CN110631505B - Active constant-force touch-measuring scanning sensor and application method thereof - Google Patents
Active constant-force touch-measuring scanning sensor and application method thereof Download PDFInfo
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- CN110631505B CN110631505B CN201910889258.4A CN201910889258A CN110631505B CN 110631505 B CN110631505 B CN 110631505B CN 201910889258 A CN201910889258 A CN 201910889258A CN 110631505 B CN110631505 B CN 110631505B
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Abstract
The invention discloses an active constant force touch-measuring scanning sensor and a using method thereof, which utilize the response characteristics of high precision and high frequency of piezoelectric ceramics and reasonably drive the movement of the piezoelectric ceramics to adjust the touch force between the touch-measuring end of the probe tip of a micro-nano probe and the surface of a sample to be measured in the measurement to be less than the resolution ratio of an output sensor, thereby eliminating the deviation of the friction force to the measurement result. In this case, the constant force measurement also ensures that the friction force-caused error in the measurement result can be eliminated in a data processing mode. The invention realizes the active control of the touch force, greatly reduces the measurement deviation caused by the friction force, improves the measurement precision, and has relatively simple structure and low complexity of the measurement system.
Description
Technical Field
The invention belongs to the field of micro-nano morphology detection, and particularly relates to an active constant force touch detection scanning sensor and a use method thereof.
Background
In the field of micro-nano morphology detection, a scanning sensor such as a Renysha three-dimensional measuring head or an optical non-contact measuring instrument is widely applied. Non-contact optical measurements are generally less accurate than contact probes. The contact probe is mainly classified into a point contact type and a continuous profile scanning type. The point-contact application is limited and can only be used with a three-coordinate measuring machine; the continuous profile scanning measuring head can obtain a large amount of data information of the surface profile of the regular or curved workpiece through continuous contact scanning, so that the shape and quality of the workpiece can be accurately evaluated. However, due to the high accuracy of the scanning probe, the friction force generated along with the touch force during scanning greatly affects the detection accuracy of the probe, resulting in distortion of the measurement result.
For the situation, two effective processing modes are provided at present, namely, a limit module is added in an elastic mechanism of a measuring head to inhibit parasitic motion generated by friction force in scanning; one is to use an additional measurement module, such as a separate optical module used in raney, to detect the three-dimensional displacement of the stylus on the head in real time and compensate for the friction error in the measurement system, thereby eliminating the friction. While the above approach has some effect on improving the effect of scan friction, it either reduces the accuracy or increases the complexity of the system.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides the scanning sensor for the active constant-force touch measurement and the use method thereof, which can realize the active control of the touch measurement force, greatly reduce the measurement deviation caused by friction force, improve the measurement precision, have relatively simple structure and low complexity of a measurement system.
In order to solve the technical problems, the invention solves the problems by the following technical scheme:
an active constant-force touch-measuring scanning sensor comprises a non-contact sensor, a first fixed seat, a linear elastic deformation mechanism, a micro-nano measuring needle and piezoelectric ceramics; the linear elastic deformation mechanism comprises a middle arm, a first side arm and a second side arm, one end of the first side arm is connected to one side of the middle arm, the middle arm is divided into a long arm and a short arm at a connecting point, one end of the second side arm is connected to the other side of the middle arm, and the first side arm and the second side arm are symmetrically arranged relative to the middle arm;
the first side arm and the second side arm are respectively and fixedly connected with the lower end face of the first fixing seat, a gap is reserved between the upper end face of the middle arm and the lower end face of the first fixing seat, and the gap is used for providing a deformation space for the long arm and the short arm; one end of the micro-nano measuring needle is vertically connected with the lower end face of the middle arm, and the pointing direction of the measuring needle tip of the micro-nano measuring needle is consistent with the extending direction of the long arm; the piezoelectric ceramic is positioned right below the tail end of the short arm, and when the piezoelectric ceramic deforms, the tail end of the short arm can deform and displace along a direction vertical to the lower end face of the first fixed seat; the non-contact sensor is located right above the tail end of the long arm, and the tail end of the long arm is always located in the measuring range of the non-contact sensor when being deformed and displaced along the direction perpendicular to the lower end face of the first fixed seat.
Further, the first side arm, the second side arm and the middle arm are located on the same plane, an included angle between the first side arm and the long arm is 40-60 degrees, and an included angle between the second side arm and the long arm is 40-60 degrees.
Further, a reinforcing arm is connected between the first side arm and the long arm, and the reinforcing arm, the first side arm and the long arm form an inner isosceles triangle; and a reinforcing arm is connected between the second side arm and the long arm, and the reinforcing arm, the second side arm and the long arm form an inner isosceles triangle in an enclosing manner.
Furthermore, two bumps are arranged on the lower end face of the first fixed seat, the height of each bump is 100-200 μm, one end of the first side arm, which is far away from the middle arm, is fixedly connected to one of the bumps, and one end of the second side arm, which is far away from the middle arm, is fixedly connected to the other bump.
Furthermore, a first through hole is formed in the lower end face of the middle arm, the first through hole is located at the position where the first side arm and the second side arm are connected with the middle arm, and one end of the micro-nano measuring needle extends into the first through hole and then is connected with the middle arm.
Furthermore, a second through hole is formed in the first fixing seat, the second through hole is located right above the tail end of the long arm, and the non-contact sensor is arranged in the second through hole.
Further, the rigidity of the micro-nano measuring needle is greater than that of the linear elastic deformation mechanism.
Further, the lower end face of the piezoelectric ceramic is arranged on the upper end face of a second fixed seat, and the second fixed seat is located below the short arm.
Furthermore, the probe tip of the micro-nano probe is conical, and a hard oxidation coating is coated on the probe tip.
A use method of an active constant-force touch-measuring scanning sensor comprises the following steps: the probe tip of the micro-nano probe is contacted with the measured surface of the measured sample, the driving voltage of the piezoelectric ceramic is adjusted, the upper end surface of the piezoelectric ceramic is elastically contacted with the lower end surface of the short arm, the driving voltage is in dynamic balance, and the micro-nano probe is ensured to be in a continuous balance stable state;
when a measured sample moves along the scanning direction, and the next contact point between the probe tip and the surface of the measured sample is different from the previous contact point, the balance stable state of the micro-nano probe is broken, at the moment, the driving voltage is changed by using the calibration curve of the driving voltage and the displacement of the piezoelectric ceramic, so that the piezoelectric ceramic is deformed, the short arm is deformed and displaced along the direction vertical to the lower end face of the first fixed seat, and the micro-nano probe reaches a new balance stable state.
Compared with the prior art, the invention has at least the following beneficial effects: aiming at the adverse effect of the scanning friction force on high-precision scanning measurement, the invention designs the active controllable constant force type scanning sensor, because the friction force is proportional to the friction coefficient and is in linear positive correlation with the touch force, the friction coefficient is constant, and the smaller the touch force is, the smaller the friction force is. In the scanning process, the tip of a conical measuring probe of the micro-nano measuring probe generates micro-nano displacement along the direction of a conical line, so that when the tail end of a long arm of the linear elastic deformation mechanism generates deformation displacement along the direction vertical to the lower end face of the first fixed seat, the deformation displacement is detected and recorded in real time by the nonlinear sensor. At this time, the piezoelectric ceramics are in elastic contact with the short arm of the linear elastic deformation mechanism. When the tip of the conical measuring probe is detected to the next high point or low point, the micro-nano measuring probe displaces again, so that the long arm or the short arm is also displaced, the touch force is changed, and the friction force is changed. Therefore, the invention utilizes the response characteristics of high precision and high frequency of the piezoelectric ceramics, adjusts the touch force between the touch end of the probe tip of the micro-nano probe and the surface of the sample to be measured in the measurement to be less than the resolution of the output inductor by reasonably driving the piezoelectric ceramics to move, thereby eliminating the deviation of the friction force to the measurement result. In this case, the constant force measurement also ensures that the friction force-caused error in the measurement result can be eliminated in a data processing mode. The invention realizes the active control of the touch force, greatly reduces the measurement deviation caused by the friction force, improves the measurement precision, and has relatively simple structure and low complexity of the measurement system.
Furthermore, the first side arm, the second side arm and the middle arm are located on the same plane, the included angle between the first side arm and the long arm is 40 degrees to 60 degrees, the included angle between the second side arm and the long arm is 40 degrees to 60 degrees, and the design of the angle has the advantages that the linear elastic deformation mechanism has smaller rigidity in the angle range, and the middle arm can generate larger deformation under the same force.
Furthermore, a reinforcing arm is connected between the first side arm and the long arm, and the reinforcing arm, the first side arm and the long arm form an inner isosceles triangle; the reinforcing arm is connected between the second side arm and the long arm, the reinforcing arm, the second side arm and the long arm form an inner isosceles triangle in a surrounding mode, the strength of the linear elastic deformation mechanism can be enhanced through the arrangement of the reinforcing arm, and therefore the service life of the linear elastic deformation mechanism is prolonged.
Furthermore, two convex blocks are arranged on the lower end face of the first fixing seat, the height of each convex block is 100-200 microns, one end, far away from the middle arm, of the first side arm is fixedly connected to one of the convex blocks, one end, far away from the middle arm, of the second side arm is fixedly connected to the other convex block, a deformation space can be reserved for the deformation mechanism through the design of the convex blocks, and the adjustment of the distance between the non-contact sensor and the upper surface of the deformation mechanism is facilitated.
Furthermore, a first through hole is formed in the lower end face of the middle arm and is located at the position where the first side arm and the second side arm are connected with the middle arm, and one end of the micro-nano measuring needle extends into the first through hole and then is connected with the middle arm, so that the micro-nano measuring needle is conveniently mounted and connected with the middle arm, and the scanner has a larger amplification ratio.
Further, the non-contact sensor is arranged in the second through hole, and the second through hole facilitates the connection line of the non-contact sensor to pass through and facilitates the height adjustment of the non-contact sensor in the vertical direction.
Furthermore, the rigidity of the micro-nano measuring needle is greater than that of the linear elastic deformation mechanism, parasitic movement of the scanner in a non-measuring direction is limited by the design, parasitic errors are reduced or eliminated, and measuring accuracy is improved.
Furthermore, the probe tip of the micro-nano probe is conical, and a hard oxidation coating is coated on the probe tip, so that the wear resistance is improved, the smoothness of friction is improved, and the friction force between the probe tip and the surface of the sample to be tested is reduced.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a scanning sensor structure of the present invention;
FIG. 2 is a bottom view of FIG. 1;
FIG. 3 is a schematic structural view of the linear elastic deformation mechanism according to the present invention;
FIG. 4 is a schematic view of a first fixing base of the present invention;
FIG. 5 is a schematic view of the piezoelectric ceramic and the second fixing base thereof;
FIG. 6 is a schematic diagram of a micro-nano stylus in the invention;
FIG. 7 is a block diagram of the active feedback control of the present invention.
In the figure: 1-a non-contact sensor; 2-a first fixed seat; 21-a bump; 22-a second via; 3-a linear elastic deformation mechanism; 31-long arm; 32-short arm; 33-a first side arm; 34-a second side arm; 35-a reinforcing arm; 36-a first via; 4-micro nano measuring needle; 41-measuring needle point; 5-a second fixed seat; 6-piezoelectric ceramics.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 2, the scanning sensor for active constant force touch measurement of the present invention includes a non-contact sensor 1, a first fixing seat 2, a linear elastic deformation mechanism 3, a micro-nano measuring pin 4, a second fixing seat 5, and a piezoelectric ceramic 6. As a specific embodiment of the present invention, as shown in fig. 3, the linear elastic deformation mechanism 3 is designed in a cross shape which is symmetrical and non-orthogonal, specifically, the linear elastic deformation mechanism 3 includes a middle arm, a first side arm 33 and a second side arm 34, the first side arm 33, the second side arm 34 and the middle arm are located in the same plane, the first side arm 33 and the second side arm 34 function to fix the linear elastic deformation mechanism 3, one end of the first side arm 33 is connected to one side of the middle arm, and divides the middle arm into a long arm 31 and a short arm 32 at a connection point, one end of the second side arm 34 is connected to the other side of the middle arm, and the first side arm 33 and the second side arm 34 are symmetrically arranged with respect to the middle arm, and an included angle between the first side arm 33 and the long arm 31 is 40 ° to 60 °, and an included angle between the second side arm 34 and the long arm 31 is 40 ° to 60 °. At such an angle, the linear elastic deformation mechanism 3 has smaller rigidity, and the middle arm can generate larger deformation under the same force. Preferably, a reinforcing arm 35 is connected between the first side arm 33 and the long arm 31, and the reinforcing arm 35, the first side arm 33 and the long arm 31 enclose an inner isosceles triangle; a reinforcing arm 35 is connected between the second side arm 34 and the long arm 31, the reinforcing arm 35, the second side arm 34 and the long arm 31 form an inner isosceles triangle, and the strength of the linear elastic deformation mechanism 3 can be enhanced by the arrangement of the reinforcing arm 35.
As a specific embodiment of the present invention, the linear elastic deformation mechanism 3 is formed by directly cutting and processing a piece of sheet material, and the linear elastic deformation mechanism 3 has high flexibility to realize micro-nano-scale deformation under a small touch force.
As shown in fig. 1, 2 and 4, the first side arm 33 and the second side arm 34 are respectively and fixedly connected to the lower end surface of the first fixing base 2, and a gap is reserved between the upper end surface of the middle arm and the lower end surface of the first fixing base 2, and the gap is used for providing a deformation space for the long arm 31 and the short arm 32. Specifically, as shown in fig. 4, two bumps 21 are disposed on the lower end surface of the first fixing base 2, the height of each bump 21 is 100 μm-200 μm, one end of the first side arm 33 away from the middle arm is fixedly connected to one of the bumps 21 by a strong adhesive, and one end of the second side arm 34 away from the middle arm is fixedly connected to the other bump 21 by a strong adhesive, and the bonding strength meets the requirements of the scanner on micron-scale and higher precision. The ends of the first side arm 33 and the second side arm 34 far away from the middle arm are both constraint ends, and the ends of the two symmetrical sides are constrained, so that the middle arm of the linear elastic deformation mechanism 3 only has 1 degree of freedom of rotation and 1 degree of freedom of displacement.
Referring to fig. 1, 2, 3 and 6, a first through hole 36 is formed in the lower end face of the middle arm of the linear elastic deformation mechanism 3, the first through hole 36 is located at the position where the first side arm 33 and the second side arm 34 are connected with the middle arm, one end of the micro-nano measuring needle 4 extends into the first through hole 36 and then is connected with the middle arm, and the direction of the needle tip 41 of the micro-nano measuring needle 4 is the same as the extending direction of the long arm 31. That is, when mounting, the tip of the conical stylus tip 41 points in the direction of the long axis of the linear elastic deformation mechanism 3, and the axis thereof coincides with the symmetrical axial direction of the linear elastic deformation mechanism 3 to avoid non-axial displacement. Opening the first through hole 36 at the position where the first side arm 33 and the second side arm 34 meet the middle arm enables the scanner to have a larger magnification ratio. As a preferred embodiment of the present invention, since the precision of the tip is damaged by the continuous friction between the tapered stylus tip 41 of the micro-nano stylus 4 and the surface of the sample during the measurement, the hard oxide coating is coated on the stylus tip 41, which is beneficial to improving the wear resistance, improving the smoothness of the friction, and reducing the friction force between the stylus tip and the surface of the sample to be measured. In addition, the rigidity of the micro-nano measuring needle 4 is greater than that of the linear elastic deformation mechanism 3, and the rigidity of the micro-nano measuring needle 4 is greater than that of the linear elastic deformation mechanism 3, so that parasitic movement of the scanner in a non-measuring direction is limited by the design, parasitic errors are reduced or eliminated, and the measuring precision is improved.
Referring to fig. 1, 2 and 5, the lower end surface of the piezoelectric ceramic 6 is mounted on the upper end surface of the second fixing base 5, the second fixing base 5 is located below the short arm 32, the piezoelectric ceramic 6 is located under the end of the short arm 32, that is, the piezoelectric ceramic 6 is located under the end of the short arm 32 far away from the long arm 31, and when the piezoelectric ceramic 6 deforms, the end of the short arm 32 can deform and displace along the direction perpendicular to the lower end surface of the first fixing base 2. In a preferred embodiment of the present invention, the upper end surface of the piezoelectric ceramic 6 is in contact with the lower end surface of the short arm 32 without deformation.
The driving action of the piezoelectric ceramics is the core of the working principle of the scanner. The piezoelectric ceramic 6 generates upward (or downward) instantaneous displacement in the direction perpendicular to the fixed end face of the second fixed base 5 under the regulation of the positive and negative driving voltages, so that the driving short arm 32 generates upward (or downward) displacement in the direction perpendicular to the lower end face of the first fixed base 2. Due to the transmission effect of the linear elastic deformation mechanism 3, the tail end of the long arm 31 generates downward (or upward) displacement, the direction is opposite to that of the short arm 32, and the conical probe tip 41 end of the micro-nano probe 4 generates leftward (or right) displacement along the conical line direction.
The piezoelectric ceramic is elastically contacted with the tail end of the short arm, and the probe is in an elastic balance state in the state. Under the drive of positive and negative driving voltage, the piezoelectric ceramic generates continuous displacement, so that the short arm generates regular displacement, and the tail end of the long arm and the conical tip of the micro-nano measuring needle are driven to regularly move.
As shown in fig. 1, 2 and 4, a second through hole 22 is formed in the first fixing base 2, and the second through hole 22 is used for mounting the non-contact sensor 1. Specifically, the second through hole 22 is located right above the end of the long arm 31, that is, the non-contact sensor 1 is located right above the end of the long arm 31 far away from the short arm 32, the non-contact sensor 1 is installed in the second through hole 22, and the height of the non-contact sensor 1 in the second through hole 22 can be adjusted; when the tail end of the long arm 31 generates deformation displacement along the direction vertical to the lower end face of the first fixed seat 2, the tail end is always in the measuring range of the non-contact sensor 1. That is, the distance between the measuring end surface (lower end surface) of the non-contact sensor 1 and the upper surface of the long arm 31 is adjusted during installation so that the perpendicular distance between the measuring end surface (lower end surface) and the upper surface is within the range of the contact sensor 1, thereby ensuring that the non-contact sensor 1 can always measure the displacement generated at the end of the long arm 31, that is, the displacement in the vertical direction of the end of the long arm 31 is always within the measuring range of the sensor 1.
When the active constant-force touch-measuring scanning sensor is used for scanning and measuring the appearance of a sample, the axis of the conical probe tip 41 of the micro-nano probe 4 is vertical to the surface of the sample, namely the axis is consistent with the normal direction of the appearance of the sample. The height of the sample surface topography is fluctuated, the probe needle point 41 is guided to generate the same displacement, so that the micro-nano probe 4 generates the displacement consistent with the normal direction of the sample topography, the corresponding displacement is generated at the tail end of the long arm 31 and the tail end of the short arm 32 of the linear elastic deformation mechanism 3, and the displacement at the tail end of the long arm 31 is detected by the non-contact sensor 1 in real time.
When the measurement is started, the probe tip 41 of the micro-nano probe 4 is contacted with the measured surface of the measured sample, and the driving voltage of the piezoelectric ceramic 6 is adjusted, so that the upper end surface of the piezoelectric ceramic 6 is elastically contacted with the lower end surface of the short arm 32, and the driving voltage is in dynamic balance, thereby ensuring that the micro-nano probe 4 is in a continuous balanced and stable state;
when the measured sample moves along the scanning direction, the tip of the conical measuring needle tip 41 is higher or lower than the next touch point on the surface of the measured sample, namely is not the same as the previous touch point, the equilibrium state of the micro-nano measuring needle 4 is broken, the displacement deviating from the equilibrium state is generated, the friction force is changed, and the deviation factor of the friction force is coupled in the measurement result. At the moment, the driving voltage is changed by utilizing a calibration curve of the driving voltage and the displacement of the piezoelectric ceramic 6, so that the piezoelectric ceramic 6 deforms, the short arm 32 deforms and displaces along the direction vertical to the lower end face of the first fixed seat 2, the tip of the micro-nano measuring needle 4 reaches a new balance state, a constant contact force is kept between the tip of the micro-nano measuring needle 4 and the surface of the sample to be measured, and the contact force of a new contact point is smaller than the resolution of the non-contact sensor 1, so that the measurement distortion caused by friction force is improved.
As shown in the feedback control block diagram of fig. 6, the active constant force sensing principle of the scanning sensor:
and calibrating the proportional relation among the displacement of the probe tip, the displacement of the tail end of the long arm and the displacement of the tail end of the short arm, so that the quantitative conversion among the three displacement quantities can be carried out to be applied to a feedback control link.
In the scanning process, the micro-nano level displacement along the cone line direction is generated at the end 41 of the conical measuring needle of the micro-nano measuring needle 4, so that the tail end of the long arm 31 of the linear elastic deformation mechanism 3 generates the deformation displacement along the direction vertical to the lower end face of the first fixed seat 2, and the non-linear sensor 1 detects and records the deformation displacement in real time. The piezoelectric ceramics 6 at this time are already in elastic contact with the short arms 32 of the linear elastic deformation mechanism 3. When the tip 41 end of the conical measuring needle detects the next high point or low point, the micro-nano measuring needle 4 displaces again, and the long arm 31 or the short arm 32 also displaces, so that the touch force changes and the friction force changes.
In order to eliminate the influence of the frictional force, the displacement amount of the long arm 31 detected by the non-contact sensor 1 at this time is compared with the displacement amount before the change, and a displacement difference is obtained. According to a calibrated displacement proportion curve among the displacement of the tip of the measuring probe, the displacement of the tail end of the long arm and the displacement of the tail end of the short arm, the displacement difference is converted into the displacement difference of the tail end of the short arm 32, and the displacement difference is converted into driving voltage again through a voltage-displacement standard curve chart of the piezoelectric ceramic 6, so that the piezoelectric ceramic 6 generates corresponding displacement to change the elastic contact state between the piezoelectric ceramic and the short arm 32, and the contact force between the tip 41 end of the conical measuring probe and a measured sample is eliminated. From the viewpoint of the resolution of the sensor 1, the touch force is not eliminated, but is small enough that the amount of displacement of the tip of the long arm converted from the stylus displacement is smaller than the resolution of the non-contact sensor 1 and thus cannot be detected. Since the fixed frequency of the piezoelectric ceramic 6 is extremely high, the response frequency is sufficiently large, and thus the transient adjustment effect can be achieved.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a scanning sensor that survey is touched to active constant force which characterized in that: the device comprises a non-contact sensor (1), a first fixed seat (2), a linear elastic deformation mechanism (3), a micro-nano measuring needle (4) and piezoelectric ceramics (6); the linear elastic deformation mechanism (3) comprises a middle arm, a first side arm (33) and a second side arm (34), one end of the first side arm (33) is connected to one side of the middle arm, the middle arm is divided into a long arm (31) and a short arm (32) at a connecting point, one end of the second side arm (34) is connected to the other side of the middle arm, and the first side arm (33) and the second side arm (34) are symmetrically arranged relative to the middle arm;
the first side arm (33) and the second side arm (34) are respectively and fixedly connected with the lower end face of the first fixing seat (2), a gap is reserved between the upper end face of the middle arm and the lower end face of the first fixing seat (2), and the gap is used for providing a deformation space for the long arm (31) and the short arm (32); one end of the micro-nano measuring needle (4) is vertically connected with the lower end face of the middle arm, and the pointing direction of a measuring needle point (41) of the micro-nano measuring needle (4) is consistent with the extending direction of the long arm (31); the piezoelectric ceramics (6) are positioned right below the tail end of the short arm (32), and when the piezoelectric ceramics (6) deform, the tail end of the short arm (32) can deform and displace along a direction vertical to the lower end face of the first fixed seat (2); the non-contact sensor (1) is located right above the tail end of the long arm (31), and the tail end of the long arm (31) is always located in the measuring range of the non-contact sensor (1) when being deformed and displaced along the direction perpendicular to the lower end face of the first fixed seat (2).
2. The active constant force tactile scanning sensor of claim 1, wherein: the first side arm (33), the second side arm (34) and the middle arm are located on the same plane, an included angle between the first side arm (33) and the long arm (31) is 40-60 degrees, and an included angle between the second side arm (34) and the long arm (31) is 40-60 degrees.
3. The active constant force tactile scanning sensor of claim 2, wherein: a reinforcing arm (35) is connected between the first side arm (33) and the long arm (31), and the reinforcing arm (35), the first side arm (33) and the long arm (31) enclose an inner isosceles triangle; a reinforcing arm (35) is connected between the second side arm (34) and the long arm (31), and the reinforcing arm (35), the second side arm (34) and the long arm (31) enclose an inner isosceles triangle.
4. The active constant force tactile scanning sensor of claim 1, wherein: two bumps (21) are arranged on the lower end face of the first fixed seat (2), the height of each bump (21) is 100-200 microns, one end, far away from the middle arm, of the first side arm (33) is fixedly connected to one bump (21), and one end, far away from the middle arm, of the second side arm (34) is fixedly connected to the other bump (21).
5. The active constant force tactile scanning sensor of claim 1, wherein: the lower end face of the middle arm is provided with a first through hole (36), the first through hole (36) is located at the position where the first side arm (33) and the second side arm (34) are connected with the middle arm, and one end of the micro-nano measuring needle (4) extends into the first through hole (36) and then is connected with the middle arm.
6. The active constant force tactile scanning sensor of claim 1, wherein: a second through hole (22) is formed in the first fixing seat (2), the second through hole (22) is located right above the tail end of the long arm (31), and the non-contact sensor (1) is arranged in the second through hole (22).
7. The active constant force tactile scanning sensor of claim 1, wherein: the rigidity of the micro-nano measuring needle (4) is greater than that of the linear elastic deformation mechanism (3).
8. The active constant force tactile scanning sensor of claim 1, wherein: the lower end face of the piezoelectric ceramic (6) is arranged on the upper end face of the second fixing seat (5), and the second fixing seat (5) is located below the short arm (32).
9. The active constant force tactile scanning sensor of claim 1, wherein: the probe tip (41) of the micro-nano probe (4) is conical, and a hard oxidation coating is coated on the probe tip (41).
10. The method of using an active constant force tactile scanning sensor according to any one of claims 1 to 9, wherein: enabling a probe needle point (41) of the micro-nano probe (4) to be in contact with a measured surface of a measured sample, adjusting the driving voltage of the piezoelectric ceramics (6), enabling the upper end surface of the piezoelectric ceramics (6) to be in elastic contact with the lower end surface of the short arm (32), enabling the driving voltage to be in dynamic balance, and ensuring that the micro-nano probe (4) is in a continuous balance stable state at the moment;
when a measured sample moves along the scanning direction, and the next contact point between the probe tip (41) and the surface of the measured sample is different from the previous contact point, the balance stable state of the micro-nano probe (4) is broken, at the moment, the driving voltage is changed by utilizing a calibration curve of the driving voltage and the displacement of the piezoelectric ceramic (6), so that the piezoelectric ceramic (6) is deformed, the short arm (32) is deformed and displaced along the direction vertical to the lower end face of the first fixed seat (2), and the micro-nano probe (4) achieves a new balance stable state.
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| CN201910889258.4A CN110631505B (en) | 2019-09-19 | 2019-09-19 | Active constant-force touch-measuring scanning sensor and application method thereof |
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| CN201910889258.4A CN110631505B (en) | 2019-09-19 | 2019-09-19 | Active constant-force touch-measuring scanning sensor and application method thereof |
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