CN106323171B - Two dimensional laser scanning gauge head - Google Patents

Abstract

The invention relates to a two-dimensional laser scanning measuring head, comprising a first laser source for emitting a first laser beam, for reflecting the first laser beam to a laser reflection plane of a measuring ball, and for The reflected laser beam is transmitted to the beam splitter of a first photodetector, and according to the position change value of the laser beam received by the first photodetector, the processing system for obtaining the displacement change value of the measuring rod is used to measure the measuring ball A measuring assembly for two-dimensional displacement change, the measuring assembly includes a measuring rod and the measuring ball. The two-dimensional laser scanning probe provided by the embodiment of the present invention can not only measure the direct displacement change of the support seat, but also measure the deformation of the measuring rod. Therefore, compared with the traditional two-dimensional probe, the two-dimensional laser scanning probe provided by the embodiment of the present invention The three-dimensional laser scanning probe has higher measurement accuracy, simple structure, easy mass production and low cost.

Description

2D Laser Scanning Probe

technical field

The invention relates to the technical field of precision measurement, in particular to a two-dimensional laser scanning measuring head.

Background technique

The probe is one of the key components of the precision measuring instrument. As a sensor, it provides the geometric position information of the workpiece to be measured. The development level of the probe directly affects the measurement accuracy and efficiency of the precision measuring instrument. Precision probes are usually divided into contact probes and non-contact probes, of which contact probes are further divided into mechanical probes, trigger probes and scanning probes.

Mechanical probes are rarely used in the field of industrial measurement because they are measured manually, with low accuracy and low measurement efficiency. The precision probe widely used in the current industrial field is a trigger probe. Its principle is that the precision measuring instrument sends a sampling pulse signal when the probe tip contacts the workpiece, and the probe ball is latched by the processing system of the instrument at this time. The coordinates of the center are used to determine the coordinates of the contact point between the measuring end and the workpiece to be measured. This type of probe has the advantages of simple structure, convenient use, and high trigger accuracy. The displacement deviation of the probe limits the further improvement of its measurement accuracy, and the highest accuracy can only reach a few tenths of a micron. The most widely used type of probe at present is the scanning probe. Its principle is that after the measuring end of the probe touches the workpiece, the probe is displaced due to the contact force, and the output of the conversion device of the probe is slightly deflected from the measuring rod. The signal is proportional to the shift, and the signal is superimposed with the corresponding coordinate value of the precision measuring instrument to obtain a more accurate coordinate of the point on the measured workpiece. If the deformation of the measuring rod is not considered, the scanning probe is isotropic, so its accuracy is much higher than that of the trigger probe. However, the deformation of the measuring rod exists objectively. The current measuring head only considers the direct displacement of the measuring ball, but does not take into account the deformation of the measuring rod. Therefore, the accuracy of the scanning measuring head is not high enough. In addition, the scanning probe also has the disadvantages of complex structure and high manufacturing cost.

Contents of the invention

The purpose of the present invention is to improve the shortcomings of low measurement accuracy and difficulty in measuring the deformation of the measuring rod in the prior art, and provide a two-dimensional laser scanning measuring head that can improve the measurement accuracy.

In order to achieve the purpose of the above invention, the embodiments of the present invention provide the following technical solutions:

A two-dimensional laser scanning probe, including a measuring assembly for measuring two-dimensional displacement changes of a measuring rod, the measuring assembly including the measuring rod and a measuring ball,

The measuring rod is a hollow measuring rod, the measuring ball is arranged at one end of the hollow measuring rod, and the spherical surface connected between the measuring ball and the hollow measuring rod is provided with a laser reflection plane, the laser reflection of the measuring ball The plane is located inside the hollow measuring rod; the two-dimensional laser scanning probe also includes:

a first laser source for emitting a first laser beam;

a beam splitter, arranged obliquely at the other end of the hollow measuring rod, for reflecting the first laser beam emitted by the first laser source to the laser reflection plane of the measuring ball, and reflecting the laser light of the measuring ball The laser beam reflected by the plane is transmitted to a first photodetector;

The first photodetector is a two-dimensional photodetector, which is used to receive the laser beam reflected by the laser reflection plane of the measuring ball transmitted by the beam splitter;

The processing system obtains the deformation amount of the measuring rod according to the position change value of the laser beam received by the first photoelectric detector.

According to an embodiment of the present invention, the measurement component also includes:

A support seat, the hollow measuring rod is arranged on the support seat, one side of the support seat is provided with a first laser reflection plane, and the other side of the support seat is provided with a second laser reflection plane;

a second laser source, configured to emit a second laser beam, and the second laser beam is incident on the first laser reflection plane of the support base;

a third laser source, configured to emit a third laser beam, and the third laser beam is incident on the second laser reflection plane of the support base;

The second photodetector is used to receive the laser beam reflected by the laser reflection plane of the support seat;

The third photodetector is used to receive the laser beam reflected by the second laser reflection plane of the support seat;

a translation component, used to make the support base move linearly;

a reset component, used to reset the support base to its initial position;

The processing system is further configured to calculate the displacement change value of the measuring ball according to the position change values of the laser beams received by the second photodetector and the third photodetector respectively.

As another implementation, the measurement component also includes:

A support seat, the hollow measuring rod is arranged on the support seat, and the support seat is also provided with a second laser source and a third laser source;

The second laser source is used to emit a second laser beam; the third laser source is used to emit a third laser beam;

a second photodetector for receiving the second laser beam incident by the second laser source; a third photodetector for receiving the third laser beam incident by the third laser source;

a translation component, used to make the support base move linearly;

a reset component, used to reset the support base to its initial position;

The processing system is further configured to calculate the displacement change value of the measuring ball according to the position change values of the laser beams received by the second photodetector and the third photodetector respectively.

As yet another implementation, the measurement component also includes:

A support seat, the hollow measuring rod is arranged on the support seat, and the support seat is also provided with a second photodetector and a third photodetector;

The second laser source is used to emit the second laser beam; the third laser source is used to emit the third laser beam;

The second photodetector is used for receiving the second laser beam incident by the second laser source; the third photodetector is used for receiving the third laser beam incident by the third laser source bundle;

a translation component, used to make the support base move linearly;

a reset component, used to reset the support base to its initial position;

The processing system is further configured to calculate the displacement change value of the measuring ball according to the position change values of the laser beams received by the second photodetector and the third photodetector respectively.

According to an embodiment of the present invention, the support seat is a hollow support seat, and the hollow support seat is provided with a through hole for the hollow measuring rod to pass through, and the end of the hollow measuring rod facing away from the measuring ball is arranged on the In the hollow support seat.

According to an embodiment of the present invention, the incident surface of the second photodetector and the incident surface of the third photodetector are arranged perpendicular to each other, and the translation component is used to move the hollow support base relative to the second photoelectric detector. The vertical planes of the detector and the third photodetector move.

According to an embodiment of the present invention, the translation component includes two first guide grooves parallel to each other, at least one second guide groove is slidably arranged between the two first guide grooves, and the first guide groove is connected to the first guide groove. The second guide grooves are perpendicular to each other, and the second guide grooves are slidably connected to the hollow support seat.

According to an embodiment of the present invention, the two-dimensional laser scanning probe further includes a housing, and the reset component is a spring, one end of the spring is connected to the hollow support seat, and the other end is connected to the housing.

According to an embodiment of the present invention, the measuring ball is a spherical void, and the bottom surface of the spherical void serves as a laser reflection plane of the measuring ball.

According to an embodiment of the present invention, the two-dimensional laser scanning probe further includes a casing, and the second photodetector and/or the third photodetector are rotatably installed in the casing.

Compared with the prior art, the beneficial effect of the present invention: the two-dimensional laser scanning measuring head provided by the embodiment of the present invention not only includes a measuring component for measuring the displacement change of the support seat, but also includes a first measuring component for measuring the deformation of the measuring rod A laser source, beam splitter, first photodetector, etc. not only measure the direct displacement change of the support seat, but also measure the deformation of the measuring rod. Therefore, compared with the traditional two-dimensional measuring head, the two-dimensional measuring head provided by the embodiment of the present invention The three-dimensional laser scanning probe has higher measurement accuracy, simple structure, easy mass production and low cost.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and thus It should be regarded as a limitation on the scope, and those skilled in the art can also obtain other related drawings based on these drawings without creative work.

Fig. 1 is a schematic structural diagram of a second measuring assembly for measuring the displacement change of a measuring rod in an embodiment of the present invention.

Fig. 2 is a schematic diagram of the optical path for measuring the displacement change of the measuring rod in the embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a two-dimensional laser scanning measuring head provided by an embodiment of the present invention.

Fig. 4 is a schematic structural diagram of a translation component in an embodiment of the present invention.

Fig. 5 is a schematic diagram of the optical path for measuring the displacement change of the measuring ball in the embodiment of the present invention.

FIG. 6 is a schematic diagram of the optical path after the second photodetector in FIG. 5 is rotated by a certain angle.

Fig. 7 is a schematic structural diagram of another two-dimensional laser scanning measuring head provided by an embodiment of the present invention.

Fig. 8 is a schematic structural diagram of another two-dimensional laser scanning measuring head provided by an embodiment of the present invention.

Description of main component symbols

First laser beam 100; first laser source 101; hollow measuring rod 102; measuring ball 103; beam splitter 104; first photodetector 105; second laser source 106; second photodetector 107; Spring 110; Housing 111; Connecting block 112; The third photodetector 115; The third laser source 116; The first guide groove 117; The second guide groove 118; Slider 119; The laser beam 300 ; the first laser reflection plane 400 of the hollow support seat; the third laser beam 500 .

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The components of the embodiments of the invention generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

The two-dimensional laser scanning probe provided by the embodiment of the present invention includes a measuring component 1 for measuring the two-dimensional direct displacement change of the measuring rod (also can be understood as a support base and a measuring ball), and also includes a measuring component for measuring the deformation of the measuring rod two.

As a possible implementation, Fig. 1 shows the structure of the second measuring assembly used to measure the displacement change of the measuring rod in this embodiment, please refer to Fig. 1, in this embodiment, the second measuring assembly used to measure the deformation of the measuring rod Including a measuring rod, a measuring ball 103, a first laser source 101, a spectroscope 104, a first photodetector 105 and a processing system; wherein the measuring rod is a hollow measuring rod 102, and the measuring ball 103 is arranged at one end of the hollow measuring rod 102, And the spherical surface connected between the measuring ball 103 and the hollow measuring rod 102 is provided with a laser reflection plane, and the laser reflecting plane 200 of the measuring ball is located inside the hollow measuring rod 102; The bottom surface of the ball is used as the laser reflection plane of the measuring ball.

a first laser source 101, configured to emit a first laser beam 100;

The beam splitter 104 is obliquely arranged at the other end of the hollow measuring rod 102, and is used to reflect the first laser beam 100 emitted by the first laser source 101 to the laser reflection plane 200 of the measuring ball, and to transmit the laser light of the measuring ball The laser beam reflected by the reflective plane 200 is transmitted to a first photodetector 105;

The first photodetector 105 is a two-dimensional photodetector for receiving the laser beam reflected by the laser reflection plane 200 of the measurement ball transmitted by the spectroscope 104;

The processing system obtains the deformation amount of the measuring rod according to the position change value of the laser beam received by the first photoelectric detector 105 .

The two-dimensional laser scanning measuring head is installed on the precision measuring instrument. When the measuring ball 103 is in direct contact with the workpiece to be measured, the measuring ball 103 will be displaced due to the resistance. The hollow measuring rod 102 is connected with the measuring ball 103, and the hollow measuring rod 102 will also deformed. FIG. 1 shows the optical path of the hollow measuring rod 102 before deformation, and FIG. 2 shows the optical path of the hollow measuring rod 102 after deformation. Please refer to Fig. 1 and Fig. 2, before the deformation of the hollow measuring rod 102, the first laser beam 100 (parallel beam) emitted by the first laser source 101 is incident on the beam splitter 104, and the beam splitter 104 reflects the first laser beam 100 to the measurement The laser reflection plane 200 of the ball, the laser beam reflected by the beam splitter 104 is reflected back to the beam splitter 104 along the original path through the laser reflection plane 200 of the measuring ball, and the beam splitter 104 transmits the laser beam reflected by the laser reflection plane 200 of the measuring ball to the first photodetector 105 . After the hollow measuring rod 102 is deformed, the first laser beam 100 emitted by the first laser source 101 is incident on the beam splitter 104, and the beam splitting mirror 104 reflects the first laser beam 100 to the laser reflection plane 200 of the measuring ball. Compared with the incident light path before the rod 102 deforms, the light path has not changed, but the laser beam reflected by the beam splitter 104 onto the laser reflection plane 200 of the measuring ball falls on the laser reflection plane 200 of the measuring ball. The laser beam is reflected to the beam splitter 104 through the laser reflection plane 200 of the measuring ball, and the beam splitter 104 transmits the laser beam reflected by the laser reflection plane 200 of the measuring ball to the first photodetector 105. Compared with the optical path, the reflection optical path changes, and the laser beam reflected by the laser reflection plane 200 of the measuring ball falls on the beam splitter 104 and the landing point of the beam splitter 104 is displaced. The point is displaced, as shown in the figure, and the displacement is defined as L0; since the position change of the laser beam received by the first photodetector 105 is caused by the deformation of the hollow measuring rod 102, by measuring the deformation of the hollow measuring rod 102 The position change of the laser beam received by the first photodetector 105 can obtain the displacement variation of the hollow measuring rod 102 , that is, the deformation of the hollow measuring rod 102 .

According to the position change value of the laser beam received by the first photodetector 105, there are many ways to obtain the displacement change value of the hollow measuring rod 102 in two dimensions (the deformation of the hollow measuring rod), such as measuring and calculating the hollow measuring rod 102 geometric relations before and after deformation, obtain the mathematical formula that can reflect the deformation of hollow measuring rod 102, for example can be by formula Calculate the amount of deformation of the hollow measuring rod 102; as a simple and effective way, statistics (that is, multiple test measurements) can be used to establish the displacement change value of the hollow measuring rod 102 and the laser beam received by the first photodetector 105 The relational table of the position change value of , the deformation value of the hollow measuring rod 102 can be obtained by directly looking up the table during actual measurement.

It should be noted that, because the measuring rod is a hollow measuring rod 102, the laser beam reflected by the beam splitter 104 can pass through the hollow measuring rod 102 and be incident on the laser reflection plane 200 of the measuring ball, and the laser beam reflected by the laser reflecting plane 200 of the measuring ball The beam can also pass through the hollow stem 102 and enter the beamsplitter 104 . Since the deformation of the hollow measuring rod 102 caused by the direct contact between the measuring ball 103 and the measured workpiece is also limited, the aperture of the hollow measuring rod 102 is sufficient to ensure that the laser beam reflected by the beam splitter 104 can pass through the hollow measuring rod 102 and enter the measuring ball. The laser reflection plane 200 of the measuring ball, the laser beam reflected by the laser reflection plane 200 of the measuring ball can also pass through the hollow measuring rod 102 and enter the spectroscope 104 .

The two-dimensional laser scanning probe provided in this embodiment can not only measure the direct displacement change of the hollow measuring rod 102, but also measure the deformation of the measuring rod, and can obtain a more accurate displacement of the measuring ball 103. Therefore, compared with the traditional two-dimensional laser scanning probe, the measurement accuracy is higher, and the structure is simple, easy to mass produce, and the cost is low.

The measuring assembly for measuring the two-dimensional direct displacement change of the hollow measuring rod 102 can have various implementation forms, such as adopting a traditional trigger structure, a scanning structure, etc., as an example of a simple implementation mode, FIG. 3 The structure of a two-dimensional laser scanning measuring head provided in this embodiment is shown. Referring to Fig. 3, in the present embodiment, the measuring assembly for measuring the two-dimensional direct displacement change of the hollow measuring rod 102 includes the measuring ball 103, the hollow measuring rod 102, the processing system, and further includes:

The support seat, the hollow measuring rod 102 is arranged on the support seat, in this embodiment, the support seat is rectangular in shape, one side of the support seat is provided with a first laser reflection plane, and the other side of the support seat is provided with a second laser reflection plane ;

The second laser source 106 is used to emit a second laser beam 300, and the second laser beam 300 is incident on the first laser reflection plane of the support base;

The third laser source 116 is used to emit a third laser beam 500, and the third laser beam 500 is incident on the second laser reflection plane of the support base;

The second photodetector 107 is a one-dimensional photodetector for receiving the laser beam reflected by the first laser reflection plane of the support base;

The third photodetector 115 is a one-dimensional photodetector for receiving the laser beam reflected by the second laser reflection plane of the support seat;

a translation component, used to make the support base move linearly;

a reset component, used to reset the support base to its initial position;

The processing system is used to calculate the displacement change value of the measuring ball 103 according to the position change values of the laser beams received by the second photodetector 107 and the third photodetector 115 respectively. The second photodetector 107 and the third photodetector 115 can be one-dimensional photodetectors, respectively collect the position change value in one direction, and obtain the direct displacement of the measuring ball in two dimensions through the cooperation of the two photodetectors. change value.

The hollow measuring rod 102 is arranged on the supporting base so that the hollow measuring rod 102 is moved when the supporting base moves. The hollow measuring rod 102 can be arranged on the side wall of the supporting base (i.e. the outside of the supporting base). For the volume of the measuring head, preferably, the hollow measuring rod 102 is arranged inside the supporting seat. As shown in Figure 3, as an example of a possible implementation, the support seat is a hollow support seat 108, and the hollow support seat 108 is provided with a hollow support seat 102 for the passage of the hollow measuring rod 102 (including the deformation of the hollow measuring rod 102 before and after deformation). through the through hole), the end of the hollow measuring rod 102 away from the measuring ball 103 is arranged in the hollow support seat 108 . In addition, the hollow support seat 108 is designed as a hollow cuboid structure, which has a regular structure and is easy to produce.

In this embodiment, the two-dimensional laser scanning probe further includes a housing 111 , and the second photodetector 107 is rotatably installed in the housing 111 . The translating component is used for translating the hollow support base 108 to make it move linearly in two different directions. As a possible implementation, specifically, as shown in FIG. 4 , the specific structure of the translation component is: it includes two first guide grooves 117 parallel to each other, and two first guide grooves 117 are slidably arranged between two first guide grooves 117 . The second guide grooves 118, the two second guide grooves 118 are connected to the bottom of the hollow support seat 108 through the slider 119. The translation component completes the linear displacement in different directions through the first guide groove 117 and the second guide groove 118 arranged perpendicular to each other, the second guide groove 118 can slide along the first guide groove 117, and the probe base 4 can slide along the The second guide groove 118 slides to realize two-dimensional movement. When the measuring ball 7 is in direct contact with the workpiece to be measured, it is resisted, and the hollow support seat 108 slides relative to the second guide groove 118, and the second guide groove 118 slides relative to the first guide groove 117, thereby realizing that the hollow support seat 108 slides relative to the first guide groove 117. Displacement in two directions, the plane formed by these two directions is the two-dimensional displacement surface of the hollow support seat 108 .

As an example of a possible implementation mode, the reset part is arranged in the housing 111, and the reset part is a spring 110. The displacement of the measuring ball 103 caused by the resistance of the workpiece to be measured causes the displacement of the hollow support seat 108. When the probe completes the measurement , the resetting component can reset the hollow support seat 108 to the initial position, so as to facilitate accurate measurement of the next measuring point of the workpiece to be measured.

The positions of the second laser source 106 and the second photodetector 107 are fixed, and the translation component can make the hollow support seat 108 do linear motion. When the position of the hollow support seat 108 changes, the second laser beam emitted by the second laser source 106 300 incident on the position of the laser reflection plane of the hollow support base 108 changes, the position of the laser beam incident on the second photodetector 107 after being reflected by the first laser reflection plane 400 of the hollow support base also changes accordingly, and the third The position where the third laser beam 500 emitted by the laser source 116 is incident on the third photodetector 115 also changes, and the change value of the second photodetector 107 and the third photodetector 115 for different laser beam incident positions is changed by the processing system. , by calculating and analyzing, the displacement change value of the hollow support seat 108 in its linear displacement direction can be obtained.

As shown in Figure 5 (based on viewing angle reasons, only the optical path change of the second laser beam is shown), during the horizontal movement of the hollow support base 108, it is assumed that the second photodetector 107 is arranged vertically, and the second laser source 106 is arranged obliquely Above the second photodetector 107, and the angle between the second laser beam 300 emitted by the second laser and the vertical line is α, when the two-dimensional laser scanning probe moves a distance of x in the horizontal direction, the second photoelectric The distance measured by the detector 107 is y, then, the displacement magnification of the hollow support base 108 measured by the second photodetector 107 is

The two-dimensional laser scanning measuring head is installed on the precision measuring instrument. When the measuring ball 103 is in direct contact with the workpiece to be measured, it will be displaced due to resistance. The second laser source 106, the third laser source 116, the second photodetector 107, the third photodetector 115, and the processing system cooperate to calculate the direct displacement of the measuring ball 103, so as to compensate for the contact of the measuring ball 103 with the workpiece The positioning deviation of the measured workpiece caused by the time displacement, due to the displacement of the hollow support seat 108 obtained on the second photodetector 107 and the third photodetector 115, can obtain the linear displacement direction of the measured workpiece in the hollow support seat 108. The more accurate measurement coordinates improve the accuracy of measurement. Compared with the traditional scanning probe, the two-dimensional laser scanning probe in this embodiment simplifies the structure, reduces the production cost, and is easy to process and manufacture in batches.

In order to adjust the magnification of the second photodetector 107 for measuring the displacement of the two-dimensional laser scanning probe, the second photodetector 107 is rotatable on the side of the casing 111 .

The rotatable second photodetector 107 can change its rotational position according to the actual required measurement accuracy, change the relative position and angle of the second laser beam 300 emitted by the second photodetector 107 and the second laser source 106, thereby changing The second photodetector 107 measures the magnification of the displacement of the two-dimensional laser scanning probe, which meets the actual needs.

As shown in Figure 6, after the second photodetector 107 is rotated and tilted at a certain angle, such as β, the magnification can be adjusted again. It can be clearly seen in the figure that when the hollow support base 108 translates the same distance x, the tilted The incident positions of the two incident laser beams on the second photodetector 107 have changed, and at this moment, the distance between the two is Then the displacement magnification of the hollow support base 108 measured by the second photodetector 107 is The angle can be adjusted according to different needs.

The second and third photodetectors can be rotated relative to the second and third laser sources respectively, and similarly, the second and third laser sources can also be rotated relative to the second and third photodetectors, so that meet actual needs.

The first photodetector 105, the second photodetector 107, and the third photodetector 115 used in this embodiment can be commonly used position sensitive detectors (Position Sensitive Detector, referred to as PSD), which belong to semiconductor devices and are generally made of It has a PN structure, and its working principle is based on the transverse photoelectric effect, which can be used for accurate measurement of position coordinates, and has the advantages of high sensitivity, high resolution, fast response speed and simple configuration circuit. The position-sensitive detectors are divided into two-dimensional position-sensitive detectors and two-dimensional position-sensitive detectors. In order to save costs, a one-dimensional position-sensitive detector may be selected in this embodiment. One-dimensional position sensitive detectors, referred to as one-dimensional PSD, can detect the movement of a bright spot on its surface in a unique direction. Install the one-dimensional PSD on the X-axis, Y-axis or Z-axis of the housing 111, or other directions, to obtain its displacement value in this direction, and compensate it to the measured value of the workpiece to obtain the one-dimensional PSD A more accurate measurement in the dimensional direction.

In the structure shown in Figure 4, the translation component includes a pair of guide groove one 117 and at least one guide groove two 118 arranged in parallel, and the guide groove one 117 and the guide groove two 118 are vertically arranged, and the reset member is a spring 110, as another In a possible embodiment, the translation component and the reset component can also be a double reed structure, and the double reed structure is mainly composed of two layers of parallel reed structures. Wherein the hollow support seat 108 is installed on a measuring head base mounting plate, two hollow reeds 1 parallel to each other are arranged on the measuring head base mounting plate, and the ends of the hollow reeds 1 are connected to the mounting support frame, so that the measuring head The head base mounting plate can swing back and forth relative to the installation support frame in a direction perpendicular to the plane of the hollow reed one under the action of the two hollow reeds one. Two parallel reeds two are also arranged on the installation support frame. The end is connected on the fixed plate, and the reed two and the hollow reed one are perpendicular to each other, so that the installation support frame can swing back and forth relative to the fixed plate in the direction perpendicular to the plane of the two reeds, so that the hollow support seat 108 can be placed on each other. The two vertical hollow reeds 1 and 2 perform linear motion and return motion in the plane direction, thereby forming the hollow support seat 108 to move linearly and return in two different linear directions, ie, the XY direction.

Please refer to Fig. 7. Fig. 7 shows the structure of another structure of the two-dimensional laser scanning probe provided in this embodiment. Compared with the structure of the two-dimensional laser scanning probe shown in Fig. 3, in Fig. 7 In the shown structure, the side of the hollow support base 108 is not a laser reflection plane, that is, the side is not provided with a laser reflection film, the second photodetector 107 is arranged on the side of the hollow support base 108, and the second laser light emitted by the second laser source 106 The laser beam 300 is directly incident on the second photodetector 107 .

During the horizontal movement of the hollow support base 108, assuming that the second photodetector 107 (only taking the second photodetector 107 as an example) is set in the vertical direction, the second laser beam 300 emitted by the second laser is in line with the vertical line The included angle is α, when the two-dimensional laser scanning probe moves a distance of x in the horizontal direction, the distance measured by the second photodetector 107 is y, then the displacement of the hollow support seat 108 measured by the second photodetector 107 is amplified multiples of If the second photodetector 107 is rotated and tilted at a certain angle, such as β, when the hollow support base 108 is translated by the same distance x, the incident positions of the two incident laser beams on the tilted second photodetector 107 have changed , at this time, the distance between the two is x·tanα·cosβ+x·tanα·sinβ·cot(α-β), then the displacement magnification of the hollow support seat 108 measured by the second photodetector 107 is tanα· cosβ+tanα·sinβ·cot(α-β).

Please refer to Fig. 8. Fig. 8 shows the structure of another two-dimensional laser scanning probe provided in this embodiment. Compared with the structure of the two-dimensional laser scanning probe shown in Fig. 7, in Fig. 8 In the shown structure, the second laser source 106 and the third laser source 116 are arranged on the side of the hollow support base 108, the second laser beam 300 emitted by the second laser source 106 is directly incident on the second photodetector 107, and the third laser The third laser beam 500 emitted by the source 116 is directly incident on the third photodetector 115 . The principle of the structure shown in FIG. 8 is the same as that of the structure shown in FIG. 7 , so details are not repeated here.

Those skilled in the art can easily understand that in this embodiment, only three arrangements of the second and third photodetectors and the second and third laser sources are listed, and there can be many other implementations. Here It is not convenient to list them all.

It should be noted that like numerals and letters denote similar items in the following figures, therefore, once an item is defined in one figure, it does not require further definition and explanation in subsequent figures. Meanwhile, in the description of the present invention, the terms "first", "second", "third" and so on are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner" and "outer" are based on the Orientation or positional relationship, or the orientation or positional relationship that the inventive product is usually placed in use, is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, so as to Specific orientation configurations and operations, therefore, are not to be construed as limitations on the invention.

In the description of the present invention, it should also be noted that, unless otherwise clearly specified and limited, the terms "installation", "installation", "connection" and "connection" should be understood in a broad sense, for example, it may be a fixed connection, It can also be detachably connected, or integrally connected; for those skilled in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

The above is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Anyone skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present invention. Should be covered within the protection scope of the present invention.

Claims (10)

1. a kind of two dimensional laser scanning gauge head includes the measurement assembly for measuring the variation of measuring staff two-dimension displacement, the measurement group Part includes the measuring staff and survey ball, which is characterized in that

The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described hollow The spherical surface of measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the interior of the hollow measuring staff Portion；The two dimensional laser scanning gauge head further includes：

First laser source, for emitting first laser beam；

Spectroscope is obliquely installed in the other end of the hollow measuring staff, the first laser for emitting the first laser source Beam reflexes to the laser reflection plane for surveying ball, and by the laser beam transmission of the laser reflection plane reflection for surveying ball to one First photodetector；

First photodetector is 2 D photoelectric detector, for receiving the survey ball transmitted through the spectroscope The laser beam of laser reflection plane reflection；

Processing system, the change in location value of the laser beam received by first photodetector obtain described hollow The deflection of measuring staff.

2. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：

Support base, the hollow measuring staff are set to the support base, and it is anti-that a side of the support base is provided with first laser Plane is penetrated, another side of the support base is provided with the second laser plane of reflection；

Second laser source, for emitting second laser beam, and the second laser beam is incident to the first laser of the support base The plane of reflection；

Third lasing light emitter, for emitting third laser beam, and the third laser beam is incident to the second laser of the support base The plane of reflection；

Second photodetector, the laser beam that the first laser plane of reflection for receiving the support base reflects；

Third photodetector, the laser beam that the second laser plane of reflection for receiving the support base reflects；

Member of translational, for making the support base move in a straight line；

Reset components, for the support base to be reset to initial position；

The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively The change in displacement value for surveying ball is calculated in the change in location value of light beam.

3. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：

Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with second laser source and third laser Source；

The second laser source, for emitting second laser beam；The third lasing light emitter, for emitting third laser beam；

Second photodetector, the second laser beam for receiving the second laser source incidence；Third photodetector, The third laser beam for receiving the third lasing light emitter incidence；

Member of translational, for making the support base move in a straight line；

Reset components, for the support base to be reset to initial position；

The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively The change in displacement value for surveying ball is calculated in the change in location value of light beam.

4. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：

Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with the second photodetector and third Photodetector；

Second laser source, for emitting second laser beam；Third lasing light emitter, for emitting third laser beam；

Second photodetector, the second laser beam for receiving the second laser source incidence；The third light Electric explorer, the third laser beam for receiving the third lasing light emitter incidence；

Member of translational, for making the support base move in a straight line；

Reset components, for the support base to be reset to initial position；

The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively The change in displacement value for surveying ball is calculated in the change in location value of light beam.

5. according to any two dimensional laser scanning gauge heads of claim 2-4, which is characterized in that the support base is hollow branch Seat is supportted, the hollow support seat is equipped with the through-hole passed through for the hollow measuring staff, and the hollow measuring staff surveys the one of ball away from described End is set in the hollow support seat.

6. two dimensional laser scanning gauge head according to claim 5, which is characterized in that the incidence of second photodetector Face and the plane of incidence of the third photodetector are arranged in a mutually vertical manner, and the member of translational is used for hollow support seat edge Relatively described second photodetector, the third photodetector vertical plane take exercises.

7. two dimensional laser scanning gauge head according to claim 6, which is characterized in that the member of translational includes two mutual The first parallel guide groove, between described two first guide grooves sliding be provided at least one second guide groove, described first Guide groove is mutually perpendicular to second guide groove, and second guide groove is slidably connected the hollow support seat.

8. according to the two dimensional laser scanning gauge head described in claim 7, which is characterized in that the two dimensional laser scanning gauge head is also Including shell, the reset components are spring, and one end of the spring is connected to the hollow support seat, and the other end is connected to institute State shell.

9. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the survey ball is segment, the bottom of segment Face is as the laser reflection plane for surveying ball.

10. two dimensional laser scanning gauge head according to claim 3, which is characterized in that the two dimensional laser scanning gauge head is also Including shell, second photodetector and/or the third photodetector are rotatably mounted in the shell.