CN201811726U - Non-contact type in-plane displacement measuring device - Google Patents

Non-contact type in-plane displacement measuring device Download PDF

Info

Publication number
CN201811726U
CN201811726U CN2010202914334U CN201020291433U CN201811726U CN 201811726 U CN201811726 U CN 201811726U CN 2010202914334 U CN2010202914334 U CN 2010202914334U CN 201020291433 U CN201020291433 U CN 201020291433U CN 201811726 U CN201811726 U CN 201811726U
Authority
CN
China
Prior art keywords
gauge head
contactless
plane displacement
scale
tracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010202914334U
Other languages
Chinese (zh)
Inventor
刘大亮
吴速
唐文彦
杨长江
崔厚欣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING TIME HIGH-TECHNOLOGY Ltd
Original Assignee
BEIJING TIME HIGH-TECHNOLOGY Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING TIME HIGH-TECHNOLOGY Ltd filed Critical BEIJING TIME HIGH-TECHNOLOGY Ltd
Priority to CN2010202914334U priority Critical patent/CN201811726U/en
Application granted granted Critical
Publication of CN201811726U publication Critical patent/CN201811726U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model relates to a non-contact type in-plane displacement measuring device which comprises a motion tracking mechanism and at least one measuring unit, wherein the motion tracking mechanism comprises a scale and at least one transmission mechanism; the measuring unit and the transmission mechanism are in the same number, each measuring unit comprises a tracking gauge head and a measuring gauge head that correspond to each other, a measured object is correspondingly arranged on one side of the tracking gauge head, the scale is correspondingly arranged on one side of the measuring gauge head, and each measuring unit can move up and down for arrangement through the corresponding transmission mechanism. The measuring gauge head and the scale of the non-contact type in-plane displacement measuring device jointly constitute a motion feedback device of the measured object, thereby being capable of detecting two-dimensional motion of displacement or deformation of tracking points on the surface of the measured object tracked by the tracking gauge head in a real-time and precise manner and ensuring the measurement precision; and the device is not affected by environmental factors, the measurement can be carried out in high-temperature, high-pressure and other special environments, and the measurement range is wider.

Description

Contactless in-plane displacement measurement mechanism
Technical field
The utility model is relevant for a kind of displacement measuring device, especially relevant for a kind of contactless in-plane displacement measurement mechanism.
Background technology
In the prior art, the instrument that is used for Displacement Measurement mainly contains contact and contactless two classes, the contact displacement measuring device is mainly Wound-rotor type displacement meter, resistance scale, rotary encoder etc., and the non-contact displacement measurement device comprises grating, holds grid, magnetic grid, laser length measuring machine etc.Contact displacement measuring device ubiquity is not wear-resistant, shortcomings such as measuring accuracy is low, the non-contact displacement measurement device is the expansion to the in-plane displacement measuring technique, and it makes a kind of contactless in-plane displacement measurement as metering method have environment for use and application widely.
At present, when adopting the non-contact displacement measurement device that object is measured, need to paste label on the testee surface in advance, with gauge head trace labelling thing, come the displacement or the deformation on indirect Measuring Object surface by the change in displacement of the optical grating ruler measurement gauge head in the non-contact displacement measurement device.This kind non-contact displacement measurement measurement device process is more numerous and diverse, for guaranteeing measuring accuracy, to label to paste status requirement higher, and, the grating chi is as a kind of one-dimensional space measuring appliance, only can measure along the change in displacement that parallel grating chi direction takes place gauge head, when gauge head produces change in displacement along other direction, can there be difference easily between the displacement variable of the actual generation of the measurement data of grating chi and gauge head, causes measurement result inaccurate; Have, the grating chi has fixedly range distance again, and its measurement range is subjected to the restriction of range distance, is difficult to be applied to continuous large scale in-plane displacement and measures; In addition, when for example yarn fabric was measured to flexible material, label can produce certain influence to the deformation on flexible material surface, can cause the deformation on the testee surface of measuring to have error; Relatively poor, the dustproof effect of the temperature performance of grating chi is also undesirable, and under particular surroundingss such as high temperature, high pressure, the measuring accuracy of grating chi can reduce, and influences the accuracy of displacement measurement.But, for reaching the measurement result of high precision, long distance, and improve the measuring accuracy and the range length of grating chi, can cause the price of non-contact displacement measurement device and maintenance cost to improve, be unfavorable for the popularization of measuring technique.
Therefore, be necessary to provide a kind of novel contactless in-plane displacement measurement mechanism, to overcome above-mentioned defective.
The utility model content
The purpose of this utility model provides a kind of contactless in-plane displacement measurement mechanism, the measurement gauge head of this device and scale are formed the motion feedback device of testee jointly, can detect the displacement of following the tracks of the testee surface tracking point that gauge head follows the tracks of or the two dimensional motion of deformation in real time accurately, guarantee measuring accuracy; This device is not subjected to Effect of Environmental, can measure under particular surroundingss such as high temperature, high pressure yet, and measurement range is wider.
Above-mentioned purpose of the present utility model can adopt following technical proposal to realize:
A kind of contactless in-plane displacement measurement mechanism, described measurement mechanism comprises:
Motion tracking mechanism, it comprises scale and at least one gear train;
At least one measuring unit, the quantity of described measuring unit is identical with the quantity of gear train, each measuring unit comprises that one of mutual correspondence is followed the tracks of gauge head and a measurement gauge head, testee is arranged on a side of described tracking gauge head accordingly, described scale is arranged on a side of described measurement gauge head accordingly, and each measuring unit can move up and down setting by pairing gear train.
In preferred embodiment, each described gear train comprises leading screw and slide block, and described tracking gauge head and measurement gauge head are connected to the two ends of described slide block, and described slide block can be connected on the described leading screw up or down.
In preferred embodiment, described measuring unit is two, and described two measuring units are oppositely arranged up and down; Described gear train is two, and it drives described two measuring units respectively and moves up and down.
In preferred embodiment, described motion tracking mechanism also comprises base for supporting and guide rail, and described guide rail is fixedly installed on the described base for supporting, and described scale is arranged on the described base for supporting, and described leading screw is supported on the base for supporting.
In preferred embodiment, described guide rail has two stands and a crossbearer, and the top of described two stands is connected to the two ends of described crossbearer, and its bottom is fixedly connected on the described base for supporting.
In preferred embodiment, described crossbearer is provided with and described leading screw corresponding positioning hole, and described leading screw is located in the described pilot hole rotationally.
In preferred embodiment, an end of described leading screw is connected with and can drives the drive source that leading screw rotates.
In preferred embodiment, described scale and described measurement gauge head facing surfaces are the optically roughness surface.
In preferred embodiment, each described tracking gauge head and each described measurement gauge head include laser instrument and imageing sensor, described imageing sensor is positioned at described laser instrument on the reflected light bunch of described testee or scale, and the optical axis of described imageing sensor and the optical axis of described laser instrument all acutangulate layout with the surface normal of described testee or scale.
In preferred embodiment, each described tracking gauge head and each described measurement gauge head also comprise beam expanding lens, collimation lens and imaging len, optical axis direction along described laser instrument is sequentially provided with described beam expanding lens and described collimation lens, is sequentially provided with described imaging len and described imageing sensor along the reflected light direction of described laser instrument.
The characteristics and the advantage of contactless in-plane displacement measurement mechanism of the present utility model are:
One, contactless in-plane displacement measurement mechanism of the present utility model, measure gauge head and scale and form the motion feedback device of testee jointly, when following the tracks of the trace point on gauge head real-time follow-up testee surface, measuring gauge head together moves with the tracking gauge head by the drive of gear train, can reach the purpose of the two dimensional motion of in real time accurate displacement that detects testee surface tracking point or deformation, when improving measuring accuracy, reduce production costs; This device is not subjected to Effect of Environmental, and the measuring accuracy under the particular surroundingss such as high temperature, high pressure is guaranteed to some extent that also measurement range is wider.
Two, contactless in-plane displacement measurement mechanism of the present utility model, the tracking gauge head of this device has the imageing sensor that is used to follow the tracks of testee surface tracking point, therefore, need not to paste label on the testee surface, can measure displacement or deformation that the testee surface produces, be applicable to measurement flexible material; Simultaneously, when testee generating plane intrinsic displacement or deformation, follow the tracks of the trace point that gauge head can real-time follow-up testee surface, make the zone that is radiated at the lip-deep pencil tracing appointment of testee.
Three, contactless in-plane displacement measurement mechanism of the present utility model, leading screw and scale can be designed to random length, realize in-plane displacement or distortion measurement to the testee wide range.
Four, contactless in-plane displacement measurement mechanism of the present utility model, gear train adopt lead screw transmission to drive and follow the tracks of gauge head and measure gauge head motion, transmission efficiency height, motion stabilization.
Description of drawings
In order to be illustrated more clearly in the technical scheme among the utility model embodiment, the accompanying drawing of required use is done to introduce simply in will describing embodiment below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of contactless in-plane displacement measurement mechanism of the present utility model.
Fig. 2 is the structural representation of contactless in-plane displacement measurement mechanism gauge head of the present utility model.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, contactless in-plane displacement measurement mechanism of the present utility model comprises motion tracking mechanism 1 and at least one measuring unit 2.This motion tracking mechanism 1 comprises scale 11 and at least one gear train 12.The quantity of measuring unit 2 is identical with the quantity of gear train 12, each measuring unit 2 comprises that one of mutual correspondence is followed the tracks of gauge head 21 and a measurement gauge head 22, testee 3 is arranged on a side of following the tracks of gauge head 21 accordingly, this scale 11 is arranged on a side of measuring gauge head 22 accordingly, and each measuring unit 2 can move up and down setting by pairing gear train 12.
The measurement mechanism of the utility model embodiment is the in-plane displacement that is used for measuring testee 3, when tracking gauge head 21 passes through the trace point on gear train 12 real-time follow-up testees 3 surfaces, measuring gauge head 22 together moves with tracking gauge head 21, and measure gauge head 22 and the scale 11 common motion feedback devices of forming testee 3, can reach the purpose of the two dimensional motion of in real time accurate displacement that detects testee 3 surface tracking point A or deformation, when improving measuring accuracy, reduce production costs; This device is not subjected to Effect of Environmental, and the measuring accuracy under the particular surroundingss such as high temperature, high pressure is guaranteed to some extent that also measurement range is wider.
According to an embodiment of the present utility model, each gear train 12 comprises leading screw 121 and slide block 122, follow the tracks of gauge head 21 and measure the two ends that gauge head 22 is connected to slide block 122, slide block 122 can be connected on the leading screw 121 up or down, moves up and down together thereby drive to follow the tracks of gauge head 21 and measure gauge head 22.Specifically be, leading screw 121 is provided with external thread, slide block 122 is provided with internal thread hole, and slide block 122 is circumferentially fixing, slide block 122 links together by internal thread hole and externally threaded cooperatively interacting with leading screw 121, when leading screw 121 rotated, slide block 122 can move up and down along the axial direction of leading screw 121.This gear train 12 adopts leading screw 121 driving-belt motion tracking gauge heads 21 and measures gauge head 22 motions, transmission efficiency height, motion stabilization.In addition, leading screw 121 and scale 11 can be realized the measurement to testee 3 any ranges according to the random length that is dimensioned to of testee, are specially adapted to the in-plane displacement of wide range or the measurement of deformation.
In the present embodiment, contactless in-plane displacement measurement mechanism has 2, two measuring units 2 of two measuring units and is oppositely arranged up and down, and gear train 12 also is two, and it drives two measuring units 2 respectively and moves up and down.Two leading screws 121 of two gear trains 12 can be arranged to equidirectional external thread, also can be arranged to reciprocal external thread, and two measuring units 2 are being connected on two different leading screws 121 of moving up and down of the slide block 122 by separately respectively.In use, two of two measuring units 2 follow the tracks of two different trace point A and the trace point C that gauge heads 21 point to testee 3 surfaces respectively, rotation by two leading screws 121 drives two measuring units 2 respectively in opposite directions or relative motion, so can satisfy the measurement requirement of the displacement variable between 3 liang of relative trace point A of testee and the trace point C.
According to an embodiment of the present utility model, this motion tracking mechanism 1 also comprises base for supporting 13 and guide rail 14, and guide rail 14 is fixedly installed on the base for supporting 13, and scale 11 also is fixedly installed on the base for supporting 13, and leading screw 121 is supported on the base for supporting 13.Specifically be, the top that guide rail 14 has two stands 141 and 142, two stands 141 of a crossbearer is connected to the two ends of crossbearer 142, and the bottom of two stands 141 is fixedly connected on the base for supporting 13.Crossbearer 142 is provided with and leading screw 121 corresponding positioning hole 143, leading screw 121 is located in the pilot hole 143 rotationally, the effect of pilot hole 143 is to make leading screw 121 location, make the leading screw 121 can curved incline, ground, its axle center of non-migration rotates as much as possible, so that slide block 122 moves along above-below direction.
According to an embodiment of the present utility model, an end of leading screw 121 is connected with and can drives the drive source 4 that leading screw 121 rotates.Described drive source 4 can be motor, perhaps can be for air motor etc., as long as can drive the drive unit of leading screw 121 rotations; By adjusting drive source 4, can adjust the rotating speed of leading screw 121, thus the speed that moves up and down of adjustable slide 122.
According to an embodiment of the present utility model, scale 11 is the optically roughness surface with measuring gauge head 22 facing surfaces 111.Scale 11 can improve and measure gauge head 22 data veracity in the face of the one side of measuring gauge head 22 is set to the optically roughness surface, and then guarantees the precision of testee 3 in-plane displacement measurement data.
According to an embodiment of the present utility model, as shown in Figure 2, each is followed the tracks of gauge head 21 and measures gauge head 22 and includes laser instrument 51 and imageing sensor 52, imageing sensor 52 is positioned at laser instrument 51 on the reflected light bunch of testee 3 or scale 11, and the optical axis of the optical axis of imageing sensor 52 and laser instrument 51 all acutangulates layout with the surface normal F of testee 3 or scale 11.Specifically be, the angle of the optical axis of laser instrument 51 and normal F is α, the angle of the optical axis of imageing sensor 52 and normal F is β, angle α and angle β are all less than 90 degree, angle α can be identical with angle β, also can be different with angle β, can receive from the folded light beam of laser instrument 51 as long as can guarantee imageing sensor 52 through testee 3 or scale 11.In use, need not to paste label, can measure displacement or deformation that testee surface 31 produces, be applicable to measurement flexible material on testee 3 surfaces 31; Simultaneously, when testee 3 generating plane intrinsic displacements or deformation, follow the tracks of trace point A and C that gauge head 21 can real-time follow-up testee surface 31, make the zone of the pencil tracing appointment that is radiated on the testee surface 31.
Each follows the tracks of gauge head 21 and each measurement gauge head 22 also comprises beam expanding lens 53, collimation lens 54 and imaging len 55, optical axis direction along laser instrument 51 is sequentially provided with beam expanding lens 53 and collimation lens 54, reflected light direction along laser instrument 51 is sequentially provided with imaging len 55 and imageing sensor 52, that is to say, the light that laser instrument 51 sends passes through beam expanding lens 53 and collimation lens 54 at first successively, arrive on the testee 3 (or scale 11), after testee 3 (or scale 11) reflection, received by imageing sensor 52 through imaging len 55 again.
Measuring process of the present utility model is described below: described measurement mechanism is circumscribed with one group of measuring system (not shown), and this measuring system includes computer processor unit, motion control device and display device.Specifically be, at first, (number of trace point is identical with the quantity of following the tracks of gauge head 21 with trace point C to select trace point A on testee 3 surfaces 31, this sentences two and describes for example), follow the tracks of gauge head 21 for two and point to trace point A and trace point C respectively, select reference point B and reference point D (number of reference point is identical with the quantity of measuring gauge head 22, and this sentences two and describes for example) on the surface of scale 11, two measurement gauge heads 22 point to reference point B and reference point D respectively.When testee 3 being stretched or compress, trace point A and trace point C can move along with the change in displacement on testee 3 surfaces.The imageing sensor 52 of following the tracks of gauge head 21 has a tracing area, when trace point A, C shift out this tracing area, the imageing sensor 52 of following the tracks of gauge head 21 can send signal to computer processor unit, this moment, computer processor unit sent instruction according to this signal to motion control device, motion control device is through handling the velocity of rotation of two drive sources 4 of real-time regulated respectively, two drive sources 4 drive two leading screws 121 respectively and rotate, thereby regulate two movement velocitys of following the tracks of gauge head 21, make its imageing sensor 52 follow the tracks of trace point A, C along leading screw 121.
This computer processor unit is presented at the information that imageing sensor 52 collects on the display device.The point of fixity that is fixed on the base for supporting 13 with scale 11 is a reference zero, and measurement gauge head 22 witness mark B are d with respect to the displacement vector of base for supporting 13 B(x, y), another measurement gauge head 22 witness mark D are d with respect to the displacement vector of base for supporting 13 D(x, y), tracking gauge head 21 measurement trace point A are δ with respect to the displacement vector of this tracking gauge head 21 A(x, y), another follow the tracks of gauge head 21 measure trace point C relatively this another follow the tracks of gauge head 21 displacement vector be δ C(x, y).Can draw by calculating, trace point A is with respect to the displacement vector d of base for supporting 13 A(x, y)=δ A(x, y)+δ B(x, y)+d B(x, y), trace point C is with respect to the displacement vector d of base for supporting 13 C(x, y)=δ C(x, y)+δ D(x, y)+d D(x, y).Therefore, trace point A also is the displacement Δ d on testee 3 surfaces with respect to the displacement vector of trace point C AC(x, y)=d A(x, y)-d C(x, y).Wherein, || δ A(x, y) ||≤ε A, || δ C(x, y) ||≤ε C, ε AAnd ε CFor guaranteeing that trace point A and trace point C lay respectively at two interior positive numbers of tracing area (investigative range) of following the tracks of gauge head 21 all the time.
The above only is several embodiment of the present utility model, and those skilled in the art can carry out various changes or modification to the utility model embodiment and do not break away from spirit and scope of the present utility model according to application documents are disclosed.

Claims (10)

1. contactless in-plane displacement measurement mechanism is characterized in that described measurement mechanism comprises:
Motion tracking mechanism, it comprises scale and at least one gear train;
At least one measuring unit, the quantity of described measuring unit is identical with the quantity of gear train, each measuring unit comprises that one of mutual correspondence is followed the tracks of gauge head and a measurement gauge head, testee is arranged on a side of described tracking gauge head accordingly, described scale is arranged on a side of described measurement gauge head accordingly, and each measuring unit can move up and down setting by pairing gear train.
2. contactless in-plane displacement measurement mechanism as claimed in claim 1, it is characterized in that, each described gear train comprises leading screw and slide block, and described tracking gauge head and measurement gauge head are connected to the two ends of described slide block, and described slide block can be connected on the described leading screw up or down.
3. contactless in-plane displacement measurement mechanism as claimed in claim 2 is characterized in that described measuring unit is two, and described two measuring units are oppositely arranged up and down; Described gear train is two, and it drives described two measuring units respectively and moves up and down.
4. contactless in-plane displacement measurement mechanism as claimed in claim 2, it is characterized in that, described motion tracking mechanism also comprises base for supporting and guide rail, described guide rail is fixedly installed on the described base for supporting, described scale is arranged on the described base for supporting, and described leading screw is supported on the base for supporting.
5. contactless in-plane displacement measurement mechanism as claimed in claim 4, it is characterized in that, described guide rail has two stands and a crossbearer, and the top of described two stands is connected to the two ends of described crossbearer, and its bottom is fixedly connected on the described base for supporting.
6. contactless in-plane displacement measurement mechanism as claimed in claim 5 is characterized in that, described crossbearer is provided with and described leading screw corresponding positioning hole, and described leading screw is located in the described pilot hole rotationally.
7. contactless in-plane displacement measurement mechanism as claimed in claim 6 is characterized in that, an end of described leading screw is connected with and can drives the drive source that leading screw rotates.
8. contactless in-plane displacement measurement mechanism as claimed in claim 1 is characterized in that, described scale and described measurement gauge head facing surfaces are the optically roughness surface.
9. as any described contactless in-plane displacement measurement mechanism of claim 1 to 8, it is characterized in that, each described tracking gauge head and each described measurement gauge head include laser instrument and imageing sensor, described imageing sensor is positioned at described laser instrument on the reflected light bunch of described testee or scale, and the optical axis of described imageing sensor and the optical axis of described laser instrument all acutangulate layout with the surface normal of described testee or scale.
10. contactless in-plane displacement measurement mechanism as claimed in claim 9, it is characterized in that, each described tracking gauge head and each described measurement gauge head also comprise beam expanding lens, collimation lens and imaging len, optical axis direction along described laser instrument is sequentially provided with described beam expanding lens and described collimation lens, is sequentially provided with described imaging len and described imageing sensor along the reflected light direction of described laser instrument.
CN2010202914334U 2010-08-13 2010-08-13 Non-contact type in-plane displacement measuring device Expired - Fee Related CN201811726U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010202914334U CN201811726U (en) 2010-08-13 2010-08-13 Non-contact type in-plane displacement measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010202914334U CN201811726U (en) 2010-08-13 2010-08-13 Non-contact type in-plane displacement measuring device

Publications (1)

Publication Number Publication Date
CN201811726U true CN201811726U (en) 2011-04-27

Family

ID=43894665

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010202914334U Expired - Fee Related CN201811726U (en) 2010-08-13 2010-08-13 Non-contact type in-plane displacement measuring device

Country Status (1)

Country Link
CN (1) CN201811726U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103604448A (en) * 2013-11-28 2014-02-26 中国航空工业集团公司沈阳空气动力研究院 Absolute type encoder
CN103900603A (en) * 2014-04-21 2014-07-02 哈尔滨工业大学 Noncontact measurement method for displacement and posture of object performing two-dimensional motion in plane or curved surface without guide rail
CN106197259A (en) * 2016-08-22 2016-12-07 中国科学技术大学 A kind of measuring method of high precision and large measuring range real-time single-point acoplanarity displacement
CN110631505A (en) * 2019-09-19 2019-12-31 西安交通大学 Active constant-force touch-measuring scanning sensor and application method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103604448A (en) * 2013-11-28 2014-02-26 中国航空工业集团公司沈阳空气动力研究院 Absolute type encoder
CN103604448B (en) * 2013-11-28 2016-05-04 中国航空工业集团公司沈阳空气动力研究所 Absolute type encoder
CN103900603A (en) * 2014-04-21 2014-07-02 哈尔滨工业大学 Noncontact measurement method for displacement and posture of object performing two-dimensional motion in plane or curved surface without guide rail
CN106197259A (en) * 2016-08-22 2016-12-07 中国科学技术大学 A kind of measuring method of high precision and large measuring range real-time single-point acoplanarity displacement
CN106197259B (en) * 2016-08-22 2019-01-04 中国科学技术大学 A kind of measurement method of the real-time single-point acoplanarity displacement of high precision and large measuring range
CN110631505A (en) * 2019-09-19 2019-12-31 西安交通大学 Active constant-force touch-measuring scanning sensor and application method thereof
CN110631505B (en) * 2019-09-19 2020-06-19 西安交通大学 Active constant-force touch-measuring scanning sensor and application method thereof

Similar Documents

Publication Publication Date Title
CN105547344B (en) A kind of test equipment calibrating installation and its calibration method
CN108278979B (en) A kind of blade in situ contact formula three-dimensional measuring apparatus and method
CN105091802A (en) Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN106125774A (en) Biaxial synchronous motion control device based on laser displacement sensor feedback and method
CN101907441B (en) The laser pitchometer of ball-screw and measuring method thereof
CN203053405U (en) Rapid gear single error field measuring device based on double-face engagement
CN109458958A (en) A kind of scaling method of turntable center position in four axis vision measurement device
CN201811726U (en) Non-contact type in-plane displacement measuring device
CN204924205U (en) Portable two -dimentional follow -up laser surveying device based on laser rangefinder sensor
CN102636137A (en) REVO (Resident Encrypted Variable Output) measuring head position posture calibrating method in joint arm type coordinate measuring machine
CN105547161A (en) High precision flexible measuring device and method for length measuring
CN204595620U (en) A kind of visual apparatus is as the parallel connection platform follow-up control apparatus of sensor
CN114543676A (en) Device and method for detecting radial run-out and circle center motion curve of roller bearing
CN206075152U (en) Based on the Biaxial synchronous motion control device that laser displacement sensor feeds back
CN109520417A (en) Lathe geometric error and turntable corner position error calibrating installation and method
CN103630098A (en) Non-contact detection method of motion parallelism of linear displacement platform
CN102147238A (en) Device for detecting cam profile
CN103884270A (en) Device for measuring two-dimensional micro angle generated in installation of circular grating and method thereof
CN106403852A (en) Plate shape flatness static state measuring device and method
CN103486983B (en) In extraordinary elongated tubular, thorax spiral-line straightness error detection device surveys head
CN105157583A (en) Axle journal length measurement system
CN209147920U (en) A kind of surface whole audience microscopic three-dimensional pattern automatic tester
CN207423137U (en) A kind of cam measuring device
CN109520443B (en) Roll angle measuring method based on combined surface type reference part
CN104089597A (en) Multipoint displacement measurement device

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110427

Termination date: 20170813