CN106323171B - Two dimensional laser scanning gauge head - Google Patents
Two dimensional laser scanning gauge head Download PDFInfo
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- CN106323171B CN106323171B CN201610883445.8A CN201610883445A CN106323171B CN 106323171 B CN106323171 B CN 106323171B CN 201610883445 A CN201610883445 A CN 201610883445A CN 106323171 B CN106323171 B CN 106323171B
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 54
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of two dimensional laser scanning gauge heads, it include the first laser source for emitting first laser beam, for first laser beam to be reflexed to the laser reflection plane for surveying ball, and will survey ball laser reflection plane reflection laser beam transmission to one first photodetector spectroscope, and the change in location value of the laser beam received by the first photodetector, obtain the processing system of the change in displacement value of measuring staff, measurement assembly for measuring the variation of ball two-dimension displacement, the measurement assembly includes measuring staff and the survey ball.Two dimensional laser scanning gauge head provided in an embodiment of the present invention, the direct change in displacement of support base can not only be measured, the deflection of measuring staff can also be measured, therefore compared with traditional two-dimentional gauge head, the measurement accuracy higher of two dimensional laser scanning gauge head provided in an embodiment of the present invention, and it is simple in structure, it is easy to produce in batches, it is at low cost.
Description
Technical field
The present invention relates to Technology of Precision Measurement field more particularly to a kind of two dimensional laser scanning gauge heads.
Background technology
Gauge head is one of critical component of precision measurement instrument, and the geometric position information of measured workpiece is provided as sensor, is surveyed
The development level of head directly affects the measurement accuracy and measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
First two is surveyed with contactless, wherein contact measuring head is divided into as mechanical gauge head, touch trigger probe and scanning probe.
For mechanical gauge head because being manual measurement, and precision is not high, measurement efficiency is low, therefore is currently rarely used for Industrial Measurement
Amount field.The widely used precision feeler in current industrial field is touch trigger probe, and principle is when gauge head surveys end and tested work
Precision measurement instrument sends out sampling pulse signal when part contacts, and the coordinate for surveying the end centre of sphere at this time is latched by the processing system of instrument
Value determines the coordinate at survey end and measured workpiece contact point with this.Such gauge head has simple in structure, easy to use and higher
The advantages that triggering precision, the disadvantage is that there are anisotropy (triangle effect) or contact measuring head when contacting measured workpiece
Micro-displacement is generated because of resistance so as to cause the offset deviation of gauge head, limits further increasing for its measurement accuracy, most
High-precision can only reach several microns of zero.The most wide gauge head type of current application is scanning probe, and principle is that gauge head survey end exists
After contacting measured workpiece, gauge head since the effect of contact force is subjected to displacement, the output of the conversion equipment of gauge head and measuring staff it is small partially
The signal of direct ratio is moved into, the respective coordinate value superposition of the signal and precision measurement instrument can obtain the relatively accurate seat put on measured workpiece
Mark.If not considering the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But
The deformation of measuring staff is objective reality, and current gauge head only accounts for surveying the direct displacement of ball, and does not consider the deformation of measuring staff,
Therefore, even the precision of scanning probe is also not high enough.In addition, scanning probe also has, complicated, manufacturing cost is high
The shortcomings of.
Invention content
It is not high it is an object of the invention to improve measurement accuracy in the presence of the prior art, and be difficult to measure measuring staff deformation
The deficiency of amount provides a kind of two dimensional laser scanning gauge head that measurement accuracy can be improved.
In order to achieve the above-mentioned object of the invention, an embodiment of the present invention provides following technical schemes：
A kind of two dimensional laser scanning gauge head includes the measurement assembly for measuring the variation of measuring staff two-dimension displacement, the measurement
Component include the measuring staff and survey ball,
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described
The spherical surface of hollow measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the hollow measuring staff
It is internal；The two dimensional laser scanning gauge head further includes：
First laser source, for emitting first laser beam；
Spectroscope is obliquely installed in the other end of the hollow measuring staff, first for emitting the first laser source
Laser beam reflex to it is described survey ball laser reflection plane, and by it is described survey ball laser reflection plane reflection laser beam transmission
To one first photodetector；
First photodetector is 2 D photoelectric detector, for receiving the survey transmitted through the spectroscope
The laser beam of the laser reflection plane reflection of ball；
Processing system, the change in location value of the laser beam received by first photodetector obtain described
The deflection of measuring staff.
According to embodiments of the present invention, the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, and a side of the support base is provided with first and swashs
Another side of light reflection plane, the support base is provided with the second laser plane of reflection；
Second laser source, for emitting second laser beam, and the second laser beam is incident to the first of the support base
Laser reflection plane；
Third lasing light emitter, for emitting third laser beam, and the third laser beam is incident to the second of the support base
Laser reflection plane；
Second photodetector, the laser beam of the laser reflection plane reflection for receiving the support base；
Third photodetector, the laser beam that the second laser plane of reflection for receiving the support base reflects；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to be received respectively according to second photodetector, the third photodetector
To the change in location value of laser beam, the change in displacement value for surveying ball is calculated.
As another embodiment, the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with second laser source and third
Lasing light emitter；
The second laser source, for emitting second laser beam；The third lasing light emitter, for emitting third laser beam；
Second photodetector, the second laser beam for receiving the second laser source incidence；Third photoelectricity is visited
Survey device, the third laser beam for receiving the third lasing light emitter incidence；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to be received respectively according to second photodetector, the third photodetector
To the change in location value of laser beam, the change in displacement value for surveying ball is calculated.
As another embodiment, the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, the support base be additionally provided with the second photodetector and
Third photodetector；
Second laser source, for emitting second laser beam；Third lasing light emitter, for emitting third laser beam；
Second photodetector, the second laser beam for receiving the second laser source incidence；Described
Three photodetectors, the third laser beam for receiving the third lasing light emitter incidence；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to be received respectively according to second photodetector, the third photodetector
To the change in location value of laser beam, the change in displacement value for surveying ball is calculated.
According to embodiments of the present invention, the support base is hollow support seat, and the hollow support seat is equipped with for described hollow
The through-hole that measuring staff passes through, the hollow measuring staff are set to away from described one end for surveying ball in the hollow support seat.
According to embodiments of the present invention, the incidence of the plane of incidence of second photodetector and the third photodetector
Face is arranged in a mutually vertical manner, and the member of translational is used for the hollow support seat along relatively described second photodetector, described
The vertical plane of third photodetector is taken exercises.
According to embodiments of the present invention, the member of translational includes two the first guide grooves being mutually parallel, and described two
Sliding is provided at least one second guide groove between one guide groove, and first guide groove mutually hangs down with second guide groove
Directly, second guide groove is slidably connected the hollow support seat.
According to embodiments of the present invention, the two dimensional laser scanning gauge head further includes shell, and the reset components are spring, institute
The one end for stating spring is connected to the hollow support seat, and the other end is connected to the shell.
According to embodiments of the present invention, the survey ball is segment, and the bottom surface of segment is as the laser reflection plane for surveying ball.
According to embodiments of the present invention, the two dimensional laser scanning gauge head further includes shell, second photodetector and/
Or the third photodetector is rotatably mounted in the shell.
Compared with prior art, beneficial effects of the present invention：Two dimensional laser scanning gauge head provided in an embodiment of the present invention, no
Only include the measurement assembly of the change in displacement for measuring support base, further include for measure measuring staff deformation first laser source,
Spectroscope, first photodetector etc. not only measure the direct change in displacement of support base, also measure the deformation of measuring staff, because
This is compared with traditional two-dimentional gauge head, the measurement accuracy higher of two dimensional laser scanning gauge head provided in an embodiment of the present invention, and ties
Structure is simple, is easy to produce in batches, at low cost.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram of the measurement assembly two for measuring measuring staff change in displacement in the embodiment of the present invention.
Fig. 2 is the light path schematic diagram that measuring staff change in displacement is measured in the embodiment of the present invention.
Fig. 3 is the structural schematic diagram of two dimensional laser scanning gauge head provided in an embodiment of the present invention.
Fig. 4 is the structural schematic diagram of member of translational in the embodiment of the present invention.
Fig. 5 is the light path schematic diagram that displacement of ball variation is measured in the embodiment of the present invention.
Fig. 6 be Fig. 5 in the second photodetector rotate by a certain angle after light path schematic diagram.
Fig. 7 is the structural schematic diagram of another two dimensional laser scanning gauge head provided in an embodiment of the present invention.
Fig. 8 is the structural schematic diagram of another two dimensional laser scanning gauge head provided in an embodiment of the present invention.
Main element symbol description
First laser beam 100；First laser source 101；Hollow measuring staff 102；Survey ball 103；Spectroscope 104；First photoelectricity is visited
Survey device 105；Second laser source 106；Second photodetector 107；Hollow support seat 108；Spring 110；Shell 111；Link block
112；Third photodetector 115；Third lasing light emitter 116；First guide groove 117；Second guide groove 118；Sliding block 119；Survey ball
Laser reflection plane 200；Second laser beam 300；The first laser plane of reflection 400 of hollow support seat；Third laser beam
500。
Specific implementation mode
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, the detailed description of the embodiment of the present invention to providing in the accompanying drawings is not intended to limit claimed invention below
Range, but it is merely representative of the selected embodiment of the present invention.Based on the embodiment of the present invention, those skilled in the art are not doing
The every other embodiment obtained under the premise of going out creative work, shall fall within the protection scope of the present invention.
Two dimensional laser scanning gauge head provided in an embodiment of the present invention includes for measuring measuring staff (it can be appreciated that support
Seat, survey ball) two dimension directly change in displacement measurement assembly one, further include for measure measuring staff deformation measurement assembly two.
As a kind of embodiment, Fig. 1 shows the measurement assembly for measuring measuring staff change in displacement in the present embodiment
Two structure, referring to Fig. 1, in the present embodiment, the measurement assembly two for measuring measuring staff deformation includes measuring staff, survey ball 103, the
One lasing light emitter 101, spectroscope 104, the first photodetector 105 and processing system；Wherein, measuring staff is hollow measuring staff 102, surveys ball
103 are set to one end of hollow measuring staff 102, and survey the spherical surface that ball 103 is connect with hollow measuring staff 102 and be provided with laser reflection and put down
Face, the laser reflection plane 200 for surveying ball are located at the inside of hollow measuring staff 102；As a kind of embodiment of simplicity, ball 103 is surveyed
For segment, the bottom surface of segment is as the laser reflection plane for surveying ball.
First laser source 101, for emitting first laser beam 100；
Spectroscope 104 is obliquely installed in the other end of the hollow measuring staff 102, for sending out the first laser source 101
The first laser beam 100 penetrated reflexes to the laser reflection plane 200 for surveying ball, and the laser reflection plane 200 for surveying ball is reflected
Laser beam transmission is to one first photodetector 105；
First photodetector 105 is 2 D photoelectric detector, is transmitted through the spectroscope 104 for receiving
Survey the laser beam that the laser reflection plane 200 of ball reflects；
Processing system, the change in location value of the laser beam received by first photodetector 105, obtains institute
State the deflection of measuring staff.
Two dimensional laser scanning gauge head is mounted on precision measuring instrument, when surveying ball 103 and measured workpiece is in direct contact, surveys ball
103 will produce displacement by resistance, and hollow measuring staff 102 is connect with ball 103 is surveyed, and hollow measuring staff 102 can also deform.Fig. 1 shows
The light path before hollow measuring staff 102 deforms is gone out, Fig. 2 shows 102 deformed light paths of hollow measuring staff.It please refers to Fig.1, Fig. 2, it is empty
Before heart measuring staff 102 deforms, the first laser beam 100 (collimated light beam) that first laser source 101 is sent out is incident on spectroscope 104, point
The first laser beam 100 is reflexed to the laser reflection plane 200 for surveying ball by light microscopic 104, and the laser beam that spectroscope 104 reflects is through surveying
The laser reflection plane 200 of ball is reflected into spectroscope 104 in reverse direction along former road, and spectroscope 104 puts down the laser reflection for surveying ball
The laser beam transmission that face 200 is reflected is to the first photodetector 105.After hollow measuring staff 102 deforms, first laser source 101 is sent out
First laser beam 100 be incident on spectroscope 104, which is reflexed to the laser reflection for surveying ball by spectroscope 104
Plane 200, at this time compared with the input path before the deformation of hollow measuring staff 102, light path does not change, but spectroscope 104 is reflected into
The laser beam for surveying the laser reflection plane 200 of ball falls and is subjected to displacement in the drop point of laser reflection plane 200 for surveying ball；Spectroscope
The laser beam of 104 reflections is reflected into spectroscope 104 through surveying the laser reflection plane 200 of ball, and spectroscope 104 is anti-by the laser for surveying ball
Penetrate plane 200 reflection laser beam transmission to the first photodetector 105, at this time with hollow measuring staff 102 deform before light path phase
Than, reflected light path changes, survey ball laser reflection plane 200 reflect laser beam fall spectroscope 104 drop point generation
Displacement, correspondingly, the drop point that spectroscope 104 is transmitted to the laser beam of the first photodetector 105 are subjected to displacement, as shown,
Definition displacement is L0；Since the change in location of the laser beam received by the first photodetector 105 is by hollow measuring staff 102
Caused by deformation, therefore laser beam received by front and back first photodetector 105 is deformed by measuring hollow measuring staff 102
Change in location, can obtain the displacement variable of hollow measuring staff 102, i.e. the deflection of hollow measuring staff 102.
The change in location value of laser beam received by the first photodetector 105 obtains hollow measuring staff 102 two
The mode of the change in displacement value (deflection of hollow measuring staff) of dimension can there are many, such as calculate hollow measuring staff 102 deform it is front and back
Geometrical relationship, obtain can reflecting the mathematical expression that hollow measuring staff 102 deforms, such as can be by formulaIt calculates
The deflection of hollow measuring staff 102；As a kind of simple and effective way, statistics (i.e. test of many times measures) can be utilized to establish
The relationship of the change in displacement value of hollow measuring staff 102 and the change in location value of the laser beam received by the first photodetector 105
Table, table look-at can be obtained the deformation values of hollow measuring staff 102 when reality measures.
It should be noted that because measuring staff is hollow measuring staff 102, therefore, the laser beam that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
It is incident on spectroscope 104 across hollow measuring staff 102.Since hollow measuring staff 102 causes because surveying ball 103 and being in direct contact with measured workpiece
Deflection be also limited, therefore the aperture of hollow measuring staff 102 is enough to ensure that the laser beam that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
It is incident on spectroscope 104 across hollow measuring staff 102.
The two dimensional laser scanning gauge head provided in the present embodiment, the direct displacement that can not only measure hollow measuring staff 102 become
Change, the deflection of measuring staff can also be measured, can obtain and survey 103 more accurate displacement of ball, corrects gauge head since measuring staff deforms
Caused centre of sphere variable quantity, therefore compared with traditional two dimensional laser scanning gauge head, measurement accuracy higher, and it is simple in structure, easily
It is at low cost in batch production.
For measure hollow measuring staff 102 two dimension directly change in displacement measurement assembly one can there are many embodiment,
For example, by using traditional trigger-type structure, scan-type structure etc., as a kind of citing of simple embodiment, Fig. 3 is shown
A kind of structure of the two dimensional laser scanning gauge head provided in the present embodiment.Referring to Fig. 3, in the present embodiment, for measuring sky
The measurement assembly one of the two dimension of heart measuring staff 102 directly change in displacement includes the survey ball 103, the hollow measuring staff 102, the place
Reason system further includes：
Support base, hollow measuring staff 102 are set to the support base, in the present embodiment, support base bit length cube shape, and support base
A side be provided with the first laser plane of reflection, another side of support base is provided with the second laser plane of reflection；
Second laser source 106, for emitting second laser beam 300, and the second laser beam 300 is incident to the support
The first laser plane of reflection of seat；
Third lasing light emitter 116, for emitting third laser beam 500, and the third laser beam 500 is incident to support base
The second laser plane of reflection；
Second photodetector 107 is one-dimensional photodetector, and the first laser for receiving the support base reflects flat
The laser beam of face reflection；
Third photodetector 115 is one-dimensional photodetector, and the second laser for receiving the support base reflects flat
The laser beam of face reflection；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is used to distinguish institute according to second photodetector 107, the third photodetector 115
The change in displacement value for surveying ball 103 is calculated in the change in location value for receiving laser beam.Second photodetector 107,
Three photodetectors 115 can be one-dimensional photodetector, respectively acquire a direction change in location value, pass through two
The cooperation of photodetector, which collects, surveys ball in two-dimensional direct change in displacement value.
Hollow measuring staff 102 is set to support base, drives hollow measuring staff 102 to move when being moved in order to support base, hollow survey
Bar 102 can be set to the side wall (i.e. the outside of support base) of support base, in order to reduce the body of entire two dimensional laser scanning gauge head
Product, preferably, hollow measuring staff 102 to be set to the inside of support base.As shown in figure 3, as a kind of citing of embodiment,
Support base is hollow support seat 108, and the hollow support seat 108 is equipped with passes through (including hollow measuring staff for the hollow measuring staff 102
102 deformations are front and back to be passed through) through-hole, the hollow measuring staff 102 is set to the sky away from one end of the survey ball 103
In heart support base 108.In addition, hollow support seat 108 to be designed as to hollow rectangular parallelepiped structure, tactical rule is readily produced.
In the present embodiment, two dimensional laser scanning gauge head further includes shell 111, the 107 rotatable installation of the second photodetector
In shell 111.Member of translational makes it be moved in a straight line in two different directions for translating hollow support seat 108.As one
Kind embodiment, specifically, as shown in figure 4, the concrete structure of the member of translational is：It is led including two are mutually parallel first
The second guide groove 118 there are two setting is slided to slot 117, between two the first guide grooves 117, is led on two the second guide grooves 118
It crosses sliding block 119 and is connected to 108 bottom of hollow support seat.The member of translational by the first guide groove 117 for being arranged in a mutually vertical manner, lead
The straight-line displacement of different directions is completed to slot 2 118, the second guide groove 118 can be slided along the first guide groove 117,
Gauge head pedestal 4 can be slided along the second guide groove 118, realize two-dimensional movement.It is in direct contact with measured workpiece when surveying ball 7
When, by resistance, hollow support seat 108 generates sliding with respect to the second guide groove 118, and the second guide groove 118 opposite first is led again
Sliding is generated to slot 117, and then realizes displacement of the hollow support seat 108 in both direction, the plane that the two directions are constituted is
For the two-dimension displacement face of hollow support seat 108.
As a kind of citing of embodiment, reset components are set in shell 111, and reset components are spring 110, survey ball
103, which are subjected to displacement caused hollow support seat 108 by measured workpiece resistance, is subjected to displacement, multiple after gauge head is completed to measure
Hollow support seat 108 can be reset to initial position by position component, be convenient for the accurate measurement of next measured workpiece measurement point.
Second laser source 106 and the position of the second photodetector 107 immobilize, and member of translational can make hollow support
Seat 108 moves in a straight line, when the second laser beam 300 that 108 position of hollow support seat changes, and second laser source 106 emits
The position for being incident on the laser reflection plane of hollow support seat 108 changes, and the first laser reflection through hollow support seat is flat
The position that laser beam after the reflection of face 400 is incident on the second photodetector 107 also accordingly changes, third lasing light emitter
The position that the third laser beam 500 of 116 transmittings is incident on third photodetector 115 also changes, and passes through processing system pair
Second photodetector 107, third photodetector 115 are calculated and are divided to the changing value of different laser beam incoming positions
Analysis, can obtain hollow support seat 108 in the change in displacement value positioned at its straight-line displacement direction.
As shown in Fig. 5 (being based on visual angle reason, only show the optical path change of second laser beam), hollow support seat 108 is horizontal
In moving process, it is assumed that 107 vertical direction of the second photodetector is arranged, and second laser source 106 is obliquely installed in the second photoelectricity
The top of detector 107, and the second laser beam 300 of second laser transmitting and the angle of vertical line are α, when two-dimensional laser is swept
Retouch gauge head in the horizontal direction translation distance be x when, 107 measurement distance of the second photodetector be y, then, the second photodetection
The 108 displacement equations multiple of hollow support seat obtained measured by device 107 is
The two dimensional laser scanning gauge head is mounted on precision measurement instrument, when surveying ball 103 and measured workpiece is in direct contact, by
Displacement is generated to resistance, ball 103 is surveyed and drives hollow support seat 108 that straight-line displacement occurs on member of translational, swash by second
Light source 106, third lasing light emitter 116, the second photodetector 107, third photodetector 115, processing system cooperation, Neng Gouji
The direct displacement for obtaining surveying ball 103 is calculated, it is inclined to survey measured workpiece positioning caused by displacement when ball 103 contacts measured workpiece with compensation
Difference, by the displacement of the hollow support seat 108 obtained on the second photodetector 107, third photodetector 115, i.e.,
Measured workpiece be can get in the more accurate measuring coordinate in 108 straight-line displacement direction of hollow support seat, improve the essence of measurement
Degree.Compared to traditional scanning probe, the two dimensional laser scanning gauge head in the present embodiment simplifies structure, reduces and is produced into
This, is easy to batch machining manufacture.
In order to adjust the amplification factor that the second photodetector 107 measures the gauge head displacement of this two dimensional laser scanning, the second light
Electric explorer 107 is rotatable on the side of shell 111.
Rotatable second photodetector 107 can change its rotation position according to practically necessary measurement accuracy, change
The relative position and angle for becoming the second photodetector 107 and the second laser beam 300 of the transmitting of second laser source 106, to change
Become the amplification factor that the second photodetector 107 measures the two dimensional laser scanning gauge head displacement, meets actual needs.
As shown in fig. 6, rotating and being tilted a certain angle the second photodetector 107, after β, it can adjust and put again
Big multiple, obviously it can be seen that when hollow support seat 108 translates identical distance x in figure, the second photodetection after inclination
The incoming position of two incoming laser beams is changed on device 107, at this point, the spacing of the two isThe displacement equations of the hollow support seat 108 then obtained measured by the second photodetector 107
Multiple isThe angle can be adjusted according to different needs.
Second, third photodetector can be respectively relative to second, third lasing light emitter rotary setting, similarly, second,
Three lasing light emitters can also be respectively relative to second, third photodetector rotary setting, to meet actual needs.
The first photodetector 105, the second photodetector 107, third photodetector used in the present embodiment
115 can be selected common Position-Sensitive Detector (Position Sensitive Detector, abbreviation PSD), belong to semiconductor
Device generally makes PN structure, and operation principle is to be based on lateral photo effect, can be used in the accurate measurement of position coordinates,
Have many advantages, such as that high sensitivity, high-resolution, fast response time and configuration circuit are simple.Position-Sensitive Detector is divided into Two-dimensional Position
Sensing detector and two-dimensional position-sensitive detector are set, in order to cost-effective, the present embodiment selects One Dimensional Position Sensitive Detectors
?.One Dimensional Position Sensitive Detectors, abbreviation one-dimensional PSD, it is detectable go out a bright spot the unique direction of its one surface
Movement.One-dimensional PSD is mounted on to X-axis, Y-axis or Z axis or other directions of shell 111, to obtain it in the position of the direction
Shifting value, and compensated on the measured value of measured workpiece, to obtain the more accurate measured value of the one-dimensional square.
In structure shown in Fig. 4, member of translational includes the guide groove 1 of a pair of parallel setting and at least one guide groove
2 118, and guide groove 1 is vertically arranged with guide groove 2 118, reset components are spring 110, can embodiment party as another kind
Formula, the member of translational and reset components can also be double reed sheet structure, and double reed sheet structure is mainly by two layers of parallel spring structure group
At.Wherein hollow support seat 108 is mounted on a gauge head pedestal mounting plate, and two are arranged on gauge head pedestal mounting plate and mutually puts down
The end connection of capable hollow reed one, the hollow reed one is installed on supporting rack, allows gauge head pedestal mounting plate at two
Under the action of hollow reed one, swing back and forth along perpendicular to the opposite installation supporting rack in the direction of one plane of hollow reed, installation branch
Two parallel reeds two are additionally provided on support, end is connected on fixed tablet, and reed two is mutual with hollow reed one
It is vertically arranged, installation supporting rack is allow to swing back and forth being relatively fixed tablet perpendicular to the direction of two plane of reed, to real
Existing hollow support seat 108 can be moved in a straight line and be replied in mutually perpendicular two hollow reeds one and two in-plane of reed
Movement, to form hollow support seat 108 in the two different rectilinear direction i.e. straight-line displacement of the directions XY and return motions.
Referring to Fig. 7, Fig. 7 shows the knot of the two dimensional laser scanning gauge head of another structure provided in the present embodiment
The structure of structure, two dimensional laser scanning gauge head as shown in figure 3 is compared, in structure shown in Fig. 7, the side of hollow support seat 108
It is not laser reflection plane, i.e., the side is not provided with laser reflective film, and the second photodetector 107 is set to hollow support seat
108 side, the second laser beam 300 that second laser source 106 emits are directly transmitted to the second photodetector 107.
During hollow support seat 108 moves horizontally, it is assumed that the second photodetector 107 is (only with the second photodetector
Illustrated for 107) vertical direction setting, the second laser beam 300 and the angle of vertical line of second laser transmitting are α,
When translation distance is x to two dimensional laser scanning gauge head in the horizontal direction, 107 measurement distance of the second photodetector is y, then,
The 108 displacement equations multiple of hollow support seat obtained measured by second photodetector 107 isIf the second photoelectricity is visited
Device 107 is surveyed to rotate and be tilted a certain angle, after β, when hollow support seat 108 translates identical distance x, second after inclination
The incoming position of two incoming laser beams is changed on photodetector 107, at this point, the spacing of the two is xtan α
Cos β+xtan α sin β cot (alpha-beta), the then position of the hollow support seat 108 obtained measured by the second photodetector 107
Shifting amplification factor is tan α cos β+tan α sin β cot (alpha-beta).
Referring to Fig. 8, Fig. 8 shows the knot of the two dimensional laser scanning gauge head of another structure provided in the present embodiment
Structure, compared with the structure of two dimensional laser scanning gauge head shown in Fig. 7, in structure shown in Fig. 8, second laser source 106 and third
Lasing light emitter 116 is set to the side of hollow support seat 108, and the second laser beam 300 that second laser source 106 emits is directly transmitted to
Second photodetector 107, the third laser beam 500 that third lasing light emitter 116 emits are directly transmitted to third photodetector
115.The principle of structure shown in Fig. 8 is identical as the principle of structure shown in Fig. 7, and so it will not be repeated.
Skilled addressee readily understands that, in the present embodiment, about second, third photodetector and second,
The arrangement of three lasing light emitters has only enumerated 3 kinds, can also there is other many embodiments, is not easy to enumerate herein.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.Meanwhile the present invention's
In description, term " first ", " second ", " third " etc. are only used for distinguishing description, are not understood to indicate or imply relatively heavy
The property wanted.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
In the description of the present invention, it should be noted that the instructions such as term "upper", "lower", "left", "right", "inner", "outside"
Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings or the invention product using when usually put
Orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, do not indicate or imply the indicated device
Or element must have a particular orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.
Claims (10)
1. a kind of two dimensional laser scanning gauge head includes the measurement assembly for measuring the variation of measuring staff two-dimension displacement, the measurement group
Part includes the measuring staff and survey ball, which is characterized in that
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described hollow
The spherical surface of measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the interior of the hollow measuring staff
Portion；The two dimensional laser scanning gauge head further includes：
First laser source, for emitting first laser beam；
Spectroscope is obliquely installed in the other end of the hollow measuring staff, the first laser for emitting the first laser source
Beam reflexes to the laser reflection plane for surveying ball, and by the laser beam transmission of the laser reflection plane reflection for surveying ball to one
First photodetector；
First photodetector is 2 D photoelectric detector, for receiving the survey ball transmitted through the spectroscope
The laser beam of laser reflection plane reflection；
Processing system, the change in location value of the laser beam received by first photodetector obtain described hollow
The deflection of measuring staff.
2. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, and it is anti-that a side of the support base is provided with first laser
Plane is penetrated, another side of the support base is provided with the second laser plane of reflection；
Second laser source, for emitting second laser beam, and the second laser beam is incident to the first laser of the support base
The plane of reflection；
Third lasing light emitter, for emitting third laser beam, and the third laser beam is incident to the second laser of the support base
The plane of reflection；
Second photodetector, the laser beam that the first laser plane of reflection for receiving the support base reflects；
Third photodetector, the laser beam that the second laser plane of reflection for receiving the support base reflects；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively
The change in displacement value for surveying ball is calculated in the change in location value of light beam.
3. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with second laser source and third laser
Source；
The second laser source, for emitting second laser beam；The third lasing light emitter, for emitting third laser beam；
Second photodetector, the second laser beam for receiving the second laser source incidence；Third photodetector,
The third laser beam for receiving the third lasing light emitter incidence；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively
The change in displacement value for surveying ball is calculated in the change in location value of light beam.
4. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the measurement assembly further includes：
Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with the second photodetector and third
Photodetector；
Second laser source, for emitting second laser beam；Third lasing light emitter, for emitting third laser beam；
Second photodetector, the second laser beam for receiving the second laser source incidence；The third light
Electric explorer, the third laser beam for receiving the third lasing light emitter incidence；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to swash according to second photodetector, the third photodetector are received respectively
The change in displacement value for surveying ball is calculated in the change in location value of light beam.
5. according to any two dimensional laser scanning gauge heads of claim 2-4, which is characterized in that the support base is hollow branch
Seat is supportted, the hollow support seat is equipped with the through-hole passed through for the hollow measuring staff, and the hollow measuring staff surveys the one of ball away from described
End is set in the hollow support seat.
6. two dimensional laser scanning gauge head according to claim 5, which is characterized in that the incidence of second photodetector
Face and the plane of incidence of the third photodetector are arranged in a mutually vertical manner, and the member of translational is used for hollow support seat edge
Relatively described second photodetector, the third photodetector vertical plane take exercises.
7. two dimensional laser scanning gauge head according to claim 6, which is characterized in that the member of translational includes two mutual
The first parallel guide groove, between described two first guide grooves sliding be provided at least one second guide groove, described first
Guide groove is mutually perpendicular to second guide groove, and second guide groove is slidably connected the hollow support seat.
8. according to the two dimensional laser scanning gauge head described in claim 7, which is characterized in that the two dimensional laser scanning gauge head is also
Including shell, the reset components are spring, and one end of the spring is connected to the hollow support seat, and the other end is connected to institute
State shell.
9. two dimensional laser scanning gauge head according to claim 1, which is characterized in that the survey ball is segment, the bottom of segment
Face is as the laser reflection plane for surveying ball.
10. two dimensional laser scanning gauge head according to claim 3, which is characterized in that the two dimensional laser scanning gauge head is also
Including shell, second photodetector and/or the third photodetector are rotatably mounted in the shell.
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| CN201610883445.8A CN106323171B (en) | 2016-10-10 | 2016-10-10 | Two dimensional laser scanning gauge head |
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| CN201610883445.8A CN106323171B (en) | 2016-10-10 | 2016-10-10 | Two dimensional laser scanning gauge head |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108592827B (en) * | 2018-06-28 | 2024-06-18 | 福湫科技(深圳)有限公司 | Precise angle measurement sensor and measurement method thereof |
| CN110500958B (en) * | 2019-09-30 | 2021-03-12 | 北方民族大学 | Laser scanning precision measuring head device |
| CN115540734B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Vertical micro-displacement measuring device with 8 reed orthogonally arranged |
| CN115597474B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Rotary angle error measuring device of one-dimensional guiding mechanism |
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