CN1975322A - Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head - Google Patents
Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head Download PDFInfo
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- CN1975322A CN1975322A CN 200610129814 CN200610129814A CN1975322A CN 1975322 A CN1975322 A CN 1975322A CN 200610129814 CN200610129814 CN 200610129814 CN 200610129814 A CN200610129814 A CN 200610129814A CN 1975322 A CN1975322 A CN 1975322A
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Abstract
This invention disclosed a measuring equipment which consists of a nanometer measuring machine and a tiny feeling gauge head. The feeling gauge head was fixed on the machine by a plank. The measuring range of scanning probe micro-technique was improved by this equipment, the range of object by other measuring means was widened; it could manage to measure some micro-geometric senses including dimension, displacement, etc. The measuring precision was improved by this equipment.
Description
Technical field
The present invention relates to a kind of micro-nano field tests.Particularly relate to a kind of the realization comprising little power, displacement, size, parameters such as shape characteristic are at the measurement of interior microstructure geometric sense and the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head of sign.
Background technology
Developing rapidly of micro-nano process technology in recent years, device feature size constantly reduces with related with it tolerance, and its shape and structure complexity constantly increases, this just proposes higher requirement to the detection means of geometric sense in the process.In semi-conductor industry, the device accuracy of detection of requirement has reached sub-micron or nanometer level, and the scope of detected object also expands the micro element with special or labyrinth to.This has just proposed urgent requirement to measuring method and the means with the following uncertainty of 100nm.
Present detection means mainly contains three kinds of optical measuring technique, scanning probe microscopy and measurement of coordinates technology, optical measurement means such as computer vision technique, micro-interference technology, focusing measuring technique etc., owing to there is diffraction limit, the lateral resolution of system is by the numerical aperture decision of object lens, so generally in micron dimension.This has also just determined them can not differentiate shape characteristic trickleer below the micron.Simultaneously, optical means is some specific three-dimensional appearance of energy measurement not, and as the aperture of object edge, information such as the directivity of body surface and relative dimensions are so can not realize real three-dimensional measurement.With atomic force microscope and scanning tunnel microscope is that the scan-probe technology of representative is utilized microeffect, detect control needle point and the little electric current of sample surfaces and the size of little power, sample shown scan, obtain the shape characteristic and the character of surface of sample, has nano level resolving power, but be easy to be subjected to the interference of measurement environment, and therefore measurement result is produced bigger influence, the measurement range of scanning probe microscopy has only tens microns simultaneously, limited the sample scope that microstructure is measured greatly, in addition, also can't measure for the special constructions such as microstructure of big depth-to-width ratio.The measurement of coordinates technology is exactly to be measuring table with traditional coordinate measuring machine, in conjunction with trigger-type or analog gauge head measured workpiece is detected, but the accuracy of detection of traditional measurement of coordinates technology can only reach micron or hundreds of nanometer, can not satisfy the Testing requirement that the micro-nano process technology develops rapidly.
Therefore, have on a large scale, high precision, development research is used to measure the coordinate measuring method and the corresponding device thereof of three-dimensional dimension, position and other shape characteristics, becomes the main research work of micro element and microstructure field tests.This class research mainly comprises two-part content, the one, for have on a large scale, the exploitation of high-precision coordinate setting instrument; The 2nd, to the research and development of high precision, micro-dimension sensor.
Summary of the invention
Technical matters to be solved by this invention is, provides a kind of and realizes comprising little power, and displacement, size, parameters such as shape characteristic are at the measurement of interior microstructure geometric sense and the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head of sign.
The technical solution adopted in the present invention is: a kind of little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head, include nano-measuring machine as the location survey platform, also be provided with the little sense of touch gauge head system that detects based on pressure drag that can measure the geometric sense of micro element and microstructure, described little sense of touch gauge head system is the top that is fixed on nano-measuring machine by the fixed support that is arranged on nano-measuring machine top.
Described nano-measuring machine as the location survey platform includes: automatically controlled part; Be used to place the glass objective table of testee; Arrangement meets directions X interferometer, Y direction interferometer, the Z direction interferometer of Abbe measuring principle, and the zero thermal expansion support that supports directions X interferometer, Y direction interferometer, Z direction interferometer; Be separately positioned on two angular transducers on the nano-measuring machine metrology framework and that link to each other with the electric control part branch.
Described little sense of touch gauge head system is a three-dimensional micro-contact gauge head system, include: by framework, center connector, the end suspended structure that beam that the other end links to each other with the center connector forms that links to each other with framework, and by Connection Block, be formed on the measuring staff of Connection Block upper end and be formed on the gauge head that the survey end of measuring staff end forms and constitute, the Connection Block of its gauge head is fixedly installed on the center connector of suspended structure.
Described center connector includes center contiguous block and the piece that is located by connecting that is fixed on the contiguous block of center, the central part of piece of being located by connecting is formed with the internal thread hole identical with the Connection Block diameter of gauge head, Connection Block bottom at gauge head forms the external thread that is complementary with internal thread hole, and the Connection Block of gauge head is connected with external thread by internal thread hole with the piece that is located by connecting.
The central part of described center connector is provided with locating ring, and the internal diameter of locating ring is identical with the external diameter of the Connection Block of gauge head, and the Connection Block of gauge head is embedded in the locating ring.
Described suspended structure is selected a kind of in four girder constructions, eight girder constructions, triangular structure, edge girder structure, diagonal beam structure, the center diagonal beam structure for use.
The axial displacement of surveying end in the described gauge head system detects the mode that adopts electric capacity and pressure drag to combine, concrete structure is: do not install in suspended structure on the side of gauge head and be connected with the electric capacity backboard, the electric capacity backboard is connected with the signal input part of automatically controlled part by lead.
Described gauge head system can also adopt the three-dimensional pressure drag that detects to arrange and the electric bridge detection mode, concrete structure is: be respectively arranged with resistance on 4 beams of suspended structure, make each direction of measurement adopt 4 resistance differential detection, arrange according to pressure drag simultaneously and be provided with the Hui Sitong full-bridge circuit, the input termination power of favour stone full-bridge circuit, output terminal is connected with the signal input part of automatically controlled part.
Little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head of the present invention, overcome with atomic force microscope and scanning tunnel microscope is the limitation of scanning probe microscopy on measurement range of representative, expanded the scope of the measuring object of other measurement means such as optical measurement, realized measurement and sign the microstructure geometric sense that comprises parameters such as little power, displacement, size, shape characteristic.Solved in the active demand of little processing and manufacturing and microstructure field tests the method and apparatus of geometric measurement.Simultaneously, the present invention has improved the precision of measuring on the basis of traditional measurement of coordinates technology, measurement range is extended to microscopic fields.
Description of drawings
Fig. 1 is the structural representation of microstructure geometrical dimensional measurement apparatus of the present invention;
Fig. 2 is little sense of touch gauge head system architecture synoptic diagram of the present invention;
Fig. 3 is the little sense of touch gauge head of a present invention system decomposition structural representation:
Fig. 4 is the present invention is provided with locating ring on the suspended structure surface a structural representation;
Fig. 5 a, Fig. 5 b, Fig. 5 c, Fig. 5 d, Fig. 5 e, Fig. 5 f are the structural representations of six kinds of suspended structures of the little sense of touch gauge head of the present invention system;
Fig. 6 is that electric capacity of the present invention detects the structural representation that combines with pressure drag;
Fig. 7 is the structural representation of distribution of resistance on the suspended structure of the present invention;
Fig. 8 a, Fig. 8 b, Fig. 8 c are that three-axis piezoresistance detects Hui Sitong full-bridge circuit schematic diagram among Fig. 7;
Fig. 9 is a microstructure volume coordinate instrumentation plan of the present invention;
Figure 10 is a microstructure appearance mark scanning instrumentation plan of the present invention.
Wherein:
1:X direction interferometer 2:Y direction interferometer
3:Z direction interferometer 4: zero thermal expansion support
5: little sense of touch gauge head system 6: contact point
7: fixed support 8: the glass objective table
9: center connector 10: beam
11: framework 12: survey end
13: measuring staff 14: Connection Block
15: gauge head 16: internal thread hole
17: external thread 18: locating ring
19: suspended structure 20: the electric capacity backboard
21: measured object 22: mobile platform
23: resistance
Embodiment
Below in conjunction with embodiment the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head of the present invention is made a detailed description.
Little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head of the present invention, include nano-measuring machine as the location survey platform, also be provided with the little sense of touch gauge head system 5 that detects based on pressure drag that can measure the geometric sense of micro element and microstructure, described little sense of touch gauge head system 5 is the top that is fixed on nano-measuring machine by the fixed support 7 that is arranged on nano-measuring machine top.
As shown in Figure 1, described nano-measuring machine as the location survey platform is high precision, large-scale nano-measuring machine, includes: automatically controlled part; Be used to place the glass objective table 8 of testee; The light that sends accumulates in directions X interferometer 1, Y direction interferometer 2, the Z direction interferometer 3 that arrangement on the contact point 6 of little sense of touch gauge head system 5 and testee meets the Abbe measuring principle from X, Y, three directions of Z respectively, and the zero thermal expansion support 4 that supports directions X interferometer 1, Y direction interferometer 2, Z direction interferometer 3; Be separately positioned on two angular transducers on the nano-measuring machine metrology framework and that link to each other with the electric control part branch.Thereby realize the location and the measurement of metering property.
As shown in Figure 2, described little sense of touch gauge head system 5 is a three-dimensional micro-contact gauge head system, include: by framework 11, center connector 9, the end suspended structure 19 that beam 10 that the other end links to each other with center connector 9 forms that links to each other with framework 11, and by Connection Block 14, be formed on the measuring staff 13 of Connection Block 14 upper ends and be formed on the gauge head 15 that the survey end 12 of measuring staff 13 ends forms and constitute, the Connection Block 14 of its gauge head 15 is fixedly installed on the center connector 9 of suspended structure 19.
Wherein, measuring staff and survey end are as the displacement transfer unit, and the beam in the suspended structure is as responsive detecting unit.The displacement of surveying end is delivered to the center connector of suspended structure, causes that the stress of the sensitive element beam/film in the suspended structure changes, and is distributed in the variation that pressure drag on the sensitive element detects stress by what the back will be narrated.
As shown in Figure 3, described center connector 9 includes center contiguous block 9a and the piece 9b that is located by connecting that is fixed on the contiguous block 9a of center, the central part of piece 9b of being located by connecting is formed with the internal thread hole 16 identical with Connection Block 14 diameters of gauge head 15, forms the external thread 17 that is complementary with internal thread hole 16 in Connection Block 14 bottoms of gauge head 15.Wherein, internal thread hole 16 is to adopt micro-processing technology, in the central part perforate of piece 9b that is located by connecting, utilizes Ultraprecision Machining machining screw cover then.The Connection Block 14 of gauge head 15 is connected with external thread 17 by internal thread hole 16 with the piece 9b that is located by connecting.Realized the self-align of measuring staff 13 and, improved the verticality of location and the bearing accuracy of measuring staff 13 the centering on center connector 9 surfaces.
As shown in Figure 4, the central part of described center connector 9 is provided with locating ring 18, and locating ring 18 is the rings that utilize micro-processing method to be carved on the surface of center connector 9.The internal diameter of locating ring 18 is identical with the external diameter of the Connection Block 14 of gauge head 15, and the Connection Block 14 of gauge head 15 is embedded in the locating ring 18.Improved measuring staff and suspended structure sticking and the time accurate positioning.That is, improved the bearing accuracy of measuring staff.
Shown in Fig. 5 a～Fig. 5 f, described suspended structure 19 can select for use four girder constructions, eight girder constructions, triangular structure, edge girder structure, diagonal beam structure, center to corner structure.
Wherein: four beams and eight girder constructions are similar substantially, and the stress distribution linearity is good, and the coupling between the test signal is less, but the rigidity of eight girder constructions is littler; The triangle suspended structure has adopted the design of folding beam, the folding beam can make three equal stiffness by the parameter of adjusting thick bar, have the highest safety coefficient simultaneously and,, not too be fit to multidimensional measure still because the coupling between the test signal is serious than uniform stress distribution; Phase mutual interference minimum between the edge girder structured testing signal, detection sensitivity and stress distribution and four girder constructions are similar; Can obtain long beam under the diagonal beam situation that frame size is fixed outside, but owing to process the influence of the angle that causes, pressure drag can not be arranged in the zone of STRESS VARIATION maximum, thereby has reduced detection sensitivity; And the beam length of center diagonal beam is the shortest, and safety coefficient is minimum, is not suitable for large range measuring.Thus, need select suitable suspended structure for use according to different testing requirements.
As shown in Figure 6, the axial displacement of surveying end in the described gauge head system 5 detects the mode that adopts electric capacity and pressure drag to combine, and has subtracted few between centers signal coupling.Concrete structure is: do not install at the center of suspended structure 19 connector 9 on the side of gauge head 15 and be connected with electric capacity backboard 20, constitute capacitive detecting structure, electric capacity backboard 20 is connected with the signal input part of automatically controlled part by lead.When the survey end is subjected to axial load, the center connector has corresponding displacement, and electric capacity changes, and realizes surveying the detection of end along the axially-movable of measuring staff, contrast by the axial measurement result that detects with pressure drag has reduced the between centers coupled problem in the measuring process.Solved the coupled problem of in-plane displancement and axial displacement signal effectively.
Shown in Fig. 7, Fig. 8 a, Fig. 8 b, Fig. 8 c, described gauge head system 5 can also adopt the three-dimensional pressure drag that detects to arrange and the electric bridge detection mode, concrete structure is: be respectively arranged with resistance on 4 beams 10 of suspended structure 19, be provided with 12 pressure drags altogether, make each direction of measurement adopt 4 resistance differential detection, obtain higher measurement sensitivity, and reduced the interference between the different directions test signal.Arrange according to pressure drag simultaneously and be provided with the Hui Sitong full-bridge circuit, the input termination power S of Hui Sitong full-bridge circuit, output terminals A is connected with the signal input part of automatically controlled part.This arrangement is when gauge head is subjected to some side's loads, two other detection resistance does not change, and this direction detection changes in resistance becomes opposite tendency in twos, by Hui Sitong full-bridge circuit output differential wave, realized the differential detection of pressure drag, obtain higher measurement sensitivity, and reduced the interference between the different directions test signal, and the interference of environmental change such as temperature and air pressure.
As shown in Figure 9, an embodiment of measurement of coordinates of the present invention, electromagnetic driver and piezoelectric ceramic actuator by nano-measuring machine, step pitch with minimum 1nm makes objective table along three direction fine motions, and fixing sample touches when surveying end on the objective table, center connector generation translation and rotation, beam is bent, pressure drag on the beam changes, and corresponding variation also takes place the output voltage of Wheatstone bridge, and the amplitude of variation and the displacement constraint that applies are directly proportional.The objective table change in displacement of utilizing three direction laser interferometer of nano-measuring machine to read is set up the relation that it surveys the output of end skew/voltage, the geometric measurement function of implementation structure.
As shown in figure 10, embodiment of microstructure appearance scanning survey of the present invention, different with the microstructure measurement of coordinates is, when gauge head contacts with sample, gauge head only detects the load variations of Z axle, by the survey end skew/voltage output relation of measuring, set a survey end and sample and touch the threshold value of to a certain degree descending the gauge head output voltage, and feed back to nano-measuring machine after this value is amplified to 10V, make nano-measuring machine control stage movement, the exposure level of gauge head and measured object is remained unchanged.On this basis, control nano-measuring machine motion scans and writes down the coordinate of each analyzing spot to measured object, reappears the pattern that shows of testee then with software, realizes the pattern of measured object is characterized.
Employed nano-measuring machine is existing known nano-measuring machine among the present invention.
The present invention is accurate in order to narrate, convenient, suspension is that example is described in detail with four girder constructions all, but four girder constructions, triangular structure, edge girder structure, diagonal beam structure, center contact gauge head and micro-structural 3 D geometry test system to suitable equally the declining with the similar pressure drag of structure of suspended structures such as corner structure, eight girder constructions, all within invention scope.The present invention can produce by using for reference this paper disclosure all combinations and method open and that disclose, although combination of the present invention and method are described by detailed implementation process, but those skilled in the art obviously can be spliced the described method and apparatus of the application in not breaking away from content of the present invention, spirit and scope or change, or increase and decrease some parts, more particularly, the replacement that all are similar and change apparent to those skilled in the artly, they are regarded as being included among spirit of the present invention, scope and the content.
Claims (8)
1. little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head, it is characterized in that, include nano-measuring machine as the location survey platform, also be provided with the little sense of touch gauge head system (5) that detects based on pressure drag that can measure the geometric sense of micro element and microstructure, described little sense of touch gauge head system (5) is the top that is fixed on nano-measuring machine by the fixed support (7) that is arranged on nano-measuring machine top.
2. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 1 is characterized in that, described nano-measuring machine as the location survey platform is high precision, large-scale nano-measuring machine, includes: automatically controlled part; Be used to place the glass objective table (8) of testee; The light that sends accumulates in directions X interferometer (1), Y direction interferometer (2), the Z direction interferometer (3) that arrangement on the contact point (6) of little sense of touch gauge head system (5) and testee meets the Abbe measuring principle from X, Y, three directions of Z respectively, and the zero thermal expansion support (4) that supports directions X interferometer (1), Y direction interferometer (2), Z direction interferometer (3); Be separately positioned on two angular transducers on the nano-measuring machine metrology framework and that link to each other with the electric control part branch.Thereby realize the location and the measurement of metering property.
3. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 1, it is characterized in that, described little sense of touch gauge head system (5) is a three-dimensional micro-contact gauge head system, include: by framework (11), center connector (9), the one end suspended structure (19) that beam (10) that the other end links to each other with center connector (9) is formed that links to each other with framework (11), and by Connection Block (14), be formed on the measuring staff (13) of Connection Block (14) upper end and be formed on gauge head (15) formation that the survey end (12) of measuring staff (13) end is formed, the Connection Block (14) of its gauge head (15) is fixedly installed on the center connector (9) of suspended structure (19).
4. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 3, it is characterized in that, described center connector (9) includes center contiguous block (9a) and is fixed on the piece that is located by connecting (9b) on the center contiguous block (9a), the central part of piece (9b) of being located by connecting is formed with the internal thread hole (16) identical with Connection Block (14) diameter of gauge head (15), Connection Block (14) bottom in gauge head (15) forms the external thread (17) that is complementary with internal thread hole (16), and the Connection Block (14) of gauge head (15) is connected with external thread (17) by internal thread hole (16) with the piece that is located by connecting (9b).Realized the self-align of measuring staff 13 and, improved the verticality of location and the degree of stability of measuring staff 13 the centering on center connector 9 surfaces.
5. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 3, it is characterized in that, the central part of described center connector (9) is provided with locating ring (18), the internal diameter of locating ring (18) is identical with the external diameter of the Connection Block (14) of gauge head (15), and the Connection Block (14) of gauge head (15) is embedded in the locating ring (18).Improved the bearing accuracy of measuring staff.
6. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 3, it is characterized in that described suspended structure (19) is selected a kind of in four girder constructions, eight girder constructions, triangular structure, edge girder structure, diagonal beam structure, the center diagonal beam structure for use.
7. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 1, it is characterized in that, the axial displacement of surveying end in the described gauge head system (5) detects the mode that adopts electric capacity and pressure drag to combine, concrete structure is: do not install in suspended structure (19) on the side of gauge head (15) and be connected with electric capacity backboard (20), electric capacity backboard (20) is connected with the signal input part of automatically controlled part by lead.Solved the coupled problem of in-plane displancement and axial displacement signal effectively.
8. the little geometrical dimensional measurement apparatus based on nano-measuring machine and little sense of touch gauge head according to claim 1, it is characterized in that, described gauge head system (5) can also adopt the three-dimensional pressure drag that detects to arrange and the electric bridge detection mode, concrete structure is: be respectively arranged with resistance on 4 beams (10) of suspended structure (19), be provided with 12 pressure drags altogether, make each direction of measurement adopt 4 resistance differential detection, obtain higher measurement sensitivity, and reduced the interference between the different directions test signal.Arrange simultaneously and be provided with the Hui Sitong full-bridge circuit according to pressure drag, the input termination power of Hui Sitong full-bridge circuit, output terminal is connected with the signal input part of automatically controlled part, exports differential wave and reduces the interference of environmental changes such as temperature and air pressure.
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