CN102581704A - Device for measuring circular trace of numerical control machine by using laser interferometer - Google Patents
Device for measuring circular trace of numerical control machine by using laser interferometer Download PDFInfo
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- CN102581704A CN102581704A CN2012100761855A CN201210076185A CN102581704A CN 102581704 A CN102581704 A CN 102581704A CN 2012100761855 A CN2012100761855 A CN 2012100761855A CN 201210076185 A CN201210076185 A CN 201210076185A CN 102581704 A CN102581704 A CN 102581704A
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Abstract
The invention provided a device for measuring a circular trace of a numerical control machine by using a laser interferometer, solving the problems of complex structure and large error in the existing device. In the device, a laser head (9), a spectroscope (10), a reflector (11) and a reflector (12) are arranged on an operating platform (17) of the numerical control machine and move along the Y direction; a long right-angle prism (13), a long right-angle prism (14) and a prism base body (15) are integrated with a clamp holder (16), the integrated structure is fixed to a main shaft of the numerical control machine through the holding device (16), and moves along the X direction. The long right-angle prism (13) and the long right-angle prism (14) are formed to be two target prisms of the laser interferometer; when the machine moves along the circular trace, two target prisms can sense the displacements in the Y direction and X direction, therefore, the displacement difference of the Y direction and the X direction can be obtained by the laser head (9); the error of the circular of the numerical control machine is obtained through the comparison between the displacement difference and the nominal difference.
Description
Technical field:
The present invention is relevant with the method that adopts laser differential principle of interference measurement Circular Test of NC Machine Tools track.
Background technology:
The round track of Digit Control Machine Tool refers to the track of the relative circular motion between main shaft and the workbench; Name circle track is the important technology index of Digit Control Machine Tool with the deviation of actual circle track; Comprise round hysteresis H, circle deviation G and three test items of radius deviation F; Circle hysteresis H and circle deviation G are mainly produced by two linear axis circular interpolation errors, and radius deviation F is an absolute deviation.
Rotating one dimension gauge head or disk and two-dimentional gauge head or ball bar are adopted in the measurement of the round track of Digit Control Machine Tool, and the detection method of the two-dimensional encoded device of direct employing is also arranged.
In " with measurements by laser interferometry Circular Test of NC Machine Tools track " (June 17 2009 Granted publication day; Granted publication number: propose to adopt in the method for laser differential interferometry Circular Test of NC Machine Tools track CN100500369C); The rectangular co-ordinate mechanism that is made up of pedestal, transverse arm, clamper, slide block is the carrier that produces differential interference; But since complex structure, the error that exists some to be difficult to avoid:
1. because slide block and the sideshake of transverse arm and the sideshake of transverse arm and pedestal,, cause idle running error when machine tool motion during (refer to lathe in the X or the Y direction reversing of motion instantaneous) to flex point.
2. because there is the nonstraightness error of guide rail in pedestal, directly cause Abbe error (Y direction) and cosine error (directions X) at the deflection angle of transverse arm when the Y direction is moved; Equally, because there is the nonstraightness error of guide rail in transverse arm,, directions X also can produce corresponding Abbe error and cosine error when moving at slide block.
Owing to adopted rectangular co-ordinate mechanism, above-mentioned error is inevitable, so certainty of measurement is difficult to improve.
Summary of the invention:
The purpose of this invention is to provide a kind of simple in structure, the device that certainty of measurement is high with laser interferometer measurement Circular Test of NC Machine Tools track.
The present invention is achieved in that
The present invention is with the device of laser interferometer measurement Circular Test of NC Machine Tools track; The laser head of laser interferometer places on the workbench of Digit Control Machine Tool or outside the workbench; Spectroscope, first speculum, second speculum place on the workbench, and workbench moves along Y direction, and laser head, spectroscope and first speculum are positioned at the first axle parallel with the Y axle; Spectroscope, second speculum are positioned at second axis parallel with the X axle; First and second long mirror is fixed on the prism matrix and reflecting surface is vertical, prism matrix and clamper are connected, and clamper and data machine tool chief axis are connected, and main shaft moves in the X-axis direction; Light through first and second speculum is vertical with first and second long mirror minute surface, and laser interferometer has amplifier, electronic processors and microcomputer.
First and second long mirror is long right-angle prism.
First and second long mirror is long plane mirror; The one λ/4 wave plates are arranged on the first axle between the spectroscope and first speculum; The 2nd λ/4 wave plates are arranged on second axis between the spectroscope and second speculum; On second axis of spectroscope opposite side the 3rd speculum is arranged, first, second and third mirror mirror and first or second axis angle are 45 °.
Its measuring process is following:
1. will long mirror, the assembly that constitutes of prism matrix (15) and clamper (16) is installed on machine tool chief axis through clamper (16); Laser head (9), spectroscope (10), first and second speculum (12) and (11) are placed on the workbench of Digit Control Machine Tool; And make machine tool chief axis be positioned at the central authorities of Digit Control Machine Tool workspace as far as possible; The origin of coordinates is set up in electronic processors (19) zero setting;
2. control the nominal radius distance R of main shaft of numerical control machine tool along directions X or workbench along Y direction motion track
0
3. machine tool chief axis around the origin of coordinates with R
0Be radius, make the circle orbiting motion, digital control system (21) is sent the reading that sampled signal is given electronic processors (19) collection laser interferometer according to anglec of rotation β simultaneously, in microcomputer (20), carries out Error Calculation, obtains actual circle geometric locus; The shift value of two long mirrors is respectively X (β), Y (β);
4. calculate the error amount Δ R of each point according to formula (5) and formula (6)
(β):
According to R
(β)Synthetic obtain actual circle track,
The error amount of corresponding each coordinate points:
According to the regulation of GB/T17421.4-2003, calculate round hysteresis H, circle deviation G and radius deviation F.
The present invention proposes the structure with laser interferometer measurement Circular Test of NC Machine Tools track; Because structure is terse, slotted line overlaps with dimension line, can not produce idle running error, Abbe error and cosine error; In the length range of long right-angle prism or long plane mirror; Can measure the round track of any radius, when measuring radius deviation F (absolute deviation), need not to demarcate.
Description of drawings:
Fig. 1 adopts the structure chart of long right-angle prism for the present invention.
Fig. 2 is the laser interferometer circuit block diagram.
The name circle track and actual circle track of Fig. 3 for representing with difference.
Fig. 4 is the actual round track after calculating.
Fig. 5 adopts the structure chart of long speculum for the present invention.
The specific embodiment:
Embodiment 1: the structure that adopts long right-angle prism
The laser that laser head 9 sends is punished into two bundles at spectroscope 10, invests long right- angle prism 13 and 14 through speculum 11 and 12 respectively, and long right- angle prism 13 and 14 has constituted two target mirrors of laser interferometer.Laser returns and respectively through speculum 11 and 12 reflections, converges at spectroscope 10 places to form and interfere through the target mirror.
Fig. 2 is the circuit block diagram of laser interferometer, and the amplifier 18 of interference signal in laser head receives and amplify, and in electronic processors 19, by the sampled signal β modulation from machine tool numerical control system 21, in microcomputer 20, carries out Error Calculation.
When lathe was made the circle orbiting motion, two target mirrors were experienced the displacement of Y and directions X respectively, and its value is respectively:
Y
(β)=R
(β)sinβ （1）
X
(β)=R
(β)cosβ （2）
β is the corner of workbench with respect to main-shaft axis, also is the employing instruction that machine tool numerical control system sends, R
(β)Real radius for the circle track.
Because when lathe is made the circle orbiting motion, the displacement of Y and directions X realizes simultaneously, so system is a differential interference system, laser head 9 receptions be the poor of two target mirrors displacement:
Do not having under the error state, the difference of name circle track is:
R
0Nominal radius for the circle track.
Fig. 3 is round track of the name of representing with difference and actual circle track, owing to exist deviation, two curves not to overlap, its difference has characterized the deviation of nominal round track and actual circle track.
The radius value R of the actual path that measures
(β)Use computes:
According to R
(β)Synthetic obtain actual circle track, as shown in Figure 4.
The error amount of corresponding each coordinate points:
According to Δ R
(β)Value according to the regulation of GB/T17421.4-2003, can calculate round hysteresis H, circle deviation G and radius deviation F.
Adopt measuring process of the present invention following:
1. referring to Fig. 1; The assembly that long right- angle prism 13 and 14, prism matrix 15 and clamper 16 are constituted is installed on machine tool chief axis through clamper 16; Laser head 9, spectroscope 10, speculum 11 and 12 are placed on the workbench of Digit Control Machine Tool (laser head 9 also can be external); And making main shaft be positioned at the central authorities of Digit Control Machine Tool workspace as far as possible, the origin of coordinates is set up in electronic processors 19 zero setting;
2. the main shaft of controlling Digit Control Machine Tool moves the radius distance R of nominal track along directions X (perhaps workbench is along the Y direction)
0(owing to there is an error, this moment system reading have depart from);
3. lathe around the origin of coordinates with R
0Be radius, make the circle orbiting motion, digital control system is sent sampled signal according to anglec of rotation β simultaneously, gathers the reading of laser interference system, obtains the actual round geometric locus of representing with difference shown in Figure 3;
4. calculate the error amount Δ R of each point according to formula (5) and formula (6)
(β),, calculate round hysteresis H, circle deviation G and radius deviation F according to the regulation of GB/T17421.4-2003.
Embodiment 2: the structure that adopts long plane mirror
Laser head 22, polarization spectroscope 23, speculum 24,25 and 33, λ/4 wave plates 31 and 32 place on the workbench 30 of controlled machine (laser head 22 also can be external), move along the Y direction; Long speculum 26 and 27, long basal body of reflector 28 and clamper 29 constitute one, are fixed in the main shaft of Digit Control Machine Tool through clamper 29, move along directions X.
Adopt measuring process of the present invention following:
1. referring to Fig. 5; The assembly that long speculum 26 and 27, basal body of reflector 28 and clamper 29 are constituted is installed on machine tool chief axis through clamper 29; Laser head 22, polarization spectroscope 23, λ/4 wave plates 31,32 and speculum 24,25,33 are placed on the workbench 30 of Digit Control Machine Tool (laser head 22 also can be external); And making main shaft be positioned at the central authorities of Digit Control Machine Tool workspace as far as possible, the origin of coordinates is set up in electronic processors 19 zero setting;
2. the main shaft of controlling Digit Control Machine Tool moves the radius distance R of nominal track along directions X (perhaps workbench is along the Y direction)
0(owing to there is an error, this moment system reading have depart from);
3. lathe around the origin of coordinates with R
0Be that radius makes the circle orbiting motion, digital control system is sent sampled signal simultaneously, gathers the reading of laser interference system according to anglec of rotation β, obtains the actual round geometric locus of representing with difference shown in Figure 3;
4. calculate the error amount Δ R of each point according to formula (4) and formula (5)
(β)According to the regulation of GB/T17421.4-2003, calculate round hysteresis H, circle deviation G and radius deviation F.
Claims (4)
1. with the device of laser interferometer measurement Circular Test of NC Machine Tools track; The laser head that it is characterized in that laser interferometer places on the workbench of Digit Control Machine Tool or outside the workbench; Spectroscope, first speculum, second speculum place on the workbench, and workbench moves along Y direction, and laser head, spectroscope and first speculum are positioned at the first axle parallel with the Y axle; Spectroscope, second speculum are positioned at second axis parallel with the X axle; First and second long mirror is fixed on the prism matrix and reflecting surface is vertical, prism matrix and clamper are connected, and clamper and data machine tool chief axis are connected, and main shaft moves in the X-axis direction; Light through first and second speculum is vertical with first and second long mirror minute surface, and laser interferometer has amplifier, electronic processors and microcomputer.
2. device according to claim 1 is characterized in that first and second long mirror is long right-angle prism.
3. device according to claim 1; It is characterized in that first and second long mirror is long plane mirror; The one λ/4 wave plates are arranged on the first axle between the spectroscope and first speculum; The 2nd λ/4 wave plates are arranged on second axis between the spectroscope and second speculum, on second axis of spectroscope opposite side the 3rd speculum is arranged, first, second and third mirror mirror and first or second axis angle are 45 °.
4. device according to claim 1 is characterized in that its measuring process is following:
1. will long mirror, the assembly that constitutes of prism matrix (15) and clamper (16) is installed on machine tool chief axis through clamper (16); Laser head (9), spectroscope (10), first and second speculum (12) and (11) are placed on the workbench of Digit Control Machine Tool; And make machine tool chief axis be positioned at the central authorities of Digit Control Machine Tool workspace as far as possible; The origin of coordinates is set up in electronic processors (19) zero setting;
2. control the nominal radius distance R of main shaft of numerical control machine tool along directions X or workbench along Y direction motion track
0
3. machine tool chief axis around the origin of coordinates with R
0Be radius, make the circle orbiting motion, digital control system (21) is sent the reading that sampled signal is given electronic processors (19) collection laser interferometer according to anglec of rotation β simultaneously, in microcomputer (20), carries out Error Calculation, obtains actual circle geometric locus; The shift value of two long mirrors is respectively X (β), Y (β);
4. calculate the error amount Δ R of each point according to formula (5) and formula (6)
(β):
According to R
(β)Synthetic obtain actual circle track,
The error amount of corresponding each coordinate points:
According to the regulation of GB/T17421.4-2003, calculate round hysteresis H, circle deviation G and radius deviation F.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100761855A CN102581704A (en) | 2012-03-22 | 2012-03-22 | Device for measuring circular trace of numerical control machine by using laser interferometer |
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|---|---|---|---|
| CN2012100761855A CN102581704A (en) | 2012-03-22 | 2012-03-22 | Device for measuring circular trace of numerical control machine by using laser interferometer |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105320060A (en) * | 2014-07-29 | 2016-02-10 | 上海宝钢工业技术服务有限公司 | Circle inspection method based on Beckhoff numerical control system machine tool |
| CN105318837A (en) * | 2015-11-20 | 2016-02-10 | 常州铭赛机器人科技股份有限公司 | A visual calibration device for end portions of quick-wear parts and a calibration method thereof |
| CN106767512A (en) * | 2016-12-29 | 2017-05-31 | 哈尔滨工业大学 | Optical element high precision measuring device based on real-time monitoring kinematic error |
| CN107102618A (en) * | 2017-07-04 | 2017-08-29 | 广东创能精密机械有限公司 | The method that the Digit Control Machine Tool and its error compensation of error compensation can be carried out |
| CN109909808A (en) * | 2019-04-30 | 2019-06-21 | 华中科技大学 | A kind of multi-shaft interlocked precision machine tool two dimension dynamic locating accuracy measurement method |
| CN113282055A (en) * | 2021-05-19 | 2021-08-20 | 东华大学 | Small-stroke high-precision two-axis linkage error measurement system and control method |
| CN113390337A (en) * | 2021-06-03 | 2021-09-14 | 合肥工业大学 | X-Y-theta three-degree-of-freedom measuring method based on field separation |
| CN114413763A (en) * | 2022-01-13 | 2022-04-29 | 合肥工业大学 | Five-degree-of-freedom measurement system and method based on two-dimensional absolute grating |
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| CN109909808A (en) * | 2019-04-30 | 2019-06-21 | 华中科技大学 | A kind of multi-shaft interlocked precision machine tool two dimension dynamic locating accuracy measurement method |
| CN113282055A (en) * | 2021-05-19 | 2021-08-20 | 东华大学 | Small-stroke high-precision two-axis linkage error measurement system and control method |
| CN113390337A (en) * | 2021-06-03 | 2021-09-14 | 合肥工业大学 | X-Y-theta three-degree-of-freedom measuring method based on field separation |
| CN114413763A (en) * | 2022-01-13 | 2022-04-29 | 合肥工业大学 | Five-degree-of-freedom measurement system and method based on two-dimensional absolute grating |
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Application publication date: 20120718 |