility model one embodiment, there is provided a kind of three axle silicon micro accerometers 100, including first is quick
Feel component 110, the second sensing assembly 120.First sensing assembly 110 includes the first sensing unit of two orthogonal settings
112 and second sensing unit 114, two mutually perpendicular X of sensitivity, Y-direction acceleration.Wherein, 112 sensitive X side of sensing unit
To acceleration, the sensitive Y-direction acceleration of sensing unit 114.Second sensing assembly 120 includes the of two orthogonal settings
Two mutually perpendicular X of three sensing units 122 and the sensitivity of the 4th sensing unit 124, Z-direction acceleration.Wherein, the 3rd is sensitive single
The acceleration of first 122 sensitive X-directions, 144 sensitive Z-direction acceleration of the 4th sensing unit.Orthogonal setting refers to two sensitive lists
Member is vertically arranged, with the acceleration of sensitive two vertical direction.Z-direction is the direction of the plane formed perpendicular to X, Y-direction.Institute
State the first sensing assembly 110 to set with the perpendicular quadrature of the second sensing assembly 120, i.e. the first sensing assembly 110 sensitive can hang down
Directly in X, the acceleration of Y-direction, therefore first sensing assembly 110 cooperates with quick with second sensing assembly 120
Feel X, Y, Z-direction acceleration.
Further, the first plane and the second plane being set in space, first plane and the second plane are orthogonal,
First sensing assembly 110 is arranged in the first plane, and second sensing assembly 120 is arranged in the second plane.First
Sensing assembly 110 sensitive X, acceleration of Y-direction in the first plane, the second sensing assembly 120 sensitive X, Z in the second plane
The acceleration in direction.Therefore first sensing assembly 110 cooperates with sensitive X, Y, Z with second sensing assembly 120
Directional acceleration.
Above-mentioned three axles silicon micro accerometer 100 uses two groups of sensing assemblies, and two groups of sensing assembly perpendicular quadratures are set, often
One group of sensing assembly all includes the sensing unit of two orthogonal settings.First sensing assembly 110 and second sensing assembly 120
Perpendicular quadrature, which is set, can meet three direction high-range acceleration tests, and high resolution, anti-overload ability are strong.
In one of embodiment, the first sensing assembly 110 and the second sensing assembly 120 respectively by two sensing units just
Hand over encapsulation composition.In first sensing assembly 110, two orthogonally located sensing units 112 and 114 can be with X in sensitive area and Y
The acceleration of two vertical direction.First sensing assembly 110 and the perpendicular quadrature of the second sensing assembly 120 are set, make four it is quick
It is in three axle quadratures to feel axle.That is the X-direction sensitivity overlapping of axles of the first sensing assembly 110 and the second sensing assembly 120, first is quick
Feel the sensing unit 122 of unit 112 and the 3rd sensitive X-direction simultaneously.Y-direction sensitive axes of first sensing assembly 110 and second quick
Feel the Y-direction perpendicular quadrature of component 120, i.e. 114 sensitive 124 sensitive Z of the 4th sensing unit of Y-direction acceleration of the second sensing unit
Directional acceleration.Therefore, the acceleration change in four sensing unit sensitivity X, Y, Z, tri- directions.Wherein sensing unit 112 with it is quick
Sense unit 122 has two-way measurement output in X-direction, can backup each other, when one of sensing unit of X-direction breaks down
When, another sensing unit can also detect X-direction acceleration.By setting the first sensing unit 112 and the 3rd sensing unit
122, the two-way measurement of X-direction can be realized, the measurement output of X-direction two-way make it that testing result is more reliable, and performance is more stable.Can
, can also be in Y, Z by setting the relative position relation between the first sensing assembly 110 and the second sensing assembly 120 to understand
Realize that two-way measures on direction.
In one of embodiment, the three axles silicon micro accerometer 100, in addition to housing 130, the housing 130 with
First sensing assembly 110 matches with the second sensing assembly 120, for it is fixed support first sensing assembly 110 with
The orthohormbic structure of second sensing assembly 120.Specifically, the housing 130 can use titanium alloy material to form.The housing
130 structures are set according to the state of the sensing assembly 120 of the first sensing assembly 110 and second, and housing 130 is used for fixed support
Protect the first sensing assembly 110 and the second sensing assembly 120.First sensing assembly 110 can use with the second sensing assembly 120
Bonding agent is orthogonal to be installed in housing 130.
Also referring to Fig. 2, in one of embodiment, the sensing unit includes comb-tooth-type differential capacitive structure 140
With folded beam 150.Further, the comb-tooth-type differential capacitive structure 140 includes moving teeth 141 and fixed tooth 142, the moving teeth
141 are staggeredly arranged at intervals with fixed tooth 142.The moving teeth 141 is arranged between two fixed tooth 142, moving teeth 141 and fixed tooth
142 biasings are set, and the moving teeth 141 is between two neighboring fixed tooth 142.The moving teeth 141 and one of fixed tooth 142
Distance is more than the distance of the moving teeth 141 and another fixed tooth 142.The distance of the moving teeth 141 and fixed tooth 142 can be according to difference
Dynamic condenser structure is actually needed determination, as long as ensureing that the electric capacity between moving teeth 141 and one of fixed tooth 142 is much larger than moving teeth
Electric capacity between 141 and another fixed tooth 142.
The quantity of moving teeth 141 and fixed tooth 142 is unlimited, and moving teeth 141 can have multigroup with fixed tooth 142.Specifically, moving teeth 141
It can be determined with the quantity of fixed tooth 142 according to practical situations.Three axis accelerometer is described fixed in the presence of by external force
Tooth 142 is fixed, and the moving teeth 141 can be moved by the presence of external force.After moving teeth 141 is moved, moving teeth 141
The distance between fixed tooth 142 will change, so that the electric capacity of comb-tooth-type differential capacitor changes.Detect circuit
170 can obtain acceleration change by the capacitance variations of detection comb formula differential capacitor.Further, moving teeth 141 and fixed tooth 142
Bearing of trend and sensitive direction it is orthogonal.Moving teeth 141 can be moved by the presence of external force, the movement of moving teeth 141
Direction is identical with sensitive direction.
In one of the embodiments, the sensing unit further comprises mass 160, the mass 160 and institute
State moving teeth 141 to connect, the mass 160 is used to drive the moving teeth 141 to move.It is sensitive when sensing unit is by impulsive force
Mass 160 in unit can be moved in the presence of the impulsive force to sensitive direction.Specifically, when mass 160 by
To sensitive direction impulsive force when, mass 160 can be moved in sensitive direction.Mass 160 is connected with moving teeth 141, institute
It can be moved with moving teeth 141 by the drive of mass 160.
In one of the embodiments, the sensing unit further comprises folded beam 150, the folded beam 150 and matter
Gauge block 160 connects, the motion that the folded beam 150 limits the moving teeth 141 by controlling the motion of mass 160 to be used for.When
Acceleration in respect of sensitive direction acceleration when, due to the effect of the rigidity and backstop of folded beam 150 so that accelerometer compared with
Still moving teeth 141 can be protected not collided with fixed tooth 142 under strong impact.Folded beam 150 can improve non-sensitive direction
Mechanical stiffness, reduce HI high impact under deformation.
Also referring to Fig. 3, one of embodiment, the first single shaft that first sensing assembly 110 includes X-direction adds
Second single-axis accelerometer 134 of speedometer 132 and Y-direction, the first single-axis accelerometer 132 of X-direction include multiple X-directions
Sensing unit；Second single-axis accelerometer 134 of Y-direction includes the sensing unit of multiple Y-directions, the X-direction and Y-direction
Sensing unit it is identical with the sensing unit structure in above-described embodiment.Single-axis accelerometer can be by four sensing unit structures
Into.Four sensing units are symmetricly set on single-axis accelerometer chip.
Further, single-axis accelerometer can use six roots of sensation folded beam 150, and folded beam 150 is used for supporting construction in parallel
In support mass 160.In the first single-axis accelerometer 132 of X-direction, six roots of sensation folded beam 150 be divided to for two rows it is symmetrical and
Every setting, differential capacitive structure 140 is arranged in every row's folded beam 150, and between two adjacent folded beams 150.Class
As, in the second single-axis accelerometer 134 in the Y direction, the distribution mode of the folded beam 150 and differential capacitive structure 140
Essentially identical, simply orientation is different.The mechanical stiffness in non-sensitive direction can be improved using this structure, reduces HI high impact
Under deformation.
Further, it is described referring to Fig. 4, second sensing assembly 120 is made up of the orthogonal encapsulation of two sensing assemblies
Second sensing assembly 120 is identical with the single-axis accelerometer structure in the first sensing assembly 120.By the first sensing assembly 110 with
The perpendicular quadrature of second sensing assembly 120 sets three axle silicon micro accerometers 100 of composition, with sensitive X, Y, Z-direction acceleration.
Also referring to Fig. 5 and Fig. 6, in one of the embodiments, the three axles silicon micro accerometer also includes detection
Circuit 170.The detection circuit 170 electrically connects with the first sensing assembly 110 with the second sensing assembly 120 respectively, for detecting
The capacitance variations of the sensing assembly 120 of first sensing assembly 110 and second.The detection circuit 170 is using hybrid integrated electricity
Realize on road.Detection circuit 170 can detect the capacitance variations of the first sensing assembly 110 and the second sensing assembly 120.Detect circuit
170 obtain the change of extraneous acceleration by the change for the electric capacity for detecting the first sensing assembly 110 and the second sensing assembly 120.
Further, detecting circuit 170 includes exiting signal generating circuit 171, capacitive detection circuit 172 and signal amplification
Modulate circuit 175.The exiting signal generating circuit 171 electrically connects with the capacitive detection circuit 172, for for the electric capacity
Detect circuit 172 and pumping signal is provided；Sensitive with second group of the capacitive detection circuit 172 and first sensing assembly 110
Part 120 electrically connects, for detecting the capacitance variations of 110 and second sensing assembly of the first sensing assembly 120, output capacitance change
Signal；The signal amplifying and conditioning circuit 175 electrically connects with the capacitive detection circuit 172, for capacitance detecting electricity
The capacitance change signal that road 172 exports amplifies and carries out filtering process.
Specifically, exiting signal generating circuit 171 mainly produces square-wave signal, exiting signal generating circuit by oscillator
171 electrically connect with the capacitive detection circuit 172, and square-wave signal can be sent to capacitive detection circuit 172, are capacitance detecting electricity
Road 172 provides pumping signal.Capacitive detection circuit 172 receives the capacitance variations that sensing assembly can be detected after square-wave signal,
The capacitance variations detected are changed into voltage signal.Signal amplifying and conditioning circuit 175 is electrically connected with the capacitive detection circuit 172
Connect.Signal amplifying and conditioning circuit 175 receives the voltage signal that capacitive detection circuit 172 exports, and the voltage signal to receiving
It is amplified and carries out filtering process.
Further, the capacitive detection circuit 172 includes the first capacitive detection circuit 173 and the second capacitive detection circuit
174, first capacitive detection circuit 173 is used to detect the capacitance variations of the first sensing assembly 110.The first electric capacity inspection
Slowdown monitoring circuit 173 can detect the change of first sensing unit 112 and the electric capacity of second sensing unit 114 respectively, described
Second capacitive detection circuit 174 is used to detect the capacitance variations of the second sensing assembly 120.Second capacitive detection circuit
174 can detect the change of the 3rd sensing unit 122 and the electric capacity of the 4th sensing unit 124 respectively.
The signal amplifying and conditioning circuit 175 includes the first signal amplifying and conditioning circuit 176 and nursed one's health with secondary signal amplification
Circuit 177, first signal amplifying and conditioning circuit 176 are used to become the electric capacity of first capacitive detection circuit 173 output
Change signal to amplify and carry out filtering process, the secondary signal amplification modulate circuit 177 is used for second capacitance detecting electricity
The capacitance change signal that road 174 exports amplifies and carries out filtering process.
Specifically, detection circuit 170, which includes, is used for the first detection circuit for detecting the capacitance variations of the first sensing assembly 110,
And for detecting the second detection circuit of the capacitance variations of the second sensing assembly 120.Wherein, the first detection circuit mainly includes swashing
Encourage signal generating circuit 171, the first capacitive detection circuit 173 and the first signal amplifying and conditioning circuit 176.Electricity occurs for pumping signal
Road 171 mainly produces square-wave signal by oscillator, for providing pumping signal for the first capacitive detection circuit 173.First electric capacity
Detection circuit 173 receives the capacitance variations that the first sensing assembly 110 can be detected after square-wave signal, and the electric capacity detected is become
Change is changed into voltage signal.First signal amplifying and conditioning circuit 176 electrically connects with first capacitive detection circuit 173.First
Signal amplifying and conditioning circuit 176 receives the voltage signal of the first capacitive detection circuit 173 output, and the voltage signal to receiving
It is amplified and carries out filtering process.Second detection circuit is identical with the first detection circuit set-up mode, and the second detection circuit is used
In the change of the detection electric capacity of the second sensing assembly 120.
Further, the detection circuit 170 also includes temperature sensing circuit 178, and the temperature sensing circuit 178 is used for
Detection temperature changes.Temperature sensing circuit 178 can sense the change of external temperature environment, be the three axles silicon micro accerometer
100 application provides ambient temperature data, can be according to the axle silicon micro accerometer 100 of ambient temperature data correction three
Caused measured deviation is influenceed by ambient temperature.
The three axle silicon micro accerometers that above-described embodiment provides, with the accelerometer of two twin shafts, perpendicular quadrature forms four
The accelerometer of axle, wherein X-direction have two-way measurement output, can backup each other.Can sensitive multidirectional acceleration magnitude,
Anti-overload ability is strong, has that integrated level is high, good reliability, during high range the advantages of high resolution.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
1. a kind of three axle silicon micro accerometers, it is characterised in that including the first sensing assembly and the second sensing assembly；
First sensing assembly includes the first sensing unit and the second sensing unit, the sensitive direction of first sensing unit
Setting orthogonal with the sensitive direction of second sensing unit；
Second sensing assembly includes the 3rd sensing unit and the 4th sensing unit, the sensitive direction of the 3rd sensing unit
Setting orthogonal with the sensitive direction of the 4th sensing unit；
First sensing assembly is set with the second sensing assembly perpendicular quadrature, sensitive X, Y, Z-direction acceleration.
2. three axles silicon micro accerometer according to claim 1, it is characterised in that also including housing, the housing and institute
State the first sensing assembly with the second sensing assembly to match, first sensing assembly and the second sensing assembly are supported for fixed
Orthohormbic structure.
3. three axles silicon micro accerometer according to claim 1, it is characterised in that it is poor that the sensing unit includes comb-tooth-type
Dynamic condenser structure, the comb-tooth-type differential capacitive structure include moving teeth and fixed tooth, and the moving teeth is staggeredly arranged at intervals with fixed tooth, institute
State moving teeth to be arranged between two fixed tooth, and the moving teeth is set relative to two adjacent fixed tooth offsets.
4. three axles silicon micro accerometer according to claim 3, it is characterised in that the sensing unit includes mass,
The mass is connected with the moving teeth, for driving the moving teeth to move.
5. three axles silicon micro accerometer according to claim 1, it is characterised in that also include detection circuit, the detection
Circuit electrically connects with the first sensing assembly with the second sensing assembly respectively, for detecting first sensing assembly and the second sensitivity
The capacitance variations of component.
6. three axles silicon micro accerometer according to claim 5, it is characterised in that the detection circuit includes pumping signal
Generation circuit, capacitive detection circuit and signal amplifying and conditioning circuit；
The exiting signal generating circuit electrically connects with the capacitive detection circuit, swashs for being provided for the capacitive detection circuit
Encourage signal；
The capacitive detection circuit is used to detect first sensing assembly and the second sensing assembly capacitance variations, and output capacitance becomes
Change signal；
The signal amplifying and conditioning circuit electrically connects with the capacitive detection circuit, for what is exported to the capacitive detection circuit
Capacitance change signal amplifies and carries out filtering process.
7. three axles silicon micro accerometer according to claim 6, it is characterised in that the capacitive detection circuit includes first
Capacitive detection circuit and the second capacitive detection circuit, first capacitive detection circuit are used to detect the first sensing assembly electricity
Hold change, second capacitive detection circuit is used to detect the second sensing assembly capacitance variations.
8. three axles silicon micro accerometer according to claim 7, it is characterised in that the signal amplifying and conditioning circuit includes
First signal amplifying and conditioning circuit is used for described with secondary signal amplification modulate circuit, first signal amplifying and conditioning circuit
The capacitance change signal of first capacitive detection circuit output amplifies and carries out filtering process, and the secondary signal amplifies modulate circuit
Capacitance change signal for being exported to second capacitive detection circuit amplifies and carries out filtering process.
9. three axles silicon micro accerometer according to claim 5, it is characterised in that the detection circuit also includes temperature and examined
Slowdown monitoring circuit, the temperature sensing circuit change for detection temperature.
A kind of 10. three axle silicon micro accerometers, it is characterised in that including：
First sensing assembly, include the first single-axis accelerometer and the second single-axis accelerometer of orthogonal setting, described first is single
Axis accelerometer and the second single-axis accelerometer include multiple sensing units respectively；
Second sensing assembly, including the 3rd single-axis accelerometer of orthogonal setting and the 4th single-axis accelerometer, the 3rd single shaft add
Speedometer and the 4th single-axis accelerometer include multiple sensing units respectively；
First sensing assembly is set with the second sensing assembly perpendicular quadrature, sensitive X, Y, Z-direction acceleration.
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| CN201720595211.3U CN206848299U (en) | 2017-05-24 | 2017-05-24 | Three axle silicon micro accerometers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107037238A (en) * | 2017-05-24 | 2017-08-11 | 清华大学 | Three axle silicon micro accerometers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107037238A (en) * | 2017-05-24 | 2017-08-11 | 清华大学 | Three axle silicon micro accerometers |
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