CN102175198A - Equal-tension suspension mechanism for contact scanning probe - Google Patents
Equal-tension suspension mechanism for contact scanning probe Download PDFInfo
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- CN102175198A CN102175198A CN2011100274243A CN201110027424A CN102175198A CN 102175198 A CN102175198 A CN 102175198A CN 2011100274243 A CN2011100274243 A CN 2011100274243A CN 201110027424 A CN201110027424 A CN 201110027424A CN 102175198 A CN102175198 A CN 102175198A
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Abstract
The invention discloses an equal-tension suspension mechanism for a contact scanning probe, which comprises a fixed ring. A suspended sheet is suspended in the fixed ring through four symmetrical lines; a scanning probe is fixed in the centre of the suspended sheet; the front end of the scanning probe is provided with a spherical head; and 2 to 5 high-precision plane reflecting mirrors are attached to the suspended sheet. In the invention, through a structure in which the suspended sheet is suspended in the fixed ring through the four symmetrical lines, the scanning probe is fixed in the centre of the suspended sheet and a plurality of high-precision plane reflecting mirrors are attached to the suspended sheet, the spatial displacement of the scanning probe can be converted into the movement in a vertical direction and rotation around the suspended lines of the plane mirrors. The displacement and a rotating angle of each plane reflecting mirror can be measured by a sensor arranged above the plane reflecting mirror, and the displacement of the scanning probe can be obtained through conversion, so that the measurement is realized.
Description
Technical field:
The present invention relates to micro-nano three coordinate measuring machine field, a kind of specifically isostension suspension gear of contact scanning probe.
Background technology:
The probe of micro-nano three coordinate measuring machine is divided into contact and contactless two kinds.The contact scanning probe needs a kind of mechanism to convert the space displacement of scan-probe to displacement that sensor makes things convenient for sensing.Having identical hardness (when promptly in different directions probe being applied onesize power, the displacement of probe on this direction should equate) on all directions is one of basic demand to scanning head.
Summary of the invention:
For solving the problem that prior art exists, the invention provides a kind of isostension suspension gear of contact scanning probe, by four line suspentions in set collar the suspension sheet is arranged by symmetry, suspension sheet center fixation has scan-probe, post the structure of some high-accuracy plane mirrors above the suspension sheet, the space displacement of scan-probe can be changed into level crossing vertical direction move and around the rotation of suspension wire.The displacement of plane mirror and corner can record by the sensor that is arranged in the plane mirror top, can learn the displacement of scan-probe through converting, thereby realize measuring.
The technical solution used in the present invention:
The isostension suspension gear of contact scanning probe, has a set collar, be provided with the suspension sheet in the set collar, several plane mirrors are installed above the suspension sheet, suspension sheet center fixation has scan-probe, the scan-probe front end has spheric probe, it is characterized in that the through hole that has square crossing to run through in the described suspension sheet, has a suspension wire to pass through hole that square crossing runs through successively and around being fixed on the set collar.
The isostension suspension gear of described contact scanning probe, it is characterized in that: described high-accuracy plane mirror is the 2-5 sheet.
The isostension suspension gear of described contact scanning probe, it is characterized in that: under suspension wire was fastened state, described suspension sheet was in symmetry, horizontality.
The isostension suspension gear of described contact scanning probe, it is characterized in that: the penetration of the through hole of described square crossing is positioned at the centre of gravity place of mechanism.
Advantage of the present invention:
The present invention has the suspension sheet by four the end to end line suspentions by symmetry in set collar, suspension sheet center fixation has scan-probe, post the structure of some high-accuracy plane mirrors above the suspension sheet, the space displacement of scan-probe can be changed into level crossing vertical direction move and around the rotation of suspension wire.The displacement of plane mirror and corner can record by the sensor that is arranged in the plane mirror top, can learn the displacement of scan-probe through converting, thereby realize measuring.
Description of drawings:
Fig. 1 is a structural representation of the present invention;
Fig. 2 is a structural perspective of the present invention;
Fig. 3 is the position view in hole on the set collar of the present invention;
Fig. 4 wears around synoptic diagram for suspension wire of the present invention.
Embodiment:
The isostension suspension gear of contact scanning probe, has a set collar 6, be provided with suspension sheet 5 in the set collar 6,4 high-accuracy plane mirrors 1 are installed above the suspension sheet 5, suspension sheet 5 center fixation have scan-probe 4, scan-probe 4 front ends have spheric probe 3, and the through hole that has square crossing to run through in the described suspension sheet 5 has a suspension wire 2 to pass through hole that square crossing runs through successively and around being fixed on the set collar.
Under suspension wire was fastened state, suspension sheet 5 was in symmetry, horizontality.
The penetration of the through hole of square crossing is positioned at the centre of gravity place of mechanism.
Having identical hardness (when promptly in different directions probe being applied onesize power, the displacement of probe on this direction should equate) on all directions is one of basic demand to scanning head.The design that the suspension wire of four symmetries of employing suspends the suspension sheet in midair has guaranteed that in theory probe has identical hardness at X with the Y direction.But in the process of actual installation, be difficult to accomplish that the tensioning degree of four suspension wires is just the same.In order to overcome this problem, the present invention has designed single line tensioning scheme as shown in Figure 2.Promptly on set collar, radially make a call to 6 polishing of unthreaded hole (position at label 7-12 place in Fig. 3) process and chamfered that diameter is suitable with the suspension wire diameter, on set collar, radially make a call to the threaded hole (in the get the bid position of M2 of Fig. 3) of a M2, its mesopore 7,8,9,10 is symmetrically distributed on circumference, hole 11,12 and M2 in the hole 7 and 10 in hole uniformly-spaced arrange.The hole of radially also making a call to two same diameters at the suspension sheet, adopt long suspension wire then, according to shown in Figure 4 like that sequentially suspension sheet and set collar are worn around, and two of suspension wire bound together, so just formed one " closed loop ", and then by twisting the mode that suspension screwing M2 removes the top-hung line, suspension wire tensioning with a sealing, naturally the tensile force of every line is the same (because is complete symmetric design, so just in time can cancel out each other to the friction force that suspension wire produces in each hole).These tension mechanisms not only satisfy in theory probe on surface level etc. rigidity, and also be easy in practice realize.
Claims (4)
1. the isostension suspension gear of contact scanning probe, has a set collar, be provided with the suspension sheet in the set collar, several plane mirrors are installed above the suspension sheet, suspension sheet center fixation has scan-probe, the scan-probe front end has spheric probe, it is characterized in that the through hole that has square crossing to run through in the described suspension sheet, has a suspension wire to pass through hole that square crossing runs through successively and around being fixed on the set collar.
2. the isostension suspension gear of contact scanning probe according to claim 1, it is characterized in that: described plane mirror is the 2-5 sheet.
3. the isostension suspension gear of contact scanning probe according to claim 1, it is characterized in that: under suspension wire was fastened state, described suspension sheet was in symmetry, horizontality.
4. the isostension suspension gear of contact scanning probe according to claim 1, it is characterized in that: the penetration of the through hole of described square crossing is positioned at the centre of gravity place of mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100274243A CN102175198B (en) | 2011-01-26 | 2011-01-26 | Equal-tension suspension mechanism for contact scanning probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100274243A CN102175198B (en) | 2011-01-26 | 2011-01-26 | Equal-tension suspension mechanism for contact scanning probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102175198A true CN102175198A (en) | 2011-09-07 |
| CN102175198B CN102175198B (en) | 2012-11-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100274243A Expired - Fee Related CN102175198B (en) | 2011-01-26 | 2011-01-26 | Equal-tension suspension mechanism for contact scanning probe |
Country Status (1)
| Country | Link |
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| CN (1) | CN102175198B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494607A (en) * | 2011-10-28 | 2012-06-13 | 合肥工业大学 | Elastic measuring head in three-dimensional micro-nano contact scanning probe |
| CN102506725A (en) * | 2011-10-28 | 2012-06-20 | 合肥工业大学 | Three-dimensional micro nanometer contact scanning probe |
| CN104457613A (en) * | 2014-12-26 | 2015-03-25 | 合肥工业大学 | Three-dimensional micro-nano touch trigger type probe |
| CN107560573A (en) * | 2017-08-31 | 2018-01-09 | 安徽理工大学 | A kind of suspension-wire type stiffness variable micro-nano gauge head |
| CN108827137A (en) * | 2018-07-31 | 2018-11-16 | 安徽理工大学 | A kind of micro-nano gauge head of contact variation rigidity of Electromagnetic Control |
| CN111854662A (en) * | 2020-07-16 | 2020-10-30 | 西安交通大学 | Single-piezoelectric parallel synchronous driving variable-stiffness measuring head |
| CN112781495A (en) * | 2020-12-31 | 2021-05-11 | 合肥工业大学 | Three-dimensional contact trigger type measuring probe based on suspension laser structure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0239337A1 (en) * | 1986-03-24 | 1987-09-30 | Renishaw plc | Position sensing probe |
| CN1046388A (en) * | 1989-04-13 | 1990-10-24 | 浙江省建筑科学研究所 | Gentle rope component detection method of wire tensioning force and detector |
| CN1762773A (en) * | 2004-10-20 | 2006-04-26 | 奇菱科技股份有限公司 | Frame for containing thin board |
| CN1975322A (en) * | 2006-12-04 | 2007-06-06 | 天津大学 | Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head |
| CN101206110A (en) * | 2006-12-20 | 2008-06-25 | 松下电器产业株式会社 | Three-dimensional measurement probe |
| CN202024729U (en) * | 2011-01-26 | 2011-11-02 | 安徽电气工程职业技术学院 | Equal tension suspension mechanism in contact with scan probe |
-
2011
- 2011-01-26 CN CN2011100274243A patent/CN102175198B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0239337A1 (en) * | 1986-03-24 | 1987-09-30 | Renishaw plc | Position sensing probe |
| CN1046388A (en) * | 1989-04-13 | 1990-10-24 | 浙江省建筑科学研究所 | Gentle rope component detection method of wire tensioning force and detector |
| CN1762773A (en) * | 2004-10-20 | 2006-04-26 | 奇菱科技股份有限公司 | Frame for containing thin board |
| CN1975322A (en) * | 2006-12-04 | 2007-06-06 | 天津大学 | Micro-geometric sense measuring device based on nano-measuring machine and micro-tactometering head |
| CN101206110A (en) * | 2006-12-20 | 2008-06-25 | 松下电器产业株式会社 | Three-dimensional measurement probe |
| CN202024729U (en) * | 2011-01-26 | 2011-11-02 | 安徽电气工程职业技术学院 | Equal tension suspension mechanism in contact with scan probe |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494607A (en) * | 2011-10-28 | 2012-06-13 | 合肥工业大学 | Elastic measuring head in three-dimensional micro-nano contact scanning probe |
| CN102506725A (en) * | 2011-10-28 | 2012-06-20 | 合肥工业大学 | Three-dimensional micro nanometer contact scanning probe |
| CN104457613A (en) * | 2014-12-26 | 2015-03-25 | 合肥工业大学 | Three-dimensional micro-nano touch trigger type probe |
| CN104457613B (en) * | 2014-12-26 | 2017-06-30 | 合肥工业大学 | A kind of three-dimensional micro-nano contacts trigger probe |
| CN107560573A (en) * | 2017-08-31 | 2018-01-09 | 安徽理工大学 | A kind of suspension-wire type stiffness variable micro-nano gauge head |
| CN107560573B (en) * | 2017-08-31 | 2019-08-09 | 安徽理工大学 | A kind of suspension-wire type stiffness variable micro-nano gauge head |
| CN108827137A (en) * | 2018-07-31 | 2018-11-16 | 安徽理工大学 | A kind of micro-nano gauge head of contact variation rigidity of Electromagnetic Control |
| CN111854662A (en) * | 2020-07-16 | 2020-10-30 | 西安交通大学 | Single-piezoelectric parallel synchronous driving variable-stiffness measuring head |
| CN112781495A (en) * | 2020-12-31 | 2021-05-11 | 合肥工业大学 | Three-dimensional contact trigger type measuring probe based on suspension laser structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102175198B (en) | 2012-11-28 |
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Owner name: STATE ELECTRIC NET CROP. Free format text: FORMER OWNER: ANHUI ELECTRICAL ENGINEERING PROFESSIONAL TECHNIQUE COLLEGE Effective date: 20130108 Owner name: ANHUI ELECTRICAL ENGINEERING PROFESSIONAL TECHNIQU Effective date: 20130108 |
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Effective date of registration: 20130108 Address after: 100716 No. 86 West Chang'an Avenue, Beijing Patentee after: State Grid Corporation of China Patentee after: Anhui Electrical Engineering Professional Technique College Address before: No. 397 Baohe Avenue in Baohe District of Hefei city of Anhui Province in 230051 Patentee before: Anhui Electrical Engineering Professional Technique College |
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Granted publication date: 20121128 Termination date: 20180126 |
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| CF01 | Termination of patent right due to non-payment of annual fee |