CN103616127A - Source tracing calibrating device and source tracing method for micro cantilever beam elastic constant - Google Patents
Source tracing calibrating device and source tracing method for micro cantilever beam elastic constant Download PDFInfo
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Abstract
The invention provides a source tracing calibrating device for a micro cantilever beam elastic constant. The source tracing calibrating device structurally comprises a marble frame, a nanometer balance, a micro cantilever beam, a three-dimensional micro-nano displacement platform, a force loading rod, a polarization difference interferometer, an instrument controller, a computer and measuring and controlling software. The invention meanwhile provides a source tracing method of the source tracing calibrating device for the micro cantilever beam elastic constant. The source tracing calibrating device and source tracing method have the advantages that an elastic constant value can be directly traced to the international system of unit SI when the device is used, micro light spots, formed on the upper surface of the free end of the micro cantilever beam, of measuring light beams of the polarization difference interferometer completely coincide with force loading points when the lower surface of the free end of the micro cantilever beam is loaded by the force loading rod on the nanometer balance through the device, so that the Abbe arm is zero, the Abbe principle of displacement measuring is abided by, generation of Abbe errors is avoided, and the measurement accuracy of a source tracing instrument is ensured. Uniformity, reliability and comparability of micro force measuring by using the micro cantilever beam in different labs can be ensured.
Description
Technical field
The invention belongs to nanosecond science and technology and metrological crossing domain, relate to a kind of trace to the source caliberating device and source tracing method of micro-cantilever elastic constant.
Background technology
The length and width of micro-cantilever and thick three-dimensional dimension are in several nanometers (nano-meter) to hundreds of micron (micro-meter) scope, and in use, general one end is fixed, and the other end freely, forms a flexible member.Micro-cantilever is the sensing element on a kind of important micro/nano-scale, and the power sensor of being often used as is surveyed small physics, chemistry and biological agent power, is also used to measure the physical quantitys such as temperature, dielectric viscosity.Micro-cantilever, as elasticity sensing element, is followed Hooke's law, i.e. F=k Δ z, and wherein, k is the elastic constant of micro-cantilever, Δ z is free-ended displacement.Visible, the dynamometry accuracy of micro-cantilever depends on the Measurement accuracy of elastic constant k.
For this reason, scholars have proposed the measurement of several different methods for micro-cantilever elastic constant, are mainly divided into static method and the large class of dynamic method two: static method has computing method, with reference to beam method, Loading Method etc.; Dynamic method has quality additive process, Sader method and thermonoise standardization.But by the end of at present, these methods are the theoretical formula of deriving according to the material physical properties of micro-cantilever and size, then measure elastic constant in conjunction with experiment, be not yet traceable to International System of Units SI.Aerodynamic data between this each laboratory that makes to use micro-cantilever to carry out micro-power detection is difficult to comparison because there is no unified normative reference, even cause the misunderstanding to objective phenomenon.Micro-cantilever elastic constant is traceable to the task of top priority that international unit SI has become micro-cantilever application.
Aspect the demarcation of tracing to the source of micro-cantilever elastic constant, scholars have also proposed some schemes, as Germany technology physical study institute (Physikalisch-Technische Bundesanstalt:PTB) and Korea S's standard and research institute (Korea Research Institute of Standards and Science:KRISS) combine micro-nano displacement platform and nanometer balance, the capacitance displacement sensor that employing is integrated on micro-nano displacement platform carries out tracing to the source of displacement, adopt nanometer balance to carry out tracing to the source of power, but this structure adopts capacitive transducer to measure displacement, capacitive transducer itself need to be demarcated and just can trace to the source by laser interferometer, therefore this device itself is not traceable to international unit SI the direct value of elastic constant, moreover, owing to measuring the capacitive transducer of micro-cantilever free end travel with to free-ended power load(ing) point not point-blank, be that between the two, the larger distance of existence is Abbe arm, violated the abbe ' s principle of displacement measurement, make this system have larger error, be difficult to guarantee accuracy of measurement.Thereby this device is also not suitable as the caliberating device of tracing to the source of micro-cantilever elastic constant.Also have scholar to propose the scheme as displacement measurement by optical lever, but due to the actual measurement of polished rod bar be deflection angle rather than the displacement of micro-cantilever, so this scheme can not directly be traceable to International System of Units SI elastic constant.
Summary of the invention
The invention provides a kind of micro-cantilever elastic constant trace to the source caliberating device and source tracing method, to realize directly tracing to the source of micro-cantilever elastic constant and International System of Units SI, avoided the generation of Abbe error, the accuracy of measurement of the instrument that guaranteed to trace to the source.
For achieving the above object, the technical solution used in the present invention is to provide a kind of micro-cantilever elastic constant caliberating device of tracing to the source, described in the trace to the source structure of caliberating device include marble framework, nanometer balance, micro-cantilever, three-D micro-nano displacement platform, power load bar, polarization differential interferometer, instrumentation controller, computing machine and TT&C software.
A kind of source tracing method of the caliberating device of tracing to the source of micro-cantilever elastic constant is provided simultaneously.
Effect of the present invention is on this device of use, to have realized elastic constant value to be directly traceable to International System of Units SI.Power load(ing) point when this device forms the measuring beam of polarization differential interferometer low-light spot at the free-ended upper surface of micro-cantilever loads the free-ended lower surface of micro-cantilever with the power load bar on nanometer balance overlaps completely and is consistent with gravity direction, making Abbe arm is zero, observed the abbe ' s principle of displacement measurement, avoided the generation of Abbe error, the accuracy of measurement of the instrument that guaranteed to trace to the source.Can guarantee that different experiments chamber utilizes micro-cantilever to carry out unitarity, reliability and the comparability of micro-force measurement.
Accompanying drawing explanation
Fig. 1 micro-cantilever elastic constant caliberating device structural representation of tracing to the source;
Fig. 2 stepping loads power-displacement array of acquisition and the straight line of matching thereof.
In figure:
1, marble framework 2, nanometer balance 3, micro-cantilever 4, three-D micro-nano displacement platform 5, power load bar 6, polarization differential interferometer 7, Setup Controller 8, computing machine and TT&C software 9, x is to single shaft micro-nano shifter 10, y is to single shaft micro-nano shifter 11, z is to single shaft micro-nano shifter 12, flexible collar 13, He-Ne polarization laser 14, Faraday isolator 15, tire out-Babinet compensator 16 of rope, beam expander 17, beam splitter 18, condenser lens 19, Wollaston prism A 20, Wollaston prism B 21, photodiode A22, photodiode 23, light path casing 24, Photoelectric Signal Processing module 25, optical microscope
Embodiment
By reference to the accompanying drawings trace to the source caliberating device and source tracing method of micro-cantilever elastic constant of the present invention is illustrated.
The trace to the source design philosophy of this caliberating device of tracing to the source of caliberating device of micro-cantilever elastic constant of the present invention is based on adopting polarization differential interferometer as the free-ended displacement measurement means of micro-beam, realize with International System of Units in the tracing to the source of long measure rice (m); Using nanometer balance as force measurement means, and in realization and International System of Units, unit of force newton (N's) traces to the source.Feature according to the source tracing method of this caliberating device of tracing to the source is the force-displacement curve that obtains by experiment micro-cantilever, then by fitting a straight line the method for asking for its slope mean value, obtains elastic constant value of tracing to the source of micro-cantilever.At this, trace to the source in device, the low-light spot that the measuring beam of reflection difference interferometer forms on the upper surface of micro-cantilever and nanometer balance pass through the power load(ing) point of power load bar on the lower surface of micro-cantilever on same straight line, and are consistent with gravity (vertically) direction.
As shown in Figure 1, 2, the structure of micro-cantilever elastic constant caliberating device of the present invention is that several parts such as power load bar 5, polarization differential interferometer 6, instrumentation controller 7, computing machine and TT&C software 8 that include marble framework 1, nanometer balance 2, micro-cantilever 3, three-D micro-nano displacement platform 4, are fixed on described nanometer balance form.
Described marble framework 1 is the supporting construction of device for mechanical part, select marble material be supporting construction be because marble has that density is large, intensity is high, hardness is high, good stability, wear-resisting withstand voltage, non-corrosive, do not magnetize, acid and alkali-resistance, thermal expansivity is little and not because indoor temperature fluctuation produces the large advantages such as deformation.On described marble framework 1, be fixed with three modules such as light path casing 23 of nanometer balance 2, three-D micro-nano displacement platform 4 and reflection difference interferometer 6.Described nanometer balance 2 is manufactured according to electromagnetic balance principle design, and its mass resolution power is 0.01mg, and range is 2.1g.The fixing strong load bar 5 in top of described nanometer balance.Described power load bar 5 is made for high hardness material, and as materials such as silicon, its main body is cylindrical, diameter is between 2～3mm, center of top is half spherical shape, and the radius of spherical crown is at 10～50 μ m, and the top center of spherical crown is the load(ing) point to micro-cantilever free end imposed load.Described three-D micro-nano displacement platform is comprised of to single shaft micro-nano shifter 11 to single shaft micro-nano shifter 10 and z to single shaft micro-nano shifter 9, y x, and described x is to, y to orthogonal to single shaft micro-nano shifter with z.Described z is fixed with flexible collar 12 to the bottom of single shaft micro-nano shifter 11, and micro-cantilever 3 is fixed on z on micro-nano shifter 11 by described flexible collar 12.Described z is fixed on described y on micro-nano shifter 10 to single shaft micro-nano shifter 11, and described y is fixed on x on micro-nano shifter on 9 to micro-nano shifter 10, therefore by adjust described x to, y to z to micro-nano shifter, can adjust the locus of micro-cantilever.Described x is to, y to being hundreds of μ m～1mm with z to the stroke of single shaft micro-nano shifter, and displacement resolving power is 1～10nm.
Described polarization differential interferometer 6 is comprised of He-Ne polarization laser 13, Faraday isolator 14, tire out-Babinet compensator 15 of rope, beam expander 16, beam splitter 17, condenser lens 18, Tang Pusen Glan prism 19, Wollaston prism 20, photodiode 21, photodiode 22, light path casing 23, Photoelectric Signal Processing module 24.In described light path casing 23, include described laser instrument 13, Faraday isolator 14, tire out-Babinet compensator 15 of rope, beam expander 16, beam splitter 17, condenser lens 18, Wollaston prism A19, Wollaston prism B20, photodiode A21, photodiode B22 etc., and inside is painted with black, to reduce the interference of parasitic light.The basic functional principle of this light path is that described He-Ne polarization laser 13 is laser instrument, sends the p state and the s state polarized light light beam that mix.Described light beam, after described Faraday isolator 14, has formed equal, mutually orthogonal p state and the s state polarized light of light intensity.And light beam enters after tire out-Babinet compensator 15 of described rope, the phase place Φ of the p state of its output and s state polarized light can be subject to the modulation of tire out-Babinet compensator of this rope.Then, light beam becomes the light beam that beam diameter is larger, energy even distributes after described beam expander 16.Light beam after expanding enters after described beam splitter 17, part refraction, and another part transmission, has formed two light beams.The light beam transmitting from described beam splitter 17 forms focused beam after described condenser lens 18, then enter described Wollaston prism A19, has formed p state and s state polarized light separated from one another on space.
Described p state polarizing light irradiation is to the free end upper surface of described micro-cantilever 3 and reflect, as measuring beam.Described s state polarizing light irradiation is to the stiff end of micro-cantilever, as with reference to light beam.The p state and the s state polarized light Yan Yuan road that from free end and the stiff end of described micro-cantilever 3, reflect are returned, through described Wollaston prism A19, after described condenser lens 18, by described beam splitter 17, refracted to described Wollaston prism 20, from described beam splitter 17, be refracted to that 21 p state and s state polarized light interfere and spatially separated from one another first respectively with previously herein, form p state polarized light and s state polarized light after interfering, by described photodiode A21 and photodiode B22, received respectively, this electric signal is received by photoelectric signal processing circuit module 24, obtained the free end travel information of described micro-cantilever 3.
The structural relation of the free end travel l of described micro-cantilever 3 and described photodiode A21, photodiode B22 and described Photoelectric Signal Processing module 24 is, the output electrical signals of described photodiode A21 and photodiode B22 has reflected respectively the interference information of p state polarized light and the interference information of s state polarized light, and the phase signal Φ between the two has reflected the free-ended change in displacement of described micro-cantilever 3.In fact, p state and s state interfere the phase signal Φ of polarized light to be determined by three parts, the phase shift Ψ that the phase shift theta that free end of described micro-cantilever 3 is introduced, described tire out-Babinet compensator of rope 15 are introduced and the fixed phase drift ζ that other optical element causes in light path.Adjust tire out-Babinet compensator 15 of described rope and can make its phase shift Ψ=-ζ.Like this, the free-ended shift value l of described micro-cantilever 3 just can obtain with the phase shift between p state and s state polarized light interference signal, this phase shift is completed by described signal processing circuit module 24, and is transferred to computing machine and TT&C software 8 by Setup Controller 7.The power value that power load bar 5 described in the free end of described micro-cantilever 3 is subject to applies is read mass value m by nanometer balance, and be transferred to described computing machine and TT&C software 8 by described instrumentation controller 7, in TT&C software, this mass value m is multiplied by local gravity acceleration g value, thereby obtains power value f.
For the ease of determining facula position on the micro-cantilever 3 described in p state and s state polarized light light beam and described power load bar 5 loading Position on described micro-cantilever 3, be provided with optical microscope 25.
Accomplish that pin-point accuracy is measured and must follow abbe ' s principle.Abbe ' s principle requires the measurement axis of measuring sensor to overlap completely with the axis of tested displacement, otherwise the distance existing between two axis, this distance is called Abbe arm, can cause very large error, and this error is called Abbe error.Abbe arm is larger, and the Abbe error in measuring is larger.Abbe ' s principle is must observe in microdisplacement measurement especially, and on the one hand in micro-nano magnitude, Abbe arm can be larger comparatively speaking, causes Abbe error just larger, and Abbe error is difficult to assessment and compensation in micro-nano measurement.Abbe arm in the elastic constant gauge of German PTBHe Korea S KRISS has all reached 10～20mm as described in the above, and with respect to the range of several μ m～hundreds of μ m, this larger Abbe arm must bring larger Abbe error.And they do not carry out Abbe error analysis and uncompensation to instrument, visible difficulty is very large.
In micro-cantilever elastic constant caliberating device of the present invention, measuring sensor is described reflection difference interferometer, corresponding measurement axis is the free-ended p state polarized light light beam that is irradiated to described micro-cantilever 3, tested displacement is the described spherical crown summit of power load bar 5 and the contact point of the free-ended lower surface of described micro-cantilever 3, the i.e. displacement at the load(ing) point place of power.Like this, by described optical microscope 25, adjust described three-D micro-nano displacement platform 4, can make hot spot that p state polarized light light beam forms on described micro-cantilever 3 and the described spherical crown central authorities summit of power load bar 5 and the free-ended contact point of described micro-cantilever 3 on the vertical straight line of same, Abbe arm is 0; Meanwhile, in loading procedure, guarantee that the direction of the free end power load(ing) point of p state polarized light light beam, described micro-cantilever 3 is vertical direction, this device has just been observed abbe ' s principle like this, can guarantee the pin-point accuracy of demarcating.
The trace to the source source tracing method step of caliberating device of described micro-cantilever elastic constant is as follows:
1, device powers up and preheating: open the micro-cantilever elastic constant caliberating device of tracing to the source, to device, power up and preheating, preheating reached after 120 minutes, and device is normally started working.
2, acceleration of gravity is measured: by the on-site gravity acceleration g value of accurate gravity measurement of velocity measuring appratus.
3, device horizontal adjustment: use electrolevel to carry out horizontal adjustment to device, making described marble framework 1 and nanometer balance 2 fixed thereon is horizontality, meanwhile, the free-ended p state and the s state polarized light light beam that be arranged on power load bar 5 on described nanometer balance 2, are irradiated to described micro-cantilever 3 are also vertical state.
4, the adjustment that overlaps of power loading position and measuring beam: by described optical microscope 26, by described x to single shaft micro-nano shifter 9 and y to single shaft micro-nano shifter 10 by the spherical crown top center of described power load bar 5 the power load(ing) point on micro-cantilever free end lower surface with measure p state light beam on the free end of described micro-cantilever 3 on the vertical straight line of same.
5, zero-bit is adjusted: by described optical microscope 26, adjust described z to single shaft micro-nano shifter 11, micro-cantilever is moved down until the spherical crown top center of described power load bar 5 and the free end lower surface of described micro-cantilever 3 just contact, be that the power load that power load bar applies micro-cantilever free end is just in time zero, to export to described computing machine and the mass value in TT&C software be 0 to the described instrumentation controller 7 that passes through of described nanometer balance 2, and further move down micro-cantilever, the output quality value that makes immediately described nanometer balance 2 is started to increase, this position is the measurement zero point of power load, and now, the computing machine described in being transferred to by described polarization differential interferometer 6 and the free-ended shift value of the described micro-cantilever 3 in TT&C software are set to 0, this position is also zero displacement point simultaneously.
6, obtaining of the force-displacement curve of described micro-cantilever 3:
1) array A is set
j(x
i, y
i) for expression power-displacement data.Wherein, x
ifor shift value, y
ifor corresponding power value; J=1,2 ..., m is experiment number, and between desirable 5～8 times of general m, experiment each time obtains one group of power-displacement data, and corresponding to a force-displacement curve, taking many experiments and getting its mean value is in order to reduce stochastic error, improves calibration accuracy; I=0,1,2 ..., n be in single load experiment from position 0, the s of the take loading number of times that goes forward one by one that is displacement increment, be generally between 1～20nm.When i=0, represent that micro-cantilever free end is in shift value and the power value at place at zero point, power value can obtain from the output valve of nanometer balance and the product of acceleration of gravity, obviously has x
0=0, y
0=0; When i=1, represent the loading that the amount of feeding is s for the first time, now, x
1=s, y
1for corresponding power value; By that analogy, when i=n, represent the loading that the n time the amount of feeding is s, now, x
n=ns, y
nequal corresponding power value.
2) zero-bit adjustment: by described optical microscope 26, adjust described z to single shaft micro-nano shifter 11, micro-cantilever is moved down until the spherical crown top center of described power load bar 5 and the free end lower surface of described micro-cantilever 3 just contact, be that the power load that power load bar applies micro-cantilever free end is just in time zero, to export to described computing machine and the mass value in TT&C software be 0 to the described instrumentation controller 7 that passes through of described nanometer balance 2, and further move down micro-cantilever, the output quality value that makes immediately described nanometer balance 2 is started to increase, this position is the measurement zero point of power load, and now, the computing machine described in being transferred to by described polarization differential interferometer 6 and the free-ended shift value of the described micro-cantilever 3 in TT&C software are set to 0, this position is also zero displacement point simultaneously.
3) obtaining of stepping loading and force-displacement curve: by described z to single shaft micro-nano shifter 11, with certain stepping, as 10nm by as described in micro-cantilever 3 move down, step value records and passes through described instrumentation controller 7 by the polarized interferometer by described 6 and is transferred on described computing machine and TT&C software 8, and shows on graphoscope.Simultaneously, in the process moving down at described micro-cantilever 3, the free end of micro-cantilever 3 is by the power load being subject to from described power load bar 5, and the value of institute's stress load can be obtained by the mass value of described nanometer balance 2 outputs and the product of gravity acceleration g.The mass value of described nanometer balance 2 is also transferred on described computing machine and TT&C software 8 by described instrumentation controller 7, and shows on graphoscope.By the shift value of this position and power value with array A
1(x
1, y
1) represent.Repeat this stepping process, can obtain A
1(x
2, y
2), A
1(x
3, y
3) ..., A
1(x
i, y
i) ..., A
1(x
n, y
n).Array A
1(x
i, y
i) (i=0-n) reflected since zero point power value and the shift value relation at the diverse location place of described micro-cantilever 3 in loading procedure.With array A
i(x
i, y
i) in x
i(wherein, i=0,1,2 ..., n) be horizontal ordinate, with y
i(wherein, i=0,1,2 ..., n) for ordinate is drawn out force-displacement curve, as shown in Figure 2 utilize micro-cantilever elastic constant of the present invention trace to the source the stepping load mode of device obtain micro-cantilever Li ?displacement array A
j(x
i, y
i) and the straight line that obtains of least square fitting.
7, the calculating of the elastic constant value of tracing to the source: by least square method by A
j(x
i, y
i) fit to respectively straight line y=K
jx, the elastic constant value of tracing to the source k of the described micro-cantilever that j experiment obtains is K
jarithmetic mean, that is:
The trace to the source motion of micro-cantilever 3 of device of micro-cantilever elastic constant of the present invention is driven by micro-nano displacement platform, in power loading procedure, the mass value that the suffered power load of micro-cantilever 3 free ends is recorded by nanometer balance and the product of gravity acceleration value and obtain, and displacement is recorded by reflection difference interferometer.In this device, power load(ing) point when the low-light spot forming at the free-ended upper surface of micro-cantilever loads the free-ended lower surface of micro-cantilever with the power load bar on nanometer balance overlaps completely and is consistent with gravity direction, making Abbe arm is zero, observed the abbe ' s principle of displacement measurement, avoided the generation of Abbe error, the accuracy of measurement of the instrument that guaranteed to trace to the source.
Claims (6)
1. the caliberating device of tracing to the source of micro-cantilever elastic constant, is characterized in that: described in the trace to the source structure of caliberating device include marble framework (1), nanometer balance (2), micro-cantilever (3), three-D micro-nano displacement platform (4), power load bar (5), polarization differential interferometer (6), instrumentation controller (7), computing machine and TT&C software (8);
On described marble framework (1), be fixed with the light path casing (23) of nanometer balance (2), three-D micro-nano displacement platform (4) and reflection difference interferometer (6), the fixing strong load bar (5) in top of described nanometer balance (2), micro-cantilever (3) is fixed on nanometer balance (2), a side at marble framework (1) is provided with computing machine and TT&C software (8), and instrumentation controller (7) is connected with TT&C software (8) with computing machine.
2. the caliberating device of tracing to the source of micro-cantilever elastic constant according to claim 1, it is characterized in that: the main body of described power load bar (5) is cylindrical, diameter is between 2～3mm, top is half spherical shape, the radius of spherical crown is at 10～50 μ m, and the top center of spherical crown is the load(ing) point to micro-cantilever (3) free end imposed load.
3. the caliberating device of tracing to the source of micro-cantilever elastic constant according to claim 1, it is characterized in that: described three-D micro-nano displacement platform (4) includes x to single shaft micro-nano shifter (9), y is to single shaft micro-nano shifter (10) and z to single shaft micro-nano shifter (11), described z is fixed on described y on micro-nano shifter (10) to single shaft micro-nano shifter (11), and described y is fixed on x on micro-nano shifter on (9) to micro-nano shifter 10, described x is to single shaft micro-nano shifter (9), y is orthogonal to single shaft micro-nano shifter (11) to single shaft micro-nano shifter (10) and z, described z is fixed with flexible collar (12) to the bottom of single shaft micro-nano shifter (11), micro-cantilever (3) is fixed on z on single shaft micro-nano shifter (11) by described flexible collar (12).
4. the caliberating device of tracing to the source of micro-cantilever elastic constant according to claim 1, it is characterized in that: described polarization differential interferometer (6) includes the He-Ne polarization laser (13) being fixed on successively in light path casing (23), Faraday isolator (14), tire out-Babinet compensator (15) of rope, beam expander (16), beam splitter (17), condenser lens (18), Tang Pusen Glan prism (19), Wollaston prism (20), photodiode (21), photodiode (22) and Photoelectric Signal Processing module (24), described light path casing (23) inside is painted with the black that reduces interference of stray light.
5. the caliberating device of tracing to the source of micro-cantilever elastic constant according to claim 1, is characterized in that: the side at described micro-cantilever (3) and power load bar (5) is provided with optical microscope (25).
6. the source tracing method of the caliberating device of tracing to the source of micro-cantilever elastic constant according to claim 1, the method comprises the following steps:
(1) device powers up and preheating: open the described micro-cantilever elastic constant caliberating device of tracing to the source, power up and preheating to described device, preheating reached after 120 minutes, and device is normally started working;
(2) acceleration of gravity is measured: with accurate gravity velograph, measure the on-site gravity acceleration g value of described device;
(3) device horizontal adjustment: use electrolevel to carry out horizontal adjustment to described device, making described marble framework (1), nanometer balance (2) is horizontality, and power load bar (5), the free-ended p state and the s state polarized light light beam that are irradiated to described micro-cantilever (3) are also vertical state;
(4) adjustment that overlaps of power loading position and measuring beam: by described optical microscope (26), by described x to single shaft micro-nano shifter (9) and y to single shaft micro-nano shifter (10), the power load(ing) point by the spherical crown top center of described power load bar (5) on micro-cantilever (3) free end lower surface with measure hot spot that p state polarized light on the free end of described micro-cantilever (3) upper surface at micro-cantilever (3) forms on a vertical straight line;
(5) obtaining of the force-displacement curve of described micro-cantilever (3):
1) array A is set
j(x
i, y
i) for expression power-displacement data, wherein, x
ifor shift value, y
ifor corresponding power value; J=1,2 ..., m is experiment number, and m gets between 5～8 times, and experiment each time obtains one group of power-displacement data, corresponding to a force-displacement curve, takes many experiments and gets its mean value; I=0,1, n be in single load experiment from position 0, the s of the take loading number of times that goes forward one by one that is displacement increment, be generally between 1～20nm, when i=0, represent that micro-cantilever free end is in shift value and the power value at place at zero point, power value can obtain x from the output valve of nanometer balance (2) and the product of acceleration of gravity
0=0, y
0=0; When i=1, represent the loading that the amount of feeding is s for the first time, now, x
1=s, y
1for corresponding power value; By that analogy, when i=n, represent the loading that the n time the amount of feeding is s, now, x
n=ns, y
nequal corresponding power value;
2) zero-bit adjustment: by described optical microscope (26), adjust described z to single shaft micro-nano shifter (11), micro-cantilever is moved down until the spherical crown top center of described power load bar (5) contacts with the free end lower surface of described micro-cantilever (3), be that the power load that power load bar applies micro-cantilever free end is just in time zero, to export to described computing machine and the mass value in TT&C software be 0 to the described instrumentation controller 7 that passes through of described nanometer balance (2), and further move down micro-cantilever, the output quality value that makes immediately described nanometer balance (2) is started to increase, this position is the measurement zero point of power load,
3) obtaining of stepping loading and force-displacement curve: by described z to single shaft micro-nano shifter (11), with certain stepping, as 10nm by as described in micro-cantilever (3) move down, step value records the polarized interferometer by described (6), and be transferred in described computing machine and TT&C software (8) and show on graphoscope through described instrumentation controller (7), in the process moving down at described micro-cantilever (3), the free end of micro-cantilever (3) is by the power load being subject to from described power load bar (5), the value of institute's stress load is obtained by the mass value of described nanometer balance (2) output and the product of gravity acceleration g, the mass value of described nanometer balance (2) is also transferred in described computing machine and TT&C software (8) and is shown on graphoscope by described instrumentation controller (7), by the shift value of this position and power value with array A
1(x
1, y
1) represent, repeat this stepping process, obtain A
1(x
2, y
2), A
1(x
3, y
3) ..., A
1(x
i, y
i) ..., A
1(x
n, y
n), array A
1(x
i, y
i) (i=0,1,2 ..., n) with array A
i(x
i, y
i) in x
i(i=0,1,2 ..., n) be horizontal ordinate, with y
i(i=0,1,2 ..., n) for ordinate is drawn out force-displacement curve,
(6) calculating of the elastic constant value of tracing to the source: by least square method by A
j(x
i, y
i) fit to respectively straight line y=K
jx, the elastic constant value of tracing to the source k of the described micro-cantilever (3) that j experiment obtains is K
jarithmetic mean, that is:
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