CN101718556A - Micro-mechanical tuning fork gyroscope of horizontal shaft - Google Patents
Micro-mechanical tuning fork gyroscope of horizontal shaft Download PDFInfo
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- CN101718556A CN101718556A CN200910241711A CN200910241711A CN101718556A CN 101718556 A CN101718556 A CN 101718556A CN 200910241711 A CN200910241711 A CN 200910241711A CN 200910241711 A CN200910241711 A CN 200910241711A CN 101718556 A CN101718556 A CN 101718556A
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Abstract
The invention relates to a micro-mechanical tuning fork gyroscope of a horizontal shaft, which comprises a substrate, wherein a fixed driving comb and a driving electrode are in ohmic contact on the substrate and are both fixedly connected with the substrate; one side of a movable driving comb is connected with a frame by a driving folding beam, the frame is connected with and fixed at an anchor point on the substrate by a detection folding beam, and the other side of the frame is fixedly connected with a sensitive quality block; the sensitive quality block is fixedly connected with the frame by the driving folding beam, and the frame is fixedly connected on the substrate by the detection folding beam and the anchor point; and fixed vertical detection combs of I type and II type are fixed on the substrate, movable vertical detection combs of I type and II type are fixedly connected with the frame, and a detection electrode is in ohmic contact with the fixed vertical detection combs of I type and II type and is fixed on the substrate. Because of adopting a decoupling type driving capacitor, the invention solves mechanical coupling between a driving mode and a detection mode effectively. The invention can be widely applied to the detection of the rotating angular speed of objects in various fields.
Description
Technical field
The present invention relates to a kind of micromechanical gyro, particularly about a kind of horizontal shaft micro-mechanical tuning fork gyroscope that adopts combine detection electric capacity and decoupling zero to drive electric capacity.
Background technology
Over nearly 20 years, be subjected to extensive studies and developed rapidly based on MEMS (micro electro mechanical system) (MEMS) technology micromechanical gyro.The capacitive MEMS oscillation gyro is because of simple in structure, and reliable operation develops particularly rapidly, is applied in consumer electronics, automobile, medical rehabilitation, space flight even military field.For obtaining high-performance capacitor formula MEMS oscillation gyro, the researchist will face such as technical barriers such as designs, device fabrication, interface circuit and control loops.Wherein, device architecture type and total arrangement, driver element and detecting unit are key problems basic in the designs.The capacitance type micro mechanical tuning fork gyroscope is one of successful at present version.
Existing capacitive MEMS tuning fork gyroscope adopts conventional broach to drive electric capacity usually and drives.So, the very difficult mechanical couplings problem that solves between gyro driving mode and the detection mode.So, most capacitive MEMS tuning fork gyroscopes, " bias stability be tuning fork that the employing static of 0.1 °/hr mates decline gyro " (J.Bernstein that people such as " the tuning-fork type angular rate gyroscope that a kind of micromechanics broach drives " delivered in MEMS (micro electro mechanical system) symposial (MEMS ' 93) in 1993 as Bornstein etc. and husky horse deliver in the 21 MEMS (micro electro mechanical system) international conference (MEMS ' 08), S.Cho, Deng " A Micromachined Comb-Drive TuningFork Rate Gyroscope ", in Proc.IEEE Micro Electro Mechanical SystemsWorkshop (MEMS ' 93), Fort Lauderdale, FL, Feb.1993, pp.143-148. and A.Sharma, M.F.Zaman, M.Zucher, F.Ayazi, " 0.1 °/hr of A bias driftelectronically matched tuning fork microgyroscope; " in Proc.21th Int.Conf.Microelectromechanical Systems (MEMS ' 08), Tucson, USA, Jan.2008, pp.1-9), all do not solve and detect mode to driving the mechanical couplings problem that mode drives mode, therefore, be difficult to obtain high performance, the especially high linearity.And existing capacitive MEMS tuning fork gyroscope perhaps adopts to become clearance-type detection electric capacity to obtain high sensitivity; Perhaps adopt the variable area formula to detect electric capacity, can not well solve the contradiction of high sensitivity and wide range to obtain the high linearity and big range; The variable area formula detects that electric capacity is subject to processing the influence of error easily and the reduction that causes performances such as the linearity; Adopt the change clearance-type detection electric capacity of differential detection insensitive to mismachining tolerance.
Summary of the invention
At the problems referred to above, the purpose of this invention is to provide a kind of can effectively suppress to drive mode and detect mechanical couplings between the mode, range is big, sensitivity is higher and mismachining tolerance is had the horizontal shaft micro-mechanical tuning fork gyroscope of robustness preferably.
For achieving the above object, the present invention takes following technical scheme: a kind of horizontal shaft micro-mechanical tuning fork gyroscope, it is characterized in that: it comprises substrate, comb and drive the driver element that folded beam is formed by fixed drive comb, drive electrode, the movable driving, framework becomes the detecting unit that clearance-type detection electric capacity is formed by detecting the sensing unit that folded beam, anchor point and responsive mass form and detecting electric capacity, respective detection electrode and Differential Detection by variable area formula vertical comb teeth; Described variable area formula vertical comb teeth detects electric capacity and comprises I type fixed vertical detection comb, I type movable vertical detection comb, II type fixed vertical detection comb and II type movable vertical detection comb; Described change clearance-type detects electric capacity and comprises the detection pole plate; On the described substrate, described fixed drive comb is an Ohmic contact with described drive electrode, and all fixedlys connected with the described end of lining; One side of described movable driving comb connects described framework by described driving folded beam, and described framework is fastened on described anchor point on the described substrate, the fixedly connected described responsive mass of opposite side by described detection folded beam; Described responsive mass is by the fixedly connected described framework of described driving folded beam, and described framework is fixedly connected on the described substrate by described detection folded beam and anchor point; Described I type, II type fixed vertical detection comb are fixed on the described substrate, described I type, II type movable vertical detection comb are connected with described frame fixation, and described detecting electrode and described I type, II type fixed vertical detection comb are Ohmic contact, and are fixed on the described substrate.
Described substrate adopts one of them material such as silicon, glass and silicon dioxide to make.
Described movable driving comb adopts upper/lower terminal to be higher than the structure of described fixed drive comb symmetrically.
Described movable driving comb adopts upper/lower terminal to be lower than the structure of described fixed drive comb symmetrically.
Described variable area formula vertical comb teeth detects electric capacity and adopts I type, two kinds of broach combinations of II type, or a kind of structure wherein.
One of them makes described driving folded beam, framework, detection folded beam, responsive mass and variable area formula vertical comb teeth detection electric capacity employing silicon and titanium; Described drive electrode and detecting electrode adopt and make with one of them materials such as aluminium, gold and titaniums.
Described driver element is arranged on the center of gyro, and described detecting unit is arranged on the outside of gyro, and described sensing unit is arranged between described framework and the driver element.
The present invention is owing to take above technical scheme, it has the following advantages: 1, the present invention forms Ohmic contact because the decoupling type that adopts drives the fixed drive comb of electric capacity with drive electrode, and the movable comb that drives can adopt upper/lower terminal to be higher than the structure of fixed drive comb symmetrically, also can adopt movable driving comb upper/lower terminal to be lower than the structure of fixed drive comb symmetrically, therefore solve the mechanical couplings problem that drives between mode and the detection mode effectively, thereby can obtain good performance.2, the present invention is owing to adopt variable area and become the box-like detection electric capacity of dwell set, variable area formula vertical comb teeth detects electric capacity and becomes clearance-type and detects electric capacity demodulation output separately separately, make up by subsequent conditioning circuit or the software module signal after to demodulation as required then, therefore realized the performance of high sensitivity, wide range, avoided adopting single type to detect the deficiency of electric capacity.3, the present invention optimizes on total arrangement owing to adopting, and driver element is arranged in the center of gyro, close detection turning axle, detects capacity arrangement outside gyro, has therefore further reduced the coupling between driving mode and the detection mode.4, the present invention is owing to adopt detection mode to be higher than driving mode in design, and a pair of change gap detection electric capacity can carry out the electrostatic force adjustment to the frequency that detects mode as required.When taking closed loop to detect, as required, a pair of change gap detection electric capacity or part or all of variable area detect electric capacity and also can be used as feedback application of force electric capacity.The present invention can be widely used in the detection of rotating angular speed of objects in the various fields.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present invention
Fig. 2 is the A-A cut-open view of Fig. 1
Fig. 3 is the structural representation that the one-sided movable driving comb upper and lower end of the present invention is higher than the fixed drive comb symmetrically
Fig. 4 is that bilateral of the present invention movably drives the structural representation that the comb upper and lower end is higher than the fixed drive comb symmetrically
Fig. 5 is the structural representation that the one-sided movable driving comb upper and lower end of the present invention is lower than the fixed drive comb symmetrically
Fig. 6 is that bilateral of the present invention movably drives the structural representation that the comb upper and lower end is lower than the fixed drive comb symmetrically
Embodiment
Below in conjunction with drawings and Examples the present invention is described in detail.
As shown in Figure 1 and Figure 2, the present invention includes substrate 1, by fixed drive comb 2, drive electrode 3, movably drive comb 4 and drive the driver element that folded beam 5 is formed, framework 6 becomes the detecting unit that clearance-type detection electric capacity 12 is formed by detecting sensing unit that folded beam 7, anchor point 8 and responsive mass 9 form and detecting electric capacity 10, respective detection electrode 11 and Differential Detection by two types variable area formula vertical comb teeth.Wherein, variable area formula vertical comb teeth detection electric capacity 10 comprises I type fixed vertical detection comb 13, I type movable vertical detection comb 14, II type fixed vertical detection comb 15 and II type movable vertical detection comb 16; Become clearance-type detection electric capacity 12 and comprise detection pole plate 17.
On substrate 1, fixed drive comb 2 forms Ohmic contact with drive electrode 3, and all fixedlys connected with substrate 1.A movable side that drives comb 4 is by driving folded beam 5 connecting frames 6, and framework 6 connects anchor point 8 by detecting folded beam 7, and anchor point 8 is fixedly connected on the substrate 1, the fixedly connected responsive mass 9 of opposite side.Responsive mass 9 is by driving folded beam 5 fixedly connected frameworks 6, and framework 6 is fixedly connected on the substrate 1 by detecting folded beam 7 and anchor point 8.Fixed vertical detection comb 13 and 15 is fixedly connected on the substrate 1, and movable vertical detection comb 14 is fixedlyed connected with framework 6 with 16.And detecting electrode 11 forms Ohmic contact with fixed vertical detection comb 13 and 15, and is fixedly connected on the substrate 1.
In the foregoing description, substrate 1 can adopt materials such as silicon, glass or silicon dioxide to make.
In the foregoing description, the movable comb 4 that drives can adopt upper/lower terminal to be higher than the structure (as shown in Figure 3, Figure 4) of fixed drive comb 2 symmetrically; Also can adopt movable driving to comb the structure (as Fig. 5, shown in Figure 6) that 4 upper/lower terminals are lower than fixed drive comb 2 symmetrically.
In the foregoing description, variable area formula vertical comb teeth detects electric capacity 10 and adopts I type and two kinds of broach combinations of II type, also can adopt I type or II type a kind of structure wherein, can reduce the influence of mismachining tolerance to capacitive property like this.
In the foregoing description, drive folded beam 5, framework 6, detection folded beam 7, responsive mass 9 and variable area formula vertical comb teeth detection electric capacity 10 and can adopt silicon or titanium to make, drive electrode 3 and detecting electrode 11 can adopt materials such as aluminium, gold or titanium to make.
In the various embodiments described above, driver element is arranged on the center of gyro, and detecting unit is arranged on the outside of gyro, and sensing unit is arranged between framework 6 and the driver element.
The present invention in use, two responsive masses 9 are under drive unit drives, along X-axis resonance, two responsive mass 9 direction of vibration are opposite, when gyro is subjected to input angular velocity along the sensitive axes Y-axis, under the coriolis force effect, two responsive masses 9 are along X-axis resonance the time, can also do the opposite vibration of direction along the Z axle, and drive the movable polar motion that respectively detects electric capacity, thereby can detect this angular velocity by detecting electric capacity by framework 6.Wherein, variable area formula vertical comb teeth detects electric capacity 10 and becomes clearance-type and detects electric capacity 12 demodulation output separately separately, make up by subsequent conditioning circuit or the software module signal after to demodulation as required then, to realize high sensitivity or wide range or to realize high sensitivity and wide range simultaneously.
The various embodiments described above only are preferred implementations of the present invention, and are every based on the changes and improvements on the technical solution of the present invention in the present technique field, should not get rid of outside protection scope of the present invention.
Claims (10)
1. horizontal shaft micro-mechanical tuning fork gyroscope, it is characterized in that: it comprises substrate, comb and drive the driver element that folded beam is formed by fixed drive comb, drive electrode, the movable driving, framework becomes the detecting unit that clearance-type detection electric capacity is formed by detecting the sensing unit that folded beam, anchor point and responsive mass form and detecting electric capacity, respective detection electrode and Differential Detection by variable area formula vertical comb teeth; Described variable area formula vertical comb teeth detects electric capacity and comprises I type fixed vertical detection comb, I type movable vertical detection comb, II type fixed vertical detection comb and II type movable vertical detection comb; Described change clearance-type detects electric capacity and comprises the detection pole plate;
On the described substrate, described fixed drive comb is an Ohmic contact with described drive electrode, and all fixedlys connected with the described end of lining; One side of described movable driving comb connects described framework by described driving folded beam, and described framework is fastened on described anchor point on the described substrate, the fixedly connected described responsive mass of opposite side by described detection folded beam; Described responsive mass is by the fixedly connected described framework of described driving folded beam, and described framework is fixedly connected on the described substrate by described detection folded beam and anchor point; Described I type, II type fixed vertical detection comb are fixed on the described substrate, described I type, II type movable vertical detection comb are connected with described frame fixation, and described detecting electrode and described I type, II type fixed vertical detection comb are Ohmic contact, and are fixed on the described substrate.
2. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 1 is characterized in that: described substrate adopts one of them material such as silicon, glass and silicon dioxide to make.
3. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 1 is characterized in that: described movable driving comb adopts upper/lower terminal to be higher than the structure of described fixed drive comb symmetrically.
4. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 1 is characterized in that: described movable driving comb adopts upper/lower terminal to be lower than the structure of described fixed drive comb symmetrically.
5. as claim 1 or 2 or 3 or 4 described a kind of horizontal shaft micro-mechanical tuning fork gyroscopes, it is characterized in that: described variable area formula vertical comb teeth detects electric capacity and adopts I type, two kinds of broach combinations of II type, or a kind of structure wherein.
6. as claim 1 or 2 or 3 or 4 described a kind of horizontal shaft micro-mechanical tuning fork gyroscopes, it is characterized in that: one of them makes described driving folded beam, framework, detection folded beam, responsive mass and variable area formula vertical comb teeth detection electric capacity employing silicon and titanium; Described drive electrode and detecting electrode adopt and make with one of them materials such as aluminium, gold and titaniums.
7. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 5 is characterized in that: one of them makes described driving folded beam, framework, detection folded beam, responsive mass and variable area formula vertical comb teeth detection electric capacity employing silicon and titanium; Described drive electrode and detecting electrode adopt and make with one of them materials such as aluminium, gold and titaniums.
8. as claim 1 or 2 or 3 or 4 or 7 described a kind of horizontal shaft micro-mechanical tuning fork gyroscopes, it is characterized in that: described driver element is arranged on the center of gyro, described detecting unit is arranged on the outside of gyro, and described sensing unit is arranged between described framework and the driver element.
9. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 5, it is characterized in that: described driver element is arranged on the center of gyro, described detecting unit is arranged on the outside of gyro, and described sensing unit is arranged between described framework and the driver element.
10. a kind of horizontal shaft micro-mechanical tuning fork gyroscope as claimed in claim 6, it is characterized in that: described driver element is arranged on the center of gyro, described detecting unit is arranged on the outside of gyro, and described sensing unit is arranged between described framework and the driver element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN200910241711A CN101718556A (en) | 2009-12-08 | 2009-12-08 | Micro-mechanical tuning fork gyroscope of horizontal shaft |
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| Application Number | Priority Date | Filing Date | Title |
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| CN200910241711A CN101718556A (en) | 2009-12-08 | 2009-12-08 | Micro-mechanical tuning fork gyroscope of horizontal shaft |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN106970244A (en) * | 2017-04-18 | 2017-07-21 | 四川知微传感技术有限公司 | A kind of multiple range MEMS closed-loop accelerometers |
| CN109945850A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of MEMS gyroscope |
-
2009
- 2009-12-08 CN CN200910241711A patent/CN101718556A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN104089612B (en) * | 2014-07-28 | 2017-02-15 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN106970244A (en) * | 2017-04-18 | 2017-07-21 | 四川知微传感技术有限公司 | A kind of multiple range MEMS closed-loop accelerometers |
| CN106970244B (en) * | 2017-04-18 | 2023-03-28 | 四川知微传感技术有限公司 | Multi-range MEMS closed-loop accelerometer |
| CN109945850A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of MEMS gyroscope |
| CN109945850B (en) * | 2019-04-02 | 2023-09-26 | 四川知微传感技术有限公司 | MEMS gyroscope |
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Open date: 20100602 |