CN104457613A - Three-dimensional micro-nano touch trigger type probe - Google Patents
Three-dimensional micro-nano touch trigger type probe Download PDFInfo
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- CN104457613A CN104457613A CN201410834005.4A CN201410834005A CN104457613A CN 104457613 A CN104457613 A CN 104457613A CN 201410834005 A CN201410834005 A CN 201410834005A CN 104457613 A CN104457613 A CN 104457613A
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Abstract
The invention discloses a three-dimensional micro-nano touch trigger type probe. The three-dimensional micro-nano touch trigger type probe is characterized in that a cross-shaped suspension sheet is arranged in the center of a fixed circular ring, cantilever reeds are connected to the ends of all cantilevers of the cross-shaped suspension sheet, the other end of each cantilever reed is connected with the fixed circular ring, and a suspension structure that the cross-shaped suspension sheet is arranged in the fixed circular ring is formed; a measuring central plane reflector is arranged on the center of one side of the cross-shaped suspension sheet, and a feeler pin with a ruby measuring ball is mounted on the other side; collimated light emitted by a laser is projected on the measuring central plane reflector, reflected light is formed after reflection of the measuring central plane reflector, the reflected light is focused on a four-quadrant detector through a lens, and the displacement and the two-dimensional angle of the measuring central plane reflector are measured through the four-quadrant detector. The three-dimensional micro-nano touch trigger type probe can obtain a high-precision, high-sensitivity and small-measuring-force detection effect, and has the advantages of being high in stability, low in cost and convenient to mount and adjust.
Description
Technical field
The present invention relates to micro-nano field tests, is a kind of contact trigger-type three-dimensional probe be applied in Nano Coordinate Measuring Machine in particular, can the three-dimensional appearance on object sensing surface.
Background technology
In recent years, the fast development of microelectric technique has caused the revolution of a microminaturization, especially the development of the process technology of micro-electromechanical system (MEMS) device, there is the micro devices of various micro/nano level, as micro-cell electron capture detector, micro-hole, micro nozzle, the MEMS products such as miniature step.The machining precision of these micro elements is in micro-nano magnitude, will carry out precision measurement, will develop special high-precision detecting method and technological means to these micro elements.Various countries' associated mechanisms is all devoted to study the three coordinate measuring machine with nano-precision for this reason.
The probe segment of three coordinate measuring machine is one of important core parts of three coordinate measuring machine, and the measuring accuracy of probe directly determines the overall measurement accuracy of three coordinate measuring machine.Probe has contact and contactless point, contact probe can be used for measuring non-contact optical probe the immeasurable workpiece with features such as inclined-plane, step, deep hole, circular arcs.
The contact probe announced in the world at present mainly comprises: the fibre-optical probe of the atomic force probe of National Institute of Standards and Technology, the capacitance probe of United Kingdom National physics laboratory, Tokyo University, the DVD probe of Taiwan Univ., the micro-touch feel probe of University Of Tianjin, the confocal probe of HeFei University of Technology.Existing probe all needs an integrated 2-4 high-precision sensor, and there is complex structure, resetting difficulty is large, cost is high problem.As the three-dimensional micro-contact sensing probe based on strainometer of Dutch Eindhoven university exploitation, that strainometer, circuit and flexible member is as a whole by being made into after the techniques such as precipitation, plate-making, etching together, the power of gauge head all directions and the change of displacement are detected by the strainometer be contained on responsive fine strain of millet, its small volume, but the detection sensitivity of foil gauge and precision are all lower, and its gauge head adopts triangle topology structure, decoupling zero is complicated.Measurement verification office of Swiss Confederation METAS develops a kind of electromagnetic type micro tactile probe, gauge head has the degree of freedom in three directions, the detection in each direction adopts inductance to realize, the dynamometry in three directions is identical, and structure is mainly made of aluminum, and the measurement range of electromagnetic type gauge head is larger, laterally pick up and survey that sensitivity is higher and contact force is less, but its structure is very complicated, debug difficulty, and adopt triangle suspended structure, decoupling zero bothers very much.
Summary of the invention
The present invention is the weak point for avoiding existing for above-mentioned prior art, a kind of three-dimensional micro-nano is provided to contact trigger probe, to obtaining the Effect on Detecting of high precision, high sensitivity and little dynamometry, there is high stability, low cost and debug advantage easily simultaneously.
The present invention is that technical solution problem adopts following technical scheme:
The design feature of three-dimensional micro-nano contact trigger probe of the present invention is that it comprises:
One head unit, that cross suspension sheet is set in the central authorities of a clamping rings, be connected with cantilever reed at the arm end of each cantilever of described cross suspension sheet, the other end of described each cantilever reed is connected with clamping rings, forms the suspension structure of cross suspension sheet in clamping rings; Arrange in the central position of described cross suspension sheet side and measure central plane catoptron, opposite side installs the probe surveying ball with ruby;
One measuring unit, the light channel structure arranging described measuring unit is: the collimated light penetrated by laser instrument is incident upon on described measurement central plane catoptron, and reflected light is formed after described measurement central plane catoptron reflection, described reflected light on 4 quadrant detector, measures displacement and the two dimension angular of central plane catoptron through lens focus with described 4 quadrant detector.
The design feature of three-dimensional micro-nano of the present invention contact trigger probe is also: arrange the laser emitting angle-adjusting mechanism that deflect angle and pitch angle can regulate, described laser instrument is fixedly installed in laser emitting angle-adjusting mechanism, by regulating described laser emitting angle-adjusting mechanism, the laser after reflecting to make measured central plane catoptron can by the detection center of lens focus at described 4 quadrant detector.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention is also: arrange a cylinder, distribute each cavity in described cylinder, and described each cavity comprises the first chamber and the second chamber; Described first chamber is used for being fixedly installed lens and four-quadrant detector; Described second cavity is used for fixed laser shooting angle adjusting mechanism, and described head unit is arranged on the bottom of described cylinder with its clamping rings.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention is also: described laser emitting angle-adjusting mechanism comprises the rectangular sleeve for being set with laser instrument, the lateral wall of described rectangular sleeve is set to lozenges, two lateral walls adjacent in rectangular sleeve are as confined planes, two lateral walls beyond confined planes are free face, wedge is provided with between described confined planes and the chamber wall in described second chamber, described wedge is made up of non-magnet material, the adjustment at the angle of inclination of described rectangular sleeve is realized by the relative height adjusted between described wedge and described confined planes.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention is also: on described wedge, arrange a through hole, and have cam to be placed in described through hole, the camshaft connected firmly with cam is as driving shaft, is moved along the lozenges on the lateral wall of described rectangular sleeve by rotating cam axle band moving cam rotating drive wedge in through-holes.
The design feature of three-dimensional micro-nano contact trigger probe of the present invention is also: in the through hole of described wedge, be provided with magnet, wedge is that non-magnet material is made, rectangular sleeve, cylinder and cam are permeability magnetic material and make, and utilize described magnet that described rectangular sleeve and cylinder are obtained and locate.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the present invention adopts optical sensor to sense, and can obtain higher sensitivity and precision than strain-type, pressure resistance type and inductance type transducer.
2, the present invention only can sense with an optical sensor simultaneously and survey ball displacement in the horizontal and vertical directions, have structure simple, debug conveniently, the distinguishing feature such as the lower and time stability of cost is good.
3, the present invention adopts high-precision optical sensor, coordinates and has highly sensitive and suspension structure that is high stability, can reach the resolving power of 1 nanometer, 8.2 nanometers repeatability, exceed the permission touching scope of positive and negative 10 microns; Be less than the dynamometry of 0.4 milli ox/micron.
4, the present invention adopts the mode of mobile wedge to realize the adjustment of laser instrument attitude, has displacement and reduces effect, make Adjustment precision higher, adjust more convenient; Support laser instrument with lozenges, more common micromatic setting has better stability.
Accompanying drawing explanation
Fig. 1 is general structure schematic diagram of the present invention;
Fig. 2 is general structure decomposing schematic representation of the present invention;
Fig. 3 is the micro-autocollimator schematic diagram of the present invention;
Fig. 4 is for installing laser instrument adjust structure schematic diagram in the present invention;
Fig. 5 be in the present invention detecting head towards cylindrical shell inside structure schematic diagram;
Fig. 6 be in the present invention detecting head towards cylindrical shell outboard structure schematic diagram;
Fig. 7 and Fig. 8 is principle of the invention schematic diagram;
Number in the figure: 1a cylinder; 1b circuit board cavity; 1c through wires hole; 1d first chamber; 1e second chamber; 2 top cover of cylinder bodies; 34 quadrant detectors; 4 lens; 5 laser instruments, 6 laser emitting angle-adjusting mechanisms; 6a rectangular sleeve; 6b wedge; 6c camshaft; 6d cam; 6e magnet; 6f threaded hole; 7 head unit; 7a clamping rings; 7b cross suspension sheet, 7c cantilever reed; 7d measures central plane catoptron; 7e surveys ball; 7f probe.
Embodiment
In the present embodiment, three-dimensional micro-nano contact trigger probe comprises:
One head unit 7, that cross suspension sheet 7b is set in the central authorities of a clamping rings 7a, be connected with cantilever reed 7c at the arm end of each cantilever of cross suspension sheet 7b, the other end of each cantilever reed 7c is connected with clamping rings 7a, forms the suspension structure of cross suspension sheet 7b in clamping rings 7a; Arrange in the central position of cross suspension sheet 7b side and measure central plane catoptron 7d, opposite side installs the probe 7f surveying ball 7e with ruby;
One measuring unit, the light channel structure arranging measuring unit is: the collimated light penetrated by laser instrument 5 is incident upon to be measured on central plane catoptron 7d, and reflected light is formed after measuring central plane catoptron 7d reflection, reflected light focuses on QPD 4 quadrant detector 3 through lens 4, measures displacement and the two dimension angular of central plane catoptron 7d with QPD 4 quadrant detector 3.
When probe 7f is touched at vertical direction, QPD 4 quadrant detector 3 records the shift value measuring central plane catoptron 7d, when probe 7f is touched in the horizontal direction, the reflected light measuring central plane catoptron 7d focuses on QPD 4 quadrant detector 3 through lens 4, the two dimension angular value of central plane catoptron 7d along XY direction is measured for sensing, when measuring central plane catoptron 7d and having small angle variation, corresponding skew can be there is in the luminous point focused on 4 quadrant detector 3, thus two low-angles that sensing rotates along X-axis and Y-axis.
In concrete enforcement, corresponding vibrational power flow also comprises:
The laser emitting angle-adjusting mechanism 6 that deflect angle and pitch angle can regulate is set, laser instrument 5 is fixedly installed in laser emitting angle-adjusting mechanism 6, by regulating laser emitting angle-adjusting mechanism 6, laser after reflecting to make measured central plane catoptron 7d can be focused on the detection center of 4 quadrant detector 3 by lens 4, to ensure the zero of displacement and two dimension angular sensors X Y value.
Arrange a cylinder 1a, distribute each cavity in cylinder 1a, and each cavity comprises the first chamber 1d and the second chamber 1e; First chamber 1d is used for being fixedly installed lens 4 and four-quadrant detector 3; Second cavity 1e is used for fixed laser shooting angle adjusting mechanism 6, and head unit 7 is arranged on the bottom of cylinder 1a with its clamping rings 7a, arranges top cover of cylinder body 2 on the top of cylinder 1a.Arrange for the ease of circuit, as shown in Figure 1, arrange one on the top of cylinder 1a for the circuit board cavity 1b of wiring harness plate, and through wires hole 1c is set for threading.
In the present embodiment, laser emitting angle-adjusting mechanism 6 is two-dimentional micro-adjusting mechanism, it comprises the rectangular sleeve 6a for being set with laser instrument 5, the lateral wall of rectangular sleeve 6a is set to lozenges, two lateral walls adjacent in rectangular sleeve 6a are as confined planes, two lateral walls beyond confined planes are free face, between confined planes and the chamber wall of the second chamber 1e, be provided with wedge 6b, are realized the adjustment at the angle of inclination of rectangular sleeve 6a by the relative height between adjustment wedge 6b and confined planes.
In the present embodiment, wedge 6b is provided with a rectangular through holes, the depth direction of through hole is perpendicular to the lozenges of wedge, and have cam 6d to be placed in through hole, the camshaft 6c connected firmly with cam 6d is as driving shaft, is with moving cam 6d rotating drive wedge 6b in through-holes to move along the lozenges on the lateral wall of rectangular sleeve 6a by rotating cam axle 6c.
In the present embodiment, for the ease of adjustment, wedge 6b is made up of non-magnet material, rectangular sleeve 6a, cylinder 1a and cam are magnetic conductive material and make, magnet 6e is placed with in the through hole of wedge 6b, utilize magnet 6e that rectangular sleeve 6a and cylinder 1a is obtained to locate, make between wedge 6b, rectangular sleeve 6a and cylinder 1a, utilize magnetic force to form laminating.Adjustment process: be with moving cam 6d to rotate by camshaft 6c, wedge 6b is moved along the lozenges of rectangular sleeve 6a, rectangular sleeve 6a realizes the adjustment of deflection angle and the angle of pitch together with laser instrument 5, thus the reflected light of the measurement central plane catoptron 7d made focuses on the center position of 4 quadrant detector 3 through lens 4; Magnet 6e is used for the location of rectangular sleeve 6a in auxiliary adjustment process; Make between rectangular sleeve 6a and cylinder 1a, utilize magnetic force to be clamped by wedge 6b, become as a whole with wedge 6b, cause rectangular sleeve 6a and wedge 6b and cylinder 1a in the non-rotary situation of cam to keep geo-stationary.At the sidepiece of rectangular sleeve 6a, threaded hole 6f is set, fixing for coordinating hexagonal socket screw to make laser instrument 5 obtain in rectangular sleeve 6a; Threaded hole being set at the sidepiece of cylinder 1a, for coordinating hexagonal socket screw, making rectangular sleeve 6a and condenser lens 4 obtain in cylinder 1a respectively fixing.
Nanometer Three-Dimensional contact trigger-type measuring sonde belongs to contact probe, while object sensing three-dimensional surface shape, ensure to destroy body surface, therefore need highly sensitive mechanics mechanism.Adopt beryllium-bronze reed as the cantilever reed 7c of flexible member in the present embodiment, measure the cross suspension sheet 7b that central plane catoptron 7d is pasted onto suspension, connect with three beryllium-bronze reeds between cross suspension sheet 7b and clamping rings 7a.When the front end ruby survey ball 7e of probe 7f is stressed because contact object, four beryllium-bronze elastic springs can deform, cause cross suspension sheet 7b and measure central plane catoptron 7d being subjected to displacement the change with two dimension angular, this change can be sensed by the displacement on top and two dimension angular sensor.
The principle of work of the measuring unit in the present embodiment is as shown in Figure 7 and Figure 8:
The light sent from laser instrument 5 after measuring central plane catoptron 7d reflection by converging in QPD 4 quadrant detector 3 after condenser lens 4.The change of light spot form and position on the corresponding 4 quadrant detector 3 of change of measurement central plane catoptron 7d angle and vertical displacement, and then the change of the current signal size causing 4 quadrant detector 3 to export, by current/voltage converter circuit, the current signal that four quadrants export is converted to voltage signal, is designated as V respectively
a, V
b, V
c, V
d.According to formula (a) and formula (b), the shape of luminous point on 4 quadrant detector 3 and the change of position can be changed into two-way voltage signal to export, this two-way voltage signal is corresponding with the angle measuring central plane catoptron two-dimensional directional respectively, and linear within the specific limits; And the angle change of measurement plane catoptron two-dimensional directional is corresponding with the displacement of surveying ball two mutually perpendicular directions in surface level respectively, thus realize the measurement to surveying displacement of ball.
X＝K[(V
A+V
B)-(V
C+V
D)] (a)
Y＝K[(V
A+V
D)-(V
B+V
C)] (b)
Formula (a) is with in formula (b), X and Y is respectively the displacement of surveying ball two mutually perpendicular directions in surface level, V
a, V
b, V
c, V
dfour voltage signals that the four road current signals being respectively 4 quadrant detector (QPD) four quadrants outputs convert to; K is scale-up factor, and K can obtain concrete numerical value by the mode of demarcating.
In order to test the performance of the three-dimensional micro-nano contact trigger probe in the present embodiment, the Three-dimensional Parallel micromotion platform produced with a German PI Corp. is for benchmark, its three axles repeatability is 2nm, to its horizontal four direction, comprise X forward, X negative sense, Y forward and Y negative sense, and the triggering repeatability of Z-direction is tested, test data is in table 1, table 1 result shows, and the triggering repeatability of this probe is 8.2nm.
Table 1 one direction repeatedly repeats to touch result
Claims (6)
1. a three-dimensional micro-nano contact trigger probe, is characterized in that comprising:
One head unit (7), that cross suspension sheet (7b) is set in the central authorities of a clamping rings (7a), cantilever reed (7c) is connected with at the arm end of each cantilever of described cross suspension sheet (7b), the other end of described each cantilever reed (7c) is connected with clamping rings (7a), forms cross suspension sheet (7b) suspension structure in clamping rings (7a); Arrange in the central position of described cross suspension sheet (7b) side and measure central plane catoptron (7d), opposite side installs the probe (7f) surveying ball (7e) with ruby;
One measuring unit, the light channel structure arranging described measuring unit is: the collimated light penetrated by laser instrument (5) is incident upon on described measurement central plane catoptron (7d), and reflected light is formed after described measurement central plane catoptron (7d) reflection, described reflected light focuses on 4 quadrant detector (3) through lens (4), measures displacement and the two dimension angular of central plane catoptron (7d) with described 4 quadrant detector (3).
2. three-dimensional micro-nano contact trigger probe according to claim 1, it is characterized in that: the laser emitting angle-adjusting mechanism (6) that deflect angle and pitch angle can regulate is set, described laser instrument (5) is fixedly installed in laser emitting angle-adjusting mechanism (6), by regulating described laser emitting angle-adjusting mechanism (6), the laser after reflecting to make measured central plane catoptron (7d) can be focused on the detection center of described 4 quadrant detector (3) by lens (4).
3. three-dimensional micro-nano contact trigger probe according to claim 2, it is characterized in that: a cylinder (1a) is set, the each cavity of distribution in described cylinder (1a), described each cavity comprises the first chamber (1d) and the second chamber (1e); Described first chamber (1d) is for being fixedly installed lens (4) and four-quadrant detector (3); Described second cavity (1e) is for fixed laser shooting angle adjusting mechanism (6), and described head unit (7) is arranged on the bottom of described cylinder (1a) with its clamping rings (7a).
4. three-dimensional micro-nano contact trigger probe according to claim 3, it is characterized in that: described laser emitting angle-adjusting mechanism (6) comprises the rectangular sleeve (6a) for being set with laser instrument (5), the lateral wall of described rectangular sleeve (6a) is set to lozenges, two lateral walls adjacent in rectangular sleeve (6a) are as confined planes, two lateral walls beyond confined planes are free face, wedge (6b) is provided with between described confined planes and the chamber wall in described second chamber (1e), the adjustment at the angle of inclination of described rectangular sleeve (6a) is realized by the relative height adjusted between described wedge (6b) and described confined planes.
5. three-dimensional micro-nano contact trigger probe according to claim 4, it is characterized in that: on described wedge (6b), a through hole is set, and have cam (6d) to be placed in described through hole, the camshaft (6c) connected firmly with cam (6d) is as driving shaft, is moved with moving cam (6d) rotating drive wedge (6b) in through-holes by rotating cam axle (6c) along the lozenges on the lateral wall of described rectangular sleeve (6a).
6. three-dimensional micro-nano contact trigger probe according to claim 5, it is characterized in that: in the through hole of described wedge (6b), be provided with magnet (6e), wedge (6b) is made for non-magnet material, rectangular sleeve (6a), cylinder (1a) and cam (6d) are permeability magnetic material and make, and utilize described magnet (6e) that described rectangular sleeve (6a) and cylinder (1a) are obtained and locate.
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| CN105973276A (en) * | 2016-04-25 | 2016-09-28 | 长春工业大学 | Laser-type contact sensor |
| CN105758335B (en) * | 2016-05-10 | 2018-05-01 | 合肥工业大学 | Three-dimensional micro-nano measuring probe |
| CN105758335A (en) * | 2016-05-10 | 2016-07-13 | 合肥工业大学 | High-precision wide-measuring-range three-dimensional micro-nano measuring probe |
| CN106441137A (en) * | 2016-10-10 | 2017-02-22 | 北方民族大学 | Three-dimensional laser scanning probe |
| CN106323171A (en) * | 2016-10-10 | 2017-01-11 | 北方民族大学 | Two-dimensional laser scanning probe |
| CN106323171B (en) * | 2016-10-10 | 2018-10-30 | 北方民族大学 | Two dimensional laser scanning gauge head |
| CN106289063B (en) * | 2016-10-10 | 2018-10-30 | 北方民族大学 | The one-dimensional laser scanning testing head of single light source |
| CN106441137B (en) * | 2016-10-10 | 2018-11-30 | 北方民族大学 | 3 D laser scanning testing head |
| CN106289063A (en) * | 2016-10-10 | 2017-01-04 | 北方民族大学 | The one-dimensional laser scanning testing head of single light source |
| CN107152912A (en) * | 2017-06-28 | 2017-09-12 | 深圳华清精密科技有限公司 | Optical trigger measuring head and measuring method |
| CN107152912B (en) * | 2017-06-28 | 2019-10-01 | 深圳华清精密科技有限公司 | Optical trigger measuring head and measuring method |
| CN109827680A (en) * | 2019-03-19 | 2019-05-31 | 合肥工业大学 | It is a kind of based on the highly sensitive micrometer power of the three-dimensional of cmos sensor |
| CN112050765A (en) * | 2019-06-07 | 2020-12-08 | 株式会社三丰 | Measuring probe failure determination unit and failure determination method thereof |
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